JP4348613B2 - Transport equipment - Google Patents

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JP4348613B2
JP4348613B2 JP2003410245A JP2003410245A JP4348613B2 JP 4348613 B2 JP4348613 B2 JP 4348613B2 JP 2003410245 A JP2003410245 A JP 2003410245A JP 2003410245 A JP2003410245 A JP 2003410245A JP 4348613 B2 JP4348613 B2 JP 4348613B2
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article
article transfer
transfer device
lowering
target
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和史 松川
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Daifuku Co Ltd
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Description

本発明は、物品移載装置を昇降操作自在に備えた物品搬送車が、物品移載箇所の上方側を走行レールに沿って走行自在に設けられ、前記物品搬送車の運転を制御する運転制御手段が、前記物品移載装置を搬送用の上昇位置に位置させた状態で前記物品搬送車を走行させる走行処理、および、物品移載用の目標停止位置に前記物品搬送車を停止させた状態で、前記物品移載装置を前記上昇位置から前記物品移載箇所に対して物品移載を行う目標下降位置に下降させて、前記物品移載箇所に配置された載置台の載置面上に載置支持された物品の上部を把持して掬い取るまたは自己が把持する物品を前記載置台の載置面上に載置して卸す物品移載を行い、その後、前記物品移載装置を前記上昇位置に上昇させる物品移載処理を実行するように構成された搬送設備に関する。 The present invention provides an operation control for controlling the operation of the article transport vehicle, in which an article transport vehicle provided with an article transfer device so as to be movable up and down is provided on the upper side of the article transfer location so as to be able to travel along the travel rail. A state in which the means moves the article transport vehicle in a state where the article transfer device is positioned at the transport lift position, and the article transport vehicle is stopped at the target stop position for article transfer. The article transfer device is lowered from the raised position to a target lowering position for transferring articles to the article transfer location, and placed on the placement surface of the placement table arranged at the article transfer location. It performs placed supported the top of the article gripped by scoop take or self placed to unload article transfer an article to be gripped on the mounting surface of the mounting table, then the said article transfer device It is configured to execute the article transfer process to raise to the raised position. It was related to the transport equipment.

上記のような搬送設備は、例えば、半導体基板などを収納した搬送容器を物品として、運転制御手段が、物品移載処理を行うことにより、物品移載箇所から物品を掬い取ると、物品移載装置にて物品を保持した状態で走行処理を行ったのち、再度、物品移載処理を行うことにより、物品移載箇所に物品を卸すようにして、半導体基板などを製造するための処理が配置された物品移載箇所に順次物品を搬送させるものである。   For example, when the operation control means picks up the article from the article transfer position by performing the article transfer process using the transfer container containing the semiconductor substrate or the like as the article, the transfer equipment as described above transfers the article. After carrying out the running process while holding the article in the apparatus, the article transfer process is performed again, so that the article is shipped to the article transfer location, and a process for manufacturing a semiconductor substrate or the like is arranged. The articles are sequentially conveyed to the article transfer locations.

このような搬送設備において、物品移載箇所から物品を掬い取るまたは物品移載箇所へ物品を卸す物品移載を的確に行うために、上昇位置に位置する物品移載装置を目標下降位置に下降させるための下降作動情報を、上昇位置と物品移載箇所との相対距離を基準に求めて、その下降作動情報に基づいて物品移載装置を下降させる必要があった。   In such a transport facility, the article transfer device located at the ascending position is lowered to the target lowering position in order to accurately carry out the article transfer by picking up the article from the article transfer place or wholesale the article to the article transfer place. It has been necessary to obtain the lowering operation information for causing the article transfer device to descend based on the relative distance between the raised position and the article transfer location and based on the lowering operation information.

