JP3700490B2 - Seed crystal holding device - Google Patents

Seed crystal holding device Download PDF

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JP3700490B2
JP3700490B2 JP25513599A JP25513599A JP3700490B2 JP 3700490 B2 JP3700490 B2 JP 3700490B2 JP 25513599 A JP25513599 A JP 25513599A JP 25513599 A JP25513599 A JP 25513599A JP 3700490 B2 JP3700490 B2 JP 3700490B2
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intervals
pin
seed crystal
interval
seed
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JP2001080990A (en
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憲治 堀
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三菱住友シリコン株式会社
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【０００１】
【発明の属する技術分野】
本発明は、チョクラルスキー法（ＣＺ法）によるシリコン単結晶の引上げ装置の種結晶の保持装置に関する。更に詳しくは、単結晶を育成する際にシリコン融液に接触させる種結晶を保持する装置に関するものである。
【０００２】
【従来の技術】
従来、シリコン単結晶の育成方法としてるつぼ内のシリコン融液からシリコン単結晶を成長させるチョクラルスキー法（以下、ＣＺ法という。）が知られている。この方法ではまず引上げ装置に設置されたるつぼ内に多結晶シリコンを充填する。この多結晶シリコンを加熱融解して得たシリコン融液の表面に種結晶の一端を接触させ部分的に融解する。次に、種結晶を引上げてシリコン融液から種絞り部分を作成し、その後目的とするシリコン棒の直径まで結晶を徐々に太らせて成長させる。この方法により、必要な結晶方向を有する無転位の単結晶棒を得ることができる。
【０００３】
この種結晶は通常ワイヤに吊り下げられた保持装置に取付けられて保持される。この保持装置では、まず予め側面に切欠き部が形成された種結晶をシードチャックの中心軸に沿ってシードチャックの底部に形成された種結晶挿入穴に挿入する。この状態でシードチャックの中心軸に直交するとともに中心軸に対して偏倚して形成されたピン孔にシードチャックピンを挿入する。これによりシードチャックピンの胴部が種結晶の切欠き部に当接し、種結晶が保持される。
【０００４】
【発明が解決しようとする課題】
しかし、従来の種結晶の保持装置では、シリコン単結晶棒の長さが大きくなって、シードチャックピンの胴部と切欠き部とが接触する部分に高い応力が集中することに起因して、切欠き部で種結晶が破損することがある。この場合には種結晶の切欠き部、シードチャックのピン孔及びシードチャックピンはそれぞれ単一であるため、シリコン単結晶棒がシリコン融液中に落下するおそれがあった。特に、シリコン単結晶棒の大口径化等の要求に伴い、近年種結晶により引上げるシリコン単結晶棒の重量も増加傾向にある。これによりシリコン単結晶棒の引上げに際して生じる接触部分の応力も今まで以上に大きくなり、シリコン単結晶棒が落下する事故の発生率がより高まる。
本発明の目的は、種結晶の破損によるシリコン単結晶棒落下の発生率を低減する種結晶の保持装置を提供することにある。
【０００５】
【課題を解決するための手段】
請求項１に係る発明は、図１又は図２に示すように、チャック本体２２ｄの中心軸ａに沿ってチャック本体２２ｄの底部に形成された種結晶挿入穴２２ａと中心軸ａに直交するとともに中心軸ａに対して偏倚して形成されたピン孔２２ｂとを有するシードチャック２２と、種結晶挿入穴２２ａに挿入可能な外径を有し挿入状態でピン孔２２ｂに対向する側面に切欠き部２３ａが形成された種結晶２３と、ピン孔２２ｂに挿入され胴部２４ａが切欠き部２３ａに当接可能なシードチャックピン２４とを備えた種結晶の保持装置において、ピン孔２２ｂが中心軸ａ方向に間隔をあけて複数形成され、切欠き部２３ａが種結晶２３の側面にピン孔２２ｂの数に相応して複数形成され、シードチャックピン２４が複数のピン孔２２ｂにそれぞれ挿入されかつ最上部のピン孔２２ｂに挿入したシードチャックピン２４の胴部２４ａのみが切欠き部２３ａに当接するように構成されたことを特徴とする種結晶の保持装置である。
請求項１に係る発明では、種結晶２３の切欠き部２３ａ、シードチャック２２のピン孔２２ｂ及びシードチャックピン２４を複数有し、かつ最上部の切欠き部２３ａとシードチャックピン２４の胴部２４ａでのみ接触してシードチャック２２に種結晶２３が保持される。これにより最上部の切欠き部２３ａで破損を生じて種結晶２３がずり落ちても、最上部の次に位置する切欠き部２３ａとシードチャックピン２４の胴部２４ａとが接触して種結晶２３を保持するので、シリコン単結晶棒の落下を防止できる。
