JP4458542B2 - Magnetic shield blade material and magnetic shield housing - Google Patents

Magnetic shield blade material and magnetic shield housing Download PDF

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JP4458542B2
JP4458542B2 JP2005378573A JP2005378573A JP4458542B2 JP 4458542 B2 JP4458542 B2 JP 4458542B2 JP 2005378573 A JP2005378573 A JP 2005378573A JP 2005378573 A JP2005378573 A JP 2005378573A JP 4458542 B2 JP4458542 B2 JP 4458542B2
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magnetic
sheath
magnetic plate
plate
blade material
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JP2007180355A (en
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拓微 浜野
和典 宮下
健 斉藤
靖 佐藤
二郎 美野
米男 山田
昌浩 藤倉
守弘 松本
裕二 奥崎
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Kajima Corp
Nippon Steel Corp
Nippon Steel Coated Sheet Corp
Nippon Steel Engineering Co Ltd
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Kajima Corp
Nippon Steel Corp
Nippon Steel Coated Sheet Corp
Nippon Steel Engineering Co Ltd
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Priority to JP2005378573A priority Critical patent/JP4458542B2/en
Priority to PCT/JP2006/325343 priority patent/WO2007074690A1/en
Priority to TW095148680A priority patent/TW200730089A/en
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    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B7/00—Special arrangements or measures in connection with doors or windows
    • E06B7/02—Special arrangements or measures in connection with doors or windows for providing ventilation, e.g. through double windows; Arrangement of ventilation roses
    • E06B7/08—Louvre doors, windows or grilles
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
    • E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
    • E06B9/26—Lamellar or like blinds, e.g. venetian blinds
    • E06B9/38—Other details
    • E06B9/386—Details of lamellae
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields
    • H05K9/0001—Rooms or chambers
    • H05K9/0003—Shielded walls, floors, ceilings, e.g. wallpaper, wall panel, electro-conductive plaster, concrete, cement, mortar
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/92—Protection against other undesired influences or dangers
    • E04B2001/925—Protection against harmful electro-magnetic or radio-active radiations, e.g. X-rays

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  • Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Architecture (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Description

本発明は磁気シールド用ブレード材及び磁気シールド簾体に関し、とくに空気や光の透過性のある開放型磁気シールド構造に用いる磁気シールド用ブレード材及びそのブレード材を用いた磁気シールド簾体に関する。   The present invention relates to a magnetic shield blade material and a magnetic shield housing, and more particularly to a magnetic shield blade material used for an open magnetic shield structure that is permeable to air and light, and a magnetic shield housing using the blade material.

最近の半導体関連施設・医療施設等では、EB（Electron Beam、電子ビーム）露光装置、EB描画機、MRI（Magnetic Resonance Imaging、磁気共鳴画像診断）装置、NMR（Nuclear Magnetic Resonance、核磁気共鳴）装置、SQUID（Superconducting QUantum Interference Device、超電導量子干渉素子）利用の生体磁気測定装置等の強磁気利用装置を使用することが増えており、強磁気利用装置を環境磁気ノイズから保護して正常な動作を保証するため又は強磁気利用装置の磁気的影響から周囲の人や機器を保護するため、磁気シールドルームに対する要求が高まっている。   In recent semiconductor-related facilities and medical facilities, EB (Electron Beam) exposure equipment, EB lithography, MRI (Magnetic Resonance Imaging) equipment, NMR (Nuclear Magnetic Resonance) equipment The use of strong magnetic devices such as biomagnetic measuring devices using SQUID (Superconducting Quantum Interference Device) is increasing, and the strong magnetic devices are protected from environmental magnetic noises to operate normally. In order to guarantee or protect the surrounding people and equipment from the magnetic influence of the strong magnetic utilization device, there is an increasing demand for a magnetic shield room.

従来の磁気シールドルームは、例えば特許文献１が開示するように、透磁率の高い方向性電磁鋼板、無方向性電磁鋼板、パーマロイ、軟磁性鋼板、アモルファス、液体急冷薄帯を結晶化させた微結晶磁性材料等の磁性材料板（以下、これらを纏めて単に磁性板ということがある）によりシールド対象空間の壁面を覆う構造（以下、密閉型シールド構造ということがある）を基本としている。しかし密閉型シールド構造は、磁性板の材料特性から期待されるようなシールド性能がなかなか得られず、しかも空気や光の透過性がないという問題点がある。   As disclosed in, for example, Patent Document 1, a conventional magnetic shield room is a microscopic material obtained by crystallizing a directional electrical steel sheet, non-oriented electrical steel sheet, permalloy, soft magnetic steel sheet, amorphous, liquid quenching ribbon with high magnetic permeability. The structure is based on a structure (hereinafter also referred to as a sealed shield structure) in which a wall surface of a space to be shielded is covered with a magnetic material plate such as a crystalline magnetic material (hereinafter collectively referred to as a magnetic plate). However, the hermetic shield structure has a problem in that the shielding performance as expected from the material characteristics of the magnetic plate cannot be obtained easily and there is no air or light permeability.

これに対し本発明者等は、簾状又はルーバー状に並べた磁性板の群（以下、磁気シールド簾体という）を用いて隙間のある磁気シールド構造（以下、開放型シールド構造ということがある）を開発し、特許文献２及び特許文献３に開示した。特許文献２の開放型シールド構造を、図６を参照して本発明の理解に必要な限度において説明する。図６（Ａ）は、例えば厚さ0.35mm、幅25mm、長さ300mmの８枚の短冊状磁性板５を、その長手方向中心軸Ｃが同一簾面Ｆ上にほぼ平行に並ぶように板厚方向に間隔ｄ＝30mmで重ねて形成した磁気シールド簾体６の一例を示す。例えば、各磁性板５の長手方向と直角方向における間隔ｄの断面積Saと磁性板５の断面積Sm及び磁性板５の比透磁率μsの積（Sm・μs）との割合（Sm・μs／Sa）を、（Sm・μs）／Sa＞１の範囲内において、間隔ｄ中の磁束密度が磁性板５中の磁束密度に比し十分小さくなるように選択する。   On the other hand, the present inventors sometimes use a group of magnetic plates arranged in a bowl shape or a louver shape (hereinafter referred to as a magnetic shield housing) to provide a magnetic shield structure with a gap (hereinafter referred to as an open type shield structure). ) Was developed and disclosed in Patent Document 2 and Patent Document 3. The open-type shield structure of Patent Document 2 will be described with reference to FIG. 6 to the extent necessary for understanding the present invention. FIG. 6A shows an example of eight strip-shaped magnetic plates 5 having a thickness of 0.35 mm, a width of 25 mm, and a length of 300 mm, for example, such that their longitudinal central axes C are arranged substantially in parallel on the same ridge surface F. An example of the magnetic shield housing 6 formed by being overlapped with a distance d = 30 mm in the thickness direction is shown. For example, the ratio (Sm · μs) between the sectional area Sa of the interval d in the direction perpendicular to the longitudinal direction of each magnetic plate 5 and the product (Sm · μs) of the sectional area Sm of the magnetic plate 5 and the relative permeability μs of the magnetic plate 5 / Sa) is selected so that the magnetic flux density in the interval d is sufficiently smaller than the magnetic flux density in the magnetic plate 5 within the range of (Sm · μs) / Sa> 1.

