JP4364096B2

JP4364096B2 - Ultrasonic transducer

Info

Publication number: JP4364096B2
Application number: JP2004273075A
Authority: JP
Inventors: 之彦沢田; 拓也今橋; 勝裕若林; 佐藤　　直; 明子水沼
Original assignee: Olympus Corp
Current assignee: Olympus Corp
Priority date: 2004-09-21
Filing date: 2004-09-21
Publication date: 2009-11-11
Anticipated expiration: 2024-09-21
Also published as: JP2006087464A

Description

本発明は、超音波診断装置等に用いられる超音波振動子に関する。 The present invention relates to an ultrasonic transducer used in an ultrasonic diagnostic apparatus or the like.

従来、医療分野においては、超音波振動子から生体組織内に超音波パルスを繰り返し送信し、生体組織から反射される超音波パルスのエコーを、同一あるいは別体に設けた超音波振動子で受信して、この超音波パルスを送受信する方向を徐々にずらすことによって、生体内の複数の方向から収集した情報を可視像の超音波断層画像として表示する超音波診断装置が、種々提案されている。 Conventionally, in the medical field, an ultrasonic pulse is repeatedly transmitted from an ultrasonic transducer into a living tissue, and an echo of the ultrasonic pulse reflected from the living tissue is received by the ultrasonic transducer provided in the same or different body. Various ultrasonic diagnostic apparatuses that display information collected from a plurality of directions in a living body as ultrasonic tomographic images of visible images by gradually shifting the direction in which the ultrasonic pulses are transmitted and received have been proposed. Yes.

このような超音波診断装置などに用いられる超音波振動子として、複数の圧電素子を規則的に配列した電子走査方式のアレイ型超音波振動子がある。この超音波振動子には、複数の圧電素子を円筒状に配列したラジアルアレイ型、略部分円筒状に配列したコンベックスアレイ型、或いは平板状に配列したリニアアレイ型がある。 As an ultrasonic transducer used in such an ultrasonic diagnostic apparatus or the like, there is an electronic scanning type array ultrasonic transducer in which a plurality of piezoelectric elements are regularly arranged. The ultrasonic transducer includes a radial array type in which a plurality of piezoelectric elements are arranged in a cylindrical shape, a convex array type in which a plurality of piezoelectric elements are arranged in a substantially cylindrical shape, or a linear array type in which a plurality of piezoelectric elements are arranged in a flat plate shape.

上記ラジアルアレイ型の超音波振動子は、例えば、ダンパー効果のある可撓性を有する薄板で形成された支持部材に、例えばチタン酸ジルコン酸鉛等を素材とした圧電素子板及び音響整合層を順次接着して振動子ユニットを形成した後、下層の支持部材を残して長手方向の一辺に直交する所定ピッチの切り溝を切断手段で形成して多数の超音波振動子を有する振動子アレイを構成し、この振動子アレイを構成する支持部材の裏面を断面が円形状の固定部材を兼用したダンパー材（バッキング材ともいう）の周囲に接着して形成していた（例えば、特許文献１参照。）。 The radial array type ultrasonic transducer includes, for example, a piezoelectric element plate and an acoustic matching layer made of, for example, lead zirconate titanate on a support member formed of a flexible thin plate having a damper effect. After forming the transducer unit by sequentially bonding, a transducer array having a large number of ultrasonic transducers is formed by forming cutting grooves with a predetermined pitch perpendicular to one side in the longitudinal direction with a cutting means, leaving the lower support member. The back surface of the support member constituting the transducer array is formed by adhering to the periphery of a damper material (also called a backing material) that also serves as a fixing member having a circular cross section (see, for example, Patent Document 1) .)

また、圧電素子の両面にそれぞれ音響整合層と変形しやすい材料等で形成した背面負荷材とを設け、切断手段で所望の間隔で音響整合層側から背面負荷材の一部に達する切り溝を形成し、所望の曲率に形成した曲面体の外面に背面負荷材を接着固定して超音波探触子を製造していた（例えば、特許文献２参照。）。 In addition, an acoustic matching layer and a back load material formed of a material that is easily deformed are provided on both sides of the piezoelectric element, and a cutting groove that reaches a part of the back load material from the acoustic matching layer side at a desired interval is provided. An ultrasonic probe was manufactured by bonding and fixing a back load material to the outer surface of a curved body formed to have a desired curvature (see, for example, Patent Document 2).

また、音響レンズの内側にバッキング材枠が配置され、このバッキング材枠の内側にケーブル配線基板が立設され、その周囲にバッキング材が充填されるようにしている超音波アレイ振動子がある（例えば、特許文献３参照。）。
特開平２−２７１８３９号公報特許２５０２６８５号公報特開２００２−２２４１０４号公報 In addition, there is an ultrasonic array transducer in which a backing material frame is disposed inside the acoustic lens, a cable wiring board is erected on the inside of the backing material frame, and the backing material is filled around the cable wiring board ( For example, see Patent Document 3.)
JP-A-2-271839 Japanese Patent No. 2502685 JP 2002-224104 A

しかしながら、上記特許文献１に記載されている超音波プローブでは、可撓性の支持部材とダンパー材とを接着剤で固定して形成した超音波振動子では、支持部材とダンパー材との間に設けられる接着層によってパルス幅が延びる等の性能上の不具合が発生するおそれがあった。 However, in the ultrasonic probe described in Patent Document 1, in an ultrasonic transducer formed by fixing a flexible support member and a damper material with an adhesive, the ultrasonic probe is interposed between the support member and the damper material. There may be a problem in performance such as an increase in pulse width due to the provided adhesive layer.

また、上記特許文献２に記載されている超音波探触子の製造方法では、可撓性を有する或いは変形しやすい弾性部材を曲げた状態にしてダンパー材或いは曲面体に接着固定することにより所定形状を形作っていた。このため、弾性部材に残留応力が発生して断線等の不具合の要因になるおそれがあった。 In addition, in the method of manufacturing an ultrasonic probe described in Patent Document 2, a predetermined elastic member having a flexible or easily deformable elastic member is bent and fixed to a damper material or a curved body. Shaped the shape. For this reason, there is a possibility that residual stress is generated in the elastic member and causes a problem such as disconnection.

さらに、柔らかな部材を接着によって固定するとき、硬質部材同士を接着する場合と異なり、接着層の厚みにばらつきが生じることや、部材形状を高精度にできないことによって、所望の形状精度を得ることが難しかった。 Furthermore, when fixing a soft member by bonding, unlike the case of bonding hard members, the thickness of the adhesive layer varies and the shape of the member cannot be made high, so that the desired shape accuracy is obtained. It was difficult.

また、バッキング材枠（フレーム）には、高い形状精度、絶縁性、リード線との接続があるために導体パターン付加が可能で半田付けの熱に耐えることなどが求められるが、このような用途に使用されているガラスエポキシ基板等の一般の基板材料は、形状加工したエッジの部分で樹脂とガラス繊維との剥離が発生してしまい、微細な形状が変わってしまうため、機械加工精度を高めることが困難であるという問題点があった。 In addition, the backing material frame (frame) is required to withstand the heat of soldering by adding a conductor pattern because of its high shape accuracy, insulation, and connection with lead wires. In general substrate materials such as glass epoxy substrates used in the process, the resin and glass fibers are peeled off at the edge of the processed shape, and the fine shape changes. There was a problem that it was difficult.

また、ポリイミドは合成が低く、接着性が低いため、フレームの使用には向いていないという問題点があった。
本発明は、上記事情に鑑みてなされたものであり、フレームの材料として、耐熱性が良く、加工性が良く、かつ外形が崩れないＰＰＥ（ポリフェニルエーテル：ＰｏｌｙＰｈｅｎｙｌＥｔｈｅｒ）を用いることにより、残留応力による不具合の発生を防止して、分割した圧電素子を高精度に配列させて良好な超音波画像を得られる信頼性および強度の高い超音波振動子を提供することを目的にしている。 Moreover, since polyimide has low synthesis and low adhesion, there is a problem that it is not suitable for use in frames.
The present invention has been made in view of the above circumstances, and by using PPE (polyphenyl ether) that has good heat resistance, good workability, and does not collapse the outer shape as a material of the frame, An object of the present invention is to provide a highly reliable and strong ultrasonic transducer capable of preventing occurrence of defects due to residual stress and arranging divided piezoelectric elements with high accuracy to obtain a good ultrasonic image.

本発明は、上記課題を解決するため、下記のような構成を採用した。
すなわち、本発明の一態様によれば、本発明の超音波振動子は、硬質な層を含む音響整合層と、上記音響整合層より長さ寸法が短く、上記硬質な層の所定位置に固定配置され、上記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、上記分割された上記圧電素子の表面を内周面側に配置した状態で、上記圧電素子から突出する上記音響整合層の上記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる、繊維強化型熱硬化性ＰＰＥ（ポリフェニルエーテル）からなる振動子形状形成部材とを備えることを特徴とする。 The present invention employs the following configuration in order to solve the above problems.
That is, according to one aspect of the present invention, an ultrasonic transducer according to the present invention includes an acoustic matching layer including a hard layer and a length dimension shorter than that of the acoustic matching layer, and is fixed to a predetermined position of the hard layer. A piezoelectric body that is arranged and is divided into a plurality of piezoelectric elements by a cutting means in the fixed arrangement, and protrudes from the piezoelectric element in a state where the surface of the divided piezoelectric element is arranged on the inner peripheral surface side A vibrator shape forming member made of a fiber reinforced thermosetting PPE (polyphenyl ether) fixedly arranged on a surface of the acoustic matching layer on which the piezoelectric elements are arranged and arranging a plurality of piezoelectric elements in a predetermined shape; It is characterized by providing.

