JP3726532B2 - Appearance inspection device - Google Patents

Appearance inspection device Download PDF

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Publication number
JP3726532B2
JP3726532B2 JP03404599A JP3404599A JP3726532B2 JP 3726532 B2 JP3726532 B2 JP 3726532B2 JP 03404599 A JP03404599 A JP 03404599A JP 3404599 A JP3404599 A JP 3404599A JP 3726532 B2 JP3726532 B2 JP 3726532B2
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JP
Japan
Prior art keywords
adhesive tape
conveyor belt
camera
opening
electronic component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP03404599A
Other languages
Japanese (ja)
Other versions
JP2000230813A (en
Inventor
潔 渋谷
克啓 近藤
篤 佐藤
圭司 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP03404599A priority Critical patent/JP3726532B2/en
Publication of JP2000230813A publication Critical patent/JP2000230813A/en
Application granted granted Critical
Publication of JP3726532B2 publication Critical patent/JP3726532B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は電子部品などの外観検査装置に関するものである。
【0002】
【従来の技術】
電子部品等の外観検査は、搬送手段に部品を保持させた状態で照明手段から電子部品に光を照射し、外観情報をカメラに入力することで検査するようになっていた。
【0003】
【発明が解決しようとする課題】
上記電子部品等の部品は上、下面と外周面を備えているので、それらを全て検査するためには、搬送手段に保持させた部品の保持姿勢を変更しながら行わなければならず、作業性の悪いものであった。
【0004】
そこで本発明は外観検査の作業性を高めることを目的とするものである。
【0005】
【課題を解決するための手段】
そしてこの目的を達成するために本発明は、所定間隔ごとに開口部を設けた搬送ベルトと、この搬送ベルトの開口部に橋架状に貼付したテープと、前記搬送ベルトの開口部内においてテープに貼付された部品とを備え、前記テープは実質的に透明としたものであって、搬送手段の開口部内において部品を貼付したテープを実質的な透明とすることにより、テープを介して部品を照明したり、カメラで部品の外観情報を検出したりすることができ、これによりテープから部品を外さなくても部品の外観検査を一度に行うことができ、作業性の良いものとなる。
【0006】
【発明の実施の形態】
本発明の請求項1の発明は、所定間隔ごとに開口部を設けた搬送ベルトと、この搬送ベルトの開口部に橋架状に貼付した粘着テープと、前記搬送ベルトの開口部内において粘着テープに貼付された部品とを備え、前記粘着テープは実質的に透明とした外観検査装置としたものであって、搬送手段の開口部内において部品を貼付した粘着テープを実質的な透明とすることにより、粘着テープを介して部品を照明したり、カメラで部品の外観情報を検出したりすることができ、これにより粘着テープから部品を外さなくても部品の外観検査を一度に行うことができ、作業性の良いものとなるという作用を奏する。
【0007】
本発明の請求項2の発明は、粘着テープは搬送ベルト側の面にだけ粘着材を設けた請求項1に記載の外観検査装置としたものであって、粘着テープ自体を搬送ベルトに貼着させるため、および部品を貼着させる粘着材を、搬送ベルト側だけに設けることにより、検査精度の低下を防止することができるという作用を奏する。
【0008】
すなわち粘着テープの粘着材部分には搬送ベルトによる部品搬送時等にホコリ等が付着してその透明度を低下させてしまうおそれがあるが、粘着材を搬送ベルト側にだけ設けておけば粘着材が表出するのは搬送ベルトの開口部の部品の外周部分だけとなり、よってホコリが付着しにくく、その透明度の低下が生じにくくなるので、検査精度が低下しなくなるのである。
【0009】
本発明の請求項3の発明は、部品が両端に電極を有し、この両端の電極間を、同電極間よりも幅の小さな粘着テープに貼着された請求項1、または2に記載の外観検査装置としたものであって、粘着テープの幅を部品の電極間よりも小さくしてそれに部品を貼着させることにより部品の電極面をテープの粘着材で汚すことがなく、しかも透明の粘着テープといえどもその端面により生ずるおそれのある影が電極面に投射されることがなく、この結果として電極面検査の精度低下が生ずることがなくなるという作用を奏する。
【0010】
本発明の請求項4の発明は、搬送ベルトの開口部の粘着テープ側に、部品の外周照明手段、部品側に外周検査カメラをそれぞれ設けた請求項1〜3のいずれか一つに記載の外観検査装置としたものであって、粘着テープを介して外周照明手段により部品の外周を照明するので、粘着テープに部品を貼着したままでこの外周部品の外観検査を外周検査カメラで検査することができ、しかもこの時外周カメラには粘着テープを介することなく部品の外周情報が直接入力されるので、より検査精度を高くすることができる。
