JP4592851B2 - Method for maintaining flatness of thin plate, and laminate using the same - Google Patents
Method for maintaining flatness of thin plate, and laminate using the same Download PDFInfo
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- JP4592851B2 JP4592851B2 JP32189599A JP32189599A JP4592851B2 JP 4592851 B2 JP4592851 B2 JP 4592851B2 JP 32189599 A JP32189599 A JP 32189599A JP 32189599 A JP32189599 A JP 32189599A JP 4592851 B2 JP4592851 B2 JP 4592851B2
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Description
【０００１】
【発明の属する技術分野】
本発明は、厚さの薄いフィルムやガラスの平坦度を維持する方法、並びに、それを用いた、少なくとも薄板と平坦面を有する定盤を密着、貼り合わせた積層体に関するものである。
【０００２】
【従来技術】
電子部品や光学部品の製造において、種々の機能を付与した基板の表面に薄板ガラスを被覆したものを使用している。従来、薄板で被覆された基板を製造するには、例えば、薄板ガラス間に、紙やクリーンペーパ等の合紙を挟み込み、積層させる方法がある。この場合、ガラスの両面が合紙に接触することでキズや汚れが付着する可能性があった。
【０００３】
また、プラスチック等の搬送用のラックケースに収納する場合に、一枚一枚、スリットに収納できるメリットがある反面、搬送中にカタカタとガラスが揺れ動き破損したり、静電的に汚れを吸着させてしまう可能性がある。それを防止するために、スリットを狭くした場合にはガラスの出し入れが困難となり、ハンドリングが困難となる可能性がある。
【０００４】
【発明が解決しようとする課題】
したがって、本発明における課題は、少なくとも薄板と平坦面を有する定盤を密着、貼り合わせた積層体において、その薄板のフィルムやガラスの平坦度を維持することができ、また、薄板にキズや汚れが付着せず、積層体の保管、搬送上でたるみやズレ等が生じず、優れたハンドリング性を有する、薄板の平坦度維持方法及びそれを用いて、貼り合わされた積層体を提供することにある。
【０００５】
【課題を解決するための手段】
本発明では上記課題を解決するために、厚さ数μｍ〜数百μｍの薄板の平坦度を維持する方法において、薄板を平坦面を有する定盤に密着させ、貼り合せるものであり、前記定盤のフラットネスが０．５μｍ以下であり、該定盤の大きさが前記薄板よりも小さく、前記密着は、平坦性を有する面を上にして定盤を置き、該定盤の上に、真ん中に穴が空いている額縁状の合紙を介して薄板を載せ、あるいは、該定盤の上に、揮発性の有機溶媒を介して、上記の合紙と薄板を載せ、端の一部を接触して薄板と定盤との間で真空密着を行い、前記薄板の上に、密着させた別の定盤を重ねて置き、順次、積層させていく、または前記密着は、平坦性を有する面を上にして前記定盤を置き、該定盤の上に薄板を何も介さずに載せ、あるいは、揮発性の有機溶媒を介して載せ、端の一部を接触して薄板と定盤との間で真空密着を行い、前記薄板の上に、真ん中に穴が空いている額縁状の合紙を置き、さらに、その上に密着させた別の定盤を重ねて置き、順次、積層させていくことを特徴とした。
【０００６】
さらに、本発明の積層体は、厚さ数μｍ〜数百μｍの薄板と、フラットネスが０．５μｍ以下である平坦面を有する定盤を真空密着し、また該定盤の大きさが前記薄板よりも小さく、薄板側、または、定盤側を上にして真ん中に穴が空いている額縁状の合紙を置き、さらに、その上に密着させた別の定盤を重ねて置き、順次、積層されたことを特徴とするもので、薄板にキズや汚れが付着せず、積層体の保管、搬送上でたるみやズレ等が生じず、優れたハンドリング性を有する。
【０００７】
【発明の実施の形態】
次に、本発明を実施の形態を挙げて更に詳細に説明する。
図1と図２は、本発明の少なくとも薄板１と、平坦面を有する定盤２を密着、貼り合わせた積層体の実施例を示す概略図である。
【０００８】
