JP4209707B2 - Contact pressure inspection mechanism and method of movable probe pin - Google Patents

Contact pressure inspection mechanism and method of movable probe pin Download PDF

Info

Publication number
JP4209707B2
JP4209707B2 JP2003076892A JP2003076892A JP4209707B2 JP 4209707 B2 JP4209707 B2 JP 4209707B2 JP 2003076892 A JP2003076892 A JP 2003076892A JP 2003076892 A JP2003076892 A JP 2003076892A JP 4209707 B2 JP4209707 B2 JP 4209707B2
Authority
JP
Japan
Prior art keywords
movable probe
contact
probe pin
movable
contact pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003076892A
Other languages
Japanese (ja)
Other versions
JP2004286497A (en
Inventor
寿幸 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hioki EE Corp
Original Assignee
Hioki EE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hioki EE Corp filed Critical Hioki EE Corp
Priority to JP2003076892A priority Critical patent/JP4209707B2/en
Publication of JP2004286497A publication Critical patent/JP2004286497A/en
Application granted granted Critical
Publication of JP4209707B2 publication Critical patent/JP4209707B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、回路基板検査装置が備える可動プローブピンのプロービング動作時における被接触部位に対する接触圧の程度を検査してその良否を判断できる可動プローブピンの接触圧検査機構およびその方法に関する技術である。
【0002】
【従来の技術】
回路基板検査装置は、例えば、固定テーブルなどに定置された被検査回路基板のランドなどからなる所定の測定部位に電気的に接触させてプロービングすることができる針状の接触ピンをその先端部に有するプローブピンを備えている。
【0003】
この場合、回路基板検査装置が備えるプローブピンには、X−Y軸方向への移動ができない固定プローブピンと、X−Y軸方向への移動も自在な可動プローブピンとの2通りがある。このうち、固定プローブピンは、被検査回路基板の所定の検査位置に同時接触させることができるように、例えば剣山のような配置関係のもとで多数本が固定された状態で配置されているため、同一規格の被検査基板には用いることができるものの、規格を異にする被検査基板にも適用できるだけの汎用性は備えていない。
【0004】
一方、可動プローブピンは、3軸方向であるX−Y軸方向とZ軸方向とへの制御された移動を自在に配設される複数本で構成することにより、規格を異にする各種の被検査回路基板に対しても適宜適用し得るだけの汎用性が付与されており、これにより所望する測定部位に対するプロービングを行うことができるようになっている。
【0005】
図5は、従来からある可動プローブピンの配置関係の一例を模式的に示す説明図である。この例においては、被検査回路基板Pの第1測定部位に対し左斜め方向から電気的に接触する第1の可動プローブピン1と、第2測定部位に対し右斜め方向から電気的に接触する第2の可動プローブピン2と、略垂直方向から電気的に接触する第3の可動プローブピン3との3本で構成されている。
【0006】
このため、各可動プローブピン1,2,3は、被検査回路基板Pにおける初回測定ポイントとの関係で定まる所定の各測定部位に対し所要のプロービングを行った後、次順の測定ポイントとの関係で定まる各測定部位へと移動した上で再びプロービングを行い、このようなプロービング動作を繰り返し行うことで必要な測定作業を行うことができる。
【0007】
この場合、各可動プローブピン1,2,3は、筒状となったプローブ本体部1a,2a,3aと、これらに内在させた図示しないコイルスプリングにより常に突出方向へと付勢され、かつ、コーティングされたテフロン層などからなる滑り層を介して進退自在に保持された接触ピン1b,2b,3bとを少なくとも備えて形成されている。
【0008】
このため、所定位置へと移動して位置決めされた各可動プローブピン1,2,3は、それぞれをZ軸方向である下降方向へと移動させることにより、各接触ピン1b,2b,3bの接触端を被検査回路基板Pの各測定部位に所定の接触圧のもとで接触させることができることになる。
【0009】
【発明が解決しようとする課題】
しかし、各可動プローブピン1,2,3は、測定ポイントを異にしながら繰り返し行われるプロービング動作により、各プローブ本体部1a,2a,3aと各接触ピン1b,2b,3bとの間に介在させてある滑り層が摩耗して円滑な摺動ができなくなったり、コイルスプリングのバネ性が性能劣化してショック吸収力が弱化するなどして、被検査回路基板Pの各測定部位に対し各接触ピン1b,2b,3bを適正な接触圧で接触させることができなくなる不都合があった。
【0010】
そして、このような不都合があると、各接触ピン1b,2b,3bは、被検査回路基板Pの側に接触した際に適正な接触圧を上回る押圧力で圧接するに至る結果、可動プローブピン1,2,3の側を損傷させたり、被検査回路基板Pの側を破損してしまうなどの不具合を引き起こすおそれがあった。
【0011】
本発明は、上記した従来技術の課題に鑑みてなされたものであり、可動プローブピンが常に適正な接触圧のもとで被検査回路基板の側に接触させることができる接触圧を保持しているか否かを簡単、かつ、正確に検出してその良否を知ることができる可動プローブピンの接触圧検査機構およびその方法を提供することを目的とする。
【0012】
【課題を解決するための手段】
本発明は、上記目的を達成するためになされたものであり、そのうちの第1の発明(接触圧検査機構)は、3軸方向への移動が自在な少なくとも2本以上の可動プローブピンを備える回路基板検査装置における前記可動プローブピンの可動範囲内の適位置に対し、異なる所定位置に同時に接触させた際の前記可動プローブピン相互の短絡または非短絡を自在に配設された通電回路と、これら可動プローブピンのうち、検査対象である少なくとも1本の可動プローブピンが所定の接触圧よりも大きな接触圧で接触した際の接点の開成または閉成を自在にして前記通電回路中に介在させた検出スイッチとを少なくとも具備させ、
検査対象の可動プローブピンが前記検出スイッチと接触した際の接点の開閉状態との関係で判別される接触圧の程度によりその良否判断を自在としたことに特徴がある。
【0013】
この場合、前記通電回路は、非検査対象の可動プローブピンを接触させるための電極部を備えるダミー基板片と、同電極部と導通して検査対象の可動プローブピンが接触される前記検出スイッチとで形成したり、非検査対象の2本の可動プローブピンを各別に接触させるための一対の電極部を備えるダミー基板片と、一方の前記電極部から検査対象の1本の可動プローブピンが接触される前記検出スイッチを経て他方の前記電極部へと至る導電路とで形成したりすることができる。また、前記検出スイッチを常閉スイッチとし、検査対象であるすべての可動プローブピンの別に前記通電回路中に各別に介在配置させておくこともできる。
【0014】
また、第2の発明(接触圧検査方法)は、3軸方向への移動が自在な少なくとも2本以上の可動プローブピンを備える回路基板検査装置の適位置に、各可動プローブピンを異なる所定位置に各別に接触させた際に各可動プローブピン相互が短絡または非短絡となる通電回路を設け、該通電回路には、検査対象である少なくとも1本の可動プローブピンが所定の接触圧よりも大きな接触圧で接触した際に接点が開成または閉成される検出スイッチを介在させ、検査対象の可動プローブピンを前記検出スイッチに接触させた際の接点の開閉状態との関係で判別される接触圧の程度によりその良否を判断することを特徴とする。
【0015】
【発明の実施の形態】
図1は、本発明に係る可動プローブピンの接触圧検査機構の一例を概略的に示す平面図であり、図2は、接触圧検査機構と可動プローブピンとの配置関係を正面方向から示した説明図である。なお、可動プローブピンについては、図4に示す従来例と同じ3本構成とし、図中に同一の符号を用いて示す。
【0016】
可動プローブピンの接触圧検査機構11は、図示しない回路基板検査装置にあって被検査回路基板の固定位置から外れる各可動プローブピン1,2,3の可動範囲内の適位置に配設される略方形を呈する絶縁基台12と、該絶縁基台12の表出面13に配設されたダミー基板22と、同じく表出面13上のダミー基板22の側とは離間する位置に配設された検スイッチ32とを少なくとも備えている。
【0017】
このうち、ダミー基板22は、略方形を呈する板片部23と、該板片部23の表面23a上の適宜位置に相互に離間させて設置された一対の電極部24,25とで形成されている。
【0018】
また、常閉スイッチとして示される検スイッチ32は、相互に所定間隔をおいて基台12の表出面13上に対向配置された一対の支台部33,36と、一方の支台部33に基端部34aを片持ち状に固定させて自由端である先端部34b側を他方の支台部36方向へと向かわせた導電性の可動側スイッチ片34と、他方の支台部36に基端部37aを片持ち状に固定させて自由端である先端部37b側を一方の支台部33方向へと向かわせた導電性の固定側スイッチ片37とで形成されている。
【0019】
この場合、可動側スイッチ片34の先端上面には可動接点35が、固定側スイッチ片37の先端下面には不動接点38が、常態時において相互に接触する配置関係のもとでそれぞれが突設されており、これら可動接点35と不動接点38とは、受ける押圧力の程度により接離自在となっている。
【0020】
しかも、可動側スイッチ片34と固定側スイッチ片36とは、常態時に所要の圧接力のもとで可動接点35を不動接点38に接触させ得るように、必要な弾性反発力が付与されて形成されている。
【0021】
また、絶縁基台12上に配設されたダミー基板22が備える一対の電極部24,25と、検出スイッチ32を形成している可動側スイッチ片34と固定側スイッチ片37との間は、図1中に破線として示す例えばリード線などからなる導電部材16,17を介して接続させることで、異なる一方の位置にある電極部24には可動プローブピン1を、他方の位置にある電極部25には可動プローブピン2を、それぞれ同時に接触させた際に相互が短絡される通電回路15が形成されている。
