JP4013861B2 - Screen printing apparatus and screen printing method - Google Patents

Screen printing apparatus and screen printing method Download PDF

Info

Publication number
JP4013861B2
JP4013861B2 JP2003280729A JP2003280729A JP4013861B2 JP 4013861 B2 JP4013861 B2 JP 4013861B2 JP 2003280729 A JP2003280729 A JP 2003280729A JP 2003280729 A JP2003280729 A JP 2003280729A JP 4013861 B2 JP4013861 B2 JP 4013861B2
Authority
JP
Japan
Prior art keywords
electronic component
carrier
component
vacuum
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003280729A
Other languages
Japanese (ja)
Other versions
JP2005047124A (en
Inventor
隆昭 坂上
邦彦 時田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2003280729A priority Critical patent/JP4013861B2/en
Publication of JP2005047124A publication Critical patent/JP2005047124A/en
Application granted granted Critical
Publication of JP4013861B2 publication Critical patent/JP4013861B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Screen Printers (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Description

本発明は、キャリアに保持された小片の電子部品にクリーム半田や導電性ペーストなどのペーストを印刷するスクリーン印刷装置およびスクリーン印刷方法に関するものである。   The present invention relates to a screen printing apparatus and a screen printing method for printing a paste such as cream solder or a conductive paste on a small electronic component held on a carrier.

電子部品製造分野においては、基板上にクリーム半田や導電性ペーストなどのペーストを印刷する方法としてスクリーン印刷が広く用いられている。このスクリーン印刷は、電子部品が実装される実装基板のみならず、キャリアに保持された水晶発振器などの小片の電子部品をも対象として行われる。このような小片の電子部品を保持するキャリアとして、電子部品の位置ずれを防止して安定した状態で保持するため、部品保持位置に設けられた吸着孔を真空吸引することにより電子部品を吸着保持する構成のものが知られている（例えば特許文献１参照）。
特開２００２−３３３７２号公報 In the electronic component manufacturing field, screen printing is widely used as a method for printing paste such as cream solder or conductive paste on a substrate. This screen printing is performed not only on a mounting board on which electronic components are mounted, but also on small pieces of electronic components such as a crystal oscillator held on a carrier. As a carrier for holding such small electronic components, the electronic components are held by suction by sucking the suction holes provided at the component holding positions in order to prevent the electronic components from being displaced and held in a stable state. The thing of the structure to perform is known (for example, refer patent document 1).
JP 2002-33372 A

このような電子部品を吸着保持する方式のキャリアをスクリーン印刷装置に適用する場合には、次のような不具合が生じる場合がある。水晶発振器などの矩形形状の電子部品は、キャリアに設けられた凹部内に収容され、印刷位置においてはこれらの凹部に連通して設けられた吸引孔を真空吸引することにより凹部内に電子部品を吸着保持するようになっている。   When such a carrier that holds and holds electronic components is applied to a screen printing apparatus, the following problems may occur. A rectangular electronic component such as a crystal oscillator is accommodated in a recess provided in the carrier, and in the printing position, the electronic component is placed in the recess by vacuum suction of a suction hole provided in communication with the recess. Adsorption is held.

しかしながらこのような構成のキャリアでは小片の電子部品の全てが各凹部内に正常な姿勢で保持されているとは限らず、キャリア搬送時の振動や衝撃などによっていくつかの電子部品が凹部から部分的にはみ出した状態となる場合がある。そしてこの状態のままキャリアが印刷位置に到達するとはみ出した電子部品にスクリーンマスクの下面が押し付けられて破損する不具合が生じる。そしてこのような電子部品のはみ出し状態はキャリアがスクリーンマスクの下面側に進入した状態においては目視によって確認する手段がなく、従来より電子部品のはみ出しの有無を確実に検出可能な方策が求められていた。   However, in a carrier having such a configuration, not all of the small electronic components are held in a normal posture in each recess, and some electronic components are partially removed from the recess due to vibration or impact during carrier transportation. In some cases, it may be overhanging. When the carrier reaches the printing position in this state, there is a problem that the lower surface of the screen mask is pressed against the protruding electronic component and is damaged. Such a protruding state of the electronic component is not visually confirmed when the carrier enters the lower surface side of the screen mask, and there has been a demand for a method that can reliably detect the presence or absence of the protruding electronic component. It was.

そこで本発明は、キャリアにおいて凹部からの電子部品のはみ出しの有無を確実に検出できるスクリーン印刷装置およびスクリーン印刷方法を提供することを目的とする。   Therefore, an object of the present invention is to provide a screen printing apparatus and a screen printing method that can reliably detect the presence or absence of an electronic component protruding from a recess in a carrier.

