JP4353702B2 - くさび形のガイドを有する移動段を備えた、物体の測定又はマシニングのための装置 - Google Patents
くさび形のガイドを有する移動段を備えた、物体の測定又はマシニングのための装置 Download PDFInfo
- Publication number
- JP4353702B2 JP4353702B2 JP2002588602A JP2002588602A JP4353702B2 JP 4353702 B2 JP4353702 B2 JP 4353702B2 JP 2002588602 A JP2002588602 A JP 2002588602A JP 2002588602 A JP2002588602 A JP 2002588602A JP 4353702 B2 JP4353702 B2 JP 4353702B2
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- Japan
- Prior art keywords
- moving
- movement
- wedge
- guide
- moving member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Machine Tool Units (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Description
*当該装置の支持面に載せられた2つの支持用くさび形移動ガイドであって、これらガイドのそれぞれはくさび面を備え、これらガイドは該ガイドのくさび面が互いに対向するように配置される、くさび形移動ガイドと、
*当該装置の前記移動されるべき部分に接続されており、前記移動ガイドの前記くさび面と協働する2つのくさび面を備えた移動部材であって、前記協働の結果として前記移動ガイドの前記くさび面によって支持される、移動部材と、
を含み、
*当該装置は、前記2つの移動ガイドの移動を、前記移動ガイドの前記くさび面の互いに対する方向が保たれたままで前記くさび面間の距離が変化するような態様で行うための駆動手段を備える、
装置に関する。
Claims (6)
- 物体の測定又はマシニングのための装置であって、当該装置は、当該装置のフレームに対して移動させられるべき当該装置の部分の少なくとも1つの座標方向への移動のための移動段を備え、前記移動段は、
*前記フレームに含まれる当該装置の支持面に載せられた2つの支持用くさび形移動ガイドであって、これらガイドのそれぞれはくさび面を備え、これらガイドは該ガイドのくさび面が互いに対向するように配置される、くさび形移動ガイドと、
*当該装置の前記移動されるべき部分に接続された移動部材であって、前記移動ガイドの等しい大きさの反対方向又は同一方向の移動によって、前記移動部材が前記移動ガイドの移動方向と垂直又は平行に移動するように前記移動ガイドの前記くさび面と協働する2つのくさび面を備え、前記協働の結果として前記移動ガイドの前記くさび面に載せられるとともに、前記移動ガイドの前記くさび面により形成される溝に配置され、前記移動部材には前記装置で測定されるべき物体を運ぶための物体キャリアがとりつけられ、前記装置の移動されるべき部分は、前記移動部材及び前記物体キャリアの組み合わせによって形成される、移動部材と、
を含み、
*当該装置は、前記2つの移動ガイドの移動を、前記移動ガイドの前記くさび面の互いに対する方向が保たれたままで前記くさび面間の距離が変化するような態様で行うための駆動手段を備える、
装置において、
前記駆動手段を制御するための制御手段を備え、前記駆動手段及び前記制御手段は、前記2つの移動ガイドの互いに独立した移動のために構成され、
*前記移動部材は、前記移動ガイドに対して、前記移動部材の前記くさび面間の交線の方向に移動可能であり、
*当該装置は、前記移動部材の移動を駆動するために前記移動部材と接触する駆動部材を備え、
*前記移動部材と前記駆動部材との間の前記接触は、流体ベアリングを介して実現されることを特徴とする装置。 - 請求項1に記載の装置において、前記移動部材の前記くさび面は、流体ベアリングを介して前記移動ガイドの前記くさび面に載せられる、装置。
- 請求項1又は2に記載の装置において、前記移動ガイドは、流体ベアリングを介して前記装置の前記支持面に載せられる、装置。
- 請求項の1乃至3の何れか1項に記載の装置において、前記移動ガイドは、当該装置の前記支持面上で、この支持面上に設けられたリニアガイドに沿って移動可能であり、前記移動ガイドは流体ベアリングを介して前記リニアガイドに載せられる、装置。
- 請求項の1乃至4の何れか1項に記載の装置において、当該装置の前記移動されるべき部分は少なくとも1つのミラー面を備え、少なくとも1つの座標方向の前記移動が、前記ミラー面を有するレーザ距離センサによって測定される、装置。
- 請求項1乃至5の何れか1項に記載の物体の測定又はマシニングのための装置に適した移動段。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01201684 | 2001-05-09 | ||
PCT/IB2002/001578 WO2002091436A1 (en) | 2001-05-09 | 2002-05-06 | Apparatus for the measurement or machining of an object, provided with a displacement stage with wedge-shaped guides |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004529354A JP2004529354A (ja) | 2004-09-24 |
JP4353702B2 true JP4353702B2 (ja) | 2009-10-28 |
Family
ID=8180270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002588602A Expired - Fee Related JP4353702B2 (ja) | 2001-05-09 | 2002-05-06 | くさび形のガイドを有する移動段を備えた、物体の測定又はマシニングのための装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6857195B2 (ja) |
EP (1) | EP1396014B1 (ja) |
JP (1) | JP4353702B2 (ja) |
AT (1) | ATE318449T1 (ja) |
DE (1) | DE60209367T2 (ja) |
WO (1) | WO2002091436A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10349947B3 (de) * | 2003-10-24 | 2005-07-14 | Werth Messtechnik Gmbh | Koordinatenmessgerät |
