JP3719062B2 - Electronic component mounting equipment - Google Patents

Electronic component mounting equipment Download PDF

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Publication number
JP3719062B2
JP3719062B2 JP26561599A JP26561599A JP3719062B2 JP 3719062 B2 JP3719062 B2 JP 3719062B2 JP 26561599 A JP26561599 A JP 26561599A JP 26561599 A JP26561599 A JP 26561599A JP 3719062 B2 JP3719062 B2 JP 3719062B2
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JP
Japan
Prior art keywords
electronic component
substrate
component mounting
receiving jig
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26561599A
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Japanese (ja)
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JP2001094298A (en
Inventor
和英 永尾
康宏 柏木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP26561599A priority Critical patent/JP3719062B2/en
Publication of JP2001094298A publication Critical patent/JP2001094298A/en
Application granted granted Critical
Publication of JP3719062B2 publication Critical patent/JP3719062B2/en
Anticipated expiration legal-status Critical
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Description

【0001】
【発明の属する技術分野】
本発明は、電子部品を基板に実装する電子部品実装用装置に関するものである。
【0002】
【従来の技術】
電子部品が実装される基板には、基板の片面のみならず両面に電子部品が実装されるいわゆる両面実装基板がある。この両面実装基板の実装工程では、まず第1面への実装が行われた後、基板を反転して第2面への実装が行われる。この第2面への実装の際には、第1面すなわち電子部品が実装された既実装面が下向きとなるため、基板を実装位置に位置決めして保持する際には電子部品が障害となって既実装面を直接的に面支持することが出来ない。このため既実装面の電子部品実装部位以外の下受け可能部位を適宜選定し、この位置を下受けピンによって支持する方法が用いられる。この方法では、下受けピンを装着するための多数のピン装着孔が設けられた下受け治具が基板位置決め部に設けられる。
【0003】
【発明が解決しようとする課題】
ところで、電子部品の実装が行われる基板位置決め部では、実装動作時に移載ヘッドから誤って落下した電子部品や、小部品などの異物が堆積しやすい。このような異物は動作異常や機構破損の原因となるため定期的に除去する必要がある。しかしながら、上記のような下受けピンによって基板を支持する下受け治具が設けられている場合には、基板位置決め部の構造は複雑になり、一旦落下して機構内部に入り込んだ異物は排出されにくい。そしてこの部分は狭隘であることから人手による異物の除去作業も困難であり、除去作業に時間と手間を要するとともに、残留異物に起因する動作異常などの不具合が発生し易いという問題点があった。
【0004】
そこで本発明は、基板位置決め部における落下異物を容易に除去でき、不具合を防止することができる電子部品実装装置を提供することを目的とする。
【0005】
【課題を解決するための手段】
請求項1記載の電子部品実装装置は、電子部品の供給部から搭載ヘッドによって電子部品をピックアップし基板に実装する電子部品実装装置であって、前記基板を位置決めする基板位置決め部に、電子部品実装時に基板を多数設けられたピン孔に装着された基板下受けピンによって下受けする下受け治具と、実装時にこの下受け治具の上部およびまたは下部に落下した電子部品を除去する異物除去手段とを備え、前記異物除去手段は、前記下受け治具の上部およびまたは下部にエアを噴射して電子部品を吹き飛ばすエア噴射手段である。
請求項2記載の電子部品実装装置は、請求項1記載の電子部品実装装置において、前記エア噴射手段によって吹き飛ばされた電子部品を回収する回収容器を備えた。
【0007】
本発明によれば、電子部品実装時に基板を下受けピンによって下受けする下受け治具の上部およびまたは下部に落下した電子部品を除去するエア噴射手段を備えたことにより、手作業による落下電子部品の除去作業を行わずに落下電子部品による不具合を防止することができる。
【0008】
【発明の実施の形態】
次に本発明の実施の形態を図面を参照して説明する。図1は本発明の一実施の形態の電子部品実装装置の斜視図、図2、図3は同電子部品実装装置の基板位置決め部の部分断面図、図4、図5は同電子部品実装装置の下受け治具の部分断面図である。
【0009】
まず図1を参照して電子部品実装装置について説明する。図1において、基台1の中央部にはX方向に搬送路2が配設されている。搬送路2は図示しない基板を搬送し基板位置決め部3に位置決めする。基板位置決め部3には、搬送路2の間に下受け治具3aが配設されている。基板位置決め部3については後述する。
【0010】
搬送路2の両側には電子部品の供給部4が配置され、供給部4には多数台のテープフィーダ5が並設されている。テープフィーダ5はテープに保持された電子部品を収納し、このテープをピッチ送りすることにより電子部品を搭載ヘッドによるピックアップ位置に供給する。X軸テーブル6には電子部品の搭載ヘッド7が装着されている。X軸テーブル6は、対向して並設された2基のY軸テーブル9に両端を支持されて架設されている。したがってX軸テーブル6およびY軸テーブル9を駆動することにより搭載ヘッド7は水平移動し、各ピックアップヘッド8によってテープフィーダ5のピックアップ位置から電子部品をピックアップし基板位置決め部3上の基板に実装する。
【0011】
手前側の供給部4と搬送路2の間には、電子部品を認識するカメラ10が配設されている。カメラ10は搭載ヘッド7に保持された状態の電子部品を下方から撮像する。カメラ10の側方には、ピンストッカ11およびノズルストッカ12が配設されている。以下、基板位置決め部3、ピンストッカ11およびノズルストッカ12について説明する。
【0012】
図2は、基板位置決め部3における搬送路2およびピンストッカ11、ノズルストッカ12の断面を示している。搬送路2のレールの間には、下受け治具3aがベース部材3bの上方で上下動自在に配設されている。下受け治具3aの上面には多数のピン孔14が設けられており、ピン孔14には基板下受けピン13(以下、単に「ピン13」と略称する)が装着される。ピン13は、表裏両面に電子部品が実装される両面実装基板を対象とする場合に用いられる。
【0013】
すなわち、電子部品実装済みの既実装面が下面となる場合には、既実装面を通常の基板のように平面的に下受けすることができない。このため、基板の下面のうち既実装電子部品と干渉しない下受け可能部位を選定してピン13によって点状に下受けする必要がある。下受け可能部位は一般に基板種類によって異なっていることから、実装対象が替わる度にピンの配置が変更される。この配置変更は、下受け治具3aに格子状に多数設けられたピン孔14の中から対象基板の下受け可能部位に対応したピン孔14を選定しこれらのピン孔14にピン13を装着することによって行われる。
【0014】
搬送路2の外側にはピンストッカ11が配設されている。ピンストッカ11にはピン収納孔11aが多数設けられており、ピン収納孔11aにはピン13が縦姿勢で収納される。
【0015】
ピンストッカ11に隣接してノズルストッカ12が配設されている。ノズルストッカ12にはツール収納孔12aが多数設けられており、ツール収納孔12aには各電子部品種類に対応した吸着ノズル15が収納される。電子部品の種類が切り換えられる度に、搭載ヘッド7はノズルストッカ12にアクセスし、吸着ノズル15の自動交換を行う。また、ノズルストッカ12には、通常の吸着ノズル15以外に下受けピンをクランプするための専用のクランプツール16も併せて収納する。図2はクランプツール16を装着した搭載ヘッド7を示している。
【0016】
基板品種の切り替え時にピン13の配置変更が必要とされる場合には、搭載ヘッド7はノズルストッカ12にアクセスしてツールチェンジを行う。すなわち装着している吸着ノズル15をノズルストッカ12に戻し、ピンクランプ用のクランプツール16を搭載ヘッド7に装着する。これにより、電子部品実装用の搭載ヘッド7を用いて、ピン13の下受け治具3aへの脱着作業を人手を介することなく自動的に行わせることができる。
【0017】
下受け治具3aの側方には、エアノズル17が配設されている。エアノズル17は水平に配設された管部材の側面にエア噴出用のノズルを下受け治具3aの側に向けて設けたものである。エアノズル17の高さ位置は図示しない上下動手段により可変となっており、エアノズルより噴射される噴射高さは調整可能となっている。すなわち、噴射高さの調整により、ベース部材3bと下受け治具3aとの隙間内をエアブローすることができ、また下受け治具3aの上面をエアブローすることもできる。
【0018】
下受け治具3aの上面やベース部材3bと下受け治具3aとの隙間内に実装時に落下した電子部品などの異物が残留した状態で、エアノズル17によってエアブローすることにより、残留異物はエアによって吹き飛ばされ除去される。また下受け治具3aのエアノズル17の反対側には、エアブローによって吹き飛ばされた異物を収納して回収する箱状の回収容器18が設けられている。エアノズル17は下受け治具3aの上部およびまたは下部にエアを噴射するエア噴射手段であり、エアノズル17および回収容器18は、下受け治具3aの上部およびまたは下部に残留する異物を除去する異物除去手段となっている。
【0019】
この電子部品実装装置は上記のように構成されており、以下動作について説明する。図3において、搬送路2上には下面に電子部品Pが実装済みの基板19が位置決めされ、基板19は下受け治具3aに装着された複数のピン13によって下受けされている。この基板19の上面に吸着ノズル15を装着した移載ヘッド7によって新たに電子部品Pが実装される。
【0020】
