JP4306717B2 - シリコンデバイスの製造方法及び液体噴射ヘッドの製造方法 - Google Patents
シリコンデバイスの製造方法及び液体噴射ヘッドの製造方法 Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 67
- 229910052710 silicon Inorganic materials 0.000 title claims description 67
- 239000010703 silicon Substances 0.000 title claims description 67
- 238000004519 manufacturing process Methods 0.000 title claims description 38
- 238000000034 method Methods 0.000 title claims description 27
- 239000007788 liquid Substances 0.000 title claims description 22
- 239000000758 substrate Substances 0.000 claims description 308
- 230000001681 protective effect Effects 0.000 claims description 116
- 239000000853 adhesive Substances 0.000 claims description 25
- 230000001070 adhesive effect Effects 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 11
- 239000002344 surface layer Substances 0.000 claims description 7
- 239000003292 glue Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 55
- 239000010410 layer Substances 0.000 description 19
- 238000004891 communication Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000012212 insulator Substances 0.000 description 9
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052741 iridium Inorganic materials 0.000 description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 4
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000010128 melt processing Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000013212 metal-organic material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
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- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
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- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
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Description
かかる態様では、脆弱部に沿って基板を容易に且つ良好に分割することができる。また、基板を分割する際に製品となるチップに亀裂等が生じるのを防止できる。さらに、基板に凹部を形成しておくことで、レーザ光の加工深さを浅くすることができ、安定したレーザ加工を行うことができると共に、加工時間を短縮してコストを低減することができる。
かかる態様では、脆弱部に沿って流路形成基板用ウェハを容易に且つ良好に分割することができる。また、流路形成基板用ウェハを分割する際に製品となる液体噴射ヘッドに亀裂等が生じるのを防止できる。さらに、流路形成基板用ウェハに凹部を形成しておくことで、レーザ光の加工深さを浅くすることができ、安定したレーザ加工を行うことができると共に、加工時間を短縮してコストを低減することができる。
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、流路形成基板の平面図及びそのA−A′断面図である。
以上、本発明の一実施形態について説明したが、勿論、本発明は、この実施形態に限定されるものではない。例えば、上述の実施形態では、液体噴射ヘッドであるインクジェット式記録ヘッドを例示して本発明を説明したが、本発明は、勿論、液体噴射ヘッドの製造以外のシリコンウェハを用いたシリコンデバイスの製造方法に用いることができる。すなわち、上述した実施形態1では、シリコンデバイスに用いられるシリコン基板として流路形成基板用ウェハ110と保護基板用ウェハ130とが接合されたものを例示したものである。また、本発明は、例えば、シリコンウェハの他、ガラス基板、MgO基板等の比較的割れやすい材料からなる基板を分割する際に用いて特に好適な方法である。なお、基板に脆弱部を形成する際に照射するレーザ光の種類は、基板の材料に応じて適宜選択する必要がある。