DE102004020996A1 (de) * | 2004-04-19 | 2005-11-03 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät zum messtechnischen Bestimmen einer Koordinate an einem Messobjekt |
KR100785424B1 (ko) * | 2006-07-25 | 2007-12-13 | 엘지전자 주식회사 | 에어베어링을 이용한 가이드장치 |
EP2053345B1 (de) * | 2007-10-24 | 2010-06-02 | Klingelnberg AG | Messvorrichtung für schwere Werkstücke |
EP2244052B1 (en) | 2009-04-24 | 2016-02-24 | Mitutoyo Corporation | Coordinate-measurement machine with precision stage |
FR2965046B1 (fr) * | 2010-09-16 | 2012-09-14 | Nat De Metrologie Et D Essais Lab | Dispositif et procede de mesure de caracteristiques geometriques |
JP5247934B2 (ja) * | 2010-11-15 | 2013-07-24 | 株式会社アルバック | 触針式測定装置 |
CN102079046A (zh) * | 2010-12-24 | 2011-06-01 | 东莞市尚正机电科技有限公司 | 高承载机床运行高精度液体支承悬浮导轨 |
JP5767473B2 (ja) * | 2010-12-27 | 2015-08-19 | ヒーハイスト精工株式会社 | 位置決め部品 |
KR102528371B1 (ko) | 2022-03-14 | 2023-05-03 | (주)오로스테크놀로지 | 광학 장비의 이동 장치 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US472712A (en) * | 1892-04-12 | Bed for metal-working machines | ||
FR1369998A (fr) * | 1963-04-17 | 1964-08-21 | Alsacienne D Electronique Et D | Dispositif de mesure précise des profils de droites |
US3572680A (en) * | 1968-03-28 | 1971-03-30 | Frederick R Neff | Machine tool table |
JPS5650517Y2 (ja) * | 1977-02-09 | 1981-11-26 | ||
US4589351A (en) * | 1984-10-23 | 1986-05-20 | Love Norman H | Vertical support apparatus |
DE3637410A1 (de) * | 1986-11-03 | 1988-05-11 | Zeiss Carl Fa | Verfahren zur messung von drehtischabweichungen |
JPH01240246A (ja) * | 1988-03-22 | 1989-09-25 | Kazuya Hirose | テーブルの縦横移動機構 |
US5280677A (en) * | 1990-05-17 | 1994-01-25 | Canon Kabushiki Kaisha | Positioning mechanism |
US5731641A (en) * | 1996-02-28 | 1998-03-24 | Aerotech, Inc. | Linear motor driven vertical lift stage |
US6764272B1 (en) * | 1999-05-27 | 2004-07-20 | Micron Technology, Inc. | Adjustable coarse alignment tooling for packaged semiconductor devices |
US6260428B1 (en) * | 1999-09-09 | 2001-07-17 | Donald W. Clement | Z-axis precision positioner |
US6421929B1 (en) * | 2000-12-21 | 2002-07-23 | Command Tooling Systems | Apparatus and method to measure tapered or conical parts |
-
2002
- 2002-05-06 DE DE60209367T patent/DE60209367T2/de not_active Expired - Lifetime
- 2002-05-06 AT AT02769194T patent/ATE318449T1/de not_active IP Right Cessation
- 2002-05-06 WO PCT/IB2002/001578 patent/WO2002091436A1/en active IP Right Grant
- 2002-05-06 JP JP2002588602A patent/JP4353702B2/ja not_active Expired - Fee Related
- 2002-05-06 US US10/476,809 patent/US6857195B2/en not_active Expired - Fee Related
- 2002-05-06 EP EP02769194A patent/EP1396014B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1396014B1 (en) | 2006-02-22 |
JP2004529354A (ja) | 2004-09-24 |
DE60209367D1 (de) | 2006-04-27 |
WO2002091436A1 (en) | 2002-11-14 |
US6857195B2 (en) | 2005-02-22 |
DE60209367T2 (de) | 2006-11-30 |
EP1396014A1 (en) | 2004-03-10 |
ATE318449T1 (de) | 2006-03-15 |
US20040134083A1 (en) | 2004-07-15 |
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