図６（Ａ）のような板厚方向間隔ｄを有する複数の磁気シールド簾体６は、各簾体６の磁性板５の長手方向端縁を接合することにより、図６（Ｂ）のような磁気的に連続した磁気シールド簾体６の列（以下、列状簾体ということがある）８を形成することができる。同図は、４つの簾体6a、6b、6c、6dをそれぞれ対応する磁性板５の端縁の重ね合わせにより縦列状に接合し、更にその一端側における磁性板５の未接合端縁を他端側の対応する磁性板５の未接合端縁と重ね合わせて接合することにより、磁気的に閉じた環状の列状簾体８（内容積280mm×280mm×280mm）とした例である。図中の符号９は磁性板５の端縁の重ね合わせ部を示す。   A plurality of magnetic shield housings 6 having a plate thickness direction interval d as shown in FIG. 6A are joined as shown in FIG. 6B by joining the longitudinal edges of the magnetic plates 5 of each housing 6. A magnetically continuous row of magnetic shield housings 6 (hereinafter sometimes referred to as a row housing) 8 can be formed. In the figure, four casings 6a, 6b, 6c, and 6d are joined in a column by overlapping the edges of the corresponding magnetic plates 5, and the unjoined edges of the magnetic plate 5 on one end side are also connected. This is an example in which a magnetically closed annular row of enclosures 8 (internal volume 280 mm × 280 mm × 280 mm) is formed by overlapping and joining the unjoined edge of the corresponding magnetic plate 5 on the end side. Reference numeral 9 in the drawing indicates an overlapping portion of the edge of the magnetic plate 5.

図６（Ｂ）の列状簾体８を、図８（Ａ）に示す環状コイル（例えばヘルムホルツ・コイル）Ｌの中央部に設置し、コイルＬの中央部に10〜100μTの一方向磁場Ｍを形成して列状簾体８の内側の磁気センサ34（例えばガウスメータ）で磁束密度Ｂを測定し、列状簾体８のシールド係数Ｓ（＝シールドがない場合の磁束密度B0／シールドがある場合の磁束密度Ｂ）を算出した。また比較のため、厚さ0.35mmで幅及び長さが280mm×280mmの４枚の方形磁性板32a、32b、32c、32dにより図６（Ｃ）のような立方体形の密閉型磁気シールド体31を作製し、同様に環状コイルＬの中央部に設置して密閉型シールド体31のシールド係数Ｓを算出した。同図（Ｃ）の密閉型シールド体31に用いた磁性材料の重量は、同図（Ｂ）の列状簾体８で用いた磁性材料の重量とほぼ同じである。 6B is installed at the center of the annular coil (for example, Helmholtz coil) L shown in FIG. 8A, and the unidirectional magnetic field M of 10 to 100 μT is provided at the center of the coil L. And the magnetic flux density B is measured by a magnetic sensor 34 (for example, a gauss meter) inside the columnar housing 8, and the shield coefficient S of the columnar housing 8 (= the magnetic flux density B 0 when there is no shield / the shield is The magnetic flux density B) in some cases was calculated. For comparison, a cubic sealed magnetic shield 31 as shown in FIG. 6C is obtained by four rectangular magnetic plates 32a, 32b, 32c, and 32d having a thickness of 0.35 mm and a width and length of 280 mm × 280 mm. Was similarly installed in the center of the annular coil L, and the shield coefficient S of the hermetic shield 31 was calculated. The weight of the magnetic material used for the sealed shield body 31 in FIG. 10C is substantially the same as the weight of the magnetic material used in the row housing 8 in FIG.

表１は、10μT、50μT、100μTの一方向磁場Ｍに対する列状簾体８及び密閉型シールド体31のシールド係数Ｓを示す。表１は、10〜100μTの一方向磁場Ｍに対する列状簾体８のシールド係数Ｓが、密閉型シールド体31に比し２〜３倍程度高いことを示している。すなわち、図６（Ｂ）の列状簾体８は磁束漏洩が少なく、密閉型シールド構造より高いシールド性能と通気性・透光性とを同時に備えた開放型シールド構造ということができる。また、簾体６の磁性板５の板厚方向間隔ｄを磁性板５の幅より大きくすることにより、所要のシールド性能を得るために必要な磁性材料を密閉型シールドに比して節減し、高度な磁気シールド構造を経済的・効率的に構築できる利点もある。なお、図６（Ａ）の磁気シールド簾体６は各磁性板５を水平（横方向）に配置しているが、複数の磁性板５を垂直（縦方向）に配置して磁気シールド簾体６を構成することも可能である。また図６（Ｂ）の列状簾体８は、図８（Ａ）のように磁気シールドルームを環境磁気ノイズから保護する受動的シールドだけでなく、同図（Ｂ）のように磁気シールドルームからの磁気漏洩を防止する能動的シールドにも適用することができる。   Table 1 shows the shield coefficient S of the columnar housing 8 and the sealed shield body 31 with respect to the unidirectional magnetic field M of 10 μT, 50 μT, and 100 μT. Table 1 shows that the shield coefficient S of the columnar housing 8 with respect to the unidirectional magnetic field M of 10 to 100 μT is about 2 to 3 times higher than that of the sealed shield body 31. That is, it can be said that the columnar housing 8 in FIG. 6B has an open shield structure that has less leakage of magnetic flux and has higher shielding performance and air permeability and translucency than the sealed shield structure. Further, by making the interval d in the thickness direction of the magnetic plate 5 of the housing 6 larger than the width of the magnetic plate 5, the magnetic material necessary for obtaining the required shield performance is reduced compared to the sealed shield, There is also an advantage that an advanced magnetic shield structure can be constructed economically and efficiently. In the magnetic shield housing 6 of FIG. 6A, each magnetic plate 5 is arranged horizontally (lateral direction), but a plurality of magnetic plates 5 are arranged vertically (longitudinal direction) to form a magnetic shield housing. 6 can also be configured. 6B is not only a passive shield that protects the magnetic shield room from environmental magnetic noise as shown in FIG. 8A, but also a magnetic shield room as shown in FIG. 6B. It can also be applied to an active shield that prevents magnetic leakage from the device.

Figure 0004458542
Figure 0004458542

図６（Ｂ）の列状簾体８を実際の磁気シールドルームに適用する場合は、図７（Ａ）に示すように、例えば厚さ0.35mm程度の磁性薄板７の複数枚を重畳した磁性板５を用いることができる。図示例の磁性板５は、磁性薄板７を重畳して断面積Smを拡大すると共に、各磁性薄板７の端縁を不揃いとして長手方向端面に凹凸を形成したものである。高いシールド性能の列状簾体８を形成するためには磁性板５の接合部からの磁束漏洩を小さく抑えることが重要であり、図７（Ｂ）のように磁性板５を凹凸端面の嵌合によって接合することで磁性板５の接合部からの磁束漏洩を極めて小さく抑えることができる。また凹凸端面付き磁性板５は、図示例のような直角向きだけでなく、シールドルームのシールド対象面の形状に応じて直線状又は任意の角度で接合することができる。   When the row-shaped housing 8 of FIG. 6B is applied to an actual magnetic shield room, as shown in FIG. 7A, for example, a magnetic material in which a plurality of magnetic thin plates 7 having a thickness of about 0.35 mm are superimposed. A plate 5 can be used. The magnetic plate 5 in the illustrated example has a magnetic plate 7 overlapped to increase the cross-sectional area Sm, and irregular edges are formed on the end surfaces in the longitudinal direction with the edges of each magnetic plate 7 being uneven. In order to form the row-shaped housing 8 having high shielding performance, it is important to suppress the leakage of magnetic flux from the joint portion of the magnetic plate 5, and the magnetic plate 5 is fitted to the uneven end face as shown in FIG. By joining together, magnetic flux leakage from the joined portion of the magnetic plate 5 can be kept extremely small. Further, the magnetic plate 5 with concave and convex end faces can be joined not only in a right angle direction as shown in the illustrated example but also in a straight line shape or an arbitrary angle according to the shape of the shield target surface of the shield room.