【０００６】
請求項２に係る発明は、請求項１に係る発明であって、図１又は図２に示すように、ピン孔２２ｂ及び切欠き部２３ａが３個以上形成され、隣接する切欠き部２３ａの間隔がそれぞれ等間隔に形成されかつこれらの間隔を第１間隔ｘとし、隣接するピン孔２２ｂの間隔がそれぞれ等間隔に形成されかつこれらの間隔を第２間隔ｙとするとき、第２間隔ｙが第１間隔ｘより広く形成された種結晶の保持装置である。
請求項２に係る発明では、最上部のシードチャックピン２４の胴部２４ａと最上部の切欠き部２３ａを当接させたとき、第２間隔ｙが第１間隔ｘより広く形成されているので下方に向かうに従ってピン孔２２ｂと切欠き部２３ａとの位置は一定の割合で切欠き部２３ａがピン孔２２ｂの下方に位置するようにずれを生じるので最上部以外のシードチャックピン２４の胴部２４ａと切欠き部２３ａは接触しない。
【０００７】
請求項３に係る発明は、請求項１に係る発明であって、図３に示すように、ピン孔２２ｂ及び切欠き部２３ａが３個以上形成され、隣接する切欠き部２３ａの間隔がそれぞれ等間隔に形成されかつこれらの間隔を第１間隔ｘとし、隣接するピン孔２２ｂの間隔がそれぞれ等間隔に形成されかつこれらの間隔を第２間隔ｙとするとき、第１間隔ｘと第２間隔ｙが等しく形成され、複数のシードチャックピン２４の胴部２４ａの直径が下方に向かうに従って順次小さく形成された種結晶の保持装置である。
請求項３に係る発明では、最上部のシードチャックピン２４の胴部２４ａと最上部の切欠き部２３ａを当接させたとき、下方に向かうに従って順次シードチャックピン２４の胴部２４ａの直径が小さく形成されるので最上部以外のシードチャックピン２４の胴部２４ａと切欠き部２３ａは接触しない。
【０００８】
請求項４に係る発明は、請求項１に係る発明であって、図４に示すように、ピン孔２２ｂ及び切欠き部２３ａが３個以上形成され、隣接する切欠き部２３ａの間隔がそれぞれ等間隔に形成されかつこれらの間隔を第１間隔ｘとし、隣接するピン孔２２ｂの間隔がそれぞれ等間隔に形成されかつこれらの間隔を第２間隔ｙとするとき、第１間隔ｘと第２間隔ｙが等しく形成され、複数の切欠き部２３ａが下方に向かうに従って順次大きく形成された種結晶の保持装置である。
請求項４に係る発明では、最上部のシードチャックピン２４の胴部２４ａと最上部の切欠き部２３ａを当接させたとき、下方に向かうに従って順次切欠き部２３ａが大きく形成されるので最上部以外のピンの胴部２４ａと切欠き部２３ａは接触しない。
【０００９】
請求項５に係る発明は、請求項１ないし４いずれかに係る発明であって、図２に示すように、複数のシードチャックピン２４が複数の隣接するピン孔２２ｂの間隔と同じ間隔をあけてシードチャックピン２４の一端が一体的に連結された種結晶の保持装置である。
請求項５に係る発明では、シードチャックピン２４が一体的に連結して形成されているので、同時に複数のピン孔２２ｂに挿入でき、種結晶の保持作業が容易になる。
【００１０】
【発明の実施の形態】
本発明の実施の形態を図面に基づいて説明する。
本発明の第１の実施の形態は、図６に示すように、ＣＺ法によるシリコン融液１２からシリコン単結晶棒を引上げる際に使用する引上げ装置１０では、チャンバ１１内にシリコン融液１２を貯留する石英るつぼ１３が設けられ、この石英るつぼ１３の外面は黒鉛サセプタ１４により被覆される。石英るつぼ１３の下面は上記黒鉛サセプタ１４を介して支軸１６の上端に固定され、この支軸１６の下部は図示しないるつぼ駆動手段に接続される。石英るつぼ１３の外周面は石英るつぼ１３から所定の間隔をあけてヒータ１７により包囲され、このヒータ１７は断熱材１８により包囲される。ヒータ１７により石英るつぼ１３に投入された高純度の多結晶シリコンが融解してシリコン融液１２になる。チャンバ１１の上部には回転・引上げ機構１９が設けられる。石英るつぼ１３の上方にはこの回転・引上げ機構１９からワイヤケーブル２１を介してシードチャック２２が吊り下げられ、シードチャック２２には種結晶２３が取付けられる。回転・引上げ機構１９はワイヤケーブル２１を介してシードチャック２２とともに種結晶２３を図６の実線矢印で示すように下降させ、種結晶２３を石英るつぼ１３に貯留されたシリコン融液１２に接触させる。
【００１１】
図１及び図２に示すように、シードチャック２２にはチャック本体２２ｄの中心軸ａに沿ってチャック本体２２ｄの底部に種結晶２３を挿入することができる径を有する種結晶挿入穴２２ａが形成される。また、チャック本体２２ｄの中心軸ａに直交するとともに中心軸ａに対してｂだけ偏倚してピン孔２２ｂが形成される。ピン孔２２ｂは一定方向より中心軸ａに沿ってそれぞれが重ならないように３個形成され、隣接するピン孔２２ｂの間隔は第２間隔ｙであり、それぞれ等間隔に形成される。ピン孔２２ｂはピン孔２２ｂの中央部分における断面積が約半分程度挿入穴２２ａに重なるように形成される。
【００１２】
図２の実線矢印で示すように種結晶２３は種結晶挿入穴２２ａに挿入される。挿入穴２２ａに挿入される種結晶２３の側部には切欠き部２３ａが形成される。切欠き部２３ａはピン孔２２ｂの数量と相応して一定方向よりそれぞれが重ならないように３個形成され、隣接する切欠き部２３ａの間隔は第１間隔ｘであり、それぞれ等間隔に形成される。第２間隔ｙは第１間隔ｘより広く間隔をとるように設けられる。種結晶２３を挿入穴２２ａに挿入する際に挿入穴２２ａ内のガスを外部に排出するためのガス排出孔２２ｃが挿入穴２２ａに連通するように形成される。シードチャックピン２４は隣接するピン孔２２ｂの間隔に合うように３個のシードチャックピンが一端で一体的に連結された形状を有し、図２の破線矢印で示すように３個のピン孔２２ｂにそれぞれ挿入される。挿入されたシードチャックピン２４の胴部２４ａは、最上部の切り欠き部２３ａのみが当接する。