すなわち、図１は薄板１を平坦面を有する定盤２に密着して、貼り合せたものであり、薄板１と定盤２とが薄板と定盤の平坦面とが接触し、薄板の平坦度が維持されている。
また、図２では、薄板１と、平坦面を有する定盤２を密着し、薄板１の上の真ん中に穴が空いている額縁状の合紙３を置き、さらに合紙３の上に密着させた別の定盤４を重ねて置き、順次、積層された積層体を示す。なお、図２（ａ）で積層体の平面図を示し、その矢印で示した面の断面図を図２（ｂ）に示す。
【０００９】
本発明の薄板の平坦度維持方法により実施した例を以下に示す。薄板硝子（ＡＦ４５：ショット社製、熱膨張係数４５×１０-7／℃、厚さ１００μｍ、１５０ｍｍ□）を平担面を有する定盤（ＡＬ硝子：旭硝子社製、熱膨張係数３７×１０-7／℃、厚さ６．３５ｍｍ、１４７ｍｍ□）に密着させ貼合させる。この場合、双方共、洗浄済のものを使用し、貼付け時に、異物等の混入を防ぐため、クリーンルーム内の清浄度の高いクリーンベンチ内で行う。
【００１０】
貼り付けは、平坦性を有する面を上にして定盤を置き、その上に薄板を何も介さずに載せる。この時に、位置決めを行ったら、端の一部を接触すると薄板と定盤との間で真空密着が行われる。貼り付きが悪い場合には、揮発性の有機溶媒（異物を排除したキシレン等の溶剤）を適量、介しても良い。また、位置決め中に一旦、薄板と定盤とが貼り付いてしまっても、定盤は薄板より若干小さく、薄板が定盤の端のほうで出ているため、そこから再度、剥離し、位置決めし直すことができる。剥離中に、薄板が帯電してしまった場合には、異物等を吸着し易くなるため、除電ブロワー等で除電を行いながら位置決めを行う。
【００１１】
上記平坦面を有する定盤は、そのフラットネスで０．５μm以下が好ましく、材質は例えば、石英ガラスのものを使用する。このように平面性を高めると、薄板の密着工程で、定盤と薄板が隙間無しに接するので、真空吸引を続けるような操作を伴なうこと無く、密着が保たれる。つまり、定盤の平面性は、貼り合わせ後の製品の表面の平面性を作りだす事と、密着により薄板を固定することで、薄板が定盤以外に何も接触することがないため、積層体の保管、搬送上でのたるみやズレ等が生じない。
【００１２】
また、上記平坦面を有する定盤は、アルミニウム製等のエアチャック上に固定できる。定盤の固定は、機械的に行なう等、真空吸引以外の手段で固定しても構わない。
次に、薄板と定盤とを貼合せた状態で、薄板側を上にして、ＵＶ硬化性の液状の接着剤をディスペンサー等を用いて、１ｃｃ程度滴下する。その上に、機能性フィルムを貼り合せた基板硝子をフィルム側が接着されるようにして積載する。接着剤の膜厚が所望の膜厚となるまで、基板側と基準盤側の双方から加圧し、ＵＶ照射を行うことで接着剤を硬化させる。
【００１３】
さらに接着剤の硬化を高める為、定盤を貼り付けたまま、熱現象（１２０℃、１時間）を行う。この場合、定盤の熱膨張係数を薄板、及び基板硝子と、ある程度合せることが必要である。それにより、定盤と薄板との積層体がカール等で変形することを防止できる。
以上のように、薄板を平坦性を有する定盤に密着させて貼付けることで薄板の平坦度を維持することができる。そして、定盤に密着させて貼付けることで、搬送中に薄板がカールしたり、ずれたりせず、振動に強くなる。
【００１４】
また、定盤と薄板とを貼り合せたものを、搬送、または、保管しておくための積層体について説明する。薄板と定盤とを貼り付け後、薄板側を上にして、その上に真ん中に穴の開いた額縁状の合紙を載せる。その合紙は、真ん中に穴の開いた額縁状の形状であるため、額縁以外のガラス面には、何も接触せず、洗浄したガラス表面を汚すことがない。
さらに、別の貼り合せた定盤を載せ、順次、同様にして積層し、積層体を形成する。
【００１５】
上記の合紙の形状は、例えば、図２、図３に示すようなものが挙げられ、薄板１の四辺の周辺に合紙３が存在し、中央部には穴が開いていて、定盤２と定盤４の間で加圧された薄板１の中央部には直接に接触するものがなく、きずやごみ等の付着がない。
【００１６】
また、合紙の材質としては、合成紙（ポリオレフィン系、ポリスチレン系等）、上質紙、アート紙、軽量コート紙、コート紙、キャストコート紙、微塗工紙、熱転写用紙、壁紙、裏打用紙、合成樹脂又はエマルジョン含浸紙、合成ゴムラテックス含浸紙、合成樹脂内添紙、板紙等、セルロース繊維紙や、ポリオレフィン、ポリ塩化ビニル、ポリエチレンテレフタレート、ポリスチレン、ポリメタクリレート、ポリカーボネート等の各種のプラスチックのフィルム又はシート等が使用出来、又、これらの合成樹脂に白色顔料や充填剤を加えて成膜した白色不透明フィルム或いはミクロボイドを有するシート（発泡シート）等も使用することが出来、特に限定されない。又、上記基材シートの任意の組み合わせによる積層体も使用出来る。合紙の厚みは任意でよく、例えば、１０〜３００μｍ程度の厚みで良い。