特開平９−１６２５８５号公報JP-A-9-162585 特許第３６３３４７５号公報Japanese Patent No. 3633475 国際公開第２００４／０８４６０３号パンフレットInternational Publication No. 2004/084603 Pamphlet 平修二監修「現代材料力学」オーム社、平成５年１２月３０日、第１版第３０刷、４８−５５頁"Modern Materials Mechanics", supervised by Shuji Hira, Ohmsha, December 30, 1993, 1st edition, 30th edition, pages 48-55

しかし図６に示す磁気シールド簾体６は、比較的薄い短冊状磁性板５を固定梁（ビーム）状に支持しているため、固定梁の支点間の距離が大きくなると磁性体５が自重により撓み、磁性板５の板厚方向間隔ｄが広がるおそれがある。磁性板５の間隔ｄが設計値より広がると、前述した（Sm・μs）／Saが小さくなって磁気シールドルームの所望の性能が得られなくなる。磁性板５の支点の数を増やして撓みを防ぐことも可能であるが、支点の数を増やすと間隔ｄが塞がれるため通気性・透光性が低下してしまう。通気性・透光性の高い磁気シールド構造を経済的に構築できるという開放型シールド構造の利点を生かしつつシールド性能の品質を安定させるためには、できるだけ支点の数を増やさずに磁性板５の撓みを抑えてシールド性能の低下を防ぐことが有効である。   However, since the magnetic shield housing 6 shown in FIG. 6 supports the relatively thin strip-shaped magnetic plate 5 in the shape of a fixed beam (beam), if the distance between the fulcrums of the fixed beam is increased, the magnetic body 5 is caused by its own weight. There is a possibility that the thickness d of the magnetic plate 5 may bend and the thickness d of the magnetic plate 5 may be increased. If the distance d between the magnetic plates 5 is wider than the design value, the aforementioned (Sm · μs) / Sa becomes small and the desired performance of the magnetic shield room cannot be obtained. Although it is possible to prevent the bending by increasing the number of fulcrums of the magnetic plate 5, if the number of fulcrums is increased, the gap d is blocked, resulting in a decrease in air permeability and translucency. In order to stabilize the quality of the shield performance while taking advantage of the open type shield structure that can economically construct a magnetic shield structure with high air permeability and translucency, the magnetic plate 5 can be made without increasing the number of supporting points as much as possible. It is effective to prevent the deterioration of the shielding performance by suppressing the bending.

また図６のような磁気シールド簾体６は、複数の磁性板５の長手方向中心軸Ｃを相互に位置合わせしながら所定板厚方向間隔ｄで並べる必要があるため、施工に手間がかかると共に、作業者によって施工品質にバラツキが生じ得る問題点もある。この施工品質のバラツキも、磁性板５の撓みと同様に、磁気シールドルームの性能を低下させる原因となる。開放型シールド構造の性能品質を安定させるためには、磁性板５の撓みを抑えると共に、磁気シールド簾体６の施工品質のバラツキを防止することが有効である。   Moreover, since the magnetic shield housing 6 as shown in FIG. 6 needs to be arranged at a predetermined distance d in the plate thickness direction while aligning the longitudinal central axes C of the plurality of magnetic plates 5 with each other, it takes time for construction. There is also a problem that the construction quality may vary depending on the operator. This variation in the construction quality also causes the performance of the magnetic shield room to deteriorate, as with the bending of the magnetic plate 5. In order to stabilize the performance quality of the open type shield structure, it is effective to suppress the bending of the magnetic plate 5 and to prevent variations in the construction quality of the magnetic shield housing 6.

そこで本発明の目的は、性能品質の安定した開放型シールド構造を構築できる磁気シールド用ブレード材及び磁気シールド簾体を提供することにある。   Accordingly, an object of the present invention is to provide a blade material for magnetic shield and a magnetic shield housing capable of constructing an open shield structure with stable performance quality.

図１及び図２の実施例を参照するに、本発明による磁気シールド用ブレード材は、長手方向と交差する断面が矩形の磁性板５を、長手方向の曲げ剛性が磁性板５の撓みを抑える大きさの非磁性鞘10に装填し、鞘10の外側表面上の所定部位に鞘10の長手方向に延びる凹入溝16を形成してなるものである。好ましくは、鞘10の長手方向と交差する断面12に磁性板５が遊嵌可能な中空部を設け、その中空部14の内面に磁性板５を位置決めする位置決め突起15を設ける。更に好ましくは、鞘10を磁性板５の断面の異なる長辺にそれぞれ対向する一対の半割鞘10a、10bの接合体とする。 1 and 2, the magnetic shielding blade material according to the present invention has a rectangular magnetic plate 5 whose cross section intersects the longitudinal direction, and the bending rigidity in the longitudinal direction suppresses the bending of the magnetic plate 5. A nonmagnetic sheath 10 having a size is loaded, and a recessed groove 16 extending in the longitudinal direction of the sheath 10 is formed at a predetermined position on the outer surface of the sheath 10 . Preferably, a hollow portion in which the magnetic plate 5 can be loosely fitted is provided in a cross section 12 intersecting the longitudinal direction of the sheath 10, and a positioning projection 15 for positioning the magnetic plate 5 is provided on the inner surface of the hollow portion 14. More preferably, the sheath 10 is a joined body of a pair of half-sheaths 10a and 10b facing the long sides of the magnetic plate 5 having different cross sections.

また図３の実施例を参照するに、本発明による磁気シールド簾体は、長手方向と交差する矩形断面の短辺を板厚とする磁性板５の群をそれぞれ長手方向の曲げ剛性が磁性板５の撓みを抑える大きさの非磁性鞘10に装填したブレード材１の群、各ブレード材１の鞘10の外側表面上の所定部位に形成した鞘10の長手方向に延びる凹入溝16、及び凹入溝16によりブレード材１の各々を芯合わせしつつ各磁性板５の長手方向中心軸Ｃが同一簾面Ｆ上に平行に並ぶように板厚方向に所定間隔ｄで簾状に重ねて梁状に支持する支持部材20を備えてなるものである。 Further, referring to the embodiment of FIG. 3, the magnetic shield housing according to the present invention has a group of magnetic plates 5 each having a short side of a rectangular cross section intersecting with the longitudinal direction as a plate thickness. A group of blade members 1 loaded in a non-magnetic sheath 10 of a size that suppresses the bending of 5, a recessed groove 16 extending in the longitudinal direction of the sheath 10 formed at a predetermined position on the outer surface of the sheath 10 of each blade member 1; and superimposed on the interdigital at predetermined intervals d in the thickness direction as the longitudinal center axis C of and while the magnetic plate 5 combined core and each blade material 1 are arranged in parallel on the same interdigital surface F by the recessed groove 16 And a support member 20 that is supported in a beam shape.

好ましくは、図１及び図２に示すように、各ブレード材１の鞘10の長手方向と交差する断面12にそのブレード材１の磁性板５が遊嵌可能な中空部を設け、その中空部の内面に磁性板５を位置決めする位置決め突起15を設ける。更に好ましくは、鞘10を磁性板５の断面の異なる長辺にそれぞれ対向する一対の半割鞘10a、10bの接合体とする。   Preferably, as shown in FIG. 1 and FIG. 2, a hollow portion in which the magnetic plate 5 of the blade material 1 can be loosely fitted is provided in a cross section 12 intersecting the longitudinal direction of the sheath 10 of each blade material 1. A positioning projection 15 for positioning the magnetic plate 5 is provided on the inner surface. More preferably, the sheath 10 is a joined body of a pair of half-sheaths 10a and 10b facing the long sides of the magnetic plate 5 having different cross sections.

本発明は、長手方向と交差する断面が矩形の磁性板５を長手方向の曲げ剛性が磁性板５の撓みを抑える大きさの非磁性鞘10に装填してブレード材１を構成し、ブレード材１の鞘10の外側表面上の所定部位に鞘10の長手方向に延びる凹入溝16を形成し、そのブレード材１の群を凹入溝16により芯合わせしつつ各ブレード材１の磁性板５の長手方向中心軸Ｃが同一簾面Ｆ上に平行に並ぶように所定間隔ｄで簾状に重ねて支持することにより磁気シールド簾体６を構成するので、次の顕著な効果を奏する。 The present invention constitutes the blade material 1 a section crossing the longitudinal direction are loaded with the magnetic plate 5 of the rectangular longitudinal bending stiffness in flexure nonmagnetic sheath 10 sized to suppress the magnetic plate 5, the blade member A concave groove 16 extending in the longitudinal direction of the sheath 10 is formed in a predetermined portion on the outer surface of the one sheath 10, and the blades 1 are aligned by the concave grooves 16 , and the magnetic plate of each blade material 1 is aligned. Since the magnetic shield housing 6 is constructed by supporting the five longitudinal center axes C in parallel with each other at a predetermined interval d so that they are arranged in parallel on the same saddle surface F, the following remarkable effects are obtained.