そこで、従来では、運転制御手段が、設備の設置初期などに、上昇位置に位置する物品移載装置を目標下降位置に下降させるための初期目標下降量を求めることにより、上昇位置と物品移載箇所との相対距離に対応して、初期目標下降量を下降作動量として求めて記憶し、その記憶されている初期目標下降量を下降させることにより、物品移載装置を目標下降位置に下降させるようにしているものがある。
そして、このような搬送設備では、設備の設置初期などの上昇位置と物品移載箇所との相対距離に対応することはできるものの、積雪などにより天井の高さが変化して、上昇位置と物品移載箇所との相対距離が変化すると、物品移載を的確に行うことができず、移載不良を発生することになる。
したがって、上記従来の搬送設備では、物品移載装置を記憶されている初期目標下降量に基づいて下降させた状態において、物品移載装置と物品移載箇所との距離を距離検出手段にて検出して、物品移載装置が目標下降位置からずれている位置ずれ状態であるか否かを判別することにより、移載不良の発生を未然に防止するようにしている（例えば、特許文献１参照。）。 Therefore, conventionally, the operation control means obtains the initial target lowering amount for lowering the article transfer device located at the raised position to the target lowered position at the initial stage of installation of the equipment, etc. Corresponding to the relative distance to the location, the initial target lowering amount is obtained and stored as the lowering operation amount, and the stored initial target lowering amount is lowered to lower the article transfer device to the target lowering position. There is something like that.
In such a transport facility, although it is possible to correspond to the relative distance between the rising position at the initial installation of the facility and the article transfer location, the height of the ceiling changes due to snow accumulation, etc. If the relative distance to the transfer location changes, the article transfer cannot be performed accurately, and a transfer failure occurs.
Therefore, in the above-described conventional transport facility, the distance detection unit detects the distance between the article transfer device and the article transfer location in a state where the article transfer device is lowered based on the stored initial target lowering amount. Then, by determining whether or not the article transfer device is in a misalignment state deviating from the target lowering position, the occurrence of transfer defects is prevented in advance (see, for example, Patent Document 1). .)

特開２０００−１５０６２２号公報JP 2000-150622 A

しかしながら、上記従来の搬送設備では、設備の設置初期から上昇位置と物品移載箇所との相対距離が変化している場合に、運転制御手段が、単に、位置ずれ状態であるか否かを判別しているだけであるので、位置ずれ状態であると判別されるたびに、物品移載処理を一旦停止させて、そのときの上昇位置と物品移載箇所との相対距離に対応するように初期目標下降量を調整する必要が生じることになる。
したがって、上昇位置と物品移載箇所との相対距離が変化していると、物品移載を的確に行うために、物品移載を途中で中断しなければならず、搬送効率の低下を招くものとなっていた。 However, in the above-described conventional transfer equipment, when the relative distance between the raised position and the article transfer location has changed since the initial installation of the equipment, the operation control means simply determines whether or not the position is shifted. Therefore, every time it is determined that the position is in a misalignment state, the article transfer process is temporarily stopped, and the initial value is set so as to correspond to the relative distance between the raised position and the article transfer position at that time. It becomes necessary to adjust the target lowering amount.
Therefore, if the relative distance between the raised position and the article transfer location has changed, the article transfer must be interrupted in order to perform the article transfer accurately, leading to a decrease in transport efficiency. It was.

本発明は、かかる点に着目してなされたものであり、その目的は、搬送効率の向上を図りながら、物品移載箇所から物品を掬い取るまたは物品移載箇所へ物品を卸す物品移載を的確に行うことができる搬送設備を提供する点にある。   The present invention has been made paying attention to such a point, and the object thereof is to transfer an article that picks up an article from an article transfer location or wholesales an article to an article transfer location while improving the conveyance efficiency. It is in the point which provides the conveyance equipment which can be performed exactly.

