JP4466552B2 - 固体撮像装置の製造方法 - Google Patents
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Description
図6は従来の固体撮像カメラモジュールを説明するための模式的な断面図であり、ここで示す固体撮像カメラモジュール101は、CCD固体撮像装置(半導体パッケージ)102及びレンズ鏡筒103を備える。
即ち、半導体パッケージ基台に落とし込み部を形成し、この落とし込み部にシールガラスを搭載する構成の場合(図6で示す構成の場合)には、落とし込み部の外側領域(図6中符合Aで示す領域)の分だけシールガラスよりも固体撮像装置が大きくなってしまうのに対して、半導体パッケージ基台の上面にシールガラスを搭載する構成の場合(図7(a)で示す構成の場合)には、固体撮像装置は略シールガラスと同じ大きさとすることができ、結果として固体撮像装置の小型化を実現できるために、半導体パッケージ基台の上面にシールガラスを搭載する構成の固体撮像装置が提案されているのである。
即ち、半導体パッケージ基台の上面にシールガラスを搭載する構成の場合(図7(a)で示す構成の場合)には、半導体パッケージ基台に形成された第2の端子の外側領域(図7(a)中符合Bで示す領域)にシールガラスを支持するための領域を設ける必要があるのに対して、ボンディングワイヤーを封止体で封止し、この封止体の上面にシールガラスを搭載する構成の場合(図7(b)で示す構成の場合)には、第2の端子の外側領域にシールガラスを支持するための領域を設ける必要がなく、結果として固体撮像装置の小型化が実現できるために、ボンディングワイヤーを封止体で封止し、この封止体の上面にシールガラスを搭載する構成の固体撮像装置が提案されているのである。
即ち、封止体の上面にシールガラスが搭載された固体撮像装置は、樹脂材料等でボンディングワイヤーの封止を行ない、樹脂材料を硬化する前にシールガラスを樹脂材料の上面に配置し、その後に樹脂材料を硬化してシールガラスを固定することによって製造されるのであるが、樹脂材料の上にシールガラスを配置する際に樹脂材料が硬化しておらず、未硬化状態(柔らかい状態)の樹脂材料の上にシールガラスを配置するために、シールガラスの水平度を確保することが困難となるのである。
なお、「半導体パッケージ基台に形成された一直線上に位置しない3箇所以上の異なる支持部材」とは、半導体パッケージ基台と一体的に構成されたものであっても良いし、半導体パッケージ基台とは別体として形成された支持部材を半導体パッケージ基台に取り付けて構成されたものであっても良い。
また、「一直線上に位置しない3箇所以上の異なる支持部材」としたのは、一直線上には配列されず、且つ異なる3箇所以上の点を特定することで平面を特定することができるために、「一直線上に位置しない3箇所以上の異なる支持部材」とすることで光透過性部材が成すべき平面を特定することができるためである。
図1(a)は本発明を適用した固体撮像装置の一例であるCCD固体撮像装置を説明するための模式的な平面図であり、図1(b)は図1(a)中符合X−Xにおける模式的な断面図である。
本発明を適用した固体撮像装置の製造方法の一例では、先ず、ウェーハ上に形成されたCCD固体撮像素子にダイシング処理(ウェーハダイシング)を行なって単個状態のCCD固体撮像素子とした後に(図3(a)中符合a参照。)、単個状態のCCD固体撮像素子4を、複数のセラミック基台が形成されたセラミック基板20(セラミック基台の集合体。図4参照。)の各セラミック基台2の所定領域にダイボンドする(図3(a)中符合b参照。)。
本発明を適用した固体撮像装置の製造方法の他の一例では、上記した製造方法(1)と同様に、先ず、ウェーハ上に形成されたCCD固体撮像素子にダイシング処理(ウェーハダイシング)を行なって単個状態のCCD固体撮像素子とした後に(図3(b)中符合a参照。)、単個状態のCCD固体撮像素子を、複数のセラミック基台が形成されたセラミック基板(セラミック基台の集合体)の各セラミック基台の所定領域にダイボンドする(図3(b)中符合b参照。)。
即ち、未硬化状態のエポキシ樹脂上にシールガラスを配置したとしても、支持部材がシールガラスを支持するためにシールガラスの水平度を確保することが可能となる。
以下、この点について図5を参照して説明を行う。
これに対して、シールガラスの四隅を支持する本実施例の固体撮像装置の場合には、支持部材表面に変形等に起因した意図しない突起物が生じたとしても、この突起物が原因でのシールガラスの位置ズレは突起物の高さ(図5中符合Tで示す高さ)に抑えることができるため(図5(b)参照。)、シールガラスの四隅を支持することによって、上記した様に四辺を支持する固体撮像装置と比べるとシールガラスの水平度を確保することができるのである。
2 セラミック基台
3 ダイペースト
4 CCD固体撮像素子
5 第1の端子
6 第2の端子
7 金細線
8 支持部材
9 エポキシ樹脂
10 シールガラス
11 ベントホール
12 アルミナコート
13 突起物
20 セラミック基板
Claims (1)
- 固体撮像素子が搭載された半導体パッケージ基台と、前記固体撮像素子に設けられた第1の端子と前記半導体パッケージ基台に設けられた第2の端子とを電気的に接続するボンディングワイヤーと、少なくとも前記ボンディングワイヤーが接続された前記第2の端子を封止する封止体と、前記固体撮像素子の上方に配置された光透過性材料から成る光透過性部材とを備え、前記光透過性部材が、前記半導体パッケージ基台に形成された一直線上に位置しない3箇所以上の異なる支持部材によって支持された固体撮像装置の製造方法であって、