（イ）磁性板５を曲げ剛性が大きい非磁性鞘10に装填してブレード材１とすることにより、磁性板５の撓みを小さく抑え、磁気シールド簾体６の性能品質を安定させることができる。
（ロ）磁性板５の撓みを小さく抑えることにより、従来の磁気シールド簾体６に比し支持部材（支点）の間隔を広げ、磁気シールド簾体６の通気性・透光性を高めることができる。
（ハ）非磁性鞘10の中空部に磁性板５を遊嵌させて位置決めすることにより、非磁性鞘10を用いて複数の磁性板５の長さ方向中心軸Ｃを容易に位置合わせすることができ、磁気シールド簾体６の施工品質のバラツキを防止することができる。 (A) By loading the magnetic plate 5 into the non-magnetic sheath 10 having a high bending rigidity to obtain the blade material 1, it is possible to suppress the bending of the magnetic plate 5 and to stabilize the performance quality of the magnetic shield housing 6. .
(B) By suppressing the bending of the magnetic plate 5 to be small, the interval between the support members (fulcrum points) can be increased compared to the conventional magnetic shield housing 6 and the air permeability and translucency of the magnetic shield housing 6 can be improved. it can.
(C) By positioning the magnetic plate 5 loosely in the hollow portion of the nonmagnetic sheath 10 and positioning it, the longitudinal central axes C of the plurality of magnetic plates 5 can be easily aligned using the nonmagnetic sheath 10. And variation in the construction quality of the magnetic shield housing 6 can be prevented.

（ニ）非磁性鞘10を一対の半割鞘10a、10bの接合体とすることにより、非磁性鞘10に対する磁性板５の装填作業の効率向上を図ることができる。
（ホ）非磁性鞘10の外側表面上の所定部位に鞘10の長手方向に延びる凹入溝16を形成することにより、その凹入溝16を利用して複数のブレード材１の芯合わせの容易化を図ることができる。
（ヘ）非磁性鞘10の表面にカーブをつけることにより、ブレード材１の強度を更に増大させることができる。
（ト）非磁性鞘10を光反射性の材質とした場合でも、非磁性鞘10の表面に細かな溝を設けることにより、光の照り返しを小さく抑えることができる。 (D) By making the nonmagnetic sheath 10 a joined body of a pair of half sheaths 10a and 10b, it is possible to improve the efficiency of the work of loading the magnetic plate 5 onto the nonmagnetic sheath 10.
(E) By forming a recessed groove 16 extending in the longitudinal direction of the sheath 10 at a predetermined position on the outer surface of the nonmagnetic sheath 10, the blades 1 can be aligned using the recessed grooves 16 Simplification can be achieved.
(F) The strength of the blade member 1 can be further increased by providing a curve on the surface of the nonmagnetic sheath 10.
(G) Even when the nonmagnetic sheath 10 is made of a light-reflective material, the reflection of light can be kept small by providing a fine groove on the surface of the nonmagnetic sheath 10.

図１及び図２は、長手方向中心軸Ｃと交差する断面が矩形の磁性板５を非磁性鞘10に装填した本発明の磁気シールド用ブレード材１の実施例を示す。磁性板５は、図６に示す磁気シールド簾体６の磁性板５と同様に、矩形断面の短辺を板厚ｗとし長辺を板幅ｔとした所要長さのものである。磁性板５の板厚ｗ及び板幅ｔは、図６の場合と同様に簾体６に与えるシールド性能に応じて、磁性板５の断面積Sm及び比透磁率μsの積（Sm・μs）が間隔ｄの断面積Saより大きくなるように選択する。磁性板５の長さは適当に選択できるが、図示例のように複数枚（図示例では３枚）の磁性薄板７を板厚方向に重畳して長手方向端面に凹凸が形成された磁性板５とし、その凹凸端面により複数の磁性板５を中心軸Ｃ方向に直列に接合して適当な長さとすることにより、磁性板５の中心軸Ｃ方向の接合部からの磁束漏洩を小さく抑えることが望ましい。必要に応じて磁性板５の中心軸Ｃを曲線とし、ブレード材１を曲線状としてもよい。   1 and 2 show an embodiment of the magnetic shield blade material 1 of the present invention in which a nonmagnetic sheath 10 is loaded with a magnetic plate 5 having a rectangular cross section intersecting the longitudinal central axis C. FIG. Similar to the magnetic plate 5 of the magnetic shield housing 6 shown in FIG. 6, the magnetic plate 5 has a required length in which the short side of the rectangular cross section has a plate thickness w and the long side has a plate width t. The thickness w and width t of the magnetic plate 5 are the product (Sm · μs) of the cross-sectional area Sm and the relative permeability μs of the magnetic plate 5 according to the shielding performance given to the housing 6 as in the case of FIG. Is selected to be larger than the cross-sectional area Sa of the interval d. The length of the magnetic plate 5 can be selected appropriately. However, as shown in the illustrated example, a plurality of magnetic thin plates 7 (three in the illustrated example) are superposed in the plate thickness direction to form irregularities on the longitudinal end surface. 5 and connecting the plurality of magnetic plates 5 in series in the direction of the central axis C with the end surfaces of the projections and depressions to an appropriate length, thereby suppressing magnetic flux leakage from the joint portion of the magnetic plate 5 in the direction of the central axis C. Is desirable. If necessary, the central axis C of the magnetic plate 5 may be curved and the blade material 1 may be curved.

磁性板５を非磁性鞘10に装填することにより、ブレード材１の長手方向の曲げ剛性を磁性板５の撓みを抑える大きさとする。一般に梁（ビーム）は、その長手方向軸線Ｃと直角向きの曲げモーメントＭを受けると曲がりを生じるが、梁の中立面（伸縮しない長手方向軸を含む面）の曲率１／ρと曲げモーメントＭとの間には、梁の縦弾性係数（ヤング率）Ｅと断面慣性モーメント（断面二次モーメント）Ｉとを用いて(1)式の関係があることが知られている（非特許文献１参照）。(1)式においてＥＩは、曲げ（曲率１／ρ）に対する変形抵抗の大きさを示すパラメータであり、曲げ剛性（flexural rigidity）と呼ばれる。磁性板５自体の曲げ剛性ＥＩが比較的小さく、梁状に支持したときに自重（荷重）による曲げモーメントＭを受けて撓む場合であっても、磁性板５を非磁性鞘10に装填して曲げ剛性ＥＩを大きくすることにより、梁状に支持した場合でも磁性板５及び非磁性鞘10の自重（荷重）に抗して撓みにくいブレード材１とすることができる。
［数１］
１／ρ＝Ｍ／（ＥＩ） …………………………………… (1) By loading the magnetic plate 5 in the nonmagnetic sheath 10, the bending rigidity in the longitudinal direction of the blade material 1 is set to a size that suppresses the bending of the magnetic plate 5. In general, a beam is bent when it receives a bending moment M perpendicular to its longitudinal axis C, but the curvature 1 / ρ and the bending moment of the neutral surface of the beam (including the longitudinal axis that does not expand and contract). It is known that there is a relationship between M and M using the longitudinal elastic modulus (Young's modulus) E of the beam and the moment of inertia of the section (second moment of section) I (non-patent document). 1). In Equation (1), EI is a parameter indicating the magnitude of deformation resistance with respect to bending (curvature 1 / ρ), and is called flexural rigidity. Even if the bending rigidity EI of the magnetic plate 5 itself is relatively small and it bends by receiving a bending moment M due to its own weight (load) when supported in a beam shape, the magnetic plate 5 is loaded into the nonmagnetic sheath 10. By increasing the bending rigidity EI, the blade material 1 can be made difficult to bend against the dead weight (load) of the magnetic plate 5 and the nonmagnetic sheath 10 even when it is supported in a beam shape.
[Equation 1]
1 / ρ = M / (EI) …………………………………… (1)

