JP4323319B2 - アルミニウムを含有する溶融シリカ - Google Patents
アルミニウムを含有する溶融シリカ Download PDFInfo
- Publication number
- JP4323319B2 JP4323319B2 JP2003557958A JP2003557958A JP4323319B2 JP 4323319 B2 JP4323319 B2 JP 4323319B2 JP 2003557958 A JP2003557958 A JP 2003557958A JP 2003557958 A JP2003557958 A JP 2003557958A JP 4323319 B2 JP4323319 B2 JP 4323319B2
- Authority
- JP
- Japan
- Prior art keywords
- fused silica
- aluminum
- absorption
- article
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/32—Doped silica-based glasses containing metals containing aluminium
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
- Glass Melting And Manufacturing (AREA)
Description
a) 酸化による熱分解または火炎加水分解によってシリカに転化できる蒸気形態にあるケイ素含有化合物を含有するガス流を生成し、
b) ガス流中にアルミニウムを導入し、
c) ガス流を燃焼バーナの火炎に通過させて、アルミニウムを含有する溶融シリカの非晶質粒子を形成し、
d) 非晶質粒子を支持体上に堆積させ、
e) 非晶質粒子の堆積物を透明なガラス体に固結させる、
ことにより形成される。
14 バーナ
19 ブール
24 収集表面
26 炉室
100 炉
Claims (5)
- 190から300nmの波長範囲の紫外線による光学損傷に耐性のある溶融シリカガラス物品であって、200から600ppbの量のアルミニウムおよび3×1017分子/cm3未満の水素を含有し、193nmの波長で99.75%/cm以上の最小内部透過率を有することを特徴とする溶融シリカガラス物品。
- 前記物品が、2×1017分子/cm3未満の水素を含有し、193nmの波長で99.80%/cm以上の最小内部透過率を有することを特徴とする請求項1記載の溶融シリカガラス物品。
- 前記物品が、200から400ppbのアルミニウムおよび3×1017分子/cm3未満の水素を含有することを特徴とする請求項1記載の溶融シリカガラス物品。
- 少なくとも0.97mJ/cm2/パルスのフルエンスを持つ193nmレーザを1,000,000パルスで照射したときに、−0.0005/cm(底10)未満の193nmの波長における吸収変化を示すことを特徴とする請求項1から3のいずれか1項記載の溶融シリカガラス物品。
- 少なくとも0.97mJ/cm2/パルスのフルエンスを持つ193nmレーザを50,000パルスで照射したときに、−0.0002/cm(底10)未満の193nmの波長における吸収変化を示すことを特徴とする請求項1から4のいずれか1項記載の溶融シリカガラス物品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/034,971 US6630418B2 (en) | 2001-12-21 | 2001-12-21 | Fused silica containing aluminum |
US10/158,688 US6689706B2 (en) | 2001-12-21 | 2002-05-29 | Fused silica containing aluminum |
PCT/US2002/037718 WO2003057637A1 (en) | 2001-12-21 | 2002-11-25 | Fused silica containing aluminum |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005514309A JP2005514309A (ja) | 2005-05-19 |
JP2005514309A5 JP2005514309A5 (ja) | 2006-01-19 |
JP4323319B2 true JP4323319B2 (ja) | 2009-09-02 |
Family
ID=26711616
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003562048A Pending JP2005515147A (ja) | 2001-12-21 | 2002-11-25 | アルミニウムを含有する溶融シリカ |
JP2003557958A Expired - Fee Related JP4323319B2 (ja) | 2001-12-21 | 2002-11-25 | アルミニウムを含有する溶融シリカ |
JP2003559942A Pending JP2005514317A (ja) | 2001-12-21 | 2002-12-19 | 屈折率均一性が改善された溶融シリカ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003562048A Pending JP2005515147A (ja) | 2001-12-21 | 2002-11-25 | アルミニウムを含有する溶融シリカ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003559942A Pending JP2005514317A (ja) | 2001-12-21 | 2002-12-19 | 屈折率均一性が改善された溶融シリカ |
Country Status (7)
Country | Link |
---|---|
US (1) | US6946416B2 (ja) |
EP (3) | EP1456143A1 (ja) |
JP (3) | JP2005515147A (ja) |
CN (3) | CN1604879A (ja) |
AU (1) | AU2002359872A1 (ja) |
DE (1) | DE60218736T2 (ja) |
WO (3) | WO2003062161A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7506521B2 (en) | 2004-12-29 | 2009-03-24 | Corning Incorporated | High transmission synthetic silica glass and method of making same |
US7506522B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High refractive index homogeneity fused silica glass and method of making same |
JP4316589B2 (ja) * | 2006-06-16 | 2009-08-19 | 東京電波株式会社 | 人工水晶部材およびその製造方法、ならびにそれを用いた光学素子 |
US9399000B2 (en) | 2006-06-20 | 2016-07-26 | Momentive Performance Materials, Inc. | Fused quartz tubing for pharmaceutical packaging |
US8261578B2 (en) * | 2007-10-31 | 2012-09-11 | Corning Incorporated | Hydrogen loading of near net shape optics |
US10690858B2 (en) | 2018-02-28 | 2020-06-23 | Corning Incorporated | Evanescent optical couplers employing polymer-clad fibers and tapered ion-exchanged optical waveguides |