前記固体撮像素子を前記半導体パッケージ基台に搭載し、前記第1の端子と前記第2の端子とをボンディングワイヤーによって電気的に接続する工程と、
前記支持部材上にシール材を介して前記光透過性部材を配置して同光透過性部材を固定した後に、前記ボンディングワイヤーが接続された前記第2の端子を封止体によって封止する工程と、
前記封止体を硬化させる工程とを備える
固体撮像装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005356354A JP4466552B2 (ja) | 2005-12-09 | 2005-12-09 | 固体撮像装置の製造方法 |
US11/567,959 US20070194439A1 (en) | 2005-12-09 | 2006-12-07 | Solid-state imaging device, fabrication method of the same, and camera module |
KR1020060124217A KR101283217B1 (ko) | 2005-12-09 | 2006-12-08 | 고체 촬상 장치, 그 제조 방법 및 카메라 모듈 |
CN2006100647587A CN1979882B (zh) | 2005-12-09 | 2006-12-11 | 固态成像装置及其制造方法以及照相机模块 |
US12/555,664 US8952412B2 (en) | 2005-12-09 | 2009-09-08 | Method for fabricating a solid-state imaging package |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005356354A JP4466552B2 (ja) | 2005-12-09 | 2005-12-09 | 固体撮像装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007165386A JP2007165386A (ja) | 2007-06-28 |
JP4466552B2 true JP4466552B2 (ja) | 2010-05-26 |
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JP2005356354A Expired - Fee Related JP4466552B2 (ja) | 2005-12-09 | 2005-12-09 | 固体撮像装置の製造方法 |
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JP (1) | JP4466552B2 (ja) |
KR (1) | KR101283217B1 (ja) |
CN (1) | CN1979882B (ja) |
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JP2007012895A (ja) * | 2005-06-30 | 2007-01-18 | Sanyo Electric Co Ltd | 回路装置およびその製造方法 |
WO2012165647A1 (en) * | 2011-06-01 | 2012-12-06 | Canon Kabushiki Kaisha | Semiconductor device |
JP2013211695A (ja) * | 2012-03-30 | 2013-10-10 | Konica Minolta Inc | 撮像装置 |
US9826131B2 (en) | 2013-09-23 | 2017-11-21 | Heptagon Micro Optics Pte. Ltd. | Compact camera module arrangements that facilitate dam-and-fill and similar encapsulation techniques |
US10750060B2 (en) * | 2016-03-31 | 2020-08-18 | Sony Corporation | Camera module, method of manufacturing camera module, imaging apparatus, and electronic apparatus |
US20210313367A1 (en) * | 2018-08-21 | 2021-10-07 | Sony Semiconductor Solutions Corporation | Semiconductor device, electronic apparatus, and method for manufacturing semiconductor device |
US11037970B2 (en) * | 2018-11-01 | 2021-06-15 | Semiconductor Components Industries, Llc | Semiconductor package structure and related methods |
JP6839248B1 (ja) * | 2019-09-30 | 2021-03-03 | 浜松ホトニクス株式会社 | 光検出器 |