【００１７】
最後に、一番下と上には、薄板よりも大きい板硝子等で挟み込み、異物が混入しないようフィルムで覆った後、固定用のゴムバンド等で固定する。上記の一番上と下の板硝子等の大きさは、定盤と薄板及び合紙からなる積層体よりも大きくすることで、積層体が露出して、取扱上、きずやほこり等が付くことを防止できる。これによる積層体に対し、保管、及び搬送テストを行ったところ、ズレや破損、異物の混入等が無く良好であった。
【００１８】
【発明の効果】
（１）本発明の方法は、厚さの薄い硝子板を平坦性を有する定盤に密着させて貼付けることで薄板の平坦度を維持することができる。
（２）定盤に密着させて貼付けることで、搬送中に薄板がカールしたり、ずれたりせず振動に強くなる。また、平坦性を有する定盤側と薄板間は、密着し貼合せてあるため薄板を剥離しない限りは薄板と定盤間には異物等が混入する余地がなく、クリーンな状態が保持でき、さらにキズが入ることもない。
（３）薄板と定盤とを貼り合せた状態では、梱包時、及び、開封時に薄板を破損する危険が少なくハンドリングが容易である。
【００１９】
（４）本発明の方法を用いた積層体は、合紙（クリーン用）が、真ん中に穴の開いた額縁状となっているため、額縁以外のガラス面には、何も接触せず、洗浄したガラス表面を汚すことがない。
（５）本方法を用いた積層体は、薄板と定盤とを貼り合せるため大版化でも、たるみや搬送中のズレ等がなく、積層が容易である。
【図面の簡単な説明】
【図１】薄板と、平坦面を有する定盤を密着、貼り合わせた積層体の実施例を示す概略断面図である。
【図２】薄板と、平坦面を有する定盤を密着、貼り合わせた積層体の実施例を示す概略平面図とその断面図である。
【図３】合紙の形状の例を示す概略平面図である。
【符号の説明】
１ 薄板
２，４ 定盤
３ 合紙[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for maintaining the flatness of a thin film or glass, and to a laminate using the method, in which at least a thin plate and a surface plate having a flat surface are adhered and bonded together.
[0002]
[Prior art]
In the manufacture of electronic components and optical components, a substrate with various functions coated with thin glass is used. Conventionally, in order to manufacture a substrate covered with a thin plate, for example, there is a method in which a sheet of paper or clean paper is sandwiched between thin glass plates and laminated. In this case, there was a possibility that scratches and dirt would adhere due to both surfaces of the glass contacting the slip sheet.
[0003]
In addition, when storing in a rack case for transporting plastic, etc., there is an advantage that it can be stored one by one in the slit. There is a possibility that. In order to prevent this, when the slit is narrowed, it is difficult to put in and out the glass, which may make handling difficult.
