JP4554512B2 - 検出器及び付随コリメータのアレイを具えたトモグラフィックエネルギー分散型x線回折装置 - Google Patents
検出器及び付随コリメータのアレイを具えたトモグラフィックエネルギー分散型x線回折装置 Download PDFInfo
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- JP4554512B2 JP4554512B2 JP2005500165A JP2005500165A JP4554512B2 JP 4554512 B2 JP4554512 B2 JP 4554512B2 JP 2005500165 A JP2005500165 A JP 2005500165A JP 2005500165 A JP2005500165 A JP 2005500165A JP 4554512 B2 JP4554512 B2 JP 4554512B2
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- JP
- Japan
- Prior art keywords
- collimator
- detector
- array
- sample
- collimators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/419—Imaging computed tomograph
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pulmonology (AREA)
- Radiology & Medical Imaging (AREA)
- Theoretical Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Description
試料のための支持体と、
支持体に設置された試料に入射放射線を当てるための放射線源と、
入射方向に対して所定角度で試料を通過した放射線を検出するために設置された検出手段とを具え、
検出手段は、エネルギー分散型検出器の2次元アレイと、コリメータの2次元アレイとを具え、一方向のみにおける試料支持体の走査動作によって試料の3次元領域の走査が可能であり、
各エネルギー分散型検出器には、個々のコリメータが関連付けられており、
コリメータアレイの各コリメータは、整列した複数のコリメータアパーチャを具え、
該複数のコリメータアパーチャは、通過した放射線の方向に沿って間隔を空けて配置された個々のコリメータ板又は箔として形成されており、
検出器の2次元アレイおよびコリメータの2次元アレイは、試料の2次元画像を提供するように構成されている、トモグラフィックエネルギー分散型回折撮像装置が提供される。
図1は、周知のTEDDIシステムの概略図である。例えばシンクロトロン又はX線チューブによって生成することができる白色X線ビーム1が、コリメータ2により平行にされて所望の空間分解能のビーム3を生成する。典型的なシステムにおいて、該ビームは50μm2の断面を有する。通常50μm程度の適度に小さなステップで直交する3方向(x、y及びz方向)に試料を走査することができる支持体(図示省略)に設置された試料4に平行ビーム3を当てる。偏向ビームコリメータ5及びエネルギー分散型検出器6が、入射ビーム3に対して2θの角度で配置される(対象としている試料及び所望の構造分解能に適した角度が、ブラッグの法則の適用による周知の方法で選択される)。回折試料体積は、入射ビーム3の進路とコリメータ5によって受け取られた回折ビーム8とによって形成される菱形7である。該菱形の大きさが空間分解能を決定する。
tan(α/2)=(d/2)/(L/2)、つまり、
α=2tan−1(d/L)・・・・・・(1)
β=2tan−1(d/t)
となる。
α=2tan−1(d/L)
となる。
Tan(β/2)=s/FS、つまり、
FS=s/tan(β/2)・・・・・・(2)
tan(β/2)の代わりに(d/2)/(t/2)を用いると、
FS=(st)/d・・・・・・(3)
Claims (7)
- 試料のための支持体と、
支持体に設置された試料に入射放射線を当てるための放射線源と、
入射方向に対して所定角度で試料を通過した放射線を検出するために設置された検出手段とを具え、
検出手段は、エネルギー分散型検出器の2次元アレイと、コリメータの2次元アレイとを具え、一方向のみにおける試料支持体の走査動作によって試料の3次元領域の走査が可能であり、
各エネルギー分散型検出器には、個々のコリメータが関連付けられており、
コリメータアレイの各コリメータは、整列した複数のコリメータアパーチャを具え、
該複数のコリメータアパーチャは、通過した放射線の方向に沿って間隔を空けて配置された個々のコリメータ板又は箔として形成されており、
検出器の2次元アレイおよびコリメータの2次元アレイは、試料の2次元画像を提供するように構成されている、トモグラフィックエネルギー分散型回折撮像装置。 - 検出器アレイは、1以上の半導体検出器チップを具え、
各半導体検出器チップは、個々の検出器ピクセルのアレイを具え、個々の検出器ピクセルはそれぞれ1つの検出器を具えている請求項1に記載の装置。 - 複数のコリメータアパーチャを各コリメータ板又は箔に設けて個々のコリメータのアレイを形成している請求項1に記載の装置。
- 隣り合うコリメータ板又は箔は、前記アレイの隣り合うコリメータ間のクロストークを避けるように間隔がおかれている請求項3に記載の装置。
- 前記角度は0と180°との間である請求項1〜4の何れかに記載の装置。
- 前記角度は調整可能である請求項1〜5の何れかに記載の装置。
- 放射線源には、入射放射線を扇形ビームにするための入射放射線コリメータが設けられている請求項1〜6の何れかに記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0312499.7A GB0312499D0 (en) | 2003-05-31 | 2003-05-31 | Tomographic energy dispersive diffraction imaging system |
PCT/GB2003/005281 WO2004106906A1 (en) | 2003-05-31 | 2003-12-04 | Tomographic energy dispersive x-ray diffraction apparatus comprising an array of detectors and associated collimators |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006526138A JP2006526138A (ja) | 2006-11-16 |
JP2006526138A5 JP2006526138A5 (ja) | 2007-01-18 |
JP4554512B2 true JP4554512B2 (ja) | 2010-09-29 |
Family
