JP4082905B2 - プラズマ被膜表面仕上げの方法及び装置 - Google Patents
プラズマ被膜表面仕上げの方法及び装置 Download PDFInfo
- Publication number
- JP4082905B2 JP4082905B2 JP2001535626A JP2001535626A JP4082905B2 JP 4082905 B2 JP4082905 B2 JP 4082905B2 JP 2001535626 A JP2001535626 A JP 2001535626A JP 2001535626 A JP2001535626 A JP 2001535626A JP 4082905 B2 JP4082905 B2 JP 4082905B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- plasma
- plasma jet
- precursor material
- precursor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Organic Chemistry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Nozzles (AREA)
- Coating Apparatus (AREA)
- Coating By Spraying Or Casting (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE29919142U DE29919142U1 (de) | 1999-10-30 | 1999-10-30 | Plasmadüse |
DE29919142.7 | 1999-10-30 | ||
PCT/EP2000/002401 WO2001032949A1 (de) | 1999-10-30 | 2000-03-17 | Verfahren und vorrichtung zur plasmabeschichtung von oberflächen |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003514114A JP2003514114A (ja) | 2003-04-15 |
JP2003514114A5 JP2003514114A5 (de) | 2007-08-16 |
JP4082905B2 true JP4082905B2 (ja) | 2008-04-30 |
Family
ID=8081000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001535626A Expired - Fee Related JP4082905B2 (ja) | 1999-10-30 | 2000-03-17 | プラズマ被膜表面仕上げの方法及び装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6800336B1 (de) |
EP (1) | EP1230414B1 (de) |
JP (1) | JP4082905B2 (de) |
AT (1) | ATE278817T1 (de) |
DE (2) | DE29919142U1 (de) |
ES (1) | ES2230098T3 (de) |
WO (1) | WO2001032949A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2392412A1 (de) | 2010-06-02 | 2011-12-07 | Honda Motor Co., Ltd. | Plasmafilmablagerungsverfahren |
JP2017157572A (ja) * | 2017-06-05 | 2017-09-07 | 春日電機株式会社 | イオン生成装置 |
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JP4678973B2 (ja) * | 2001-03-29 | 2011-04-27 | 西日本プラント工業株式会社 | 溶射トーチのプラズマアークの発生装置及び発生方法 |
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US6841201B2 (en) * | 2001-12-21 | 2005-01-11 | The Procter & Gamble Company | Apparatus and method for treating a workpiece using plasma generated from microwave radiation |
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- 2000-03-17 EP EP00926739A patent/EP1230414B1/de not_active Expired - Lifetime
- 2000-03-17 US US10/111,864 patent/US6800336B1/en not_active Expired - Lifetime
- 2000-03-17 ES ES00926739T patent/ES2230098T3/es not_active Expired - Lifetime
- 2000-03-17 JP JP2001535626A patent/JP4082905B2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2392412A1 (de) | 2010-06-02 | 2011-12-07 | Honda Motor Co., Ltd. | Plasmafilmablagerungsverfahren |
US8673408B2 (en) | 2010-06-02 | 2014-03-18 | Honda Motor Co., Ltd. | Plasma film deposition method |
JP2017157572A (ja) * | 2017-06-05 | 2017-09-07 | 春日電機株式会社 | イオン生成装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2001032949A1 (de) | 2001-05-10 |
US6800336B1 (en) | 2004-10-05 |
EP1230414A1 (de) | 2002-08-14 |
ES2230098T3 (es) | 2005-05-01 |
DE29919142U1 (de) | 2001-03-08 |
JP2003514114A (ja) | 2003-04-15 |
DE50008155D1 (de) | 2004-11-11 |
ATE278817T1 (de) | 2004-10-15 |
EP1230414B1 (de) | 2004-10-06 |
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