JP4458074B2 - 薄膜磁気ヘッド、磁気ヘッドアセンブリ、磁気ディスクドライブ装置及び薄膜磁気ヘッドの製造方法 - Google Patents
薄膜磁気ヘッド、磁気ヘッドアセンブリ、磁気ディスクドライブ装置及び薄膜磁気ヘッドの製造方法 Download PDFInfo
- Publication number
- JP4458074B2 JP4458074B2 JP2006195562A JP2006195562A JP4458074B2 JP 4458074 B2 JP4458074 B2 JP 4458074B2 JP 2006195562 A JP2006195562 A JP 2006195562A JP 2006195562 A JP2006195562 A JP 2006195562A JP 4458074 B2 JP4458074 B2 JP 4458074B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- shield layer
- magnetic head
- thin film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3912—Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Magnetic Heads (AREA)
Description
10a 端縁部
20 磁気ディスク
21 スピンドルモータ
22 アセンブリキャリッジ装置
23 記録再生制御回路
24 駆動アーム
25 ボイスコイルモータ(VCM)
26 ピボットベアリング軸
27 HGA
30 サスペンション
31 薄膜磁気ヘッド
32 ロードビーム
33 フレクシャ
34 ベースプレート
35 配線部材
40 MR読出しヘッド素子
41 インダクティブ書込みヘッド素子
42 磁気ヘッド素子
43、44 信号端子電極
45 ABS
46 素子形成面
50 スライダ基板
51 下地絶縁層
52′ 下部シールド層用の膜
52a 下側角部
53 下部反強磁性層
54 TMR積層体
55、58、71、74、75 絶縁層
56 上部シールド層
56′ 上部シールド層用の膜
56a 上側角部
57 シールド中間絶縁層
59 バッキングコイル層
60 バッキングコイル絶縁層
61 主磁極層
62 絶縁ギャップ層
63 書込みコイル層
64 書込みコイル絶縁層
65 補助磁極層
66 保護層
67、69、70、73、76 レジストマスク
68 磁区制御層
71′、74′、75′ 絶縁層用の膜
71a、75a 凹部
72 電極膜
Claims (7)
- 下部シールド層、上部シールド層並びに該下部シールド層及び該上部シールド層間に形成された磁気抵抗効果層を有する磁気抵抗効果読出しヘッド素子を少なくとも含む薄膜磁気ヘッドであって、前記上部シールド層の浮上面に現れる断面形状がトラック幅方向端の上側角部において丸みを帯びた形状を有しており、前記下部シールド層の浮上面に現れる断面形状がトラック幅方向端の下側角部において鈍角形状の凹部を有することを特徴とする薄膜磁気ヘッド。
- 前記磁気抵抗効果読出しヘッド素子上に形成されたインダクティブ書込みヘッド素子をさらに含んでいることを特徴とする請求項1に記載の薄膜磁気ヘッド。
- 前記インダクティブ書込みヘッド素子が、垂直磁気記録型書込みヘッド素子であることを特徴とする請求項2に記載の薄膜磁気ヘッド。
- 請求項1から3のいずれか1項に記載の薄膜磁気ヘッドと、該薄膜磁気ヘッドを支持する支持機構とを備えていることを特徴とする磁気ヘッドアセンブリ。
- 少なくとも1つの磁気ディスクと、少なくとも1つの請求項4に記載の磁気ヘッドアセンブリとを備えていることを特徴とする磁気ディスクドライブ装置。
- 下部シールド層、上部シールド層並びに該下部シールド層及び該上部シールド層間に形成された磁気抵抗効果層を有する磁気抵抗効果読出しヘッド素子を少なくとも含む薄膜磁気ヘッドの製造方法であって、下部シールド層用の第1のレジストマスクを形成する工程と、該形成した第1のレジストマスク上から絶縁層用の膜を成膜する工程と、前記第1のレジストマスクを除去した後、下部シールド層用の第2のレジストマスクを形成する工程と、該形成した第2のレジストマスクを用いてめっきすることにより、浮上面に現れる断面形状がトラック幅方向端の下側角部において鈍角形状の凹部を有する前記下部シールド層を形成する工程と、上部シールド層用のレジストマスクを形成する工程と、該形成したレジストマスク上から上部シールド層用の膜を成膜する工程と、前記レジストマスクをリフトオフすることにより、浮上面に現れる断面形状がトラック幅方向端の上側角部において丸みを帯びた形状を有する前記上部シールド層を形成する工程とを備えていることを特徴とする薄膜磁気ヘッドの製造方法。
- 前記第2のレジストマスクを形成する前にめっき用の電極膜を形成する工程をさらに備えていることを特徴とする請求項6に記載の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006195562A JP4458074B2 (ja) | 2006-07-18 | 2006-07-18 | 薄膜磁気ヘッド、磁気ヘッドアセンブリ、磁気ディスクドライブ装置及び薄膜磁気ヘッドの製造方法 |
US11/774,912 US7978438B2 (en) | 2006-07-18 | 2007-07-09 | Thin-film magnetic head with shield layer profile having obtuse or rounded corners, magnetic head assembly, magnetic disk drive apparatus and manufacturing method of thin-film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006195562A JP4458074B2 (ja) | 2006-07-18 | 2006-07-18 | 薄膜磁気ヘッド、磁気ヘッドアセンブリ、磁気ディスクドライブ装置及び薄膜磁気ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008027476A JP2008027476A (ja) | 2008-02-07 |
