JP4262056B2 - 振動波駆動装置 - Google Patents
振動波駆動装置 Download PDFInfo
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- JP4262056B2 JP4262056B2 JP2003383895A JP2003383895A JP4262056B2 JP 4262056 B2 JP4262056 B2 JP 4262056B2 JP 2003383895 A JP2003383895 A JP 2003383895A JP 2003383895 A JP2003383895 A JP 2003383895A JP 4262056 B2 JP4262056 B2 JP 4262056B2
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- piezoelectric element
- vibration
- mode
- electrode
- films
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
図1は、本発明に係る第1の実施の形態の振動波駆動装置を構成する振動子1、及び被駆動体であるリニアスライダ5を示す斜視図である。
次に本発明の第2の実施の形態を説明する。
2 積層圧電素子
3−1,3−2 突起
4−1,4−2 接触部
5 リニアスライダ
H1〜H4 バイアホール電極
L1〜L12 圧電素子膜
P1〜P4 電極膜
Claims (4)
- 圧電素子膜と電極膜とをそれぞれ複数積層してなり、交流電圧印加手段から位相の異なる交流電圧が印加されることによって、2種類の面外曲げ振動モードを励振する積層圧電素子を備えた振動波駆動装置であって、
それぞれの振動モードを励振するための前記圧電素子膜と前記電極膜とからなる領域が、前記積層圧電素子内の異なる位置に形成され、それぞれの振動モードの励振時に生じる面内方向の歪の中立面が、該振動モードを励振するために用いる前記圧電素子膜と前記電極膜とからなる領域とは別の前記圧電素子膜と前記電極膜とからなる領域に形成されることを特徴とする振動波駆動装置。 - 前記複数の振動モードは、面外曲げ1次モードと、該面外曲げ1次モードと空間的に直交する方向の面外曲げ2次モードとであることを特徴とする請求項1記載の振動波駆動装置。
- 前記複数の振動モードは、面内の伸縮振動モードと、面外曲げ振動モードとであることを特徴とする請求項1記載の振動波駆動装置。
- 前記積層圧電素子が設けられた振動子の一部は、前記複数の振動モードでの励振により楕円運動を行い、前記一部に摩擦接触する被駆動体との間で相対移動運動を行うことを特徴とする請求項1乃至3のいずれか一項に記載の振動波駆動装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003383895A JP4262056B2 (ja) | 2003-11-13 | 2003-11-13 | 振動波駆動装置 |
Applications Claiming Priority (1)
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JP2003383895A JP4262056B2 (ja) | 2003-11-13 | 2003-11-13 | 振動波駆動装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005151663A JP2005151663A (ja) | 2005-06-09 |
JP2005151663A5 JP2005151663A5 (ja) | 2006-12-21 |
JP4262056B2 true JP4262056B2 (ja) | 2009-05-13 |
Family
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Family Applications (1)
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JP2003383895A Expired - Fee Related JP4262056B2 (ja) | 2003-11-13 | 2003-11-13 | 振動波駆動装置 |
Country Status (1)
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JP (1) | JP4262056B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102242744B (zh) * | 2011-07-11 | 2014-01-29 | 南京航空航天大学 | 双喷嘴式超磁致伸缩射流伺服阀及工作方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101611294B (zh) | 2007-01-16 | 2012-10-03 | 恩德莱斯和豪瑟尔两合公司 | 用于确定和/或者监测介质过程变量的装置 |
DE102007057124A1 (de) * | 2007-01-16 | 2008-07-17 | Endress + Hauser Gmbh + Co. Kg | Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums |
KR20080104785A (ko) * | 2007-05-29 | 2008-12-03 | 삼성전기주식회사 | 압전 엑츄에이터와 이를 갖는 렌즈이송장치 |
-
2003
- 2003-11-13 JP JP2003383895A patent/JP4262056B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102242744B (zh) * | 2011-07-11 | 2014-01-29 | 南京航空航天大学 | 双喷嘴式超磁致伸缩射流伺服阀及工作方法 |
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Publication number | Publication date |
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JP2005151663A (ja) | 2005-06-09 |
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