【0011】
本発明の請求項5の発明は、搬送ベルトの開口部の粘着テープ側で部品の底面に対向する位置に底面検査カメラを設け、このカメラの外周方向に底面照明手段を設けた請求項1〜4のいずれか一つに記載の外観検査装置としたものであって、底面検査カメラによって部品の底面の検査を行う時に、部品の底面への照明をカメラの外周方向から行うことにより、底面照明手段からの光で粘着テープで反射した反射情報が底面検査カメラに入らなくなるので、この底面検査カメラでは部品の底面情報が正しく入力されることとなって、その検査精度を高くすることができるという作用を奏する。
【0012】
以下、本発明の一実施の形態を添付図面を用いて説明する。
【0013】
図1に示すごとく本実施の形態の外観検査装置は、所定間隔ごとに開口部1を設けた鉄板製の搬送ベルト2と、この搬送ベルト2の開口部1に橋架状に貼付した樹脂製の粘着テープ3と、前記搬送ベルト2の開口部1内において粘着テープ3に貼付された電子部品4とを備え、前記テープ3は実質的に透明としている。
【0014】
なお、この図1において5は搬送ベルト2の送孔で、この送孔5に図示していないピンプーリのピンを嵌合させることにより、テープ3を介して電子部品4を保持する搬送ベルト2を断続的かつ定間隔で一方向に確実に搬送するようにしている。
【0015】
そしてこの搬送により先ず図2の位置で電子部品4の上面4aの外観などの検査が行われる。
【0016】
この時はリング状の照明手段6で電子部品4の上面4aに光を照射して、それによる電子部品4上面からの情報を上方のカメラ7で検出して検査を行う。
【0017】
次に上記上面4aの検査が行われた電子部品4は図3、図4の位置へと搬送され、ここで電子部品4の外周の内、両側面4bの外観などの検査が行われる。
【0018】
つまり電子部品4の下方において図3、図4のごとく四方に配置した照明手段8から透明の粘着テープ3を介して、または直接開口部1を通して電子部品4の両側面4bに45度の角度で光を照射して、その両側面4bからの反射情報をプリズム9を介して、または直接カメラ10で検出し、外観検査を行うようにしている。
【0019】
次にこの様に両側面4bが検査された電子部品4は図5の位置へと搬送され、その下面4cの外観などの検査が行われる。
【0020】
この時にはリング状の照明手段11によって電子部品4の下面4cの外方から光を、開口部1を通して直接、または粘着テープ3を介して電子部品4の下面4cに照射して、この下面4cからの情報を電子部品4の下面4c下方に対向して設けたカメラ12で検出し、外観などの検査を行う。
【0021】
次にこの様に下面4cの外観検査などが行われた電子部品4は図6の位置へと搬送され、その外周の内、両端面4dの外観検査などが行われる。
【0022】
この時にはリング状の照明手段13から両端面4dに光が照射され、そこの情報が直接、またはプリズム15を介してカメラ16を検出され、その外観検査などが行われる。
【0023】
上記粘着テープ3は図1のごとく上面側、つまり搬送ベルト2側の面にだけ粘着材を設けたものであって、その様にすれば粘着テープ3自体を搬送ベルト2に貼着させることができるだけでなく、検査精度の低下を防止することができる。
【0024】
すなわち粘着テープ3の粘着材部分には搬送ベルト2による部品搬送時等にホコリ等が付着してその透明度を低下させてしまうおそれがあるが、粘着材を搬送ベルト2側にだけ設けておけば粘着材が表出するのは搬送ベルト2の開口部1の電子部品4の外周部分だけとなり、よってホコリ等が付着しにくく、その透明度の低下が生じにくくなるので、図3の検査時に照明手段8からの光が粘着テープ3を通過しやすくなり、この結果として検査精度が低下しなくなるのである。
【0025】
また電子部品4は図1のごとく両端に電極4Aを有し、この両端の電極4A間を、同電極4A間よりも幅の小さな粘着テープ3に貼着させたものであり、粘着テープ3の幅を電子部品4の電極4A間よりも小さくしてそれに電子部品4を貼着させることにより電子部品4の電極4A面を粘着テープ3の粘着材で汚すことがなく、しかも透明の粘着テープ3といえどもその端面により生ずるおそれのある影が電極4A面に投射されることがなく、この結果として電極4A面の検査の精度低下が生ずることがなくなるものである。
【0026】
また図3の場合搬送ベルト2の開口部1の粘着テープ3側に電子部品4の外周に照明手段8、電子部品4側にカメラ10をそれぞれ設けているが、この様にすれば粘着テープ3を介して照明手段8により電子部品4の外周を照明するので、粘着テープ3に電子部品4を貼着したままでこの外周部分の外観検査をカメラ10で検査することができ、しかもこの時カメラ10には粘着テープ3を介することなく電子部品4の外周情報が直接入力されるので、より検査精度を高くすることができる。
【0027】
さらに図5の場合搬送ベルト2の開口部1の粘着テープ3側で電子部品4の下面4cに対向する位置にカメラ12を設け、このカメラ12の外周方向に照明手段11を設けているが、この様にすればカメラ12によって電子部品4の下面4cの検査を行う時に、電子部品4の下面4cへの照明をカメラ12の外周方向から行うことになり、照明手段11からの光で粘着テープ3で反射した反射情報がカメラ12に入らなくなり、この結果としてこのカメラ12では電子部品4の下面4cの情報が正しく入力されることとなって、その検査精度を高くすることができるのである。
【0028】
【発明の効果】
以上のように本発明は、所定間隔ごとに開口部を設けた搬送ベルトと、この搬送ベルトの開口部に橋架状に貼付した粘着テープと、前記搬送ベルトの開口部内において粘着テープに貼付された部品とを備え、前記テープは実質的に透明としたものであって、搬送手段の開口部内において部品を貼付したテープを実質的な透明とすることにより粘着テープを介して部品を照明したり、カメラで部品の外観情報を検出したりすることができ、これにより粘着テープから部品を外さなくても部品の外観検査を一度に行うことができるようになるという効果を有する。