US10585242B1 (en) | 2018-09-28 | 2020-03-10 | Corning Research & Development Corporation | Channel waveguides with bend compensation for low-loss optical transmission |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2313327A1 (fr) | 1975-06-06 | 1976-12-31 | Quartz & Silice | Procede d'elaboration de verre de tres haute purete utilisable en particulier pour la fabrication de fibres optiques |
EP0401845B2 (en) | 1989-06-09 | 2001-04-11 | Heraeus Quarzglas GmbH & Co. KG | Optical members and blanks of synthetic silica glass and method for their production |
US5702495A (en) | 1993-02-10 | 1997-12-30 | Nikon Corporation | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production |
US5332702A (en) | 1993-04-16 | 1994-07-26 | Corning Incorporated | Low sodium zircon refractory and fused silica process |
US6235669B1 (en) * | 1993-06-01 | 2001-05-22 | General Electric Company | Viscosity tailoring of fused silica |
JP3040315B2 (ja) * | 1994-08-03 | 2000-05-15 | 信越化学工業株式会社 | 高粘度合成石英ガラス部材およびその製造方法 |
US5707908A (en) * | 1995-01-06 | 1998-01-13 | Nikon Corporation | Silica glass |
WO1998007053A2 (en) | 1996-07-26 | 1998-02-19 | Corning Incorporated | Fused silica having high resistance to optical damage |
JP3757476B2 (ja) | 1996-08-05 | 2006-03-22 | 株式会社ニコン | 石英ガラス光学部材、その製造方法、及び投影露光装置 |
US5958809A (en) * | 1996-08-21 | 1999-09-28 | Nikon Corporation | Fluorine-containing silica glass |
JPH10167735A (ja) | 1996-12-09 | 1998-06-23 | Nikon Corp | 合成石英ガラス製造装置 |
JP4350168B2 (ja) | 1997-03-07 | 2009-10-21 | コーニング インコーポレイテッド | チタニアドープ溶融シリカの製造方法 |
KR100554091B1 (ko) | 1997-12-08 | 2006-05-16 | 가부시키가이샤 니콘 | 엑시머레이저내성을향상시킨석영글래스의제조방법및석영글래스부재 |
JP3832113B2 (ja) * | 1998-12-01 | 2006-10-11 | 三菱化学株式会社 | アルミニウム含有合成石英ガラス粉、アルミニウム含有石英ガラス成形体及びこれらの製造方法 |
US6410192B1 (en) * | 1999-11-15 | 2002-06-25 | Corning Incorporated | Photolithography method, photolithography mask blanks, and method of making |
JP2001180962A (ja) * | 1999-12-24 | 2001-07-03 | Asahi Glass Co Ltd | 合成石英ガラスとその製造方法 |
JP2005503316A (ja) * | 2001-09-27 | 2005-02-03 | コーニング インコーポレイテッド | 石英ガラス生産のための改善された方法及び炉 |
US6630418B2 (en) * | 2001-12-21 | 2003-10-07 | Corning Incorporated | Fused silica containing aluminum |
-
2002
- 2002-11-25 EP EP02794008A patent/EP1456143A1/en not_active Withdrawn
- 2002-11-25 CN CNA028253302A patent/CN1604879A/zh active Pending
- 2002-11-25 EP EP02794007A patent/EP1456142B1/en not_active Expired - Fee Related
- 2002-11-25 WO PCT/US2002/037719 patent/WO2003062161A1/en active Application Filing
- 2002-11-25 JP JP2003562048A patent/JP2005515147A/ja active Pending
- 2002-11-25 CN CNA028253299A patent/CN1604878A/zh active Pending
- 2002-11-25 DE DE60218736T patent/DE60218736T2/de not_active Expired - Fee Related
- 2002-11-25 WO PCT/US2002/037718 patent/WO2003057637A1/en active IP Right Grant
- 2002-11-25 JP JP2003557958A patent/JP4323319B2/ja not_active Expired - Fee Related
- 2002-12-13 US US10/319,739 patent/US6946416B2/en not_active Expired - Fee Related
- 2002-12-19 CN CNA028253310A patent/CN1604880A/zh active Pending
- 2002-12-19 AU AU2002359872A patent/AU2002359872A1/en not_active Abandoned
- 2002-12-19 JP JP2003559942A patent/JP2005514317A/ja active Pending
- 2002-12-19 WO PCT/US2002/041567 patent/WO2003059833A1/en active Application Filing
- 2002-12-19 EP EP02794438A patent/EP1458651B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1604878A (zh) | 2005-04-06 |
WO2003059833A1 (en) | 2003-07-24 |
CN1604879A (zh) | 2005-04-06 |
CN1604880A (zh) | 2005-04-06 |
AU2002359872A1 (en) | 2003-07-30 |
US20030139277A1 (en) | 2003-07-24 |
JP2005515147A (ja) | 2005-05-26 |
US6946416B2 (en) | 2005-09-20 |
EP1458651B1 (en) | 2009-10-21 |
DE60218736T2 (de) | 2007-11-15 |
EP1456142B1 (en) | 2007-03-07 |
EP1456143A1 (en) | 2004-09-15 |
DE60218736D1 (de) | 2007-04-19 |
JP2005514309A (ja) | 2005-05-19 |
WO2003062161A1 (en) | 2003-07-31 |
WO2003057637A1 (en) | 2003-07-17 |
EP1458651A1 (en) | 2004-09-22 |
EP1456142A1 (en) | 2004-09-15 |
JP2005514317A (ja) | 2005-05-19 |
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