JP4134314B2 - Method for producing conductive powder - Google Patents

Method for producing conductive powder Download PDF

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JP4134314B2
JP4134314B2 JP2002269084A JP2002269084A JP4134314B2 JP 4134314 B2 JP4134314 B2 JP 4134314B2 JP 2002269084 A JP2002269084 A JP 2002269084A JP 2002269084 A JP2002269084 A JP 2002269084A JP 4134314 B2 JP4134314 B2 JP 4134314B2
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value
trivalent element
powder
oxide
particles
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JP2004111106A (en
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剛聡 藤野
辰美 稲村
義史 堀川
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Dowa Electronics Materials Co Ltd
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Dowa Electronics Materials Co Ltd
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【0001】
【発明の属する技術分野】
本発明は、錫含有インジウム酸化物(Sn含有In酸化物と表す、また、ITOということがある。)及びその製造方法並びにそれを用いた導電性塗料及び導電性塗膜に関するものである。
【0002】
【従来の技術】
Sn含有In酸化物は、可視光に対する透過性と高い導電性を示すことから各種表示デバイスや太陽電池などの導電性膜として用いられている。
従来、これらの導電性膜の製法としては、1)スパッタ法によるもの、2)ITO粒子を塗布するもの、3)金属とITOの混合粒子を塗布するもの、などが挙げられる。
【0003】
これらのうち、導電性塗膜については、ITO粒子同士の接触により導電経路が形成されるため、この導電経路が得られやすい粒子の形状として、フレーク状、棒状、針状、板状等の粒子を用いることによって導電性を向上させることができるものであり、これらの種々の粒子形状を得る試みはこれまでもなされている(例えば、特許文献1、特許文献2、特許文献3、特許文献4参照。)。
【0004】
【特許文献1】
特開平7−232920号公報
【特許文献2】
特開平7−235214号公報
【特許文献3】
特開平8−217446号公報
【特許文献4】
特開平6−80422号公報
【0005】
【発明が解決しようとする課題】
しかしながら、上記の1)のスパッタ法によるものは導電性や透過率等の特性に優れているが、製造において真空装置等の高価な設備を必要としてコスト高となり、2)の粒子塗布法では導電性、透過率等の特性の改善は必ずしも十分ではなく、3)の混合粒子塗布法も上記特性が必ずしも十分ではなかった。
また、一般的に、上記の2)及び3)による導電性塗膜はブラウン管の電磁波シールド膜に利用されているが、上記の1)のスパッタ法による膜に比べてまだ導電性が低く、用途に限定があるのが実情である。
【0006】
さらに、導電性粉末粒子の形状のみの改善では、導電性は改善されるものの透過率等の光学特性を達成できず、特に散乱光が多く発生し、塗膜のヘイズ(直接透過光に対する拡散透過光の割合)が大きいという問題、あるいは逆に、透過率が十分であっても、導電性において不十分で電磁波シールド性に欠けるなどの問題があった。
【0007】
従って、本発明の目的とするところは、低コストの塗布型であって優れた導電性及び透過特性を有するSn含有In酸化物からなる導電性粉末及びその製造方法並びにそれを用いた導電性塗料及び導電性塗膜を提供することにある。
【0008】
【課題を解決するための手段】
上記の目的に対し、本発明者等は、鋭意研究の結果、In以外にも原子価が3価の元素を添加した錫含有インジウム水酸化物(Sn含有In水酸化物と表す。)を弱還元雰囲気で加熱処理(焼成ということがある。)したITO粒子によって、導電性及び透過特性を向上でき、上記の目的を達成できることを見出した。
【0009】
すなわち、本発明は、第1に、Sn含有In酸化物中にIn以外の3価元素を含有してなり且つIn、Sn及び該3価元素の総モル数に対してSnが0 . 5〜15モル%、該3価元素が0 . 01〜15モル%含有され、CIE 1976 L*a*b*色空間において明度指数L*値が25〜85であり、クロマティクネス指数a*値及びb*値がいずれも−1 . 0〜−40 . 0の青系色調を有する導電性粉末の製造にあたり、In、Sn及び前記3価元素を含有する酸性溶液にアルカリを添加して液温45℃以下で予備中和し、該予備中和された液にさらにアルカリを添加して液温50℃以上で中和することにより得られた沈殿を加熱処理することによって導電性粉末を製造する方法;第2に、Sn含有In酸化物中にIn以外の3価元素を含有してなり且つIn、Sn及び該3価元素の総モル数に対してSnが0 . 5〜15モル%、該3価元素が0 . 01〜15モル%含有され、CIE 1976 L*a*b*色空間において明度指数L*値が25〜85であり、クロマティクネス指数a*値及びb*値がいずれも−1 . 0〜−40 . 0の青系色調を有する導電性粉末の製造にあたり、InとSnを含有する酸性溶液にアルカリを添加して液温45℃以下で予備中和し、該予備中和された液にさらに前記3価元素とアルカリを添加して液温50℃以上で中和することにより得られた沈殿を加熱処理することによって導電性粉末を製造する方法;第3に、前記予備中和後液のpHが2〜3であり、前記中和後液のpHが7〜12である第1または2に記載の方法;第4に、Sn含有In酸化物中にIn以外の3価元素を含有してなり且つIn、Sn及び該3価元素の総モル数に対してSnが0 . 5〜15モル%、該3価元素が0 . 01〜15モル%含有され、CIE 1976 L*a*b*色空間において明度指数L*値が25〜85であり、クロマティクネス指数a*値及びb*値がいずれも−1 . 0〜−40 . 0の青系色調を有する導電性粉末の製造にあたり、アルカリに前記3価元素含有溶液及びInとSnを含有する酸性溶液を添加して液温10〜90℃で中和することにより得られた沈殿を加熱処理することによって導電性粉末を製造する方法;第5に、前記中和後液のpHが6〜12である第4記載の方法;第6に、前記加熱処理温度が300〜1000℃である第1〜5のいずれかに記載の方法を提供するものである。
【0010】
【発明の実施の形態】
本発明に係る導電性粉末は、In、Snさらには3価元素を含有するものであって、これらのIn、Sn及び3価元素の総モル数に対してSnが好ましくは0.5〜15モル%、更に好ましくは0.8〜10モル%含有される。Snの含有量が0.5モル%未満では導電性が低下し、一方、15モル%を超えるとやはり導電性が低下するからである。また、In、Sn及び3価元素の総モル数に対して3価元素が、元素の種類によってより好ましい範囲は異なるが、好ましくは0.01〜15モル%含有される。3価元素の含有量が0.01モル%未満では導電性が低下し、一方、15モル%を超えるとやはり導電性が低下するからである。ここで、本発明で用いられる3価元素としては、Inと同族のAl、Ga、Tl等でもよいし、希土類のY、La、Nd、Eu、Gd、Dy、Ho、Er、Yb等でも良いし、さらにはFe、BiやAu等でもよい。ただし、上記の3価元素を添加することで低抵抗化することや、元素の種類によって最適となるより好ましい添加範囲が異なること等の作用原理は今のところ不明である。
【0011】
本発明に係る導電性粉末の青系色調については、CIE(国際照明委員会)1976制定L*a*b*色空間(測定用光源C:色温度6774K)において明度指数L*値が好ましくは25〜85であり、更に好ましくは30〜80である。L*値が25未満では色が暗すぎ、一方、85を超えても不具合はないが事実上本発明の製造方法では実現できないからである。また、上記におけるクロマティクネス指数a*値 、b*値は好ましくはいずれも−1.0〜−40.0であり、更に好ましくはいずれも−2.5〜−30.0である。クロマティクネス指数a*値 、b*値が−1.0未満ではくすんだ色となり鮮やかさに欠けるからであり、一方、−40.0を超えても不具合はないが事実上本発明の製造方法では実現できないからである。
【0012】
なお、CIE 1976 L*a*b*色空間とは、国際照明委員会(CIE)が1976年にCIE XYZ表色系を変換し、表色系内の一定距離がどの色の領域でもほぼ知覚的に等歩度の差をもつように定めた色空間である。また、明度指数L*値、クロマティクネス指数a*値 、b*値は、CIE 1976 L*a*b*色空間内の直交座標系で定められる量であり、次の式(A)〜(C)で表される。
L*=116(Y/Y1/3−16 ・・・(A)
a*=500[(X/X1/3−(Y/Y1/3 ] ・・・(B)
b*=200[(Y/Y1/3−(Z/Z1/3 ] ・・・(C)
但し、X/X、Y/Y、Z/Z>0.008856であり、X、Y、Zは物体色の三刺激値であり、X、Y、Zは物体色を照明する光源の三刺激値でY=100に基準化されている。
【0013】
本発明の特徴的な導電性を有するITO粉は、3価元素とSnを含有するIn塩酸(硝酸、硫酸等でもよい。)溶液を出発溶液とし、これにNaOH、KOH、NHOH、またはNHHCO等のアルカリ液によって45℃以下の液温での予備中和を経て50℃以上まで昇温した後に時間をかけた中和処理を行い、Snと3価元素とを含有するIn水酸化物の沈殿を得て、この沈殿を大気中等で300℃以下の温度で予備焼成を行った後、または予備焼成を行うことなく、300〜1000℃の温度で加熱処理を行うことにより得ることができる。また、3価元素を最初から添加しておくことなく、例えば昇温後にアルカリ溶液と一緒に添加しても良い。あるいはまた、前記酸性溶液のアルカリ溶液による中和処理ではなく、アルカリ溶液に対して、3価元素を含有する溶液およびSnを含有するIn酸性溶液を、中間において特に昇温することなく10〜90℃の温度で添加する短時間の逆中和処理によってもよい。