Claims (10)
- シリコンウェハを複数のシリコンデバイスに分割してシリコンデバイスを製造するシリコンデバイス製造方法であって、
部品を前記シリコンウェハの一方面に接着剤を介して接着すると共に、前記シリコンウェハの一方面の前記部品が接着される領域のシリコンデバイスとなる各領域の境界側に溝部を形成してから前記部品を接着剤を介して接着し、
その後、前記シリコンウェハの一方面側からレーザ光を照射すると共に、前記レーザ光の集光点を前記シリコンウェハの前記シリコンデバイスとなる各領域の境界線上における当該シリコンウェハの内部に合わせることで、当該シリコンウェハの一方面側及び他方面側の少なくとも一方の表層に連結部を残して前記シリコンウェハの内部に所定幅で脆弱部を形成し、
その後、前記シリコンウェハに外力を加えることにより前記脆弱部に沿って当該シリコンウェハを分割して複数のシリコンデバイスとするシリコンデバイス製造方法。 - 前記シリコンデバイスとなる各領域の境界線上における当該シリコンウェハの他方面側に凹部を形成することを特徴とする請求項1記載のシリコンデバイス製造方法
- 前記凹部を、前記シリコンウェハをエッチングすることにより形成することを特徴とする請求項2記載のシリコンデバイス製造方法。
- 前記レーザ光を前記一方面側から照射する前に、前記シリコンウェハの前記一方面を鏡面化することを特徴とする請求項1乃至3いずれかに記載のシリコンデバイス製造方法。
- 前記連結部の厚さが30μm以下となるように前記脆弱部を形成することを特徴とする
請求項1乃至4いずれかに記載のシリコンデバイス製造方法。 - 前記脆弱部をその幅が15μm以下となるように形成することを特徴とする請求項1乃至5いずれかに記載のシリコンデバイス製造方法。
- 前記シリコンウェハの厚さ方向で集光点の位置を変化させて前記境界線上にレーザ光を複数回走査することによって前記脆弱部を形成することを特徴とする請求項1乃至6のいずれかに記載のシリコンデバイス製造方法。
- 液体を噴射するノズル開口に連通する圧力発生室と、該圧力発生室に圧力を発生させる
圧力発生手段とが形成された流路形成基板が複数一体的に形成された流路形成基板用ウェ
ハの接合面と、前記流路形成基板に対応して設けられる保護基板が複数一体的に形成され
た保護基板用ウェハの接合面とを接着剤を介して接合する工程と、
前記接合する工程に先立って、前記保護基板用ウェハの前記流路形成基板が接合される領域に溝部を形成する工程と、
前記保護基板用ウェハの前記接合面とは反対の面側からレーザ光を照射して、当該レー
ザ光の集光点を前記保護基板用ウェハの前記境界線上における当該保護基板用ウェハの内
部に合わせることで、当該保護基板用ウェハの前記接合面側又は当該接合面とは反対の面
側の少なくとも一方の表層に連結部を残して前記保護基板用ウェハの内部に所定幅で脆弱
部を形成する工程と、
その後、前記流路形成基板用ウェハ及び前記保護基板用ウェハに外力を加えることにより前記脆弱部に沿って前記流路形成基板用ウェハ及び前記保護基板用ウェハを複数の液体
噴射ヘッドに分割する工程とを具備することを特徴とする液体噴射ヘッドの製造方法。 - 前記流路形成基板用ウェハの前記流路形成基板となる各領域の境界線上における当該流
路形成基板用ウェハの前記接合面とは反対側の面に凹部を形成する工程をさらに具備することを特徴とする請求項8記載の液体噴射ヘッドの製造方法。 - 前記流路形成基板用ウェハをエッチングすることにより前記圧力発生室を形成すると共
に、前記凹部を、前記圧力発生室と同時に前記流路形成基板用ウェハをエッチングすることにより形成することを特徴とする請求項9記載の液体噴射ヘッドの製造方法。
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JP4386088B2 (ja) * | 2007-03-22 | 2009-12-16 | セイコーエプソン株式会社 | シリコンウェハの加工方法及び液体噴射ヘッドの製造方法 |
JP6011002B2 (ja) * | 2012-04-23 | 2016-10-19 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法、及び、液体噴射装置の製造方法 |
JP5943755B2 (ja) * | 2012-07-20 | 2016-07-05 | キヤノン株式会社 | 液体吐出ヘッドの基板の製造方法 |
US9539811B2 (en) * | 2013-05-15 | 2017-01-10 | Konica Minolta, Inc. | Inkjet head |
JP6821245B2 (ja) * | 2016-10-11 | 2021-01-27 | 株式会社ディスコ | ウェーハの加工方法 |
JP7013943B2 (ja) * | 2018-02-28 | 2022-02-01 | ブラザー工業株式会社 | ヘッド及びその製造方法 |
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JP4385746B2 (ja) | 2003-11-28 | 2009-12-16 | 三菱化学株式会社 | 窒化物系半導体素子の製造方法 |
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