JP4452132B2 - シリコンの酸化による欠陥低減 - Google Patents
シリコンの酸化による欠陥低減 Download PDFInfo
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- JP4452132B2 JP4452132B2 JP2004183839A JP2004183839A JP4452132B2 JP 4452132 B2 JP4452132 B2 JP 4452132B2 JP 2004183839 A JP2004183839 A JP 2004183839A JP 2004183839 A JP2004183839 A JP 2004183839A JP 4452132 B2 JP4452132 B2 JP 4452132B2
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- 230000007547 defect Effects 0.000 title claims description 42
- 230000003647 oxidation Effects 0.000 title claims description 41
- 238000007254 oxidation reaction Methods 0.000 title claims description 41
- 229910052710 silicon Inorganic materials 0.000 title claims description 7
- 239000010703 silicon Substances 0.000 title description 3
- 239000000758 substrate Substances 0.000 claims description 81
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 65
- 239000000463 material Substances 0.000 claims description 52
- 230000004888 barrier function Effects 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 50
- 239000012212 insulator Substances 0.000 claims description 34
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 34
- 238000009792 diffusion process Methods 0.000 claims description 21
- 150000002500 ions Chemical class 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 13
- 238000002513 implantation Methods 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 8
- 239000007943 implant Substances 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 238000005280 amorphization Methods 0.000 claims description 5
- 125000004429 atom Chemical group 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000000038 ultrahigh vacuum chemical vapour deposition Methods 0.000 claims description 3
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 2
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical group [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 claims description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- 229910052805 deuterium Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- -1 hydrogen ions Chemical class 0.000 claims description 2
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 2
- 229910052754 neon Inorganic materials 0.000 claims description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 230000001737 promoting effect Effects 0.000 claims 1
- 238000001289 rapid thermal chemical vapour deposition Methods 0.000 claims 1
- 238000003631 wet chemical etching Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000005137 deposition process Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 229910003811 SiGeC Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910003465 moissanite Inorganic materials 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/933—Germanium or silicon or Ge-Si on III-V
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12674—Ge- or Si-base component
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Formation Of Insulating Films (AREA)
Description
12 バリア層
14 犠牲単結晶Si層
16 Ge含有層
17 界面
18 キャップ層
20 緩和されたSiGe層
22 酸化物層
25 熱酸化物層
Claims (23)
- SiGeオン・インシュレータ基板材料を製作する方法であって、
犠牲単結晶Si層の表面上にひずみGe含有層を形成するステップであって、前記犠牲単結晶Si層がGe拡散に対する抵抗力のあるバリア層の上に存在するステップと、