この目的を達成するために、本発明にかかる搬送設備の第１特徴構成は、物品移載装置を昇降操作自在に備えた物品搬送車が、物品移載箇所の上方側を走行レールに沿って走行自在に設けられ、
前記物品搬送車の運転を制御する運転制御手段が、
前記物品移載装置を搬送用の上昇位置に位置させた状態で前記物品搬送車を走行させる走行処理、および、物品移載用の目標停止位置に前記物品搬送車を停止させた状態で、前記物品移載装置を前記上昇位置から前記物品移載箇所に対して物品移載を行う目標下降位置に下降させて、前記物品移載箇所に配置された載置台の載置面上に載置支持された物品の上部を把持して掬い取るまたは自己が把持する物品を前記載置台の載置面上に載置して卸す物品移載を行い、その後、前記物品移載装置を前記上昇位置に上昇させる物品移載処理を実行するように構成された搬送設備において、
前記運転制御手段が、前記上昇位置に位置する前記物品移載装置を前記目標下降位置に下降させるための初期目標下降量を記憶し、前記物品移載装置と前記載置台の載置面との距離を検出するレーザ距離センサを備えて、前記物品移載処理において、前記物品搬送車の停止状態で前記上昇位置に位置する前記物品移載装置と前記載置台の載置面との距離を前記レーザ距離センサからの光を前記載置面における物品載置位置の外側で反射させて検出し、その検出情報に基づいて前記初期目標下降量を補正することにより、前記上昇位置に位置する前記物品移載装置を前記目標下降位置に下降させるための目標下降量を、前記目標下降位置に前記物品移載装置を下降させるための下降作動情報として求め、前記物品移載装置の前記物品搬送車に対する昇降位置を検出する昇降位置検出手段の検出情報に基づいて、前記目標下降量を下降させることにより、前記物品移載装置を前記目標下降位置に下降させるように構成されている点にある。 In order to achieve this object, the first characteristic configuration of the transport facility according to the present invention is that an article transport vehicle equipped with an article transfer device that can be moved up and down is located above the article transfer location along the traveling rail. It is provided to run freely,
Operation control means for controlling the operation of the article transporting vehicle,
In a state where the article transfer vehicle is driven in a state in which the article transfer device is positioned at the lift position for transfer, and the article transfer vehicle is stopped at the target stop position for article transfer, The article transfer device is lowered from the raised position to a target lowering position for transferring articles to the article transfer location, and is placed on the placement surface of a placement table disposed at the article transfer location. been scooped by gripping the upper part of the article or self performs placed to unload article transfer an article to be gripped on the mounting surface of the mounting table, then, the article transfer device to the raised position In a transport facility configured to perform an article transfer process to be raised,
The operation control means stores an initial target lowering amount for lowering the article transfer device positioned at the raised position to the target lowering position, and the article transfer device and the mounting surface of the mounting table A laser distance sensor for detecting a distance, and in the article transfer process, the distance between the article transfer device located at the raised position in a stopped state of the article transport vehicle and the mounting surface of the mounting table is The article located at the raised position by detecting the light from the laser distance sensor reflected off the article placement position on the placement surface and correcting the initial target drop amount based on the detection information. A target lowering amount for lowering the transfer device to the target lowering position is obtained as lowering operation information for lowering the article transfer device to the target lowering position, and is supplied to the article transport vehicle of the article transfer device. versus That the vertical position on the basis of the detection information of the vertical position detecting means for detecting, by lowering the target lowering amount is the article transfer device in that it is configured so as to lower the target lowered position.

すなわち、運転制御手段が、設備の設置初期などに、初期目標下降量を記憶し、物品移載を行う際に、レーザ距離センサの検出情報に基づいて初期目標下降量を補正して目標下降量を求めることにより、設置初期から上昇位置と物品移載箇所に配置された載置台の載置面との相対距離が変化している場合でも、初期目標下降量を補正するという簡易な処理により、その変化した上昇位置と物品移載箇所に配置された載置台の載置面との相対距離に対応する状態で目標下降量を求めることができることになる。
そして、運転制御手段は、物品移載装置の下降中における昇降位置検出手段の検出情報に基づいて、求めた目標下降量を下降させることにより、物品移載装置を目標下降位置に下降させることができることになる。
したがって、設置初期から上昇位置と物品移載箇所に配置された載置台の載置面との相対位置が変化している場合でも、初期目標下降量を補正するという簡易な処理により、構成の簡素化を図りながら、物品移載を中断することなく的確に行うことができることになる。 That is, the operation control means stores the initial target lowering amount at the initial stage of installation of the equipment and corrects the initial target lowering amount based on the detection information of the laser distance sensor when transferring the article. Even if the relative distance between the rising position and the placement surface of the placement table placed at the article transfer location has changed from the initial installation , by a simple process of correcting the initial target lowering amount, The target lowering amount can be obtained in a state corresponding to the relative distance between the changed rising position and the mounting surface of the mounting table disposed at the article transfer location.
The operation control means can lower the article transfer device to the target lowering position by lowering the calculated target lowering amount based on the detection information of the lifting position detection means while the article transfer device is being lowered. It will be possible.
Therefore, even when the relative position between the rising position and the mounting surface of the mounting table arranged at the article transfer position has changed from the initial stage of installation , the simple configuration of correcting the initial target lowering amount can simplify the configuration. Thus, the article transfer can be performed accurately without interruption.