本発明のスクリーン印刷装置は、パターン孔が設けられたマスクプレートをキャリアの凹部内に保持された小片の電子部品に当接させ、マスクプレート上にペーストを供給してスキージを摺動させることにより、前記パターン孔を介して前記電子部品にペーストを印刷するスクリーン印刷装置であって、前記マスクプレートの下方に配設された位置決め部と、この位置決め部に設けられ前記キャリアを下受けするとともに前記凹部に連通する吸引孔から真空吸引手段によって真空吸引することにより前記電子部品を凹部内に吸着保持する部品保持部と、この部品保持部に前記電子部品を前記キャリアとともに搬入しまた部品保持部から前記電子部品を前記キャリアとともに搬出する部品搬送手段と、前記電子部品が前記凹部から部分的にはみ出した異常状態で保持されている部品保持異常を検出する部品保持異常検出手段とを備え、前記部品保持異常検出手段は、前記部品保持部によって下受けされ凹部に電子部品を保持した前記キャリアに対して上方から接近し、全ての電子部品が凹部内に正常に保持されている正常状態においてキャリア全体を密閉状態で覆いかつ前記異常状態において前記はみ出した電子部品に当接して停止して前記部品保持部の上面との間の隙間から空気が流入する検査用治具と、前記真空吸引手段によって真空吸引された基板保持部内の真空度を検出する真空度検出手段と、この真空度検出結果に基づいて前記正常状態・異常状態を判定する判定手段とを備えた。 In the screen printing apparatus of the present invention, a mask plate provided with a pattern hole is brought into contact with a small electronic component held in a recess of a carrier, and paste is supplied onto the mask plate to slide a squeegee. A screen printing apparatus for printing a paste on the electronic component through the pattern hole, wherein the positioning unit is disposed below the mask plate, and the carrier is provided on the positioning unit and receives the carrier. The electronic component is sucked and held in the concave portion by vacuum suction from a suction hole communicating with the concave portion, and the electronic component is carried into the component holding portion together with the carrier from the component holding portion. Component conveying means for unloading the electronic component together with the carrier, and the electronic component partially protruding from the recess. Component holding abnormality detecting means for detecting a component holding abnormality held in an abnormal state, wherein the component holding abnormality detecting means is provided for the carrier that is received by the component holding portion and holds the electronic component in the recess. In the normal state where all electronic components are normally held in the recesses, the entire carrier is covered in a sealed state, and in contact with the protruding electronic component in the abnormal state, the component is stopped and held. An inspection jig through which air flows in from a gap between the upper surface of the part, a vacuum degree detecting means for detecting a vacuum degree in the substrate holding part vacuumed by the vacuum suction means, and based on the vacuum degree detection result Determination means for determining the normal state / abnormal state.

本発明のスクリーン印刷方法は、パターン孔が設けられたマスクプレートをキャリアの凹部内に保持された小片の電子部品に当接させ、マスクプレート上にペーストを供給してスキージを摺動させることにより、前記パターン孔を介して前記電子部品にペーストを印刷するスクリーン印刷方法であって、前記マスクプレートの下方に配設された位置決め部に設けられた部品保持部によって前記キャリアに保持された電子部品を下受けして吸着保持する部品保持工程と、前記電子部品を吸着保持した状態でスクリーン印刷を実行する印刷工程と、前記部品保持部に前記電子部品を前記キャリアとともに搬入しまた部品保持部から電子部品をキャリアとともに搬出する部品搬送工程と、前記電子部品が前記凹部から部分的にはみ出した異常状態で保持されている部品保持異常を検出する部品保持異常検出工程とを含み、前記部品保持異常検出工程において、前記部品保持部によって下受けされ凹部に電子部品を保持した状態の前記キャリアに対して、全ての電子部品が凹部内に正常に保持されている正常状態においてキャリア全体を密閉状態で覆いかつ前記異常状態において前記はみ出した電子部品に当接して停止して前記部品保持部の上面との間の隙間から空気が流入する検査用治具を接近させ、前記真空吸引手段によって真空吸引された基板保持部内の真空度を真空度検出手段によって検出し、この真空度検出結果に基づいて前記正常状態・異常状態を判定する。 In the screen printing method of the present invention, a mask plate provided with a pattern hole is brought into contact with a small electronic component held in a recess of a carrier, and paste is supplied onto the mask plate to slide a squeegee. A screen printing method for printing a paste on the electronic component through the pattern hole, wherein the electronic component is held on the carrier by a component holding portion provided in a positioning portion disposed below the mask plate A component holding step of receiving and holding the electronic component, a printing step of executing screen printing in a state where the electronic component is sucked and held, and bringing the electronic component into the component holding portion together with the carrier and from the component holding portion. In the component conveying step of unloading the electronic component together with the carrier, and in an abnormal state where the electronic component partially protrudes from the recess. A component holding abnormality detecting step for detecting a held component holding abnormality, and in the component holding abnormality detecting step, the carrier in a state of being held by the component holding portion and holding the electronic component in the recess, Covers the entire carrier in a sealed state in a normal state in which all electronic components are normally held in the recesses, and stops in contact with the protruding electronic component in the abnormal state and between the upper surface of the component holding unit An inspection jig into which air flows in from the gap is approached, and the degree of vacuum in the substrate holding part vacuumed by the vacuum suction means is detected by the vacuum degree detection means, and the normal state is determined based on the detection result of the degree of vacuum・ Determine the abnormal state.

本発明によれば、全ての電子部品が凹部内に正常に保持されている正常状態においてキャリア全体を密閉状態で覆いかつ電子部品が凹部から部分的にはみ出した異常状態においてはみ出した電子部品に当接して停止する検査用治具を接近させ、真空吸引手段によって真空吸引された基板保持部内の真空度を真空度検出手段によって検出し、この真空度検出結果に基づいて正常状態・異常状態を判定することにより、キャリアにおいて凹部からの電子部品のはみ出しの有無を確実に検出することができる。   According to the present invention, in a normal state in which all the electronic components are normally held in the recesses, the entire carrier is covered in a sealed state, and the electronic components protrude in an abnormal state where the electronic components partially protrude from the recesses. The inspection jig that comes into contact with it is brought close to it, and the degree of vacuum in the substrate holding part that is vacuumed by the vacuum suction means is detected by the vacuum degree detection means, and the normal state / abnormal state is determined based on the detection result of the vacuum degree. By doing so, it is possible to reliably detect whether or not the electronic component protrudes from the recess in the carrier.

次に本発明の実施の形態を図面を参照して説明する。図１は本発明の一実施の形態のスクリーン印刷装置の正面図、図２は本発明の一実施の形態のスクリーン印刷装置の側面図、図３は本発明の一実施の形態のスクリーン印刷装置の平面図、図４、図５は本発明の一実施の形態のスクリーン印刷装置のキャリアおよび下受部の断面図、図６は本発明の一実施の形態のスクリーン印刷方法のフロー図、図７は本発明の一実施の形態のスクリーン印刷方法における部品保持異常検出処理の動作説明図である。   Next, embodiments of the present invention will be described with reference to the drawings. 1 is a front view of a screen printing apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the screen printing apparatus according to an embodiment of the present invention, and FIG. 3 is a screen printing apparatus according to an embodiment of the present invention. FIG. 4 and FIG. 5 are cross-sectional views of a carrier and a receiving part of a screen printing apparatus according to an embodiment of the present invention. FIG. 6 is a flowchart of the screen printing method according to the embodiment of the present invention. 7 is an operation explanatory diagram of the component holding abnormality detection process in the screen printing method according to the embodiment of the present invention.