(i)前記犠牲単結晶Si層および前記Ge含有層の全体にわたってGe原子を均質化し、(ii)前記犠牲単結晶Si層内に支配的に注入される転位を作り出すことによって前記Ge含有層を緩和し、(iii)内部酸化により前記犠牲単結晶Si層を消費する温度で前記層を酸化するステップであって、それにより、実質的に緩和された単結晶SiGe層を形成するステップと、
前記温度が1200℃〜1350℃の範囲であり、
前記酸化するステップの前にイオン注入ステップをさらに有し、
前記酸化ステップ中に表面酸化物層と内部熱酸化物が形成され、
前記イオン注入ステップが、前記犠牲単結晶Si層と前記バリア層との界面においてまたはその付近で緩和の促進を可能にする欠陥を形成することができるイオンを注入するステップ、あるいは、前記犠牲単結晶Si層をアモルファス化することができるイオンを注入するステップである、
方法。 - 前記バリア層がパターン化されたバリア層である、請求項1に記載の方法。
- 前記バリア層がパターン化されていないバリア層である、請求項1に記載の方法。
- 前記バリア層が結晶性または非晶質酸化物あるいは結晶性または非晶質窒化物である、請求項1〜3いずれか1つに記載の方法。
- 前記バリア層が埋込み酸化物領域である、請求項1〜3いずれか1つに記載の方法。
- 前記Ge含有層がSiGe合金または純Geである、請求項1〜5いずれか1つに記載の方法。
- 前記Ge含有層が、最高99.99原子百分率のGeを有するSiGe合金である、請求項1〜6いずれか1つに記載の方法。
- 前記SiGe層が10〜35原子百分率のGeを有する、請求項1〜7いずれか1つに記載の方法。
- 前記Ge含有層が、高速熱CVD、LPCVD、常圧CVD、超高真空CVD、MBE、およびプラズマCVDからなるグループから選択されたエピタキシャル成長プロセスによって形成される、請求項1〜8いずれか1つに記載の方法。
- 前記酸化ステップの前に前記Ge含有層の上にSiキャップ層を形成するステップをさらに有する、請求項1〜9いずれか1つに記載の方法。
- 前記Siキャップ層が、エピタキシャルSi、アモルファスSi、単結晶Siまたは多結晶Si、またはそれらの組み合わせおよび多層を有する、請求項10に記載の方法。
- ウェット化学エッチング・プロセスを使用して前記表面酸化物層を除去するステップをさらに有する、請求項1〜11いずれか1つに記載の方法。
- 前記酸化ステップが、少なくとも1種類の酸素含有ガスを有する酸化雰囲気中で実行される、請求項1〜12いずれか1つに記載の方法。
- 前記少なくとも1種類の酸素含有ガスがO2、NO、N2O、オゾン、空気、またはそれらの混合物を有する、請求項13に記載の方法。
- 前記酸素含有ガスを有する酸化雰囲気が、酸素含有ガスの他に、不活性ガスをさらに有し、前記不活性ガスが前記少なくとも1種類の酸素含有ガスを希釈するために使用される、請求項13または14に記載の方法。
- 前記実質的に緩和されたSiGe層の上に追加のSiGe層を成長させるステップをさらに有する、請求項1〜15いずれか1つに記載の方法。
- 前記追加のSiGe層の上にひずみSi層を形成するステップをさらに有する、請求項16に記載の方法。
- 前記実質的に緩和されたSiGe層の上にひずみSi層を形成するステップをさらに有する、請求項1〜15いずれか1つに記載の方法。
- 前記犠牲単結晶Si層と前記バリア層との界面においてまたはその付近で緩和の促進を可能にする欠陥を形成することができるイオンが、水素、重水素、ヘリウム、酸素、ネオン、および、これらの混合物よりなる群から選択される、請求項1〜18いずれか1つに記載の方法。
- 前記犠牲単結晶Si層と前記バリア層との界面においてまたはその付近で緩和の促進を可能にする欠陥を形成することができるイオンが、水素イオン(H+)である、請求項1〜19いずれか1つに記載の方法。
- 前記犠牲単結晶Si層と前記バリア層との界面においてまたはその付近で緩和の促進を可能にする欠陥を形成することができるイオンの注入が、0.01〜10・A/cm2のビーム電流密度を使用して、283K〜303Kで行われる、請求項1〜20いずれか1つに記載の方法。
- 前記水素イオンの注入エネルギーが1〜100keVである、請求項20又は21に記載の方法。
- 前記犠牲単結晶Si層をアモルファス化することができるイオンが、Si、P、As、および、Geよりなる群から選択される、請求項1〜18いずれか1つに記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/610,612 US7169226B2 (en) | 2003-07-01 | 2003-07-01 | Defect reduction by oxidation of silicon |
Publications (2)
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JP2005026681A JP2005026681A (ja) | 2005-01-27 |
JP4452132B2 true JP4452132B2 (ja) | 2010-04-21 |
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JP2004183839A Expired - Fee Related JP4452132B2 (ja) | 2003-07-01 | 2004-06-22 | シリコンの酸化による欠陥低減 |
Country Status (5)
Country | Link |
---|---|
US (3) | US7169226B2 (ja) |
JP (1) | JP4452132B2 (ja) |
KR (1) | KR100586290B1 (ja) |
CN (1) | CN1311546C (ja) |
TW (1) | TWI306662B (ja) |
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US7507988B2 (en) | 2009-03-24 |
TWI306662B (en) | 2009-02-21 |
CN1311546C (zh) | 2007-04-18 |
US20080246019A1 (en) | 2008-10-09 |
US20050003229A1 (en) | 2005-01-06 |
US7816664B2 (en) | 2010-10-19 |
CN1577809A (zh) | 2005-02-09 |
TW200520211A (en) | 2005-06-16 |
US7169226B2 (en) | 2007-01-30 |
JP2005026681A (ja) | 2005-01-27 |
US20070105350A1 (en) | 2007-05-10 |
KR100586290B1 (ko) | 2006-06-08 |
KR20050003992A (ko) | 2005-01-12 |
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