[0004]
[Problems to be solved by the invention]
Accordingly, the problem in the present invention is that, in a laminate in which at least a thin plate and a surface plate having a flat surface are closely adhered and bonded, the flatness of the thin film or glass can be maintained, and the thin plate can be scratched or soiled. The present invention provides a method for maintaining the flatness of a thin plate, which has excellent handling properties, and does not cause sagging or misalignment during storage and transportation of the laminate, and to provide a laminate laminated using the method. is there.
[0005]
[Means for Solving the Problems]
In the present invention, in order to solve the above problems, a method of maintaining the flatness of the thickness of several μm~ several hundred μm of the sheet, is adhered to the surface plate having a flat surface sheet, which bonding, the constant The flatness of the board is 0.5 μm or less, the size of the surface plate is smaller than that of the thin plate, the close contact is placed with the surface having flatness on the surface plate , Place a thin plate through a frame-shaped interleaf with a hole in the middle , or place the above interleaf and thin plate on the surface plate via a volatile organic solvent, and part of the edge the contact with have rows vacuum contact between the thin plate and the platen, on top of the thin, placed to overlap another platen is brought into close contact with, successively, it will be stacked, or the adhesion is flatness Place the surface plate with the surface facing up, place the thin plate on the surface plate without any interposition, or volatile organic Place through the medium, contact a part of the edge and make a vacuum contact between the thin plate and the surface plate, on the thin plate, put a frame-like slip sheet with a hole in the middle, and Another feature is that another surface plate that is in close contact is placed on top of each other and sequentially laminated .
[0006]
Furthermore, in the laminate of the present invention, a thin plate having a thickness of several μm to several hundreds of μm and a surface plate having a flat surface having a flatness of 0.5 μm or less are adhered in vacuum, and the size of the surface plate is Place a frame-like slip sheet that is smaller than the thin plate , with the thin plate side or the surface plate side facing up, and a hole in the middle. It is characterized by being laminated, and scratches and dirt do not adhere to the thin plate, and no sagging or misalignment occurs during storage and transportation of the laminate, and has excellent handling properties.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Next, the present invention will be described in more detail with reference to embodiments.
FIG. 1 and FIG. 2 are schematic views showing an embodiment of a laminated body in which at least the
[0008]
That is, FIG. 1 shows a
In FIG. 2, the
[0009]
The example implemented by the flatness maintenance method of the thin plate of this invention is shown below. A thin plate (AF45: manufactured by Schott, thermal expansion coefficient 45 × 10 −7 / ° C., thickness 100 μm, 150 mm □) having a flat surface (AL glass: manufactured by Asahi Glass, thermal expansion coefficient 37 × 10 − 7 / ° C., thickness 6.35 mm, 147 mm □). In this case, both must be cleaned and used in a clean bench with a high degree of cleanliness in a clean room in order to prevent contamination by foreign substances during pasting.
[0010]
In the pasting, a surface plate is placed with the flat surface facing up, and a thin plate is placed on the surface plate without any interposition. At this time, when positioning is performed, when a part of the end is brought into contact, vacuum adhesion is performed between the thin plate and the surface plate. When the sticking is poor, a suitable amount of a volatile organic solvent (a solvent such as xylene from which foreign matters are excluded) may be interposed. In addition, once the thin plate and the surface plate are stuck during positioning, the surface plate is slightly smaller than the thin plate, and the thin plate comes out at the edge of the surface plate. Can be redone. When the thin plate is charged during the peeling, foreign matter or the like is easily adsorbed. Therefore, positioning is performed while performing charge removal with a charge removal blower or the like.
[0011]
The flat plate having the flat surface is preferably 0.5 μm or less in terms of flatness, and the material is, for example, quartz glass. When the flatness is improved in this manner, the surface plate and the thin plate come into contact with each other without a gap in the thin plate contact step, so that the close contact is maintained without an operation that continues vacuum suction. In other words, the flatness of the surface plate is created by creating the flatness of the surface of the product after bonding, and fixing the thin plate by close contact, so that the thin plate does not come in contact with anything other than the surface plate. No slack or misalignment during storage or transportation.