まず図１、図２，図３を参照してスクリーン印刷装置の構造を説明する。図１において、スクリーン印刷装置は、スクリーン印刷部１１の下方に位置決め部１を配設して構成されている。位置決め部１は、Ｙ軸テーブル２、Ｘ軸テーブル３およびθ軸テーブル４を段積みし、更にその上にＺ軸テーブル５を載置して構成されている。Ｚ軸テーブル５上には下受け部６が配設されている。下受部け６は、印刷対象の水晶振動子などの小片の電子部品９を保持したキャリア８を下受けする。キャリア８はクランパ７によって両端部を挟み込まれることによって水平方向の位置が保持される。 First, the structure of the screen printing apparatus will be described with reference to FIGS. In FIG. 1, the screen printing apparatus is configured by disposing a positioning unit 1 below a screen printing unit 11. The positioning unit 1 is configured by stacking a Y-axis table 2, an X-axis table 3, and a θ-axis table 4, and further placing a Z-axis table 5 thereon. The on Z-axis table 5 is disposed is below accepted part 6. Lower receiving only 6 receives under the electronic component 9 carrier 8 which holds the pieces, such as printed crystal oscillator. The carrier 8 is held in the horizontal position by sandwiching both ends thereof by the clamper 7.

電子部品９はキャリア８の凹部８ａ内に収容された状態で搬入コンベア１７によって搬入され、印刷コンベア１８に受け渡されて下受け部６上に載置される。そして印刷後のキャリア８は搬出コンベア１９によって搬出される。搬入コンベア１７，印刷コンベア１８および搬出コンベア１９は、下受け部６に電子部品９をキャリア８とともに搬入しまた下受け部６から電子部品９をキャリア８とともに搬出する部品搬送手段を構成する。 Electronic component 9 is carried by the carrying conveyor 17 in a state of being accommodated in the recess 8a of the carrier 8, are to be passed to the print conveyer 18 mounted on the lower accept part 6. Then, the printed carrier 8 is carried out by the carry-out conveyor 19. Input conveyor 17, the print conveyer 18 and discharge conveyor 19 constitute the component carrying means for carrying out the crotch accept part 6 carries the electronic component 9 together with the carrier 8 on the lower accept part 6 an electronic component 9 together with a carrier 8 .

位置決め部１の上方には、スクリーン印刷部１１が配設されている。スクリーン印刷部１１は、ホルダ枠に展張されたマスクプレート１２を備えている。マスクプレート１２上にはスキージユニット１３が配設されており、スキージユニット１３は図示しない移動手段によりＹ方向に移動する。スキージユニット１３のプレート１４にはスキージ昇降機構１５が設けられており、スキージ昇降機構１５はスキージ１６を上下動させる。   A screen printing unit 11 is disposed above the positioning unit 1. The screen printing unit 11 includes a mask plate 12 extended on a holder frame. A squeegee unit 13 is disposed on the mask plate 12, and the squeegee unit 13 is moved in the Y direction by a moving means (not shown). The plate 14 of the squeegee unit 13 is provided with a squeegee lifting mechanism 15 that moves the squeegee 16 up and down.

キャリア８に保持された電子部品９をマスクプレート１２の下面に当接させた状態で、ペーストであるクリーム半田をマスクプレート１２上に供給してスキージ１６を摺動させることにより、図示しないパターン孔を介して各電子部品９の接続用電極（図示省略）にはクリーム半田が印刷される。   In a state where the electronic component 9 held by the carrier 8 is in contact with the lower surface of the mask plate 12, a cream solder as a paste is supplied onto the mask plate 12 and the squeegee 16 is slid to form a pattern hole (not shown). The cream solder is printed on the connection electrodes (not shown) of each electronic component 9 via.

マスクプレート１２の上方には、カメラ２０が設けられている。図３に示すように、カメラ２０はＸ軸テーブル２１およびＹ軸テーブル２２によってＸＹ方向に水平移動する。カメラ２０はキャリア８に設けられた認識マークを撮像する。そして撮像により得られた画像データに基づいて各認識マークの位置が検出される。この位置検出結果に基づいてウェハ９とマスクプレート１２との位置合わせが行われる。   A camera 20 is provided above the mask plate 12. As shown in FIG. 3, the camera 20 is horizontally moved in the XY directions by the X-axis table 21 and the Y-axis table 22. The camera 20 images the recognition mark provided on the carrier 8. And the position of each recognition mark is detected based on the image data obtained by imaging. Based on the position detection result, the wafer 9 and the mask plate 12 are aligned.

図２において、スクリーン印刷部１１の右側方には、治具昇降機構２３が配設されている。治具昇降機構２３は、保持ヘッド２５の下面に装着された部品保持異常検出用の検査用治具２６を、昇降機構２４によって昇降自在に保持した構成となっており、電子部品９を保持したキャリア８が治具昇降機構２３の下方に移動した状態で、保持ヘッド２５をキャリア８に対して下降させることにより、後述する部品保持異常の判定が行えるようになっている。   In FIG. 2, a jig lifting mechanism 23 is disposed on the right side of the screen printing unit 11. The jig lifting mechanism 23 has a configuration in which an inspection jig 26 for detecting a component holding abnormality mounted on the lower surface of the holding head 25 is held up and down by the lifting mechanism 24 so as to hold the electronic component 9. With the carrier 8 moving below the jig lifting mechanism 23, the holding head 25 is lowered with respect to the carrier 8 so that a component holding abnormality described later can be determined.