この実装動作を継続する過程において、吸着不良などの原因により実装ミスが生じた場合には、図4に示すように吸着ノズル15から脱落した電子部品が基板19の下方の下受け治具3a上に落下する場合がある。これらの電子部品のうち、あるものは下受け治具3a上面に止まるが、サイズが小さい微小部品Psの場合には、ピン孔14を介して下受け治具3aの下方まで落下する。下受け治具3aの下面はベース部材3bとの間の隙間が狭いことから隙間内に入り込んだこのような落下部品は排出されにくく、時間の経過とともに堆積して下受け治具3aの昇降動作異常などの不具合の原因となる場合がある。
【0021】
そこで、図5に示すように、側方に配置されたエアノズル17から下受け治具3aの上面に対して、またベース部材3bと下受け治具3aとの隙間の内部に対してエアを噴射させる。これにより、これらの場所に残留し堆積状態にある微小部品Psなどの異物は、エアブローによって吹き飛ばされ、反対側に配置された回収容器18内に落下して回収される。
【0022】
これにより、人手による除去作業が行いにくい基板位置決め部の下受け治具周辺の狭隘部位においても、手間を要する人手による異物回収作業を行う必要がない。また、発見しにくい狭隘部位に異物が堆積することによる動作異常などの不具合を防止することができる。
【0023】
【発明の効果】
本発明によれば、電子部品実装時に基板を下受けピンによって下受けする下受け部の上部およびまたは下部に落下した電子部品を除去する異物除去手段としてエア噴出手段を備えたので、手作業による落下した電子部品の除去作業を行う必要がなく、落下電子部品による不具合を防止することができる。
【図面の簡単な説明】
【図1】本発明の一実施の形態の電子部品実装装置の斜視図
【図2】本発明の一実施の形態の電子部品実装装置の基板位置決め部の部分断面図
【図3】本発明の一実施の形態の電子部品実装装置の基板位置決め部の部分断面図
【図4】本発明の一実施の形態の電子部品実装装置の下受け治具の部分断面図
【図5】本発明の一実施の形態の電子部品実装装置の下受け治具の部分断面図
【符号の説明】
3 基板位置決め部
3a 下受け治具
4 供給部
7 搭載ヘッド
14 ピン孔
17 エアノズル
18 回収容器
19 基板
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electronic component mounting apparatus for mounting an electronic component on a substrate.
[0002]
[Prior art]
As a substrate on which electronic components are mounted, there is a so-called double-sided mounting substrate in which electronic components are mounted on both sides as well as one side of the substrate. In the mounting process of the double-sided mounting substrate, first, mounting on the first surface is performed, and then the substrate is reversed and mounting on the second surface is performed. When mounting on the second surface, the first surface, that is, the already mounted surface on which the electronic component is mounted faces downward, so that the electronic component becomes an obstacle when the substrate is positioned and held at the mounting position. Therefore, it is not possible to directly support the already mounted surface. For this reason, a method is used in which an under-mountable portion other than the electronic component mounting portion on the already mounted surface is appropriately selected and this position is supported by the under-pin. In this method, a substrate receiving portion is provided with a lower receiving jig provided with a number of pin mounting holes for mounting lower receiving pins.
[0003]
[Problems to be solved by the invention]
By the way, in the board positioning part where electronic components are mounted, foreign matters such as electronic components that are accidentally dropped from the transfer head and small components during the mounting operation are likely to accumulate. Since such foreign substances cause abnormal operation and damage to the mechanism, it is necessary to remove them regularly. However, when the receiving jig for supporting the substrate by the receiving pins as described above is provided, the structure of the substrate positioning portion becomes complicated, and the foreign matter that once falls and enters the mechanism is discharged. Hateful. Since this part is narrow, it is difficult to remove foreign matter by hand, and it takes time and labor to remove the foreign matter, and problems such as abnormal operation due to residual foreign matter are likely to occur. .
[0004]
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an electronic component mounting apparatus that can easily remove falling foreign substances in a board positioning portion and prevent problems.
[0005]
[Means for Solving the Problems]
The electronic component mounting apparatus according to claim 1 is an electronic component mounting apparatus that picks up an electronic component from a supply unit of the electronic component by a mounting head and mounts the electronic component on the substrate. The electronic component mounting device is mounted on the substrate positioning unit that positions the substrate. Sometimes a substrate receiving jig is received by a substrate receiving pin mounted in a pin hole provided with a large number of substrates, and a foreign matter removing means for removing electronic components dropped on the upper and / or lower parts of the receiving jig during mounting. The foreign matter removing means is an air injecting means for injecting air onto the upper and / or lower parts of the receiving jig to blow off the electronic components.
According to a second aspect of the present invention, there is provided the electronic component mounting apparatus according to the first aspect, further comprising a collection container for collecting the electronic component blown off by the air ejecting means.
[0007]
According to the present invention, by providing an air ejection means for removing the top and or electronic parts that have fallen to the bottom of the lower receiving jig receiving under by the lower receiving pins substrates during electronic component mounting, dropping electronic manual It is possible to prevent a malfunction caused by a dropped electronic component without performing a component removing operation.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings. 1 is a perspective view of an electronic component mounting apparatus according to an embodiment of the present invention, FIGS. 2 and 3 are partial cross-sectional views of a substrate positioning portion of the electronic component mounting apparatus, and FIGS. 4 and 5 are the electronic component mounting apparatus. It is a fragmentary sectional view of a receiving jig.