JP4458074B2 true JP4458074B2 (ja) | 2010-04-28 |
Family
ID=38971226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006195562A Expired - Fee Related JP4458074B2 (ja) | 2006-07-18 | 2006-07-18 | 薄膜磁気ヘッド、磁気ヘッドアセンブリ、磁気ディスクドライブ装置及び薄膜磁気ヘッドの製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7978438B2 (ja) |
JP (1) | JP4458074B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7808742B2 (en) * | 2007-07-23 | 2010-10-05 | Tdk Corporation | Thin-film magnetic head comprising shield/magnetic-pole layer having surface without right nor sharp angle |
US8451563B1 (en) | 2011-12-20 | 2013-05-28 | Western Digital (Fremont), Llc | Method for providing a side shield for a magnetic recording transducer using an air bridge |
US8980109B1 (en) | 2012-12-11 | 2015-03-17 | Western Digital (Fremont), Llc | Method for providing a magnetic recording transducer using a combined main pole and side shield CMP for a wraparound shield scheme |
US8914969B1 (en) | 2012-12-17 | 2014-12-23 | Western Digital (Fremont), Llc | Method for providing a monolithic shield for a magnetic recording transducer |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6466606A (en) | 1987-09-08 | 1989-03-13 | Nippon Sheet Glass Co Ltd | Coaxial joint structure for cylindrical body |
US6584676B1 (en) * | 1998-07-24 | 2003-07-01 | International Business Machines Corporation | Method for manufacturing a pole tip trimmed read/write head structure |
JP2001006121A (ja) | 1999-06-22 | 2001-01-12 | Matsushita Electric Ind Co Ltd | 薄膜磁気ヘッドとその製造方法及び磁気記録装置 |
JP2003317214A (ja) | 2002-04-19 | 2003-11-07 | Alps Electric Co Ltd | 薄膜磁気ヘッド及び薄膜磁気ヘッドの下部シールド層の形成方法 |
JP4061139B2 (ja) | 2002-07-04 | 2008-03-12 | 新科實業有限公司 | 垂直磁気記録ヘッドおよびその製造方法 |
JP2004127407A (ja) | 2002-10-01 | 2004-04-22 | Toshiba Corp | 磁気ディスク装置及び磁気ヘッド |
JP2005203063A (ja) * | 2004-01-19 | 2005-07-28 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド及び磁気記録再生装置 |
JP2008016675A (ja) * | 2006-07-06 | 2008-01-24 | Fujitsu Ltd | 磁気抵抗効果素子、それを有する読み取りヘッド並びに記録装置 |
JP2008186506A (ja) * | 2007-01-29 | 2008-08-14 | Hitachi Global Storage Technologies Netherlands Bv | 薄膜磁気ヘッド及びその製造方法 |
JP2008305513A (ja) * | 2007-06-08 | 2008-12-18 | Tdk Corp | 垂直磁気記録ヘッド |
US7808742B2 (en) * | 2007-07-23 | 2010-10-05 | Tdk Corporation | Thin-film magnetic head comprising shield/magnetic-pole layer having surface without right nor sharp angle |
-
2006
- 2006-07-18 JP JP2006195562A patent/JP4458074B2/ja not_active Expired - Fee Related
-
2007
- 2007-07-09 US US11/774,912 patent/US7978438B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20080019056A1 (en) | 2008-01-24 |
JP2008027476A (ja) | 2008-02-07 |