【００１３】
このように構成された保持装置では、シリコン単結晶棒の引上げ時に生じる応力により、最上部の切欠き部２３ａから破損して種結晶２３がずり落ちても、２番目に位置する切欠き部２３ａとピン胴部２４ａが接触して種結晶２３を保持する。更に、２番目に位置する切欠き部２３ａが破損して種結晶２３がずり落ちても、３番目に位置する切欠き部２３ａとピン胴部２４ａが接触して種結晶２３を保持することができる。
【００１４】
本発明の第２実施の形態では、図３に示すように、第１間隔ｘと第２間隔を等しくして、下方に向かうに従ってシードチャックピン２４の胴部２４ａの直径を順次小さくするよう形成される。
このように構成された保持装置では、下方に位置するシードチャックピン２４のピン孔２２ｂへの挿入が容易になる。
【００１５】
本発明の第３実施の形態では、図４に示すように、第１間隔ｘと第２間隔ｙを等しくして、下方に向かうに従って切欠き部２３ａの大きさを順次大きくする。
このように構成された保持装置では、下方に位置するシードチャックピン２４のピン孔２２ｂへの挿入が容易になる。
【００１６】
なお、上記実施の形態では、シードチャック２２のピン孔２２ｂと種結晶２３の切欠き部２３ａは全て一定方向より形成されたが、図５に示すように、中心軸ａに直交していれば破線ｃ、ｄ及びｅのように特に方向性を統一しなくてもよい。これにより、接触部分の応力に対して弱く、破損し易い方向に全ての切欠き部２３ａを形成した時には何度も破損を招くおそれがあるが、色々な方向に切欠き部２３ａを形成することにより危険性を分散することができる。また、上記実施の形態では、ピン孔２２ｂ、シードチャックピン２４及び切欠き部２３ａの数をそれぞれ３個としたが、２個、４個又は５個以上でもよい。また、上記第２の実施の形態では、複数の切欠き部２３ａはそれぞれ同じ大きさとしているが、最上部の切欠き部２３ａとピン２４が当接している状態でそれぞれ下方に向かうに従って順次切欠き部２３ａの大きさをシードチャックピン２４と当接しない程度に小さくしてもよい。これにより、最上部の切欠き部２３ａより種結晶が破損しても次に位置する保持部ではより安定して保持することができる。また、上記第３の実施の形態では、複数のピンの胴部２４ａの径はそれぞれ等しく示しているが、最上部の切欠き部２３ａとピン２４が当接している状態でそれぞれ下方に向かうに従って順次ピンの胴部２４ａの径を切欠き部と当接しない程度に大きくしてもよい。これにより、最上部の切欠き部２３ａより種結晶が破損しても次に位置する保持部ではより安定して保持することができる。
【００１７】
【発明の効果】
以上述べたように、本発明によれば、ピン孔２２ｂが中心軸方向に等間隔に複数形成され、種結晶２３の切欠き部２３ａがピン孔２２ｂの数に相応して複数形成され、シードチャックピン２４が複数のピン孔２２ｂにそれぞれ挿入されかつ最上部のピン孔２２ｂに挿入したシードチャックピンの胴部２４ａのみが切欠き部２３ａに当接するように形成されたので種結晶の最上部の切欠き部より破損したときでも次に位置する切欠き部とシードチャックピンの胴部とが種結晶を保持する。この結果、種結晶の破損によるシリコン単結晶棒落下の発生率を低減することができる。
【図面の簡単な説明】
【図１】第１の実施の形態の種結晶の保持装置を示す図２のＡ−Ａ線断面図。
【図２】第１の実施の形態の種結晶の保持装置の分解斜視図。
【図３】第２の実施の形態の種結晶の保持装置を示す断面図。
【図４】第３の実施の形態の種結晶の保持装置を示す断面図。
【図５】本実施の形態の応用例を示す種結晶の切欠き部を示す構成図。
【図６】種結晶の保持装置を含むシリコン単結晶引上げ装置の構成図。
【符号の説明】
２２ シードチャック
２２ａ 種結晶挿入穴
２２ｂ ピン孔
２２ｄ チャック本体
２３ 種結晶
２３ａ 切欠き部
２４ シードチャックピン
２４ａ ピンの胴部
ａ 中心軸
ｘ 第１間隔
ｙ 第２間隔[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a seed crystal holding device of a silicon single crystal pulling apparatus by the Czochralski method (CZ method). More specifically, the present invention relates to an apparatus for holding a seed crystal that is brought into contact with a silicon melt when growing a single crystal.
[0002]
[Prior art]