【図面の簡単な説明】
【図1】 本発明の一実施の形態における外観検査装置の要部斜視図
【図2】 同要部正面図
【図3】 同要部正面図
【図4】 図3の下面図
【図5】 同要部正面図
【図6】 同要部側面図
【符号の説明】
1 開口部
2 搬送ベルト
粘着テープ
4 電子部品
4A 電極
4a 上面
4b 側面
4c 下面
4d 端面
5 送孔
6 照明手段
7 カメラ
8 照明手段
9 プリズム
10 カメラ
11 照明手段
12 カメラ
13 照明手段
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an appearance inspection apparatus for electronic parts and the like.
[0002]
[Prior art]
The appearance inspection of electronic parts and the like has been performed by irradiating the electronic parts with light from the illumination means while holding the parts on the conveying means and inputting appearance information to the camera.
[0003]
[Problems to be solved by the invention]
Since the electronic parts and the like have an upper surface, a lower surface, and an outer peripheral surface, in order to inspect all of them, it is necessary to change the holding posture of the components held by the transport means, It was bad.
[0004]
Therefore, the present invention aims to improve the workability of appearance inspection.
[0005]
[Means for Solving the Problems]
In order to achieve this object, the present invention provides a conveyor belt having openings at predetermined intervals, a tape affixed to the opening of the conveyor belt in a bridge shape, and a tape affixed to the tape within the opening of the conveyor belt. The tape is substantially transparent, and the tape with the component affixed in the opening of the conveying means is substantially transparent so that the component is illuminated via the tape. In addition, it is possible to detect the appearance information of a part with a camera, and thereby, it is possible to perform an appearance inspection of the part at a time without removing the part from the tape, and the workability is improved.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
According to the first aspect of the present invention, there is provided a conveying belt having openings at predetermined intervals, an adhesive tape attached in a bridge shape to the opening of the conveying belt, and an adhesive tape affixed within the opening of the conveying belt. and a is parts, the adhesive tape is a obtained by a visual inspection apparatus substantially transparent, by a substantial transparent adhesive tape was applied to parts in the opening of the transport means, adhesive It is possible to illuminate the part via the tape and detect the appearance information of the part with a camera, so that the appearance inspection of the part can be performed at one time without removing the part from the adhesive tape. The effect is to be good.
