JP4430651B2 - マイクロアクチュエータ及びそれを採用した情報記録装置 - Google Patents
マイクロアクチュエータ及びそれを採用した情報記録装置 Download PDFInfo
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- JP4430651B2 JP4430651B2 JP2006311684A JP2006311684A JP4430651B2 JP 4430651 B2 JP4430651 B2 JP 4430651B2 JP 2006311684 A JP2006311684 A JP 2006311684A JP 2006311684 A JP2006311684 A JP 2006311684A JP 4430651 B2 JP4430651 B2 JP 4430651B2
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- 239000003351 stiffener Substances 0.000 claims description 18
- 238000005452 bending Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000005530 etching Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 3
- 238000004621 scanning probe microscopy Methods 0.000 description 3
- 238000013500 data storage Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
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- 230000007423 decrease Effects 0.000 description 1
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- 238000009713 electroplating Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C8/00—Means to be fixed to the jaw-bone for consolidating natural teeth or for fixing dental prostheses thereon; Dental implants; Implanting tools
- A61C8/0089—Implanting tools or instruments
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C1/00—Dental machines for boring or cutting ; General features of dental machines or apparatus, e.g. hand-piece design
- A61C1/08—Machine parts specially adapted for dentistry
- A61C1/14—Tool-holders, i.e. operating tool holders, e.g. burr holders
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C3/00—Dental tools or instruments
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/943—Information storage or retrieval using nanostructure
- Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument
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- Health & Medical Sciences (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Engineering & Computer Science (AREA)
- Veterinary Medicine (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- Dentistry (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Orthopedic Medicine & Surgery (AREA)
- Micromachines (AREA)
Description
50 レバー
52 作動部
54 ヒンジ部
56 固定部
320 フレーム
330 スチフナ
330a 第1領域
330b 第2領域
332 第1連結部
334 第2連結部
336 第3連結部
338 第4連結部
340、350 弾性ビーム
Claims (14)
- 支持部と、
前記支持部により弾力的に支持されるものであって、被駆動体が搭載される搭載面を有し、相互隣接して配置される複数のステージと、
前記複数のステージの間に設けられるものであって、隣接するステージのそれぞれにその両端が連結されて、一つのステージが移動するとき、それに隣接する他のステージが、前記一つのステージの移動方向と逆方向に移動するように力を加える複数のレバーと、
前記ステージのそれぞれに駆動力を提供する駆動部と、を備えることを特徴とするマイクロアクチュエータ。 - 前記レバーのそれぞれは、
前記支持部に設置された固定部と、
前記隣接するステージと対向する側面のそれぞれに両端が連結された作動部と、
前記固定部と前記作動部との間に介在されて前記作動部を回動支持するヒンジ部と、を備えることを特徴とする請求項1に記載のマイクロアクチュエータ。 - 前記固定部は、前記支持部に離隔設置された二の部分つからなり、
前記ヒンジ部は、その屈曲点が前記作動部の中心部に連結され、前記二つの固定部に連結された‘V’字状の構造を有することを特徴とする請求項2に記載のマイクロアクチュエータ。 - 前記作動部の両端のそれぞれと前記ステージとの間に配置されて、前記作動部と前記ステージとを弾性的に連結する連結ビームをさらに備えることを特徴とする請求項2に記載のマイクロアクチュエータ。
- 前記支持部は、
ベースと、
前記ベース上に配置されたものであって、前記複数のステージ全体の外側部を取り囲むフレームと、
前記フレームと前記各ステージとの間に設けられて、前記ステージを弾性支持する弾性ビームと、を備えることを特徴とする請求項1に記載のマイクロアクチュエータ。 - 前記駆動部は、
前記ステージのそれぞれに形成されるコイルと、
前記コイルのそれぞれに対向する位置に配置された複数の永久磁石と、を備えることを特徴とする請求項1ないし請求項5のうちいずれか1項に記載のマイクロアクチュエータ。 - 前記コイルは、前記ステージの搭載面の裏面に位置することを特徴とする請求項6に記載のマイクロアクチュエータ。
- 前記複数のステージは、第1方向及びそれと直交する第2方向に2×2の形態に配置される四つのステージであることを特徴とする請求項1ないし請求項4のうちいずれか1項に記載のマイクロアクチュエータ。