ここで図４を参照して、キャリア８および下受け部６について説明する。キャリア８は矩形の板状部材であり、キャリア８の上面には複数の凹部８ａが設けられており、凹部８ａ内には水晶振動子などの小片の電子部品９が収容されている。凹部８ａの底部には吸着孔８ｂが設けられており、下受け部６の上面には、吸着孔８ｂの配置と対応して吸引孔６ａが設けられている。 Referring now to FIG. 4, it will be described carrier 8 and Shita受only part 6. The carrier 8 is a rectangular plate-like member, and a plurality of concave portions 8a are provided on the upper surface of the carrier 8, and small electronic components 9 such as a crystal resonator are accommodated in the concave portion 8a. The bottom of the recess 8a is provided with a suction hole 8b, the upper surface of the lower accept part 6, the suction hole 6a is provided so as to correspond to the arrangement of the suction holes 8b.

キャリア８が下受け部６上に載置された状態では、吸着孔８ｂは下受け部６の上面に設けられた吸引孔６ａと連通する。下受け部６の内部空間６ｂには真空ブロアなどの真空吸引手段２７が接続されており、真空吸引手段２７を駆動することにより、内部空間６ｂ、吸引孔６ａを介して吸着孔８ｂから真空吸引し、凹部８ａの底部に電子部品９を真空吸着して保持することができる。 In the state in which the carrier 8 is mounted on the lower accept part 6, the suction hole 8b communicates with the suction hole 6a provided on the upper surface of the lower accept part 6. The inner space 6b of the lower accept part 6 is connected to a vacuum suction means 27 such as a vacuum blower, by driving the vacuum suction means 27, vacuum from the suction hole 8b through the inner space 6b, the suction hole 6a The electronic component 9 can be sucked and held on the bottom of the concave portion 8a by suction.

内部空間６ｂには真空センサなどの真空度検出手段２８が接続されており、真空度検出手段２８の検出結果はスクリーン印刷装置の制御部２９に送られる。制御部２９は、内部空間６ｂの真空度検出結果に基づいて、凹部８ａに電子部品９が正常に保持されているか否か、すなわち部品保持異常の有無を判定する。   A vacuum degree detection means 28 such as a vacuum sensor is connected to the internal space 6b, and the detection result of the vacuum degree detection means 28 is sent to the control unit 29 of the screen printing apparatus. The control unit 29 determines whether or not the electronic component 9 is normally held in the recess 8a based on the vacuum degree detection result of the internal space 6b, that is, whether or not there is a component holding abnormality.

ここで上述の部品保持異常の有無の判定について説明する。多数の電子部品９を保持するキャリア８を対象とする真空度検出による部品保持状態の判定においては、部品サイズが判定精度に大きく影響し小型部品ほど判定精度が低下する。すなわち、電子部品のサイズに対応して電子部品吸着用の吸着孔のサイズが微細になると、１つの吸着孔からの真空吸引状態の変動が全体の真空度に及ぼす影響は小さく、したがって正常状態と異常状態とを切り分けるしきい値の設定が困難になる。   Here, the determination of the presence or absence of the above-described component holding abnormality will be described. In the determination of the component holding state by detecting the degree of vacuum for the carrier 8 that holds a large number of electronic components 9, the component size greatly affects the determination accuracy, and the smaller the component, the lower the determination accuracy. That is, when the size of the suction holes for sucking electronic components becomes finer corresponding to the size of the electronic components, the fluctuation of the vacuum suction state from one suction hole has a small effect on the overall degree of vacuum, and therefore the normal state and It becomes difficult to set a threshold value for distinguishing between abnormal states.

すなわち、すべての凹部８ａに電子部品９が正常に収容されている場合においても、各
凹部８ａには幾分かの真空リークが定常状態で存在する。このため、１つの凹部８ａにおいて電子部品９が凹部８ａからはみ出していることによるリーク量の変動が生じても、定常状態のリーク量に対する変動の割合は小さく、正常値と異常値とを明瞭に切り分けることが困難になるからである。 That is, even when the electronic components 9 are normally accommodated in all the recesses 8a, some vacuum leaks exist in a steady state in each recess 8a. For this reason, even if the fluctuation of the leak amount due to the electronic component 9 protruding from the recess 8a in one recess 8a occurs, the ratio of the change to the leak amount in the steady state is small, and the normal value and the abnormal value are clearly shown. This is because it becomes difficult to separate.

このしきい値設定の困難さを解決するため、本実施の形態においては、部品保持異常検出のための真空度検出において、図４（ｂ）に示すような検査用治具２６を下受け部６に対して押し付けた状態で、真空度検出を行うようにしている。検査用治具２６の下面側には、各凹部８ａに電子部品９を正常姿勢で収容した状態のキャリア８の下面から電子部品９の上面までの高さよりも僅かに大きい深さ寸法ｄの凹部２６ａが形成されている。   In order to solve the difficulty in setting the threshold value, in the present embodiment, in detecting the degree of vacuum for detecting a component holding abnormality, an inspection jig 26 as shown in FIG. In this state, the degree of vacuum is detected. On the lower surface side of the inspection jig 26, a recess having a depth dimension d slightly larger than the height from the lower surface of the carrier 8 to the upper surface of the electronic component 9 in a state where the electronic component 9 is accommodated in each recess 8 a in a normal posture. 26a is formed.