[0009]
First, an electronic component mounting apparatus will be described with reference to FIG. In FIG. 1, a transport path 2 is arranged in the X direction at the center of a base 1. The conveyance path 2 conveys a substrate (not shown) and positions it on the substrate positioning unit 3. In the substrate positioning unit 3, a support jig 3 a is disposed between the conveyance paths 2. The substrate positioning unit 3 will be described later.
[0010]
Electronic parts supply units 4 are arranged on both sides of the conveyance path 2, and a large number of tape feeders 5 are arranged in parallel in the supply unit 4. The tape feeder 5 stores electronic components held on the tape, and pitches the tape to supply the electronic components to a pickup position by the mounting head. A mounting head 7 for electronic parts is mounted on the X-axis table 6. The X-axis table 6 is constructed with two ends supported by two Y-axis tables 9 arranged in parallel to face each other. Therefore, by driving the X-axis table 6 and the Y-axis table 9, the mounting head 7 moves horizontally, and each pickup head 8 picks up an electronic component from the pickup position of the tape feeder 5 and mounts it on the substrate on the substrate positioning unit 3. .
[0011]
A camera 10 for recognizing electronic components is disposed between the supply unit 4 on the near side and the conveyance path 2. The camera 10 images the electronic component held by the mounting head 7 from below. A pin stocker 11 and a nozzle stocker 12 are disposed on the side of the camera 10. Hereinafter, the substrate positioning unit 3, the pin stocker 11, and the nozzle stocker 12 will be described.
[0012]
FIG. 2 shows a cross section of the conveyance path 2, the pin stocker 11, and the nozzle stocker 12 in the substrate positioning unit 3. Between the rails of the conveyance path 2, a lower receiving jig 3a is disposed above the base member 3b so as to be movable up and down. A large number of pin holes 14 are provided on the upper surface of the lower receiving jig 3 a, and a substrate lower receiving pin 13 (hereinafter simply referred to as “pin 13”) is mounted in the pin hole 14. The pins 13 are used when targeting a double-sided mounting board on which electronic components are mounted on both the front and back sides.
[0013]
That is, when the already mounted surface on which the electronic component is mounted becomes the lower surface, the already mounted surface cannot be received in a planar manner like a normal substrate. For this reason, it is necessary to select a placeable lower portion of the lower surface of the substrate that does not interfere with the already mounted electronic component and to receive the lower portion in a dotted manner by the pin 13. Since the parts that can be received are generally different depending on the board type, the pin arrangement is changed each time the mounting target is changed. This arrangement change is made by selecting pin holes 14 corresponding to the parts that can be received on the target substrate from among the pin holes 14 provided in a lattice pattern on the receiving jig 3a, and attaching the pins 13 to these pin holes 14. Is done by doing.
[0014]
A pin stocker 11 is disposed outside the conveyance path 2. The pin stocker 11 is provided with a large number of pin storage holes 11a, and the pins 13 are stored in the pin storage holes 11a in a vertical posture.
[0015]
A nozzle stocker 12 is disposed adjacent to the pin stocker 11. The nozzle stocker 12 is provided with a large number of tool storage holes 12a, and the tool storage holes 12a store suction nozzles 15 corresponding to each electronic component type. Each time the electronic component type is switched, the mounting head 7 accesses the nozzle stocker 12 and automatically replaces the suction nozzle 15. In addition to the normal suction nozzle 15, the nozzle stocker 12 also stores a dedicated clamping tool 16 for clamping the receiving pin. FIG. 2 shows the mounting head 7 on which the clamp tool 16 is mounted.
[0016]
If it is necessary to change the arrangement of the pins 13 when switching the substrate type, the mounting head 7 accesses the nozzle stocker 12 and performs a tool change. That is, the attached suction nozzle 15 is returned to the nozzle stocker 12, and a clamp tool 16 for pin clamping is attached to the mounting head 7. Thereby, using the mounting head 7 for mounting an electronic component, it is possible to automatically perform the attaching / detaching operation to the receiving jig 3a of the pin 13 without manual intervention.
