JP3826207B2 - 自己校正機能付き角度検出器 - Google Patents
自己校正機能付き角度検出器 Download PDFInfo
- Publication number
- JP3826207B2 JP3826207B2 JP2005225441A JP2005225441A JP3826207B2 JP 3826207 B2 JP3826207 B2 JP 3826207B2 JP 2005225441 A JP2005225441 A JP 2005225441A JP 2005225441 A JP2005225441 A JP 2005225441A JP 3826207 B2 JP3826207 B2 JP 3826207B2
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- JP
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- Prior art keywords
- angle detector
- scale
- calibration
- reading head
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005259 measurement Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 12
- 238000011088 calibration curve Methods 0.000 description 9
- 238000012935 Averaging Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24485—Error correction using other sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/001—Calibrating encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
2 回転軸
3 目盛り板
4 第1目盛り読み取りヘッド
1 第2目盛り読み取りヘッド
Claims (3)
- 回転軸に固定した目盛り盤の周囲に目盛り読み取りヘッドを備えた角度検出器において、
同一目盛り盤の周囲に複数の第1目盛り読み取りヘッドと、1個の第2目盛り読み取りヘッドとを備え、
前記第2目盛り読み取りヘッドと各第1目盛り読み取りヘッドとの計測差を求めて平均値を得ることにより自己校正を行うことを特徴とする自己校正機能付き角度検出器。 - 前記第2目盛り読み取りヘッドは、前記目盛り盤の周囲に等間隔に配置した第1目盛り読み取りヘッドの間に配置したことを特徴とする請求項1記載の自己校正機能付き角度検出器。
- 前記第2目盛り読み取りヘッドは、前記目盛り盤の周囲に等間隔に配置される第1目盛り読み取りヘッドの1つの位置に、その第1目盛り読み取りヘッドに替えて配置したことを特徴とする請求項1記載の自己校正機能付き角度検出器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005225441A JP3826207B2 (ja) | 2004-08-31 | 2005-08-03 | 自己校正機能付き角度検出器 |
US11/213,704 US7143518B2 (en) | 2004-08-31 | 2005-08-30 | Angle detector with self-calibration capability |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004253252 | 2004-08-31 | ||
JP2005225441A JP3826207B2 (ja) | 2004-08-31 | 2005-08-03 | 自己校正機能付き角度検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006098392A JP2006098392A (ja) | 2006-04-13 |
JP3826207B2 true JP3826207B2 (ja) | 2006-09-27 |
Family
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Family Applications (1)
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JP2005225441A Active JP3826207B2 (ja) | 2004-08-31 | 2005-08-03 | 自己校正機能付き角度検出器 |
Country Status (2)
Country | Link |
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US (1) | US7143518B2 (ja) |
JP (1) | JP3826207B2 (ja) |
Cited By (4)
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EP2278277A2 (en) | 2009-07-10 | 2011-01-26 | Mitutoyo Corporation | Error calculation method for angle detection device |
WO2011055662A1 (ja) | 2009-11-09 | 2011-05-12 | 独立行政法人産業技術総合研究所 | 軸ぶれ計測方法及び軸ぶれ計測機能を具備した自己校正機能付き角度検出器 |
WO2011055661A1 (ja) | 2009-11-09 | 2011-05-12 | 独立行政法人産業技術総合研究所 | 複合自己校正機能付き角度検出器 |
US11480498B2 (en) | 2018-03-26 | 2022-10-25 | Hitachi Astemo, Ltd. | Angle detection device and angle detection method |
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US20070157782A1 (en) * | 2006-01-12 | 2007-07-12 | Hetcher Jason D | Saw such as a miter saw with digital readout and related measurement devices |
JP4824415B2 (ja) * | 2006-01-27 | 2011-11-30 | 株式会社 ソキア・トプコン | ロータリエンコーダ |
JP4773899B2 (ja) * | 2006-06-29 | 2011-09-14 | 株式会社リガク | X線分光測定方法およびx線分光装置 |
DE102006059491B3 (de) * | 2006-12-14 | 2008-04-17 | Bundesrepublik Deutschland, vertr.d.d. Bundesministerium für Wirtschaft und Technologie, d.vertr.d.d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Verfahren und Einrichtung zur Selbstkalibrierung von Teilkreisen |
CN102985793A (zh) * | 2010-05-17 | 2013-03-20 | 法罗技术股份有限公司 | 自补偿角度编码器 |
GB2494811A (en) * | 2010-05-17 | 2013-03-20 | Faro Tech Inc | Self-compensating angular encoder |
JP2011247747A (ja) * | 2010-05-27 | 2011-12-08 | Topcon Corp | エンコーダ校正装置 |
JP2012005282A (ja) * | 2010-06-18 | 2012-01-05 | Toyo Electric Mfg Co Ltd | 偏心測定装置 |
US8712013B2 (en) | 2010-08-30 | 2014-04-29 | Rigaku Corporation | Motion control system and X-ray measurement apparatus |
CN102095398B (zh) * | 2010-12-28 | 2012-05-02 | 三一重工股份有限公司 | 一种倾角传感器的校准***及校准方法 |
JP5765002B2 (ja) * | 2011-03-29 | 2015-08-19 | 株式会社ニコン | 位置検出用スケールの計測装置、位置検出用スケールの計測方法、及びスケールの製造方法 |