[0007]
The invention according to claim 2 of the present invention is the appearance inspection apparatus according to claim 1, wherein the adhesive tape is provided with an adhesive material only on the surface on the side of the conveyor belt, and the adhesive tape itself is attached to the conveyor belt. For this reason, and by providing the adhesive material for attaching the components only on the conveying belt side, it is possible to prevent the inspection accuracy from being lowered.
[0008]
That is, there is a risk that dust or the like may adhere to the adhesive material part of the adhesive tape during parts conveyance by the conveyor belt and reduce its transparency. However, if the adhesive material is provided only on the conveyor belt side, the adhesive material will not be Only the outer peripheral part of the parts of the opening portion of the conveyor belt is exposed, so that dust is difficult to adhere and the transparency thereof is less likely to be lowered, so that the inspection accuracy is not lowered.
[0009]
According to a third aspect of the present invention, the part has electrodes at both ends, and the electrodes at both ends are attached to an adhesive tape having a smaller width than between the electrodes. It is an appearance inspection device, and the width of the adhesive tape is made smaller than between the electrodes of the part and the parts are attached to it, so that the electrode surface of the part is not contaminated with the adhesive material of the tape and is transparent. Even if it is an adhesive tape, the shadow which may be produced by the end surface is not projected on an electrode surface, and there exists an effect | action that the precision fall of an electrode surface test | inspection does not arise as a result.
[0010]
According to a fourth aspect of the present invention, the outer peripheral illumination means for the component is provided on the adhesive tape side of the opening of the conveyor belt, and the outer peripheral inspection camera is provided on the component side, respectively. be one obtained by the visual inspection device, since illuminates the periphery of the part by the outer peripheral illumination means through the adhesive tape, to inspect the appearance inspection of the outer peripheral parts while attaching a component to the adhesive tape at the outer inspection camera Further, at this time, the outer peripheral information of the part is directly inputted to the outer peripheral camera without using the adhesive tape, so that the inspection accuracy can be further increased.
[0011]
According to a fifth aspect of the present invention, a bottom inspection camera is provided at a position facing the bottom surface of the part on the adhesive tape side of the opening of the conveyor belt, and a bottom illumination means is provided in the outer peripheral direction of the camera. 4. When the bottom surface of the component is inspected by the bottom surface inspection camera, the bottom surface illumination is performed by illuminating the bottom surface of the component from the outer peripheral direction of the camera. Since the reflection information reflected by the adhesive tape by the light from the means does not enter the bottom inspection camera, this bottom inspection camera correctly inputs the bottom information of the part, and the inspection accuracy can be increased. Has an effect.
[0012]
Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.
[0013]
As shown in FIG. 1, the appearance inspection apparatus according to the present embodiment includes an iron plate conveyor belt 2 provided with openings 1 at predetermined intervals, and a resin-made affixed to the opening 1 of the conveyor belt 2 in a bridge shape. An adhesive tape 3 and an electronic component 4 attached to the adhesive tape 3 in the opening 1 of the conveyor belt 2 are provided, and the tape 3 is substantially transparent.
[0014]
In FIG. 1, reference numeral 5 denotes a feeding hole of the conveying belt 2. By fitting a pin pulley pin (not shown) into the feeding hole 5, the conveying belt 2 that holds the electronic component 4 via the tape 3 is attached. It is surely transported in one direction intermittently and at regular intervals.
[0015]
Then, by this conveyance, an inspection of the appearance of the upper surface 4a of the electronic component 4 is first performed at the position of FIG.
[0016]
At this time, the ring-shaped illumination means 6 irradiates light on the upper surface 4a of the electronic component 4, and information from the upper surface of the electronic component 4 is detected by the upper camera 7 for inspection.