検査用治具２６を下降させて下受け部６に対して下降させて押し付けると、電子部品９を保持したキャリア８は凹部２６ａ内に外部からほぼ密封された状態で位置する。真空度検出は、この状態で内部空間６ａ内を真空吸引することにより行われ、この吸引状態においてはキャリア８全体が密閉状態となっていることから吸着孔８ｂからの真空リークはほとんど発生せず、開放状態で真空吸引を行った場合と比較して高い真空度を示す。   When the inspection jig 26 is lowered and lowered and pressed against the lower receiving portion 6, the carrier 8 holding the electronic component 9 is positioned in a substantially sealed state from the outside in the recess 26a. In this state, the degree of vacuum is detected by vacuuming the interior space 6a. In this suction state, the entire carrier 8 is in a sealed state, so that almost no vacuum leak from the suction hole 8b occurs. The degree of vacuum is higher than when vacuum suction is performed in an open state.

図５（ａ）は、部品保持異常の状態を示している。この状態で、検査用治具２６を下受け部６に対して下降させると、検査用治具２６は凹部８ａからはみ出した電子部品９に当接し、検査用治具２６の下端部が下受け部６の上面に当接しないまま停止する。すなわち凹部２６ａは密閉空間とはならず、下受け部６の内部空間６ｂを真空吸引しても検査用治具２６の下端部と下受け部６の上面との間の隙間から凹部２６ａ内に空気が流入する。このため内部空間６ｂの真空度は図４（ｂ）に示す正常状態と比較して明瞭な真空度差を示す。   FIG. 5A shows a state of component holding abnormality. In this state, when the inspection jig 26 is lowered with respect to the lower receiving portion 6, the inspection jig 26 comes into contact with the electronic component 9 protruding from the recess 8a, and the lower end portion of the inspection jig 26 is received by the lower receiving portion. Stop without contacting the upper surface of the part 6. That is, the concave portion 26 a does not become a sealed space, and even if the internal space 6 b of the lower receiving portion 6 is vacuum-sucked, the concave portion 26 a enters the concave portion 26 a from the gap between the lower end portion of the inspection jig 26 and the upper surface of the lower receiving portion 6. Air flows in. For this reason, the degree of vacuum in the internal space 6b shows a clear difference in degree of vacuum as compared with the normal state shown in FIG.

すなわち上記構成の検査用治具２６は、下受け部６によって下受けされ凹部８ａに電子部品９を保持した状態のキャリア８に対して上方から接近し、全ての電子部品９が凹部８ａ内に正常に保持されている正常状態においてキャリア８全体を密閉状態で覆い、かつ電子部品９が凹部８ａから部分的にはみ出した異常状態においてはみ出した電子部品９に当接して停止する。   That is, the inspection jig 26 configured as described above is approached from above with respect to the carrier 8 that is received by the lower receiving portion 6 and holds the electronic component 9 in the concave portion 8a, and all the electronic components 9 are in the concave portion 8a. In the normal state where the carrier 8 is normally held, the entire carrier 8 is covered in a sealed state, and the electronic component 9 comes into contact with the protruding electronic component 9 and stops in an abnormal state where the electronic component 9 partially protrudes from the recess 8a.

したがって、図４に示す状態における真空度と、図５（ｂ）に示す状態における真空度の中間にしきい値を設定することにより、部品保持異常を安定して検出することができる。真空吸引手段２７，真空度検出手段２８，制御部２９，検査用治具２６は、電子部品９が凹部８ａから部分的にはみ出した異常状態で保持されている部品保持異常を検出する部品保持異常検出手段となっている。   Therefore, by setting a threshold value between the degree of vacuum in the state shown in FIG. 4 and the degree of vacuum in the state shown in FIG. 5B, the component holding abnormality can be detected stably. The vacuum suction means 27, the vacuum degree detection means 28, the control unit 29, and the inspection jig 26 detect a component holding abnormality in which the electronic component 9 is held in an abnormal state in which the electronic component 9 partially protrudes from the recess 8a. It is a detection means.

このスクリーン印刷装置は上記のように構成されており、以下スクリーン印刷方法について、図６，図７を参照して説明する。このスクリーン印刷方法は、パターン孔が設けられたマスクプレート１２を板状のキャリア８に保持された状態の小片の電子部品９に当接させ、マスクプレート１２上にペーストを供給してスキージを摺動させることにより、前記パターン孔を介して前記電子部品にペーストを印刷するものである。   This screen printing apparatus is configured as described above, and the screen printing method will be described below with reference to FIGS. In this screen printing method, a mask plate 12 provided with a pattern hole is brought into contact with a small electronic component 9 held by a plate-like carrier 8, and paste is supplied onto the mask plate 12 to slide a squeegee. By moving, the paste is printed on the electronic component through the pattern hole.

図６において、まず電子部品９を保持したキャリア８を、図７（ａ）に示すように位置決め部１に搬入する（ＳＴ１）。次いで、位置決め部１に設けられた下受け部６を上昇させるとともに、真空吸引手段２７をＯＮして（ＳＴ２）、キャリア８に保持された電子部品９を下受けして吸着保持する。次いで、キャリア８を治具昇降機構２３の下方へ移動させ（ＳＴ３）、次いで図７（ｂ）に示すように、検査用治具２６を下受け部６上のキャリア８に対して下降させ（ＳＴ４）、下受け部６の上面を密閉した状態で、下受け部６の真空度検出を行う（ＳＴ５）。 In FIG. 6, first, the carrier 8 holding the electronic component 9 is carried into the positioning portion 1 as shown in FIG. 7A (ST1). Next, the lower receiving portion 6 provided in the positioning portion 1 is raised, the vacuum suction means 27 is turned on (ST2), and the electronic component 9 held by the carrier 8 is received and held by suction. Next, the carrier 8 is moved below the jig lifting mechanism 23 (ST3), and then the inspection jig 26 is lowered with respect to the carrier 8 on the lower receiving portion 6 as shown in FIG. ST4) With the upper surface of the lower receiving part 6 sealed, the degree of vacuum of the lower receiving part 6 is detected (ST5).

