JP3505904B2 - Heater hanging jig - Google Patents
Heater hanging jigInfo
- Publication number
- JP3505904B2 JP3505904B2 JP06885296A JP6885296A JP3505904B2 JP 3505904 B2 JP3505904 B2 JP 3505904B2 JP 06885296 A JP06885296 A JP 06885296A JP 6885296 A JP6885296 A JP 6885296A JP 3505904 B2 JP3505904 B2 JP 3505904B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- arm portion
- side arm
- end side
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体単結晶引上
装置の気密容器内に配されるヒータを、昇降機構に接続
された状態で吊り上げるヒータ吊り治具に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater hoisting jig for hoisting a heater arranged in an airtight container of a semiconductor single crystal pulling apparatus while being connected to an elevating mechanism.
【０００２】[0002]
【従来の技術】従来、シリコン（Ｓｉ）やガリウムヒ素
（ＧａＡｓ）等の半導体単結晶を成長する方法の一つと
して、ＣＺ法が知られている。このＣＺ法は、大口径、
高純度の単結晶が無転位あるいは格子欠陥の極めて少な
い状態で容易に得られること等の特徴を有することか
ら、様々な半導体結晶の成長に用いられている方法であ
る。2. Description of the Related Art Conventionally, the CZ method is known as one of the methods for growing a semiconductor single crystal such as silicon (Si) or gallium arsenide (GaAs). This CZ method has a large diameter,
It is a method used for the growth of various semiconductor crystals because it has characteristics such that a high-purity single crystal can be easily obtained without dislocations or with very few lattice defects.
【０００３】近年、単結晶の大口径化に伴い、半導体融
液を貯留するルツボ等の部材の大口径化が図られてい
る。特に、前記ルツボを囲んで半導体融液を加熱するヒ
ータはルツボより大口径の重量物であることから、引上
機内への組込や取り外しの際に、クレーンによって前記
ヒータを吊り上げて作業を行っていた。すなわち、従来
は、ヒータ上部等の複数箇所にアイボルトを取り付けて
これらのアイボルトにクレーンに連結されたワイヤーを
玉掛けすることによってヒータを吊り上げていた。In recent years, along with the increase in the diameter of single crystals, the diameter of members such as crucibles for storing a semiconductor melt has been increased. In particular, since the heater that surrounds the crucible and heats the semiconductor melt is a heavy object having a diameter larger than that of the crucible, the heater is lifted by a crane to perform the work when it is installed in or removed from the lifting machine. Was there. That is, conventionally, the heater is lifted by attaching eyebolts to a plurality of places such as the upper portion of the heater and slinging a wire connected to the crane on the eyebolts.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来のヒータの吊り上げ手段には、以下のような課題が残
されている。すなわち、吊り上げ時には、ヒータに複数
のアイボルト等の吊り上げ用の部材を取り付けなければ
ならないとともに、半導体単結晶引上装置の稼働時にお
いて、ヒータ自体が高温となるとともに前記部材による
引上機内の汚染を防ぐため、ヒータを引上機内に設置し
た後に前記部材を取り外さなければならないという手間
がかかっていた。また、ヒータは重量物であるとともに
カーボン等の脆い材料で形成されているため、アイボル
ト等の部材を取り付ける部分が損傷するおそれがあり、
この部分に高い強度を持たせる必要があることから設計
上の制約をも伴っていた。However, the above-mentioned conventional lifting means for the heater has the following problems. That is, at the time of hoisting, a plurality of hoisting members such as eyebolts must be attached to the heater, and at the time of operation of the semiconductor single crystal hoisting device, the heater itself becomes hot and the inside of the hoisting machine is contaminated by the members. In order to prevent this, it takes time and effort to remove the member after installing the heater in the lifting machine. In addition, since the heater is a heavy material and is made of a brittle material such as carbon, there is a possibility that a portion to which a member such as an eyebolt is attached is damaged.
Since it is necessary to have high strength in this portion, there were restrictions in design.
【０００５】本発明は、前述の課題に鑑みてなされたも
ので、半導体単結晶引上装置の引上機内にヒータを設置
する際に、吊り上げ用の部材をヒータに取り付けること
なく、容易かつ安定にヒータを吊り上げることができる
ヒータ吊り治具を提供することを目的とする。The present invention has been made in view of the above problems, and when installing the heater in the pulling machine of the semiconductor single crystal pulling apparatus, it is easy and stable without attaching a lifting member to the heater. It is an object of the present invention to provide a heater suspension jig that can suspend a heater.