ID=9959089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005500165A Expired - Fee Related JP4554512B2 (ja) | 2003-05-31 | 2003-12-04 | 検出器及び付随コリメータのアレイを具えたトモグラフィックエネルギー分散型x線回折装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7564947B2 (ja) |
EP (1) | EP1629267A1 (ja) |
JP (1) | JP4554512B2 (ja) |
AU (1) | AU2003290226A1 (ja) |
GB (1) | GB0312499D0 (ja) |
WO (1) | WO2004106906A1 (ja) |
Families Citing this family (16)
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CN101506715A (zh) * | 2005-06-29 | 2009-08-12 | 瑞弗莱克塞特公司 | 用来在微透镜阵列薄膜中雕刻孔的方法和装置 |
EP1947478A3 (en) * | 2006-12-01 | 2015-01-07 | Mats Danielsson | New system and method for imaging using radio-labeled substances, especially suitable for studying of biological processes |
US7375338B1 (en) * | 2007-03-07 | 2008-05-20 | General Electric Company | Swappable collimators method and system |
US7889845B2 (en) * | 2007-12-20 | 2011-02-15 | Morpho Detection, Inc. | Secondary collimator and method of assembling the same |
US7742574B2 (en) * | 2008-04-11 | 2010-06-22 | Mats Danielsson | Approach and device for focusing x-rays |
US7813477B2 (en) | 2009-03-05 | 2010-10-12 | Morpho Detection, Inc. | X-ray diffraction device, object imaging system, and method for operating a security system |
US8204174B2 (en) | 2009-06-04 | 2012-06-19 | Nextray, Inc. | Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources and by use of facing sides of adjacent monochromator crystals |
WO2010141735A2 (en) | 2009-06-04 | 2010-12-09 | Nextray, Inc. | Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods |
WO2015012850A1 (en) * | 2013-07-25 | 2015-01-29 | Analogic Corporation | Generation of diffraction signature of item within object |
US9939393B2 (en) | 2015-09-28 | 2018-04-10 | United Technologies Corporation | Detection of crystallographic properties in aerospace components |
FR3046240A1 (fr) * | 2015-12-24 | 2017-06-30 | Commissariat Energie Atomique | Procede d’analyse d’un objet par diffraction x |
WO2018102792A1 (en) * | 2016-12-02 | 2018-06-07 | Ningbo Infinite Materials Technology Co., Ltd | X-ray diffraction and x-ray spectroscopy method and related apparatus |
SE545585C2 (en) * | 2018-10-19 | 2023-10-31 | Commw Scient Ind Res Org | An energy dispersive x-ray diffraction analyser having an improved reflection geometry |
CN111380880B (zh) | 2018-12-28 | 2023-04-07 | 中国兵器工业第五九研究所 | 衍射装置及无损检测工件内部晶体取向均匀性的方法 |
JP7165400B2 (ja) * | 2019-03-19 | 2022-11-04 | 株式会社リガク | X線分析装置 |
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2003
- 2003-05-31 GB GBGB0312499.7A patent/GB0312499D0/en not_active Ceased
- 2003-12-04 WO PCT/GB2003/005281 patent/WO2004106906A1/en active Application Filing
- 2003-12-04 US US10/558,699 patent/US7564947B2/en not_active Expired - Fee Related
- 2003-12-04 JP JP2005500165A patent/JP4554512B2/ja not_active Expired - Fee Related
- 2003-12-04 AU AU2003290226A patent/AU2003290226A1/en not_active Abandoned
- 2003-12-04 EP EP03782591A patent/EP1629267A1/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
JP2006526138A (ja) | 2006-11-16 |
US7564947B2 (en) | 2009-07-21 |
GB0312499D0 (en) | 2003-07-09 |
WO2004106906A1 (en) | 2004-12-09 |
US20060251215A1 (en) | 2006-11-09 |
EP1629267A1 (en) | 2006-03-01 |
AU2003290226A1 (en) | 2005-01-21 |
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