また、本発明の一態様によれば、本発明の超音波振動子は、硬質な層を含む音響整合層と、上記音響整合層より長さ寸法が短く、上記硬質な層の所定位置に固定配置され、上記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、上記分割された上記圧電素子の表面を内周面側に配置した状態で、上記圧電素子から突出する上記音響整合層の上記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる硬質な振動子形状形成部材と、上記振動子形状形成部材の外側に配置され、導体部と外部とを電気的に絶縁する繊維強化型熱硬化性ＰＰＥからなる絶縁部材とを備えることを特徴とする。 According to another aspect of the present invention, an ultrasonic transducer according to the present invention includes an acoustic matching layer including a hard layer and a length dimension shorter than that of the acoustic matching layer, and is fixed to a predetermined position of the hard layer. A piezoelectric body that is arranged and is divided into a plurality of piezoelectric elements by a cutting means in the fixed arrangement, and protrudes from the piezoelectric element in a state where the surface of the divided piezoelectric element is arranged on the inner peripheral surface side The acoustic matching layer is fixedly arranged on the surface on which the piezoelectric elements are arranged, and is disposed outside the vibrator shape forming member, a hard vibrator shape forming member that arranges a plurality of piezoelectric elements in a predetermined shape, An insulating member made of a fiber reinforced thermosetting PPE that electrically insulates the conductor portion from the outside is provided.

また、本発明の一態様によれば、本発明の超音波振動子は、少なくとも硬質な第１音響整合層及び軟質な第２音響整合層を積層して形成した音響整合層と、上記音響整合層より長さ寸法が短く、上記第１音響整合層面の所定位置に固定配置され、上記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、上記分割された上記圧電素子の表面を内周面側に配置した状態で、上記圧電素子から突出する上記音響整合層を構成する第１音響整合層面に固定配置されて、複数の圧電素子を所定形状に配列させる、繊維強化型熱硬化性ＰＰＥからなる振動子形状形成部材とを備えることを特徴とする。 According to another aspect of the present invention, an ultrasonic transducer of the present invention includes an acoustic matching layer formed by laminating at least a hard first acoustic matching layer and a soft second acoustic matching layer, and the acoustic matching described above. A piezoelectric body having a length shorter than that of the layer and fixedly arranged at a predetermined position on the surface of the first acoustic matching layer, and divided into a plurality of piezoelectric elements by a cutting means in the fixedly arranged state, and the divided piezoelectric A fiber in which a plurality of piezoelectric elements are arranged in a predetermined shape by being fixedly arranged on the first acoustic matching layer surface constituting the acoustic matching layer protruding from the piezoelectric element in a state where the surface of the element is arranged on the inner peripheral surface side And a vibrator shape forming member made of reinforced thermosetting PPE.

また、本発明の一態様によれば、本発明の超音波振動子は、少なくとも硬質な第１音響整合層及び軟質な第２音響整合層を積層して形成した音響整合層と、上記音響整合層より長さ寸法が短く、上記第１音響整合層面の所定位置に固定配置され、上記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、上記分割された上記圧電素子の表面を内周面側に配置した状態で、上記圧電素子から突出する上記音響整合層を構成する第１音響整合層面に固定配置されて、複数の圧電素子を所定形状に配列させる硬質な振動子形状形成部材と、上記振動子形状形成部材の外側に配置され、導体部と外部とを電気的に絶縁する繊維強化型熱硬化性ＰＰＥからなる絶縁部材とを備えることを特徴とする。 According to another aspect of the present invention, an ultrasonic transducer of the present invention includes an acoustic matching layer formed by laminating at least a hard first acoustic matching layer and a soft second acoustic matching layer, and the acoustic matching described above. A piezoelectric body having a length shorter than that of the layer and fixedly arranged at a predetermined position on the surface of the first acoustic matching layer, and divided into a plurality of piezoelectric elements by a cutting means in the fixedly arranged state, and the divided piezoelectric In a state where the surface of the element is arranged on the inner peripheral surface side, a rigid arrangement in which a plurality of piezoelectric elements are arranged in a predetermined shape is fixedly arranged on the first acoustic matching layer surface constituting the acoustic matching layer protruding from the piezoelectric element. A vibrator shape forming member and an insulating member made of a fiber reinforced thermosetting PPE that is disposed outside the vibrator shape forming member and electrically insulates the conductor portion from the outside.

また、本発明の超音波振動子は、上記圧電素子が、上記切断手段によって上記第１音響整合層に固定配置された圧電体の表面から第１音響整合層を通過して上記第２音響整合層に至る所定間隔の分割溝を設けて形成されることが望ましい。 The ultrasonic transducer according to the present invention may be configured such that the piezoelectric element passes through the first acoustic matching layer from the surface of the piezoelectric body fixedly disposed on the first acoustic matching layer by the cutting means. It is desirable to form the grooves at predetermined intervals reaching the layer.

また、本発明の超音波振動子は、上記振動子形状形成部材が、円形形状であることが望ましい。
また、本発明の超音波振動子は、上記絶縁部材が、円形形状であることが望ましい。 In the ultrasonic transducer of the present invention, it is desirable that the transducer shape forming member has a circular shape.
In the ultrasonic transducer according to the present invention, it is desirable that the insulating member has a circular shape.

また、本発明の超音波振動子は、上記振動子形状形成部材が、略部分円筒形形状であることが望ましい。
また、本発明の超音波振動子は、上記絶縁部材が、略部分円筒形形状であることが望ましい。 In the ultrasonic transducer of the present invention, it is desirable that the transducer shape forming member has a substantially partial cylindrical shape.
In the ultrasonic transducer of the present invention, it is desirable that the insulating member has a substantially partial cylindrical shape.

また、本発明の一態様によれば、本発明の超音波振動子は、硬質な層を含む音響整合層と、上記音響整合層を構成する硬質な層の所定位置に上記音響整合層の一部が突出する位置関係に固定配置され、上記固定配置された状態で切断手段によって複数の圧電素子に分割される両平面部に一面側電極及び他面側電極をそれぞれ設けた圧電体と、分割形成された上記圧電素子の表面を内周面側に配置した状態で、上記圧電素子から突出する上記音響整合層の上記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる、繊維強化型熱硬化性ＰＰＥからなる振動子形状形成部材とを備え、上記音響整合層の端部側所定位置に、上記圧電体に平行で、上記圧電体の平面部に設けた電極に対向する所定幅の帯状導電材料を設ける一方、上記振動子形状形成部材に上記圧電体から延出配置された導電材料に対向配置される導電部を設けたことを特徴とする。 Further, according to one aspect of the present invention, the ultrasonic transducer according to the present invention includes an acoustic matching layer including a hard layer and one acoustic matching layer at a predetermined position of the hard layer constituting the acoustic matching layer. A piezoelectric body that is fixedly arranged in a positional relationship in which the portions protrude, and is provided with a one-side electrode and an other-side electrode on both plane portions that are divided into a plurality of piezoelectric elements by the cutting means in the fixed arrangement; In a state where the surface of the formed piezoelectric element is disposed on the inner peripheral surface side, the acoustic matching layer protruding from the piezoelectric element is fixedly disposed on the surface on which the piezoelectric element is disposed, and a plurality of piezoelectric elements are formed in a predetermined shape. And a vibrator-shaped forming member made of fiber-reinforced thermosetting PPE, arranged at a predetermined position on the end side of the acoustic matching layer, parallel to the piezoelectric body, and provided on a plane portion of the piezoelectric body. Provide a strip-shaped conductive material with a predetermined width facing the electrode On the other hand, characterized in that a conductive portion disposed opposite the extension arranged conductive material from the piezoelectric to the vibrator shape forming member.

また、本発明の一態様によれば、本発明の超音波振動子は、硬質な層を含む音響整合層と、上記音響整合層を構成する硬質な層の所定位置に上記音響整合層の一部が突出する位置関係に固定配置され、上記固定配置された状態で切断手段によって複数の圧電素子に分割される両平面部に一面側電極及び他面側電極をそれぞれ設けた圧電体と、分割形成された上記圧電素子の表面を内周面側に配置した状態で、上記圧電素子から突出する上記音響整合層の上記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる硬質な振動子形状形成部材と、上記振動子形状形成部材の外側に配置され、導体部と外部とを電気的に絶縁する繊維強化型熱硬化性ＰＰＥからなる絶縁部材とを備え、上記音響整合層の端部側所定位置に、上記圧電体に平行で、上記圧電体の平面部に設けた電極に対向する所定幅の帯状導電材料を設ける一方、上記振動子形状形成部材に上記圧電体から延出配置された導電材料に対向配置される導電部を設けたことを特徴とする。 Further, according to one aspect of the present invention, the ultrasonic transducer according to the present invention includes an acoustic matching layer including a hard layer and one acoustic matching layer at a predetermined position of the hard layer constituting the acoustic matching layer. A piezoelectric body that is fixedly arranged in a positional relationship in which the portions protrude, and is provided with a one-side electrode and an other-side electrode on both plane portions that are divided into a plurality of piezoelectric elements by the cutting means in the fixed arrangement; In a state where the surface of the formed piezoelectric element is disposed on the inner peripheral surface side, the acoustic matching layer protruding from the piezoelectric element is fixedly disposed on the surface on which the piezoelectric element is disposed, and a plurality of piezoelectric elements are formed in a predetermined shape. A hard vibrator shape forming member to be arranged on the outside, and an insulating member made of a fiber reinforced thermosetting PPE that is disposed outside the vibrator shape forming member and electrically insulates the conductor portion from the outside, At a predetermined position on the end side of the acoustic matching layer A strip-shaped conductive material having a predetermined width is provided parallel to the piezoelectric body and opposed to the electrode provided on the plane portion of the piezoelectric body, while facing the conductive material extended from the piezoelectric body on the vibrator shape forming member. A conductive portion to be arranged is provided.

また、本発明の超音波振動子は、上記圧電体の平面部に設けた電極と上記音響整合層に設けた帯状の導電材料との電気的導通、或いは上記導電材料と上記振動子形状形成部材の導電部との電気的導通の少なくとも一方を接触によって行うことが望ましい。 In addition, the ultrasonic transducer according to the present invention is an electrical continuity between the electrode provided on the plane portion of the piezoelectric body and the strip-shaped conductive material provided on the acoustic matching layer, or the conductive material and the transducer shape forming member. It is desirable to perform at least one of electrical continuity with the conductive portion by contact.