【0014】
予備中和処理は反応液を45℃以下、好ましくは15〜45℃、さらに好ましくは15〜25℃のほぼ一定の温度に保持して行う。その反応後液は好ましくはpH2〜3とする。この予備中和処理は、微粒子核を生成させることを目的としている。これに引き続く中和処理は、30分〜2時間で前記反応後液を昇温して50℃以上、好ましくは80〜95℃になるように昇温して行い、前記の微粒子核を成長させて、棒状、針状または板状の水酸化物を生成させる。中和後液は好ましくはpH7〜12とする。予備中和の中和率(全In量を1とした場合の予備中和で沈殿するIn量の比率をいう。)、温度、pH等の条件により粒子形状を制御でき、また、予備中和時と中和時の温度域を調整することにより、所望の粒径、形状の水酸化物粒子を比較的均一に生成することができる。
【0015】
中和処理は予備中和処理より高温浴で行い、中和操作のみで50分以上、昇温時間を含むと2〜3時間を要するが、棒状、針状、または板状の粒子からなる水酸化物粉が得られ、これを焼成して導電性に優れた棒状、針状等の酸化物粒子が得られる。アルカリ液に酸性溶液を添加する中和法では中和時間は0.5〜15分の短時間で済むが、結晶粉は球状または粒状の粉体粒子となる。
【0016】
得られた3価元素とSnとを含有するIn水酸化物を焼成し、脱水分解、焼結を行うことによって、粒状、球状、棒状、針状またはこれらに類似した形状の酸化物粉末粒子を得ることができる。焼成雰囲気は、水蒸気を含有する不活性ガスまたは、水蒸気とアンモニア等還元性ガスを含有する不活性ガスによる弱還元性雰囲気とする。すなわち、水酸化物の脱水分解後の粒子は結晶性が悪く、結晶成長させないと導電性が低くなる。焼結を促進させるため、焼成雰囲気に水蒸気を添加すると共に導電性を高めるために還元性のアンモニアや水素ガスを含有させるのが望ましい。
【0017】
加熱処理温度は、水酸化物粒子のサイズ、形状、焼成雰囲気ガスに合わせて設定するが、加熱処理温度が高いほど、水蒸気が多い程、還元性が強い程、焼結が進み、得られる酸化物粒子の形状異方性が低くなる。焼成温度は300〜1000℃が好ましく、300〜700℃がさらに好ましい。上記の温度、雰囲気での焼成により水酸化物粒子の結晶化を進めて形状異方性を維持し、目的の酸化物粒子を得ることができる。ただし、300℃未満の温度では水酸化物の分解が不十分であり、1000℃を超えると水酸化物粒子の形状異方性を維持することが困難になると共に粒子間焼結による凝集が多くなり、分散性が低下する。
【0018】
焼成して得られる3価元素とSnを含有するIn酸化物粉末粒子は、好ましくは、長軸径が500nm以下、更に好ましくは200nm以下、短軸径が100nm以下、更に好ましくは50nm以下であって、針状、棒状または板状の形状を有する酸化物粉末粒子であり、長軸径/短軸径の軸比は1.5〜10が好ましく、3〜10がさらに好ましい。
また、球状ないし粒状の3価元素とSnを含有するIn酸化物粉末にあっては、粒径が200nm以下であることが好ましく、100nm以下が更に好ましい。
【0019】
3価元素とSnとを含有するIn酸化物粉末粒子の長軸径は、500nmを超えると、可視光の散乱が発生し、透過率等の光学特性が低下する。特に長軸径が200nm以下では可視光の散乱が一層抑制される。また、短軸径は100nmを超えると、粒子同士の接触度が低く、塗膜導電性が低くなるので100nm以下とする。特に、短軸径50nm以下では塗膜導電性が一層向上する。長軸径と短軸径との軸比が1.5〜10の範囲を外れると導電性、分散性、粒子内結晶性が低下する。球状ないし粒状の3価元素とSnを含有するIn酸化物粉末粒子にあっては、粒子同士の接触度の点から抵抗値が増すおそれがあり、特に径は200nm以下とし、好ましくは100nm以下とする。X線回折による(222)面の半価幅より算出した好ましい結晶子径Dx は導電性の点から、150Å以上であることが好ましい。
【0020】
上記の3価元素とSnとを含有するIn酸化物粉を溶媒中に分散させて塗料化し、塗布後に溶媒を揮発させて膜を固定することにより、透過性の高い、導電性の塗膜を得ることができる。塗料化の方法は、公知の方法を使用することができ、溶媒としては、アルコール、ケトン、エーテル等の有機溶媒、分散剤として界面活性剤、カップリング剤等を添加し、ビーズミル等の分散装置を用いて分散させる。また、バインダーとなる結合剤を添加するか、塗布成膜後にバインダーを成膜して固定してもよい。
【0021】
【実施例】
以下に実施例によって本発明をさらに詳細に説明するが、本発明の技術的範囲はこれらの記載に限定されないことはいうまでもない。
【0022】
〔実施例1〕 Inを18wt%含む塩酸溶液200gを純水で2.9Lとし、さらに塩化第2錫5.4g、および硝酸アルミニウム・9水和物1.5gを混合溶液として出発溶液の酸性溶液としガラスビーカーに仕込んだ。48%NaOH溶液108.2gを純水890gで希釈し、このアルカリ溶液を上記酸性溶液に添加する。まず、はじめに液温20℃の酸性溶液にアルカリ溶液を15分間添加してpH3に予備中和する。ついで液温を90℃まで昇温し残りのアルカリ溶液を40分間かけて添加する。最終のpHは10.0であった。これをろ過、脱水、乾燥してSn、Al含有In水酸化物の沈殿を得た。このSn、Al含有In水酸化物の透過型電子顕微鏡写真(TEM写真という。)を図−1に示す。この水酸化物粉末粒子の長軸径は181.42nm、短軸径は33.73nm、長軸径/短軸径の比は5.4であった。
【0023】
次いで、このSn、Al含有In水酸化物を管状炉に入れ、1.5vol.%の水蒸気と0.05vol.%のNHガスとを含有するNガスの雰囲気中で600℃にて2時間焼成した。この得られたSn、Al含有In酸化物粉末粒子は、図−2のTEM写真に示されるものであって、長軸径は150.16nm、短軸径は33.36nm、長軸径/短軸径の比は4.50の棒状粒子であった。なお、長軸径、短軸径の求め方としては、TEM写真中の50個の粒子の長軸径、短軸径をノギスで実測して、倍率換算しその平均値を求めた。更に軸比は前記の長軸径と短軸径の比率より算出した。この得られたSn、Al含有In酸化物粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が72.93、クロマティクネス指数a*値が−8.46およびb*値が−9.67の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ22.5m/gであった。また結晶子径Dは180Åであった。
【0024】
この粉末6gと溶剤(エタノール)18g及び分散剤としてアニオン系界面活性剤0.3gを遊星ボールミル(フリッチェ製P−5型、容器容量80mL、PSZ0.3mmボール)に入れ、回転数300rpmで30分間回転させて、この分散液にコロイダルシリカとエタノールを加えて、ITO粉末の含有量が2%、シリカ含有量が2%、残部がエタノールである塗料を作成し、ガラス板にスピンコートした後、200℃で30分間乾燥し、膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値が1.40kΩ/□であった。また分光光度計にて透過率を測定したところ透過率は98.9%であり、良好な透明導電性膜が得られた。
【0025】
〔実施例2〕 25%アンモニア水550gを純水1790gで希釈して出発溶液のアルカリ溶液とし、ガラスビーカーに仕込んだ。Inを18wt%含む塩酸溶液800gを純水で1.5Lとし、さらにSnCl・5HO 21.19g、および塩化金酸・四水和物 0.70775gを混合溶液として、50℃に温度調節したこの酸性溶液を50℃に温度調節した上記アルカリ性溶液に添加した。最終のpHは9.0であった。これを濾過、脱水、乾燥してAu、Sn含有In水酸化物の沈殿を得た。
【0026】
次いで、このAu、Sn含有In水酸化物を管状炉に入れ、1.5vol.%水蒸気と0.05vol.%のNHガスとを含有するNガスの雰囲気中で600℃にて2時間焼成した。この得られた平均径45nmの球状のAu、Sn含有In酸化物粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が59.67、クロマティクネス指数a*値が−2.94およびb*値が−12.53の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ26.0m/gであった。また結晶子径Dxは240Åであった。
【0027】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.59kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は97.29%であり、良好な透明導電性膜が得られた。
【0028】
〔実施例3〕 塩化金酸に代えて酸化ビスマス3.5gを添加した以外は実施例2と同様の条件で処理してBi、Sn含有In水酸化物を得た。次いで、実施例2と同様の焼成を行ってBi、Sn含有In酸化物粉を得た。得られたBi、Sn含有In酸化物粉は平均粒径が45nmの粒状粉であった。この得られた粒状のBi、Sn含有In酸化物粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が63.54、クロマティクネス指数a*値が−7.59およびb*値が−7.21の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ27.5m/gであった。また結晶子径Dxは221Åであった。
【0029】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗を測定したところ、抵抗値は2.43kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は96.28%であり、良好な透明導電性膜が得られた。
【0030】
