JP4490861B2 - 基板 - Google Patents
基板 Download PDFInfo
- Publication number
- JP4490861B2 JP4490861B2 JP2005126080A JP2005126080A JP4490861B2 JP 4490861 B2 JP4490861 B2 JP 4490861B2 JP 2005126080 A JP2005126080 A JP 2005126080A JP 2005126080 A JP2005126080 A JP 2005126080A JP 4490861 B2 JP4490861 B2 JP 4490861B2
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- Prior art keywords
- solder
- film
- substrate
- electronic component
- plating
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
- E05B47/00—Operating or controlling locks or other fastening devices by electric or magnetic means
- E05B47/0001—Operating or controlling locks or other fastening devices by electric or magnetic means with electric actuators; Constructional features thereof
- E05B47/0002—Operating or controlling locks or other fastening devices by electric or magnetic means with electric actuators; Constructional features thereof with electromagnets
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- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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Description
基板上にはんだ膜を予め形成する場合、はんだ膜上に電子部品の接続部が当接するように電子部品を載せ、これをリフローすることで、基板上のはんだ膜が溶融し、このはんだが電子部品接続部のメタライズ等に濡れ広がることで基板と電子部品と接続される。
電子部品のリードフレームには、Ag単独のめっき膜あるいはSn単独のめっき膜などが多く用いられてきている。Ag単独のめっき膜は、表面が酸化されないことから濡れ性に優れ、Sn単独のめっき膜では、その表面が酸化はされるが、酸化膜の一部がどこかで破け、基板側のはんだとSnめっき膜が溶融して一体化することで接続が行われている。
このような背景から、軟らかいSnを主成分とするはんだを半導体レーザの実装に用いることが検討され始めている。
また、基材と、この基材に形成されたメタライズ層と、このメタライズ層表面の一部に形成されたSnはんだ部とからなり、Snはんだ部表面の電子部品搭載部にAg膜が形成され、当該基板は、Snはんだ部とAg膜とが溶融して共晶となることにより電子部品を接続するための基板である電子部品搭載用の基板により達成できる。
図1の基板10は、セラミック基板1上に、Ti/Pt/Au(Ti→Pt→Auの順に成膜)からなるメタライズ2を一括してEB(Electron Beam)蒸着したあと、イオンミリングでパターン形成し、引き続いてレジストでパターンを形成し、その上にSn(錫)はんだ膜3とAg(銀)表面酸化防止膜4を一括して抵抗蒸着し、リフトオフした構成である。メタライズ2のTi(チタン)層はセラミック基板1との密着を得る役目を、Pt(白金)層ははんだバリア層の役目を、Au(金)層はワイヤボンディング性を確保する役目をそれぞれ担う。メタライズ2の膜厚は、それぞれセラミック基板1側から順に0.1μm/0.2μm/0.2μmである。また、Snはんだ膜3は3μm、Ag膜4は0.1μmである。
4Ag+O2 → 2Ag2O (1)
この反応式が、どのような温度、酸素分圧で右方向へ進むかは、この反応のギブスの自由エネルギーから計算することができる。
ΔG=ΔH−TΔS (2)
Kubachewski著のMATERIALS THERMOCHEMISTRY Sixth Edition(p258)より、標準状態25℃におけるΔH0=31.1kJ/mol、ΔS0=120.9J/K/molである。これより標準状態25℃におけるAg2Oの標準生成自由エネルギーは、
ΔG0=31.1−298×0.1209 kJ/mol
=−4.9282 kJ/mol
となる。これを元に、Ag2Oの生成/分解の酸素分圧の境界、すなわち解離圧を求める。
ΔG=ΔG0+RTlnK (3)
K=a(Ag2O)/(a2 (Ag)×PO2) (4)
Rは気体定数、Kは平衡定数で(3)式のように表され、aはそれぞれの活量、PO2は酸素分圧である。Ag2Oの解離圧では、(3)式の左辺のΔG=0、(4)式のa(Ag2O)=1、a2 (Ag)=1、より、