本発明にかかる搬送設備を図面に基づいて説明する。
この搬送設備は、例えば、半導体基板などを収納した搬送容器を物品Ｂとして、その物品Ｂを、半導体基板などを製造するための処理を行う処理装置が配置された物品移載箇所の夫々に搬送するものであり、図１および図２に示すように、物品移載装置１を昇降操作自在に備えた物品搬送車２が、物品移載箇所３の上方側を走行レール４に沿って走行自在に設けられ、この物品搬送車２の運転を制御する運転制御手段としての運転制御部Ｈも設けられている。 A transport facility according to the present invention will be described with reference to the drawings .
This transport equipment, for example, a transport container accommodating the like semiconductor substrate as an article B, and the article B, and each of the article transfer location in which processing device is arranged to perform processing for manufacturing a semiconductor substrate As shown in FIGS. 1 and 2, the article transport vehicle 2 equipped with the article transfer device 1 so as to be movable up and down travels along the travel rail 4 above the article transfer location 3. An operation control unit H is provided as an operation control means that is freely provided and controls the operation of the article transport vehicle 2.

前記物品移載箇所３の夫々には、物品Ｂを載置可能な載置台６が配置され、その載置台６に載置されている物品Ｂを処理装置に供給したり、処理装置での処理が終了した物品Ｂを載置台６に載置させるように構成されている。
そして、物品搬送車２が、載置台６に対応する物品移載用の目標停止位置に停止した状態で、べルトなどの昇降部材５を巻き取りまたは巻き出すことにより、載置台６の載置面上に載置支持された物品Ｂの上部を把持して掬い取る、または、自己が把持している物品Ｂを載置台６の載置面上に載置して卸す物品移載を行うように構成されている。 In each of the article transfer locations 3, a placing table 6 on which the article B can be placed is disposed, and the article B placed on the placing table 6 is supplied to the processing device or processed by the processing device. The article B that has been finished is configured to be placed on the placing table 6.
Then, in the state where the article transporting vehicle 2 is stopped at the article transfer target stop position corresponding to the placing table 6, the lifting / lowering member 5 such as a belt is wound or unwound to place the placing table 6 . scoop grips the top of the mount supported article B on the surface, or, to perform an article transfer to unload itself is placed on the mounting surface of the table 6 placing an article B that is holding It is configured.

前記物品移載装置１は、図示はしないが、物品Ｂを把持する把持状態とその把持を解除する解除状態とに切換自在に構成され、物品Ｂを把持していない状態で目標下降位置まで下降したときに把持状態に切り換えることにより、物品Ｂを載置台６の載置面上から掬い取り、物品Ｂを把持している状態で目標下降位置まで下降したときに解除状態に切り換えることにより、物品Ｂを載置台６の載置面上に卸すように構成されている。 Although not shown, the article transfer device 1 is configured to be switchable between a gripping state in which the article B is gripped and a release state in which the gripping is released. By switching to the gripping state, the article B is scooped up from the mounting surface of the mounting table 6 , and the article B is switched to the release state when it is lowered to the target lowering position while gripping the article B. B is configured to be wholesaled on the mounting surface of the mounting table 6.

そして、物品搬送車２には、昇降部材５の巻き出し量を検出することにより、物品移載装置１の物品搬送車２に対する昇降位置を検出する昇降位置検出手段としての昇降位置センサ７、物品移載装置１と載置台６との距離を検出する距離検出手段としての距離センサ８が設けられている。   The article transport vehicle 2 detects the unwinding amount of the lift member 5 to detect the lift position sensor 7 as a lift position detecting means for detecting the lift position of the article transfer device 1 with respect to the article transport vehicle 2, and the article. A distance sensor 8 is provided as distance detection means for detecting the distance between the transfer device 1 and the mounting table 6.

前記昇降位置センサ７は、昇降部材５を巻き取りまたは巻き出すために備えられている駆動モータの駆動量などを検出することにより、昇降部材５の巻き出し量を検出するように構成されている。
前記距離センサ８は、例えば、レーザ距離センサにて構成され、載置台６に向けて光を発射して載置台６の載置面における物品Ｂの載置位置の外側にて反射された反射光を受信し、光が往復する時間を計測することにより、距離センサ８の下端位置と載置台６の載置面との距離を検出するように構成されている。 The elevating position sensor 7 is configured to detect the unwinding amount of the elevating member 5 by detecting the driving amount of a drive motor provided for winding or unwinding the elevating member 5. .
The distance sensor 8 is constituted by, for example, a laser distance sensor, emits light toward the mounting table 6 , and is reflected light outside the mounting position of the article B on the mounting surface of the mounting table 6. It receives, by measuring the time that light reciprocates, and is configured to detect the distance between the mounting surface of the lower end position the table 6 of the distance sensor 8.

