JP4336593B2 - サーマルヘッド - Google Patents
サーマルヘッド Download PDFInfo
- Publication number
- JP4336593B2 JP4336593B2 JP2004032874A JP2004032874A JP4336593B2 JP 4336593 B2 JP4336593 B2 JP 4336593B2 JP 2004032874 A JP2004032874 A JP 2004032874A JP 2004032874 A JP2004032874 A JP 2004032874A JP 4336593 B2 JP4336593 B2 JP 4336593B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- thermal head
- heat storage
- common electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/33505—Constructional details
- B41J2/3351—Electrode layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/33505—Constructional details
- B41J2/33515—Heater layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/33545—Structure of thermal heads characterised by dimensions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/3355—Structure of thermal heads characterised by materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/3359—Manufacturing processes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electronic Switches (AREA)
Description
1a Si基板表面
1b 側端面(厚さ方向の周囲端面)
1c 背面
2 第1の絶縁層
3 蓄熱層
3a テーパーエッジ部
3b 均一膜厚部
4 第2の絶縁層
5 抵抗層
5a 発熱抵抗体
6 絶縁バリア層
7 電極層
7a コモン電極
7b 個別電極
7c 開放部
8 配線用Al電極
9 耐磨耗保護層
10 露出領域
11 コンタクト部
12 絶縁膜(Si陽極酸化膜)
13 絶縁膜
R レジスト層
α ギャップ領域
Claims (7)
- 基板表面上に積層形成された蓄熱層と、該蓄熱層上に形成された複数の発熱抵抗体と、各発熱抵抗体の抵抗長方向の一端部にそれぞれ導通接続する複数の個別電極と、全発熱抵抗体の抵抗長方向の他端部に導通接続するコモン電極とを有するサーマルヘッドにおいて、
前記基板は、比抵抗が20mΩ・cm以下のSi基板であること、
このSi基板上には前記蓄熱層の存在しない露出領域が備えられ、この露出領域上に、前記コモン電極と該Si基板表面とをオーミック接触させるコンタクト部を形成したこと、及び、
このコンタクト部は、Cr、Ta、Mo、W、Ti、Nbのいずれか、あるいは該Cr、Ta、Mo、W、Ti、Nbを主成分とする合金材料により形成されていること、
を特徴とするサーマルヘッド。 - 請求項1記載のサーマルヘッドにおいて、前記Si基板の比抵抗は1.0mΩ・cm以下であるサーマルヘッド。
- 請求項1又は2記載のサーマルヘッドにおいて、前記Si基板は不純物をドーピングしたp型Si基板であるサーマルヘッド。
- 請求項1ないし3のいずれか一項に記載のサーマルヘッドにおいて、前記Si基板背面及び前記Si基板の厚さ方向の周囲端面には、絶縁膜が形成されているサーマルヘッド。
- 請求項4記載のサーマルヘッドにおいて、前記Si基板の厚さ方向の周囲端面には、前記Si基板の陽極酸化による絶縁膜が形成されているサーマルヘッド。
- 請求項1ないし5のいずれか一項に記載のサーマルヘッドにおいて、前記蓄熱層の上下に絶縁層を備えたサーマルヘッド。
- 請求項1ないし6のいずれか一項に記載のサーマルヘッドにおいて、前記蓄熱層は、前記Si基板表面上に段差を与える均一膜厚部と、前記Si基板表面から該均一膜厚部に向けて徐々に膜厚が増大するテーパーエッジ部とを有しており、前記コモン電極は前記テーパーエッジ部の上方に位置しているサーマルヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004032874A JP4336593B2 (ja) | 2004-02-10 | 2004-02-10 | サーマルヘッド |
US11/048,337 US7248275B2 (en) | 2004-02-10 | 2005-02-01 | Thermal head including Si substrate and method for manufacturing the same |
CNB2005100090028A CN100352661C (zh) | 2004-02-10 | 2005-02-16 | 热敏头及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004032874A JP4336593B2 (ja) | 2004-02-10 | 2004-02-10 | サーマルヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005224950A JP2005224950A (ja) | 2005-08-25 |
JP4336593B2 true JP4336593B2 (ja) | 2009-09-30 |
Family