JP5866629B2 (ja) | 2011-10-25 | 2016-02-17 | 株式会社ミツトヨ | 変位検出装置、目盛の校正方法及び目盛の校正プログラム |
JP5808230B2 (ja) | 2011-11-14 | 2015-11-10 | 株式会社ハーモニック・ドライブ・システムズ | 角度検出器の自律校正方法、角度検出器、円周目盛校正装置および角度検出器の校正装置 |
US9423281B2 (en) | 2012-02-07 | 2016-08-23 | Mitsubishi Electric Research Laboratories, Inc. | Self-calibrating single track absolute rotary encoder |
CN103162614B (zh) * | 2013-03-28 | 2015-08-19 | 重庆理工大学 | 一种角位移传感器在线自标定方法 |
WO2014188894A1 (en) | 2013-05-21 | 2014-11-27 | Mitsubishi Electric Corporation | Method for self-calibrating a rotary encoder |
US9689986B2 (en) | 2014-05-12 | 2017-06-27 | Faro Technologies, Inc. | Robust index correction of an angular encoder based on read head runout |
US9436003B2 (en) | 2014-05-12 | 2016-09-06 | Faro Technologies, Inc. | Robust index correction of an angular encoder in a three-dimensional coordinate measurement device |
US9759583B2 (en) * | 2014-05-12 | 2017-09-12 | Faro Technologies, Inc. | Method of obtaining a reference correction value for an index mark of an angular encoder |
CN106482669B (zh) * | 2016-11-29 | 2018-10-26 | 中国科学院长春光学精密机械与物理研究所 | 一种采用双线阵图像探测器的角位移测量*** |
JP6416983B1 (ja) * | 2017-05-22 | 2018-10-31 | ファナック株式会社 | 回転軸の角度較正方法および角度較正プログラム |
JP7173010B2 (ja) * | 2017-07-27 | 2022-11-16 | 株式会社ニコン | 校正装置、エンコーダ装置、駆動装置、ステージ装置、ロボット装置、エンコーダ装置の製造方法、及び校正プログラム |
CN107747931B (zh) * | 2017-08-21 | 2019-11-22 | 上海微泓自动化设备有限公司 | 用于角度编码器自校准的读数头优化布置方法 |
EP3792601B1 (en) * | 2018-05-11 | 2024-03-20 | Sankyo Seisakusho Co. | Angle detector |
DE102019209862A1 (de) | 2019-07-04 | 2021-01-07 | Dr. Johannes Heidenhain Gmbh | Winkelmesseinrichtung |
DE102019209866A1 (de) | 2019-07-04 | 2021-01-07 | Dr. Johannes Heidenhain Gmbh | Winkelmesseinrichtung und Verfahren zum Betrieb einer Winkelmesseinrichtung |
CN110375694B (zh) * | 2019-08-30 | 2020-12-04 | 合肥工业大学 | 基于便携关节式坐标测量机圆光栅测角误差的自校准方法 |
KR20220090521A (ko) | 2019-11-08 | 2022-06-29 | 가부시끼가이샤 산쿄 세이사쿠쇼 | 회전 위치 결정 장치 |
JP2023043487A (ja) | 2021-09-16 | 2023-03-29 | 株式会社ミツトヨ | 角度検出器および位置測定装置 |
Family Cites Families (8)
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DE3018496A1 (de) * | 1980-05-14 | 1981-11-19 | Walter Dipl.-Ing. Dr.-Ing. 8012 Ottobrunn Mehnert | Verfahren und vorrichtung zur messung eines winkels |
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JP2555083Y2 (ja) * | 1991-12-24 | 1997-11-19 | 株式会社ニコン | 回転角測定装置 |
JP3672410B2 (ja) | 1997-04-28 | 2005-07-20 | 東京都 | 液状有機性汚泥の処理方法 |
US6564168B1 (en) * | 1999-09-14 | 2003-05-13 | Immersion Corporation | High-resolution optical encoder with phased-array photodetectors |
DE10158223B4 (de) * | 2001-11-16 | 2017-10-05 | Dr. Johannes Heidenhain Gmbh | Drehwinkel-Messgerät |
JP4090016B2 (ja) | 2002-03-11 | 2008-05-28 | 多摩川精機株式会社 | 自己校正型角度検出器 |
JP4142942B2 (ja) * | 2002-12-09 | 2008-09-03 | 株式会社ソキア | ロータリエンコーダ |
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2005
- 2005-08-03 JP JP2005225441A patent/JP3826207B2/ja active Active
- 2005-08-30 US US11/213,704 patent/US7143518B2/en active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2278277A2 (en) | 2009-07-10 | 2011-01-26 | Mitutoyo Corporation | Error calculation method for angle detection device |
WO2011055662A1 (ja) | 2009-11-09 | 2011-05-12 | 独立行政法人産業技術総合研究所 | 軸ぶれ計測方法及び軸ぶれ計測機能を具備した自己校正機能付き角度検出器 |
WO2011055661A1 (ja) | 2009-11-09 | 2011-05-12 | 独立行政法人産業技術総合研究所 | 複合自己校正機能付き角度検出器 |
US9146136B2 (en) | 2009-11-09 | 2015-09-29 | National Institute Of Advanced Industrial Science And Technology | Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring function |
US9354085B2 (en) | 2009-11-09 | 2016-05-31 | National Institute Of Advanced Industrial Science And Technology | Angle detecting device with complex self-calibration function |
US11480498B2 (en) | 2018-03-26 | 2022-10-25 | Hitachi Astemo, Ltd. | Angle detection device and angle detection method |
Also Published As
Publication number | Publication date |
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US7143518B2 (en) | 2006-12-05 |
JP2006098392A (ja) | 2006-04-13 |
US20060043964A1 (en) | 2006-03-02 |
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