【0022】
つまり、図2に示す常態時における配置関係のもとでは、電極部24に接触させた可動プローブピン1の側から流した電流は、電極部24→導電部材16→可動側スイッチ片34→固定側スイッチ片37→導電部材17→電極部25→可動プローブピン2へと至るので、可動プローブピン1,2相互間は短絡された状態とすることができる。
【0023】
次に、図2および図3に示す例に基づいて本発明に係る可動プローブピンの接触圧検査方法を、接触圧検査機構の動作とともに説明する。なお、この例においては、可動プローブピン3が検査対象とされ、他の1本の可動プローブピン1は電極部24に、残りの1本の可動プローブピン2は電極部25にそれぞれ接触させた状態のもとで、可動プローブピン3の接触ピン3aの接触圧の程度を検査してその良否を判断しようとするものである。
【0024】
この場合、検査対象となっている可動プローブピン3は、図2に示されているように、検査スイッチ32における可動側スイッチ片34の先端部34b寄りの上方位置から下降させた際に、その接触ピン3bが先端部34b側に接触する位置関係へと移動させて位置決めする。
【0025】
このようにして位置決めされた後は、可動プローブピン3を下降させて、通常のプロービング動作と同じ接触圧のもとで接触ピン3bを可動側スイッチ片34に押下げ方向から接触させる。
【0026】
このとき、可動側スイッチ片34は、可動プローブピン3の被検査回路基板に対する適正な接触圧(例えば150g)よりも大きな弾性反発力(例えば200g)が付与されて固定側スイッチ片37の側と接触している。このため、可動プローブピン3における接触ピン3bが200gよりも少ない例えば160gの接触圧のもとで接触することがあっても、弾性反発力が200gである可動側スイッチ片34の側が押し下げられることはない。
【0027】
したがって、検出スイッチ32は、不動接点38に可動接点35が接触している閉成状態を維持し続ける結果、可動プローブピン1と可動プローブピン2とは通電回路15を介して短絡され、検査対象となっている可動プローブピン3が適正な接触圧を保持しながら接触している良品であることを知ることができる。
【0028】
しかし、検査対象となっている可動プローブピン3における接触ピン3aの側が、滑り層の摩耗やコイルスプリングのバネ性の性能劣化などで適正な接触圧を上回る例えば230gの接触圧で可動側スイッチ片34に接触した場合には、弾性反発力が200gである可動側スイッチ片34は例えば図3に示されているように押し下げられてしまうことになる。
【0029】
その結果、検出スイッチ32は、可動接点35が不動接点38から強制的に引き離されてその接触状態が解除されてしまうので、可動プローブピン1と可動プローブピン2との間には電流が流れない非短絡状態となり、検査対象となっている可動プローブピン3の接触圧が異常を来しているを知ることができ、これにより該可動プローブピン3が不良品であることを知ることができることになる。
【0030】
以上は、本発明を図示例に即して説明したものであり、その具体的な実施形態はこれに限定されるものではない。例えば、図4に示すように、非検査対象の可動プローブピン1を接触させるための電極部26を備えるダミー基板片22と、同電極部26と導通して検査対象の可動プローブピ2ンが接触される検出スイッチ32とで通電回路を形成し、一方の可動プローブピン1を電極部26に接触させた状態で、他方の可動プローブ2を検スイッチ32の可動側スイッチ片34に接触させた際の接点の開閉状態との関係で、その接触圧の適否を検査できるようにしてもよい。また、図示例における検スイッチ32は、常閉スイッチとして示されているが、例えば図2における可動側スイッチ片34を上側に、固定側スイッチ片37を下側に配置し、常態時において可動側スイッチ片34の可動接点35が固定側スイッチ片37の不動接点38から離れて対向する常開スイッチとして配設することもできる。この場合、通電回路は、検査対象の可動プローブピ2ンの接触圧が適正圧を上回る場合に閉成され、これにより接触圧の程度が検査でき、その良否を知ることができることになる。
【0031】
また、図1に示す電極部24,25に代え、通電回路15中に可動プローブピン1用の検出スイッチ(常閉スイッチ)32と、可動プローブピン2用の検出スイッチ(常閉スイッチ)32とをそれぞれ設け、可動プローブピン用の検出スイッチ(常閉スイッチ)32とを含め、同時にもしくは各別にそれぞれの検出スイッチ32の可動側スイッチ片34に接触させた際の接点の開閉状態との関係で、それぞれの接触圧の程度を検査でき、その良否を知ることができるようにすることもできる。
【0032】
さらに、図示例では、可動側スイッチ片34の弾性反発力を考慮して絶縁基台12の表出面13から所要の高さを確保して配設した常閉スイッチとしての検スイッチ32が示されている。しかし、このような図示例の構造に限定されるものではなく、例えば、可動側スイッチ片34の可動接点35と固定側スイッチ片37の不動接点38とを所要の磁着力で磁着させるなど、可動プローブピンの接触圧を判別できる適宜のスイッチ手法を採用することもできる。
【0033】
本実施形態においては、可動プローブピン3を検査対象とした例について説明しているが、他の可動プローブピン1,2を順次、検査対象としてその接触圧を可動プローブピン3と同様に検査することもできる。
【0034】
また、本実施形態においては3本の可動プローブピン1,2,3を備える回路基板検査装置を例にして説明したが、少なくとも2本以上備えているものであればよく、その数は限定されない。なお、可動プローブピンの接触圧を通電回路の開閉との関係で検査し、不適正と判断された場合には、ブザーを鳴らしたり、エラー表示ランプを点灯するなどの適宜の報知手段により作業者に報知できるようにしておくのが好ましい。
【0035】
【発明の効果】
以上述べたように本発明によれば、基板検査装置が備える各可動プローブピンを異なる所定位置に各別に接触させた際に各可動プローブピン相互が短絡する通電回路を設け、該通電回路には、検査対象である少なくとも1本の可動プローブピンが所定の接触圧よりも大きな接触圧で接触した際に接点が開成される検出スイッチを介在させてあるので、検査対象の可動プローブピンを前記検出スイッチに接触させた際の接点の開閉状態によってその接触圧の程度を簡単に検査し、その良否を判断することができる。
【0036】
しかも、この場合、可動プローブピンを回路基板検査装置から取り外すことなくそのままの状態で検査することができるので、実測定作業に先立って接触圧を事前チェックすることで、可動プローブピンの損傷や被検査回路基板の破損を防止して円滑に測定作業を遂行することができるほか、接触圧の適否検査の作業性の向上を図ることもできる。
【図面の簡単な説明】
【図1】 本発明に係る可動プローブピンの接触圧検査機構の一例を概略的に示す平面図。
【図2】 本発明に係る可動プローブピンの接触圧検査機構と可動プローブピンとの配置関係を正面方向から示した説明図。
【図3】 可動プローブピンの接触圧が適正な接触圧を上回った場合の検査スイッチの状態を示す説明図。
【図4】 本発明に係る可動プローブピンの接触圧検査機構の他例を図2に対応させて示す説明図。
【図5】 3本からなる可動プローブピンのプロービング動作例を示す説明図。
【符号の説明】
1,2,3 可動プローブピン
1a,2a,3a プローブ本体部
1b,2b,3b 接触ピン
11 接触圧検査機構
12 絶縁基台
13 表出面
15 通電回路
16,17 導電材
22 ダミー基板
23 板片部
23a 表面
24,25 電極部
32 検スイッチ
33 支台部
34 可動側スイッチ片
34a 基端部
34b 先端部
35 可動接点
36 支台部
37 可動側スイッチ片
37a 基端部
37b 先端部
38 不動接点
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a movable probe pin contact pressure inspection mechanism and method for inspecting the degree of contact pressure with respect to a contacted part during a probing operation of a movable probe pin included in a circuit board inspection apparatus and judging its quality. .
[0002]
[Prior art]
The circuit board inspection apparatus has, for example, a needle-like contact pin that can be probed by making electrical contact with a predetermined measurement site made of a land of a circuit board to be inspected placed on a fixed table or the like at the tip thereof. A probe pin is provided.
[0003]
In this case, there are two types of probe pins provided in the circuit board inspection device: a fixed probe pin that cannot move in the XY axis direction and a movable probe pin that can move in the XY axis direction. Among them, the fixed probe pins are arranged in a state where a large number of fixed probe pins are fixed under an arrangement relationship such as Kenzan so that they can be simultaneously brought into contact with a predetermined inspection position of the circuit board to be inspected. Therefore, although it can be used for inspected substrates of the same standard, it does not have versatility that can be applied to inspected substrates of different standards.
[0004]