ΔG0=RTlnPO2 (5)
したがって、先に求めたΔG0と、気体定数R=8.314kJ/K/mol、温度298K(25℃)を用いてPO2を計算すると、(5)式を変形して
PO2=ext(ΔG0/R/T) (6)
=0.998 気圧(atm)
=1011 hPa
となる。大気圧(1atm)中の酸素濃度は21%なので、酸素分圧は213hPa(0.21atm)となり、Ag2Oの解離圧より小さい。したがって、25℃の大気中では、Agは酸化されないことになる。以上より、図1の構成のように、Snはんだ膜3上にAg膜4を形成することで、Agが常温の大気中で酸化されないので、Snはんだ膜の酸化を防止する効果があることがわかる。
図1の構成では、Snとこれよりも貴な金属であるAgが接触しており、側面においてSnが露出した構造になっている。ウェットプロセスの水による腐食が進行する場合、いわゆる電池反応により、側面の露出している卑な金属であるSnが一方的にイオン化される。換言すれば、AgとSnとを電極とし水分を電解液とする電池では、より卑金属であるSn極が残っている限り、Ag極は腐食を受けない。すなわち、側面の一部のみが腐食(酸化)され、接続面のほぼ全体を占めるAg膜4の表面は酸化されないことになる。これより、Snはんだ膜3を溶融させて電子部品を接続する場合、接続を阻害する酸化膜は側面の一部に存在するのみで、ほとんど悪影響を与えない。以上より、通常の酸素による酸化、水による酸化の両方を考慮し、かつ、はんだによる接合性も考慮した場合、図1のようにSnはんだ膜3の上面がAg膜4に覆われ、側面のSnはんだ膜3が露出している構造が好適である。Snはんだ膜の側面もAg膜で覆われている場合には、ウェットプロセスにおいて電池反応によるAgの防食効果が少なくなると予測されるが、Snに比べてAgは腐食されにくいため、Sn膜の上面が露出した状況よりは、酸化防止効果が得られる。
図2に示す基板20は、実施例1で説明した基板10のAg膜4上に、Au膜60を形成した構造である。実施例1と異なる点は、リフトオフ用にパターン形成したレジスト上に、Snはんだ膜3とAg膜4とAu膜60を連続して抵抗蒸着して形成する。
図3の基板30は、可撓性のあるポリイミド箔5と銅箔とを接着し、銅箔をパタンニングして形成したCu電極メタライズ6に電気めっき法でSnはんだバンプ7を形成し、その上にAgめっき膜8を形成した構成である。はんだバンプ7の組成は、実施例1の変形例で説明した合金はんだでもよい。なお、図3では図示の簡便のため銅箔をサンドウィッチする紙面上側のポリイミド箔を省略した。
図4の電子部品40は、Siウェハ9上に回路素子70を形成し、その後、Siウェハの状態でメタライズ11上にめっきレジスト(図示せず)したあと、めっきによりはんだバンプ12を形成し、めっきレジスト剥離後、マスクスパッタでAg膜13を形成した構成である。
また、本実施例に拠れば、はんだめっき膜16のほぼ全領域をAgめっき膜17が覆っているのでSnウィスカの発生を防止できる効果がある。
Claims (6)
- 基材と、この基材に形成されたメタライズ層と、このメタライズ層表面の一部に形成されたSnはんだ部とからなる基板であって、
前記Snはんだ部表面にAgを主成分とする合金であるAg膜が形成されていることを特徴とする基板。 - 基材と、この基材に形成されたメタライズ層と、このメタライズ層表面の一部に形成されたSnはんだ部とからなる電子部品搭載用の基板であって、
前記Snはんだ部表面の電子部品搭載部にAgを主成分とする合金であるAg膜が形成され、
当該基板は、前記Snはんだ部と前記Ag膜とが溶融して共晶となることにより電子部品を接続するための基板であることを特徴とする電子部品搭載用の基板。 - 請求項1または2に記載の基板であって、
前記Ag膜は、前記Snはんだ部と前記Ag膜との平均組成におけるAgの比率が、73wt%以下となるよう構成されていることを特徴とする基板。 - 請求項1または2に記載の基板であって、
前記Ag膜の上にAu膜が形成されており、
前記Ag膜は、前記Snはんだ部と前記Au膜との間に形成されていることを特徴とする基板。 - 請求項1または2に記載の基板であって、
前記Snはんだ部は、Snを主成分とすることを特徴とする基板。 - 請求項1において、
前記基板は、電子部品搭載用基板であり、
前記Ag膜は、前記Snはんだ部表面の電子部品搭載部に形成されていることを特徴とする基板。
Priority Applications (8)
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JP2005126080A JP4490861B2 (ja) | 2005-04-25 | 2005-04-25 | 基板 |
TW095105773A TW200644201A (en) | 2005-04-25 | 2006-02-21 | Substrate for mounting electronic parts and electronic parts |
DE200610011232 DE102006011232B4 (de) | 2005-04-25 | 2006-03-10 | Substrat zum Montieren eines elektronischen Bauteils sowie elektronisches Bauteil |
CN2009100032389A CN101510514B (zh) | 2005-04-25 | 2006-03-14 | 电子部件搭载用基板和电子部件 |
