JP2001139005A - Flatness keeping method for thin plate and laminate using the method - Google Patents
Flatness keeping method for thin plate and laminate using the methodInfo
- Publication number
- JP2001139005A JP2001139005A JP32189599A JP32189599A JP2001139005A JP 2001139005 A JP2001139005 A JP 2001139005A JP 32189599 A JP32189599 A JP 32189599A JP 32189599 A JP32189599 A JP 32189599A JP 2001139005 A JP2001139005 A JP 2001139005A
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- Prior art keywords
- thin plate
- platen
- plate
- flatness
- laminate
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、厚さの薄いフィル
ムやガラスの平坦度を維持する方法、並びに、それを用
いた、少なくとも薄板と平坦面を有する定盤を密着、貼
り合わせた積層体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for maintaining the flatness of a thin film or glass, and a laminated body using the same, in which a platen having at least a thin plate and a flat surface is adhered and bonded. It is about.
【０００２】[0002]
【従来技術】電子部品や光学部品の製造において、種々
の機能を付与した基板の表面に薄板ガラスを被覆したも
のを使用している。従来、薄板で被覆された基板を製造
するには、例えば、薄板ガラス間に、紙やクリーンペー
パ等の合紙を挟み込み、積層させる方法がある。この場
合、ガラスの両面が合紙に接触することでキズや汚れが
付着する可能性があった。2. Description of the Related Art In the production of electronic components and optical components, substrates having various functions are coated with thin glass. 2. Description of the Related Art Conventionally, in order to manufacture a substrate covered with a thin plate, for example, there is a method of sandwiching interleaf paper such as paper or clean paper between thin glass plates and stacking them. In this case, there is a possibility that scratches and dirt may be attached when both surfaces of the glass come into contact with the slip sheet.
【０００３】また、プラスチック等の搬送用のラックケ
ースに収納する場合に、一枚一枚、スリットに収納でき
るメリットがある反面、搬送中にカタカタとガラスが揺
れ動き破損したり、静電的に汚れを吸着させてしまう可
能性がある。それを防止するために、スリットを狭くし
た場合にはガラスの出し入れが困難となり、ハンドリン
グが困難となる可能性がある。[0003] In addition, when stored in a rack case for transport of plastics or the like, there is an advantage that each of them can be stored in a slit one by one. May be adsorbed. If the slit is narrowed to prevent this, it is difficult to put glass in and out, which may make handling difficult.
【０００４】[0004]
【発明が解決しようとする課題】したがって、本発明に
おける課題は、少なくとも薄板と平坦面を有する定盤を
密着、貼り合わせた積層体において、その薄板のフィル
ムやガラスの平坦度を維持することができ、また、薄板
にキズや汚れが付着せず、積層体の保管、搬送上でたる
みやズレ等が生じず、優れたハンドリング性を有する、
薄板の平坦度維持方法及びそれを用いて、貼り合わされ
た積層体を提供することにある。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to maintain the flatness of a thin plate film or glass in a laminated body in which at least a thin plate and a surface plate having a flat surface are closely adhered and bonded. It also has excellent handling properties, without scratches or dirt adhering to the thin plate, storage of the laminate, no sagging or misalignment in transportation, etc.
It is an object of the present invention to provide a method for maintaining flatness of a thin plate and a laminated body bonded by using the method.
【０００５】[0005]
【課題を解決するための手段】本発明では上記課題を解
決するために、厚さ数μｍ〜数百μｍの薄板の平坦度を
維持する方法において、薄板を平坦面を有する定盤に密
着させ、貼り合せることを特徴とした。また、前記の薄
板を貼り合せた定盤において、薄板側、または定盤側を
上にして真ん中に穴が空いている額縁状の合紙を置き、
さらに、その上に密着させた別の定盤を重ねて置き、順
次、積層させていく方法を見出した。In order to solve the above-mentioned problems, the present invention provides a method for maintaining the flatness of a thin plate having a thickness of several μm to several hundred μm, wherein the thin plate is brought into close contact with a surface plate having a flat surface. It was characterized by laminating. In addition, in the platen to which the thin plate is attached, put a frame-shaped interleaving paper having a hole in the middle with the thin plate side or the platen side facing up,
Furthermore, they found a method in which another surface plate closely adhered to the plate was placed thereon, and the layers were sequentially laminated.