また、本発明の超音波振動子は、上記圧電体の平面部に設けた電極と上記音響整合層に設けた帯状の導電材料との電気的導通、或いは上記導電材料と上記振動子形状形成部材の導電部との電気的導通の少なくとも一方を導電部材を介して行うことが望ましい。 In addition, the ultrasonic transducer according to the present invention is an electrical continuity between the electrode provided on the plane portion of the piezoelectric body and the strip-shaped conductive material provided on the acoustic matching layer, or the conductive material and the transducer shape forming member. It is desirable to perform at least one of electrical continuity with the conductive portion through the conductive member.

また、本発明の超音波振動子は、上記導電部材が、金属ロウ部材、導電性接着剤、導電性塗料或いは導体被膜であることが望ましい。 In the ultrasonic vibrator of the present invention, it is desirable that the conductive member is a metal brazing member, a conductive adhesive, a conductive paint, or a conductor coating.

本発明によれば、残留応力による不具合の発生を防止して、分割した圧電素子を高精度に配列させて良好な超音波画像を得られる高信頼性の超音波振動子を提供することが可能となる。 According to the present invention, it is possible to provide a highly reliable ultrasonic transducer capable of preventing occurrence of a defect due to residual stress and arranging the divided piezoelectric elements with high accuracy to obtain a good ultrasonic image. It becomes.

以下、図面を参照しながら本発明の実施の形態について述べる。
図１は、超音波振動子を示す斜視図である。
図１に示すように本実施の形態の超音波振動子１は、ラジアルアレイ型に構成したものであり、音響整合層２と、後述する圧電素子と、バッキング材３と、円筒状に形成した振動子形状形成部材４とで主に構成されている。 Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view showing an ultrasonic transducer.
As shown in FIG. 1, the ultrasonic transducer 1 of the present embodiment is configured in a radial array type, and is formed in an acoustic matching layer 2, a piezoelectric element described later, a backing material 3, and a cylindrical shape. It is mainly composed of the vibrator shape forming member 4.

上記音響整合層２は、エポキシ系、シリコーン系、ポリイミド系等の樹脂部材に金属、セラミックス、ガラス等の粉体や繊維を混合したものや、ガラス、マシナブルセラミックス・シリコーン等で硬質に形成した第１音響整合層２ａと、柔軟性を有する例えばシリコーン系、エポキシ系・ＰＥＥＫ・ポリイミド・ポリエーテルイミド・ポリサルフォン・ポリエーテルサルフォン・フッ素系樹脂等の樹脂部材やゴム状の材料で形成した第２音響整合層２ｂとを積層して形成したものである。なお、基板７については後述する。 The acoustic matching layer 2 is made of a resin material such as epoxy, silicone, polyimide, etc. mixed with metal, ceramics, glass or other powder or fiber, or made of glass, machinable ceramics / silicone, or the like. The first acoustic matching layer 2a is formed of a flexible resin material such as silicone, epoxy, PEEK, polyimide, polyetherimide, polysulfone, polyethersulfone, fluorine resin, or a rubber-like material. The two acoustic matching layers 2b are laminated. The substrate 7 will be described later.

振動子形状形成部材４は、繊維強化型熱硬化性ＰＰＥで形成されている。繊維強化型熱硬化性ＰＰＥは、高い形状精度・絶縁性・導体パターン付加が可能・半田付けの熱に対する耐熱性・接着性が高いなどの特徴を有しており、例えば、京セラケミカル（株）製の「ＴＬＣ−Ｗ−５９６」、「ＴＬＣ−Ｗ−５９８」、旭化成工業（株）製の「ＰＰＣシリーズ」、「ＲＣＣシリーズ」、「Ａ−ＰＰＥシリーズ」、及び利昌工業（株）製の「ＣＳ−３３７６シリーズ」、「ＣＳ−３６６５Ｅ」、等を好適に使用できる。 The vibrator shape forming member 4 is formed of a fiber reinforced thermosetting PPE. Fiber reinforced thermosetting PPE has features such as high shape accuracy, insulation, conductor pattern addition, heat resistance against soldering heat, and high adhesiveness. For example, Kyocera Chemical Co., Ltd. “TLC-W-596”, “TLC-W-598” manufactured by Asahi Kasei Kogyo Co., Ltd., “PPC series”, “RCC series”, “A-PPE series” manufactured by Asahi Kasei Co., Ltd. "CS-3376 series", "CS-3665E", etc. can be used suitably.

図２は、超音波振動子の構成を説明する長手方向断面図であり、図３は、図２のＡ−Ａ線断面図である。
図２及び図３に示すように、上記超音波振動子１は、中心側より順にバッキング材３、圧電素子５及び基板７、第１音響整合層２ａ、第２音響整合層２ｂを配置して構成されている。 FIG. 2 is a longitudinal sectional view for explaining the configuration of the ultrasonic transducer, and FIG. 3 is a sectional view taken along the line AA in FIG.
As shown in FIGS. 2 and 3, the ultrasonic transducer 1 includes a backing material 3, a piezoelectric element 5 and a substrate 7, a first acoustic matching layer 2a, and a second acoustic matching layer 2b in order from the center side. It is configured.

図１及び図３に示すように、上記圧電素子５及び第１音響整合層２ａは、所定数である例えば１９２個等の複数に分割された状態で配列されている。各圧電素子５の内周面側には一面側電極５ａが設けられ、外周面側には他面側電極５ｂが設けられている。 As shown in FIGS. 1 and 3, the piezoelectric element 5 and the first acoustic matching layer 2a are arranged in a state of being divided into a predetermined number such as 192, for example. One surface side electrode 5a is provided on the inner peripheral surface side of each piezoelectric element 5, and the other surface side electrode 5b is provided on the outer peripheral surface side.

図４は、図２の矢印Ｂで示す部分の拡大図であり、図５は、図２の矢印Ｂで示した部分の他の構成例を説明する図であり、図６は、図２の矢印Ｂで示した部分の他の構成例を説明する図であり、図７は、図２の矢印Ｃで示す部分の拡大図である。 4 is an enlarged view of a portion indicated by an arrow B in FIG. 2, FIG. 5 is a diagram for explaining another configuration example of the portion indicated by an arrow B in FIG. 2, and FIG. FIG. 7 is a diagram illustrating another configuration example of a portion indicated by an arrow B, and FIG. 7 is an enlarged view of a portion indicated by an arrow C in FIG.

図４および図５に示すように、上記超音波振動子１の一端側では音響整合層２が上記圧電素子５より突出するように構成されている。そして、この突出した音響整合層２を構成する第１音響整合層２ａの内周面には上記振動子形状形成部材４が接着固定されている。 As shown in FIGS. 4 and 5, the acoustic matching layer 2 is configured to protrude from the piezoelectric element 5 on one end side of the ultrasonic transducer 1. The vibrator shape forming member 4 is bonded and fixed to the inner peripheral surface of the first acoustic matching layer 2a constituting the protruding acoustic matching layer 2.

また、上記音響整合層２を構成する第１音響整合層２ａの所定位置には、例えばこの第１音響整合層２ａの表面と略面一致になるように帯状の導電材料を配置構成したグランド用導電材料（以下、グランド電極と記載する）６が設けられている。このグランド電極６上に上記他面側電極５ｂを載置させることによって、この他面側電極５ｂと上記グランド電極６とが電気的導通状態になる。 In addition, for a ground in which a band-shaped conductive material is arranged and configured at a predetermined position of the first acoustic matching layer 2a constituting the acoustic matching layer 2 so as to be substantially flush with the surface of the first acoustic matching layer 2a, for example. A conductive material (hereinafter referred to as a ground electrode) 6 is provided. By placing the other surface side electrode 5b on the ground electrode 6, the other surface side electrode 5b and the ground electrode 6 are brought into electrical conduction.

また、本実施の形態においては、上記振動子形状形成部材４の所定位置である外周面の上記グランド電極６に対向する面及び一側面には導電部４ａが設けてある。そして、この振動子形状形成部材４を上記第１音響整合層２ａの内周面に対して導電部材である例えば導電接着剤（不図示）で接着固定することによって、上記導電部４ａと上記グランド電極６とが電気的な導通状態になる。この導電部材としては導電接着剤に限定されるものではなく、半田や銀ロウ、金ロウ等の金属ロウ部材、或いは導体被膜等であってもよい。 In the present embodiment, a conductive portion 4a is provided on the surface and one side surface of the outer peripheral surface, which is a predetermined position of the vibrator shape forming member 4, facing the ground electrode 6. Then, the vibrator shape forming member 4 is bonded and fixed to the inner peripheral surface of the first acoustic matching layer 2a with, for example, a conductive adhesive (not shown) as a conductive member, whereby the conductive portion 4a and the ground are fixed. The electrode 6 is electrically connected. The conductive member is not limited to a conductive adhesive, and may be a solder member, a metal brazing member such as silver brazing or gold brazing, or a conductor coating.

また、図６に示すように、導電部４ａを上記振動子形状形成部材４の一側面に設けるのみでもよい。この場合は、上記クランド電極６が外側に露出する構成とし、導電部４ａとグランド電極６との間を、導電性樹脂・導電性塗料等の導体材料や、各種の導体薄膜、導体厚膜、メッキ等の導体皮膜で電気的な導通状態とする。また、これらを組み合わせることも可能である。 Further, as shown in FIG. 6, the conductive portion 4a may be provided only on one side surface of the vibrator shape forming member 4. In this case, the ground electrode 6 is exposed to the outside, and a conductive material such as a conductive resin / conductive paint, various conductive thin films, a conductive thick film, between the conductive portion 4a and the ground electrode 6, Electrical conduction is achieved with a conductive film such as plating. Moreover, it is also possible to combine these.