[0017]
Next, the electronic component 4 subjected to the inspection of the upper surface 4a is transported to the position shown in FIGS. 3 and 4, where the outer appearance of the electronic component 4 and the appearance of both side surfaces 4b are inspected.
[0018]
That is, the illumination means 8 arranged in four directions as shown in FIGS. 3 and 4 below the electronic component 4 through the transparent adhesive tape 3 or directly through the opening 1 to the both side surfaces 4b of the electronic component 4 at an angle of 45 degrees. Light is irradiated, and reflection information from both side surfaces 4b is detected via the prism 9 or directly by the camera 10, and an appearance inspection is performed.
[0019]
Next, the electronic component 4 whose both side surfaces 4b have been inspected in this way is conveyed to the position shown in FIG. 5, and the appearance of the lower surface 4c is inspected.
[0020]
At this time, light is emitted from the outside of the lower surface 4c of the electronic component 4 by the ring-shaped illumination means 11 to the lower surface 4c of the electronic component 4 directly through the opening 1 or via the adhesive tape 3, and from the lower surface 4c. Is detected by the camera 12 provided facing the lower surface 4c of the electronic component 4 and the appearance is inspected.
[0021]
Next, the electronic component 4 that has been subjected to the appearance inspection of the lower surface 4c in this way is conveyed to the position shown in FIG. 6, and the outer appearance inspection of the both end surfaces 4d is performed.
[0022]
At this time, light is irradiated from the ring-shaped illuminating means 13 to the both end faces 4d, and the camera 16 is detected directly or via the prism 15 and the appearance is examined.
[0023]
As shown in FIG. 1, the adhesive tape 3 is provided with an adhesive material only on the upper surface side, that is, on the surface on the side of the conveyor belt 2, so that the adhesive tape 3 itself can be adhered to the conveyor belt 2. In addition to this, it is possible to prevent a decrease in inspection accuracy.
[0024]
That is, dust or the like may adhere to the adhesive material portion of the adhesive tape 3 when parts are conveyed by the conveyor belt 2 and the transparency thereof may be reduced. However, if the adhesive material is provided only on the conveyor belt 2 side. The adhesive material is exposed only in the outer peripheral portion of the electronic component 4 in the opening 1 of the conveyor belt 2, so that dust or the like is less likely to adhere and its transparency is less likely to be reduced. The light from 8 easily passes through the adhesive tape 3, and as a result, the inspection accuracy does not decrease.
[0025]
The electronic component 4 has an electrode 4A to the as both ends 1, the electrodes 4A of the both ends, which was attached to Do adhesive tape 3 small in width than between the electrodes 4A, the adhesive tape 3 without contaminating the electrodes 4A surfaces of the electronic component 4 by bonding the electronic component 4 it is made smaller than width between the electronic component 4 of the electrode 4A with adhesive material of the adhesive tape 3, moreover the adhesive tape 3 of transparent However, a shadow that may be generated by the end face is not projected onto the surface of the electrode 4A, and as a result, the accuracy of inspection of the surface of the electrode 4A is not reduced.
[0026]
The outer periphery lighting means 8 of the electronic component 4 to the adhesive tape 3 side of the opening 1 in the case the conveyor belt 2 in FIG. 3, is provided with the camera 10 respectively to the electronic component 4 side, the adhesive tape 3 if in this way Since the outer periphery of the electronic component 4 is illuminated by the illuminating means 8, the outer peripheral portion of the electronic component 4 can be inspected with the camera 10 while the electronic component 4 is stuck to the adhesive tape 3, and at this time, the camera Since the outer peripheral information of the electronic component 4 is directly input to 10 without using the adhesive tape 3, the inspection accuracy can be further increased.
[0027]
Further, in the case of FIG. 5, a camera 12 is provided at a position facing the lower surface 4 c of the electronic component 4 on the adhesive tape 3 side of the opening 1 of the conveyance belt 2, and an illumination unit 11 is provided in the outer peripheral direction of the camera 12. by the camera 12 when in this manner when inspecting the underside 4c of the electronic component 4, will be to illuminate to the lower surface 4c of the electronic component 4 from the outer circumference direction of the camera 12, the adhesive tape with light from the illumination means 11 As a result, the information on the lower surface 4c of the electronic component 4 is correctly input to the camera 12 and the inspection accuracy can be increased.
