JP4505116B2 - Two-dimensional scanning X-ray analyzer - Google Patents

Two-dimensional scanning X-ray analyzer Download PDF

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Publication number
JP4505116B2
JP4505116B2 JP2000265466A JP2000265466A JP4505116B2 JP 4505116 B2 JP4505116 B2 JP 4505116B2 JP 2000265466 A JP2000265466 A JP 2000265466A JP 2000265466 A JP2000265466 A JP 2000265466A JP 4505116 B2 JP4505116 B2 JP 4505116B2
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ray
plate
sample
dimensional scanning
analyzer
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JP2002071586A (en
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好則 細川
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Horiba Ltd
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Horiba Ltd
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Description

【０００１】
【発明の属する技術分野】
この発明は、二次元走査Ｘ線分析装置に関する。
【０００２】
【従来の技術】
従来の二次元走査Ｘ線分析装置では、ＸＹ方向に動かすことが可能な試料台に設置された試料に対して、Ｘ線管と、ＸＧＴ（Ｘ線ガイドチューブ）またはコリメータとからなるＸ線照射部よりＸ線を照射することで得られる透過，螢光，回折あるいは散乱Ｘ線を、それぞれ適当なＸ線検出器で検出し、ＸＹ走査信号で同期複像していた。
【０００３】
【発明が解決しようとする課題】
しかし、上記の構成からなる従来の二次元走査Ｘ線分析装置では、試料台をＸＹ方向に動かして分析を行っていたが、例えば、試料台に設置した試料が、速く動かすと形などが崩れて支障が生じるもの（例えば、腹部を開口した状態の生体）や液状のもの、重量物などであった場合には、試料台を低速で動かして分析を行っていたことから、分析時間が長くなることとなっていた。また、前記試料台を高速で動かそうとすれば、パワーのあるモータが必要となるだけでなく、分析精度が悪くなるおそれがあり、さらに、この分析精度の改善を行おうとすれば、コストの飛躍的な上昇を伴うため、前記試料台の高速化を図ることはかなり困難であった。
【０００４】
この発明は上述の事柄に留意してなされたもので、その目的は、分析時間の短縮化を、分析精度を低下させることなく、低コストで実現することができる二次元走査Ｘ線分析装置を提供することにある。
【０００５】
【課題を解決するための手段】
上記目的を達成するために、この発明の二次元走査Ｘ線分析装置は、試料にＸ線を照射するためのＸ線照射部と、二次Ｘ線を検出するためのＸ線検出部とを備えた二次元走査Ｘ線分析装置であって、前記Ｘ線照射部を、一端部が固定された板状体の他端部によって支持させ、さらに、この板状体に付勢を加えて変形させるための付勢手段を設けた（請求項１）。
【０００６】
また、前記付勢手段が、前記板状体の両面に対してそれぞれの先端が固定される一対のピエゾ圧電素子からなり、一方のピエゾ圧電素子が、他方のピエゾ圧電素子よりも板状体の前記一端部に近い位置においてその先端が固定されているとしてもよい（請求項２）。
【０００７】
さらに、前記板状体の一端部が固定された保持体を、板状体の変形する方向と垂直であって、かつ前記試料の外面と平行な方向に移動可能としてあるとしてもよい（請求項３）。
【０００８】
上記の構成により、分析時間の短縮化を、分析精度を低下させることなく、低コストで実現することができる二次元走査Ｘ線分析装置の提供が可能となる。
【０００９】
【発明の実施の形態】
以下、この発明の実施例を、図を参照しながら説明する。