図７に示すように、上記超音波振動子１の他端側には上記圧電素子５と略同一厚み寸法で形成された基板７が隣設配置されている。この基板７は、３次元基板、アルミナ基板、ガラスエポキシ基板、リジットフレキシブル基板・フレキシブル基板等であり、この基板７に形成されている導電パターン７ａと上記圧電素子５の一面側電極５ａとはこの導電パターン７ａ上及び一面側電極５ａ上に配置された導電部材８によって電気的に接続されている。 As shown in FIG. 7, on the other end side of the ultrasonic transducer 1, a substrate 7 formed with substantially the same thickness as the piezoelectric element 5 is disposed adjacently. The substrate 7 is a three-dimensional substrate, an alumina substrate, a glass epoxy substrate, a rigid flexible substrate, a flexible substrate, or the like. The conductive pattern 7a formed on the substrate 7 and the one surface side electrode 5a of the piezoelectric element 5 are They are electrically connected by a conductive member 8 disposed on the conductive pattern 7a and the one surface side electrode 5a.

なお、上記圧電素子５は、板状に形成されたチタン酸ジルコン酸鉛、チタン酸鉛・チタン酸バリウム系・ＢＮＴ−ＢＳ−ＳＴ系等の圧電セラミック又は、ＬｉＮｂＯ₃・ＰＺＮＴ等の圧電性結晶・リラクサー強誘電体を切断して形成したものである。上記一面側電極５ａ及び他面側電極５ｂは板状の圧電セラミックの面上に金、銀、銅あるいはニッケル・クロム等の導電部材を焼付け又は蒸着・スパッタ・イオンプレーティング等の薄膜又はメッキ等により、単層・多層又は合金層として予め設けたものである。 The piezoelectric element 5 is formed of a plate-like lead zirconate titanate, lead titanate / barium titanate / BNT-BS-ST piezoelectric ceramic, or LiNbO ₃ / PZNT piezoelectric crystal. -It is formed by cutting a relaxor ferroelectric. The one-side electrode 5a and the other-side electrode 5b are formed by baking a conductive member such as gold, silver, copper, nickel or chromium on the surface of a plate-like piezoelectric ceramic, or a thin film or plating such as vapor deposition, sputtering, or ion plating. Thus, a single layer, a multilayer, or an alloy layer is provided in advance.

また、上記バッキング材３は、エポキシ系、シリコーン系、ポリイミド系、ポリエーテルイミド、ＰＥＥＫ（ポリエーテルエーテルケトン）・ウレタン系・フッ素系等の樹脂部材やクロロプレンゴム・プロピレン系ゴム・ブタジエン系ゴム・ウレタン系ゴム・シリコーンゴム・フッ素系ゴム等のゴム材、又はこれら樹脂部材やゴム材にタングステン等の金属、アルミナ・ジルコニア・シリカ・酸化タングステン・圧電セラミックス粉・フェライト等のセラミックス、ガラス、樹脂等の粉体や繊維・中空の粒子などからなる単一又は複数の物質・形状のフィラーを混合したものであり、本実施の形態においてはアルミナ粉末入りのエポキシ樹脂を硬化させたものである。 The backing material 3 is made of epoxy, silicone, polyimide, polyetherimide, PEEK (polyetheretherketone), urethane, fluorine, and other resin members, chloroprene rubber, propylene rubber, butadiene rubber, Rubber materials such as urethane rubber, silicone rubber, and fluorine rubber, or these resin members and rubber materials such as tungsten, ceramics such as alumina, zirconia, silica, tungsten oxide, piezoelectric ceramic powder, and ferrite, glass, resin, etc. In the present embodiment, an epoxy resin containing alumina powder is cured. The filler is a mixture of a single substance or a plurality of substances and shapes made of powder, fibers, hollow particles, and the like.

次に、上述のように構成される超音波振動子１の組立て手順を、図８乃至図２０を参照して説明する。
（１）音響整合層２を形成する工程
図８は、音響整合層を形成する部材を説明する図であり、図９は、音響接合層を説明する図である。 Next, an assembly procedure of the ultrasonic transducer 1 configured as described above will be described with reference to FIGS.
(1) Step of Forming Acoustic Matching Layer 2 FIG. 8 is a diagram for explaining a member for forming the acoustic matching layer, and FIG. 9 is a diagram for explaining the acoustic bonding layer.

まず、上記音響整合層２を形成するため、図８に示すように所定寸法及び形状で所定の音響インピーダンス値に調整した第１音響整合層２ａ及び第２音響整合層２ｂを用意する。この第１音響整合層２ａの一面側所定位置には板状のグランド電極６が配置してある。 First, in order to form the acoustic matching layer 2, a first acoustic matching layer 2a and a second acoustic matching layer 2b adjusted to a predetermined acoustic impedance value with a predetermined size and shape as shown in FIG. 8 are prepared. A plate-like ground electrode 6 is disposed at a predetermined position on the one surface side of the first acoustic matching layer 2a.

そして、図９に示すように上記第１音響整合層２ａと第２音響整合層２ｂとを一体的に積層して音響整合層２を形成する。このとき、上記第２音響整合層２ａを、グランド電極６が設けられていない第１音響整合層２ａの他面側に配置する。音響整合層は、本実施の形態で示したように各々を所定厚さとした後に一体化すること、一体化させた後に所定厚さとすること、接合で無く一方に他方を塗布、注型、成膜等により直接形成すること、及びこれらの組合せが可能である。 And as shown in FIG. 9, the said 1st acoustic matching layer 2a and the 2nd acoustic matching layer 2b are laminated | stacked integrally, and the acoustic matching layer 2 is formed. At this time, the second acoustic matching layer 2a is disposed on the other surface side of the first acoustic matching layer 2a where the ground electrode 6 is not provided. As shown in the present embodiment, the acoustic matching layer is integrated after each thickness is set to a predetermined thickness, is set to a predetermined thickness after being integrated, and is coated, cast, It can be formed directly by a film or the like, or a combination thereof.

なお、上記グランド電極６は例えば、上記第１音響整合層２ａの所定位置に形成した所定幅寸法及び深さ寸法の溝１１に、所定幅寸法及び厚み寸法に形成した板状の導電部材１２を接着配置して構成したり、或いは、上記溝１１に所定幅寸法で上記深さ寸法より厚めに形成した板状の導電部材を接着配置するか、導電樹脂等を突出するように塗布或いは充填した後、この導電部材の突出部分を第１音響整合層２ａの面と面一致状態になるように加工して構成したり、或いは所定厚み寸法より厚めに形成した上記第１音響整合層２ａの上記溝１１内に導電部材を接合ないし塗布或いは充填した後、全体を所定厚み寸法になるように加工して構成したり、或いは各種の導体膜により構成したものである。なお、グランド電極６には、導電性樹脂・導電性塗料・金属等の導体材料や、各種の導体薄膜・導体厚膜・メッキ等の導体皮膜が使用可能である。
（２）第１積層体を形成する工程
図１０は、第１積層体を形成する部材を説明する図であり、図１１は、第１積層体を説明する図である。 The ground electrode 6 includes, for example, a plate-like conductive member 12 formed in a predetermined width and thickness in a groove 11 having a predetermined width and depth formed in a predetermined position of the first acoustic matching layer 2a. It is configured by bonding, or a plate-like conductive member formed with a predetermined width dimension and thicker than the depth dimension is bonded to the groove 11, or a conductive resin or the like is applied or filled so as to protrude. Thereafter, the projecting portion of the conductive member is processed and configured to be in a state of being flush with the surface of the first acoustic matching layer 2a, or the first acoustic matching layer 2a formed thicker than a predetermined thickness is used. After the conductive member is joined, applied or filled in the groove 11, the whole is processed to have a predetermined thickness dimension, or is constituted by various conductive films. The ground electrode 6 can be made of a conductive material such as conductive resin, conductive paint, or metal, or a conductive film such as various conductive thin films, conductive thick films, or plating.
(2) Step of Forming First Laminate FIG. 10 is a diagram for explaining members forming the first laminate, and FIG. 11 is a diagram for explaining the first laminate.

第１積層体を形成するため、図１０に示すように上記音響整合層２と、一面側電極５ａ及び他面側電極５ｂとをそれぞれ設けた圧電セラミック１３とを用意する。この圧電セラミック１３は、上記音響整合層２の長さ寸法より所定寸法だけ短く形成され、幅寸法は略同一寸法で形成され、厚み寸法は所定寸法に形成されている。 In order to form a 1st laminated body, as shown in FIG. 10, the said acoustic matching layer 2 and the piezoelectric ceramic 13 which each provided the one surface side electrode 5a and the other surface side electrode 5b are prepared. The piezoelectric ceramic 13 is formed shorter than the length dimension of the acoustic matching layer 2 by a predetermined dimension, the width dimension is formed with substantially the same dimension, and the thickness dimension is formed with a predetermined dimension.

図１１に示すように上記音響整合層２をひっくり返した状態にして、第１音響整合層２ａに設けたグランド電極６上の所定位置に上記圧電セラミック１３の他面側電極５ｂを載置させた状態にして、この圧電セラミック１３を上記第１音響整合層２ａに対して接着剤（不図示）によって一体的に接着固定する。 As shown in FIG. 11, the acoustic matching layer 2 is turned over, and the other surface side electrode 5b of the piezoelectric ceramic 13 is placed at a predetermined position on the ground electrode 6 provided on the first acoustic matching layer 2a. In this state, the piezoelectric ceramic 13 is integrally bonded and fixed to the first acoustic matching layer 2a with an adhesive (not shown).

このことによって、上記他面側電極５ｂと上記圧電セラミック１３のグランド電極６とが電気的導通状態で、上記音響整合層２と上記圧電セラミック１３とが一体な第１積層体２１が形成される。このとき、上記グランド電極６が配置されている音響整合層２の一端面側が上記圧電セラミック１３の一端面側から所定量ａだけ突出した状態になる。
（３）第２積層体を形成する工程
図１２は、第２積層体を形成する部材を説明する図であり、図１３は、第２積層体を説明する図である。 As a result, the first laminated body 21 in which the acoustic matching layer 2 and the piezoelectric ceramic 13 are integrated is formed while the other surface side electrode 5b and the ground electrode 6 of the piezoelectric ceramic 13 are in an electrically conductive state. . At this time, one end surface side of the acoustic matching layer 2 on which the ground electrode 6 is disposed is in a state of projecting from the one end surface side of the piezoelectric ceramic 13 by a predetermined amount a.
(3) Step of Forming Second Laminate FIG. 12 is a diagram for explaining members forming the second laminate, and FIG. 13 is a diagram for explaining the second laminate.