On the other hand, the movable probe pin is composed of a plurality of freely arranged controllable movements in the XY axis direction and the Z axis direction, which are three axis directions, so that various kinds of standards can be different. Versatility that can be applied as appropriate to the circuit board to be inspected is given, so that probing can be performed on a desired measurement site.
[0005]
FIG. 5 is an explanatory view schematically showing an example of a conventional arrangement relationship of movable probe pins. In this example, the first movable probe pin 1 that is in electrical contact with the first measurement site of the circuit board P to be inspected from the left diagonal direction and the second movable measurement site are in electrical contact with the second measurement site from the right diagonal direction. The second movable probe pin 2 and the third movable probe pin 3 that are in electrical contact with each other from a substantially vertical direction are used.
[0006]
Therefore, each movable probe pin 1, 2, 3 performs the necessary probing with respect to each predetermined measurement site determined by the relationship with the initial measurement point on the circuit board P to be inspected, and then with the next measurement point. Probing is performed again after moving to each measurement site determined by the relationship, and the necessary measurement work can be performed by repeating such probing operation.
[0007]
In this case, each movable probe pin 1, 2, 3 is always urged in the protruding direction by a cylindrical probe main body 1a, 2a, 3a and a coil spring (not shown) incorporated therein, and At least contact pins 1b, 2b, and 3b that are held so as to be able to advance and retreat via a sliding layer made of a coated Teflon layer or the like are formed.
[0008]
For this reason, the movable probe pins 1, 2, and 3 that are positioned by moving to a predetermined position are moved in the downward direction, which is the Z-axis direction, so that the contact pins 1b, 2b, and 3b contact each other. The end can be brought into contact with each measurement site of the circuit board P to be inspected under a predetermined contact pressure.
[0009]
[Problems to be solved by the invention]
However, each movable probe pin 1, 2, 3 is interposed between each probe body 1a, 2a, 3a and each contact pin 1b, 2b, 3b by a probing operation repeatedly performed with different measurement points. The sliding layer is worn and smooth sliding cannot be performed, or the spring property of the coil spring is deteriorated and the shock absorption capacity is weakened. There is a disadvantage that the pins 1b, 2b, 3b cannot be brought into contact with each other with an appropriate contact pressure.
[0010]
If there is such inconvenience, each contact pin 1b, 2b, 3b comes into contact with a pressing force exceeding an appropriate contact pressure when contacting the circuit board P to be inspected. As a result, the movable probe pin There is a risk of causing problems such as damaging the 1, 2, and 3 sides or damaging the circuit board P to be inspected.
[0011]
The present invention has been made in view of the above-described problems of the prior art, and maintains a contact pressure at which the movable probe pin can always be brought into contact with the circuit board to be inspected under an appropriate contact pressure. It is an object of the present invention to provide a movable probe pin contact pressure inspection mechanism and method thereof that can detect whether or not it is good and simple by detecting whether or not it is good .
[0012]
[Means for Solving the Problems]
The present invention has been made to achieve the above object, and a first invention (contact pressure inspection mechanism) of the present invention includes at least two or more movable probe pins that are movable in three axial directions. An energizing circuit that is freely arranged to short-circuit or non-short-circuit between the movable probe pins when simultaneously contacting different predetermined positions with respect to an appropriate position within the movable range of the movable probe pins in the circuit board inspection device; Among these movable probe pins, when at least one movable probe pin to be inspected contacts with a contact pressure larger than a predetermined contact pressure, the contact can be freely opened or closed and interposed in the energization circuit. And at least a detection switch,
It is characterized in that the pass / fail judgment can be made freely according to the degree of contact pressure determined by the relationship between the open / closed state of the contact when the movable probe pin to be inspected contacts the detection switch.
[0013]