〔実施例4〕 硝酸アルミニウムに代えて酸化鉄(Fe)0.14gを添加した以外は実施例1と同様の条件で処理してSn、Fe含有In水酸化物を得た。次いで、実施例1と同様の焼成を行ってSn、Fe含有In酸化物粉を得た。この得られたSn、Fe含有In酸化物粉末粒子は長軸径が141.6nm、短軸径は32.07nm、長軸径/短軸径の比は4.42の棒状粒子であり、CIE制定(1976)のL*a*b*色空間で明度指数L*値が69.85、クロマティクネス指数a*値が−4.42およびb*値が−8.16の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ20.3m/gであった。また結晶子径Dxは205Åであった。
【0031】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.70kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は93.29%であり、良好な透明導電性膜が得られた。
【0032】
〔実施例5〕 塩化インジウム溶液に代えて100g/Lのインジウムを含む硝酸インジウム溶液400mLを使用し、硝酸アルミニウムに代えて酸化タリウム0.45gを添加した以外は実施例1と同様の条件で処理してSn、Tl含有In水酸化物を得た。次いで、実施例1と同様の焼成を行ってSn、Tl含有In酸化物粉を得た。この得られたSn、Tl含有In酸化物粉末粒子は長軸径が232.23nm、短軸径は59.05nm、長軸径/短軸径の比は3.93の棒状粒子であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が66.02、クロマティクネス指数a*値が−6.96およびb*値が−7.11の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ18.7m/gであった。また結晶子径Dxは162Åであった。
【0033】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.83kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は92.09%であり、良好な透明導電性膜が得られた。
【0034】
〔実施例6〕 硝酸アルミニウムに代えて酸化ネオジム0.2gを添加した以外は実施例1と同様の条件で処理してSn、Nd含有In水酸化物を得た。次いで、実施例1と同様の焼成を行ってSn、Nd含有In酸化物粉を得た。この得られたSn、Nd含有In酸化物粉末粒子は長軸径が117.7nm、短軸径は36.91nm、長軸径/短軸径の比は3.19の棒状粒子であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が72.29、クロマティクネス指数a*値が−7.64およびb*値が−9.92の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ23.2m/gであった。また結晶子径Dxは181Åであった。
【0035】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.99kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は98.25%であり、良好な透明導電性膜が得られた。
【0036】
〔実施例7〕 硝酸アルミニウムを0.65gに減らす代わりに酸化鉄を0.15g添加した以外は実施例1と同様の条件で処理してAl、Fe、Sn含有In水酸化物を得た。次いで、実施例1と同様の焼成を行ってAl、Fe、Sn含有In酸化物粉を得た。この得られたSn、Al、Fe含有In酸化物粉末粒子は長軸径が145.88nm、短軸径は32.72nm、長軸径/短軸径の比は4.45の棒状粒子であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が72.80、クロマティクネス指数a*値が−4.32およびb*値が−6.69の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ24.5m/gであった。また結晶子径Dxは172Åであった。
【0037】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.59kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は96.01%であり、良好な透明導電性膜が得られた。
【0038】
〔実施例8〕 硝酸アルミニウムの代わりにアルミン酸ナトリウムを用い、アルミン酸ナトリウムを溶かしたアルカリ溶液により中和した以外は実施例1と同様の条件で処理してSn、Al含有In水酸化物を得た。次いで、実施例1と同様の焼成を行ってSn、Al含有In酸化物粉を得た。この得られたSn、Al含有In酸化物粉末粒子については長軸径が143.07nm、短軸径が37.20nm、長軸径/短軸径の比が3.85の棒状粒子であった。この粒子については、CIE制定(1976)のL*a*b*色空間で明度指数L*値が70.41、クロマティクネス指数a*値が−8.05およびb*値が−11.75の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ21.93m/gであった。また結晶子径Dxは190Åであった。
【0039】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.78kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は95.27%であり、良好な透明導電性膜が得られた。
【0040】
〔実施例9〕 硝酸アルミニウムに代えて塩化イットリウム6水和物0.55gを添加した以外は実施例1と同様の条件で処理してSn、Y含有In水酸化物を得た。次いで、実施例1と同様の焼成を行ってSn、Y含有In酸化物粉を得た。この得られたSn、Y含有In酸化物粉末粒子は長軸径が133.41nm、短軸径は32.28nm、長軸径/短軸径の比は4.13の棒状粒子であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が75.22、クロマティクネス指数a*値が−7.53およびb*値が−7.17の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ23.56m/gであった。また結晶子径Dxは198Åであった。
【0041】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は1.83kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は98.23%であり、良好な透明導電性膜が得られた。
【0042】
〔実施例10〕 塩化金酸に代えて硝酸アルミニウム・9水和物2.7gを添加した以外は実施例2と同様の条件で処理してSn、Al含有In水酸化物を得た。次いで、実施例2と同様の焼成を行ってSn、Al含有In酸化物粉を得た。得られたSn、Al含有In酸化物粉は平均粒径が45nmの粒状粉であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が66.59、クロマティクネス指数a*値が−8.87およびb*値が−11.89の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ29.0m/gであった。また結晶子径Dxは207Åであった。
【0043】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は2.38kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は96.41%であり、良好な透明導電性膜が得られた。
【0044】
〔比較例1〕 In以外の3価元素を添加しない以外は、実施例1と同様の条件で、塩酸酸性溶液を用意し、この塩酸酸性溶液にアルカリ溶液を添加し予備中和後、液温をあげて中和を行い、濾過、脱水、乾燥してSn含有In水酸化物を得た。このSn含有In水酸化物のTEM写真を図3に示した。
【0045】
次いで、実施例1と同様の条件で、このSn含有In水酸化物を焼成し、Sn含有In酸化物を得た。このSn含有In酸化物のTEM写真を図4に示した。このSn含有In酸化物は長軸径が156.66nm、短軸径が40.70nm、軸比が3.85の針状粒子であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が76.82、クロマティクネス指数a*値が−8.27およびb*値が−4.05の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ23.7m/gであった。また結晶子径Dxは214Åであった。
【0046】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は3.67kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は97.20%であった。このIn以外の3価元素の添加がないこの比較例1のSn含有In酸化物粉の場合の塗膜では顕著に高い抵抗値を示した。
【0047】
〔比較例2〕 硝酸アルミニウムに代えて塩化パラジウム0.35gを添加した以外は、実施例1と同様の条件で、塩酸酸性溶液を用意し、この塩酸酸性溶液にアルカリ溶液を添加し予備中和後、液温をあげて中和を行い、濾過、脱水、乾燥してPd、Sn含有In水酸化物を得た。このPd、Sn含有In水酸化物のTEM写真を図5に示した。
【0048】
次いで、実施例1と同様の条件で、このPd、Sn含有In水酸化物を焼成し、Pd、Sn含有In酸化物を得た。このPd、Sn含有In酸化物のTEM写真を図6に示した。
このPd、Sn含有In酸化物粉末粒子は水酸化物の針状を保持せず長軸径が45.99nm、短軸径が30.77nm、軸比が1.49の粒状であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が53.60、クロマティクネス指数a*値が−3.58およびb*値が−5.62の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ20.5m/gであった。また結晶子径Dxは232Åであった。
