JP4527966B2 - 分子ポンプ - Google Patents
分子ポンプ Download PDFInfo
- Publication number
- JP4527966B2 JP4527966B2 JP2003383754A JP2003383754A JP4527966B2 JP 4527966 B2 JP4527966 B2 JP 4527966B2 JP 2003383754 A JP2003383754 A JP 2003383754A JP 2003383754 A JP2003383754 A JP 2003383754A JP 4527966 B2 JP4527966 B2 JP 4527966B2
- Authority
- JP
- Japan
- Prior art keywords
- stationary blade
- molecular pump
- blade stage
- projecting
- stationary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000465 moulding Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 206010044625 Trichorrhexis Diseases 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Images
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
2 動翼段
3、3´、13 静翼段
3a、13a 静翼
3b、13b 外側円板部
3c、13c 内側円板部
3d、3e、3f 突出部
13d、13e 折り返し部
14 ディスタンスピース(間隔片)
14a フランジ状の突出部
Claims (5)
- モータにより回転駆動されるロータ本体と、該ロータ本体の外周面に放射状に動翼を突設してなる複数の動翼段と、これら動翼段間に各々放射状に静翼を配置してなる複数の静翼段とを有するターボ分子ポンプにおいて、前記静翼段は前記静翼をその両端部において固定して支持する少なくとも2分割された外側円板部及び内側円板部を具備して前記静翼段を少なくとも2分割可能に板状のプレス加工による一体成形により形成し、更にこれら分割された静翼段の両側の分割端部に沿って前記円板部に略直角に板状の幅の広い当接用突出部を突設し、一方の側の当接用突出部を前記円板部の上方向へ向けて突設すると共に他方の側の当接用突出部を前記円板部の下方向へ向けて突設したことを特徴とする分子ポンプ。
- 前記当接用突出部は、各々1個又は複数個の矩形の板状に形成されていることを特徴とする請求項1に記載の分子ポンプ。
- 前記静翼段の前記外側円板部の外周部に沿って、該外側円板部に略直角に折り返し部を設けたことを特徴とする請求項1又は請求項2に記載の分子ポンプ。
- 前記折り返し部はコ字状の断面形状に形成されていることを特徴とする請求項3に記載の分子ポンプ。
- 前記静翼段の外周部に設けたコ字状の断面形状の折り返し部に丁度嵌入するフランジ状の突出部を突出させた円環状の間隔片を形成し、相隣る静翼段間に該間隔片を介在させて多数の静翼段に形成したことを特徴とする請求項4に記載の分子ポンプ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003383754A JP4527966B2 (ja) | 2003-05-01 | 2003-11-13 | 分子ポンプ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003126108 | 2003-05-01 | ||
JP2003383754A JP4527966B2 (ja) | 2003-05-01 | 2003-11-13 | 分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004353652A JP2004353652A (ja) | 2004-12-16 |
JP4527966B2 true JP4527966B2 (ja) | 2010-08-18 |
Family
ID=34066920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003383754A Expired - Fee Related JP4527966B2 (ja) | 2003-05-01 | 2003-11-13 | 分子ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4527966B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104033395A (zh) * | 2013-03-07 | 2014-09-10 | 株式会社岛津制作所 | 真空泵 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010052660A1 (de) * | 2010-11-26 | 2012-05-31 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE102010052659A1 (de) * | 2010-11-26 | 2012-05-31 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE102011108115A1 (de) * | 2011-07-20 | 2013-01-24 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE102013114576A1 (de) * | 2013-12-19 | 2015-06-25 | Pfeiffer Vacuum Gmbh | Statorscheibe |
DE102014100207B4 (de) * | 2014-01-09 | 2020-07-09 | Pfeiffer Vacuum Gmbh | Statorscheibe |
DE102014102681A1 (de) * | 2014-02-28 | 2015-09-03 | Pfeiffer Vacuum Gmbh | Statorscheibe |
GB2557679A (en) * | 2016-12-15 | 2018-06-27 | Edwards Ltd | Stator blade unit for a turbomolecular pump |
GB2602026B (en) * | 2020-12-15 | 2023-03-29 | Edwards S R O | A compact Siegbahn drag pump |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062692A (ja) * | 1983-09-16 | 1985-04-10 | Hitachi Ltd | タ−ボ分子ポンプの静翼 |
JPH07330254A (ja) * | 1994-06-07 | 1995-12-19 | Mitsubishi Electric Corp | エレベータ用ハニカムパネル及びその締結構造並びにその締結方法 |
JP2000009088A (ja) * | 1998-06-23 | 2000-01-11 | Seiko Seiki Co Ltd | ターボ分子ポンプ |
-
2003
- 2003-11-13 JP JP2003383754A patent/JP4527966B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6062692A (ja) * | 1983-09-16 | 1985-04-10 | Hitachi Ltd | タ−ボ分子ポンプの静翼 |
JPH07330254A (ja) * | 1994-06-07 | 1995-12-19 | Mitsubishi Electric Corp | エレベータ用ハニカムパネル及びその締結構造並びにその締結方法 |
JP2000009088A (ja) * | 1998-06-23 | 2000-01-11 | Seiko Seiki Co Ltd | ターボ分子ポンプ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104033395A (zh) * | 2013-03-07 | 2014-09-10 | 株式会社岛津制作所 | 真空泵 |
CN104033395B (zh) * | 2013-03-07 | 2017-03-01 | 株式会社岛津制作所 | 真空泵 |
Also Published As
Publication number | Publication date |
---|---|
JP2004353652A (ja) | 2004-12-16 |
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