JP4257429B2 - 原子の拡散を制御することによる金属ナノワイヤの製造方法およびこの方法により製造する金属ナノワイヤ - Google Patents
原子の拡散を制御することによる金属ナノワイヤの製造方法およびこの方法により製造する金属ナノワイヤ Download PDFInfo
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- JP4257429B2 JP4257429B2 JP2004264960A JP2004264960A JP4257429B2 JP 4257429 B2 JP4257429 B2 JP 4257429B2 JP 2004264960 A JP2004264960 A JP 2004264960A JP 2004264960 A JP2004264960 A JP 2004264960A JP 4257429 B2 JP4257429 B2 JP 4257429B2
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- atoms
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Description
2:タングステン部
3:アルミニウム配線部
Claims (2)
- 電流の入力パッドと出力パッドとを備えた板状のタングステンの前記電流入出力パッド間に溝を形成し、前記溝の中にアルミニウム配線部を埋め込み、
前記電流入力パッドから電流出力パッドへ電流を流し、
前記アルミニウム配線部に生じたエレクトロマイグレーションによりアルミニウム原子を集約、成長させることを特徴とする、金属ナノワイヤの製造方法。 - 請求項1に記載の金属ナノワイヤの製造方法により得られた金属ナノワイヤ。
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JP2004264960A JP4257429B2 (ja) | 2004-09-13 | 2004-09-13 | 原子の拡散を制御することによる金属ナノワイヤの製造方法およびこの方法により製造する金属ナノワイヤ |
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JP2004264960A JP4257429B2 (ja) | 2004-09-13 | 2004-09-13 | 原子の拡散を制御することによる金属ナノワイヤの製造方法およびこの方法により製造する金属ナノワイヤ |
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JP2006075961A JP2006075961A (ja) | 2006-03-23 |
JP4257429B2 true JP4257429B2 (ja) | 2009-04-22 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2922099B1 (en) | 2005-08-12 | 2019-01-02 | Cambrios Film Solutions Corporation | Nanowires-based transparent conductors |
JP5062721B2 (ja) * | 2006-06-27 | 2012-10-31 | 国立大学法人京都大学 | ナノサイズワイヤーの製造方法 |
JP2008038173A (ja) * | 2006-08-03 | 2008-02-21 | Tohoku Univ | 金属ナノワイヤの製造方法および金属ナノワイヤ |
US8018568B2 (en) | 2006-10-12 | 2011-09-13 | Cambrios Technologies Corporation | Nanowire-based transparent conductors and applications thereof |
KR101545219B1 (ko) | 2006-10-12 | 2015-08-18 | 캄브리오스 테크놀로지즈 코포레이션 | 나노와이어 기반의 투명 도전체 및 그의 응용 |
KR101456838B1 (ko) | 2007-04-20 | 2014-11-04 | 캄브리오스 테크놀로지즈 코포레이션 | 복합 투명 도전체 및 그 제조 방법 |
EP2531566B1 (en) | 2010-02-05 | 2018-09-12 | CAM Holding Corporation | Photosensitive ink compositions and transparent conductors and method of using the same |
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