図１および図２は、本発明の一実施例に係る二次元走査Ｘ線分析装置（以下、分析装置という）Ｄの構成を概略的に示す斜視図および説明図であり、図３は、前記分析装置Ｄの構成を概略的に示す部分拡大斜視図である。
分析装置Ｄは、試料（図示せず）を設置するための試料台１と、前記試料にＸ線を照射するためのＸ線照射部２と、二次Ｘ線を検出するためのＸ線検出部３とを備えており、前記Ｘ線照射部２は、一端部が保持体４に固定された板状体５の他端部によって支持されており、さらに、この板状体５に付勢を加えて変形させるための付勢手段６が設けられている。
【００１０】
前記試料台１は、例えば、平面視が矩形状であり、中央に切り欠き部１ａを有している。なお、試料台１の構造や試料の設置方法は、適宜に設定すればよい。
【００１１】
前記Ｘ線照射部２は、Ｘ線を発生するＸ線管２ａと、Ｘ線集束手段２ｂとを一体にしてなる。前記Ｘ線集束手段２ｂは、例えば、ＸＧＴ（Ｘ線ガイドチューブ）や、コリメータなどである。
【００１２】
前記Ｘ線検出器３は、例えば、二次Ｘ線として試料を透過した透過Ｘ線を検出するＮａＩ（Ｔｉ）検出器又は半導体検出器である。なお、Ｘ線検出器３が検出する二次Ｘ線は、前記透過Ｘ線のみならず、螢光Ｘ線，回折Ｘ線あるいは散乱Ｘ線などでもよく、前記Ｘ線検出器３は、検出しようとする二次Ｘ線に応じた検出器を適宜の位置に配置すればよい。また、異なる種類のＸ線検出器３を複数用いてもよい。
【００１３】
前記保持体４は、例えば軟鉄・アルミニウムなどの剛性を有する材料によって形成されており、前記試料台１と平行な平行部分７と、この平行部分７の前後両端部から下方へ突設された二つの突出部分８，８とからなる。そして、前記平行部分７の下面のほぼ中央には、溝７ａが左右方向に設けられており、この溝７ａ内には、前記板状体５の前記一端部がバネ等の固定部材５ａによって固定されている。
【００１４】
また、前記保持体４の適宜の箇所（例えば、前記平行部分７の上面部）にはボールネジ部４ａが設けられており、このボールネジ部４ａが、モータ９によって軸心回りに自在に回転させることができる雄ねじ体９ａに沿って動くように構成されている。そして、これにより、前記保持体４は、前記板状体５の変形する方向と垂直であって、かつ前記試料台１の上面と平行な方向（例えば分析装置Ｄの左右方向）に移動可能となっている。なお、上記のように保持体４を移動させるための手段としては、ボールネジ部４ａと雄ねじ体９ａとを用いたものに限らない。
【００１５】
前記保持体４を移動させるための雄ねじ体９ａやモータ９などを備えた枠体１０は、支持アーム１１の上端部に固定されており、前記Ｘ線検出器３は、前記支持アーム１１の下端部に固定されている。そして、前記試料台１は、前記枠体１０とＸ線検出器３との間に配置された状態で支持アーム１１に固定されている。なお、前記試料台１は、支持アーム１１に対してその位置調整（高さ調整など）ができるように固定されていてもよい。
【００１６】
前記板状体５は、前記保持体よりも剛性の高い材料（例えば、鋼鉄など）から形成された、ほぼ矩形状の薄板体である。
【００１７】
前記付勢手段６は、前記板状体５の両面に対してそれぞれの先端が固定される一対のピエゾ圧電素子６ａ，６ｂからなり、一方のピエゾ圧電素子６ａが、他方のピエゾ圧電素子６ｂよりも板状体５の保持体４に固定された前記一端部に近い位置においてその先端が固定されている。また、前記ピエゾ圧電素子６ａ，６ｂのそれぞれの後端は、前記保持体４の突出部分８，８によって保持されている。
【００１８】
前記ピエゾ圧電素子６ａ，６ｂはそれぞれ、電圧のオン・オフや、電圧の大きさを調整することによって、伸縮させることができるものである。
【００１９】
図４（Ａ）および（Ｂ）は、前記板状体５に対して一方向および他方向に付勢を加えた状態の構成を概略的に示す説明図である。
初期状態にある前記ピエゾ圧電素子６ａ，６ｂのうち、ピエゾ圧電素子６ｂのみを伸ばすと、図４（Ａ）に実線で示すように、前記板状体５は、変形していない状態（その下端が下方を向いた状態）から、一方向に付勢が加えられて、その下端が図面左側に向いた状態となる。そして、さらに、初期状態にあった前記ピエゾ圧電素子６ａを伸ばすと、図４（Ａ）に二点鎖線で示すように、板状体５の下端はさらに図面左側に向いた状態となる。
【００２０】
一方、初期状態にある前記ピエゾ圧電素子６ａ，６ｂのうち、ピエゾ圧電素子６ｂのみを縮ませると、図４（Ｂ）に実線で示すように、前記板状体５は、変形していない状態（その下端が下方を向いた状態）から、他方向に付勢が加えられて、その下端が図面右側に曲いた状態となる。そして、さらに、初期状態にあった前記ピエゾ圧電素子６ａを縮ませると、図４（Ｂ）に二点鎖線で示すように、板状体５の下端はさらに図面右側に向いた状態となる。