[0017]
An air nozzle 17 is disposed on the side of the lower receiving jig 3a. The air nozzle 17 is provided with a nozzle for ejecting air on the side surface of a horizontally disposed pipe member facing the support jig 3a. The height position of the air nozzle 17 is variable by a vertical movement means (not shown), and the ejection height ejected from the air nozzle can be adjusted. That is, by adjusting the injection height, air can be blown in the gap between the base member 3b and the lower receiving jig 3a, and the upper surface of the lower receiving jig 3a can also be air blown.
[0018]
In the state where foreign matters such as electronic parts dropped during mounting remain in the upper surface of the lower receiving jig 3a or in the gap between the base member 3b and the lower receiving jig 3a, air blown by the air nozzle 17 causes It is blown away and removed. A box-like collection container 18 is provided on the opposite side of the lower receiving jig 3a from the air nozzle 17 to store and collect foreign matter blown off by air blow. The air nozzle 17 is an air injection means for injecting air to the upper part and / or the lower part of the lower receiving jig 3a, and the air nozzle 17 and the collection container 18 are foreign objects for removing foreign substances remaining on the upper and / or lower parts of the lower receiving jig 3a. It is a removal means.
[0019]
This electronic component mounting apparatus is configured as described above, and the operation will be described below. In FIG. 3, a substrate 19 on which an electronic component P is mounted on the lower surface is positioned on the conveyance path 2, and the substrate 19 is received by a plurality of pins 13 attached to the receiving jig 3a. The electronic component P is newly mounted by the transfer head 7 having the suction nozzle 15 mounted on the upper surface of the substrate 19.
[0020]
In the process of continuing the mounting operation, if a mounting error occurs due to a suction failure or the like, the electronic component dropped from the suction nozzle 15 is placed on the lower jig 3a below the substrate 19 as shown in FIG. May fall. Some of these electronic components stop on the upper surface of the lower receiving jig 3a. However, in the case of a small component Ps having a small size, the electronic component falls to the lower side of the lower receiving jig 3a through the pin hole 14. Since the lower surface of the lower receiving jig 3a has a narrow gap with the base member 3b, such falling parts that have entered the gap are difficult to be discharged, and are accumulated over time to elevate and lower the lower receiving jig 3a. It may cause problems such as abnormalities.
[0021]
Therefore, as shown in FIG. 5, air is jetted from the air nozzle 17 arranged on the side to the upper surface of the lower receiving jig 3a and to the inside of the gap between the base member 3b and the lower receiving jig 3a. Let As a result, foreign matters such as the minute parts Ps remaining in these places and being deposited are blown off by air blow and fall into the collection container 18 arranged on the opposite side and collected.
[0022]
Accordingly, it is not necessary to manually perform the foreign substance collecting operation even in a narrow portion around the support jig of the substrate positioning portion where it is difficult to perform the manual removal operation. In addition, it is possible to prevent malfunctions such as abnormal operation due to foreign matter accumulating in a narrow part that is difficult to find.
[0023]
【The invention's effect】
According to the present invention, since an air jetting means and the foreign substance removing means for removing an electronic component having fallen top and or bottom of the lower receiving part for receiving the lower the lower receiving pin board when the electronic component mounting, hands It is not necessary to remove the electronic component that has been dropped due to the work, and problems due to the dropped electronic component can be prevented.
[Brief description of the drawings]
FIG. 1 is a perspective view of an electronic component mounting apparatus according to an embodiment of the present invention. FIG. 2 is a partial cross-sectional view of a board positioning portion of the electronic component mounting apparatus according to an embodiment of the present invention. FIG. 4 is a partial sectional view of a substrate positioning portion of an electronic component mounting apparatus according to an embodiment. FIG. 4 is a partial sectional view of a receiving jig of the electronic component mounting apparatus according to an embodiment of the present invention. Partial sectional view of the receiving jig of the electronic component mounting apparatus of the embodiment [Explanation of symbols]
3 Substrate positioning part 3a Underlay jig 4 Supply part 7 Mounting head 14 Pin hole 17 Air nozzle 18 Collection container 19 Substrate