【0049】
このPd、Sn含有In酸化物粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は6.43kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は92.23%であった。このIn以外の3価元素の添加がなく、2価であるパラジウムを添加したこの比較例2のPd、Sn含有In酸化物粉の場合の塗膜では顕著に高い抵抗値を示した。
【0050】
〔比較例3〕 In以外の3価元素を添加しない以外は実施例2と同様の条件で処理してSn含有In水酸化物を得た。次いで、実施例2と同様の焼成を行ってSn含有In酸化物粉を得た。得られたSn含有In酸化物粉末粒子は平均粒径が45nmの粒状であった。この粒子は、CIE制定(1976)のL*a*b*色空間で明度指数L*値が66.53、クロマティクネス指数a*値が−7.43およびb*値が−11.8の青系色調を有していた。得られた粉体の比表面積をBET1点法にて測定したところ28.0m/gであった。また結晶子径Dxは240Åであった。
【0051】
この粉末を用いて実施例1と同様にして膜厚0.3μmの透明導電性膜を作成した。作成した膜の抵抗値を測定したところ、抵抗値は4.81kΩ/□であった。また分光光度計にて透過率を測定したところ、透過率は97.02%であった。このIn以外の3価元素を含有しないこの比較例3のSn含有In酸化物粉の場合の塗膜では顕著に高い抵抗値を示した。
【0052】
【発明の効果】
本発明によれば、In以外の3価元素を含有するSn含有In水酸化物を弱還元雰囲気等で焼成を行うという効率的な製法により、抵抗値が低く透過率に優れた、3価元素を含有するSn含有In酸化物粉末(ITO粉末)並びに導電性塗料及び導電性塗膜を得ることができるという効果を奏する。
【図面の簡単な説明】
【図1】実施例1におけるAl、Sn含有In水酸化物粉のTEM写真である。
【図2】図1のAl、Sn含有In水酸化物粉を焼成して得られたAl、Sn含有In酸化物粉のTEM写真である。
【図3】比較例1におけるSn含有In水酸化物粉のTEM写真である。
【図4】図3のSn含有In水酸化物粉を焼成して得られたSn含有In酸化物粉のTEM写真である。
【図5】比較例2におけるPd、Sn含有In水酸化物粉のTEM写真である。
【図6】図5のPd、Sn含有In水酸化物粉を焼成して得られたPd、Sn含有In酸化物粉のTEM写真である。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a tin-containing indium oxide (represented as Sn-containing In oxide, sometimes referred to as ITO), a method for producing the same, and a conductive paint and a conductive coating film using the same.
[0002]
[Prior art]
Sn-containing In oxides are used as conductive films for various display devices, solar cells, and the like because of their transparency to visible light and high conductivity.
Conventionally, methods for producing these conductive films include 1) those by sputtering, 2) those that apply ITO particles, and 3) those that apply mixed particles of metal and ITO.
[0003]
Among these, for the conductive coating film, a conductive path is formed by contact between ITO particles. Therefore, the shape of the particles that can easily obtain this conductive path is, for example, particles such as flakes, rods, needles, and plates. Thus, it is possible to improve the conductivity, and attempts to obtain these various particle shapes have been made (for example, Patent Document 1, Patent Document 2, Patent Document 3, and Patent Document 4). reference.).
[0004]
[Patent Document 1]
Japanese Patent Laid-Open No. 7-232920
[Patent Document 2]
JP 7-235214 A
[Patent Document 3]
JP-A-8-217446
[Patent Document 4]
Japanese Patent Laid-Open No. 6-80422
[0005]
[Problems to be solved by the invention]
However, the sputtering method of 1) above is excellent in properties such as conductivity and transmittance, but it requires expensive equipment such as a vacuum device in the manufacturing process, resulting in high cost. Improvements in properties such as properties and transmittance were not always sufficient, and the above-mentioned properties were not necessarily sufficient in the mixed particle coating method of 3).
In general, the conductive coating film according to the above 2) and 3) is used for an electromagnetic wave shielding film of a cathode ray tube, but its conductivity is still lower than that of the film obtained by the sputtering method of the above 1). The fact is that there is a limitation.
[0006]
Furthermore, the improvement in the shape of the conductive powder particles alone improves the electrical conductivity, but cannot achieve optical properties such as transmittance. In particular, a lot of scattered light is generated, and the haze of the coating film (diffuse transmission of direct transmitted light). There is a problem that the ratio of light) is large, or conversely, even if the transmittance is sufficient, there are problems such as insufficient conductivity and lack of electromagnetic shielding properties.
[0007]
Accordingly, an object of the present invention is to provide a conductive powder comprising a Sn-containing In oxide having a low-cost coating type and excellent conductivity and transmission characteristics, a method for producing the same, and a conductive paint using the same. And providing a conductive coating film.
[0008]
[Means for Solving the Problems]
As a result of intensive studies, the present inventors have weakened tin-containing indium hydroxide (indicated as Sn-containing In hydroxide) in which a trivalent element other than In is added. It has been found that the ITO particles subjected to heat treatment (sometimes referred to as firing) in a reducing atmosphere can improve conductivity and transmission characteristics and achieve the above-mentioned object.