第２積層体を形成するため、図１２に示すように上記第１積層体２１と、例えば一面側に複数の導電パターン７ａを規則的に設けた厚み寸法が上記圧電セラミック１３と略同寸法の基板７とを用意する。そして、導電パターン７ａを上向きにした状態で図１３に示すように上記基板７を上記圧電セラミック１３に並べて隣り合わせに配設し、この基板７を上記第１音響整合層２ａに対して接着固定する。 In order to form the second laminated body, as shown in FIG. 12, the thickness of the first laminated body 21 and, for example, a plurality of conductive patterns 7a regularly provided on one surface side is substantially the same as that of the piezoelectric ceramic 13. A substrate 7 is prepared. Then, with the conductive pattern 7a facing upward, the substrate 7 is arranged next to the piezoelectric ceramic 13 as shown in FIG. 13, and the substrate 7 is bonded and fixed to the first acoustic matching layer 2a. .

このことによって、上記第１音響整合層２ａの面上に圧電セラミック１３と基板７とが隣設した第２積層体２２が形成される。なお、上記基板７の幅寸法及び長さ寸法は所定寸法に設定されている。
（４）基板の導電パターン７ａと圧電セラミック１３の一面側電極５ａとを電気的に接続する工程
図１４は、基板の導電パターンと圧電セラミックの一面側電極とを電気的に接続する工程を説明する図である。 As a result, the second laminated body 22 in which the piezoelectric ceramic 13 and the substrate 7 are adjacent to each other is formed on the surface of the first acoustic matching layer 2a. The width and length of the substrate 7 are set to predetermined dimensions.
(4) Step of electrically connecting the conductive pattern 7a of the substrate and the one surface side electrode 5a of the piezoelectric ceramic 13 FIG. 14 illustrates a step of electrically connecting the conductive pattern of the substrate and the one surface side electrode of the piezoelectric ceramic. It is a figure to do.

図１４に示すように上記第２積層体２２の導電パターン７ａが形成されている基板７及び一面側電極５ａが設けられている圧電セラミック１３の表面の所定位置に図示しないマスク部材を配置し、膜部材である導電性塗料又は導電性接着剤等を塗布して導電膜部１４を設ける。 As shown in FIG. 14, a mask member (not shown) is arranged at a predetermined position on the surface of the piezoelectric ceramic 13 on which the substrate 7 on which the conductive pattern 7a of the second laminate 22 is formed and the one-side electrode 5a is provided, The conductive film portion 14 is provided by applying a conductive paint or a conductive adhesive as a film member.

このことによって、この導電膜部１４によって、上記導電パターン７ａと一面側電極５ａとが電気的に接続される。
（５）圧電セラミック１３を複数の圧電素子５に分割する工程
図１５は、分割溝を形成して圧電セラミックを圧電素子に分割している状態を示す図であり、図１６は、所定数の分割溝を形成した第２積層体を示す図であり、図１７は、複数の圧電素子を設けた第２積層体を変形させた状態を示す図である。 Thus, the conductive pattern 7a and the one-surface electrode 5a are electrically connected by the conductive film portion 14.
(5) Step of Dividing Piezoelectric Ceramic 13 into Plural Piezoelectric Elements 5 FIG. 15 is a diagram showing a state in which a dividing groove is formed to divide the piezoelectric ceramic into piezoelectric elements, and FIG. It is a figure which shows the 2nd laminated body which formed the division | segmentation groove | channel, and FIG. 17 is a figure which shows the state which deform | transformed the 2nd laminated body which provided the several piezoelectric element.

図１５に示すように図示しないダイシングソー又はレーザ装置等の切断手段を使用して、圧電セラミック１３及び基板７の表面側から上記音響整合層２を構成する第１音響整合層２ａを通過させて、第２音響整合層２ｂの一部に到達する所定深さ寸法で所定幅寸法又は所定形状の分割溝１５を長手方向に対して直交する方向に所定ピッチで形成していく。このとき、上記切断手段を２つの導電パターン７ａを分割する中央線上に配置させる。 As shown in FIG. 15, a cutting means such as a dicing saw or a laser device (not shown) is used to pass the first acoustic matching layer 2 a constituting the acoustic matching layer 2 from the surface side of the piezoelectric ceramic 13 and the substrate 7. The dividing grooves 15 having a predetermined width dimension or a predetermined shape reaching a part of the second acoustic matching layer 2b are formed at a predetermined pitch in a direction orthogonal to the longitudinal direction. At this time, the cutting means is arranged on the center line dividing the two conductive patterns 7a.

このことによって、複数の導電パターン７ａを設けた基板７が導電パターン７ａを設けた複数の基板７に分割されるとともに、１枚の圧電セラミック１３が複数の圧電素子５に分割される。このとき、上記導電膜部１４も導電部材８に分割されていく。このことによって、上記音響整合層２上に導電パターン７ａを導電部材８で電気的に接続した圧電素子５が配列されていく。 Thus, the substrate 7 provided with the plurality of conductive patterns 7 a is divided into the plurality of substrates 7 provided with the conductive patterns 7 a, and one piezoelectric ceramic 13 is divided into the plurality of piezoelectric elements 5. At this time, the conductive film portion 14 is also divided into conductive members 8. As a result, the piezoelectric elements 5 in which the conductive patterns 7 a are electrically connected by the conductive members 8 are arranged on the acoustic matching layer 2.

そして、図１６に示すように上記第２積層体２２に分割溝１５を所定ピッチで所定数形成することによって、上記圧電セラミック１３、基板７、導電膜部１４及び第１音響整合層２ａが所定数に分割されて、圧電セラミック１３及び基板７を有していた第２積層体２２が、複数の圧電素子５及び基板７を配置した第２積層体２２ａに変化する。つまり、上記音響整合層２を構成する柔軟性を有する第２音響整合層２ｂに、複数の圧電素子５を配列した状態になる。 Then, as shown in FIG. 16, by forming a predetermined number of dividing grooves 15 at a predetermined pitch in the second laminated body 22, the piezoelectric ceramic 13, the substrate 7, the conductive film portion 14, and the first acoustic matching layer 2a are predetermined. The second laminated body 22 having the piezoelectric ceramic 13 and the substrate 7 is divided into a second laminated body 22a in which the plurality of piezoelectric elements 5 and the substrates 7 are arranged. That is, a plurality of piezoelectric elements 5 are arranged in the flexible second acoustic matching layer 2b constituting the acoustic matching layer 2.

したがって、上記第２音響整合層２ｂを最外周側に配置した状態にして、この第２積層体２２を曲げ変形することにより、図１７に示すように複数の圧電素子５を備えた第２積層体２２ａを円筒形状に形作れる。 Therefore, the second laminated body 22 having the plurality of piezoelectric elements 5 as shown in FIG. 17 is obtained by bending the second laminated body 22 with the second acoustic matching layer 2b disposed on the outermost peripheral side. The body 22a can be formed into a cylindrical shape.

なお、上記分割溝１５を形成した後、上記超音波振動子１を形成するに当たって不要になる、例えば図１５の斜線で示す音響整合層２を除去しておく。また同様に、上記第２積層体を構成する各部材について、例えば長さなどについては所定形状よりも大きいものを用い、最終的に不要部分を除去することも可能である。さらに必要に応じ、それぞれの圧電素子５の一面側電極５ａと、基板７の導電パターン７ａとが導電部材８によって電気的に接続されているかの導通検査を行う。
（６）円筒状ユニット２３を形成する工程
図１８は、円筒状の振動子ユニットを形成する部材を説明する図であり、図１９は、第１音響整合層に振動子形状形成部材を配置した状態を説明する図であり、図２０は、基板に振動子形状形成部材を配置した状態を説明する図である。 In addition, after forming the said division | segmentation groove | channel 15, the acoustic matching layer 2 shown, for example by the oblique line of FIG. 15, which becomes unnecessary in forming the said ultrasonic transducer | vibrator 1 is removed. Similarly, for each member constituting the second laminated body, for example, a member having a length larger than a predetermined shape can be used, and an unnecessary portion can be finally removed. Further, if necessary, a continuity test is performed to determine whether the one-surface-side electrode 5a of each piezoelectric element 5 and the conductive pattern 7a of the substrate 7 are electrically connected by the conductive member 8.
(6) Step of Forming Cylindrical Unit 23 FIG. 18 is a diagram for explaining a member that forms a cylindrical vibrator unit. FIG. 19 shows that a vibrator shape forming member is arranged in the first acoustic matching layer. FIG. 20 is a diagram illustrating a state in which a vibrator shape forming member is arranged on a substrate.

円筒状ユニット２３を形成するため、図１８に示すように第２積層体２２ａと、所定寸法に形成した繊維強化型熱硬化性ＰＰＥ部材で形成した円筒状の振動子形状形成部材４Ａ、４Ｂとを用意する。そして、図１９に示すように上記第２積層体２２ａを円筒状に形作った後、上記振動子形状形成部材４Ａを音響整合層２の第１音響整合層２ａに導電接着剤で一体的に接着固定する。一方、図２０に示すように上記振動子形状形成部材４Ｂを上記圧電素子５に隣設する基板７の内周面側に非導電性の接着剤によって一体的に接着固定する。 To form the cylindrical unit 23, as shown in FIG. 18, cylindrical vibrator shape forming members 4A and 4B formed of a second laminate 22a and a fiber reinforced thermosetting PPE member formed to have a predetermined size, Prepare. Then, as shown in FIG. 19, after forming the second laminated body 22a into a cylindrical shape, the vibrator shape forming member 4A is integrally bonded to the first acoustic matching layer 2a of the acoustic matching layer 2 with a conductive adhesive. Fix it. On the other hand, as shown in FIG. 20, the vibrator shape forming member 4 </ b> B is integrally bonded and fixed to the inner peripheral surface side of the substrate 7 adjacent to the piezoelectric element 5 with a nonconductive adhesive.