ID=34824238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004032874A Expired - Fee Related JP4336593B2 (ja) | 2004-02-10 | 2004-02-10 | サーマルヘッド |
Country Status (3)
Country | Link |
---|---|
US (1) | US7248275B2 (ja) |
JP (1) | JP4336593B2 (ja) |
CN (1) | CN100352661C (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012096459A (ja) * | 2010-11-02 | 2012-05-24 | Tdk Corp | サーマルヘッド及びこれを用いたサーマルプリンタ |
EP2669093B1 (en) * | 2011-01-25 | 2019-06-26 | Kyocera Corporation | Thermal head and thermal printer equipped with same |
JP2013082092A (ja) * | 2011-10-06 | 2013-05-09 | Seiko Instruments Inc | サーマルヘッドおよびその製造方法、並びにサーマルプリンタ |
JP6021142B2 (ja) * | 2012-06-19 | 2016-11-09 | セイコーインスツル株式会社 | サーマルヘッド、プリンタおよびサーマルヘッドの製造方法 |
JP2017114057A (ja) * | 2015-12-25 | 2017-06-29 | ローム株式会社 | サーマルプリントヘッド |
JP2017114051A (ja) * | 2015-12-25 | 2017-06-29 | ローム株式会社 | サーマルプリントヘッド |
JP6650264B2 (ja) * | 2015-12-25 | 2020-02-19 | ローム株式会社 | サーマルプリントヘッド |
JP6867768B2 (ja) * | 2016-09-15 | 2021-05-12 | ローム株式会社 | サーマルプリントヘッド |
CN110139761B (zh) * | 2017-03-15 | 2021-08-24 | 惠普发展公司,有限责任合伙企业 | 热接触管芯 |
JP6842576B2 (ja) * | 2020-02-04 | 2021-03-17 | ローム株式会社 | サーマルプリントヘッド |
JP2020073343A (ja) * | 2020-02-04 | 2020-05-14 | ローム株式会社 | サーマルプリントヘッド |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0198646B1 (en) * | 1985-04-13 | 1992-07-15 | Konica Corporation | Integrated circuit device |
US4635075A (en) * | 1985-12-04 | 1987-01-06 | Datametrics Corporation | Thermal print head and process for producing |
JP2825870B2 (ja) * | 1989-08-31 | 1998-11-18 | 京セラ株式会社 | サーマルヘッド |
JPH0584949A (ja) * | 1991-09-30 | 1993-04-06 | Kyocera Corp | サーマルヘツドの製造方法 |
JPH05270036A (ja) * | 1992-03-27 | 1993-10-19 | Rohm Co Ltd | サーマルプリントヘッド |
JPH0661947A (ja) | 1992-08-05 | 1994-03-04 | Fujitsu Ltd | 光空間伝送方式 |
US5680170A (en) * | 1994-05-31 | 1997-10-21 | Rohm Co. Ltd. | Thermal printhead |
JP3298794B2 (ja) | 1996-07-24 | 2002-07-08 | アルプス電気株式会社 | サーマルヘッドおよびその製造方法 |
US6201558B1 (en) | 1998-05-08 | 2001-03-13 | Alps Electric Co., Ltd. | Thermal head |
KR100359635B1 (ko) * | 1999-02-18 | 2002-11-04 | 로무 가부시키가이샤 | 서멀 프린트헤드 및 그 제조방법 |
JP2003266754A (ja) * | 2002-03-19 | 2003-09-24 | Sii P & S Inc | サーマルヘッド |
-
2004
- 2004-02-10 JP JP2004032874A patent/JP4336593B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-01 US US11/048,337 patent/US7248275B2/en active Active
- 2005-02-16 CN CNB2005100090028A patent/CN100352661C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050174502A1 (en) | 2005-08-11 |
US7248275B2 (en) | 2007-07-24 |
JP2005224950A (ja) | 2005-08-25 |
CN100352661C (zh) | 2007-12-05 |
CN1654221A (zh) | 2005-08-17 |
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