好ましくは、非磁性鞘10の長手方向と交差する断面12を磁性板５が遊嵌可能な中空形状とし、断面慣性モーメントＩを大きくすることによりブレード材１の長手方向の曲げ剛性ＥＩを大きくする。一般に梁の断面慣性モーメントＩは、断面積が同じであれば、円形や正方形の断面形状よりもＩ形や中空の断面形状の方が大きくなることが知られている（非特許文献１参照）。非磁性鞘10を中空断面とし、その中空部14に磁性板５を遊嵌させることにより、ブレード材１の荷重の増加を小さく抑えつつブレード材１の曲げ剛性ＥＩを大きくすることができる。例えば図２のように非磁性鞘10の断面を磁性板５とほぼ相似形の中空部14を有する矩形とし、簡易な断面形状とすることで製造コストを低く抑える。あるいは図１のように、非磁性鞘10の断面を中空の円弧形又は楕円弧形とし、鞘10の表面にカーブをつけて鉛直方向の応力を分散させることによりブレード材１の強度を増大させる。   Preferably, the cross section 12 intersecting with the longitudinal direction of the nonmagnetic sheath 10 is formed into a hollow shape into which the magnetic plate 5 can be loosely fitted, and the longitudinal inertia moment I of the blade member 1 is increased by increasing the sectional inertia moment I. . In general, it is known that the cross-sectional inertia moment I of a beam is larger in the I-shaped or hollow cross-sectional shape than the circular or square cross-sectional shape if the cross-sectional area is the same (see Non-Patent Document 1). . By making the nonmagnetic sheath 10 have a hollow cross section and the magnetic plate 5 is loosely fitted in the hollow portion 14, the bending rigidity EI of the blade material 1 can be increased while suppressing an increase in the load of the blade material 1. For example, as shown in FIG. 2, the cross-section of the non-magnetic sheath 10 is a rectangle having a hollow portion 14 that is substantially similar to the magnetic plate 5 and has a simple cross-sectional shape, thereby reducing manufacturing costs. Alternatively, as shown in FIG. 1, the non-magnetic sheath 10 has a hollow arc shape or elliptic arc shape, and the surface of the sheath 10 is curved to disperse the stress in the vertical direction, thereby increasing the strength of the blade material 1. Let

更に好ましくは、非磁性鞘10の中空部14の周壁内面に磁性板５を位置決めするための位置決め突起15、15を設け、位置決め突起15、15により磁性板５を中空部14内の所定位置に位置決めする。磁性板５の施工に比して非磁性鞘10の施工は比較的容易であり、複数の非磁性鞘10を相互に位置合わせしながら並べたうえで各非磁性鞘10の中空部14に磁性板５を位置決めすることにより、複数の磁性板５の長手方向中心軸Ｃを比較的容易に位置合わせすることが可能となり、開放型シールド構造の施工品質のバラツキを防止することができる。また、図示例のように磁性薄板７の複数枚が重畳された磁性板５を用いる場合は、位置決め突起15により各磁性薄板７の長手方向中心軸Ｃの位置ずれを防止することができる。ただし、本発明で用いる非磁性鞘10は長手方向の曲げ剛性が磁性板５の撓みを抑える大きさのものであれば足り、中空断面形状のものに限定されない。   More preferably, positioning projections 15 and 15 for positioning the magnetic plate 5 are provided on the inner surface of the peripheral wall of the hollow portion 14 of the nonmagnetic sheath 10, and the magnetic plate 5 is placed at a predetermined position in the hollow portion 14 by the positioning projections 15 and 15. Position. The construction of the nonmagnetic sheath 10 is relatively easy as compared with the construction of the magnetic plate 5, and a plurality of nonmagnetic sheaths 10 are aligned while being aligned with each other, and the hollow portions 14 of each nonmagnetic sheath 10 are magnetized. By positioning the plate 5, it becomes possible to relatively easily align the longitudinal central axes C of the plurality of magnetic plates 5, and to prevent variations in construction quality of the open shield structure. Further, when using the magnetic plate 5 on which a plurality of magnetic thin plates 7 are superimposed as in the illustrated example, the positioning protrusions 15 can prevent the positional deviation of the central axis C in the longitudinal direction of each magnetic thin plate 7. However, the nonmagnetic sheath 10 used in the present invention is not limited to a hollow cross-sectional shape as long as the bending rigidity in the longitudinal direction is large enough to suppress the bending of the magnetic plate 5.

図示例の非磁性鞘10は、磁性板５の矩形断面の異なる長辺（板幅方向）と対向する一対の半割鞘10a、10bを磁性板５の矩形断面の短辺方向（板厚方向）に接合させることにより中空断面を形成し、両半割鞘10a、10bの間に磁性板５を保持したものである。各半割鞘10a、10bの半割断面12a、12bにはそれぞれ板幅方向の両端部に磁性板５の板厚方向に突出する接合突起17、17が設けられ、接合突起17、17を相互に突合せることで磁性板５が遊嵌可能な中空部14を形成する。図２のように接合突起17の先端に適当な接合機構を設けるか、接合突起17の先端を適当な接着剤等で接合することできる。荷重の増加を小さく抑えるため、半割鞘10a、10bの中空部14の周壁の幅は、長手方向の曲げ剛性ＥＩが磁性板５の撓みを抑えることができる範囲内において極力薄くすることが望ましい。一対の半割鞘10a、10bを用いて中空形状の非磁性鞘10を構成することにより、施工品質のバラツキ防止だけでなく、非磁性鞘10に磁性板５を装填する作業の効率向上も図ることもできる。   The non-magnetic sheath 10 in the illustrated example has a pair of half-sheaths 10a and 10b opposite to different long sides (plate width direction) of the rectangular cross section of the magnetic plate 5 in the short side direction (plate thickness direction) of the magnetic plate 5 ) To form a hollow cross section, and the magnetic plate 5 is held between the half halves 10a and 10b. The half-sections 12a and 12b of the half-sheaths 10a and 10b are respectively provided with joint projections 17 and 17 projecting in the thickness direction of the magnetic plate 5 at both ends in the plate width direction. The hollow portion 14 into which the magnetic plate 5 can be loosely fitted is formed. As shown in FIG. 2, an appropriate joining mechanism can be provided at the tip of the joint projection 17 or the tip of the joint projection 17 can be joined with an appropriate adhesive or the like. In order to suppress an increase in load, it is desirable to make the width of the peripheral wall of the hollow portion 14 of the half sheaths 10a and 10b as thin as possible within the range in which the bending rigidity EI in the longitudinal direction can suppress the bending of the magnetic plate 5. . By configuring the hollow nonmagnetic sheath 10 using the pair of half sheaths 10a and 10b, not only the variation in construction quality is prevented, but also the efficiency of the work of loading the magnetic plate 5 on the nonmagnetic sheath 10 is improved. You can also.