このことによって、硬質な部材である第１音響整合層２ａと繊維強化型熱硬化性ＰＰＥである振動子形状形成部材４Ａ及び基板７と繊維強化型熱硬化性ＰＰＥである振動子形状形成部材４Ｂとを接着固定して上記第２積層体２２ａが所定の曲率の円筒状ユニット２３として形成される。このとき、分割された圧電素子５にそれぞれ設けられている他面側電極５ｂと導通状態になっている上記グランド電極６と、振動子形状形成部材４Ａの導電部４ａとが一体的な導通状態になる。この導電部４ａに図示しない超音波観測装置から延出するグラント線を接続することによって容量が十分に大きなグランドが確保される。なお、上記振動子形状形成部材４Ａは、固定を非導電性接着剤により行い、その後に導体薄膜、導電性樹脂、導体厚膜等によって電気的に接続しても、何ら問題はない。 Thus, the first acoustic matching layer 2a, which is a hard member, the vibrator shape forming member 4A, which is a fiber reinforced thermosetting PPE, and the vibrator shape forming member 4B, which is a substrate 7 and a fiber reinforced thermosetting PPE. And the second laminated body 22a is formed as a cylindrical unit 23 having a predetermined curvature. At this time, the ground electrode 6 and the conductive portion 4a of the vibrator-forming member 4A are in an integrated conductive state with the other-surface-side electrodes 5b provided in the divided piezoelectric elements 5 respectively. become. A ground having a sufficiently large capacitance is secured by connecting a grant line extending from an ultrasonic observation apparatus (not shown) to the conductive portion 4a. It should be noted that there is no problem if the vibrator shape forming member 4A is fixed by a non-conductive adhesive and then electrically connected by a conductor thin film, a conductive resin, a conductor thick film, or the like.

バッキング材は、圧電素子５の一面電極５ａ側に、フェライト入りゴム材・アルミナ粉入りエポキシ等を材料として用い、接着・注型等の方式により、付加する。これにより、上記図１乃至図３に示したような構成のラジアルアレイ型の超音波振動子が形成される。 The backing material is added to the one-side electrode 5a side of the piezoelectric element 5 using a rubber material containing ferrite, an epoxy containing alumina powder, or the like as a material and using a method such as adhesion or casting. As a result, a radial array type ultrasonic transducer having the configuration shown in FIGS. 1 to 3 is formed.

図２１は、コンベックスアレイ型振動子ユニットを形成するための振動子形状形成部材及び第２積層体を示す図であり、図２２は、リニアアレイ型振動子ユニットを形成するための振動子形状形成部材及び第２積層体を示す図である。 FIG. 21 is a diagram showing a vibrator shape forming member and a second stacked body for forming a convex array type vibrator unit, and FIG. 22 is a drawing of a vibrator shape for forming a linear array type vibrator unit. It is a figure which shows a member and a 2nd laminated body.

上述したように、本実施の形態においては振動子形状形成部材４Ａ、４Ｂを用いてラジアルアレイ型の超音波振動子１を形成する工程を説明したが、上記（６）の円筒状ユニット２３を形成する工程で示した振動子形状形成部材４Ａ、４Ｂを使用する代わりに、図２１に示すように例えば部分円形形状等に形成した振動子形状形成部材４Ｃ、４Ｄを上述と同様に所定形状で所定数に分割された圧電素子５を有する第２積層体２２ｂの第１音響整合層２ａに固定することによってコンベックスアレイ型振動子ユニットが形成される。 As described above, in the present embodiment, the process of forming the radial array type ultrasonic transducer 1 using the transducer shape forming members 4A and 4B has been described. Instead of using the transducer shape forming members 4A and 4B shown in the forming step, the transducer shape forming members 4C and 4D formed in a partial circular shape or the like as shown in FIG. A convex array type transducer unit is formed by fixing to the first acoustic matching layer 2a of the second stacked body 22b having the piezoelectric elements 5 divided into a predetermined number.

また、図２２に示すように端部が平坦である平板状の振動子形状形成部材４Ｅを上述と同様に第２積層体２２ｃの第１音響整合層２ａに該平坦部が接するように固定することによってリニアアレイ型振動子ユニットが形成される。さらに、振動子形状形成部材の端部形状は円弧や直線に限定されるものではなく、これらの組合せや変形も可能であり、これにより超音波走査方向を自在に設定することができる。 Further, as shown in FIG. 22, a flat plate-like vibrator-shaped member 4E having a flat end is fixed so that the flat portion is in contact with the first acoustic matching layer 2a of the second stacked body 22c in the same manner as described above. As a result, a linear array type vibrator unit is formed. Furthermore, the shape of the end of the transducer shape forming member is not limited to a circular arc or a straight line, and combinations and modifications thereof are also possible, whereby the ultrasonic scanning direction can be freely set.

このように、圧電素子から突出している音響整合層を構成する硬質な第１音響整合層に、所定形状に形成した繊維強化型熱硬化性ＰＰＥである振動子形状形成部材を固定配置することによって、所定形状の超音波振動子を高精度に形成することができるとともに、残留応力による不具合の発生を確実に防止した超音波振動子を形成することができる。 Thus, by arranging the vibrator shape forming member, which is a fiber reinforced thermosetting PPE formed in a predetermined shape, on the hard first acoustic matching layer constituting the acoustic matching layer protruding from the piezoelectric element. In addition, it is possible to form an ultrasonic transducer having a predetermined shape with high accuracy, and it is possible to form an ultrasonic transducer that reliably prevents the occurrence of problems due to residual stress.

このことによって、圧電セラミックを複数に分割して形成した圧電素子が高精度に配列されて、高画質の超音波観察像を長期にわたって安定して得られる。
なお、上述の実施の形態においては、振動子形状形成部として繊維強化型熱硬化性ＰＰＥを用いたが、振動子形状形成部材としては一般的な硬質部材を用い、さらにその外側に超音波振動子を絶縁するための部材として振動子形状形成部と同一形状の繊維強化型熱硬化性ＰＰＥを用いた絶縁部材を用意しても良い。 As a result, the piezoelectric elements formed by dividing the piezoelectric ceramic into a plurality are arranged with high accuracy, and a high-quality ultrasonic observation image can be stably obtained over a long period of time.
In the above-described embodiment, the fiber reinforced thermosetting PPE is used as the vibrator shape forming portion. However, a general hard member is used as the vibrator shape forming member, and ultrasonic vibration is further provided on the outside thereof. An insulating member using fiber-reinforced thermosetting PPE having the same shape as the vibrator shape forming portion may be prepared as a member for insulating the child.

図２３は、繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたラジアル型超音波振動子の構成を説明するための図であり、図２４は、繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたラジアル型超音波振動子を示す図である。 FIG. 23 is a diagram for explaining the configuration of a radial ultrasonic transducer using a fiber-reinforced thermosetting PPE insulating member, and FIG. 24 uses a fiber-reinforced thermosetting PPE insulating member. It is a figure which shows the radial type ultrasonic transducer | vibrator.

ラジアル型超音波振動子１ａを形成するため、図２３に示すように音響整合層２と、所定寸法に形成した硬質部材で形成した円筒状の振動子形状形成部材３１ａ、３１ｂと、これら振動子形状形成部材３１ａ、３１ｂとほぼ同一寸法に形成した繊維強化型熱硬化性ＰＰＥで形成した円筒状の絶縁部材３２ａとを用意する。 In order to form the radial type ultrasonic transducer 1a, as shown in FIG. 23, the acoustic matching layer 2, cylindrical transducer shape forming members 31a and 31b formed of a hard member having a predetermined size, and these transducers A cylindrical insulating member 32a formed of a fiber reinforced thermosetting PPE formed with substantially the same dimensions as the shape forming members 31a and 31b is prepared.

そして、図２４に示すように、上記振動子形状形成部材３１ａ、３１ｂを音響整合層２に導電接着剤で一体的に接着固定した後、絶縁部材３２ａを接着固定して、ラジアル型超音波振動子１ａを形成する。 Then, as shown in FIG. 24, the vibrator shape forming members 31a and 31b are integrally bonded and fixed to the acoustic matching layer 2 with a conductive adhesive, and then the insulating member 32a is bonded and fixed, thereby radial ultrasonic vibration. A child 1a is formed.

図２５は、繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたコンベックス型超音波振動子の構成を説明するための図であり、図２６は、繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたコンベックス型超音波振動子を示す図である。 FIG. 25 is a diagram for explaining a configuration of a convex ultrasonic transducer using a fiber-reinforced thermosetting PPE insulating member, and FIG. 26 uses a fiber-reinforced thermosetting PPE insulating member. It is a figure which shows the convex type | mold ultrasonic transducer.

コンベックス型超音波振動子１ｂを形成するため、図２５に示すように音響整合層２と、所定寸法に形成した硬質部材で形成した円盤状の振動子形状形成部材３１ｃ、３１ｄと、これら振動子形状形成部材３１ｃ、３１ｄとほぼ同一寸法に形成した繊維強化型熱硬化性ＰＰＥで形成した円盤状の絶縁部材３２ｂとを用意する。 In order to form the convex ultrasonic transducer 1b, as shown in FIG. 25, the acoustic matching layer 2, disk-shaped transducer shape forming members 31c and 31d formed of a hard member having a predetermined size, and these transducers A disk-shaped insulating member 32b formed of a fiber reinforced thermosetting PPE formed to have substantially the same dimensions as the shape forming members 31c and 31d is prepared.