Conventionally, a Czochralski method (hereinafter referred to as CZ method) in which a silicon single crystal is grown from a silicon melt in a crucible is known as a method for growing a silicon single crystal. In this method, first, polycrystalline silicon is filled in a crucible installed in a pulling apparatus. One end of the seed crystal is brought into contact with the surface of the silicon melt obtained by heating and melting the polycrystalline silicon and partially melted. Next, the seed crystal is pulled up to create a seed squeezed portion from the silicon melt, and then the crystal is gradually thickened and grown to the target silicon rod diameter. By this method, a dislocation-free single crystal rod having a necessary crystal orientation can be obtained.
[0003]
This seed crystal is usually attached to and held by a holding device suspended from a wire. In this holding device, first, a seed crystal having a notch formed in advance on its side surface is inserted into a seed crystal insertion hole formed in the bottom of the seed chuck along the center axis of the seed chuck. In this state, the seed chuck pin is inserted into a pin hole formed perpendicular to the central axis of the seed chuck and offset from the central axis. As a result, the body portion of the seed chuck pin comes into contact with the notch portion of the seed crystal, and the seed crystal is held.
[0004]
[Problems to be solved by the invention]
However, in the conventional seed crystal holding device, the length of the silicon single crystal rod is increased, and high stress concentrates on the portion where the body portion and the notch portion of the seed chuck pin contact, The seed crystal may be damaged at the notch. In this case, since the notch portion of the seed crystal, the pin hole of the seed chuck, and the seed chuck pin are each single, the silicon single crystal rod may fall into the silicon melt. In particular, with the demand for increasing the diameter of silicon single crystal rods, the weight of silicon single crystal rods pulled by seed crystals has recently been increasing. As a result, the stress at the contact portion generated when the silicon single crystal rod is pulled up becomes larger than before, and the incidence of accidents in which the silicon single crystal rod falls is further increased.
An object of the present invention is to provide a seed crystal holding device that reduces the incidence of silicon single crystal rod dropping due to breakage of the seed crystal.