Claims (2)

電子部品の供給部から搭載ヘッドによって電子部品をピックアップし基板に実装する電子部品実装装置であって、前記基板を位置決めする基板位置決め部に、電子部品実装時に基板を多数設けられたピン孔に装着された基板下受けピンによって下受けする下受け治具と、実装時にこの下受け治具の上部およびまたは下部に落下した電子部品を除去する異物除去手段とを備え、前記異物除去手段は、前記下受け治具の上部およびまたは下部にエアを噴射して電子部品を吹き飛ばすエア噴射手段であることを特徴とする電子部品実装装置。An electronic component mounting apparatus for mounting the pickup to a substrate an electronic component by the mounting head from the supply section of the electronic component, the substrate positioning portion for positioning the substrate, mounted on a number provided pin holes of the substrate during electronic component mounting and lower receiving jig receiving under by the substrate under receiving pins which are, upon a foreign substance removing means for removing the top and or electronic parts that have fallen to the bottom of the lower receiving jig mounted, the foreign matter removing means, the An electronic component mounting apparatus, characterized in that the device is an air injection means for injecting air onto the upper and / or lower portions of the lower receiving jig to blow off the electronic components . 前記エア噴射手段によって吹き飛ばされた電子部品を回収する回収容器を備えたことを特徴とする請求項1記載の電子部品実装装置。The electronic component mounting apparatus according to claim 1, further comprising a collection container that collects the electronic component blown off by the air ejecting unit.
JP26561599A 1999-09-20 1999-09-20 Electronic component mounting equipment Expired - Fee Related JP3719062B2 (en)

