JP4343789B2 - プローブ針 - Google Patents
プローブ針 Download PDFInfo
- Publication number
- JP4343789B2 JP4343789B2 JP2004213355A JP2004213355A JP4343789B2 JP 4343789 B2 JP4343789 B2 JP 4343789B2 JP 2004213355 A JP2004213355 A JP 2004213355A JP 2004213355 A JP2004213355 A JP 2004213355A JP 4343789 B2 JP4343789 B2 JP 4343789B2
- Authority
- JP
- Japan
- Prior art keywords
- probe needle
- grounding
- signal
- frequency
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000000523 sample Substances 0.000 title claims description 186
- 238000007689 inspection Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 230000036316 preload Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
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- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
上記実施形態では、接地用の2つの電極パッド19と、信号用の1つの電極パッド19とを配列したパターンを例に説明したが、本発明はこれに限るものではない。各電極パッド19の配列パターンは種々あるため、それらに対応して配設された接地用プローブ針部21及び信号用プローブ針部22にも本願発明を適用することができる。既存の接地用プローブ針部21を用いて疑似プローブ針部を成形してもよく、新たに疑似プローブ針部を成形してもよい。
Claims (3)
- 検査対象物に接触して電気的特性を検査するプローブ針であって、
上記検査対象物の信号用電極パッドに接触する信号用プローブ針部と、
当該信号用プローブ針部と並列に配設され上記検査対象物の接地用電極パッドに接触する接地用プローブ針部と、
当該接地用プローブ針部と共に上記信号用プローブ針部と並列に配設されて上記電極パッド面の近傍まで延出した疑似プローブ針部とを備え、
当該疑似プローブ針部と上記接地用プローブ針部とが、その先端部でボンディングワイヤーにより互いに接続されたことを特徴とするプローブ針。 - 請求項1に記載のプローブ針において、
上記接地用プローブ針部と上記疑似プローブ針部とが、上記信号用プローブ針部を挟んで両側の、互いに対向する位置に配設されたことを特徴とするプローブ針。 - 請求項1に記載のプローブ針において、
上記疑似プローブ針部及び上記接地用プローブ針部が、上記信号用プローブ針部を中心にした対称形状で、かつ同じ寸法に設定されたことを特徴とするプローブ針。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004213355A JP4343789B2 (ja) | 2004-07-21 | 2004-07-21 | プローブ針 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004213355A JP4343789B2 (ja) | 2004-07-21 | 2004-07-21 | プローブ針 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006030138A JP2006030138A (ja) | 2006-02-02 |
JP4343789B2 true JP4343789B2 (ja) | 2009-10-14 |
Family
ID=35896661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004213355A Expired - Lifetime JP4343789B2 (ja) | 2004-07-21 | 2004-07-21 | プローブ針 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4343789B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101926823B1 (ko) * | 2016-11-24 | 2018-12-07 | 주식회사 리텍 | 동축 케이블의 바늘 접합 방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2020175346A1 (ja) * | 2019-02-27 | 2021-12-02 | 株式会社村田製作所 | プローブ部材およびコネクタの検査構造 |
-
2004
- 2004-07-21 JP JP2004213355A patent/JP4343789B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101926823B1 (ko) * | 2016-11-24 | 2018-12-07 | 주식회사 리텍 | 동축 케이블의 바늘 접합 방법 |
Also Published As
Publication number | Publication date |
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JP2006030138A (ja) | 2006-02-02 |
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