[0005]
[Means for Solving the Problems]
As shown in FIG. 1 or 2, the invention according to claim 1 is orthogonal to the center axis a and the seed crystal insertion hole 22a formed in the bottom of the chuck body 22d along the center axis a of the chuck body 22d. A seed chuck 22 having a pin hole 22b formed so as to be deviated with respect to the central axis a, and an outer diameter that can be inserted into the seed crystal insertion hole 22a. In the seed crystal holding device including the seed crystal 23 in which the portion 23a is formed and the seed chuck pin 24 that is inserted into the pin hole 22b and can be brought into contact with the notch 23a, the pin hole 22b is the center. A plurality of notches 23a are formed on the side surface of the seed crystal 23 according to the number of pin holes 22b, and seed chuck pins 24 are inserted into the plurality of pin holes 22b, respectively. And a holding device of the seed crystal, characterized in that only the body portion 24a of the seed chuck pins 24 inserted into the top of the pin hole 22b is configured so as to be in contact with the notch 23a.
In the invention according to claim 1, a plurality of notches 23 a of the seed crystal 23, a pin hole 22 b of the seed chuck 22, and a seed chuck pin 24 are provided, and the uppermost notch 23 a and the body of the seed chuck pin 24 are provided. The seed crystal 23 is held on the seed chuck 22 by contact only at 24a. As a result, even if the uppermost notch 23a is damaged and the seed crystal 23 slips down, the notch 23a located next to the uppermost part and the body 24a of the seed chuck pin 24 come into contact with each other, and the seed crystal Since 23 is held, the silicon single crystal rod can be prevented from dropping.
[0006]
The invention according to claim 2 is the invention according to claim 1, wherein, as shown in FIG. 1 or 2, three or more pin holes 22 b and notches 23 a are formed, and adjacent notches 23 a When the intervals are formed at equal intervals and these intervals are defined as the first interval x, and the intervals between the adjacent pin holes 22b are formed at equal intervals and these intervals are defined as the second interval y, the second interval y Is a seed crystal holding device formed wider than the first interval x.
In the invention according to claim 2, when the body portion 24a of the uppermost seed chuck pin 24 and the uppermost notch portion 23a are brought into contact with each other, the second interval y is formed wider than the first interval x. Since the position of the pin hole 22b and the notch 23a is shifted at a certain rate as it goes downward, the notch 23a is displaced below the pin hole 22b. 24a and the notch part 23a do not contact.
[0007]
The invention according to claim 3 is the invention according to claim 1, wherein, as shown in FIG. 3, three or more pin holes 22b and notches 23a are formed, and the interval between adjacent notches 23a is respectively When the gaps are formed at equal intervals and these intervals are defined as first intervals x, and the intervals between the adjacent pin holes 22b are formed at equal intervals and these intervals are defined as second intervals y, the first intervals x and the second intervals The seed crystal holding device is formed such that the distances y are formed equally and the diameters of the body portions 24a of the plurality of seed chuck pins 24 are gradually reduced toward the lower side.
In the invention according to claim 3, when the body portion 24 a of the uppermost seed chuck pin 24 and the uppermost notch portion 23 a are brought into contact with each other, the diameter of the body portion 24 a of the seed chuck pin 24 is sequentially decreased downward. Since it is formed small, the body portion 24a of the seed chuck pin 24 other than the uppermost portion and the notch portion 23a do not contact each other.
[0008]
The invention according to claim 4 is the invention according to claim 1, wherein, as shown in FIG. 4, three or more pin holes 22 b and notches 23 a are formed, and intervals between adjacent notches 23 a are respectively set. When the gaps are formed at equal intervals and these intervals are defined as first intervals x, and the intervals between the adjacent pin holes 22b are formed at equal intervals and these intervals are defined as second intervals y, the first intervals x and the second intervals This is a seed crystal holding device in which the distance y is formed to be equal, and the plurality of cutout portions 23a are formed to increase in size in the downward direction.
In the invention according to claim 4, when the body part 24a of the uppermost seed chuck pin 24 and the uppermost notch part 23a are brought into contact with each other, the notch part 23a is formed in a larger size as it goes downward. The body 24a of the pin other than the upper part and the notch 23a do not contact each other.
[0009]
The invention according to claim 5 is the invention according to any one of claims 1 to 4, wherein, as shown in FIG. 2, the plurality of seed chuck pins 24 have the same interval as the interval between the plurality of adjacent pin holes 22b. Thus, a seed crystal holding device in which one end of the seed chuck pin 24 is integrally connected.