ここで、真空度検出手段２８の検出結果を制御部２９によって判定し、真空度が正常と異常を切り分けるしきい値である規定値以上であるか否かを判定する（ＳＴ６）。ここで、真空度が規定値以下であれば、図５（ｂ）に示す部品保持異常と判定して、マシン停止するとともにその旨報知する（ＳＴ７）。そして（ＳＴ６）において真空度が規定値以上であれば、部品保持状態は図４（ｂ）に示す正常状態であると判定して次工程へ移行する。   Here, the detection result of the degree-of-vacuum detection means 28 is determined by the control unit 29, and it is determined whether or not the degree of vacuum is equal to or greater than a specified value that is a threshold value for separating normality from abnormality (ST6). Here, if the degree of vacuum is equal to or less than the specified value, it is determined as the component holding abnormality shown in FIG. 5B, and the machine is stopped and notified to that effect (ST7). If the degree of vacuum is equal to or greater than the specified value in (ST6), it is determined that the component holding state is the normal state shown in FIG. 4B, and the process proceeds to the next step.

すなわち、検査用治具２６を上昇させ（ＳＴ８）、キャリア８をスクリーン印刷部１１の下方の印刷位置へ移動させる（ＳＴ９）。次いでクリーム半田を電子部品９に印刷する印刷動作が行われる（ＳＴ１０）。すなわち、Ｚ軸テーブル５を駆動してキャリア８とともに電子部品９を、クリーム半田２７が供給されたマスクプレート１２の下面に当接させ、マスクプレート１２の上面でスキージ１６をＹ方向に摺動させる。   That is, the inspection jig 26 is raised (ST8), and the carrier 8 is moved to a printing position below the screen printing unit 11 (ST9). Next, a printing operation for printing the cream solder on the electronic component 9 is performed (ST10). That is, the Z-axis table 5 is driven to bring the electronic component 9 together with the carrier 8 into contact with the lower surface of the mask plate 12 to which the cream solder 27 is supplied, and the squeegee 16 is slid in the Y direction on the upper surface of the mask plate 12. .

これにより、マスクプレート１２のパターン孔にクリーム半田が充填され、この後電子部品９をキャリア８とともに下降させてマスクプレート１２から離隔させることにより、電子部品９へのクリーム半田の印刷が完了する。そしてスクリーン印刷を終えたならば、下受け部６による真空吸着が解除されて下受け部６が下降し（ＳＴ１１）、次いでキャリア８を搬出して（ＳＴ１２）、１サイクルの印刷作業を終了する。 As a result, cream solder is filled in the pattern holes of the mask plate 12, and then the electronic component 9 is lowered together with the carrier 8 and separated from the mask plate 12, thereby completing the printing of the cream solder on the electronic component 9. And if completing the screen printing, receiving unit 6 is lowered down vacuum suction is released by the lower accept part 6 (ST11), then carries out the carrier 8 (ST12), terminates the printing operation for one cycle To do.

すなわち、上述のスクリーン印刷方法は、マスクプレート１２の下方に配設された位置決め部１に設けられた下受け部６にキャリア８に保持された電子部品９を下受けして吸着保持する基板保持工程と、電子部品９を吸着保持した状態でスクリーン印刷を実行する印刷工程と、下受け部６に電子部品９をキャリア８とともに搬入しまた下受け部６から電子部品９をキャリア９とともに搬出する基板搬送工程と、電子部品９が凹部８ａから部分的にはみ出した異常状態で保持されている部品保持異常を検出する部品保持異常検出工程とを含む形態となっている。 That is, a screen printing method described above, the substrate for attracting and holding the electronic component 9 held by the carrier 8 on the lower accept part 6 provided in the positioning portion 1 arranged below the mask plate 12 to receive the lower a holding step, a printing step for executing a screen printing the electronic component 9 while holding adsorbed carrier electronic component 9 from the crotch accept parts 6 carried on the lower accept part 6 an electronic component 9 together with a carrier 8 9 In addition, a board transporting process for unloading and a component holding abnormality detecting process for detecting a component holding abnormality in which the electronic component 9 is held in an abnormal state partially protruding from the recess 8a are included.

そして、部品保持異常検出工程においては、下受け部６によって下受けされ凹部８ａに電子部品９を保持した状態のキャリア８に対して、検査用治具２６を接近させ、真空吸引手段２７によって真空吸引された下受け部６内の真空度を真空度検出手段２８によって検出し、この真空度検出結果に基づいて部品保持の正常状態・異常状態を判定するようにしている。   In the component holding abnormality detecting step, the inspection jig 26 is brought close to the carrier 8 that is received by the lower receiving portion 6 and holds the electronic component 9 in the recess 8 a, and is vacuumed by the vacuum suction means 27. The degree of vacuum in the sucked lower receiving portion 6 is detected by the degree of vacuum detection means 28, and the normal state / abnormal state of component holding is determined based on the result of the degree of vacuum detection.

これにより、水晶振動子のような小片の電子部品を対象とし、通常の真空度検出による部品保持状態の異常検出が困難な場合にあっても、電子部品がキャリアの凹部からはみ出した部品保持異常を精度良く検出することができ、異常状態のままキャリアが印刷位置に搬入されることによるスクリーンマスクの破損などの不具合を防止することができる。   As a result, even if it is difficult to detect abnormalities in the component holding state by detecting the degree of vacuum normally for small electronic components such as crystal units, the component holding abnormality that protrudes from the concave portion of the carrier Can be detected with high accuracy, and problems such as breakage of the screen mask due to the carrier being carried into the printing position in an abnormal state can be prevented.

本発明のスクリーン印刷装置およびスクリーン印刷方法は、キャリアにおいて凹部からの電子部品の飛び出しの有無を確実に検出することができ、異常状態のままキャリアが印刷位置に搬入されることによるスクリーンマスク破損などの不具合を防止することができるという効果を有し、キャリアに保持された小片の電子部品にクリーム半田や導電性ペーストなどのペーストを印刷するスクリーン印刷分野等に有用である。   The screen printing apparatus and the screen printing method of the present invention can reliably detect the presence or absence of an electronic component popping out of the recess in the carrier, and the screen mask is broken by the carrier being brought into the printing position in an abnormal state. This is effective in the field of screen printing in which pastes such as cream solder and conductive paste are printed on small-sized electronic components held on a carrier.