In this case, the energization circuit includes a dummy substrate piece having an electrode part for contacting a non-inspection object movable probe pin, and the detection switch that is electrically connected to the electrode part and in contact with the inspection object movable probe pin. Or a dummy substrate piece provided with a pair of electrode portions for contacting two movable probe pins to be inspected separately, and one movable probe pin to be inspected from one of the electrode portions. Or a conductive path that reaches the other electrode part through the detection switch. Further, the detection switch may be a normally closed switch, and may be disposed separately in the energization circuit separately from all the movable probe pins to be inspected.
[0014]
Further, according to a second invention (contact pressure inspection method), each movable probe pin is placed at an appropriate position in an appropriate position of a circuit board inspection apparatus including at least two movable probe pins that are movable in three axial directions. An energization circuit is provided in which each movable probe pin is short-circuited or non-short-circuited when brought into contact with each other, and at least one movable probe pin to be inspected is larger than a predetermined contact pressure in the energization circuit. Contact pressure determined by the relationship between the open / closed state of the contact when the movable probe pin to be inspected is brought into contact with the detection switch via a detection switch that opens or closes the contact when contacted by the contact pressure It is characterized in that the quality is judged according to the degree .
[0015]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a plan view schematically showing an example of a contact pressure inspection mechanism for a movable probe pin according to the present invention, and FIG. 2 is an explanatory view showing an arrangement relationship between the contact pressure inspection mechanism and the movable probe pin from the front. FIG. Note that the movable probe pins have the same configuration as that of the conventional example shown in FIG. 4 and are denoted by the same reference numerals in the drawing.
[0016]
The movable probe pin contact pressure inspection mechanism 11 is disposed in an appropriate position within the movable range of the movable probe pins 1, 2 and 3 which is in a circuit board inspection apparatus (not shown) and deviates from the fixed position of the circuit board to be inspected. The insulating base 12 having a substantially square shape, the dummy substrate 22 disposed on the exposed surface 13 of the insulating base 12, and the dummy substrate 22 side on the exposed surface 13 are disposed at positions separated from each other. and it includes at least a detection switch 32.
[0017]
Among these, the dummy board | substrate 22 is formed with the board piece part 23 which exhibits a substantially square shape, and a pair of electrode parts 24 and 25 installed in the appropriate position on the surface 23a of this board piece part 23 mutually spaced apart. ing.
[0018]
Further, detection switches 32 are shown as normally closed switches, arranged opposite each other at predetermined intervals on the exposed surface 13 of the base 12 and a pair of abutment portions 33 and 36, one abutment portion 33 The base end portion 34a is fixed in a cantilever manner, and the distal end portion 34b, which is a free end, is directed toward the other abutment portion 36, and the other abutment portion 36 is provided. The base end portion 37a is fixed in a cantilevered manner, and the distal end portion 37b side which is a free end is formed with a conductive fixed side switch piece 37 which is directed toward the one abutment portion 33.
[0019]
In this case, a movable contact 35 is provided on the upper surface of the distal end of the movable switch piece 34, and a non-moving contact 38 is provided on the lower surface of the distal end of the fixed switch piece 37. The movable contact 35 and the non-moving contact 38 can be brought into contact with and separated from each other depending on the degree of pressing force received.
[0020]
Moreover, the movable switch piece 34 and the fixed switch piece 36 are formed with a necessary elastic repulsive force so that the movable contact 35 can be brought into contact with the stationary contact 38 under a required pressure contact force in a normal state. Has been.
[0021]
Further, between the pair of electrode portions 24 and 25 provided in the dummy substrate 22 disposed on the insulating base 12 and the movable side switch piece 34 and the fixed side switch piece 37 forming the detection switch 32, By connecting through the conductive members 16 and 17 made of, for example, lead wires shown as broken lines in FIG. 1, the movable probe pin 1 is connected to the electrode portion 24 at one different position, and the electrode portion at the other position. An energization circuit 15 is formed in 25 so that the movable probe pins 2 are short-circuited when they are brought into contact with each other simultaneously.