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KR970003915B1 (ko) * | 1987-06-24 | 1997-03-22 | 미다 가쓰시게 | 반도체 기억장치 및 그것을 사용한 반도체 메모리 모듈 |
US5721450A (en) * | 1995-06-12 | 1998-02-24 | Motorola, Inc. | Moisture relief for chip carriers |
JP3880278B2 (ja) * | 2000-03-10 | 2007-02-14 | オリンパス株式会社 | 固体撮像装置及びその製造方法 |
US6759743B2 (en) * | 2000-09-11 | 2004-07-06 | Xytrans, Inc. | Thick film millimeter wave transceiver module |
TW471143B (en) * | 2001-01-04 | 2002-01-01 | Wen-Wen Chiou | Integrated circuit chip package |
TW473951B (en) * | 2001-01-17 | 2002-01-21 | Siliconware Precision Industries Co Ltd | Non-leaded quad flat image sensor package |
JP2003133562A (ja) * | 2001-10-19 | 2003-05-09 | Kyocera Corp | 光半導体装置 |
JP2003332542A (ja) * | 2002-05-09 | 2003-11-21 | Shinko Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JP2004146609A (ja) | 2002-10-24 | 2004-05-20 | Kyocera Corp | 光半導体装置 |
US6982470B2 (en) * | 2002-11-27 | 2006-01-03 | Seiko Epson Corporation | Semiconductor device, method of manufacturing the same, cover for semiconductor device, and electronic equipment |
JP2005183923A (ja) * | 2003-11-28 | 2005-07-07 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JP4409338B2 (ja) | 2004-03-31 | 2010-02-03 | パナソニック株式会社 | 固体撮像装置及びその製造方法 |
US20050236644A1 (en) * | 2004-04-27 | 2005-10-27 | Greg Getten | Sensor packages and methods of making the same |
JP2006278726A (ja) * | 2005-03-29 | 2006-10-12 | Sharp Corp | 半導体装置モジュール及び半導体装置モジュールの製造方法 |
JP4827593B2 (ja) * | 2005-07-19 | 2011-11-30 | パナソニック株式会社 | 半導体装置およびその製造方法 |
US20070120213A1 (en) * | 2005-11-28 | 2007-05-31 | Hiew Siew S | Wire under dam package and method for packaging image-sensor |
US20080099866A1 (en) * | 2006-10-25 | 2008-05-01 | Impac Technology Co., Ltd. | Image sensing module and method for packaging the same |
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2006
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- 2006-12-08 KR KR1020060124217A patent/KR101283217B1/ko active IP Right Grant
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US8952412B2 (en) | 2015-02-10 |
KR101283217B1 (ko) | 2013-07-05 |
US20070194439A1 (en) | 2007-08-23 |
US20100009490A1 (en) | 2010-01-14 |
KR20070061423A (ko) | 2007-06-13 |
CN1979882A (zh) | 2007-06-13 |
JP2007165386A (ja) | 2007-06-28 |
CN1979882B (zh) | 2011-09-14 |
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