[0009]
  That is, the present invention firstly,The Sn-containing In oxide contains a trivalent element other than In, and Sn is 0 with respect to the total number of moles of In, Sn, and the trivalent element. . 5 to 15 mol%, the trivalent element is 0 . In the CIE 1976 L * a * b * color space, the lightness index L * value is 25 to 85, and both the chromaticness index a * value and b * value are −1. . 0 to -40 . In the production of conductive powder having a blue color tone of 0In addition, an alkali is added to the acidic solution containing In, Sn and the trivalent element and pre-neutralized at a liquid temperature of 45 ° C. or lower, and an alkali is further added to the pre-neutralized liquid to a liquid temperature of 50 ° C. or higher. A method for producing a conductive powder by heat-treating a precipitate obtained by neutralization with a second;The Sn-containing In oxide contains a trivalent element other than In, and Sn is 0 with respect to the total number of moles of In, Sn, and the trivalent element. . 5 to 15 mol%, the trivalent element is 0 . In the CIE 1976 L * a * b * color space, the lightness index L * value is 25 to 85, and both the chromaticness index a * value and b * value are −1. . 0 to -40 . In the production of conductive powder having a blue color tone of 0Then, an alkali is added to an acidic solution containing In and Sn and pre-neutralized at a liquid temperature of 45 ° C. or lower, and the trivalent element and alkali are further added to the pre-neutralized liquid to a liquid temperature of 50 ° C. or higher. A method for producing a conductive powder by heat-treating a precipitate obtained by neutralization with a third; third, the pH of the pre-neutralized solution is 2-3, and the pH of the post-neutralized solution Is 7-12As described in the first or secondMethod; Fourth,The Sn-containing In oxide contains a trivalent element other than In, and Sn is 0 with respect to the total number of moles of In, Sn, and the trivalent element. . 5 to 15 mol%, the trivalent element is 0 . In the CIE 1976 L * a * b * color space, the lightness index L * value is 25 to 85, and both the chromaticness index a * value and b * value are −1. . 0 to -40 . In the production of conductive powder having a blue color tone of 0The conductive powder is produced by heating the precipitate obtained by adding the trivalent element-containing solution and the acidic solution containing In and Sn to the alkali and neutralizing at a liquid temperature of 10 to 90 ° C. Method: Fifth, the pH of the solution after neutralization is 6-124th describedMethod; Sixth, the heat treatment temperature is 300 to 1000 ° C.Any one of 1-5A method is provided.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
The conductive powder according to the present invention contains In, Sn, and further a trivalent element, and Sn is preferably 0.5 to 15 with respect to the total number of moles of these In, Sn, and trivalent elements. It is contained in mol%, more preferably 0.8 to 10 mol%. This is because if the Sn content is less than 0.5 mol%, the conductivity is lowered, while if it exceeds 15 mol%, the conductivity is also lowered. Further, the trivalent element is preferably contained in an amount of 0.01 to 15 mol% with respect to the total number of moles of In, Sn, and trivalent elements, although the more preferable range varies depending on the type of element. This is because if the content of the trivalent element is less than 0.01 mol%, the conductivity is lowered, while if it exceeds 15 mol%, the conductivity is also lowered. Here, the trivalent element used in the present invention may be Al, Ga, Tl or the like of the same group as In, or may be rare earth Y, La, Nd, Eu, Gd, Dy, Ho, Er, Yb, or the like. Furthermore, Fe, Bi, Au, or the like may be used. However, the principle of action, such as lowering the resistance by adding the above-mentioned trivalent elements and the more preferable addition range that is optimal depending on the type of the element, is unclear at present.
[0011]
For the blue color tone of the conductive powder according to the present invention, the lightness index L * value is preferably in the CIE (International Lighting Commission) 1976 established L * a * b * color space (measurement light source C: color temperature 6774K). It is 25-85, More preferably, it is 30-80. If the L * value is less than 25, the color is too dark. On the other hand, if it exceeds 85, there is no problem, but it is practically impossible to achieve with the manufacturing method of the present invention. In addition, the chromaticness index a * value and b * value in the above are preferably both −1.0 to −40.0, and more preferably −2.5 to −30.0. This is because when the chromaticness index a * value and b * value are less than −1.0, the color becomes dull and lacks vividness. This is because it cannot be realized.
[0012]
The CIE 1976 L * a * b * color space is a CIE XYZ color system converted by the International Commission on Illumination (CIE) in 1976, and a constant distance within the color system is almost perceived by any color region. The color space is determined so as to have a uniform rate difference. Further, the lightness index L * value, chromaticness index a * value, and b * value are quantities determined by an orthogonal coordinate system in the CIE 1976 L * a * b * color space, and the following formulas (A) to ( C).
L * = 116 (Y / Y0)1/3-16 (A)
a * = 500 [(X / X0)1/3-(Y / Y0)1/3  ] (B)
b * = 200 [(Y / Y0)1/3-(Z / Z0)1/3  ] (C)
However, X / X0, Y / Y0, Z / Z0> 0.008856, X, Y, Z are tristimulus values of the object color, X0, Y0, Z0Is the tristimulus value of the light source that illuminates the object color.0= 100.
[0013]
The characteristically conductive ITO powder of the present invention is a solution of In hydrochloric acid (nitric acid, sulfuric acid, etc.) containing a trivalent element and Sn as a starting solution, and NaOH, KOH, NH.4OH or NH4HCO3Of the In hydroxide containing Sn and the trivalent element by performing a neutralization treatment over time after the temperature was raised to 50 ° C. or higher after preliminary neutralization at a liquid temperature of 45 ° C. or less with an alkali solution such as After obtaining a precipitate and pre-baking the precipitate at a temperature of 300 ° C. or lower in the air or the like, or without performing pre-baking, the precipitate can be obtained by performing a heat treatment at a temperature of 300 to 1000 ° C. Further, without adding the trivalent element from the beginning, for example, it may be added together with the alkaline solution after the temperature rise. Alternatively, the acidic solution is not neutralized with an alkaline solution, but a solution containing a trivalent element and an In acidic solution containing Sn are not particularly heated in the middle of the alkaline solution. A short-time reverse neutralization treatment at a temperature of 0 ° C. may be used.
[0014]
The pre-neutralization treatment is performed while maintaining the reaction solution at a substantially constant temperature of 45 ° C. or lower, preferably 15 to 45 ° C., more preferably 15 to 25 ° C. The post-reaction solution is preferably pH 2-3. This preneutralization treatment is intended to generate fine particle nuclei. Subsequent neutralization treatment is performed by raising the temperature of the post-reaction solution in 30 minutes to 2 hours and raising the temperature to 50 ° C. or higher, preferably 80 to 95 ° C. to grow the fine particle nuclei. Thus, a rod-like, needle-like or plate-like hydroxide is produced. The neutralized solution is preferably pH 7-12. Pre-neutralization neutralization rate (the ratio of the amount of In precipitated by pre-neutralization when the total In amount is 1), temperature, pH, etc. can control the particle shape, and pre-neutralization By adjusting the time zone and the temperature range during neutralization, hydroxide particles having a desired particle size and shape can be produced relatively uniformly.
[0015]
Neutralization treatment is performed in a higher temperature bath than pre-neutralization treatment, and it takes 50 minutes or more only by neutralization operation, and takes 2-3 hours when the temperature rise time is included, but water consisting of rod-like, needle-like or plate-like particles Oxide powder is obtained, and this is fired to obtain rod-like, needle-like oxide particles having excellent conductivity. In the neutralization method in which an acidic solution is added to the alkaline solution, the neutralization time is a short time of 0.5 to 15 minutes, but the crystal powder becomes spherical or granular powder particles.
[0016]
The obtained In hydroxide containing the trivalent element and Sn is fired, dehydrated and decomposed, and sintered to obtain granular, spherical, rod-like, needle-like or similar oxide powder particles. Obtainable. The firing atmosphere is a weak reducing atmosphere with an inert gas containing water vapor or an inert gas containing water and a reducing gas such as ammonia. That is, the particles after the dehydration decomposition of the hydroxide have poor crystallinity, and the conductivity becomes low unless the crystals are grown. In order to promote the sintering, it is desirable to add water vapor to the firing atmosphere and to contain reducing ammonia or hydrogen gas in order to increase the conductivity.