非磁性鞘10は金属製、合成樹脂性、木製等の適当な非磁性材質製とすることができるが、できるだけ縦弾性係数（ヤング率）Ｅの大きい材質を選択してブレード材１の長手方向の曲げ剛性ＥＩを大きくすることが好ましい。例えば非磁性鞘10をアルミ製とする。アルミ等の光反射性材質を用いる場合は、図１（Ｂ）に示すように、非磁性鞘10の外側表面に細かな溝18を設けて光の照り返しを小さく抑えることが望ましい。外側表面の細かな溝18は、ブレード材１の意匠性を向上させる効果も果たす。   The non-magnetic sheath 10 can be made of a suitable non-magnetic material such as metal, synthetic resin, wood, etc., but a material having as large a longitudinal elastic modulus (Young's modulus) E as much as possible is selected and the longitudinal direction of the blade material 1 It is preferable to increase the bending rigidity EI. For example, the nonmagnetic sheath 10 is made of aluminum. When a light reflective material such as aluminum is used, it is desirable to provide a small groove 18 on the outer surface of the nonmagnetic sheath 10 to keep light reflection small as shown in FIG. The fine grooves 18 on the outer surface also serve to improve the design of the blade material 1.

望ましくは、図示例のように非磁性鞘10の外側表面の所定部位に鞘10の長手方向に延びる凹入溝16を形成し、その凹入溝16を利用して複数の非磁性鞘10の相互位置合わせの容易化を図る。図示例では、一対の半割鞘10a、10bの断面12a、12bの板幅方向両端にそれぞれ接合突起17より板幅方向へ突出する庇部13を設け、接合突起17、17を相互に突合せたときに、両半割鞘10a、10bの庇部13、13と接合突起17、17とにより磁性板５の矩形断面の短辺と対向する部位に凹入溝16を形成している。ただし、凹入部16を形成する部位は図示例に限定されない。また、凹入部16に代えて、非磁性鞘10の外側表面に長手方向に延びる凸出筋を設けて複数の非磁性鞘10を相互に位置合わせすることも可能である。   Desirably, a recessed groove 16 extending in the longitudinal direction of the sheath 10 is formed in a predetermined portion of the outer surface of the nonmagnetic sheath 10 as shown in the drawing, and a plurality of nonmagnetic sheaths 10 are formed using the recessed grooves 16. Facilitates mutual alignment. In the illustrated example, the flanges 13 projecting in the plate width direction from the joint protrusions 17 are provided at both ends in the plate width direction of the cross-sections 12a and 12b of the pair of half sheaths 10a and 10b, and the joint protrusions 17 and 17 are abutted with each other. In some cases, the recessed grooves 16 are formed in portions facing the short sides of the rectangular cross section of the magnetic plate 5 by the flange portions 13 and 13 of the two half sheaths 10a and 10b and the joint protrusions 17 and 17. However, the part which forms the recessed part 16 is not limited to the example of illustration. Further, instead of the recessed portion 16, a plurality of nonmagnetic sheaths 10 can be aligned with each other by providing projecting streaks extending in the longitudinal direction on the outer surface of the nonmagnetic sheath 10.

図３は、図１の磁気シールド用ブレード材１の群を用いた本発明の磁気シールド簾体６の実施例を示す。図示例の簾体６は、各ブレード材１の長手方向と直交する方向の支持部材20を有し、その支持部材20によりブレード材１の群を各ブレード材１の磁性板５の長手方向中心軸Ｃが同一簾面Ｆ上に平行に並ぶように所定間隔ｄで簾状に重ねて支持したものである。簾体10を構成する各ブレード材１及び磁性板５は同じ形状とすることが望ましい。ただし、各ブレード材１は磁性板５の長手方向中心軸Ｃが同一簾面Ｆ上にあれば足り、中心軸Ｃの回りの角度位置はブレード材１毎に異なっていてもよい。   FIG. 3 shows an embodiment of the magnetic shield housing 6 of the present invention using the group of magnetic shield blade members 1 of FIG. The housing 6 in the illustrated example has a support member 20 in a direction orthogonal to the longitudinal direction of each blade member 1, and the group of blade members 1 is centered in the longitudinal direction of the magnetic plate 5 of each blade member 1 by the support member 20. The shaft C is supported by being overlapped in a hook shape at a predetermined interval d so that the axes C are arranged in parallel on the same hook surface F. It is desirable that the blade members 1 and the magnetic plate 5 constituting the casing 10 have the same shape. However, it is sufficient that each blade member 1 has the longitudinal central axis C of the magnetic plate 5 on the same saddle surface F, and the angular position around the central axis C may be different for each blade member 1.

簾体６における各ブレード材１の間隔ｄは、図６の場合と同様に簾体６に与えるシールド性能に応じて（Sm・μs／Sa）＞１となるように選択する。（Sm・μs／Sa）＞１とすることにより、ブレード材１中の磁束の通りやすさ（磁性板のパーミアンス）を間隔ｄ中の磁束の通りやすさ（間隔のパーミアンス）より大きくし、間隔ｄにおける磁束密度を低減して簾体６にシールド性能を与えることができる。好ましくは簾体６のブレード材１の間隔ｄを磁性板５の幅ｔより大きくし、通気性・透光性を高めると共に、シールド性能を得るために必要な磁性材料を節減する。高いシールド性能と高い通気性・透光性とを同時に得るためには（Sm・μs／Sa）と間隔ｄとを共に十分大きくすることが望ましい。簾体６における各ブレード材１の間隔ｄは全て同じである必要はなく、ブレード材１の位置によって間隔ｄが相違してもよい。   The distance d between the blade members 1 in the housing 6 is selected so that (Sm · μs / Sa)> 1 according to the shielding performance given to the housing 6 as in the case of FIG. By setting (Sm · μs / Sa)> 1, the ease of magnetic flux in the blade material 1 (permeance of the magnetic plate) is made larger than the ease of magnetic flux in the interval d (permeance of the interval). The shield 6 can be provided with shielding performance by reducing the magnetic flux density at d. Preferably, the interval d between the blade members 1 of the housing 6 is made larger than the width t of the magnetic plate 5 to improve the air permeability and translucency and to reduce the magnetic material necessary for obtaining the shielding performance. In order to obtain high shielding performance and high air permeability and translucency at the same time, it is desirable that both (Sm · μs / Sa) and the distance d be sufficiently large. The intervals d of the blade members 1 in the housing 6 do not have to be the same, and the intervals d may be different depending on the positions of the blade members 1.

図示例では、一対の支持部材20上にそれぞれ、各ブレード材１の外側表面上に設けた凹入溝16と嵌合する支持突起21の列を所定間隔（ｄ＋ｗ）で設けている。例えば、一対の支持部材20を対応する支持突起21がそれぞれ同じ高さとなるように所要間隔で垂直に立設し、その対応する支持突起21に各ブレード材１の凹入溝16を嵌合させることにより、複数のブレード材１の長手方向中心軸Ｃを同一簾面Ｆ上に位置合わせする。なお、図示例ではブレード材１の板幅方向両側にそれぞれ支持部材20を配置してブレード材１を板幅方向両側から支持しているが、支持部材20はブレード材１の板幅方向片側に配置するだけでも足りる。また、図示例では一対の支持部材20により各ブレード材１を固定梁状に支持しているが、ブレード材１の曲げ剛性を十分大きくすることにより、本発明では各ブレード材１を片持梁状に支持することも可能である。   In the illustrated example, a row of support protrusions 21 that fit into recessed grooves 16 provided on the outer surface of each blade member 1 are provided on the pair of support members 20 at a predetermined interval (d + w). For example, the pair of support members 20 are vertically erected at a required interval so that the corresponding support protrusions 21 have the same height, and the corresponding recesses 16 of the blade material 1 are fitted into the corresponding support protrusions 21. Thus, the longitudinal center axes C of the plurality of blade members 1 are aligned on the same saddle surface F. In the illustrated example, support members 20 are disposed on both sides of the blade member 1 in the plate width direction to support the blade member 1 from both sides of the plate member. However, the support member 20 is disposed on one side of the blade member 1 in the plate width direction. Just placing it is enough. In the illustrated example, each blade member 1 is supported in the form of a fixed beam by a pair of support members 20, but in the present invention, each blade member 1 is cantilevered by sufficiently increasing the bending rigidity of the blade member 1. It is also possible to support it in a shape.