【００２１】
なお、前記ピエゾ圧電素子６ａ，６ｂの伸縮は、電圧を調整することによって高速で行わせることができ、前記板状体５の変形も高速で行わせることができるのである。
【００２２】
上記の構成からなる分析装置Ｄを用いて試料台１に設置された試料の分析を行うには、前記付勢手段６によって、Ｘ線照射部２を支持した板状体５を分析装置Ｄの前後方向（試料のＸ方向）に高速で円弧状に振らせながら（振幅運動させながら）、保持体４を分析装置Ｄの左右方向（試料のＹ方向）に適宜の速度で移動させる。そして、このとき、前記Ｘ線照射部２からのＸ線が試料に照射されることによって生じた二次Ｘ線を、前記Ｘ線検出器３で検出させ、ＸＹ走査信号で同期複像するだけでよい。
【００２３】
上記の構成からなる分析装置Ｄでは、試料の分析を、Ｘ線照射部２を試料のＸ方向に高速で振らせながら試料のＹ方向へ適宜の速度で移動させることで行うことができるのであり、これにより、分析時間の短縮化を図ることができ、また、試料自体は静止した状態に保たれることから、分析の高速化によって分析精度が低下するということがなく、ひいては分析時間の短縮化を低コストで実現することができるのである。
【００２４】
また、上記の構成からなる分析装置Ｄでは、試料の分析を試料を動かすことなく静止させた状態で行うことができるため、分析対象とする試料が、例えば、速く動かすと形などが崩れて支障が生じるもの（例えば、腹部を開口した状態の小動物などの生体）や液状のもの、重量物などであっても、その分析を高速で行うことが可能であり、さらに、Ｘ線検出器３の配置などを適宜に変えることによって、側壁や天井等に設けられた文化財など、特定の場所から動かせないものを試料として分析する場合にも、その文化財などがある現地にて、直接、そして対象とする文化財などの試料を傷つけることなく分析することができ、汎用性に優れたものとなる。
【００２５】
なお、上記の構成からなる分析装置Ｄでは、前記付勢手段６を一対のピエゾ圧電素子６ａ，６ｂからなるとしているが、前記ピエゾ圧電素子６ａ，６ｂのいずれか一方のみを用いるようにしてもよい。
【００２６】
また、前記上記の構成からなる分析装置Ｄでは、Ｘ線照射部２を、分析装置Ｄの前後方向に高速で振らせながら（振幅運動させながら）分析装置Ｄの左右方向に適宜の速度で移動させるとしているが、このような構成に限るものではなく、例えば、Ｘ線照射部２を、分析装置Ｄの左右方向に高速で振らせながら（振幅運動させながら）分析装置Ｄの前後方向に適宜の速度で移動させるとしてもよい。
【００２７】
【発明の効果】
以上説明したように、上記の構成からなる本発明によれば、分析時間の短縮化を、分析精度を低下させることなく、低コストで実現することができる二次元走査Ｘ線分析装置の提供が可能となる。
【図面の簡単な説明】
【図１】本発明の一実施例に係る二次元走査Ｘ線分析装置の構成を概略的に示す斜視図である。
【図２】上記実施例の構成を概略的に示す説明図である。
【図３】上記実施例の構成を概略的に示す部分拡大斜視図である。
【図４】（Ａ）および（Ｂ）は、上記実施例における板状体に対して一方向および他方向に付勢を加えた状態の構成を概略的に示す説明図である。
【符号の説明】
２…Ｘ線照射部、３…Ｘ線検出部、５…板状体、６…付勢手段、Ｄ…二次元走査Ｘ線分析装置。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a two-dimensional scanning X-ray analyzer.
[0002]
[Prior art]
In a conventional two-dimensional scanning X-ray analyzer, X-ray irradiation consisting of an X-ray tube and an XGT (X-ray guide tube) or collimator is performed on a sample placed on a sample stage that can be moved in the XY directions. Transmitted, fluorescent, diffracted or scattered X-rays obtained by irradiating X-rays from the part were respectively detected by appropriate X-ray detectors and synchronously double-imaged by XY scanning signals.