CNB200610064801XA CN100470779C (zh) | 2005-04-25 | 2006-03-14 | 电子部件搭载用基板和电子部件 |
KR20060024814A KR20060112596A (ko) | 2005-04-25 | 2006-03-17 | 전자 부품 탑재용 기판 및 전자 부품 |
US11/378,450 US7511232B2 (en) | 2005-04-25 | 2006-03-20 | Substrate for mounting electronic part and electronic part |
US12/352,631 US7842889B2 (en) | 2005-04-25 | 2009-01-13 | Substrate for mounting electronic part and electronic part |
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Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9761435B1 (en) | 2006-12-14 | 2017-09-12 | Utac Thai Limited | Flip chip cavity package |
US9711343B1 (en) | 2006-12-14 | 2017-07-18 | Utac Thai Limited | Molded leadframe substrate semiconductor package |
EP1967312A1 (de) * | 2007-03-06 | 2008-09-10 | Siemens Aktiengesellschaft | Verfahren zur Lötreparatur eines Bauteils unter Vakuum und einem eingestellten Sauerstoffpartialdruck |
US9947605B2 (en) | 2008-09-04 | 2018-04-17 | UTAC Headquarters Pte. Ltd. | Flip chip cavity package |
WO2010051106A2 (en) * | 2008-09-12 | 2010-05-06 | Arizona Board of Regents, a body corporate acting for and on behalf of Arizona State University | Methods for attaching flexible substrates to rigid carriers and resulting devices |
KR20100060968A (ko) * | 2008-11-28 | 2010-06-07 | 삼성전기주식회사 | 메탈 포스트를 구비한 기판 및 그 제조방법 |
US8493746B2 (en) | 2009-02-12 | 2013-07-23 | International Business Machines Corporation | Additives for grain fragmentation in Pb-free Sn-based solder |
US8128868B2 (en) * | 2009-02-12 | 2012-03-06 | International Business Machines Corporation | Grain refinement by precipitate formation in PB-free alloys of tin |
US9449900B2 (en) * | 2009-07-23 | 2016-09-20 | UTAC Headquarters Pte. Ltd. | Leadframe feature to minimize flip-chip semiconductor die collapse during flip-chip reflow |
US9355940B1 (en) | 2009-12-04 | 2016-05-31 | Utac Thai Limited | Auxiliary leadframe member for stabilizing the bond wire process |
KR101109231B1 (ko) * | 2010-07-08 | 2012-01-30 | 삼성전기주식회사 | 인쇄회로기판 및 이를 포함하는 진동모터 |
CN102064120B (zh) | 2010-10-22 | 2012-02-15 | 中国科学院上海微***与信息技术研究所 | 一种基于铟凸点的无助焊剂回流工艺方法 |
JP6165411B2 (ja) | 2011-12-26 | 2017-07-19 | 富士通株式会社 | 電子部品及び電子機器 |
WO2013147050A1 (ja) * | 2012-03-30 | 2013-10-03 | Dic株式会社 | 積層体、導電性パターン、電気回路及び積層体の製造方法 |
US9449905B2 (en) | 2012-05-10 | 2016-09-20 | Utac Thai Limited | Plated terminals with routing interconnections semiconductor device |