In the invention according to claim 5, since the seed chuck pin 24 is integrally formed, it can be inserted into the plurality of pin holes 22b at the same time, and the work of holding the seed crystal is facilitated.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
In the first embodiment of the present invention, as shown in FIG. 6, in a pulling apparatus 10 used when pulling a silicon single crystal rod from a silicon melt 12 by the CZ method, a silicon melt 12 is placed in a chamber 11. A quartz crucible 13 is provided to store the outer surface of the quartz crucible 13, and the outer surface of the quartz crucible 13 is covered with a graphite susceptor 14. The lower surface of the quartz crucible 13 is fixed to the upper end of the support shaft 16 via the graphite susceptor 14, and the lower portion of the support shaft 16 is connected to a crucible driving means (not shown). The outer peripheral surface of the quartz crucible 13 is surrounded by a heater 17 at a predetermined interval from the quartz crucible 13, and the heater 17 is surrounded by a heat insulating material 18. The high-purity polycrystalline silicon charged into the quartz crucible 13 by the heater 17 is melted into the silicon melt 12. A rotation / pull-up mechanism 19 is provided on the upper portion of the chamber 11. Above the quartz crucible 13, a seed chuck 22 is suspended from the rotation / lifting mechanism 19 via a wire cable 21, and a seed crystal 23 is attached to the seed chuck 22. The rotating / pulling mechanism 19 lowers the seed crystal 23 together with the seed chuck 22 through the wire cable 21 as shown by the solid line arrow in FIG. 6, and brings the seed crystal 23 into contact with the silicon melt 12 stored in the quartz crucible 13. .
[0011]
As shown in FIGS. 1 and 2, the seed chuck 22 has a seed crystal insertion hole 22a having a diameter capable of inserting the seed crystal 23 into the bottom of the chuck body 22d along the central axis a of the chuck body 22d. Is done. Further, the pin hole 22b is formed so as to be orthogonal to the central axis a of the chuck body 22d and offset by b with respect to the central axis a. Three pin holes 22b are formed so as not to overlap each other along the central axis a from a certain direction, and the interval between adjacent pin holes 22b is a second interval y, which is formed at equal intervals. The pin hole 22b is formed so that the cross-sectional area at the central portion of the pin hole 22b overlaps with the insertion hole 22a by about half.
[0012]
As shown by the solid line arrow in FIG. 2, the seed crystal 23 is inserted into the seed crystal insertion hole 22a. A notch 23a is formed on the side of the seed crystal 23 to be inserted into the insertion hole 22a. According to the number of pin holes 22b, three notches 23a are formed so as not to overlap each other in a certain direction. Adjacent notches 23a are spaced at a first interval x, and are formed at equal intervals. The The second interval y is provided to be wider than the first interval x. A gas discharge hole 22c for discharging the gas in the insertion hole 22a to the outside when the seed crystal 23 is inserted into the insertion hole 22a is formed to communicate with the insertion hole 22a. The seed chuck pin 24 has a shape in which three seed chuck pins are integrally connected at one end so as to fit the interval between the adjacent pin holes 22b, and the three pin holes are indicated by broken line arrows in FIG. 22b, respectively. Only the uppermost notch 23a abuts on the body 24a of the inserted seed chuck pin 24.
[0013]
In the holding device configured as described above, even if the seed crystal 23 slides down due to the stress generated when the silicon single crystal rod is pulled up and the seed crystal 23 slips down, the second notch 23a is located. And the pin body 24a come into contact with each other to hold the seed crystal 23. Furthermore, even if the second notch 23a is damaged and the seed crystal 23 slips down, the third notch 23a and the pin body 24a may contact to hold the seed crystal 23. it can.
[0014]
In the second embodiment of the present invention, as shown in FIG. 3, the first interval x is made equal to the second interval, and the diameter of the body portion 24a of the seed chuck pin 24 is sequentially reduced as it goes downward. Is done.
In the holding device configured as described above, the seed chuck pin 24 positioned below can be easily inserted into the pin hole 22b.
[0015]
In the third embodiment of the present invention, as shown in FIG. 4, the first interval x and the second interval y are made equal, and the size of the notch 23a is sequentially increased toward the lower side.
In the holding device configured as described above, the seed chuck pin 24 positioned below can be easily inserted into the pin hole 22b.