【０００６】さらに、本発明の積層体は、厚さ数μｍ〜
数百μｍの薄板と、平坦面を有する定盤を密着し、薄板
側、または、定盤側を上にして真ん中に穴が空いている
額縁状の合紙を置き、さらに、その上に密着させた別の
定盤を重ねて置き、順次、積層されたものにより、薄板
にキズや汚れが付着せず、積層体の保管、搬送上でたる
みやズレ等が生じず、優れたハンドリング性を有する。Furthermore, the laminate of the present invention has a thickness of several μm
A thin plate of several hundred μm and a surface plate with a flat surface are brought into close contact with each other, and a thin frame or a plate-shaped interleaving paper with a hole in the center is placed with the surface of the plate facing up, and further adhered on it Another platen is placed on top of the stack, and the layers are sequentially laminated, so that scratches and dirt do not adhere to the thin plate, and there is no sagging or misalignment in storage and transport of the laminate, and excellent handling performance is achieved. Have.
【０００７】[0007]
【発明の実施の形態】次に、本発明を実施の形態を挙げ
て更に詳細に説明する。図1と図２は、本発明の少なく
とも薄板１と、平坦面を有する定盤２を密着、貼り合わ
せた積層体の実施例を示す概略図である。Next, the present invention will be described in more detail with reference to embodiments. FIG. 1 and FIG. 2 are schematic views showing an embodiment of a laminated body of the present invention in which at least a thin plate 1 and a surface plate 2 having a flat surface are adhered and bonded.
【０００８】すなわち、図１は薄板１を平坦面を有する
定盤２に密着して、貼り合せたものであり、薄板１と定
盤２とが薄板と定盤の平坦面とが接触し、薄板の平坦度
が維持されている。また、図２では、薄板１と、平坦面
を有する定盤２を密着し、薄板１の上の真ん中に穴が空
いている額縁状の合紙３を置き、さらに合紙３の上に密
着させた別の定盤４を重ねて置き、順次、積層された積
層体を示す。なお、図２（ａ）で積層体の平面図を示
し、その矢印で示した面の断面図を図２（ｂ）に示す。That is, FIG. 1 shows a thin plate 1 adhered to and adhered to a surface plate 2 having a flat surface, and the thin plate 1 and the surface plate 2 are brought into contact with the flat surface of the thin plate, The flatness of the thin plate is maintained. In FIG. 2, the thin plate 1 and the surface plate 2 having a flat surface are brought into close contact with each other, a frame-shaped interleaf paper 3 having a hole in the center of the thin plate 1 is placed thereon, Another stacked platen 4 is placed on top of another, and a stacked body is shown in order. Note that FIG. 2A shows a plan view of the laminate, and FIG. 2B shows a cross-sectional view of the surface indicated by the arrow.
【０００９】本発明の薄板の平坦度維持方法により実施
した例を以下に示す。薄板硝子（ＡＦ４５：ショット社
製、熱膨張係数４５×１０-7／℃、厚さ１００μｍ、１
５０ｍｍ□）を平担面を有する定盤（ＡＬ硝子：旭硝子
社製、熱膨張係数３７×１０ -7／℃、厚さ６．３５ｍ
ｍ、１４７ｍｍ□）に密着させ貼合させる。この場合、
双方共、洗浄済のものを使用し、貼付け時に、異物等の
混入を防ぐため、クリーンルーム内の清浄度の高いクリ
ーンベンチ内で行う。According to the method for maintaining flatness of a thin plate of the present invention.
An example is shown below. Sheet glass (AF45: Shot Company)
Made, thermal expansion coefficient 45 × 10-7/ ° C, thickness 100μm, 1
50mm □) surface plate with flat surface (AL Glass: Asahi Glass)
Company, thermal expansion coefficient 37 × 10 -7/ ° C, thickness 6.35m
m, 147 mm □). in this case,
Use a cleaned one for both,
In order to prevent contamination, a highly clean
On the bench.