[0022]
That is, under the normal arrangement relationship shown in FIG. 2, the current flowing from the side of the movable probe pin 1 in contact with the electrode part 24 is the electrode part 24 → the conductive member 16 → the movable side switch piece 34 → fixed. Since the side switch piece 37 → the conductive member 17 → the electrode portion 25 → the movable probe pin 2 is reached, the movable probe pins 1 and 2 can be short-circuited.
[0023]
Next, based on the example shown in FIGS. 2 and 3, the movable probe pin contact pressure inspection method according to the present invention will be described together with the operation of the contact pressure inspection mechanism. In this example, the movable probe pin 3 is an object to be inspected, the other one movable probe pin 1 is brought into contact with the electrode part 24, and the remaining one movable probe pin 2 is brought into contact with the electrode part 25. Under the condition, the degree of contact pressure of the contact pin 3a of the movable probe pin 3 is inspected to determine its quality .
[0024]
In this case, as shown in FIG. 2, when the movable probe pin 3 to be inspected is lowered from the upper position near the distal end portion 34b of the movable switch piece 34 in the inspection switch 32, Positioning is performed by moving the contact pin 3b to a positional relationship where the contact pin 3b contacts the tip 34b.
[0025]
After being positioned in this way, the movable probe pin 3 is lowered, and the contact pin 3b is brought into contact with the movable switch piece 34 from the push-down direction under the same contact pressure as in the normal probing operation.
[0026]
At this time, the movable switch piece 34 is applied with an elastic repulsive force (for example, 200 g) larger than an appropriate contact pressure (for example, 150 g) of the movable probe pin 3 to the circuit board to be inspected, In contact. For this reason, even if the contact pin 3b of the movable probe pin 3 contacts under a contact pressure of less than 200 g, for example, 160 g, the side of the movable switch piece 34 having an elastic repulsive force of 200 g is pushed down. There is no.
[0027]
Accordingly, the detection switch 32 continues to maintain the closed state in which the movable contact 35 is in contact with the stationary contact 38. As a result, the movable probe pin 1 and the movable probe pin 2 are short-circuited via the energization circuit 15 and are inspected. It can be known that the movable probe pin 3 is a non- defective product that is in contact while maintaining an appropriate contact pressure.
[0028]
However, the movable side switch piece with a contact pressure of, for example, 230 g, whose contact pin 3a side of the movable probe pin 3 to be inspected exceeds the appropriate contact pressure due to wear of the sliding layer or deterioration of the spring performance of the coil spring, etc. When it contacts 34, the movable side switch piece 34 whose elastic repulsion force is 200g will be pushed down as FIG. 3 shows, for example.
[0029]
As a result, in the detection switch 32, the movable contact 35 is forcibly separated from the stationary contact 38 and the contact state is released, so that no current flows between the movable probe pin 1 and the movable probe pin 2. It is possible to know that the contact pressure of the movable probe pin 3 to be inspected has become abnormal due to a non-short-circuit state, thereby knowing that the movable probe pin 3 is defective. Become.
[0030]
The present invention has been described with reference to the illustrated example, and the specific embodiment thereof is not limited to this. For example, as shown in FIG. 4, a dummy substrate piece 22 having an electrode portion 26 for contacting a movable probe pin 1 to be inspected and a movable probe pin 2 to be in contact with the electrode portion 26 are brought into contact with each other. is the forming a current supply circuit and the detection switch 32, and one of the movable probe-pin 1 in a state in contact with the electrode portion 26 is brought into contact with the movable side switch piece 34 of the switch 32 detect the other movable probe 2 The appropriateness of the contact pressure may be inspected in relation to the open / closed state of the contact. The switch 32 detect in the illustrated embodiment is shown as a normally closed switch, the movable switch piece 34 in FIG. 2 in the upper example, placing the fixed-side switch piece 37 on the lower side, the movable during normal state The movable contact 35 of the side switch piece 34 may be arranged as a normally open switch facing away from the stationary contact 38 of the fixed side switch piece 37. In this case, the energizing circuit is closed when the contact pressure of the movable Purobupi 2 emissions to be inspected exceeds the proper pressure, thereby can the degree of contact pressure test, becomes Rukoto can know the quality.