【０００６】[0006]
【課題を解決するための手段】本発明は、前記課題を解
決するために以下の構成を採用した。すなわち、請求項
１記載のヒータ吊り治具は、半導体単結晶引上装置の気
密容器内に配されるとともに少なくとも上端が閉じた複
数の縦スリットが形成された円筒状のヒータを、昇降機
構に接続された状態で吊り上げるヒータ吊り治具であっ
て、前記昇降機構に上部が接続されて垂下状態とされる
中心軸部材と、該中心軸部材の下部から水平方向に放射
状に延在して設けられるとともに前記ヒータの半径より
長く設定された複数の支持腕部とを備え、これらの支持
腕部は、その先端に前記ヒータの内側から前記縦スリッ
トに差し込んで縦スリットの上端に係止状態とされる係
止用爪部が設けられるとともに、上方にのみ折り畳み可
能とされている。The present invention has the following features to attain the object mentioned above. That is, in the heater lifting jig according to claim 1, a cylindrical heater, which is arranged in an airtight container of a semiconductor single crystal pulling apparatus and has a plurality of vertical slits having at least upper ends closed, is used as a lifting mechanism. A heater suspension jig for suspending in a connected state, the center shaft member having an upper part connected to the elevating mechanism and being in a suspended state, and provided extending radially from the lower part of the center shaft member in a horizontal direction. And a plurality of supporting arm portions that are set to be longer than the radius of the heater, and these supporting arm portions are inserted into the vertical slits from the inside of the heater at their tips and are locked to the upper ends of the vertical slits. The locking claw portion is provided and can be folded only upward.
【０００７】このヒータ吊り治具では、ヒータを気密容
器内に設置する場合や取り外す場合に、各支持腕部を上
方に折り畳み可能としているので、本発明のヒータ吊り
治具をヒータの上方から下降させてヒータの内側に入れ
た後に、各支持腕部を直線状に伸ばして、縦スリットに
差し込むとともに縦スリットの上端に係止用爪部を係止
させ、上昇させることにより、ヒータが吊り上がる。ま
た、ヒータを設置した後、ヒータ吊り治具をヒータから
取り外すには、各支持腕部を再び折り畳み状態として上
昇させるだけでよい。したがって、ヒータに吊り上げ用
の部材を取り付ける必要が無く、また縦スリットの上端
で支持するので、ヒータに支持部分を特に形成する必要
が無い。In this heater suspension jig, each support arm can be folded upward when the heater is installed in the airtight container or removed, so that the heater suspension jig of the present invention is lowered from above the heater. After putting the heater inside the heater, straighten each support arm, insert it into the vertical slit, lock the locking claw at the upper end of the vertical slit, and raise it to lift the heater. . Further, after installing the heater, in order to remove the heater suspension jig from the heater, it is only necessary to raise each support arm in the folded state again and raise it. Therefore, it is not necessary to attach a lifting member to the heater, and since the heater is supported by the upper end of the vertical slit, it is not necessary to particularly form a supporting portion on the heater.
【０００８】請求項２記載のヒータ吊り治具では、請求
項１記載のヒータ吊り治具において、前記支持腕部は、
その長さが調整可能とされている。According to a second aspect of the present invention, there is provided the heater suspension jig according to the first aspect, wherein the supporting arm portion is
Its length is adjustable.
【０００９】このヒータ吊り治具では、支持腕部の長さ
が調整可能とされているので、口径の異なるヒータを吊
り上げて気密容器内に設置する場合でも、そのヒータの
内径に合わせて支持腕部の長さを調整することにより、
異なるサイズのヒータに交換する作業が容易となる。In this heater suspension jig, the length of the support arm can be adjusted, so that even when a heater with a different diameter is lifted and placed in an airtight container, the support arm is adjusted to the inner diameter of the heater. By adjusting the length of the part,
It becomes easy to replace the heater with a heater of a different size.
【００１０】請求項３記載のヒータ吊り治具では、請求
項１または２記載のヒータ吊り治具において、前記係止
用爪部は、前記縦スリットに差し込まれた状態で前記ヒ
ータの内側面または外側面に近接する位置に上方に突出
する位置決め突出部を備えている。A heater hanging jig according to a third aspect is the heater hanging jig according to the first or second aspect, in which the locking claw portion is inserted into the vertical slit, the inner surface of the heater or A positioning protrusion that protrudes upward is provided at a position close to the outer surface.
【００１１】このヒータ吊り治具では、係止用爪部に位
置決め突出部を備えているので、縦スリットの上端で支
持されたヒータに横方向に力が加わっても、位置決め突
出部がヒータの内側面または外側面に当接することによ
りヒータがずれることがない。In this heater suspension jig, since the locking claw portion is provided with the positioning protrusion, even if a force is applied in the lateral direction to the heater supported by the upper end of the vertical slit, the positioning protrusion does not move. The heater is not displaced by coming into contact with the inner surface or the outer surface.
【００１２】請求項４記載のヒータ吊り治具では、請求
項１から３のいずれかに記載のヒータ吊り治具であっ
て、前記支持腕部は、前記中心軸部材に基端が接続され
た基端側腕部と該基端側腕部の先端に接続された先端側
腕部とから構成されるとともに、該先端側腕部が基端側
腕部の先端を支点にして先端側腕部に対して上方にのみ
折り畳み可能とされている。A heater hanging jig according to a fourth aspect is the heater hanging jig according to any one of the first to third aspects, in which the base end of the support arm is connected to the central shaft member. It is composed of a proximal end side arm part and a distal end side arm part connected to the distal end of the proximal end side arm part, and the distal end side arm part uses the distal end of the proximal end side arm part as a fulcrum. It is possible to fold only above.