[0012]
The platen having the flat surface can be fixed on an air chuck made of aluminum or the like. The platen may be fixed by means other than vacuum suction, such as mechanically.
Next, with the thin plate and the surface plate bonded together, about 1 cc of UV curable liquid adhesive is dropped using a dispenser or the like with the thin plate side facing up. On top of that, the substrate glass on which the functional film is bonded is stacked so that the film side is bonded. The adhesive is cured by applying pressure and UV irradiation from both the substrate side and the reference board side until the thickness of the adhesive reaches a desired thickness.
[0013]
In order to further increase the curing of the adhesive, a thermal phenomenon (120 ° C., 1 hour) is performed with the surface plate attached. In this case, it is necessary to match the thermal expansion coefficient of the surface plate to some extent with the thin plate and the substrate glass. Thereby, it can prevent that the laminated body of a surface plate and a thin plate deform | transforms by a curl etc.
As described above, the flatness of the thin plate can be maintained by sticking the thin plate to a flat plate having flatness. Then, by sticking to the surface plate and sticking, the thin plate does not curl or shift during conveyance, and is strong against vibration.
[0014]
Moreover, the laminated body for conveying or storing what bonded the surface plate and the thin plate is demonstrated. After pasting the thin plate and the surface plate, place the frame-like slip sheet with a hole in the middle on the thin plate side up. Since the slip sheet has a frame shape with a hole in the middle, the glass surface other than the frame does not come into contact with anything, and the cleaned glass surface is not soiled.
Further, another bonded surface plate is placed and sequentially laminated in the same manner to form a laminated body.
[0015]
Examples of the shape of the slip sheet include those shown in FIGS. 2 and 3. The
[0016]
In addition, as the material of the slip paper, synthetic paper (polyolefin, polystyrene, etc.), fine paper, art paper, lightweight coated paper, coated paper, cast coated paper, fine coated paper, thermal transfer paper, wallpaper, backing paper, Synthetic resin or emulsion impregnated paper, synthetic rubber latex impregnated paper, synthetic resin internal paper, paperboard, cellulose fiber paper, various plastic films such as polyolefin, polyvinyl chloride, polyethylene terephthalate, polystyrene, polymethacrylate, polycarbonate, etc. A sheet or the like can be used, and a white opaque film formed by adding a white pigment or filler to these synthetic resins or a sheet having a microvoid (foamed sheet) can be used, and is not particularly limited. Moreover, the laminated body by the arbitrary combinations of the said base material sheet can also be used. The thickness of the interleaving paper may be arbitrary, for example, a thickness of about 10 to 300 μm.
[0017]
Finally, the bottom and top are sandwiched between plate glasses larger than the thin plate, covered with a film so that no foreign matter is mixed in, and then fixed with a fixing rubber band or the like. The size of the upper and lower plate glass etc. is made larger than that of a laminate consisting of a platen, thin plate, and interleaf, thereby preventing the laminate from being exposed and causing scratches and dust during handling. it can. When the laminated body by this was subjected to storage and a conveyance test, it was satisfactory with no shift, breakage, foreign matter mixing, and the like.
[0018]
【The invention's effect】
(1) The method of the present invention can maintain the flatness of a thin plate by sticking a thin glass plate in close contact with a flat plate having flatness.
(2) By sticking to the surface plate and sticking, the thin plate does not curl or shift during transportation, and is strong against vibration. In addition, since the flat platen side and the thin plate are in close contact with each other, there is no room for foreign matter to enter between the thin plate and the platen unless the thin plate is peeled off, and a clean state can be maintained. In addition, there is no scratch.
(3) In the state where the thin plate and the surface plate are bonded together, handling is easy with little risk of damaging the thin plate during packing and opening.
[0019]
(4) In the laminate using the method of the present invention, the slip sheet (for clean) is in the shape of a frame with a hole in the middle, so nothing is in contact with the glass surface other than the frame, Does not stain the cleaned glass surface.
(5) The laminate using this method is easy to laminate because there is no sagging or misalignment during conveyance even when the plate is enlarged because a thin plate and a surface plate are bonded together.