[0028]
【The invention's effect】
The present invention as described above, a conveyor belt provided with openings at predetermined intervals, an adhesive tape was applied to the bridge-shaped to the opening of the conveyor belt, which is affixed to the adhesive tape in the opening of the conveyor belt The tape is substantially transparent, and the component is illuminated through the adhesive tape by making the tape with the component affixed substantially transparent in the opening of the conveying means, It is possible to detect the appearance information of a part with a camera, and this has the effect that the appearance inspection of a part can be performed at one time without removing the part from the adhesive tape.
[Brief description of the drawings]
1 is a perspective view of a main part of an appearance inspection apparatus according to an embodiment of the present invention. FIG. 2 is a front view of the main part. FIG. 3 is a front view of the main part. ] Front view of relevant parts [Fig. 6] Side view of relevant parts [Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Opening part 2 Conveyance belt 3 Adhesive tape 4 Electronic component 4A Electrode 4a Upper surface 4b Side surface 4c Lower surface 4d End surface 5 Feeding hole 6 Illuminating means 7 Camera 8 Illuminating means 9 Prism 10 Camera 11 Illuminating means 12 Camera 13 Illuminating means

Claims (5)

所定間隔ごとに開口部を設けた搬送ベルトと、この搬送ベルトの開口部に橋架状に貼付した粘着テープと、前記搬送ベルトの開口部内において粘着テープに貼付された部品とを備え、前記粘着テープは実質的に透明とした外観検査装置。Comprising a conveyor belt provided with openings, and the adhesive tape was applied to the bridge-shaped to the opening of the conveyor belt, and a component which is attached to the adhesive tape in the opening of the conveyor belt at predetermined intervals, the adhesive tape Is a substantially transparent appearance inspection device. 粘着テープは搬送ベルト側の面にだけ粘着材を設けた請求項1に記載の外観検査装置。The appearance inspection apparatus according to claim 1, wherein the adhesive tape is provided with an adhesive material only on the surface on the conveying belt side. 部品は両端に電極を有し、この両端の電極間を、同電極間よりも幅の小さな粘着テープに貼着された請求項1、または2記載の外観検査装置。The appearance inspection apparatus according to claim 1 or 2, wherein the part has electrodes at both ends, and the electrodes at both ends are attached to an adhesive tape having a width smaller than that between the electrodes. 搬送ベルトの開口部の粘着テープ側に部品の外周照明手段、部品側に外周検査カメラをそれぞれ設けた請求項1〜3のいずれか一つに記載の外観検査装置。The appearance inspection apparatus according to any one of claims 1 to 3, wherein a peripheral illumination means for the component is provided on the adhesive tape side of the opening of the conveyor belt, and a peripheral inspection camera is provided on the component side. 搬送ベルトの開口部の粘着テープ側で部品の底面に対向する位置に底面検査カメラを設け、このカメラの外周方向に底面照明手段を設けた請求項1〜4のいずれか一つに記載の外観検査装置。The external appearance according to any one of claims 1 to 4, wherein a bottom surface inspection camera is provided at a position facing the bottom surface of the component on the adhesive tape side of the opening of the conveyor belt, and a bottom surface illumination means is provided in the outer peripheral direction of the camera. Inspection device.
JP03404599A 1999-02-12 1999-02-12 Appearance inspection device Expired - Fee Related JP3726532B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03404599A JP3726532B2 (en) 1999-02-12 1999-02-12 Appearance inspection device

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Application Number Priority Date Filing Date Title
JP03404599A JP3726532B2 (en) 1999-02-12 1999-02-12 Appearance inspection device

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JP2000230813A JP2000230813A (en) 2000-08-22
JP3726532B2 true JP3726532B2 (en) 2005-12-14

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104422699A (en) * 2013-09-02 2015-03-18 上野精机株式会社 Visual inspection apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5649258B1 (en) * 2014-06-05 2015-01-07 上野精機株式会社 Appearance inspection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104422699A (en) * 2013-09-02 2015-03-18 上野精机株式会社 Visual inspection apparatus
CN104422699B (en) * 2013-09-02 2016-04-06 上野精机株式会社 Appearance inspection device

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