前記運転制御部Ｈは、図２に示すように、物品移載装置１を搬送用の上昇位置Ｔ１に位置させた状態で物品搬送車２を走行させる走行処理、および、物品移載用の目標停止位置に物品搬送車２を停止させた状態で、物品移載装置１を上昇位置Ｔ１から載置台６に対して物品移載を行う目標下降位置Ｔ２に下降させて、載置台６の載置面上に位置する物品Ｂを掬い取るまたは自己が保持する物品Ｂを載置台６の載置面上に卸す物品移載を行い、その後、物品移載装置１を上昇位置Ｔ１に上昇させる物品移載処理を実行するように構成されている。 As shown in FIG. 2, the operation control unit H includes a traveling process for traveling the article transporting vehicle 2 in a state where the article transfer device 1 is positioned at the lifting position T <b> 1 for transport, and a target for article transfer. In a state where the article transport vehicle 2 is stopped at the stop position, the article transfer device 1 is lowered from the raised position T1 to the target lowering position T2 where the article is transferred to the placement table 6, and the placement table 6 is placed. The article transfer that picks up the article B located on the surface or wholesales the article B held by itself on the placing surface of the placing table 6 and then raises the article transferring apparatus 1 to the raised position T1. It is comprised so that a mounting process may be performed.

前記走行処理について説明を加えると、運転制御部Ｈは、設備の設置初期などに、物品移載装置１の昇降により載置台６に対して物品移載を行うための目標停止位置についての情報が記憶されており、その記憶されている目標停止位置についての情報に基づいて、物品移載対象の載置台６に対応する目標停止位置に物品搬送車２を停止させるように、物品搬送車２の運転を制御するように構成されている。   When the travel process is described, the operation control unit H has information on a target stop position for transferring an article to the mounting table 6 by raising and lowering the article transferring apparatus 1 in the initial stage of installation of the equipment. Based on the stored information about the target stop position, the article transport vehicle 2 is stopped so as to stop the article transport vehicle 2 at the target stop position corresponding to the placement table 6 to be transferred. It is configured to control operation.

前記物品移載処理について説明を加えると、運転制御部Ｈは、上昇位置Ｔ１から目標下降位置Ｔ２に物品移載装置１を下降させるための下降作動情報を求めて、その下降作動情報に基づいて昇降部材５を巻き出すことにより、物品移載装置１を目標下降位置Ｔ２に下降させるように構成されている。
そして、運転制御部Ｈは、物品移載装置１を目標下降位置に下降させた状態において、物品移載装置１を把持状態に切り換えることにより載置台６から物品Ｂを掬い取りまたは物品移載装置１を解除状態に切り換えることにより載置台６に物品Ｂを卸す物品移載を行い、その後、昇降部材５を巻き取ることにより、物品移載装置１を上昇位置Ｔ１に上昇させるように構成されている。 To explain the article transfer process, the operation control unit H obtains lowering operation information for lowering the article transfer device 1 from the ascending position T1 to the target lowering position T2, and based on the lowering operation information. By unwinding the elevating member 5, the article transfer device 1 is configured to be lowered to the target lowering position T2.
Then, the operation control unit H picks up the article B from the mounting table 6 or switches the article transfer device by switching the article transfer device 1 to the gripping state in the state where the article transfer device 1 is lowered to the target lowered position. 1 is switched to the release state, the article transfer is performed to unload the article B on the mounting table 6, and then the article transfer device 1 is raised to the raised position T1 by winding up the lifting member 5. Yes.