[0031]
Further, instead of the electrode portions 24 and 25 shown in FIG. 1, a detection switch (normally closed switch) 32 for the movable probe pin 1 and a detection switch (normally closed switch) 32 for the movable probe pin 2 are provided in the energization circuit 15. Including the detection switch (normally closed switch) 32 for the movable probe pin, and the relationship between the open / closed state of the contact when contacting the movable switch piece 34 of each detection switch 32 simultaneously or separately. , can check the degree of each contact pressure, it is also possible to so that it is possible to know the quality.
[0032]
Further, in the illustrated example, detection switch 32 as a normally closed switch which is arranged to ensure a required height in consideration of the elastic repulsive force of the movable switch piece 34 from the exposed surface 13 of the insulating base 12 is shown Has been. However, it is not limited to the structure of the illustrated example, and for example, the movable contact 35 of the movable switch piece 34 and the fixed contact 38 of the fixed switch piece 37 are magnetically attached with a required magnetic force, etc. An appropriate switch method that can determine the contact pressure of the movable probe pin can also be adopted.
[0033]
In the present embodiment, an example in which the movable probe pin 3 is an inspection target is described. However, the other movable probe pins 1 and 2 are sequentially inspected and the contact pressure is inspected in the same manner as the movable probe pin 3. You can also.
[0034]
In the present embodiment, the circuit board inspection apparatus including the three movable probe pins 1, 2, and 3 has been described as an example. However, any circuit board inspection apparatus that includes at least two movable probe pins may be used, and the number thereof is not limited. . In addition, the contact pressure of the movable probe pin is inspected in relation to the opening / closing of the energizing circuit, and if it is determined to be inappropriate, the worker is notified by appropriate notification means such as a buzzer or turning on an error display lamp. It is preferable to be able to notify the user.
[0035]
【The invention's effect】
As described above, according to the present invention, when each movable probe pin included in the substrate inspection apparatus is brought into contact with a different predetermined position separately, an energization circuit that short-circuits each movable probe pin is provided. In addition, a detection switch that opens a contact when at least one movable probe pin to be inspected contacts at a contact pressure larger than a predetermined contact pressure is interposed, so that the movable probe pin to be inspected is detected The degree of contact pressure can be easily inspected based on the open / closed state of the contact when it is brought into contact with the switch, and the quality can be judged .
[0036]
In addition, in this case, since the movable probe pin can be inspected as it is without being removed from the circuit board inspection apparatus, the contact pressure is checked in advance prior to the actual measurement work, so that the movable probe pin is damaged or covered. In addition to preventing damage to the inspection circuit board and performing the measurement work smoothly, it is possible to improve the workability of the contact pressure suitability inspection.
[Brief description of the drawings]
FIG. 1 is a plan view schematically showing an example of a contact pressure inspection mechanism for a movable probe pin according to the present invention.
FIG. 2 is an explanatory diagram showing a positional relationship between a movable probe pin contact pressure inspection mechanism and a movable probe pin according to the present invention from the front direction;
FIG. 3 is an explanatory diagram showing a state of an inspection switch when a contact pressure of a movable probe pin exceeds an appropriate contact pressure.
FIG. 4 is an explanatory view showing another example of the contact pressure inspection mechanism for the movable probe pin according to the present invention, corresponding to FIG.
FIG. 5 is an explanatory diagram showing an example of probing operation of three movable probe pins.
[Explanation of symbols]
1, 2, 3 Movable probe pins 1a, 2a, 3a Probe body portions 1b, 2b, 3b Contact pin 11 Contact pressure inspection mechanism 12 Insulation base 13 Exposed surface 15 Current supply circuit 16, 17 Conductive material 22 Dummy substrate 23 Plate piece 23a surface 24, 25 electrode part 32 detection switch 33 the abutment portion 34 movable switch piece 34a base portion 34b front end portion 35 movable contact 36 abutment portion 37 movable switch piece 37a base portion 37b tip 38 stationary contacts