[0003]
[Problems to be solved by the invention]
However, in the conventional two-dimensional scanning X-ray analyzer having the above configuration, the analysis is performed by moving the sample stage in the X and Y directions. For example, when the sample placed on the sample stage is moved quickly, the shape or the like collapses. In the case of an object that causes trouble (for example, a living body with the abdomen opened), a liquid object, or a heavy object, the analysis time is long because the sample stage is moved at a low speed. Was supposed to be. In addition, if the sample stage is moved at a high speed, not only a motor with a power is required, but also the analysis accuracy may be deteriorated. Since this is accompanied by a dramatic rise, it has been quite difficult to increase the speed of the sample stage.
[0004]
The present invention has been made in consideration of the above-mentioned matters, and an object of the present invention is to provide a two-dimensional scanning X-ray analysis apparatus that can reduce analysis time at a low cost without reducing analysis accuracy. It is to provide.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, a two-dimensional scanning X-ray analyzer of the present invention includes an X-ray irradiation unit for irradiating a sample with X-rays and an X-ray detection unit for detecting secondary X-rays. A two-dimensional scanning X-ray analyzer provided with the X-ray irradiation unit supported by the other end of a plate-like body having one end fixed thereto, and further deformed by applying a bias to the plate-like body The urging means for making it come is provided (Claim 1).
[0006]
The biasing means includes a pair of piezo piezoelectric elements whose respective tips are fixed to both surfaces of the plate-like body, and one piezo-piezoelectric element is more plate-like than the other piezo-piezoelectric element. The tip may be fixed at a position close to the one end (claim 2).
[0007]
Furthermore, the holding body, to which one end of the plate-like body is fixed, may be movable in a direction perpendicular to the direction in which the plate-like body deforms and parallel to the outer surface of the sample. 3).
[0008]
With the above-described configuration, it is possible to provide a two-dimensional scanning X-ray analyzer that can reduce analysis time at a low cost without reducing analysis accuracy.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
1 and 2 are a perspective view and an explanatory view schematically showing a configuration of a two-dimensional scanning X-ray analyzer (hereinafter referred to as analyzer) D according to an embodiment of the present invention. FIG. 2 is a partially enlarged perspective view schematically showing a configuration of an analyzer D. FIG.
The analyzer D includes a sample stage 1 for installing a sample (not shown), an X-ray irradiation unit 2 for irradiating the sample with X-rays, and an X-ray detection for detecting secondary X-rays. The X-ray irradiation unit 2 is supported by the other end portion of the plate-like body 5 having one end portion fixed to the holding body 4, and further urged against the plate-like body 5. A biasing means 6 is provided for deforming by adding.
[0010]
The sample stage 1 has, for example, a rectangular shape in plan view and has a notch 1a at the center. In addition, what is necessary is just to set the structure of the sample stand 1, and the installation method of a sample suitably.
[0011]
The X-ray irradiator 2 is formed by integrating an X-ray tube 2a that generates X-rays and an X-ray focusing means 2b. The X-ray focusing means 2b is, for example, an XGT (X-ray guide tube) or a collimator.
[0012]
The X-ray detector 3 is, for example, a NaI (Ti) detector or a semiconductor detector that detects transmitted X-rays transmitted through the sample as secondary X-rays. The secondary X-rays detected by the X-ray detector 3 may be not only the transmitted X-rays but also fluorescent X-rays, diffracted X-rays, scattered X-rays, etc., and the X-ray detector 3 will detect them. A detector corresponding to the secondary X-ray may be disposed at an appropriate position. A plurality of different types of X-ray detectors 3 may be used.
[0013]
The holding body 4 is made of a material having rigidity such as soft iron and aluminum, for example, and has a parallel portion 7 parallel to the sample stage 1 and two protruding downward from both front and rear end portions of the parallel portion 7. It consists of two protruding parts 8,8. A groove 7a is provided in the left-right direction at substantially the center of the lower surface of the parallel portion 7, and the one end of the plate-like body 5 is fixed in the groove 7a by a fixing member 5a such as a spring. Has been.