図示例のように磁性板５を非磁性鞘10に装填して曲げ剛性の大きなブレード材１とすることにより、磁性板５の撓みを小さく抑え、磁気シールド簾体６のシールド性能を安定させることができる。また、非磁性鞘10を利用して複数の磁性板５の長手方向中心軸Ｃを容易に芯合わせすることが可能であり、作業者による芯合わせの品質のバラツキをなくし、品質のバラツキによるシールド性能の低下も小さく抑えることができる。しかも、曲げ剛性の大きなブレード材１を用いることにより、図６のように鞘10なしの磁性板５を用いた磁気シールド簾体６に比して支持部材20の間隔を広げることが可能となり、磁気シールド簾体６の通気性・透光性を高めることができる。   By loading the magnetic plate 5 in the non-magnetic sheath 10 and making the blade material 1 with high bending rigidity as shown in the example, the bending of the magnetic plate 5 can be suppressed to be small and the shielding performance of the magnetic shield housing 6 can be stabilized. Can do. Further, it is possible to easily center the longitudinal central axes C of the plurality of magnetic plates 5 by using the nonmagnetic sheath 10, eliminating variations in the centering quality by the operator, and shielding due to variations in quality. A decrease in performance can be suppressed to a small level. Moreover, by using the blade material 1 having a large bending rigidity, it becomes possible to widen the interval between the support members 20 as compared with the magnetic shield housing 6 using the magnetic plate 5 without the sheath 10 as shown in FIG. The air permeability and translucency of the magnetic shield housing 6 can be improved.

こうして、本発明の目的である「性能品質の安定した開放型シールド構造を構築できる磁気シールド用ブレード材及び磁気シールド簾体」の提供が達成できる。   Thus, it is possible to achieve “the blade material for magnetic shield and the magnetic shield housing capable of constructing an open shield structure with stable performance quality” which is an object of the present invention.

図４は、磁気シールド簾体６におけるブレード材１の板厚方向間隔ｄを容易に調節可能とした本発明の磁気シールド簾体６の実施例を示す。図示例の支持部材20は各ブレード材１の長手方向と直交する方向のレール部23を有し、そのレール部23に各ブレード材１の外側表面上に設けた凹入溝16と嵌合する支持突起21を滑動自在に取り付け、滑動自在な支持突起21に各ブレード材１の凹入溝16を嵌合させて磁気シールド簾体６を構成する。支持突起21を滑動自在とすることにより、磁気シールドルームの施工現場毎に応じて支持突起21の位置を調節して磁気シールド簾体６のブレード材１の板厚方向間隔ｄを調整することができ、磁気シールドルームの施工の容易化に貢献することができる。   FIG. 4 shows an embodiment of the magnetic shield housing 6 of the present invention in which the thickness d of the blade material 1 in the magnetic shield housing 6 can be easily adjusted. The support member 20 in the illustrated example has a rail portion 23 in a direction orthogonal to the longitudinal direction of each blade member 1, and the rail portion 23 is fitted with a recessed groove 16 provided on the outer surface of each blade member 1. The support protrusion 21 is slidably attached, and the recessed groove 16 of each blade member 1 is fitted to the slidable support protrusion 21 to constitute the magnetic shield housing 6. By making the support protrusion 21 slidable, the position d of the support protrusion 21 can be adjusted according to the construction site of the magnetic shield room to adjust the plate thickness direction interval d of the blade material 1 of the magnetic shield housing 6. It can contribute to the ease of construction of the magnetic shield room.

また図示例では、支持部材20を断面Ｔ字型の帯状部材20a、20bの脚部を付き合わせたものとし、その一対の帯状部材20a、20bにより透明パネル25を磁気シールド簾体６と平行に支持している（図３も参照）。すなわち図示例の支持部材20によれば、一対の透光パネル25と磁気シールド簾体６とからなる開放型シールド構造が構築できる。例えば、導電メッシュ又は導電性フィルム26が挟み込まれた透明パネル25を組み合わせることにより、磁気シールド性能と電波シールド性能と透光性とを同時に備えたシールドルームを構築できる。また、透明パネル25を鉛入りとすることにより、放射線のシールド性能を備えたシールドルームを構築することも可能である。   Further, in the illustrated example, the support member 20 is formed by attaching the leg portions of the belt-shaped members 20a and 20b having a T-shaped cross section, and the transparent panel 25 is parallel to the magnetic shield housing 6 by the pair of belt-shaped members 20a and 20b. (See also FIG. 3). That is, according to the support member 20 in the illustrated example, an open type shield structure including a pair of translucent panels 25 and the magnetic shield housing 6 can be constructed. For example, by combining a transparent panel 25 sandwiched with a conductive mesh or conductive film 26, a shield room having magnetic shielding performance, radio wave shielding performance and translucency can be constructed at the same time. Moreover, it is also possible to construct a shield room having radiation shielding performance by making the transparent panel 25 contain lead.

図５は、支持部材20としてステンレス角パイプを用いた本発明の磁気シールド簾体６の実施例を示す。図示例では、支持部材20の片側（裏側）側面に複数のブレード材１をビス22により結合して磁気シールド簾体６を支持すると共に、反対側（表側）側面に断面Ｔ字型の帯状部材20a、20bの対をビス22により結合し、図４の場合と同様に導電メッシュ又は導電性フィルム26が挟み込まれた透明パネル25を磁気シールド簾体６と平行に支持している。支持部材20をステンレス角パイプとすることにより、複数のブレード材１の重量を支えるに十分な強度を得ることができる。また角パイプは、表側と裏側とにそれぞれ帯状部材20a、20bとブレード材１とをビス留めできる利点がある。   FIG. 5 shows an embodiment of the magnetic shield housing 6 of the present invention using a stainless steel square pipe as the support member 20. In the illustrated example, a plurality of blade members 1 are coupled to one side (back side) side surface of the support member 20 by screws 22 to support the magnetic shield housing 6, and a strip-shaped member having a T-shaped cross section on the opposite side (front side) side surface. A pair of 20a and 20b is coupled by screws 22, and a transparent panel 25 sandwiched with a conductive mesh or conductive film 26 is supported in parallel with the magnetic shield housing 6 as in the case of FIG. By making the support member 20 a stainless steel square pipe, it is possible to obtain sufficient strength to support the weight of the plurality of blade members 1. Further, the square pipe has an advantage that the belt-like members 20a and 20b and the blade member 1 can be screwed to the front side and the back side, respectively.

図示例の磁気シールド簾体６は、ブレード材１の非磁性鞘10を一対の半割鞘10a、10bの接合体としている。このような磁気シールド簾体６を施工する場合は、先ずブレード材１の一方（下半分）の半割鞘10aをビス22により支持部材20に固定する。このとき磁性板５はまだ装填されていないので、例えば半割鞘10aの接合突起に設けたビス孔にビス22を貫通させてビス留め作業を行うことができ、支持部材20の側面（裏側側面）に複数の半割鞘10aを芯合わせしながら所定間隔で固定することができる。複数の半割鞘10aを支持部材20にしっかりと固定したのち、各半割鞘10aの上に磁性板５を載置し、さらに他方（上半分）の半割鞘10bを上から押えるように半割鞘10aと噛み合わせて磁性板５を半割鞘10a、10b内に装填する。こうして複数の磁性板５の長手方向中心線Ｃが相互に位置合わせされた磁気シールド簾体６を比較的容易に施工することができ、施工品質のバラツキも防止できる。   In the illustrated magnetic shield housing 6, the nonmagnetic sheath 10 of the blade material 1 is a joined body of a pair of half sheaths 10 a and 10 b. When constructing such a magnetic shield housing 6, first, the half sheath 10 a of one (lower half) of the blade material 1 is fixed to the support member 20 with screws 22. At this time, since the magnetic plate 5 has not been loaded yet, for example, the screw 22 can be inserted into the screw hole provided in the joint projection of the half sheath 10a, and the screwing operation can be performed. A plurality of half sheaths 10a can be fixed at predetermined intervals while being aligned. After firmly fixing a plurality of half-sheaths 10a to the support member 20, the magnetic plate 5 is placed on each half-sheath 10a, and the other half (upper half) half-sheath 10b is pressed from above. The magnetic plate 5 is loaded into the half sheaths 10a and 10b by meshing with the half sheath 10a. Thus, the magnetic shield housing 6 in which the longitudinal center lines C of the plurality of magnetic plates 5 are aligned with each other can be relatively easily constructed, and variations in construction quality can be prevented.