そして、図２６に示すように、上記振動子形状形成部材３１ｃ、３１ｄを音響整合層２に導電接着剤で一体的に接着固定した後、絶縁部材３２ｂを接着固定して、コンベックス型超音波振動子１ｂを形成する。 Then, as shown in FIG. 26, the vibrator shape forming members 31c and 31d are integrally bonded and fixed to the acoustic matching layer 2 with a conductive adhesive, and then the insulating member 32b is bonded and fixed, thereby forming a convex ultrasonic vibration. A child 1b is formed.

なお、本発明は、以上述べた実施の形態のみに限定されるものではなく、発明の要旨を逸脱しない範囲で種々変形実施可能である。例えば、本例では基板７を圧電素子５に併設配置し導電部材により両者を電気的に接続したが、これに限定されるものではなく、例えばバッキング材の内部又は側面に基板を位置させることや、フレームと基板とを合一すること、基板と圧電素子との接続を金属細線等で行うことも可能である。 It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the invention. For example, in this example, the substrate 7 is disposed side by side with the piezoelectric element 5 and the both are electrically connected by a conductive member. However, the present invention is not limited to this. For example, the substrate may be positioned inside or on the side of the backing material. It is also possible to unite the frame and the substrate, and to connect the substrate and the piezoelectric element with a thin metal wire or the like.

以上本発明の実施の形態を図面を用いて説明してきたが、本発明は、上述した実施の形態に限定されるものではなく、本発明の要旨を変えない範囲において、種々の変更、改変等が可能である。 The embodiments of the present invention have been described with reference to the drawings. However, the present invention is not limited to the above-described embodiments, and various changes, modifications, and the like can be made without departing from the scope of the present invention. Is possible.

超音波振動子を示す斜視図である。It is a perspective view which shows an ultrasonic transducer | vibrator. 超音波振動子の構成を説明する長手方向断面図である。It is a longitudinal direction sectional view explaining the composition of an ultrasonic transducer. 図２のＡ−Ａ線断面図である。It is the sectional view on the AA line of FIG. 図２の矢印Ｂで示す部分の拡大図である。FIG. 3 is an enlarged view of a portion indicated by an arrow B in FIG. 2. 図２の矢印Ｂで示した部分の他の構成例を説明する図である。It is a figure explaining the other structural example of the part shown by the arrow B of FIG. 図２の矢印Ｂで示した部分の他の構成例を説明する図である。It is a figure explaining the other structural example of the part shown by the arrow B of FIG. 図２の矢印Ｃで示す部分の拡大図である。FIG. 3 is an enlarged view of a portion indicated by an arrow C in FIG. 2. 音響整合層を形成する部材を説明する図である。It is a figure explaining the member which forms an acoustic matching layer. 音響接合層を説明する図である。It is a figure explaining an acoustic joining layer. 第１積層体を形成する部材を説明する図である。It is a figure explaining the member which forms a 1st laminated body. 第１積層体を説明する図である。It is a figure explaining a 1st laminated body. 第２積層体を形成する部材を説明する図である。It is a figure explaining the member which forms a 2nd laminated body. 第２積層体を説明する図である。It is a figure explaining a 2nd laminated body. 基板の導電パターンと圧電セラミックの一面側電極とを電気的に接続する工程を説明する図である。It is a figure explaining the process of electrically connecting the conductive pattern of a board | substrate, and the one surface side electrode of a piezoelectric ceramic. 分割溝を形成して圧電セラミックを圧電素子に分割している状態を示す図である。It is a figure which shows the state which forms the division | segmentation groove | channel and has divided the piezoelectric ceramic into the piezoelectric element. 所定数の分割溝を形成した第２積層体を示す図である。It is a figure which shows the 2nd laminated body in which the predetermined number of division grooves were formed. 複数の圧電素子を設けた第２積層体を変形させた状態を示す図である。It is a figure which shows the state which deform | transformed the 2nd laminated body which provided the several piezoelectric element. 円筒状の振動子ユニットを形成する部材を説明する図である。It is a figure explaining the member which forms a cylindrical vibrator unit. 第１音響整合層に振動子形状形成部材を配置した状態を説明する図である。It is a figure explaining the state which has arrange | positioned the vibrator shape formation member to the 1st acoustic matching layer. 基板に振動子形状形成部材を配置した状態を説明する図である。It is a figure explaining the state which has arrange | positioned the vibrator shape formation member to the board | substrate. コンベックスアレイ型振動子ユニットを形成するための振動子形状形成部材及び第２積層体を示す図である。It is a figure which shows the vibrator shape formation member and 2nd laminated body for forming a convex array type | mold vibrator unit. リニアアレイ型振動子ユニットを形成するための振動子形状形成部材及び第２積層体を示す図である。It is a figure which shows the vibrator shape formation member and 2nd laminated body for forming a linear array type vibrator unit. 繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたラジアル型超音波振動子の構成を説明するための図である。It is a figure for demonstrating the structure of the radial type ultrasonic transducer | vibrator using the insulating member of fiber reinforcement type thermosetting PPE. 繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたラジアル型超音波振動子を示す図である。It is a figure which shows the radial type ultrasonic transducer | vibrator using the insulation member of fiber reinforcement type thermosetting PPE. 繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたコンベックス型超音波振動子の構成を説明するための図である。It is a figure for demonstrating the structure of the convex-type ultrasonic transducer | vibrator using the insulating member of fiber reinforcement type thermosetting PPE. 繊維強化型熱硬化性ＰＰＥの絶縁部材を用いたコンベックス型超音波振動子を示す図である。It is a figure which shows the convex type | mold ultrasonic transducer | vibrator using the insulation member of fiber reinforcement type thermosetting PPE.

符号の説明Explanation of symbols

１超音波振動子
１ａラジアル型超音波振動子
１ｂコンベックス型超音波振動子
２音響整合層
２ａ第１音響整合層
２ｂ第２音響整合層
３バッキング材
４振動子形状形成部材
４ａ導電部
４Ａ振動子形状形成部材
４Ｂ振動子形状形成部材
４Ｃ振動子形状形成部材
４Ｄ振動子形状形成部材
４Ｅ振動子形状形成部材
５圧電素子
５ａ一面側電極
５ｂ他面側電極
６グランド電極
７基板
７ａ導電パターン
８導電部材
１１溝
１２導電部材
１３圧電セラミック
１４導電膜部
１５分割溝
２１第１積層体
２２第２積層体
２２ａ第２積層体
２２ｂ第２積層体
２２ｃ第２積層体
２３円筒状ユニット
３１ａ振動子形状形成部材
３１ｂ振動子形状形成部材
３１ｃ振動子形状形成部材
３１ｄ振動子形状形成部材
３２ａ絶縁部材
３２ｂ絶縁部材

DESCRIPTION OF SYMBOLS 1 Ultrasonic vibrator 1a Radial type ultrasonic vibrator 1b Convex type ultrasonic vibrator 2 Acoustic matching layer 2a 1st acoustic matching layer 2b 2nd acoustic matching layer 3 Backing material 4 Vibrator shape forming member 4a Conductive part 4A Vibrator Shape forming member 4B Vibrator shape forming member 4C Vibrator shape forming member 4D Vibrator shape forming member 4E Vibrator shape forming member 5 Piezoelectric element 5a One surface side electrode 5b Other surface side electrode 6 Ground electrode 7 Substrate 7a Conductive pattern 8 Conductive member DESCRIPTION OF SYMBOLS 11 Groove 12 Conductive member 13 Piezoelectric ceramic 14 Conductive film part 15 Dividing groove 21 1st laminated body 22 2nd laminated body 22a 2nd laminated body 22b 2nd laminated body 22c 2nd laminated body 23 Cylindrical unit 31a Oscillator shape forming member 31b vibrator shape forming member 31c vibrator shape forming member 31d vibrator shape forming member 32a insulating member 32b Insulating member

Claims

硬質な層を含む音響整合層と、
前記音響整合層より長さ寸法が短く、前記硬質な層の所定位置に固定配置され、前記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、
前記分割された前記圧電素子の表面を内周面側に配置した状態で、前記圧電素子から突出する前記音響整合層の前記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる、繊維強化型熱硬化性ＰＰＥ（ポリフェニルエーテル）からなる振動子形状形成部材と、
を備えることを特徴とする超音波振動子。 An acoustic matching layer including a hard layer;
A piezoelectric body having a length shorter than that of the acoustic matching layer, fixedly arranged at a predetermined position of the hard layer, and divided into a plurality of piezoelectric elements by a cutting means in the fixedly arranged state;
In a state where the surface of the divided piezoelectric element is disposed on the inner peripheral surface side, the acoustic matching layer protruding from the piezoelectric element is fixedly disposed on the surface on which the piezoelectric element is disposed, and a plurality of piezoelectric elements are predetermined. An oscillator shape forming member made of fiber reinforced thermosetting PPE (polyphenyl ether), arranged in a shape,
An ultrasonic transducer comprising:

硬質な層を含む音響整合層と、
前記音響整合層より長さ寸法が短く、前記硬質な層の所定位置に固定配置され、前記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、
前記分割された前記圧電素子の表面を内周面側に配置した状態で、前記圧電素子から突出する前記音響整合層の前記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる硬質な振動子形状形成部材と、
前記振動子形状形成部材の外側に配置され、導体部と外部とを電気的に絶縁する繊維強化型熱硬化性ＰＰＥからなる絶縁部材と、
を備えることを特徴とする超音波振動子。 An acoustic matching layer including a hard layer;
A piezoelectric body having a length shorter than that of the acoustic matching layer, fixedly arranged at a predetermined position of the hard layer, and divided into a plurality of piezoelectric elements by a cutting means in the fixedly arranged state;
In a state where the surface of the divided piezoelectric element is disposed on the inner peripheral surface side, the acoustic matching layer protruding from the piezoelectric element is fixedly disposed on the surface on which the piezoelectric element is disposed, and a plurality of piezoelectric elements are predetermined. A hard vibrator shape forming member arranged in a shape;
An insulating member made of a fiber-reinforced thermosetting PPE that is disposed outside the vibrator shape forming member and electrically insulates the conductor portion from the outside;
An ultrasonic transducer comprising:

少なくとも硬質な第１音響整合層及び軟質な第２音響整合層を積層して形成した音響整合層と、
前記音響整合層より長さ寸法が短く、前記第１音響整合層面の所定位置に固定配置され、前記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、
前記分割された前記圧電素子の表面を内周面側に配置した状態で、前記圧電素子から突出する前記音響整合層を構成する第１音響整合層面に固定配置されて、複数の圧電素子を所定形状に配列させる、繊維強化型熱硬化性ＰＰＥからなる振動子形状形成部材と、
を備えることを特徴とする超音波振動子。 An acoustic matching layer formed by laminating at least a hard first acoustic matching layer and a soft second acoustic matching layer;
A piezoelectric body having a length shorter than that of the acoustic matching layer, fixedly arranged at a predetermined position on the surface of the first acoustic matching layer, and divided into a plurality of piezoelectric elements by a cutting means in the fixedly arranged state;
In a state where the surface of the divided piezoelectric element is disposed on the inner peripheral surface side, the piezoelectric element is fixedly disposed on a first acoustic matching layer surface that constitutes the acoustic matching layer protruding from the piezoelectric element, and a plurality of piezoelectric elements are predetermined. A vibrator shape forming member made of fiber reinforced thermosetting PPE, arranged in a shape;
An ultrasonic transducer comprising:

少なくとも硬質な第１音響整合層及び軟質な第２音響整合層を積層して形成した音響整合層と、
前記音響整合層より長さ寸法が短く、前記第１音響整合層面の所定位置に固定配置され、前記固定配置された状態で切断手段によって複数の圧電素子に分割される圧電体と、
前記分割された前記圧電素子の表面を内周面側に配置した状態で、前記圧電素子から突出する前記音響整合層を構成する第１音響整合層面に固定配置されて、複数の圧電素子を所定形状に配列させる硬質な振動子形状形成部材と、
前記振動子形状形成部材の外側に配置され、導体部と外部とを電気的に絶縁する繊維強化型熱硬化性ＰＰＥからなる絶縁部材と、
を備えることを特徴とする超音波振動子。 An acoustic matching layer formed by laminating at least a hard first acoustic matching layer and a soft second acoustic matching layer;
A piezoelectric body having a length shorter than that of the acoustic matching layer, fixedly arranged at a predetermined position on the surface of the first acoustic matching layer, and divided into a plurality of piezoelectric elements by a cutting means in the fixedly arranged state;
In a state where the surface of the divided piezoelectric element is disposed on the inner peripheral surface side, the piezoelectric element is fixedly disposed on a first acoustic matching layer surface that constitutes the acoustic matching layer protruding from the piezoelectric element, and a plurality of piezoelectric elements are predetermined. A hard vibrator shape forming member arranged in a shape;
An insulating member made of a fiber-reinforced thermosetting PPE that is disposed outside the vibrator shape forming member and electrically insulates the conductor portion from the outside;
An ultrasonic transducer comprising:

前記圧電素子は、前記切断手段によって前記第１音響整合層に固定配置された圧電体の表面から第１音響整合層を通過して前記第２音響整合層に至る所定間隔の分割溝を設けて形成されることを特徴とする請求項３または４に記載の超音波振動子。 The piezoelectric element is provided with a division groove having a predetermined interval from the surface of the piezoelectric body fixedly arranged on the first acoustic matching layer by the cutting means to the first acoustic matching layer and reaching the second acoustic matching layer. The ultrasonic transducer according to claim 3, wherein the ultrasonic transducer is formed.

前記振動子形状形成部材は、円形形状であることを特徴とする請求項１乃至５の何れか１項に記載の超音波振動子。 The ultrasonic transducer according to claim 1, wherein the transducer shape forming member has a circular shape.

前記絶縁部材は、円形形状であることを特徴とする請求項２または４に記載の超音波振動子。 The ultrasonic transducer according to claim 2, wherein the insulating member has a circular shape.

前記振動子形状形成部材は、略部分円筒形形状であることを特徴とする請求項１乃至５の何れか１項に記載の超音波振動子。 The ultrasonic transducer according to claim 1, wherein the transducer shape forming member has a substantially partial cylindrical shape.

前記絶縁部材は、略部分円筒形形状であることを特徴とする請求項２または４に記載の超音波振動子。 The ultrasonic transducer according to claim 2, wherein the insulating member has a substantially partial cylindrical shape.

硬質な層を含む音響整合層と、
前記音響整合層を構成する硬質な層の所定位置に前記音響整合層の一部が突出する位置関係に固定配置され、前記固定配置された状態で切断手段によって複数の圧電素子に分割される両平面部に一面側電極及び他面側電極をそれぞれ設けた圧電体と、
分割形成された前記圧電素子の表面を内周面側に配置した状態で、前記圧電素子から突出する前記音響整合層の前記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる、繊維強化型熱硬化性ＰＰＥからなる振動子形状形成部材と、
を備え、
前記音響整合層の端部側所定位置に、前記圧電体に平行で、前記圧電体の平面部に設けた電極に対向する所定幅の帯状導電材料を設ける一方、前記振動子形状形成部材に前記圧電体から延出配置された導電材料に対向配置される導電部を設けたことを特徴とする超音波振動子。 An acoustic matching layer including a hard layer;
Both of the acoustic matching layers are fixedly arranged at a predetermined position of the hard layer constituting the acoustic matching layer in a positional relationship in which a part of the acoustic matching layer protrudes, and divided into a plurality of piezoelectric elements by the cutting means in the fixed arrangement. A piezoelectric body provided with one surface side electrode and the other surface side electrode in the plane part;
In a state where the surface of the divided piezoelectric element is disposed on the inner peripheral surface side, the piezoelectric element is fixedly disposed on the surface of the acoustic matching layer that protrudes from the piezoelectric element, and a plurality of piezoelectric elements are predetermined. A vibrator shape forming member made of fiber reinforced thermosetting PPE, arranged in a shape;
With
A band-shaped conductive material having a predetermined width is provided at a predetermined position on the end side of the acoustic matching layer and is parallel to the piezoelectric body and opposed to an electrode provided on a plane portion of the piezoelectric body. An ultrasonic transducer comprising a conductive portion arranged to face a conductive material extended from a piezoelectric body.

硬質な層を含む音響整合層と、
前記音響整合層を構成する硬質な層の所定位置に前記音響整合層の一部が突出する位置関係に固定配置され、前記固定配置された状態で切断手段によって複数の圧電素子に分割される両平面部に一面側電極及び他面側電極をそれぞれ設けた圧電体と、
分割形成された前記圧電素子の表面を内周面側に配置した状態で、前記圧電素子から突出する前記音響整合層の前記圧電素子を配置した面に固定配置されて、複数の圧電素子を所定形状に配列させる硬質な振動子形状形成部材と、
前記振動子形状形成部材の外側に配置され、導体部と外部とを電気的に絶縁する繊維強化型熱硬化性ＰＰＥからなる絶縁部材と、
を備え、
前記音響整合層の端部側所定位置に、前記圧電体に平行で、前記圧電体の平面部に設けた電極に対向する所定幅の帯状導電材料を設ける一方、前記振動子形状形成部材に前記圧電体から延出配置された導電材料に対向配置される導電部を設けたことを特徴とする超音波振動子。 An acoustic matching layer including a hard layer;
Both of the acoustic matching layers are fixedly arranged at a predetermined position of the hard layer constituting the acoustic matching layer in a positional relationship in which a part of the acoustic matching layer protrudes, and divided into a plurality of piezoelectric elements by the cutting means in the fixed arrangement. A piezoelectric body provided with one surface side electrode and the other surface side electrode in the plane part;
In a state where the surface of the divided piezoelectric element is disposed on the inner peripheral surface side, the piezoelectric element is fixedly disposed on the surface of the acoustic matching layer that protrudes from the piezoelectric element, and a plurality of piezoelectric elements are predetermined. A hard vibrator shape forming member arranged in a shape;
An insulating member made of a fiber-reinforced thermosetting PPE that is disposed outside the vibrator shape forming member and electrically insulates the conductor portion from the outside;
With
A band-shaped conductive material having a predetermined width is provided at a predetermined position on the end side of the acoustic matching layer and is parallel to the piezoelectric body and opposed to an electrode provided on a plane portion of the piezoelectric body. An ultrasonic transducer comprising a conductive portion arranged to face a conductive material extended from a piezoelectric body.

前記圧電体の平面部に設けた電極と前記音響整合層に設けた帯状の導電材料との電気的導通、或いは前記導電材料と前記振動子形状形成部材の導電部との電気的導通の少なくとも一方を接触によって行うことを特徴とする請求項１０または１１に記載の超音波振動子。 At least one of electrical continuity between the electrode provided on the planar portion of the piezoelectric body and the strip-shaped conductive material provided on the acoustic matching layer, or electrical conduction between the conductive material and the conductive portion of the vibrator shape forming member. The ultrasonic transducer according to claim 10, wherein the ultrasonic transducer is performed by contact.

前記圧電体の平面部に設けた電極と前記音響整合層に設けた帯状の導電材料との電気的導通、或いは前記導電材料と前記振動子形状形成部材の導電部との電気的導通の少なくとも一方を導電部材を介して行うことを特徴とする請求項１０または１１に記載の超音波振動子。 At least one of electrical continuity between the electrode provided on the planar portion of the piezoelectric body and the strip-shaped conductive material provided on the acoustic matching layer, or electrical conduction between the conductive material and the conductive portion of the vibrator shape forming member. The ultrasonic transducer according to claim 10, wherein the ultrasonic transducer is performed through a conductive member.

前記導電部材は、金属ロウ部材、導電性接着剤、導電性塗料或いは導体被膜であることを特徴とする請求項１３に記載の超音波振動子。

The ultrasonic transducer according to claim 13, wherein the conductive member is a metal brazing member, a conductive adhesive, a conductive paint, or a conductive film.