以下、運転制御部Ｈによる物品移載処理において物品移載装置１を目標下降位置に下降させる際の動作について説明する。
前記運転制御部Ｈは、上昇位置Ｔ１に位置する物品移載装置１を目標下降位置Ｔ２に下降させるための初期目標下降量を記憶し、上昇位置Ｔ１に位置する物品移載装置１と載置台６の載置面との距離を距離センサ８にて検出して、その検出情報に基づいて初期目標下降量を補正することにより、上昇位置Ｔ１に位置する物品移載装置１を目標下降位置Ｔ２に下降させるための目標下降量を、下降作動情報として求めるように構成されている。
そして、運転制御部Ｈは、昇降位置センサ７の検出情報に基づいて、目標下降量を下降させることにより、物品移載装置１を目標下降位置Ｔ２に下降させるように構成されている。 Hereinafter, an operation when the article transfer device 1 is lowered to the target lowered position in the article transfer process by the operation control unit H will be described.
The operation control unit H stores an initial target lowering amount for lowering the article transfer device 1 located at the raising position T1 to the target lowering position T2, and the article transfer device 1 and the placement table located at the raising position T1. 6 is detected by the distance sensor 8, and the initial target lowering amount is corrected based on the detected information, whereby the article transfer device 1 located at the rising position T1 is moved to the target lowering position T2. The target lowering amount for lowering is determined as lowering operation information.
Then, the operation control unit H is configured to lower the article transfer device 1 to the target lowering position T2 by lowering the target lowering amount based on the detection information of the lifting position sensor 7.

前記初期目標下降量を記憶する構成について説明を加えると、図３の（イ）に示すように、設備の設置初期などに、上昇位置Ｔ１に位置する物品移載装置１を手動操作などにより目標下降位置Ｔ２まで下降させることにより、そのときの物品移載装置１の下降移動量を、初期目標下降量Ｑ１として求めて記憶するように構成されている。   The configuration for storing the initial target lowering amount will be described below. As shown in FIG. 3 (a), the article transfer device 1 located at the rising position T1 is set to the target by manual operation or the like at the initial stage of installation of equipment. By lowering to the lowering position T2, the downward movement amount of the article transfer device 1 at that time is obtained and stored as the initial target lowering amount Q1.

前記目標下降量を求める構成について説明を加えると、図３の（ロ）に示すように、物品移載装置１が上昇位置Ｔ１に位置する状態で、距離センサ８にて距離センサ８の下端位置と載置台６の載置面との距離Ｒ２を検出する。
そして、初期目標下降量Ｑ１に基づく初期距離Ｒ１と距離センサ８の検出距離Ｒ２とを比較することにより、上昇位置Ｔ１と載置台６の載置面との相対距離の変化に対応した補正量Δｒを求めて、その補正量Δｒと初期目標下降量Ｑ１とから、目標下降量Ｑ２を求めるように構成されている。 The configuration for obtaining the target lowering amount will be described. As shown in FIG. 3B, the lower end position of the distance sensor 8 is detected by the distance sensor 8 in a state where the article transfer device 1 is positioned at the rising position T1. detecting the distance R2 between the mounting surface of the preparative mounting table 6.
Then, by comparing the initial distance R1 based on the initial target descent amount Q1 and the detection distance R2 of the distance sensor 8, a correction amount Δr corresponding to a change in the relative distance between the ascending position T1 and the mounting surface of the mounting table 6. , And the target lowering amount Q2 is obtained from the correction amount Δr and the initial target lowering amount Q1.

具体的に説明を加えると、まず、初期目標下降量Ｑ１に、距離センサ８の下端位置と物品移載装置１の上端位置との距離Ｋ１と、物品移載装置１を目標下降位置Ｔ２に下降させた状態において、載置台６の載置面と物品移載装置１の上端位置との距離Ｋ２とを加えて、初期距離Ｒ１（＝Ｑ１＋Ｋ１＋Ｋ２）を求めておく。
そして、その初期距離Ｒ１と距離センサ８による検出距離Ｒ２とから下記〔数１〕に基づいて、補正量Δｒを求めたのち、その補正量Δｒと初期目標下降量Ｑ１とから下記〔数２〕に基づいて、目標下降量Ｑ２を求めるように構成されている。 Specifically, first, the initial target lowering amount Q1, the distance K1 between the lower end position of the distance sensor 8 and the upper end position of the article transfer device 1, and the article transfer device 1 are lowered to the target lowering position T2. in a state of being, in addition to the distance K2 between the upper end position of the mounting surface of the mounting table 6 and the article transfer device 1, it is obtained in advance an initial distance R1 (= Q1 + K1 + K2 ).
Then, after obtaining the correction amount Δr from the initial distance R1 and the detection distance R2 by the distance sensor 8 based on the following [Equation 1], the following [Equation 2] is obtained from the correction amount Δr and the initial target lowering amount Q1. Based on the above, the target descending amount Q2 is obtained.