[0017]
The heat treatment temperature is set according to the size, shape, and firing atmosphere gas of the hydroxide particles, but the higher the heat treatment temperature, the more water vapor, the stronger the reducing property, the more the sintering proceeds, and the resulting oxidation The shape anisotropy of the product particles is lowered. The firing temperature is preferably 300 to 1000 ° C, more preferably 300 to 700 ° C. Crystallization of the hydroxide particles can be promoted by firing at the above temperature and atmosphere to maintain the shape anisotropy, and the desired oxide particles can be obtained. However, decomposition of the hydroxide is insufficient at temperatures below 300 ° C., and when it exceeds 1000 ° C., it becomes difficult to maintain the shape anisotropy of the hydroxide particles, and there is much aggregation due to interparticle sintering. Thus, dispersibility is reduced.
[0018]
The In oxide powder particles containing trivalent elements and Sn obtained by firing preferably have a major axis diameter of 500 nm or less, more preferably 200 nm or less, and a minor axis diameter of 100 nm or less, more preferably 50 nm or less. Thus, the oxide powder particles have a needle-like, rod-like or plate-like shape, and the major axis / minor axis diameter ratio is preferably 1.5 to 10, and more preferably 3 to 10.
Further, in the In oxide powder containing spherical or granular trivalent elements and Sn, the particle diameter is preferably 200 nm or less, and more preferably 100 nm or less.
[0019]
When the long axis diameter of the In oxide powder particles containing the trivalent element and Sn exceeds 500 nm, visible light scattering occurs, and optical characteristics such as transmittance deteriorate. In particular, when the major axis diameter is 200 nm or less, the scattering of visible light is further suppressed. On the other hand, if the minor axis diameter exceeds 100 nm, the degree of contact between the particles is low, and the coating film conductivity is low. In particular, when the minor axis diameter is 50 nm or less, the coating film conductivity is further improved. When the axial ratio of the major axis diameter to the minor axis diameter is out of the range of 1.5 to 10, the conductivity, dispersibility, and intra-crystallinity are deteriorated. In the case of In oxide powder particles containing spherical or granular trivalent elements and Sn, the resistance value may increase in terms of the degree of contact between the particles. In particular, the diameter is 200 nm or less, preferably 100 nm or less. To do. The preferable crystallite diameter Dx calculated from the half width of the (222) plane by X-ray diffraction is preferably 150 mm or more from the viewpoint of conductivity.
[0020]
In oxide powder containing the above trivalent element and Sn is dispersed in a solvent to form a paint, and after coating, the solvent is volatilized to fix the film, thereby forming a highly permeable, conductive coating film. Obtainable. A known method can be used as a coating method. As a solvent, an organic solvent such as alcohol, ketone or ether, a surfactant, a coupling agent or the like as a dispersant is added, and a dispersing device such as a bead mill. Use to disperse. Further, a binder serving as a binder may be added, or a binder may be formed and fixed after coating film formation.
[0021]
【Example】
EXAMPLES The present invention will be described in more detail with reference to the following examples, but it goes without saying that the technical scope of the present invention is not limited to these descriptions.
[0022]
[Example 1] 200 g of a hydrochloric acid solution containing 18 wt% of In was made 2.9 L with pure water, and 5.4 g of stannic chloride and 1.5 g of aluminum nitrate. The solution was placed in a glass beaker. 108.2 g of 48% NaOH solution is diluted with 890 g of pure water, and this alkaline solution is added to the acidic solution. First, an alkaline solution is first added to an acidic solution having a liquid temperature of 20 ° C. for 15 minutes to pre-neutralize to pH 3. Next, the liquid temperature is raised to 90 ° C., and the remaining alkali solution is added over 40 minutes. The final pH was 10.0. This was filtered, dehydrated and dried to obtain a precipitate of Sn and Al-containing In hydroxide. A transmission electron micrograph (referred to as a TEM photograph) of this Sn, Al-containing In hydroxide is shown in FIG. The major axis diameter of the hydroxide powder particles was 181.42 nm, the minor axis diameter was 33.73 nm, and the ratio of major axis diameter / minor axis diameter was 5.4.
[0023]
Next, this Sn, Al-containing In hydroxide was put in a tubular furnace, and 1.5 vol. % Water vapor and 0.05 vol. % NH3N containing gas2Firing was performed at 600 ° C. for 2 hours in a gas atmosphere. The obtained Sn and Al-containing In oxide powder particles are those shown in the TEM photograph of FIG. 2. The major axis diameter is 150.16 nm, the minor axis diameter is 33.36 nm, and the major axis diameter / short. The shaft diameter ratio was 4.50. The major axis diameter and minor axis diameter were obtained by measuring the major axis diameter and minor axis diameter of 50 particles in the TEM photograph with calipers, and converting the magnification to obtain the average value. Further, the axial ratio was calculated from the ratio of the major axis diameter to the minor axis diameter. The obtained Sn and Al-containing In oxide particles have a lightness index L * value of 72.93 and a chromaticness index a * value of −8.46 in the L * a * b * color space defined by CIE (1976). And b * value had a blue color tone of −9.67. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 22.5 m.2/ G. Crystallite diameter DxWas 180cm.
[0024]
6 g of this powder, 18 g of a solvent (ethanol) and 0.3 g of an anionic surfactant as a dispersing agent are placed in a planetary ball mill (Fricche P-5 type, container capacity 80 mL, PSZ 0.3 mm ball) for 30 minutes at a rotation speed of 300 rpm. Rotate, add colloidal silica and ethanol to this dispersion, create a paint with an ITO powder content of 2%, a silica content of 2% and the balance ethanol, and spin coat on a glass plate, The film was dried at 200 ° C. for 30 minutes to produce a transparent conductive film having a thickness of 0.3 μm. When the resistance value of the prepared film was measured, the resistance value was 1.40 kΩ / □. When the transmittance was measured with a spectrophotometer, the transmittance was 98.9%, and a good transparent conductive film was obtained.
[0025]
[Example 2] 550 g of 25% aqueous ammonia was diluted with 1790 g of pure water to obtain an alkaline solution as a starting solution, and charged into a glass beaker. 800 g of hydrochloric acid solution containing 18 wt% In is made 1.5 L with pure water, and SnCl4・ 5H221.19 g of O and 0.70775 g of chloroauric acid tetrahydrate were added as a mixed solution to the alkaline solution adjusted to 50 ° C. and added to the alkaline solution adjusted to 50 ° C. The final pH was 9.0. This was filtered, dehydrated and dried to obtain a precipitate of Au and Sn-containing In hydroxide.
[0026]
Next, this Au, Sn-containing In hydroxide was put in a tubular furnace, and 1.5 vol. % Water vapor and 0.05 vol. % NH3N containing gas2Firing was performed at 600 ° C. for 2 hours in a gas atmosphere. The resulting spherical Au, Sn-containing In oxide particles having an average diameter of 45 nm have a lightness index L * value of 59.67 and a chromaticness index a * in the L * a * b * color space defined by CIE (1976). It had a blue hue with a value of -2.94 and a b * value of -12.53. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 26.0 m.2/ G. The crystallite diameter Dx was 240 mm.
[0027]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 1.59 kΩ / □. When the transmittance was measured with a spectrophotometer, the transmittance was 97.29%, and a good transparent conductive film was obtained.
[0028]
[Example 3] Bi and Sn-containing In hydroxides were obtained by treating under the same conditions as in Example 2 except that 3.5 g of bismuth oxide was added instead of chloroauric acid. Subsequently, the same baking as in Example 2 was performed to obtain a Bi and Sn-containing In oxide powder. The obtained Bi and Sn-containing In oxide powder was a granular powder having an average particle diameter of 45 nm. The obtained granular Bi, Sn-containing In oxide particles have a lightness index L * value of 63.54 and a chromaticness index a * value of −7 in the CIE established (1976) L * a * b * color space. It had a blue hue with a .59 and b * value of -7.21. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 27.5 m.2/ G. The crystallite diameter Dx was 221 mm.
