JP4530868B2 - ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ - Google Patents
ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ Download PDFInfo
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- JP4530868B2 JP4530868B2 JP2005036765A JP2005036765A JP4530868B2 JP 4530868 B2 JP4530868 B2 JP 4530868B2 JP 2005036765 A JP2005036765 A JP 2005036765A JP 2005036765 A JP2005036765 A JP 2005036765A JP 4530868 B2 JP4530868 B2 JP 4530868B2
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- 230000003068 static effect Effects 0.000 title claims description 51
- 230000001050 lubricating effect Effects 0.000 claims description 47
- 239000000314 lubricant Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 5
- 230000035939 shock Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 239000004519 grease Substances 0.000 claims description 3
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 157
- 238000006073 displacement reaction Methods 0.000 description 13
- 230000006835 compression Effects 0.000 description 10
- 238000007906 compression Methods 0.000 description 10
- 238000012669 compression test Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000004381 surface treatment Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 230000002706 hydrostatic effect Effects 0.000 description 6
- 238000005461 lubrication Methods 0.000 description 6
- 239000007769 metal material Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 229910000737 Duralumin Inorganic materials 0.000 description 3
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- 230000004323 axial length Effects 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000009864 tensile test Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005480 shot peening Methods 0.000 description 1
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Description
また、本発明に係る気体圧アクチュエータは、上記のピストン駆動機構の静圧気体軸受を備えることを特徴とする。
また、気体圧アクチュエータは、上記構成のピストン駆動機構の静圧気体軸受を備える。ここで、ピストン駆動機構の静圧気体軸受は、直進軸の気体受面及びハウジングの気体受壁に、衝撃時バッファ用の固体又は液体の潤滑層を設けるので、ピストン駆動機構における径方向の衝撃に対する軸受摺動面の損傷の防止を可能とする。
Claims (5)
- ピストン駆動機構の直進軸をハウジングに対して浮上支持する静圧気体軸受において、
直進軸の気体受面及びハウジングの気体受壁に設けられる衝撃時バッファ用の固体又は液体の潤滑層と、
気体受面又は気体受壁の少なくとも一方に設けられ、潤滑層の厚みよりも浅い深さと、潤滑層の厚みよりも小さい表面径とを有する微小くぼみの複数の潤滑剤溜と、
を含むことを特徴とするピストン駆動機構の静圧気体軸受。 - 請求項1に記載のピストン駆動機構の静圧気体軸受において、
ピストン駆動機構の直進軸を支持するハウジングの内面に軸方向に沿って設けられる浅溝であって、気体供給路から供給される気体を流して、直進軸をハウジングに対して浮上支持する浅溝表面絞りを含み、
潤滑層は、浅溝表面絞りの表面を含むハウジングの気体受壁と、これに向かい合う直進軸の気体受面とに設けられることを特徴とするピストン駆動機構の静圧気体軸受。 - 請求項1に記載のピストン駆動機構の静圧気体軸受において、
潤滑層は、グリースを含んで構成されることを特徴とするピストン駆動機構の静圧気体軸受。 - 請求項1に記載のピストン駆動機構の静圧気体軸受において、
潤滑層は、WPC処理による二硫化モリブデンを含んで構成されることを特徴とするピストン駆動機構の静圧気体軸受。 - 請求項1から4のいずれか1に記載のピストン駆動機構の静圧気体軸受を備えることを特徴とする気体圧アクチュエータ。
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JP2005036765A JP4530868B2 (ja) | 2005-02-14 | 2005-02-14 | ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ |
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JP2005036765A JP4530868B2 (ja) | 2005-02-14 | 2005-02-14 | ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ |
Publications (3)
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JP2006220289A JP2006220289A (ja) | 2006-08-24 |
JP2006220289A5 JP2006220289A5 (ja) | 2007-12-20 |
JP4530868B2 true JP4530868B2 (ja) | 2010-08-25 |
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JP2005036765A Active JP4530868B2 (ja) | 2005-02-14 | 2005-02-14 | ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007082774A2 (de) | 2006-01-23 | 2007-07-26 | Behr Gmbh & Co. Kg | Wärmetauscher |
US9127895B2 (en) | 2006-01-23 | 2015-09-08 | MAHLE Behr GmbH & Co. KG | Heat exchanger |
JP5064135B2 (ja) * | 2007-08-07 | 2012-10-31 | 新日本製鐵株式会社 | 超音波衝撃処理装置用打撃ピンホルダー |
JP5265210B2 (ja) * | 2008-02-07 | 2013-08-14 | ピー・エス・シー株式会社 | ピストン駆動機構の静圧気体軸受及び気体圧アクチュエータ |
JP2009197631A (ja) * | 2008-02-20 | 2009-09-03 | Sanden Corp | 揺動板式圧縮機のピストンロッド |
US8662029B2 (en) | 2010-11-23 | 2014-03-04 | Etagen, Inc. | High-efficiency linear combustion engine |
CN108953471A (zh) * | 2018-07-10 | 2018-12-07 | 哈尔滨工业大学 | 一种无摩擦重力卸荷机构 |
WO2020023682A1 (en) | 2018-07-24 | 2020-01-30 | Etagen, Inc. | Linear electromagnetic machine |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0230526U (ja) * | 1988-08-19 | 1990-02-27 | ||
JPH061808U (ja) * | 1992-06-17 | 1994-01-14 | 三立精機株式会社 | 低摩擦型シリンダ |
JP2000170767A (ja) * | 1998-12-08 | 2000-06-20 | Nsk Ltd | 静圧直線案内装置 |
JP2002070845A (ja) * | 2000-08-29 | 2002-03-08 | Daido Steel Co Ltd | 軸受機構、それを用いたハードディスク駆動機構及びポリゴンミラー駆動機構 |
JP2002161371A (ja) * | 2000-11-17 | 2002-06-04 | Fuji Kihan:Kk | 潤滑性被膜の形成方法 |
JP2003184883A (ja) * | 2001-12-20 | 2003-07-03 | Nissan Motor Co Ltd | 軸受摺動部材 |
JP2003340720A (ja) * | 2002-05-28 | 2003-12-02 | Mitsubishi Heavy Ind Ltd | 表面処理装置 |
Family Cites Families (3)
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JPS60143902U (ja) * | 1984-03-06 | 1985-09-24 | 太陽鉄工株式会社 | 低摩擦型流体圧シリンダ− |
JP4215285B2 (ja) * | 1995-08-08 | 2009-01-28 | 株式会社小松製作所 | 自己潤滑性焼結摺動材およびその製造方法 |
JPH10129478A (ja) * | 1996-11-05 | 1998-05-19 | Tokyo Seimitsu Sokki Kk | 振り子車両用空気圧サーボシリンダ |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0230526U (ja) * | 1988-08-19 | 1990-02-27 | ||
JPH061808U (ja) * | 1992-06-17 | 1994-01-14 | 三立精機株式会社 | 低摩擦型シリンダ |
JP2000170767A (ja) * | 1998-12-08 | 2000-06-20 | Nsk Ltd | 静圧直線案内装置 |
JP2002070845A (ja) * | 2000-08-29 | 2002-03-08 | Daido Steel Co Ltd | 軸受機構、それを用いたハードディスク駆動機構及びポリゴンミラー駆動機構 |
JP2002161371A (ja) * | 2000-11-17 | 2002-06-04 | Fuji Kihan:Kk | 潤滑性被膜の形成方法 |
JP2003184883A (ja) * | 2001-12-20 | 2003-07-03 | Nissan Motor Co Ltd | 軸受摺動部材 |
JP2003340720A (ja) * | 2002-05-28 | 2003-12-02 | Mitsubishi Heavy Ind Ltd | 表面処理装置 |
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