US7978438B2 (en) | 2011-07-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4134119B2 (ja) | 垂直磁気記録用の薄膜磁気ヘッドを備えた磁気ディスク装置及び該薄膜磁気ヘッドの製造方法 | |
JP3922303B1 (ja) | 複合型薄膜磁気ヘッド、磁気ヘッドアセンブリ及び磁気ディスクドライブ装置 | |
JP4322882B2 (ja) | 薄膜磁気ヘッド及び該薄膜磁気ヘッドの製造方法 | |
JP2004103769A (ja) | Cpp構造磁気抵抗効果素子 | |
JP5570757B2 (ja) | 磁気抵抗効果ヘッド及び磁気記録再生装置 | |
JP4244988B2 (ja) | 磁気抵抗効果素子、該素子を備えた薄膜磁気ヘッド及びその製造方法 | |
US7190559B2 (en) | Thin-film magnetic head having the length of the pinned and antiferromagnetic layers greater than the width dimension thereof and/or the length of the free layer | |
US8125743B2 (en) | Thin-film magnetic head, magnetic head assembly, magnetic disk drive apparatus and method for manufacturing thin-film magnetic head | |
JP3988771B2 (ja) | 複合型薄膜磁気ヘッド、磁気ヘッドアセンブリ及び磁気ディスクドライブ装置 | |
JP4622953B2 (ja) | 磁気抵抗効果素子の製造方法及び薄膜磁気ヘッドの製造方法 | |
US8139321B2 (en) | Perpendicular magnetic recording write head with improved laminated main pole | |
JP4458074B2 (ja) | 薄膜磁気ヘッド、磁気ヘッドアセンブリ、磁気ディスクドライブ装置及び薄膜磁気ヘッドの製造方法 | |
JP4322939B2 (ja) | 磁区制御用反強磁性層を備えた磁気抵抗効果薄膜磁気ヘッド | |
JP6163038B2 (ja) | 磁気抵抗効果素子、磁気ヘッドおよび磁気記録再生装置 | |
US8102623B2 (en) | Thin-film magnetic head with a magnetic pole having an inclined step at its top end section surface, magnetic head assembly with the thin-film magnetic head, magnetic disk drive apparatus with the magnetic head assembly, and manufacturing method of thin-film magnetic head | |
US7864489B2 (en) | Thin-film magnetic head having an antistatic layer preventing a protective coat from being electrostatically charged | |
JP2006179566A (ja) | 磁気抵抗効果素子、該磁気抵抗効果素子を備えた薄膜磁気ヘッド、該薄膜磁気ヘッドを備えたヘッドジンバルアセンブリ、該ヘッドジンバルアセンブリを備えた磁気ディスク装置、及び該磁気抵抗効果素子の製造方法 | |
US8149547B2 (en) | Magnetoresistive effect element and thin-film magnetic head with the magnetoresistive effect element | |
JP2003242612A (ja) | フラックスガイド型素子、及び、それを有するヘッド並びにドライブ | |
JP2008084373A (ja) | 薄膜磁気ヘッドの製造方法及び薄膜磁気ヘッド | |
JP2006128453A (ja) | 磁気抵抗効果素子、該磁気抵抗効果素子を備えた薄膜磁気ヘッド、該薄膜磁気ヘッドを備えたヘッドジンバルアセンブリ及び該ヘッドジンバルアセンブリを備えた磁気ディスク装置 | |
JP4515410B2 (ja) | 非磁性部を含む磁性層を備えた薄膜磁気ヘッド | |
JP3858045B1 (ja) | 薄膜磁気ヘッド、磁気ヘッド装置及び磁気ディスク装置 | |
JP2008102980A (ja) | 薄膜磁気ヘッド及び磁気ディスクドライブ装置 | |
JP2006236481A (ja) | 薄膜磁気ヘッド、磁気ヘッドアセンブリ及び磁気ディスクドライブ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090204 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20091102 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091110 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091211 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100119 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100201 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130219 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140219 Year of fee payment: 4 |
|
LAPS | Cancellation because of no payment of annual fees |