[0016]
In the above embodiment, the pin hole 22b of the seed chuck 22 and the notch 23a of the seed crystal 23 are all formed from a certain direction. However, as shown in FIG. It is not necessary to unify the directionality as indicated by broken lines c, d, and e. Thereby, when all the notches 23a are formed in a direction that is weak against the stress of the contact portion and easily breaks, there is a possibility that the damage is caused repeatedly. However, the notches 23a are formed in various directions. Can disperse the danger. Moreover, in the said embodiment, although the number of the pin hole 22b, the seed chuck pin 24, and the notch part 23a was each 3, it may be 2, 4 or 5 or more. In the second embodiment, the plurality of notches 23a have the same size. However, the top notch 23a and the pin 24 are in contact with each other, and the notches 23a are sequentially cut downward. The size of the notch 23a may be made small enough not to contact the seed chuck pin 24. As a result, even if the seed crystal is broken from the uppermost notch 23a, it can be held more stably in the next holding part. Moreover, in the said 3rd Embodiment, although the diameter of the trunk | drum 24a of a some pin is shown equally, respectively, as the uppermost notch part 23a and the pin 24 are contact | abutting, it goes to the downward direction, respectively. The diameter of the body portion 24a of the pin may be sequentially increased so as not to contact the notch portion. As a result, even if the seed crystal is broken from the uppermost notch 23a, it can be held more stably in the next holding part.
[0017]
【The invention's effect】
As described above, according to the present invention, a plurality of pin holes 22b are formed at equal intervals in the central axis direction, and a plurality of notches 23a of the seed crystal 23 are formed according to the number of pin holes 22b. Since the chuck pin 24 is inserted into each of the plurality of pin holes 22b and only the body portion 24a of the seed chuck pin inserted into the uppermost pin hole 22b is formed so as to contact the notch portion 23a, the uppermost portion of the seed crystal Even when the notch is damaged, the next notch and the body of the seed chuck pin hold the seed crystal. As a result, it is possible to reduce the incidence rate of silicon single crystal rod dropping due to seed crystal breakage.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view taken along line AA of FIG. 2 showing a seed crystal holding device according to a first embodiment.
FIG. 2 is an exploded perspective view of the seed crystal holding device according to the first embodiment.
FIG. 3 is a cross-sectional view showing a seed crystal holding device according to a second embodiment.
FIG. 4 is a sectional view showing a seed crystal holding device according to a third embodiment.
FIG. 5 is a configuration diagram showing a notch portion of a seed crystal showing an application example of the present embodiment.
FIG. 6 is a configuration diagram of a silicon single crystal pulling apparatus including a seed crystal holding apparatus.
[Explanation of symbols]
22 Seed chuck 22a Seed crystal insertion hole 22b Pin hole 22d Chuck body 23 Seed crystal 23a Notch portion 24 Seed chuck pin 24a Pin body a Center axis x First interval y Second interval

Claims (5)

チャック本体(22d)の中心軸(a)に沿って前記チャック本体(22d)の底部に形成された種結晶挿入穴(22a)と前記中心軸(a)に直交するとともに前記中心軸(a)に対して偏倚して形成されたピン孔(22b)とを有するシードチャック(22)と、
前記種結晶挿入穴(22a)に挿入可能な外径を有し挿入状態で前記ピン孔(22b)に対向する側面に切欠き部(23a)が形成された種結晶(23)と、
前記ピン孔(22b)に挿入され胴部(24a)が前記切欠き部(23a)に当接可能なシードチャックピン(24)とを備えた種結晶の保持装置において、
前記ピン孔(22b)が前記中心軸(a)方向に間隔をあけて複数形成され、
前記切欠き部(23a)が前記種結晶(23)の側面に前記ピン孔(22b)の数に相応して複数形成され、
前記シードチャックピン(24)が前記複数のピン孔(22b)にそれぞれ挿入されかつ最上部のピン孔(22b)に挿入したシードチャックピン(24)の胴部(24a)のみが前記切欠き部(23a)に当接するように構成された
ことを特徴とする種結晶の保持装置。A seed crystal insertion hole (22a) formed in the bottom of the chuck body (22d) along the center axis (a) of the chuck body (22d) and perpendicular to the center axis (a) and the center axis (a) A seed chuck (22) having a pin hole (22b) formed to be biased with respect to