[0014]
In addition, a ball screw portion 4a is provided at an appropriate position of the holding body 4 (for example, the upper surface portion of the parallel portion 7), and the ball screw portion 4a is freely rotated around the axis by the motor 9. It is comprised so that it may move along the external thread body 9a which can do. Thereby, the holding body 4 is movable in a direction perpendicular to the direction in which the plate-like body 5 deforms and parallel to the upper surface of the sample stage 1 (for example, the left-right direction of the analyzer D). It has become. In addition, as means for moving the holding body 4 as described above, the means using the ball screw portion 4a and the male screw body 9a is not limited.
[0015]
A frame body 10 having a male screw body 9 a and a motor 9 for moving the holding body 4 is fixed to an upper end portion of a support arm 11, and the X-ray detector 3 is a lower end of the support arm 11. It is fixed to the part. The sample stage 1 is fixed to a support arm 11 in a state of being arranged between the frame body 10 and the X-ray detector 3. The sample stage 1 may be fixed to the support arm 11 so that its position (height adjustment or the like) can be adjusted.
[0016]
The plate-like body 5 is a substantially rectangular thin plate body made of a material (for example, steel) having higher rigidity than the holding body.
[0017]
The urging means 6 is composed of a pair of piezoelectric elements 6a and 6b whose front ends are fixed with respect to both surfaces of the plate-like body 5. One piezoelectric element 6a is more than the other piezoelectric element 6b. The tip of the plate-like body 5 is fixed at a position close to the one end fixed to the holding body 4. The rear ends of the piezoelectric elements 6 a and 6 b are held by the protruding portions 8 and 8 of the holding body 4.
[0018]
The piezoelectric elements 6a and 6b can be expanded and contracted by turning on / off the voltage and adjusting the magnitude of the voltage.
[0019]
4A and 4B are explanatory views schematically showing a configuration in a state in which urging is applied to the plate-like body 5 in one direction and the other direction.
When only the piezoelectric element 6b is extended among the piezoelectric elements 6a and 6b in the initial state, the plate-like body 5 is not deformed (the lower end thereof) as shown by a solid line in FIG. From the state of facing downward), the urging force is applied in one direction, and the lower end thereof is directed to the left side of the drawing. Further, when the piezoelectric element 6a in the initial state is extended, as shown by a two-dot chain line in FIG. 4 (A), the lower end of the plate-like body 5 is further directed to the left side of the drawing.
[0020]
On the other hand, when only the piezoelectric element 6b is contracted among the piezoelectric elements 6a and 6b in the initial state, the plate-like body 5 is not deformed as shown by a solid line in FIG. From (the state where the lower end is directed downward), urging is applied in the other direction, and the lower end is bent to the right side of the drawing. Further, when the piezoelectric element 6a in the initial state is contracted, the lower end of the plate-like body 5 is further directed to the right side of the drawing as shown by a two-dot chain line in FIG.
[0021]
The expansion and contraction of the piezoelectric elements 6a and 6b can be performed at high speed by adjusting the voltage, and the deformation of the plate-like body 5 can also be performed at high speed.
[0022]
In order to analyze the sample installed on the sample stage 1 using the analyzer D having the above-described configuration, the plate-like body 5 supporting the X-ray irradiation unit 2 is moved by the biasing means 6 of the analyzer D. The holder 4 is moved at an appropriate speed in the left-right direction (Y direction of the sample) of the analyzer D while being swung in an arc shape at high speed in the front-rear direction (X direction of the sample) (while making amplitude movement). At this time, secondary X-rays generated by irradiating the sample with X-rays from the X-ray irradiator 2 are detected by the X-ray detector 3 and only a synchronous double image is generated by an XY scanning signal. It's okay.
[0023]
In the analyzer D configured as described above, the sample can be analyzed by moving the X-ray irradiation unit 2 at an appropriate speed in the Y direction of the sample while shaking the X-ray irradiation unit 2 in the X direction of the sample at a high speed. As a result, the analysis time can be shortened, and since the sample itself is kept stationary, the analysis accuracy does not deteriorate due to the high-speed analysis, and thus the analysis time is shortened. Can be realized at low cost.
[0024]
Further, in the analyzer D having the above-described configuration, the sample can be analyzed in a stationary state without moving the sample. Therefore, for example, if the sample to be analyzed is moved quickly, the shape or the like may be lost. Can be analyzed at high speed even if it occurs (for example, a living body such as a small animal with the abdomen opened), liquid, heavy, etc., and the X-ray detector 3 Even when analyzing samples that cannot be moved from a specific location, such as cultural assets on the side walls and ceiling, etc., by appropriately changing the arrangement, etc. Analyzes can be made without damaging the target cultural property sample, etc., and it has excellent versatility.