US9006034B1 (en) | 2012-06-11 | 2015-04-14 | Utac Thai Limited | Post-mold for semiconductor package having exposed traces |
US8890301B2 (en) * | 2012-08-01 | 2014-11-18 | Analog Devices, Inc. | Packaging and methods for packaging |
CN102950350A (zh) * | 2012-10-05 | 2013-03-06 | 中国电子科技集团公司第十研究所 | 多温度梯级焊接电子微组件的工艺方法 |
US9917038B1 (en) | 2015-11-10 | 2018-03-13 | Utac Headquarters Pte Ltd | Semiconductor package with multiple molding routing layers and a method of manufacturing the same |
US10276477B1 (en) | 2016-05-20 | 2019-04-30 | UTAC Headquarters Pte. Ltd. | Semiconductor package with multiple stacked leadframes and a method of manufacturing the same |
CN109029408B (zh) * | 2018-07-04 | 2021-02-05 | 中国人民解放军国防科技大学 | 一种陀螺仪谐振器及其压电电极连接方法 |
US11228124B1 (en) | 2021-01-04 | 2022-01-18 | International Business Machines Corporation | Connecting a component to a substrate by adhesion to an oxidized solder surface |
CN114420798A (zh) * | 2021-12-07 | 2022-04-29 | 深圳市思坦科技有限公司 | 接触电极的制备方法、Mirco-LED阵列器件及其制备方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62219950A (ja) * | 1986-03-20 | 1987-09-28 | Shinko Electric Ind Co Ltd | リ−ドフレ−ム |
JPS62263665A (ja) * | 1986-05-12 | 1987-11-16 | Hitachi Ltd | リ−ドフレ−ムおよびそれを用いた半導体装置 |
JPS6372895A (ja) * | 1986-09-17 | 1988-04-02 | Nippon Mining Co Ltd | 電子・電気機器用部品の製造方法 |
JP2002161396A (ja) * | 2000-11-20 | 2002-06-04 | Matsushita Electric Ind Co Ltd | 錫−銀合金めっき皮膜の製造方法及び錫−銀合金めっき皮膜及びそれを備えた電子部品用リードフレーム |
JP2002190544A (ja) * | 2000-12-19 | 2002-07-05 | Hitachi Cable Ltd | 配線基板、半導体装置、及びその製造方法 |
JP2002368155A (ja) * | 2001-06-05 | 2002-12-20 | Hitachi Cable Ltd | 配線基板、半導体装置及び配線基板の製造方法 |
JP2004500720A (ja) * | 2000-04-04 | 2004-01-08 | インターナショナル・レクチファイヤー・コーポレーション | チップスケールの表面実装デバイス及びその製造方法 |
JP2004165505A (ja) * | 2002-09-25 | 2004-06-10 | Kyocera Corp | 配線基板およびその製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026292B2 (ja) * | 1979-12-27 | 1985-06-22 | 日本電気ホームエレクトロニクス株式会社 | 半導体装置の製造方法 |
US4441118A (en) * | 1983-01-13 | 1984-04-03 | Olin Corporation | Composite copper nickel alloys with improved solderability shelf life |
US4529667A (en) | 1983-04-06 | 1985-07-16 | The Furukawa Electric Company, Ltd. | Silver-coated electric composite materials |
JPH0612796B2 (ja) | 1984-06-04 | 1994-02-16 | 株式会社日立製作所 | 半導体装置 |
JPH01152752A (ja) * | 1987-12-10 | 1989-06-15 | Nec Corp | 半導体装置 |
JP3190718B2 (ja) * | 1992-01-14 | 2001-07-23 | 株式会社東芝 | 半導体レーザ用サブマウント |
US6203931B1 (en) * | 1999-02-05 | 2001-03-20 | Industrial Technology Research Institute | Lead frame material and process for manufacturing the same |
JP4480108B2 (ja) | 2000-06-02 | 2010-06-16 | 大日本印刷株式会社 | 半導体装置の作製方法 |
KR100407448B1 (ko) * | 2000-06-12 | 2003-11-28 | 가부시키가이샤 히타치세이사쿠쇼 | 전자 기기 및 반도체 장치 |
KR100398716B1 (ko) * | 2000-06-12 | 2003-09-19 | 가부시키가이샤 히타치세이사쿠쇼 | 반도체 모듈 및 반도체 장치를 접속한 회로 기판 |
AU2001271038A1 (en) * | 2000-07-12 | 2002-01-21 | Rohm Co., Ltd. | Structure for interconnecting conductors and connecting method |
KR100371567B1 (ko) * | 2000-12-08 | 2003-02-07 | 삼성테크윈 주식회사 | Ag 선도금을 이용한 반도체 패키지용 리드프레임 |
JP2002190490A (ja) * | 2000-12-20 | 2002-07-05 | Denso Corp | バンプを有する電子部品 |
JP4073183B2 (ja) * | 2001-08-01 | 2008-04-09 | 株式会社日立製作所 | Pbフリーはんだを用いた混載実装方法及び実装品 |
JP2003223945A (ja) * | 2002-01-30 | 2003-08-08 | Tanaka Kikinzoku Kogyo Kk | Au−Ge系ろう材付リードピン |
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62219950A (ja) * | 1986-03-20 | 1987-09-28 | Shinko Electric Ind Co Ltd | リ−ドフレ−ム |
JPS62263665A (ja) * | 1986-05-12 | 1987-11-16 | Hitachi Ltd | リ−ドフレ−ムおよびそれを用いた半導体装置 |
JPS6372895A (ja) * | 1986-09-17 | 1988-04-02 | Nippon Mining Co Ltd | 電子・電気機器用部品の製造方法 |
JP2004500720A (ja) * | 2000-04-04 | 2004-01-08 | インターナショナル・レクチファイヤー・コーポレーション | チップスケールの表面実装デバイス及びその製造方法 |
JP2002161396A (ja) * | 2000-11-20 | 2002-06-04 | Matsushita Electric Ind Co Ltd | 錫−銀合金めっき皮膜の製造方法及び錫−銀合金めっき皮膜及びそれを備えた電子部品用リードフレーム |
JP2002190544A (ja) * | 2000-12-19 | 2002-07-05 | Hitachi Cable Ltd | 配線基板、半導体装置、及びその製造方法 |
JP2002368155A (ja) * | 2001-06-05 | 2002-12-20 | Hitachi Cable Ltd | 配線基板、半導体装置及び配線基板の製造方法 |
JP2004165505A (ja) * | 2002-09-25 | 2004-06-10 | Kyocera Corp | 配線基板およびその製造方法 |
Also Published As
Publication number | Publication date |
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TWI309465B (ja) | 2009-05-01 |
CN101510514A (zh) | 2009-08-19 |
US20060237231A1 (en) | 2006-10-26 |
JP2006303345A (ja) | 2006-11-02 |
DE102006011232A1 (de) | 2006-11-02 |
DE102006011232B4 (de) | 2012-11-08 |
CN1855462A (zh) | 2006-11-01 |
TW200644201A (en) | 2006-12-16 |
US7842889B2 (en) | 2010-11-30 |
KR20060112596A (ko) | 2006-11-01 |
CN101510514B (zh) | 2011-07-20 |
US7511232B2 (en) | 2009-03-31 |
CN100470779C (zh) | 2009-03-18 |
US20090126991A1 (en) | 2009-05-21 |
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