Claims (5)

3軸方向への移動が自在な少なくとも2本以上の可動プローブピンを備える回路基板検査装置における前記可動プローブピンの可動範囲内の適位置に対し、
異なる所定位置に同時に接触させた際の前記可動プローブピン相互の短絡または非短絡を自在に配設された通電回路と、
これら可動プローブピンのうち、検査対象である少なくとも1本の可動プローブピンが所定の接触圧よりも大きな接触圧で接触した際の接点の開成または閉成を自在にして前記通電回路中に介在させた検出スイッチとを少なくとも具備させ、
検査対象の可動プローブピンが前記検出スイッチと接触した際の接点の開閉状態との関係で判別される接触圧の程度によりその良否判断を自在としたことを特徴とする可動プローブピンの接触圧検査機構。
With respect to an appropriate position within the movable range of the movable probe pin in the circuit board inspection apparatus having at least two or more movable probe pins that can freely move in three axial directions,
An energization circuit that is freely arranged to short-circuit or non-short-circuit between the movable probe pins when simultaneously brought into contact with different predetermined positions;
Among these movable probe pins, when at least one movable probe pin to be inspected contacts with a contact pressure larger than a predetermined contact pressure, the contact can be freely opened or closed and interposed in the energization circuit. And at least a detection switch,
Contact pressure inspection of a movable probe pin, wherein the quality of the movable probe pin can be determined by the degree of contact pressure determined by the relationship between the open / closed state of the contact when the movable probe pin to be inspected contacts the detection switch. mechanism.
前記通電回路は、非検査対象の可動プローブピンを接触させるための電極部を備えるダミー基板片と、同電極部と導通して検査対象の可動プローブピンが接触される前記検出スイッチとで形成した請求項1に記載の可動プローブピンの接触圧検査機構。The energization circuit is formed by a dummy substrate piece having an electrode part for contacting a non-inspection object movable probe pin and the detection switch that is electrically connected to the electrode part and in contact with the inspection object movable probe pin. The contact pressure inspection mechanism of the movable probe pin according to claim 1. 前記通電回路は、非検査対象の2本の可動プローブピンを各別に接触させるための一対の電極部を備えるダミー基板片と、一方の前記電極部から検査対象の1本の可動プローブピンが接触される前記検出スイッチを経て他方の前記電極部へと至る導電路とで形成した請求項1に記載の可動プローブピンの接触圧検査機構。In the energization circuit, a dummy substrate piece having a pair of electrode parts for bringing two movable probe pins to be inspected separately into contact with each other, and one movable probe pin to be inspected from one of the electrode parts. The contact pressure inspection mechanism of the movable probe pin according to claim 1, wherein the contact pressure inspection mechanism is formed by a conductive path that reaches the other electrode portion through the detection switch. 前記検出スイッチは常閉スイッチであり、検査対象であるすべての可動プローブピンの別に前記通電回路中に各別に介在配置させた請求項1に記載の可動プローブピンの接触圧検査機構。2. The movable probe pin contact pressure inspection mechanism according to claim 1, wherein the detection switch is a normally closed switch, and is arranged separately in the energization circuit separately from all the movable probe pins to be inspected. 3軸方向への移動が自在な少なくとも2本以上の可動プローブピンを備える回路基板検査装置の適位置に、各可動プローブピンを異なる所定位置に各別に接触させた際に各可動プローブピン相互が短絡または非短絡となる通電回路を設け、該通電回路には、検査対象である少なくとも1本の可動プローブピンが所定の接触圧よりも大きな接触圧で接触した際に接点が開成または閉成される検出スイッチを介在させ、検査対象の可動プローブピンを前記検出スイッチに接触させた際の接点の開閉状態との関係で判別される接触圧の程度によりその良否を判断することを特徴とする可動プローブピン接触圧検査方法。When each movable probe pin is brought into contact with a different predetermined position at an appropriate position of a circuit board inspection apparatus having at least two movable probe pins that can move in three axial directions, An energization circuit that is short-circuited or non-short-circuited is provided, and the contact is opened or closed when at least one movable probe pin to be inspected contacts with a contact pressure larger than a predetermined contact pressure. A movable switch characterized in that its quality is judged by the degree of contact pressure determined by the relationship between the open / closed state of the contact when the movable probe pin to be inspected is brought into contact with the detection switch. Probe pin contact pressure inspection method.
JP2003076892A 2003-03-20 2003-03-20 Contact pressure inspection mechanism and method of movable probe pin Expired - Fee Related JP4209707B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003076892A JP4209707B2 (en) 2003-03-20 2003-03-20 Contact pressure inspection mechanism and method of movable probe pin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003076892A JP4209707B2 (en) 2003-03-20 2003-03-20 Contact pressure inspection mechanism and method of movable probe pin