【００１３】このヒータ吊り治具では、先端側腕部が基
端側腕部の先端を支点にして先端側腕部に対して上方に
のみ折り畳み可能とされているので、ヒータの上方から
内側に支持腕部を伸ばした状態でこのヒータ吊り治具を
入れる場合に、ヒータの上端に先端側腕部が当接すると
ともに、先端側腕部の先端を支点として上方に屈曲して
折り畳まれる。すなわち、ヒータ上端に当接して折り畳
まれるのが、支持腕部全体ではなく先端側腕部のみであ
るため、カーボン等の脆い材料で成形されるヒータに加
わる荷重が低減される。In this heater hanging jig, since the distal arm portion can be folded only upward with respect to the distal arm portion with the distal end of the proximal arm portion serving as a fulcrum, it can be inwardly extended from above the heater. When the heater suspension jig is inserted with the support arm extended, the tip-side arm contacts the upper end of the heater and is bent and folded upward with the tip of the tip-side arm as a fulcrum. That is, it is not the entire support arm portion that is folded into contact with the upper end of the heater but only the distal end side arm portion, so the load applied to the heater formed of a brittle material such as carbon is reduced.
【００１４】請求項５記載のヒータ吊り治具では、請求
項４記載のヒータ吊り治具において、前記先端側腕部
は、その上部に突出し折り畳み状態で前記基端側腕部の
上部に当接して折り畳み範囲を規制する折り畳みストッ
パを備えているA heater hanging jig according to a fifth aspect is the heater hanging jig according to the fourth aspect, in which the distal end side arm portion projects upward and abuts the upper end of the proximal end side arm portion in a folded state. Equipped with a folding stopper that regulates the folding range
【００１５】このヒータ吊り治具では、先端側腕部に折
り畳みストッパが設けられているので、支持腕部を折り
畳み状態にしたときに、折り畳みストッパが基端側腕部
の上部に当接することにより、支持腕部が一定以上の角
度に屈曲せずに折り畳み範囲が規制される。In this heater suspension jig, since the folding stopper is provided on the distal arm portion, when the supporting arm portion is folded, the folding stopper abuts on the upper portion of the proximal arm portion. The folding range is restricted without the support arm portion bending at a certain angle or more.
【００１６】[0016]
【発明の実施の形態】以下に、本発明に係るヒータ吊り
治具の一形態について図１から図３を参照して説明す
る。これらの図にあって、符号１はヒータ吊り治具、２
はヒータ、３はクレーン、４は中心軸部材、５は支持腕
部を示している。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a heater hanging jig according to the present invention will be described below with reference to FIGS. In these drawings, reference numeral 1 is a heater hanging jig, 2
Is a heater, 3 is a crane, 4 is a central shaft member, and 5 is a support arm.
【００１７】本形態におけるヒータ吊り治具１は、半導
体単結晶引上装置の気密容器内に配されるとともに、図
１および図２に示すように、複数の縦スリット２Ａ，２
Ｂが形成された円筒状のカーボン製ヒータ２を、クレー
ン３（昇降機構）のワイヤーＹに接続された状態で吊り
上げるものである。前記ヒータ２の縦スリット２Ａ，２
Ｂは、上端が閉じた縦スリット２Ａと下端が閉じた縦ス
リット２Ｂが交互に形成され、通電時におけるヒータ２
の電流経路を長く設定している。The heater suspension jig 1 in this embodiment is arranged in an airtight container of a semiconductor single crystal pulling apparatus, and as shown in FIGS. 1 and 2, a plurality of vertical slits 2A, 2A.
The cylindrical carbon heater 2 formed with B is lifted while being connected to the wire Y of the crane 3 (elevating mechanism). Vertical slits 2A, 2 of the heater 2
In B, the vertical slits 2A whose upper ends are closed and the vertical slits 2B whose lower ends are closed are alternately formed.
The current path of is set long.
【００１８】このヒータ吊り治具１は、図２および図３
に示すように、前記ワイヤーＹに上部に取り付けられた
アイボルト部４ａが玉掛けされて垂下状態とされる長尺
の中心軸部材４と、該中心軸部材４の下部に固定された
円盤部４ｂに基端が固定されるとともに水平方向に放射
状に延在して設けられ前記ヒータ２の半径より長い３本
の支持腕部５とを備えている。This heater suspension jig 1 is shown in FIG. 2 and FIG.
As shown in FIG. 3, the eyebolt portion 4 a attached to the upper portion of the wire Y is slid to suspend the long central shaft member 4 and the disc portion 4 b fixed to the lower portion of the central shaft member 4. The base end is fixed, and three support arm portions 5 are provided that extend radially in the horizontal direction and are longer than the radius of the heater 2.
【００１９】これらの支持腕部５は、中心軸部材４を中
心として互いに１２０゜の角度間隔で配され、中心軸部
材４に基端が固定された基端側腕部６と該基端側腕部７
の先端に接続された先端側腕部７とから構成される。ま
た支持腕部５は、基端側腕部６の先端を支点にして先端
側腕部７を回転させ上方にのみ折り畳み可能とされると
ともに、伸ばした状態では基端側腕部６における先端の
下部に固定された支持板６ａによって、先端側腕部７の
下方への回転が抑制され、水平方向に直線状に伸びた状
態が維持される。These supporting arm portions 5 are arranged at an angular interval of 120 ° with respect to the central shaft member 4, and the proximal end arm portion 6 having the proximal end fixed to the central shaft member 4 and the proximal end side. Arm 7
And the distal end side arm portion 7 connected to the distal end of the. Further, the support arm portion 5 can be folded only upward by rotating the tip end side arm portion 7 with the tip end of the base end side arm portion 6 as a fulcrum, and in the extended state, the tip end portion of the base end side arm portion 6 can be folded. The support plate 6a fixed to the lower portion suppresses the downward rotation of the distal end side arm portion 7 and maintains the linearly extended state in the horizontal direction.
【００２０】前記先端側腕部７は、その上部に折り畳み
状態で基端側腕部６の上部に当接して折り畳み範囲を規
制する矩形状の折り畳みストッパ７ａを備えている。ま
た、先端側腕部７には、先端から延在方向に突出状態に
係止用爪部８が取り付けられ、該係止用爪部８は、ヒー
タ２を吊り上げる際に、ヒータ２の内側から縦スリット
２Ａに差し込んで縦スリット２Ａの上端に係止状態とさ
れるものである。The tip side arm portion 7 is provided with a rectangular folding stopper 7a on the upper portion thereof, which comes into contact with the upper portion of the proximal end side arm portion 6 in a folded state to regulate the folding range. A locking claw portion 8 is attached to the distal end side arm portion 7 so as to project in the extending direction from the distal end. The locking claw portion 8 is attached from the inside of the heater 2 when the heater 2 is lifted. It is inserted into the vertical slit 2A so as to be locked at the upper end of the vertical slit 2A.
【００２１】さらに、先端側腕部７は、その延在方向に
沿って一定間隔に並べて形成された２つの雌螺子孔７ｂ
が形成されるとともに、前記係止用爪部８には前記雌螺
子孔７ｂと同間隔で貫通孔８ａが４つ形成されている。
係止用爪部８は、その側部に先端側腕部７と同じ幅に設
定された凹部８ｂが形成されており、該凹部８ｂに先端
側腕部７をはめ込むとともに先端側腕部７の先端から所
定量突出する位置に取り付けられる。すなわち支持腕部
５を直線状に伸ばした状態で、中心軸部材４の軸線から
係止用爪部８の先端までの長さが、吊り上げるヒータ２
の半径以上となる位置で、前記貫通孔８ａにボルト９を
挿通させるとともに前記雌螺子孔７ｂに螺着させて、係
止用爪部８が先端側腕部７に固定される。Further, the distal arm portion 7 has two female screw holes 7b formed side by side at regular intervals along the extending direction thereof.
In addition, four through holes 8a are formed in the locking claw portion 8 at the same intervals as the female screw holes 7b.
The locking claw portion 8 is formed with a recess 8b having the same width as that of the distal end side arm portion 7 on the side thereof. The distal end side arm portion 7 is fitted into the recessed portion 8b and the distal end side arm portion 7 has It is attached at a position that protrudes from the tip by a predetermined amount. That is, in the state where the support arm portion 5 is linearly extended, the length from the axis of the central shaft member 4 to the tip of the locking claw portion 8 is lifted by the heater 2
The bolt 9 is inserted into the through hole 8a and screwed into the female screw hole 7b at a position where the radius is equal to or larger than the radius, and the locking claw portion 8 is fixed to the distal end side arm portion 7.
【００２２】なお、ボルト９を挿通および螺着させる貫
通孔８ａおよび雌螺子孔７ｂを変更して係止用爪部８を
取り付けることにより、支持腕部５の長さを変更するこ
とができる。The length of the support arm portion 5 can be changed by changing the through hole 8a through which the bolt 9 is inserted and screwed and the female screw hole 7b and attaching the locking claw portion 8.
【００２３】また、係止用爪部８は、その先端上部から
内方に離間した位置に上方に矩形状に突出する位置決め
突出部８ｃが形成されている。該位置決め突出部８ｃの
位置は、支持腕部５を直線状に伸ばした状態で、中心軸
部材４の軸線から位置決め突出部８ｃの先端側までの長
さが、吊り上げるヒータ２の内半径より僅かに短くなる
ように設定されている。Further, the locking claw portion 8 is formed with a positioning protrusion 8c protruding upward in a rectangular shape at a position spaced inwardly from the upper end of the locking claw portion 8. The position of the positioning protrusion 8c is such that the length from the axis of the central shaft member 4 to the tip end side of the positioning protrusion 8c is slightly smaller than the inner radius of the heater 2 to be lifted when the support arm 5 is linearly extended. It is set to be short.
【００２４】以下に、本発明に係るヒータ吊り治具１の
一形態におけるヒータ２の吊り上げ方法について説明す
る。A method of hoisting the heater 2 in one form of the heater hoisting jig 1 according to the present invention will be described below.
【００２５】〔ヒータ吊り治具セット工程〕まず、この
ヒータ吊り治具１を、中心軸部材４の上部に引上機（気
密容器）に隣接されたクレーン３のワイヤーＹを接続す
るとともに垂下状態とし、各支持腕部５は基端側腕部６
の先端を支点として上方に折り畳み状態とする。この状
態のヒータ吊り治具１を、クレーン３により台車上に載
置されたヒータ２の中心軸上方からその内側に降ろして
いく。[Heater Hanging Jig Setting Step] First, the heater hanging jig 1 is connected to the wire Y of the crane 3 adjacent to the lifting machine (airtight container) on the upper part of the central shaft member 4 and is hung down. And each support arm 5 is a proximal arm 6
Fold it upward with its tip as the fulcrum. The heater hanging jig 1 in this state is lowered by the crane 3 from above the central axis of the heater 2 placed on the carriage to the inside thereof.
【００２６】ヒータ吊り治具１をヒータ２内側の所定位
置まで降ろした後、折り畳み状態の各支持腕部５を伸ば
して基端側腕部６と先端側腕部７とを水平方向に直線状
にするとともに、各係止用爪部８をヒータ２の縦スリッ
ト２Ａに内側から差し込む。この状態で、クレーン３に
よりヒータ吊り治具１を上昇させると、各係止用爪部８
が縦スリット２Ａに沿って上昇し、縦スリット２Ａの上
端で係止状態となる。After lowering the heater suspension jig 1 to a predetermined position inside the heater 2, each supporting arm portion 5 in the folded state is extended to linearly form the proximal end side arm portion 6 and the distal end side arm portion 7 in a horizontal direction. In addition, each locking claw portion 8 is inserted into the vertical slit 2A of the heater 2 from the inside. In this state, when the heater suspension jig 1 is raised by the crane 3, each locking claw portion 8
Rises along the vertical slit 2A and is locked at the upper end of the vertical slit 2A.
【００２７】〔ヒータ吊り上げ工程〕上記状態から、さ
らにヒータ吊り治具１を上昇させると、ヒータ２は縦ス
リット２Ａの上端において係止用爪部８に支持された状
態で台車から吊り上げられる。吊り上げたヒータ２を、
引上機上に移動するとともに、クレーン３により引上機
内に下降させ、引上機内の所定位置まで降ろして載置す
る。[Heater Lifting Step] When the heater lifting jig 1 is further raised from the above state, the heater 2 is lifted from the carriage while being supported by the locking claw portion 8 at the upper end of the vertical slit 2A. The heater 2 that was hung up,
While moving to the lifting machine, it is lowered into the lifting machine by the crane 3 and lowered to a predetermined position in the lifting machine and placed.
【００２８】〔ヒータ吊り治具取り外し工程〕さらにク
レーン３によりヒータ吊り治具１を下降させると、係止
用爪部８は縦スリット２Ａの上端から該縦スリット２Ａ
に沿って下降する。この後、先端側腕部７を、基端側腕
部６の先端を支点にして上方に折り畳み状態として係止
用爪部８を縦スリット２Ａから抜き出す。この状態で、
クレーン３によりヒータ吊り治具１を再び上昇させ、ヒ
ータ２および引上機内から取り出す。[Heater-hanging jig removing step] When the heater-hanging jig 1 is further lowered by the crane 3, the locking claw portion 8 extends from the upper end of the vertical slit 2A to the vertical slit 2A.
Descend along. After that, the front end side arm portion 7 is folded upward with the front end of the base end side arm portion 6 as a fulcrum, and the locking claw portion 8 is pulled out from the vertical slit 2A. In this state,
The crane 3 lifts the heater lifting jig 1 again and takes it out from the heater 2 and the inside of the lifting machine.
【００２９】なお、このヒータ吊り治具１を、各支持腕
部５を伸ばして基端側腕部６と先端側腕部７とを直線状
にした状態でヒータ２内に入れる場合でも、縦スリット
２Ｂ以外の位置に支持腕部５を配することにより、先端
側腕部７がヒータ２の上端に当接して上方に折り畳み状
態となり、ヒータ２への取り付け作業に支障は生じな
い。このとき、ヒータ２上端に当接して折り畳まれるの
が、支持腕部５全体ではなく先端側腕部７のみであるた
め、カーボン等の脆い材料で成形されるヒータ２に加わ
る荷重が低減される。Even when the heater suspension jig 1 is inserted into the heater 2 in a state where the support arm portions 5 are extended and the base end side arm portions 6 and the tip end side arm portions 7 are linearly formed, By disposing the support arm portion 5 at a position other than the slit 2B, the distal end side arm portion 7 abuts on the upper end of the heater 2 and is folded upward, so that the attachment work to the heater 2 is not hindered. At this time, it is not the entire support arm portion 5 that is abutted against the upper end of the heater 2 but folded, but only the distal end side arm portion 7, so the load applied to the heater 2 formed of a brittle material such as carbon is reduced. .
【００３０】このヒータ吊り治具１では、上述したよう
に、ヒータ２を引上機内に設置する場合や取り外す場合
に、各支持腕部５が上方に折り畳み可能とされているの
で、ヒータ吊り治具１をヒータ２の上方から下降させて
ヒータ２の内側へ入れるとともに、各支持腕部５を直線
状に伸ばして、縦スリット２Ａの上端に係止用爪部８を
係止させ、上昇させることにより、ヒータ２を吊り上げ
ることができる。In the heater hanging jig 1, as described above, when the heater 2 is installed in the lifting machine or removed, the supporting arm portions 5 can be folded upward, so that the heater hanging jig can be lifted. The tool 1 is lowered from above the heater 2 and put into the inside of the heater 2, and each supporting arm portion 5 is linearly extended so that the locking claw portion 8 is locked to the upper end of the vertical slit 2A and raised. As a result, the heater 2 can be lifted.
【００３１】また、設置した後、ヒータ吊り治具１をヒ
ータ２から取り外すには、各支持腕部５を再び折り畳み
状態として上昇させるだけでよい。したがって、ヒータ
２に吊り上げ用の部材を取り付ける必要が無く、また縦
スリット２Ａの上端で支持するので、ヒータ２に支持部
分を特に形成する必要が無い。Further, after installation, in order to remove the heater suspension jig 1 from the heater 2, it is only necessary to raise each support arm portion 5 again in the folded state. Therefore, it is not necessary to attach a lifting member to the heater 2, and since it is supported by the upper end of the vertical slit 2A, it is not necessary to particularly form a supporting portion on the heater 2.
【００３２】さらに、係止用爪部８の取り付け位置を変
更することにより、支持腕部５の長さが調整可能である
ので、口径の異なるヒータを吊り上げて引上機内に設置
する場合でも、そのヒータの内径に合わせて支持腕部５
の長さを調整することにより、異なるサイズのヒータに
交換する作業が容易となる。例えば、図２および図３に
示すように、ヒータ２より半径の大きいヒータ１２を吊
り上げる場合には、予め係止用爪部８の突出量を大きく
設定して、支持腕部５を長く設定する。Further, since the length of the support arm portion 5 can be adjusted by changing the mounting position of the locking claw portion 8, even when a heater having a different diameter is lifted up and installed in the lifting machine, Support arm 5 according to the inner diameter of the heater
By adjusting the length of the heater, it becomes easy to replace the heater with a heater of a different size. For example, as shown in FIGS. 2 and 3, when the heater 12 having a larger radius than the heater 2 is lifted, the protrusion amount of the locking claw portion 8 is set to be large in advance and the support arm portion 5 is set to be long. .
【００３３】また、先端側腕部７に折り畳みストッパ７
ａが設けられているので、支持腕部５を折り畳み状態に
したときに、折り畳みストッパ７ａが基端側腕部６の上
部に当接することにより、支持腕部５が一定以上の角度
に屈曲せず折り畳み範囲が規制される。すなわち、必要
以上に支持腕部５が折り畳まれることがないので、折り
畳み時に先端側腕部７の先端が中心軸部材４と干渉する
ことを防ぐとともに、支持腕部５の屈伸作業が容易とな
る。Further, the folding stopper 7 is attached to the front arm portion 7.
Since a is provided, when the support arm portion 5 is folded, the folding stopper 7a abuts the upper portion of the proximal end side arm portion 6 so that the support arm portion 5 is bent at a certain angle or more. The folding range is restricted. That is, since the support arm 5 is not folded more than necessary, it is possible to prevent the tip of the tip side arm 7 from interfering with the central shaft member 4 at the time of folding and facilitate the work of bending the support arm 5. .
【００３４】そして、係止用爪部８の上部に位置決め突
出部８ｃを備えているので、縦スリット２Ａの上端で支
持されたヒータ２に横方向に力が加わっても、位置決め
突出部８ｃがヒータ２側面に当接することによりヒータ
２がずれることがない。Since the positioning projection 8c is provided on the upper portion of the locking claw portion 8, even if a force is applied to the heater 2 supported by the upper end of the vertical slit 2A in the lateral direction, the positioning projection 8c is formed. The heater 2 will not be displaced by coming into contact with the side surface of the heater 2.
【００３５】なお、本発明は、次のような実施形態をも
含むものである。
（１）本形態では、支持腕部５を基端側腕部６および先
端側腕部７で分割した構成としたが、上方に折り畳み可
能とされるなら、他の構成の支持腕部でも構わない。例
えば、中心軸部材に接続される基端を支点として、上方
に折り畳み可能に取り付けられた一体ものの（すなわ
ち、分割されていない）支持腕部でもよい。The present invention also includes the following embodiments. (1) In the present embodiment, the support arm portion 5 is divided into the base end side arm portion 6 and the tip end side arm portion 7, but if it can be folded upward, a support arm portion having another configuration may be used. Absent. For example, an integral (that is, undivided) support arm portion that is foldably attached upward with the base end connected to the central shaft member as a fulcrum may be used.
【００３６】（２）本形態では、中心軸部材４に３本の
支持腕部５が取り付けられているが、３本に限らず複数
本であれば構わない。このとき、各支持腕部は、ヒータ
の縦スリットの位置に対応して配される。例えば、４本
の支持腕部を、上端が閉じた縦スリットの位置に対応さ
せ、中心軸部材を中心として互いに９０゜の角度間隔で
配してもよい。(2) In the present embodiment, the three support arm portions 5 are attached to the central shaft member 4, but the number is not limited to three and may be a plurality. At this time, each support arm is arranged corresponding to the position of the vertical slit of the heater. For example, the four support arms may correspond to the positions of the vertical slits whose upper ends are closed, and may be arranged at an angular interval of 90 ° with respect to the central shaft member.
【００３７】（３）位置決め突出部８ｃは、吊り上げ時
にヒータ２の内側面に近接するように配したが、ヒータ
の外側面に近接するように配しても構わない。すなわ
ち、係止用爪部を縦スリットに差し込んだときに、ヒー
タの外方に突出する係止用爪部の先端部分に上方に突出
する位置決め突出部を形成してもよい。この場合、ヒー
タは外側面に当接する位置決め突出部によって横ずれが
防止される。なお、ヒータと他の部材（例えば、保温
筒）との間隔が狭い場合には、ヒータ外方への突出量を
極力少なくするために、位置決め突出部をヒータの内側
面に近接する位置に設けることが望ましい。(3) The positioning protrusion 8c is arranged so as to be close to the inner surface of the heater 2 at the time of lifting, but it may be arranged so as to be close to the outer surface of the heater. That is, when the locking claw portion is inserted into the vertical slit, a positioning protrusion that protrudes upward may be formed at the tip of the locking claw portion that protrudes outward of the heater. In this case, the heater is prevented from lateral displacement by the positioning protrusion that abuts the outer surface. If the gap between the heater and another member (for example, a heat insulating cylinder) is narrow, a positioning protrusion is provided at a position close to the inner surface of the heater in order to minimize the amount of protrusion to the outside of the heater. Is desirable.
【００３８】（４）支持腕部５の長さを、係止用爪部８
の先端側腕部７からの突出量で調整したが、支持腕部の
他の部分によって調整しても構わない。例えば、基端側
腕部自体の長さを調整可能にしてもよい。(4) The length of the support arm portion 5 is set to the locking claw portion 8
Although the amount of protrusion from the distal end side arm portion 7 is adjusted, it may be adjusted by other portions of the support arm portion. For example, the length of the proximal arm portion itself may be adjustable.
【００３９】[0039]
【発明の効果】本発明によれば、以下の効果を奏する。
（１）請求項１記載のヒータ吊り治具によれば、各支持
腕部を上方に折り畳み可能としているので、各支持腕部
を直線状に伸ばして、縦スリットの上端に係止用爪部を
係止させることにより、ヒータを吊り上げることができ
る。また、ヒータ吊り治具をヒータから取り外すには、
各支持腕部を再び折り畳み状態とするだけでよい。した
がって、ヒータに吊り上げ用の部材を取り付ける必要
も、ヒータに支持部分を特に形成する必要も無く、安定
かつ容易にヒータを吊り上げて設置作業を行うことがで
きる。The present invention has the following effects. (1) According to the heater suspension jig of claim 1, since each support arm portion can be folded upward, each support arm portion is extended linearly, and the locking claw portion is provided at the upper end of the vertical slit. The heater can be lifted by locking the. To remove the heater suspension jig from the heater,
It suffices to refold each support arm. Therefore, it is not necessary to attach a hoisting member to the heater, and it is not necessary to particularly form a support portion on the heater, and the heater can be hoisted stably and easily for installation work.
【００４０】（２）請求項２記載のヒータ吊り治具によ
れば、支持腕部の長さが調整可能とされているので、口
径の異なるヒータでもその内径に合わせて支持腕部の長
さを調整することにより、多様なサイズのヒータに適用
することができる。(2) According to the heater suspension jig of the second aspect, since the length of the support arm can be adjusted, the length of the support arm can be adjusted according to the inner diameter of a heater having a different diameter. Can be applied to heaters of various sizes.