[0029]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance of the prepared film was measured, the resistance value was 2.43 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 96.28%, and a good transparent conductive film was obtained.
[0030]
[Example 4] Instead of aluminum nitrate, iron oxide (Fe2O3) A Sn and Fe-containing In hydroxide was obtained under the same conditions as in Example 1 except that 0.14 g was added. Subsequently, the same baking as Example 1 was performed and Sn and Fe containing In oxide powder were obtained. The obtained Sn, Fe-containing In oxide powder particles are rod-like particles having a major axis diameter of 141.6 nm, a minor axis diameter of 32.07 nm, and a major axis / minor axis ratio of 4.42. In the established (1976) L * a * b * color space, the lightness index L * value is 69.85, the chromaticness index a * value is -4.42, and the b * value is -8.16. Was. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 20.3 m.2/ G. The crystallite diameter Dx was 205 mm.
[0031]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 1.70 kΩ / □. When the transmittance was measured with a spectrophotometer, the transmittance was 93.29%, and a good transparent conductive film was obtained.
[0032]
[Example 5] Treatment was performed under the same conditions as in Example 1 except that 400 mL of indium nitrate solution containing 100 g / L indium was used instead of indium chloride solution, and 0.45 g of thallium oxide was added instead of aluminum nitrate. As a result, an In hydroxide containing Sn and Tl was obtained. Subsequently, the same baking as Example 1 was performed and Sn and Tl containing In oxide powder was obtained. The obtained Sn and Tl-containing In oxide powder particles were rod-shaped particles having a major axis diameter of 232.23 nm, a minor axis diameter of 59.05 nm, and a ratio of major axis diameter / minor axis diameter of 3.93. The particles have a lightness index L * value of 66.02, a chromaticness index a * value of −6.96 and a b * value of −7.11 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 18.7 m.2/ G. The crystallite diameter Dx was 162 mm.
[0033]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the formed film was measured, the resistance value was 1.83 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 92.09%, and a good transparent conductive film was obtained.
[0034]
[Example 6] A Sn and Nd-containing In hydroxide was obtained by treating under the same conditions as in Example 1 except that 0.2 g of neodymium oxide was added instead of aluminum nitrate. Subsequently, the same baking as Example 1 was performed and Sn and Nd containing In oxide powder was obtained. The obtained Sn and Nd-containing In oxide powder particles were rod-like particles having a major axis diameter of 117.7 nm, a minor axis diameter of 36.91 nm, and a major axis / minor axis ratio of 3.19. This particle has a lightness index L * value of 72.29, a chromaticness index a * value of −7.64 and a b * value of −9.92 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 23.2 m.2/ G. The crystallite diameter Dx was 181 mm.
[0035]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 1.99 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 98.25%, and a good transparent conductive film was obtained.
[0036]
[Example 7] Al, Fe, and Sn-containing In hydroxides were obtained by the same treatment as in Example 1 except that 0.15 g of iron oxide was added instead of reducing aluminum nitrate to 0.65 g. Subsequently, the same baking as in Example 1 was performed to obtain an Al, Fe, Sn-containing In oxide powder. The obtained Sn, Al, Fe-containing In oxide powder particles were rod-shaped particles having a major axis diameter of 145.88 nm, a minor axis diameter of 32.72 nm, and a ratio of major axis diameter / minor axis diameter of 4.45. It was. This particle has a lightness index L * value of 72.80, a chromaticness index a * value of −4.32 and a b * value of −6.69 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 24.5 m.2/ G. The crystallite diameter Dx was 172 mm.
[0037]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 1.59 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 96.01%, and a good transparent conductive film was obtained.
[0038]
Example 8 Sn and Al-containing In hydroxides were treated under the same conditions as in Example 1 except that sodium aluminate was used instead of aluminum nitrate and neutralized with an alkaline solution in which sodium aluminate was dissolved. Obtained. Subsequently, the same baking as Example 1 was performed and Sn and Al containing In oxide powder was obtained. The obtained Sn and Al-containing In oxide powder particles were rod-shaped particles having a major axis diameter of 143.07 nm, a minor axis diameter of 37.20 nm, and a major axis / minor axis ratio of 3.85. . This particle has a lightness index L * value of 70.41, a chromaticness index a * value of −8.05, and a b * value of −11.75 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 21.93 m.2/ G. The crystallite diameter Dx was 190 mm.
[0039]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 1.78 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 95.27%, and a good transparent conductive film was obtained.
[0040]
[Example 9] A Sn and Y-containing In hydroxide was obtained under the same conditions as in Example 1 except that 0.55 g of yttrium chloride hexahydrate was added instead of aluminum nitrate. Subsequently, the same baking as Example 1 was performed and Sn and Y containing In oxide powder were obtained. The obtained Sn, Y-containing In oxide powder particles were rod-shaped particles having a major axis diameter of 133.41 nm, a minor axis diameter of 32.28 nm, and a ratio of major axis diameter / minor axis diameter of 4.13. This particle has a lightness index L * value of 75.22, a chromaticness index a * value of −7.53 and a b * value of −7.17 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 23.56 m.2/ G. The crystallite diameter Dx was 198 mm.
[0041]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the formed film was measured, the resistance value was 1.83 kΩ / □. When the transmittance was measured with a spectrophotometer, the transmittance was 98.23%, and a good transparent conductive film was obtained.
[0042]
[Example 10] A Sn and Al-containing In hydroxide was obtained under the same conditions as in Example 2 except that 2.7 g of aluminum nitrate nonahydrate was added instead of chloroauric acid. Next, the same firing as in Example 2 was performed to obtain Sn and Al-containing In oxide powder. The obtained Sn and Al-containing In oxide powder was a granular powder having an average particle diameter of 45 nm. This particle has a lightness index L * value of 66.59, a chromaticness index a * value of −8.87, and a b * value of −11.89 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 29.0 m.2/ G. The crystallite diameter Dx was 207 mm.
[0043]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 2.38 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 96.41%, and a good transparent conductive film was obtained.
[0044]
[Comparative Example 1] A hydrochloric acid acidic solution was prepared under the same conditions as in Example 1 except that no trivalent element other than In was added. The mixture was neutralized, filtered, dehydrated and dried to obtain Sn-containing In hydroxide. A TEM photograph of this Sn-containing In hydroxide is shown in FIG.
[0045]
Next, this Sn-containing In hydroxide was fired under the same conditions as in Example 1 to obtain a Sn-containing In oxide. A TEM photograph of this Sn-containing In oxide is shown in FIG. This Sn-containing In oxide was acicular particles having a major axis diameter of 156.66 nm, a minor axis diameter of 40.70 nm, and an axial ratio of 3.85. This particle has a lightness index L * value of 76.82, a chromaticness index a * value of −8.27, and a b * value of −4.05 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 23.7 m.2/ G. The crystallite diameter Dx was 214 mm.
[0046]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 3.67 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 97.20%. The coating film in the case of the Sn-containing In oxide powder of Comparative Example 1 in which no trivalent element other than In was added showed a significantly high resistance value.
[0047]
[Comparative Example 2] A hydrochloric acid acidic solution was prepared under the same conditions as in Example 1 except that 0.35 g of palladium chloride was added instead of aluminum nitrate, and an alkaline solution was added to the hydrochloric acid acidic solution to perform preliminary neutralization. Thereafter, neutralization was performed by raising the liquid temperature, and filtration, dehydration and drying were performed to obtain Pd and Sn-containing In hydroxide. A TEM photograph of this Pd, Sn-containing In hydroxide is shown in FIG.
[0048]
Next, this Pd, Sn-containing In hydroxide was fired under the same conditions as in Example 1 to obtain Pd, Sn-containing In oxide. A TEM photograph of this Pd, Sn-containing In oxide is shown in FIG.
The Pd and Sn-containing In oxide powder particles did not retain the needle shape of hydroxide, and were granular with a major axis diameter of 45.9 nm, a minor axis diameter of 30.77 nm, and an axial ratio of 1.49. This particle has a lightness index L * value of 53.60, a chromaticness index a * value of −3.58, and a b * value of −5.62 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 20.5 m.2/ G. The crystallite diameter Dx was 232 mm.
[0049]
Using this Pd, Sn-containing In oxide powder, a transparent conductive film having a film thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 6.43 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 92.23%. There was no addition of trivalent elements other than In, and the coating film in the case of the Pd, Sn-containing In oxide powder of Comparative Example 2 to which divalent palladium was added showed a remarkably high resistance value.
[0050]
[Comparative Example 3] A Sn-containing In hydroxide was obtained by treatment under the same conditions as in Example 2 except that no trivalent element other than In was added. Subsequently, the same baking as in Example 2 was performed to obtain a Sn-containing In oxide powder. The obtained Sn-containing In oxide powder particles were granular with an average particle size of 45 nm. This particle has a lightness index L * value of 66.53, a chromaticness index a * value of −7.43 and a b * value of −11.8 in the CIE established (1976) L * a * b * color space. It had a blue color tone. When the specific surface area of the obtained powder was measured by the BET 1-point method, it was 28.0 m.2/ G. The crystallite diameter Dx was 240 mm.
[0051]
Using this powder, a transparent conductive film having a thickness of 0.3 μm was prepared in the same manner as in Example 1. When the resistance value of the prepared film was measured, the resistance value was 4.81 kΩ / □. Further, when the transmittance was measured with a spectrophotometer, the transmittance was 97.02%. The coating film in the case of the Sn-containing In oxide powder of Comparative Example 3 containing no trivalent element other than In exhibited a remarkably high resistance value.
[0052]
【The invention's effect】
According to the present invention, a trivalent element having a low resistance value and an excellent transmittance by an efficient manufacturing method in which a Sn-containing In hydroxide containing a trivalent element other than In is fired in a weak reducing atmosphere or the like. The Sn-containing In oxide powder containing ITO (ITO powder), the conductive paint and the conductive coating film can be obtained.
[Brief description of the drawings]
1 is a TEM photograph of Al, Sn-containing In hydroxide powder in Example 1. FIG.
2 is a TEM photograph of Al and Sn-containing In oxide powder obtained by firing the Al and Sn-containing In hydroxide powder of FIG. 1. FIG.
3 is a TEM photograph of Sn-containing In hydroxide powder in Comparative Example 1. FIG.
4 is a TEM photograph of Sn-containing In oxide powder obtained by firing the Sn-containing In hydroxide powder of FIG. 3. FIG.
5 is a TEM photograph of Pd, Sn-containing In hydroxide powder in Comparative Example 2. FIG.
6 is a TEM photograph of Pd, Sn-containing In oxide powder obtained by firing the Pd, Sn-containing In hydroxide powder of FIG. 5. FIG.

Claims (6)

Sn含有In酸化物中にIn以外の3価元素を含有してなり且つIn、Sn及び該3価元素の総モル数に対してSnが0 . 5〜15モル%、該3価元素が0 . 01〜15モル%含有され、CIE 1976 L*a*b*色空間において明度指数L*値が25〜85であり、クロマティクネス指数a*値及びb*値がいずれも−1 . 0〜−40 . 0の青系色調を有する導電性粉末の製造にあたり、In、Sn及び前記3価元素を含有する酸性溶液にアルカリを添加して液温45℃以下で予備中和し、該予備中和された液にさらにアルカリを添加して液温50℃以上で中和することにより得られた沈殿を加熱処理することによって導電性粉末を製造する方法。 Sn-containing In oxide and and also contains a trivalent element other than In the In, Sn and Sn based on the total moles of the trivalent element is from 0.5 to 15 mol%, the trivalent element is 0 In the CIE 1976 L * a * b * color space, the lightness index L * value is 25 to 85, and both the chromaticness index a * value and the b * value are −1.0 . -40. in the production of the conductive powder having a bluish color tone of 0, an in, by adding an alkali to an acidic solution containing Sn and the trivalent element pre neutralized at a liquid temperature of 45 ° C. or less,該予Btsutyuu A method of producing a conductive powder by heat-treating a precipitate obtained by further adding an alkali to the summed liquid and neutralizing at a liquid temperature of 50 ° C. or higher. Sn含有In酸化物中にIn以外の3価元素を含有してなり且つIn、Sn及び該3価元素の総モル数に対してSnが0 . 5〜15モル%、該3価元素が0 . 01〜15モル%含有され、CIE 1976 L*a*b*色空間において明度指数L*値が25〜85であり、クロマティクネス指数a*値及びb*値がいずれも−1 . 0〜−40 . 0の青系色調を有する導電性粉末の製造にあたり、InとSnを含有する酸性溶液にアルカリを添加して液温45℃以下で予備中和し、該予備中和された液にさらに前記3価元素とアルカリを添加して液温50℃以上で中和することにより得られた沈殿を加熱処理することによって導電性粉末を製造する方法。 Sn-containing In oxide and and also contains a trivalent element other than In the In, Sn and Sn based on the total moles of the trivalent element is from 0.5 to 15 mol%, the trivalent element is 0 In the CIE 1976 L * a * b * color space, the lightness index L * value is 25 to 85, and both the chromaticness index a * value and the b * value are −1.0 . -40. 0 in the production of the conductive powder having a bluish color tone, pre neutralized at a liquid temperature of 45 ° C. or less by adding an alkali to an acidic solution containing in and Sn, to the pre-neutralized solution Further, a method for producing a conductive powder by heat-treating a precipitate obtained by adding the trivalent element and alkali and neutralizing at a liquid temperature of 50 ° C. or higher. 前記予備中和後液のpHが2〜3であり、前記中和後液のpHが7〜12である、請求項1または2に記載の方法。 The method according to claim 1 or 2, wherein the pre-neutralized solution has a pH of 2 to 3, and the post-neutralized solution has a pH of 7 to 12. Sn含有In酸化物中にIn以外の3価元素を含有してなり且つIn、Sn及び該3価元素の総モル数に対してSnが0 . 5〜15モル%、該3価元素が0 . 01〜15モル%含有され、CIE 1976 L*a*b*色空間において明度指数L*値が25〜85であり、クロマティクネス指数a*値及びb*値がいずれも−1 . 0〜−40 . 0の青系色調を有する導電性粉末の製造にあたり、アルカリに前記3価元素含有溶液及びInとSnを含有する酸性溶液を添加して液温10〜90℃で中和することにより得られた沈殿を加熱処理することによって導電性粉末を製造する方法。 Sn-containing In oxide and and also contains a trivalent element other than In the In, Sn and Sn based on the total moles of the trivalent element is from 0.5 to 15 mol%, the trivalent element is 0 In the CIE 1976 L * a * b * color space, the lightness index L * value is 25 to 85, and both the chromaticness index a * value and the b * value are −1.0 . -40. in the production of the conductive powder having a bluish color tone 0, by neutralizing by adding an acidic solution containing the trivalent element-containing solution and in and Sn in an alkali at a liquid temperature of 10 to 90 ° C. A method for producing a conductive powder by heat-treating the obtained precipitate. 前記中和後液のpHが6〜12である、請求項4記載の方法。 The method according to claim 4 , wherein the post-neutralization solution has a pH of 6-12. 前記加熱処理温度が300〜1000℃である、請求項1〜5のいずれかに記載の方法。 The method in any one of Claims 1-5 whose said heat processing temperature is 300-1000 degreeC.
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