- 前記支持部は、
ベースと、
前記ベース上に配置されたものであって、前記複数のステージ全体の外側部を取り囲むフレームと、
前記フレームと前記それぞれのステージとの間に位置し、前記第1方向と平行な第1領域及び前記第2方向と平行な第2領域からなるスチフナと、
前記第2領域とそれに対向する前記ステージの一側面との間に連結され、前記第1方向に弾性変形される第1弾性ビームと、
前記第1領域とそれに対向する前記フレームの内側面との間に連結され、前記第2方向に弾性変形される第2弾性ビームと、を備えることを特徴とする請求項8に記載のマイクロアクチュエータ。 - 前記駆動部は、
前記ステージのそれぞれに形成されるコイルと、
前記コイルのそれぞれと対向する位置に配置された複数の永久磁石と、を備えることを特徴とする請求項8に記載のマイクロアクチュエータ。 - 前記コイルは、
前記ステージのそれぞれに前記第1方向に運動力を提供できるように配置された第1コイルと、
前記第2方向に運動力を提供できるように配置された第2コイルとからなることを特徴とする請求項10に記載のマイクロアクチュエータ。 - 前記コイルは、前記ステージの搭載面の裏面に位置することを特徴とする請求項10に記載のマイクロアクチュエータ。
- 情報が保存されるメディアと、
前記メディアが搭載される請求項8に記載のマイクロアクチュエータと、
前記メディアに/から情報を記録/再生するために前記メディアの上部に配置されたカンチレバーチップアレイと、を備えることを特徴とする情報記録装置。 - 前記駆動部は、
前記ステージのそれぞれの搭載面の裏面に形成されるコイルと、
前記コイルのそれぞれと対向する位置に配置された複数の永久磁石と、を備えることを特徴とする請求項13に記載の情報記録装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060000887A KR100745756B1 (ko) | 2006-01-04 | 2006-01-04 | 마이크로 액츄에이터 및 이를 채용한 정보저장장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007184074A JP2007184074A (ja) | 2007-07-19 |
JP4430651B2 true JP4430651B2 (ja) | 2010-03-10 |
Family
ID=38224102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006311684A Expired - Fee Related JP4430651B2 (ja) | 2006-01-04 | 2006-11-17 | マイクロアクチュエータ及びそれを採用した情報記録装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7889626B2 (ja) |
JP (1) | JP4430651B2 (ja) |
KR (1) | KR100745756B1 (ja) |
CN (1) | CN1996470B (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100745756B1 (ko) * | 2006-01-04 | 2007-08-02 | 삼성전자주식회사 | 마이크로 액츄에이터 및 이를 채용한 정보저장장치 |
US20070121477A1 (en) * | 2006-06-15 | 2007-05-31 | Nanochip, Inc. | Cantilever with control of vertical and lateral position of contact probe tip |
US8885299B1 (en) | 2010-05-24 | 2014-11-11 | Hutchinson Technology Incorporated | Low resistance ground joints for dual stage actuation disk drive suspensions |
WO2013138619A1 (en) | 2012-03-16 | 2013-09-19 | Hutchinson Technology Incorporated | Mid-loadbeam dual stage actuated (dsa) disk drive head suspension |
WO2014035591A1 (en) | 2012-08-31 | 2014-03-06 | Hutchinson Technology Incorporated | Damped dual stage actuation disk drive suspensions |
WO2014043498A2 (en) | 2012-09-14 | 2014-03-20 | Hutchinson Technology Incorporated | Co-located gimbal-based dual stage actuation disk drive suspensions |
US8896968B2 (en) | 2012-10-10 | 2014-11-25 | Hutchinson Technology Incorporated | Co-located gimbal-based dual stage actuation disk drive suspensions with dampers |
US8941951B2 (en) | 2012-11-28 | 2015-01-27 | Hutchinson Technology Incorporated | Head suspension flexure with integrated strain sensor and sputtered traces |
US8891206B2 (en) * | 2012-12-17 | 2014-11-18 | Hutchinson Technology Incorporated | Co-located gimbal-based dual stage actuation disk drive suspensions with motor stiffener |
US8896969B1 (en) | 2013-05-23 | 2014-11-25 | Hutchinson Technology Incorporated | Two-motor co-located gimbal-based dual stage actuation disk drive suspensions with motor stiffeners |
US8717712B1 (en) | 2013-07-15 | 2014-05-06 | Hutchinson Technology Incorporated | Disk drive suspension assembly having a partially flangeless load point dimple |
US8896970B1 (en) | 2013-12-31 | 2014-11-25 | Hutchinson Technology Incorporated | Balanced co-located gimbal-based dual stage actuation disk drive suspensions |
US8867173B1 (en) | 2014-01-03 | 2014-10-21 | Hutchinson Technology Incorporated | Balanced multi-trace transmission in a hard disk drive flexure |
US9070392B1 (en) | 2014-12-16 | 2015-06-30 | Hutchinson Technology Incorporated | Piezoelectric disk drive suspension motors having plated stiffeners |
US9318136B1 (en) | 2014-12-22 | 2016-04-19 | Hutchinson Technology Incorporated | Multilayer disk drive motors having out-of-plane bending |
US9296188B1 (en) | 2015-02-17 | 2016-03-29 | Hutchinson Technology Incorporated | Partial curing of a microactuator mounting adhesive in a disk drive suspension |
US9734852B2 (en) | 2015-06-30 | 2017-08-15 | Hutchinson Technology Incorporated | Disk drive head suspension structures having improved gold-dielectric joint reliability |
US9646638B1 (en) | 2016-05-12 | 2017-05-09 | Hutchinson Technology Incorporated | Co-located gimbal-based DSA disk drive suspension with traces routed around slider pad |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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DE69031053T2 (de) * | 1989-04-25 | 1998-01-29 | Canon Kk | Informationsaufzeichnungs-/Wiedergabegerät und Informationsaufzeichnungsträger |
JPH041949A (ja) * | 1990-04-18 | 1992-01-07 | Canon Inc | 情報入力及び/または取出し装置 |
DE69126765T2 (de) * | 1990-11-20 | 1998-01-02 | Canon K.K., Tokio/Tokyo | Neigungswinkelbestimmungsverfahren sowie Informationsbestimmungsschreibvorrichtung dafür |
JP3029499B2 (ja) * | 1992-05-07 | 2000-04-04 | キヤノン株式会社 | 記録再生装置 |
US5835477A (en) * | 1996-07-10 | 1998-11-10 | International Business Machines Corporation | Mass-storage applications of local probe arrays |
JPH10312592A (ja) * | 1997-05-13 | 1998-11-24 | Canon Inc | 情報処理装置および情報処理方法 |
US6459088B1 (en) * | 1998-01-16 | 2002-10-01 | Canon Kabushiki Kaisha | Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same |
US6735163B2 (en) * | 2001-03-02 | 2004-05-11 | Hewlett-Packard Development Company, L.P. | Ultra-high density storage device with resonant scanning micromover |
KR100519752B1 (ko) * | 2002-05-10 | 2005-10-07 | 삼성전자주식회사 | 시분할 다중 방식을 채용한 고속 고밀도 정보저장 장치 및이를 이용한 정보기록방법 및 정보재생방법 |
KR100499127B1 (ko) * | 2002-07-05 | 2005-07-04 | 삼성전자주식회사 | 고밀도 정보저장매체 및 그 제조방법 및 정보저장장치 및이를 이용한 정보 기록 및 재생 및 소거방법 |
KR100523031B1 (ko) * | 2003-06-11 | 2005-10-20 | 피에스아이에이 주식회사 | 주사 탐침 현미경에서의 xy 스캐너 및 그 구동방법 |
JP2007048330A (ja) * | 2005-08-05 | 2007-02-22 | Hitachi Ltd | プローブメモリ装置及びその位置決め方法 |
KR100745756B1 (ko) * | 2006-01-04 | 2007-08-02 | 삼성전자주식회사 | 마이크로 액츄에이터 및 이를 채용한 정보저장장치 |
US7514942B2 (en) * | 2006-09-27 | 2009-04-07 | Intel Corporation | Probe based patterning of microelectronic and micromechanical devices |
-
2006
- 2006-01-04 KR KR1020060000887A patent/KR100745756B1/ko not_active IP Right Cessation
- 2006-08-24 CN CN2006101214821A patent/CN1996470B/zh not_active Expired - Fee Related
- 2006-11-17 JP JP2006311684A patent/JP4430651B2/ja not_active Expired - Fee Related
- 2006-12-04 US US11/607,957 patent/US7889626B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20070153430A1 (en) | 2007-07-05 |
KR100745756B1 (ko) | 2007-08-02 |
KR20070073222A (ko) | 2007-07-10 |
JP2007184074A (ja) | 2007-07-19 |
US7889626B2 (en) | 2011-02-15 |
CN1996470A (zh) | 2007-07-11 |
CN1996470B (zh) | 2010-05-12 |
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