【００１０】貼り付けは、平坦性を有する面を上にして
定盤を置き、その上に薄板を何も介さずに載せる。この
時に、位置決めを行ったら、端の一部を接触すると薄板
と定盤との間で真空密着が行われる。貼り付きが悪い場
合には、揮発性の有機溶媒（異物を排除したキシレン等
の溶剤）を適量、介しても良い。また、位置決め中に一
旦、薄板と定盤とが貼り付いてしまっても、定盤は薄板
より若干小さく、薄板が定盤の端のほうで出ているた
め、そこから再度、剥離し、位置決めし直すことができ
る。剥離中に、薄板が帯電してしまった場合には、異物
等を吸着し易くなるため、除電ブロワー等で除電を行い
ながら位置決めを行う。[0010] In the pasting, a platen is placed with the flat surface facing up, and a thin plate is placed thereon without any intervention. At this time, when the positioning is performed, when a part of the end is brought into contact, vacuum contact is performed between the thin plate and the surface plate. If sticking is poor, a suitable amount of a volatile organic solvent (solvent such as xylene from which foreign substances have been removed) may be interposed. In addition, even if the thin plate and the surface plate stick once during positioning, the surface plate is slightly smaller than the thin plate, and the thin plate protrudes at the end of the surface plate. You can do it again. If the thin plate is charged during peeling, foreign matter and the like are easily adsorbed. Therefore, the positioning is performed while performing static elimination with a static elimination blower or the like.
【００１１】上記平坦面を有する定盤は、そのフラット
ネスで０．５μm以下が好ましく、材質は例えば、石英
ガラスのものを使用する。このように平面性を高める
と、薄板の密着工程で、定盤と薄板が隙間無しに接する
ので、真空吸引を続けるような操作を伴なうこと無く、
密着が保たれる。つまり、定盤の平面性は、貼り合わせ
後の製品の表面の平面性を作りだす事と、密着により薄
板を固定することで、薄板が定盤以外に何も接触するこ
とがないため、積層体の保管、搬送上でのたるみやズレ
等が生じない。The surface plate having the flat surface preferably has a flatness of 0.5 μm or less, and is made of, for example, quartz glass. When the flatness is increased in this manner, the platen and the thin plate are brought into contact with no gap in the thin plate contacting step, so that there is no operation such as continuing vacuum suction,
Adhesion is maintained. In other words, the flatness of the platen is to create the flatness of the surface of the product after bonding, and to fix the thin plate by close contact, so that the thin plate does not come in contact with anything other than the platen. There is no sagging or misalignment during storage or transportation of the product.
【００１２】また、上記平坦面を有する定盤は、アルミ
ニウム製等のエアチャック上に固定できる。定盤の固定
は、機械的に行なう等、真空吸引以外の手段で固定して
も構わない。次に、薄板と定盤とを貼合せた状態で、薄
板側を上にして、ＵＶ硬化性の液状の接着剤をディスペ
ンサー等を用いて、１ｃｃ程度滴下する。その上に、機
能性フィルムを貼り合せた基板硝子をフィルム側が接着
されるようにして積載する。接着剤の膜厚が所望の膜厚
となるまで、基板側と基準盤側の双方から加圧し、ＵＶ
照射を行うことで接着剤を硬化させる。The platen having the flat surface can be fixed on an air chuck made of aluminum or the like. The platen may be fixed by means other than vacuum suction, such as mechanically. Next, in a state where the thin plate and the platen are stuck together, about 1 cc of a UV-curable liquid adhesive is dropped using a dispenser or the like with the thin plate side facing upward. On top of this, a substrate glass to which a functional film has been bonded is stacked so that the film side is bonded. Apply pressure from both the substrate side and the reference panel side until the adhesive film thickness reaches the desired film thickness, and
The irradiation cures the adhesive.
【００１３】さらに接着剤の硬化を高める為、定盤を貼
り付けたまま、熱現象（１２０℃、１時間）を行う。こ
の場合、定盤の熱膨張係数を薄板、及び基板硝子と、あ
る程度合せることが必要である。それにより、定盤と薄
板との積層体がカール等で変形することを防止できる。
以上のように、薄板を平坦性を有する定盤に密着させて
貼付けることで薄板の平坦度を維持することができる。
そして、定盤に密着させて貼付けることで、搬送中に薄
板がカールしたり、ずれたりせず、振動に強くなる。In order to further enhance the curing of the adhesive, a heat phenomenon (120 ° C., 1 hour) is performed with the platen attached. In this case, it is necessary to match the thermal expansion coefficient of the surface plate with the thin plate and the substrate glass to some extent. Thereby, it is possible to prevent the laminate of the platen and the thin plate from being deformed by curling or the like.
As described above, the flatness of the thin plate can be maintained by closely attaching the thin plate to the platen having flatness.
Then, by sticking the thin plate closely to the surface plate, the thin plate does not curl or shift during transportation, and becomes strong against vibration.
【００１４】また、定盤と薄板とを貼り合せたものを、
搬送、または、保管しておくための積層体について説明
する。薄板と定盤とを貼り付け後、薄板側を上にして、
その上に真ん中に穴の開いた額縁状の合紙を載せる。そ
の合紙は、真ん中に穴の開いた額縁状の形状であるた
め、額縁以外のガラス面には、何も接触せず、洗浄した
ガラス表面を汚すことがない。さらに、別の貼り合せた
定盤を載せ、順次、同様にして積層し、積層体を形成す
る。[0014] Further, the product obtained by laminating the surface plate and the thin plate is
A laminate for transport or storage will be described. After pasting the thin plate and the platen, with the thin plate side up,
On top of that, place a framed interleaf with a hole in the middle. Since the slip sheet has a frame shape with a hole in the center, nothing touches the glass surface other than the frame, and the cleaned glass surface is not stained. Further, another bonded platen is placed and sequentially laminated in the same manner to form a laminate.
【００１５】上記の合紙の形状は、例えば、図２、図３
に示すようなものが挙げられ、薄板１の四辺の周辺に合
紙３が存在し、中央部には穴が開いていて、定盤２と定
盤４の間で加圧された薄板１の中央部には直接に接触す
るものがなく、きずやごみ等の付着がない。The shape of the above-mentioned slip sheet is, for example, as shown in FIGS.
The interleaf paper 3 is present around the four sides of the thin plate 1, a hole is formed in the center, and the thin plate 1 is pressed between the platen 2 and the platen 4. There is nothing in direct contact with the central part, and there is no adhesion of flaws or dust.
【００１６】また、合紙の材質としては、合成紙（ポリ
オレフィン系、ポリスチレン系等）、上質紙、アート
紙、軽量コート紙、コート紙、キャストコート紙、微塗
工紙、熱転写用紙、壁紙、裏打用紙、合成樹脂又はエマ
ルジョン含浸紙、合成ゴムラテックス含浸紙、合成樹脂
内添紙、板紙等、セルロース繊維紙や、ポリオレフィ
ン、ポリ塩化ビニル、ポリエチレンテレフタレート、ポ
リスチレン、ポリメタクリレート、ポリカーボネート等
の各種のプラスチックのフィルム又はシート等が使用出
来、又、これらの合成樹脂に白色顔料や充填剤を加えて
成膜した白色不透明フィルム或いはミクロボイドを有す
るシート（発泡シート）等も使用することが出来、特に
限定されない。又、上記基材シートの任意の組み合わせ
による積層体も使用出来る。合紙の厚みは任意でよく、
例えば、１０〜３００μｍ程度の厚みで良い。Examples of the material of the interleaving paper include synthetic paper (polyolefin, polystyrene, etc.), high quality paper, art paper, lightweight coated paper, coated paper, cast coated paper, finely coated paper, thermal transfer paper, wallpaper, Backing paper, synthetic resin or emulsion impregnated paper, synthetic rubber latex impregnated paper, synthetic resin internal paper, paperboard, etc., cellulose fiber paper, and various plastics such as polyolefin, polyvinyl chloride, polyethylene terephthalate, polystyrene, polymethacrylate, polycarbonate, etc. And a white opaque film formed by adding a white pigment or a filler to these synthetic resins, or a sheet having microvoids (foamed sheet), etc., and is not particularly limited. . Also, a laminate formed by any combination of the above base sheets can be used. The thickness of the slip sheet may be arbitrary,
For example, the thickness may be about 10 to 300 μm.
【００１７】最後に、一番下と上には、薄板よりも大き
い板硝子等で挟み込み、異物が混入しないようフィルム
で覆った後、固定用のゴムバンド等で固定する。上記の
一番上と下の板硝子等の大きさは、定盤と薄板及び合紙
からなる積層体よりも大きくすることで、積層体が露出
して、取扱上、きずやほこり等が付くことを防止でき
る。これによる積層体に対し、保管、及び搬送テストを
行ったところ、ズレや破損、異物の混入等が無く良好で
あった。Finally, the lowermost and upper portions are sandwiched by a sheet glass or the like larger than a thin plate, covered with a film so as to prevent foreign matter from entering, and fixed with a fixing rubber band or the like. The size of the top and bottom sheet glass, etc. above is made larger than the laminate consisting of a platen, a thin plate, and a slip sheet to prevent the laminate from being exposed and to prevent fouling and dust from being handled. it can. When the storage and transport tests were performed on the resulting laminate, the laminate was good with no displacement, breakage, or contamination with foreign matter.
【００１８】[0018]
【発明の効果】（１）本発明の方法は、厚さの薄い硝子
板を平坦性を有する定盤に密着させて貼付けることで薄
板の平坦度を維持することができる。 （２）定盤に密着させて貼付けることで、搬送中に薄板
がカールしたり、ずれたりせず振動に強くなる。また、
平坦性を有する定盤側と薄板間は、密着し貼合せてある
ため薄板を剥離しない限りは薄板と定盤間には異物等が
混入する余地がなく、クリーンな状態が保持でき、さら
にキズが入ることもない。 （３）薄板と定盤とを貼り合せた状態では、梱包時、及
び、開封時に薄板を破損する危険が少なくハンドリング
が容易である。(1) According to the method of the present invention, the flatness of a thin glass plate can be maintained by closely attaching a thin glass plate to a flat surface plate having flatness. (2) By adhering the thin plate in close contact with the surface plate, the thin plate does not curl or shift during transportation, and thus becomes strong against vibration. Also,
The flat platen side and the thin plate are closely adhered and bonded together, so there is no room for foreign matter to enter between the thin plate and the platen unless the thin plate is peeled off, and a clean state can be maintained. Never enter. (3) In a state where the thin plate and the platen are stuck together, there is little risk of damaging the thin plate at the time of packing and opening, and handling is easy.
【００１９】（４）本発明の方法を用いた積層体は、合
紙（クリーン用）が、真ん中に穴の開いた額縁状となっ
ているため、額縁以外のガラス面には、何も接触せず、
洗浄したガラス表面を汚すことがない。 （５）本方法を用いた積層体は、薄板と定盤とを貼り合
せるため大版化でも、たるみや搬送中のズレ等がなく、
積層が容易である。(4) In the laminate using the method of the present invention, since the interleaving paper (for clean) has a frame shape with a hole in the center, nothing comes into contact with the glass surface other than the frame. Without
Does not stain the cleaned glass surface. (5) The laminate using this method has no sagging or misalignment during transportation, even when enlarging the plate for laminating a thin plate and a surface plate.
Easy lamination.
【図１】薄板と、平坦面を有する定盤を密着、貼り合わ
せた積層体の実施例を示す概略断面図である。FIG. 1 is a schematic cross-sectional view showing an example of a laminated body in which a thin plate and a surface plate having a flat surface are closely adhered and bonded.
【図２】薄板と、平坦面を有する定盤を密着、貼り合わ
せた積層体の実施例を示す概略平面図とその断面図であ
る。FIGS. 2A and 2B are a schematic plan view and a cross-sectional view showing an example of a laminated body in which a thin plate and a surface plate having a flat surface are closely adhered and bonded.