本発明の一実施の形態のスクリーン印刷装置の正面図1 is a front view of a screen printing apparatus according to an embodiment of the present invention. 本発明の一実施の形態のスクリーン印刷装置の側面図The side view of the screen printing apparatus of one embodiment of this invention 本発明の一実施の形態のスクリーン印刷装置の平面図The top view of the screen printing apparatus of one embodiment of this invention 本発明の一実施の形態のスクリーン印刷装置のキャリアおよび下受部の断面図Sectional drawing of the carrier of the screen printing apparatus of one embodiment of this invention, and a receiving part 本発明の一実施の形態のスクリーン印刷装置のキャリアおよび下受部の断面図Sectional drawing of the carrier of the screen printing apparatus of one embodiment of this invention, and a receiving part 本発明の一実施の形態のスクリーン印刷方法のフロー図Flow diagram of a screen printing method according to an embodiment of the present invention 本発明の一実施の形態のスクリーン印刷方法における部品保持異常検出処理の動作説明図Operation explanatory diagram of component holding abnormality detection processing in the screen printing method of one embodiment of the present invention

符号の説明Explanation of symbols

１ 基板位置決め部
６ 下受け部
８ キャリア
８ａ 凹部
９ 電子部品
１１ スクリーン印刷部
１２ マスクプレート
１３ スキージユニット
２３ 治具昇降機構
２６ 検査用治具
２７ 真空吸引手段
２８ 真空度検出手段
２９ 制御部 DESCRIPTION OF SYMBOLS 1 Board | substrate positioning part 6 Bottom receiving part 8 Carrier 8a Recessed part 9 Electronic component 11 Screen printing part 12 Mask plate 13 Squeegee unit 23 Jig raising / lowering mechanism 26 Inspection jig 27 Vacuum suction means 28 Vacuum degree detection means 29 Control part

Claims (2)

パターン孔が設けられたマスクプレートをキャリアの凹部内に保持された小片の電子部品に当接させ、マスクプレート上にペーストを供給してスキージを摺動させることにより、前記パターン孔を介して前記電子部品にペーストを印刷するスクリーン印刷装置であって、前記マスクプレートの下方に配設された位置決め部と、この位置決め部に設けられ前記キャリアを下受けするとともに前記凹部に連通する吸引孔から真空吸引手段によって真空吸引することにより前記電子部品を凹部内に吸着保持する部品保持部と、この部品保持部に前記電子部品を前記キャリアとともに搬入しまた部品保持部から前記電子部品を前記キャリアとともに搬出する部品搬送手段と、前記電子部品が前記凹部から部分的にはみ出した異常状態で保持されている部品保持異常を検出する部品保持異常検出手段とを備え、前記部品保持異常検出手段は、前記部品保持部によって下受けされ凹部に電子部品を保持した前記キャリアに対して上方から接近し、全ての電子部品が凹部内に正常に保持されている正常状態においてキャリア全体を密閉状態で覆いかつ前記異常状態において前記はみ出した電子部品に当接して停止して前記部品保持部の上面との間の隙間から空気が流入する検査用治具と、前記真空吸引手段によって真空吸引された基板保持部内の真空度を検出する真空度検出手段と、この真空度検出結果に基づいて前記正常状態・異常状態を判定する判定手段とを備えたことを特徴とするスクリーン印刷装置。 The mask plate provided with the pattern hole is brought into contact with a small electronic component held in the concave portion of the carrier, the paste is supplied onto the mask plate, and the squeegee is slid to pass through the pattern hole. A screen printing apparatus for printing a paste on an electronic component, wherein a vacuum is formed from a positioning portion disposed below the mask plate, and a suction hole provided in the positioning portion for receiving the carrier and communicating with the recess. A component holding unit that sucks and holds the electronic component in the recess by vacuum suction by a suction unit, and the electronic component is carried into the component holding unit together with the carrier, and the electronic component is carried out from the component holding unit together with the carrier. And the electronic component is held in an abnormal state in which the electronic component partially protrudes from the recess. A component holding abnormality detecting means for detecting an article holding abnormality, the component holding abnormality detecting means approaching from above the carrier that is received by the component holding portion and holds the electronic component in the recess, In a normal state where the electronic component is normally held in the recess, the entire carrier is covered in a hermetically sealed state, and in contact with the protruding electronic component in the abnormal state, the gap is between the upper surface of the component holding unit. An inspection jig through which air flows from, a vacuum degree detecting means for detecting the degree of vacuum in the substrate holding part vacuumed by the vacuum suction means, and the normal state / abnormal state based on the degree of vacuum detection result. A screen printing apparatus comprising: a determination unit for determining. パターン孔が設けられたマスクプレートをキャリアの凹部内に保持された小片の電子部品に当接させ、マスクプレート上にペーストを供給してスキージを摺動させることにより、前記パターン孔を介して前記電子部品にペーストを印刷するスクリーン印刷方法であって、前記マスクプレートの下方に配設された位置決め部に設けられた部品保持部によって前記キャリアに保持された電子部品を下受けして吸着保持する部品保持工程と、前記電子部品を吸着保持した状態でスクリーン印刷を実行する印刷工程と、前記部品保持部に前記電子部品を前記キャリアとともに搬入しまた部品保持部から電子部品をキャリアとともに搬出する部品搬送工程と、前記電子部品が前記凹部から部分的にはみ出した異常状態で保持されている部品保持異常を検出する部品保持異常検出工程とを含み、前記部品保持異常検出工程において、前記部品保持部によって下受けされ凹部に電子部品を保持した状態の前記キャリアに対して、全ての電子部品が凹部内に正常に保持されている正常状態においてキャリア全体を密閉状態で覆いかつ前記異常状態において前記はみ出した電子部品に当
接して停止して前記部品保持部の上面との間の隙間から空気が流入する検査用治具を接近させ、前記真空吸引手段によって真空吸引された基板保持部内の真空度を真空度検出手段によって検出し、この真空度検出結果に基づいて前記正常状態・異常状態を判定することを特徴とするスクリーン印刷方法。 The mask plate provided with the pattern hole is brought into contact with a small electronic component held in the concave portion of the carrier, the paste is supplied onto the mask plate, and the squeegee is slid to pass through the pattern hole. A screen printing method for printing a paste on an electronic component, wherein the electronic component held by the carrier is received and sucked and held by a component holding portion provided in a positioning portion disposed below the mask plate. A component holding step, a printing step in which screen printing is performed in a state where the electronic component is sucked and held, and a component that carries the electronic component into the component holding portion together with the carrier and carries the electronic component from the component holding portion together with the carrier. Detecting a component holding abnormality in which the electronic component is held in an abnormal state where the electronic component partially protrudes from the recess. In the component holding abnormality detection step, all the electronic components are normal in the recesses with respect to the carrier received by the component holding unit and holding the electronic components in the recesses. For the inspection in which the entire carrier is covered in a sealed state in a normal state held in the air and stopped in contact with the protruding electronic component in the abnormal state and air flows in from a gap between the upper surface of the component holding part The degree of vacuum in the substrate holding part vacuumed by the vacuum suction means is detected by a vacuum degree detection means, and the normal state / abnormal state is determined based on the detection result of the vacuum degree. Screen printing method.
JP2003280729A 2003-07-28 2003-07-28 Screen printing apparatus and screen printing method Expired - Fee Related JP4013861B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003280729A JP4013861B2 (en) 2003-07-28 2003-07-28 Screen printing apparatus and screen printing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003280729A JP4013861B2 (en) 2003-07-28 2003-07-28 Screen printing apparatus and screen printing method