Publications (2)

Publication Number Publication Date
JP2004286497A JP2004286497A (en) 2004-10-14
JP4209707B2 true JP4209707B2 (en) 2009-01-14

Family

ID=33291799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003076892A Expired - Fee Related JP4209707B2 (en) 2003-03-20 2003-03-20 Contact pressure inspection mechanism and method of movable probe pin

Country Status (1)

Country Link
JP (1) JP4209707B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11733268B2 (en) 2018-12-17 2023-08-22 Kabushiki Kaisha Toshiba Probe pin inspection mechanism and inspection apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8901947B2 (en) 2012-09-28 2014-12-02 Electro Scientific Industries, Inc. Probe out-of-position sensing for automated test equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11733268B2 (en) 2018-12-17 2023-08-22 Kabushiki Kaisha Toshiba Probe pin inspection mechanism and inspection apparatus

Also Published As

Publication number Publication date
JP2004286497A (en) 2004-10-14

Similar Documents

Publication Publication Date Title
US4225819A (en) Circuit board contact contamination probe
US7274196B2 (en) Apparatus and method for testing electrical characteristics of semiconductor workpiece
JP4209707B2 (en) Contact pressure inspection mechanism and method of movable probe pin
JP6721302B2 (en) Double-sided circuit board inspection device
JP4607295B2 (en) Circuit board inspection equipment
JP4200182B2 (en) Circuit board inspection equipment
KR20050091013A (en) Adapter for testing conductor arrangements
KR101380375B1 (en) Probe unit for inspectinon of flat display pannel
JPH034179A (en) Electric testing method by contact probe
JP2005315775A (en) Four-terminal inspection method and four-terminal inspection jig using single-sided transfer probe
JP4097003B2 (en) Semiconductor chip package quality inspection method and apparatus
JP2007298498A (en) Method for reducing flaw when testing smd type passive element and test system
CN218445656U (en) Electric measuring mechanism for detecting terminal
KR102016504B1 (en) Jig for testing circuit board
JP3693353B2 (en) Electrical inspection machine for printed wiring boards
JPH0666832A (en) Probe and inspecting device
JP2014020815A (en) Substrate inspection device and substrate inspection method
JP4863786B2 (en) Contact test apparatus and contact test method
KR200247733Y1 (en) Socket device for probing chip
KR20050067759A (en) A semiconductor test device
JPH04131734A (en) Automatic trial connecting device for transformer
US6512390B1 (en) Detecting device for a switch matrix
JPH10185985A (en) Measuring jig, measuring device and measuring method for electric characteristic between terminals of wiring board
KR20050067760A (en) A semiconductor test device
JPH0427882A (en) Inspection device for circuit board and inspection method for its probe pin

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060317

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080131

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080220

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080417

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080924

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20081023

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111031

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111031

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131031

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees