JP4079116B2 - 流量計 - Google Patents
流量計 Download PDFInfo
- Publication number
- JP4079116B2 JP4079116B2 JP2004135963A JP2004135963A JP4079116B2 JP 4079116 B2 JP4079116 B2 JP 4079116B2 JP 2004135963 A JP2004135963 A JP 2004135963A JP 2004135963 A JP2004135963 A JP 2004135963A JP 4079116 B2 JP4079116 B2 JP 4079116B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement chamber
- flow
- lid
- circuit board
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims description 42
- 239000012530 fluid Substances 0.000 claims description 28
- 238000001514 detection method Methods 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
- E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
- E02B3/12—Revetment of banks, dams, watercourses, or the like, e.g. the sea-floor
- E02B3/14—Preformed blocks or slabs for forming essentially continuous surfaces; Arrangements thereof
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G9/00—Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
- A01G9/02—Receptacles, e.g. flower-pots or boxes; Glasses for cultivating flowers
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D17/00—Excavations; Bordering of excavations; Making embankments
- E02D17/20—Securing of slopes or inclines
- E02D17/205—Securing of slopes or inclines with modular blocks, e.g. pre-fabricated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- General Engineering & Computer Science (AREA)
- Structural Engineering (AREA)
- Civil Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mining & Mineral Resources (AREA)
- Mechanical Engineering (AREA)
- Ocean & Marine Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Environmental Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Paleontology (AREA)
- Measuring Volume Flow (AREA)
Description
2 本体
4 網体
5 蓋体
6 第1回路基板
11 溝部
13 継手部材(接続部)
19 測定室
20 センサ孔
21 溝
22 フローセンサ
27 検出面
Claims (2)
- 底壁と両側の側壁とで構成した上部が開放した溝部を設け、該溝部の両端に前記溝部と外部とを連通する接続部を設けた本体と、
平面状をなす第1の面と前記第1の面の反対側の第2の面とを有し、前記第1の面が前記溝部の開放した上部を封止して、断面形状が矩形の、被測定流体が流れる測定室を構成する着脱可能な蓋体と、
前記蓋体の前記第2の面に密接する回路基板と、
前記本体と係合して前記回路基板を被うカバーとからなり、
前記接続部は、前記測定室よりも断面積が小さく、前記測定室と直線的に連通する流路を形成し、
前記蓋体には、前記測定室に開口するセンサ孔が設けられ、
前記回路基板には、前記センサ孔の中に配置され、検出面が前記蓋体の前記第1の面と前記第2の面との間に、または、前記蓋体の前記第1の面と同じ平面上に配置されて前記測定室に臨むようにフローセンサが設けられており、
前記センサ孔が前記回路基板によって封止され、
前記測定室の前記フローセンサの上流側および下流側に、メッシュ状の網体を、前記本体の前記底壁および両側の前記側壁の内壁面、並びに、前記蓋体の前記第1の面に設けた溝に係合させて固定したことを特徴とする流量計。 - 前記接続部は、硬質材料からなる継手部材を有することを特徴とする請求項1に記載の流量計。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004135963A JP4079116B2 (ja) | 2004-04-30 | 2004-04-30 | 流量計 |
KR1020050031276A KR100589845B1 (ko) | 2004-04-30 | 2005-04-15 | 유량계 |
EP05103335A EP1591760A1 (en) | 2004-04-30 | 2005-04-25 | Flow meter |
US11/118,114 US7100440B2 (en) | 2004-04-30 | 2005-04-29 | Flow meter |
CNB2005100667980A CN100368780C (zh) | 2004-04-30 | 2005-04-29 | 流量计 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004135963A JP4079116B2 (ja) | 2004-04-30 | 2004-04-30 | 流量計 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005315788A JP2005315788A (ja) | 2005-11-10 |
JP2005315788A5 JP2005315788A5 (ja) | 2007-06-14 |
JP4079116B2 true JP4079116B2 (ja) | 2008-04-23 |
Family
ID=34939487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004135963A Expired - Fee Related JP4079116B2 (ja) | 2004-04-30 | 2004-04-30 | 流量計 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7100440B2 (ja) |
EP (1) | EP1591760A1 (ja) |
JP (1) | JP4079116B2 (ja) |
KR (1) | KR100589845B1 (ja) |
CN (1) | CN100368780C (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7415895B2 (en) * | 2005-08-26 | 2008-08-26 | Smc Kabushiki Kaisha | Flow meter with a rectifying module having a plurality of mesh members |
JP5066675B2 (ja) | 2006-07-05 | 2012-11-07 | Smc株式会社 | フローセンサ |
US7603898B2 (en) * | 2007-12-19 | 2009-10-20 | Honeywell International Inc. | MEMS structure for flow sensor |
JP5135136B2 (ja) * | 2008-09-12 | 2013-01-30 | アズビル株式会社 | 流量計及び流量制御装置 |
JP2010210496A (ja) * | 2009-03-11 | 2010-09-24 | Yamatake Corp | 流量計 |
US8418549B2 (en) * | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
CN103573199B (zh) * | 2012-08-03 | 2015-12-09 | 中国石油化工股份有限公司 | 钻井液流变性在线测量装置 |
US9354095B2 (en) * | 2012-10-02 | 2016-05-31 | Honeywell International Inc. | Modular flow sensor |
US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
CN106841669A (zh) * | 2015-12-04 | 2017-06-13 | 无锡乐华自动化科技有限公司 | 一种弹性应变式管道流速传感器以及使用方法 |
JP1560787S (ja) * | 2016-02-29 | 2016-10-17 | ||
USD900656S1 (en) * | 2019-03-21 | 2020-11-03 | Orbis Intelligent Systems, Inc. | Flow detection device |
USD904213S1 (en) | 2019-03-21 | 2020-12-08 | Orbis Intelligent Systems, Inc. | Hydrant sensor device |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3485381D1 (de) * | 1983-05-18 | 1992-02-06 | Bronkhorst High Tech Bv | Durchflussmessgeraet. |
US4776214A (en) * | 1985-08-09 | 1988-10-11 | Motorola, Inc. | Mass air flow sensor |
US4918995A (en) * | 1988-01-04 | 1990-04-24 | Gas Research Institute | Electronic gas meter |
JP2787785B2 (ja) * | 1990-07-02 | 1998-08-20 | 山武ハネウエル株式会社 | 流量計および流量測定方法 |
JPH0666612A (ja) | 1991-07-18 | 1994-03-11 | Ricoh Seiki Co Ltd | 流量センサー |
WO1997021986A1 (de) * | 1995-12-08 | 1997-06-19 | Micronas Semiconductor S.A. | Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben |
DE19808248A1 (de) * | 1998-02-27 | 1999-09-02 | Pierburg Ag | Meßvorrichtung zur Messung der Masse eines strömenden Mediums |
JP3655593B2 (ja) | 2002-02-20 | 2005-06-02 | 株式会社山武 | フローセンサ |
DE10217884B4 (de) * | 2002-04-22 | 2004-08-05 | Siemens Ag | Vorrichtung zur Messung der in einer Leitung strömenden Luftmasse |
US6647809B1 (en) * | 2002-08-29 | 2003-11-18 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Silicon carbide high temperature anemometer and method for assembling the same |
-
2004
- 2004-04-30 JP JP2004135963A patent/JP4079116B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-15 KR KR1020050031276A patent/KR100589845B1/ko active IP Right Grant
- 2005-04-25 EP EP05103335A patent/EP1591760A1/en not_active Ceased
- 2005-04-29 CN CNB2005100667980A patent/CN100368780C/zh not_active Expired - Fee Related
- 2005-04-29 US US11/118,114 patent/US7100440B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2005315788A (ja) | 2005-11-10 |
KR100589845B1 (ko) | 2006-06-14 |
US7100440B2 (en) | 2006-09-05 |
EP1591760A1 (en) | 2005-11-02 |
KR20060045736A (ko) | 2006-05-17 |
US20050241388A1 (en) | 2005-11-03 |
CN100368780C (zh) | 2008-02-13 |
CN1693855A (zh) | 2005-11-09 |
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