A seed crystal (23) having an outer diameter that can be inserted into the seed crystal insertion hole (22a) and having a notch (23a) formed on a side surface facing the pin hole (22b) in the inserted state;
In the seed crystal holding device provided with a seed chuck pin (24) that is inserted into the pin hole (22b) and the body part (24a) can come into contact with the notch part (23a),
A plurality of pin holes (22b) are formed at intervals in the direction of the central axis (a),
A plurality of the notches (23a) are formed on the side surface of the seed crystal (23) according to the number of the pin holes (22b),
The seed chuck pin (24) is inserted into each of the plurality of pin holes (22b), and only the trunk portion (24a) of the seed chuck pin (24) inserted into the uppermost pin hole (22b) is the notch portion. (23a) A seed crystal holding device configured to abut on (23a). ピン孔(22b)及び切欠き部(23a)が３個以上形成され、隣接する切欠き部(23a)の間隔がそれぞれ等間隔に形成されかつこれらの間隔を第１間隔(x)とし、隣接するピン孔(22b)の間隔がそれぞれ等間隔に形成されかつこれらの間隔を第２間隔(y)とするとき、
前記第２間隔(y)が前記第１間隔(x)より広く形成された請求項１記載の種結晶の保持装置。Three or more pin holes (22b) and notches (23a) are formed, and the intervals between adjacent notches (23a) are formed at equal intervals, and these intervals are defined as the first interval (x). When the intervals of the pin holes (22b) to be formed are equally spaced and these intervals are the second interval (y),
The seed crystal holding device according to claim 1, wherein the second interval (y) is formed wider than the first interval (x). ピン孔(22b)及び切欠き部(23a)が３個以上形成され、隣接する切欠き部(23a)の間隔がそれぞれ等間隔に形成されかつこれらの間隔を第１間隔(x)とし、隣接するピン孔(22b)の間隔がそれぞれ等間隔に形成されかつこれらの間隔を第２間隔(y)とするとき、
前記第１間隔(x)と前記第２間隔(y)が等しく形成され、複数のシードチャックピン(24)の胴部(24a)の直径が下方に向かうに従って順次小さく形成された請求項１記載の種結晶の保持装置。Three or more pin holes (22b) and notches (23a) are formed, and the intervals between adjacent notches (23a) are formed at equal intervals, and these intervals are defined as the first interval (x). When the intervals of the pin holes (22b) to be formed are equally spaced and these intervals are the second interval (y),
The first interval (x) and the second interval (y) are formed equal to each other, and the diameters of the body portions (24a) of the plurality of seed chuck pins (24) are sequentially formed to be smaller. Seed crystal holding device. ピン孔(22b)及び切欠き部(23a)が３個以上形成され、隣接する切欠き部(23a)の間隔がそれぞれ等間隔に形成されかつこれらの間隔を第１間隔(x)とし、隣接するピン孔(22b)の間隔がそれぞれ等間隔に形成されかつこれらの間隔を第２間隔(y)とするとき、
前記第１間隔(x)と前記第２間隔(y)が等しく形成され、前記複数の切欠き部(23a)が下方に向かうに従って順次大きく形成された請求項１記載の種結晶の保持装置。Three or more pin holes (22b) and notches (23a) are formed, and the intervals between adjacent notches (23a) are formed at equal intervals, and these intervals are defined as the first interval (x). When the intervals of the pin holes (22b) to be formed are equally spaced and these intervals are the second interval (y),
The seed crystal holding device according to claim 1, wherein the first interval (x) and the second interval (y) are formed to be equal, and the plurality of notches (23 a) are formed to be gradually increased downward. 複数のシードチャックピン(24)が複数の隣接するピン孔(22b)の間隔と同じ間隔をあけて前記シードチャックピン(24)の一端が一体的に連結された請求項１ないし４いずれか記載の種結晶の保持装置。5. The end of the seed chuck pin (24) is integrally connected with a plurality of seed chuck pins (24) at the same interval as a plurality of adjacent pin holes (22 b). Seed crystal holding device.
JP25513599A 1999-09-09 1999-09-09 Seed crystal holding device Expired - Fee Related JP3700490B2 (en)

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KR20030047492A (en) * 2001-12-11 2003-06-18 주식회사 실트론 A chucking apparatus of silicon ingot
CN1308501C (en) * 2002-02-25 2007-04-04 中国科学院福建物质结构研究所 Laser seed crystal centering method for top seed crystal process of growing crystal
CN102383188A (en) * 2010-09-06 2012-03-21 江西同人电子材料有限公司 Seed crystal and seed crystal fixture
CN102628179B (en) * 2012-05-04 2015-12-16 杭州海纳半导体有限公司 Seedholder and the using method of silicon single crystal is prepared for vertical pulling method
KR101382246B1 (en) 2012-07-20 2014-04-07 디케이아즈텍 주식회사 Seed chuck used in ingot grower and ingot grower using the same

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