本発明の磁気シールド用ブレード材の一実施例の説明図である。It is explanatory drawing of one Example of the blade material for magnetic shields of this invention. 本発明の磁気シールド用ブレード材の他の実施例の説明図である。It is explanatory drawing of the other Example of the blade material for magnetic shields of this invention. 本発明のブレード材を用いた磁気シールド簾体の一実施例の説明図である。It is explanatory drawing of one Example of the magnetic shield housing | casing using the blade material of this invention. 本発明のブレード材を用いた磁気シールド簾体の他の実施例の説明図である。It is explanatory drawing of the other Example of the magnetic shield housing | casing using the blade material of this invention. 本発明のブレード材を用いた磁気シールド簾体の更に他の実施例の説明図である。It is explanatory drawing of other Example of the magnetic shield housing | casing using the blade material of this invention. 従来の磁気シールド簾体を用いた開放型シールド構造の説明図である。It is explanatory drawing of the open type shield structure using the conventional magnetic shield housing. 従来の磁気シールド簾体を構成する磁性板の一例の説明図である。It is explanatory drawing of an example of the magnetic board which comprises the conventional magnetic shield housing. 磁気シールド簾体のシールド性能計測方法の説明図である。It is explanatory drawing of the shield performance measuring method of a magnetic shield housing.

符号の説明Explanation of symbols

１…ブレード材 ５…磁性材料板（磁性板）
６…磁気シールド簾体 ７…磁性材料薄板（磁性薄板）
８…列状簾体 ９…重ね合わせ部分
10…非磁性鞘 10a、10b…反割鞘
12…鞘の断面 13…庇部
14…中空部 15…位置決め突起
16…凹入溝 17…接合突起
18…照り返し防止溝 20…支持部材
21…支持突起 22…ビス
23…レール部 25…透光パネル
26…導電メッシュ又は導電性フィルム
27…ゴムパッキン
31…密閉型磁気シールド体 32…方形磁性板
34…磁気センサ
ｗ…磁性板の板厚 Ｒ…材料板の長手方向中心軸
Ｆ…簾面 ｄ…材料板の板厚方向間隔
Ｉ…電流 Ｌ…電流担体（コイル）
Ｍ…磁場 Ｓ…シールド係数 DESCRIPTION OF SYMBOLS 1 ... Blade material 5 ... Magnetic material board (magnetic board)
6 ... Magnetic shield housing 7 ... Magnetic material thin plate (magnetic thin plate)
8 ... Linear housing 9 ... Overlapping part
10 ... Non-magnetic sheath 10a, 10b ... Anti-sheath sheath
12 ... Cross section of sheath 13 ... Saddle
14 ... hollow part 15 ... positioning protrusion
16 ... Recess groove 17 ... Junction protrusion
18 ... Anti-reflection groove 20 ... Support member
21 ... support projection 22 ... screw
23 ... Rail part 25 ... Translucent panel
26 ... Conductive mesh or conductive film
27 ... Rubber packing
31 ... Sealed magnetic shield body 32 ... Rectangular magnetic plate
34 ... Magnetic sensor w ... Thickness of magnetic plate R ... Longitudinal center axis F of material plate ... Saddle surface d ... Thickness interval of material plate I ... Current L ... Current carrier (coil)
M ... magnetic field S ... shield factor

Claims (6)

長手方向と交差する断面が矩形の磁性板を、長手方向の曲げ剛性が前記磁性板の撓みを抑える大きさの非磁性鞘に装填し、前記鞘の外側表面上の所定部位に当該鞘の長手方向に延びる凹入溝を形成してなる磁気シールド用ブレード材。 A magnetic plate having a rectangular cross section intersecting with the longitudinal direction is loaded into a non-magnetic sheath whose longitudinal bending rigidity is such that the bending of the magnetic plate is suppressed, and the longitudinal direction of the sheath is placed at a predetermined position on the outer surface of the sheath. A magnetic shielding blade material formed with a recessed groove extending in the direction . 請求項１のブレード材において、前記鞘の長手方向と交差する断面に前記磁性板が遊嵌可能な中空部を設け、前記中空部の内面に前記磁性板を位置決めする位置決め突起を設けてなる磁気シールド用ブレード材。 2. The blade material according to claim 1, wherein a hollow portion in which the magnetic plate can be loosely fitted is provided in a cross section intersecting with a longitudinal direction of the sheath, and a positioning protrusion for positioning the magnetic plate is provided on an inner surface of the hollow portion. Blade material for shielding. 請求項２のブレード材において、前記鞘を前記磁性板断面の異なる長辺にそれぞれ対向する一対の半割鞘の接合体としてなる磁気シールド用ブレード材。 The blade material according to claim 2, wherein the sheath is a joined body of a pair of half-sheaths facing the different long sides of the cross section of the magnetic plate. 長手方向と交差する矩形断面の短辺を板厚とする磁性板の群をそれぞれ長手方向の曲げ剛性が当該磁性板の撓みを抑える大きさの非磁性鞘に装填したブレード材の群、前記各ブレード材の鞘の外側表面上の所定部位に形成した当該鞘の長手方向に延びる凹入溝、及び前記凹入溝によりブレード材の各々を芯合わせしつつ各磁性板の長手方向中心軸が同一簾面上に平行に並ぶように前記板厚方向に所定間隔で簾状に重ねて梁状に支持する支持部材を備えてなる磁気シールド簾体。 Longitudinal and a group of blade material flexural rigidity of the respective longitudinal groups of the magnetic plate which the short sides and the thickness was loaded to the non-magnetic sheath sized to suppress the deflection of the magnetic plate of rectangular cross section crossing, each A concave groove formed in a predetermined portion on the outer surface of the sheath of the blade material and extending in the longitudinal direction of the sheath, and the longitudinal central axis of each magnetic plate is the same while the blade material is centered by the concave groove. A magnetic shield housing comprising a support member that is supported in the form of a beam in a plate-like manner in the plate thickness direction so as to be arranged in parallel on the rib surface at a predetermined interval. 請求項４の簾体において、前記各ブレード材の鞘の長手方向と交差する断面に当該ブレード材の磁性板が遊嵌可能な中空部を設け、前記中空部の内面に磁性板を位置決めする位置決め突起を設けてなる磁気シールド簾体。 5. A housing according to claim 4 , wherein a hollow part capable of loosely fitting the magnetic plate of the blade material is provided in a cross section intersecting with the longitudinal direction of the sheath of each blade material, and the magnetic plate is positioned on the inner surface of the hollow part. Magnetic shield housing with protrusions. 請求項５の簾体において、前記各ブレード材の鞘を当該ブレード材の磁性板断面の異なる長辺にそれぞれ対向する一対の半割鞘の接合体としてなる磁気シールド簾体。 6. A magnetic shield housing according to claim 5 , wherein said blade member has a sheath as a joined body of a pair of half-sheaths opposed to different long sides of the blade in the magnetic plate section.
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JP2005378573A JP4458542B2 (en) 2005-12-28 2005-12-28 Magnetic shield blade material and magnetic shield housing
PCT/JP2006/325343 WO2007074690A1 (en) 2005-12-28 2006-12-20 Blade material for magnetic shield and louver body for magnetic shielding
TW095148680A TW200730089A (en) 2005-12-28 2006-12-25 Magnetic shielding blade material and magnetic shielding casing

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US20150371769A1 (en) * 2013-05-13 2015-12-24 Mitsubishi Electric Corporation Stationary induction device
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