【図３】合紙の形状の例を示す概略平面図である。FIG. 3 is a schematic plan view showing an example of the shape of a slip sheet.
１ 薄板 ２，４ 定盤 ３ 合紙 1 Thin plate 2, 4 Surface plate 3 Insert paper
Claims (3)
維持する方法において、薄板を平坦面を有する定盤に密
着させ、貼り合せることを特徴とする薄板の平坦度維持
方法。1. A method for maintaining the flatness of a thin plate having a thickness of several μm to several hundred μm, wherein the thin plate is brought into close contact with a surface plate having a flat surface and bonded.
薄板側、または、定盤側を上にして真ん中に穴が空いて
いる額縁状の合紙を置き、さらに、その上に密着させた
別の定盤を重ねて置き、順次、積層させていくことを特
徴とする請求項１に記載する薄板の平坦度維持方法。2. In the surface plate to which the thin plates are attached,
Place the frame-shaped interleaving paper with a hole in the center with the thin plate side or the platen side facing up, and further place another closely adhered platen on top of it, and stack them sequentially The method for maintaining flatness of a thin plate according to claim 1, wherein:
を有する定盤を密着し、薄板側、または、定盤側を上に
して真ん中に穴が空いている額縁状の合紙を置き、さら
に、その上に密着させた別の定盤を重ねて置き、順次、
積層されたことを特徴とする積層体。3. A thin plate having a thickness of several μm to several hundred μm and a platen having a flat surface are closely adhered to each other, and a thin plate or a frame-shaped plate having a hole in the center with the platen side up. Place the paper, and then place another platen on top of it,
A laminate characterized by being laminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32189599A JP4592851B2 (en) | 1999-11-12 | 1999-11-12 | Method for maintaining flatness of thin plate, and laminate using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32189599A JP4592851B2 (en) | 1999-11-12 | 1999-11-12 | Method for maintaining flatness of thin plate, and laminate using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001139005A true JP2001139005A (en) | 2001-05-22 |
| JP4592851B2 JP4592851B2 (en) | 2010-12-08 |
Family
ID=18137608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32189599A Expired - Fee Related JP4592851B2 (en) | 1999-11-12 | 1999-11-12 | Method for maintaining flatness of thin plate, and laminate using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4592851B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017145974A1 (en) * | 2016-02-22 | 2017-08-31 | 日本マタイ株式会社 | Buffer material for surface protection, and method for producing same |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05208841A (en) * | 1992-01-30 | 1993-08-20 | Central Glass Co Ltd | Plied paper for glass |
| JPH05297810A (en) * | 1992-04-21 | 1993-11-12 | Sony Corp | Manufacture of plasma address electrooptic device |
| JPH0616938U (en) * | 1992-08-07 | 1994-03-04 | 新東工業株式会社 | Jig device for LCD panel manufacturing |
| JPH06247730A (en) * | 1993-02-19 | 1994-09-06 | Asahi Glass Co Ltd | Method for slowly cooling sheet glass |
| JPH08231233A (en) * | 1994-12-28 | 1996-09-10 | Hoya Corp | Method for flattening sheet glass and production of magnetic recording medium using the method |
-
1999
- 1999-11-12 JP JP32189599A patent/JP4592851B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05208841A (en) * | 1992-01-30 | 1993-08-20 | Central Glass Co Ltd | Plied paper for glass |
| JPH05297810A (en) * | 1992-04-21 | 1993-11-12 | Sony Corp | Manufacture of plasma address electrooptic device |
| JPH0616938U (en) * | 1992-08-07 | 1994-03-04 | 新東工業株式会社 | Jig device for LCD panel manufacturing |
| JPH06247730A (en) * | 1993-02-19 | 1994-09-06 | Asahi Glass Co Ltd | Method for slowly cooling sheet glass |
| JPH08231233A (en) * | 1994-12-28 | 1996-09-10 | Hoya Corp | Method for flattening sheet glass and production of magnetic recording medium using the method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017145974A1 (en) * | 2016-02-22 | 2017-08-31 | 日本マタイ株式会社 | Buffer material for surface protection, and method for producing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4592851B2 (en) | 2010-12-08 |
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