Publications (2)

Publication Number Publication Date
JP2005047124A JP2005047124A (en) 2005-02-24
JP4013861B2 true JP4013861B2 (en) 2007-11-28

Family

ID=34266461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003280729A Expired - Fee Related JP4013861B2 (en) 2003-07-28 2003-07-28 Screen printing apparatus and screen printing method

Country Status (1)

Country Link
JP (1) JP4013861B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103302957A (en) * 2013-06-17 2013-09-18 南昌欧菲光学技术有限公司 Silk-screen printing fixture and using method thereof

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4811257B2 (en) * 2006-12-07 2011-11-09 パナソニック株式会社 Screen printing apparatus and screen printing method
KR100988229B1 (en) 2008-05-07 2010-10-18 주식회사 유비셀 A Printed circuit board feeding system
JP6027794B2 (en) * 2012-07-04 2016-11-16 ヤマハ発動機株式会社 Transfer jig
CN104228316B (en) * 2013-06-14 2017-02-08 无锡华润安盛科技有限公司 Machining technology for conducting printing and surface mounting on substrates made of various materials simultaneously and jig structure thereof
CN103342041B (en) * 2013-07-18 2015-11-25 南昌欧菲光学技术有限公司 Screen printing device and method
KR101673225B1 (en) * 2016-03-14 2016-11-07 주식회사 엠에스프린텍 A printing Apparatus using roll-type pad printing method of using the same
JP7448771B2 (en) 2019-10-10 2024-03-13 澁谷工業株式会社 Loading device for conductive members
CN115923327A (en) * 2020-05-13 2023-04-07 联恒精密机械股份有限公司 Vacuum printing device and vacuum printing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103302957A (en) * 2013-06-17 2013-09-18 南昌欧菲光学技术有限公司 Silk-screen printing fixture and using method thereof
CN103302957B (en) * 2013-06-17 2015-12-09 南昌欧菲光学技术有限公司 Screen-printing fixture

Also Published As

Publication number Publication date
JP2005047124A (en) 2005-02-24

Similar Documents

Publication Publication Date Title
US20110297020A1 (en) Screen printer and screen printing method
US10850498B2 (en) Screen printing apparatus and screen printing method
JP2002068471A (en) Chip parts carrying device
JP4458034B2 (en) Electronic component mounting apparatus and electronic component mounting method
TWI673806B (en) Apparatus of thermocompression bonding
WO2012107956A1 (en) Electronic component transfer apparatus and taping unit
JP4013861B2 (en) Screen printing apparatus and screen printing method
WO2020008761A1 (en) Screen-printing device and screen-printing method
WO2013080408A1 (en) Component mounting method and component mounting system
WO2018193773A1 (en) Screen printing device and screen printing method
JP6027794B2 (en) Transfer jig
JP6694778B2 (en) Screen printer
JP4222741B2 (en) Component mounting apparatus and component mounting method
TWI423354B (en) Conductive ball mounting device
JP2002110724A (en) Apparatus and method for supplying solder ball
JP3613082B2 (en) Screen printing method
JP2008142949A (en) Equipment and method for screen printing
JP4549613B2 (en) Screen printing device
WO2019234791A1 (en) Screen printing machine
KR20100046601A (en) Apparatus for transferring object for inspecting both sides of the object and inspection system by using the apparatus and method for manufacturing pcb by using the system
JP4128103B2 (en) Screen printing method
GB2484373A (en) Screen printing device and screen printing method
KR101779411B1 (en) Screen printing system of printed circuit system
JP3692912B2 (en) Screen printing method
KR100913948B1 (en) Aligning apparatus in a screen printer

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051201

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20060112

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070521

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070529

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070719

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070821

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070903

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100921

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100921

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110921

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120921

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130921

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees