JP4419526B2 - 気化器の気化性能評価方法 - Google Patents
気化器の気化性能評価方法 Download PDFInfo
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- JP4419526B2 JP4419526B2 JP2003378822A JP2003378822A JP4419526B2 JP 4419526 B2 JP4419526 B2 JP 4419526B2 JP 2003378822 A JP2003378822 A JP 2003378822A JP 2003378822 A JP2003378822 A JP 2003378822A JP 4419526 B2 JP4419526 B2 JP 4419526B2
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- vaporization
- liquid
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- liquid material
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Description
図1は気化装置全体の概略構成を示す図である。1は気化器2に液体有機金属や有機金属溶液等(以下では、これらを液体材料と呼ぶ)を供給する液体材料供給装置であり、供給された液体材料は気化器2で気化されてCVD装置に設けられたCVDリアクタに供給される。例えば、液体有機金属としてはCuやTaなどの有機金属があり、有機金属溶液としてはBa,Sr,Ti,Pb,Zrなどの有機金属を有機溶剤に溶かしたもがある。
2 気化器
20 霧化部
21 気化チャンバ
21a チャンバ本体
22,45,77 円筒空洞
S1 気化面
Claims (1)
- 高温に保持された気化チャンバ内に液体有機金属若しくは有機金属溶液から成る液体材料を噴霧して気化する気化器の気化性能評価方法であって、
所定量の前記液体材料を前記気化チャンバ内に噴霧して気化させた後に、前記気化チャンバ内の未気化付着物を有機溶剤で除去し、その除去に用いた前記有機溶剤中の前記液体材料の含有量を計測し、計測された含有量に基づいて気化性能を評価することを特徴とする気化性能評価方法。
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JP2003378822A JP4419526B2 (ja) | 2003-11-07 | 2003-11-07 | 気化器の気化性能評価方法 |
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JP2003378822A JP4419526B2 (ja) | 2003-11-07 | 2003-11-07 | 気化器の気化性能評価方法 |
Related Parent Applications (1)
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JP2000292759A Division JP3507425B2 (ja) | 2000-09-26 | 2000-09-26 | 気化器 |
Publications (2)
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JP2004096127A JP2004096127A (ja) | 2004-03-25 |
JP4419526B2 true JP4419526B2 (ja) | 2010-02-24 |
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JP2003378822A Expired - Lifetime JP4419526B2 (ja) | 2003-11-07 | 2003-11-07 | 気化器の気化性能評価方法 |
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JP (1) | JP4419526B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US7163197B2 (en) | 2000-09-26 | 2007-01-16 | Shimadzu Corporation | Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method |
KR101556315B1 (ko) | 2013-11-14 | 2015-10-01 | 삼성중공업 주식회사 | 기화율 측정 장치 및 기화율 측정 방법 |
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JP2004096127A (ja) | 2004-03-25 |
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