ちなみに、図３の（ロ）は、図３の（イ）に示すものよりも、積雪などにより天井の高さが低くなり、図３の（イ）から、上昇位置Ｔ１と載置台６の載置面との相対距離が短く変化したものを示している。
また、図３の（イ）および（ロ）において、距離センサ８の下端位置と物品移載装置１の上端位置との距離Ｋ１と、物品移載装置１を目標下降位置Ｔ２に下降させた状態において、載置台６の載置面と物品移載装置１の上端位置との距離Ｋ２とは、一定値である。 Incidentally, in FIG. 3 (b), rather than that shown in (b) of FIG. 3, such as the low height of the ceiling snow, from FIG. 3 (a), the placing of the table 6 placing a raised position T1 This shows a short change in the relative distance to the mounting surface .
3A and 3B, the distance K1 between the lower end position of the distance sensor 8 and the upper end position of the article transfer device 1 and the state where the article transfer device 1 is lowered to the target lowering position T2. in, the distance K2 between the upper end position of the mounting surface of the mounting table 6 and the article transfer device 1, is a constant value.

〔数１〕
Δｒ＝Ｒ１−Ｒ２ [Equation 1]
Δr = R1-R2

〔数２〕
Ｑ２＝Ｑ１＋Δｒ [Equation 2]
Q2 = Q1 + Δr

このようにして、初期距離Ｒ１と距離センサ８による検出距離Ｒ２とを比較して、上昇位置Ｔ１と載置台６の載置面との相対距離の変化に対応した補正量Δｒを求めて、その補正量Δｒにて初期目標下降量Ｑ１を補正した目標下降量Ｑ２を求めることにより、上昇位置Ｔ１と載置台６の載置面との相対距離が、初期目標下降量を記憶したときから変化していても、その変化した上昇位置Ｔ１と載置台６の載置面との相対距離に対応した状態で、目標下降量Ｑ２を求めるように構成されている。 In this way, the initial distance R1 is compared with the detection distance R2 by the distance sensor 8, and the correction amount Δr corresponding to the change in the relative distance between the raised position T1 and the mounting surface of the mounting table 6 is obtained. By obtaining the target lowering amount Q2 obtained by correcting the initial target lowering amount Q1 with the correction amount Δr, the relative distance between the rising position T1 and the mounting surface of the mounting table 6 changes from when the initial target lowering amount is stored. However, the target lowering amount Q2 is obtained in a state corresponding to the relative distance between the changed rising position T1 and the mounting surface of the mounting table 6.

〔別実施形態〕
（１）上記実施形態では、距離センサ８を、物品搬送車２において昇降駆動しない台車部分に配設するようにしているが、例えば、昇降駆動可能な物品移載装置１に設けて実施することも可能であり、距離センサ８の配設位置については適宜変更が可能である。 [Another embodiment]
In (1) above you facilities embodiment, the distance sensor 8, so that disposed on carriage portion not lift drive in the article transport vehicle 2, for example, provided in the article transfer device 1 capable Noboru descending drive It is also possible to implement, and the arrangement position of the distance sensor 8 can be appropriately changed.

（２）上記実施形態では、昇降位置検出手段として、昇降部材５の巻き出し量を検出することにより、物品移載装置１の物品搬送車２に対する昇降位置を検出するように構成されているが、例えば、距離センサなどを用いて、物品移載装置１の物品搬送車２に対する昇降位置を検出することも可能であり、昇降位置検出手段の構成については適宜変更が可能である。 In (2) above you facilities embodiment, as the vertical position detecting means, by detecting the unwinding amount of the elevating member 5, is configured to detect a vertical position relative to the article transport vehicle 2 of the article transfer device 1 However, for example, the elevation position of the article transfer device 1 with respect to the article transporting vehicle 2 can be detected using a distance sensor or the like, and the configuration of the raising / lowering position detection means can be changed as appropriate.