Priority Applications (1)

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JP26561599A JP3719062B2 (en) 1999-09-20 1999-09-20 Electronic component mounting equipment

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Application Number Priority Date Filing Date Title
JP26561599A JP3719062B2 (en) 1999-09-20 1999-09-20 Electronic component mounting equipment

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JP3719062B2 true JP3719062B2 (en) 2005-11-24

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Publication number Priority date Publication date Assignee Title
JP4040366B2 (en) * 2002-05-28 2008-01-30 富士機械製造株式会社 Electronic component mounting equipment
US8026126B2 (en) * 2002-11-27 2011-09-27 Asm Assembly Automation Ltd Apparatus and method for thin die detachment
JP5134425B2 (en) * 2008-04-24 2013-01-30 富士機械製造株式会社 Substrate processing equipment
JP5096420B2 (en) * 2009-06-26 2012-12-12 株式会社日立ハイテクインスツルメンツ Printed circuit board support device
JP5342396B2 (en) * 2009-09-29 2013-11-13 株式会社日立ハイテクインスツルメンツ Substrate assembly work apparatus and control method in substrate assembly work apparatus
JP5889537B2 (en) 2011-03-23 2016-03-22 ファスフォードテクノロジ株式会社 Die bonder
JP6012067B2 (en) * 2012-08-03 2016-10-25 富士機械製造株式会社 Component mounter
JP7194034B2 (en) * 2019-02-06 2022-12-21 株式会社Fuji SUPPORT PIN AND SUBSTRATE PROCESSING MACHINE INCLUDING THE SAME

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