[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view showing an embodiment of a laminated body in which a thin plate and a surface plate having a flat surface are adhered and bonded together.
FIG. 2 is a schematic plan view and a cross-sectional view showing an example of a laminated body in which a thin plate and a surface plate having a flat surface are adhered and bonded together.
FIG. 3 is a schematic plan view showing an example of the shape of a slip sheet.
[Explanation of symbols]
1
Claims (2)
前記定盤のフラットネスが０．５μｍ以下であり、該定盤の大きさが前記薄板よりも小さく、
前記密着は、平坦性を有する面を上にして定盤を置き、該定盤の上に、真ん中に穴が空いている額縁状の合紙を介して薄板を載せ、あるいは、該定盤の上に、揮発性の有機溶媒を介して、上記の合紙と薄板を載せ、端の一部を接触して薄板と定盤との間で真空密着を行い、前記薄板の上に、密着させた別の定盤を重ねて置き、順次、積層させていく、
または前記密着は、平坦性を有する面を上にして前記定盤を置き、該定盤の上に薄板を何も介さずに載せ、あるいは、揮発性の有機溶媒を介して載せ、端の一部を接触して薄板と定盤との間で真空密着を行い、前記薄板の上に、真ん中に穴が空いている額縁状の合紙を置き、さらに、その上に密着させた別の定盤を重ねて置き、順次、積層させていくことを特徴とする薄板の平坦度維持方法。In a method for maintaining the flatness of a thin plate having a thickness of several μm to several hundreds of μm, the thin plate is brought into close contact with a surface plate having a flat surface, and bonded.
The flatness of the surface plate is 0.5 μm or less, and the size of the surface plate is smaller than the thin plate,
For the close contact, a surface plate having a flat surface is placed on the surface plate, and a thin plate is placed on the surface plate via a frame-shaped slip sheet having a hole in the middle . above, via the volatile organic solvent, placing the slip sheet and the thin plate, it has rows vacuum contact with the contact part with thin and plate edge, on the sheet, the adhesion Laminate the other surface plates that have been stacked, and sequentially stack them.
Alternatively, the close contact may be achieved by placing the surface plate with a flat surface up and placing a thin plate on the surface plate without any thin plate or placing it through a volatile organic solvent. The thin plate and the surface plate are brought into close contact with each other by vacuum contact, and a frame-shaped slip sheet with a hole in the middle is placed on the thin plate, and another fixed sheet is adhered to the frame. A method for maintaining the flatness of a thin plate, characterized in that the boards are stacked and sequentially stacked .
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32189599A JP4592851B2 (en) | 1999-11-12 | 1999-11-12 | Method for maintaining flatness of thin plate, and laminate using the same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32189599A JP4592851B2 (en) | 1999-11-12 | 1999-11-12 | Method for maintaining flatness of thin plate, and laminate using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001139005A JP2001139005A (en) | 2001-05-22 |
| JP4592851B2 true JP4592851B2 (en) | 2010-12-08 |
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| JP32189599A Expired - Fee Related JP4592851B2 (en) | 1999-11-12 | 1999-11-12 | Method for maintaining flatness of thin plate, and laminate using the same |
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| WO2017145974A1 (en) * | 2016-02-22 | 2017-08-31 | 日本マタイ株式会社 | Buffer material for surface protection, and method for producing same |
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| JPH05208841A (en) * | 1992-01-30 | 1993-08-20 | Central Glass Co Ltd | Plied paper for glass |
| JPH05297810A (en) * | 1992-04-21 | 1993-11-12 | Sony Corp | Manufacture of plasma address electrooptic device |
| JP2565172Y2 (en) * | 1992-08-07 | 1998-03-11 | 新東工業株式会社 | Jig equipment for LCD panel manufacturing |
| JPH06247730A (en) * | 1993-02-19 | 1994-09-06 | Asahi Glass Co Ltd | Method for slowly cooling sheet glass |
| JP3267846B2 (en) * | 1994-12-28 | 2002-03-25 | ホーヤ株式会社 | Method for flattening sheet glass and method for manufacturing magnetic recording medium using the method |
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