（３）上記実施形態では、物品Ｂとして、半導体基板などを収納した搬送容器を例示したが、その他各種の物品を適応することが可能である。 (3) In the above you facilities embodiment, as the article B, and exemplified the transport container containing and a semiconductor substrate, it is possible to adapt the various other articles.

搬送設備の一部斜視図Partial perspective view of transfer equipment 搬送設備の一部側面図Partial side view of transfer equipment 物品移載処理での物品移載装置の動作を示す側面図 Side view showing the operation of the article transfer device in the article transfer process

符号の説明Explanation of symbols

１ 物品移載装置
２ 物品搬送車
３ 物品移載箇所
４ 走行レール
６ 載置台
７ 昇降位置検出手段
８ レーザ距離センサ
Ｈ 運転制御手段 DESCRIPTION OF SYMBOLS 1 Goods transfer apparatus 2 Goods conveyance vehicle 3 Goods transfer location 4 Traveling rail
6 Mounting table 7 Lifting position detection means 8 Laser distance sensor H Operation control means

Claims (1)

物品移載装置を昇降操作自在に備えた物品搬送車が、物品移載箇所の上方側を走行レールに沿って走行自在に設けられ、
前記物品搬送車の運転を制御する運転制御手段が、
前記物品移載装置を搬送用の上昇位置に位置させた状態で前記物品搬送車を走行させる走行処理、および、
物品移載用の目標停止位置に前記物品搬送車を停止させた状態で、前記物品移載装置を前記上昇位置から前記物品移載箇所に対して物品移載を行う目標下降位置に下降させて、前記物品移載箇所に配置された載置台の載置面上に載置支持された物品の上部を把持して掬い取るまたは自己が把持する物品を前記載置台の載置面上に載置して卸す物品移載を行い、その後、前記物品移載装置を前記上昇位置に上昇させる物品移載処理を実行するように構成された搬送設備であって、
前記運転制御手段が、前記上昇位置に位置する前記物品移載装置を前記目標下降位置に下降させるための初期目標下降量を記憶し、前記物品移載装置と前記載置台の載置面との距離を検出するレーザ距離センサを備えて、前記物品移載処理において、前記物品搬送車の停止状態で前記上昇位置に位置する前記物品移載装置と前記載置台の載置面との距離を前記レーザ距離センサからの光を前記載置面における物品載置位置の外側で反射させて検出し、その検出情報に基づいて前記初期目標下降量を補正することにより、前記上昇位置に位置する前記物品移載装置を前記目標下降位置に下降させるための目標下降量を、前記目標下降位置に前記物品移載装置を下降させるための下降作動情報として求め、前記物品移載装置の前記物品搬送車に対する昇降位置を検出する昇降位置検出手段の検出情報に基づいて、前記目標下降量を下降させることにより、前記物品移載装置を前記目標下降位置に下降させるように構成されている搬送設備。 An article transport vehicle equipped with an article transfer device so as to be movable up and down is provided so as to be able to run along the running rail on the upper side of the article transfer location,
Operation control means for controlling the operation of the article transporting vehicle,
A running process for running the article transporting vehicle in a state where the article transfer device is positioned at the transporting elevated position; and
With the article transport vehicle stopped at the target stop position for article transfer, the article transfer device is lowered from the raised position to a target lowered position for transferring articles to the article transfer location. , placing an article the article on the mounting surface of the deployed table to transfer location a top of the mounting support article gripped by scoop take or self grips on the mounting surface of the mounting table And then transferring the article to be wholesaled, and then carrying the article transfer process for raising the article transfer device to the raised position,
The operation control means stores an initial target lowering amount for lowering the article transfer device positioned at the raised position to the target lowering position, and the article transfer device and the mounting surface of the mounting table A laser distance sensor for detecting a distance, and in the article transfer process, the distance between the article transfer device located at the raised position in a stopped state of the article transport vehicle and the mounting surface of the mounting table is The article located at the raised position by detecting the light from the laser distance sensor reflected off the article placement position on the placement surface and correcting the initial target drop amount based on the detection information. A target lowering amount for lowering the transfer device to the target lowering position is obtained as lowering operation information for lowering the article transfer device to the target lowering position, and is supplied to the article transport vehicle of the article transfer device. versus That the vertical position on the basis of the detection information of the vertical position detecting means for detecting, by lowering the target lowering amount, the transport facility of the article transfer device is configured to be lowered to the target lowering position.
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