[0025]
In the analyzer D having the above-described configuration, the urging means 6 is composed of a pair of piezoelectric elements 6a and 6b. However, only one of the piezoelectric elements 6a and 6b may be used. Good.
[0026]
Further, in the analyzer D having the above-described configuration, the X-ray irradiation unit 2 is moved at an appropriate speed in the left-right direction of the analyzer D while being swung at high speed in the front-rear direction of the analyzer D (with amplitude movement). However, the present invention is not limited to such a configuration. For example, the X-ray irradiation unit 2 is appropriately moved in the front-rear direction of the analyzer D while being swung at a high speed in the left-right direction of the analyzer D (with amplitude movement). It may be moved at a speed of
[0027]
【The invention's effect】
As described above, according to the present invention having the above-described configuration, it is possible to provide a two-dimensional scanning X-ray analysis apparatus that can reduce analysis time at a low cost without reducing analysis accuracy. It becomes possible.
[Brief description of the drawings]
FIG. 1 is a perspective view schematically showing a configuration of a two-dimensional scanning X-ray analyzer according to an embodiment of the present invention.
FIG. 2 is an explanatory diagram schematically showing a configuration of the embodiment.
FIG. 3 is a partially enlarged perspective view schematically showing the configuration of the embodiment.
FIGS. 4A and 4B are explanatory views schematically showing a configuration in a state where urging is applied in one direction and the other direction with respect to the plate-like body in the embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 2 ... X-ray irradiation part, 3 ... X-ray detection part, 5 ... Plate-shaped body, 6 ... Energizing means, D ... Two-dimensional scanning X-ray analyzer.

Claims (3)

試料にＸ線を照射するためのＸ線照射部と、二次Ｘ線を検出するためのＸ線検出部とを備えた二次元走査Ｘ線分析装置であって、前記Ｘ線照射部を、一端部が固定された板状体の他端部によって支持させ、さらに、この板状体に付勢を加えて変形させるための付勢手段を設けたことを特徴とする二次元走査Ｘ線分析装置。A two-dimensional scanning X-ray analyzer comprising an X-ray irradiator for irradiating a sample with X-rays and an X-ray detector for detecting secondary X-rays, wherein the X-ray irradiator is Two-dimensional scanning X-ray analysis characterized in that it is supported by the other end of a plate-like body having one end fixed, and further provided with a biasing means for applying a bias to the plate-like body to deform it. apparatus. 前記付勢手段が、前記板状体の両面に対してそれぞれの先端が固定される一対のピエゾ圧電素子からなり、一方のピエゾ圧電素子が、他方のピエゾ圧電素子よりも板状体の前記一端部に近い位置においてその先端が固定されている請求項１に記載の二次元走査Ｘ線分析装置。The biasing means includes a pair of piezo-electric elements whose respective tips are fixed to both surfaces of the plate-like body, and one piezo-piezoelectric element has the one end of the plate-like body more than the other piezo-piezoelectric element. The two-dimensional scanning X-ray analyzer according to claim 1, wherein the tip is fixed at a position close to the portion. 前記板状体の一端部が固定された保持体を、板状体の変形する方向と垂直であって、かつ前記試料の外面と平行な方向に移動可能としてある請求項１または２に記載の二次元走査Ｘ線分析装置。The holding body to which one end of the plate-like body is fixed is movable in a direction perpendicular to the direction in which the plate-like body deforms and parallel to the outer surface of the sample. Two-dimensional scanning X-ray analyzer.
JP2000265466A 2000-09-01 2000-09-01 Two-dimensional scanning X-ray analyzer Expired - Fee Related JP4505116B2 (en)

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JPS6144399B2 (en) * 1979-12-14 1986-10-02 Hitachi Medical Corp
JPS625332A (en) * 1985-07-01 1987-01-12 松下電器産業株式会社 X-ray irradiation apparatus
JPH0247600Y2 (en) * 1985-05-02 1990-12-13

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS6144399B2 (en) * 1979-12-14 1986-10-02 Hitachi Medical Corp
JPH0247600Y2 (en) * 1985-05-02 1990-12-13
JPS625332A (en) * 1985-07-01 1987-01-12 松下電器産業株式会社 X-ray irradiation apparatus

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