【００４１】（３）請求項３記載のヒータ吊り治具によ
れば、係止用爪部に位置決め突出部を備えているので、
縦スリットの上端で支持されたヒータに横方向に力が加
わっても、位置決め突出部がヒータの内側面または外側
面に当接することにより横ずれが生じず、安定にヒータ
を吊り上げることができる。(3) According to the heater hanging jig of the third aspect, since the locking claw portion is provided with the positioning protrusion,
Even if a lateral force is applied to the heater supported by the upper end of the vertical slit, the positioning protrusion does not come into contact with the inner side surface or the outer side surface of the heater, so that lateral displacement does not occur and the heater can be stably lifted.
【００４２】（４）請求項４記載のヒータ吊り治具によ
れば、先端側腕部が上方にのみ折り畳み可能とされてい
るので、支持腕部を伸ばした状態でヒータに取り付ける
際に、ヒータ上端に当接して折り畳まれるのが、支持腕
部全体ではなく先端側腕部のみであるため、ヒータに加
わる荷重が少なく、ヒータの外観に傷等を与え難い。(4) According to the heater suspension jig of the fourth aspect, since the distal arm portion can be folded only upward, when the support arm portion is extended and attached to the heater, the heater Since it is only the front end side arm portion that is brought into contact with the upper end and is folded, not the entire support arm portion, the load applied to the heater is small, and the appearance of the heater is not easily damaged.
【００４３】（５）請求項５記載のヒータ吊り治具によ
れば、先端側腕部に折り畳みストッパが設けられている
ので、折り畳みストッパが必要以上に支持腕部が折り畳
まれることを抑制することにより、屈曲した先端側腕部
と中心軸部材との干渉を防ぐとともに、支持腕部の屈伸
作業における操作性を向上させることができる。(5) According to the heater hanging jig of the fifth aspect, since the folding stopper is provided on the tip side arm portion, the folding stopper prevents the supporting arm portion from being folded more than necessary. Thus, it is possible to prevent interference between the bent distal end side arm portion and the central shaft member, and improve operability in bending and stretching the support arm portion.
【図１】本発明に係るヒータ吊り治具の一形態における
ヒータを示す正面図および平面図である。FIG. 1 is a front view and a plan view showing a heater in an embodiment of a heater suspension jig according to the present invention.
【図２】本発明に係るヒータ吊り治具の一形態を示す正
面図である。FIG. 2 is a front view showing an embodiment of a heater suspension jig according to the present invention.
【図３】本発明に係るヒータ吊り治具の一形態を示す平
面図である。FIG. 3 is a plan view showing an embodiment of a heater suspension jig according to the present invention.
１ ヒータ吊り治具 ２ ヒータ ２Ａ 縦スリット ３ クレーン（昇降機構） ４ 中心軸部材 ５ 支持腕部 ６ 基端側腕部 ６ａ 支持板 ７ 先端側腕部 ７ａ 折り畳みストッパ ８ 係止用爪部 ８ｃ 位置決め突出部 1 heater hanging jig 2 heater 2A vertical slit 3 cranes (lifting mechanism) 4 Central shaft member 5 Support arm 6 Base side arm 6a Support plate 7 Tip arm 7a Folding stopper 8 Claw for locking 8c Positioning protrusion
───────────────────────────────────────────────────── フロントページの続き (72)発明者 熱海 貴 東京都千代田区大手町１丁目５番１号 三菱マテリアルシリコン株式会社内 (72)発明者 降屋 久 東京都千代田区大手町１丁目５番１号 三菱マテリアルシリコン株式会社内 (56)参考文献 特開 平５−117078（ＪＰ，Ａ) 特開 平５−270974（ＪＰ，Ａ) 特開 平５−301793（ＪＰ，Ａ) 特開 平６−92772（ＪＰ，Ａ) 特開 平８−175894（ＪＰ，Ａ) 特開 平９−315755（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C30B 1/00 - 35/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Takashi Atami 1-5-1, Otemachi, Chiyoda-ku, Tokyo Mitsubishi Materials Silicon Co., Ltd. (72) Inventor Hisashi Furuya 1-5, Otemachi, Chiyoda-ku, Tokyo No. 1 Mitsubishi Material Silicon Co., Ltd. (56) Reference JP-A-5-117078 (JP, A) JP-A-5-270974 (JP, A) JP-A-5-301793 (JP, A) JP-A-6 -92772 (JP, A) JP-A-8-175894 (JP, A) JP-A-9-315755 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) C30B 1/00- 35/00
Claims (5)
されるとともに少なくとも上端が閉じた複数の縦スリッ
トが形成された円筒状のヒータを、昇降機構に接続され
た状態で吊り上げるヒータ吊り治具であって、 前記昇降機構に上部が接続されて垂下状態とされる中心
軸部材と、 該中心軸部材の下部から水平方向に放射状に延在して設
けられるとともに前記ヒータの半径より長く設定された
複数の支持腕部とを備え、 これらの支持腕部は、その先端に前記ヒータの内側から
前記縦スリットに差し込んで縦スリットの上端に係止状
態とされる係止用爪部が設けられるとともに、上方にの
み折り畳み可能とされていることを特徴としたヒータ吊
り治具。1. A heater suspension for lifting a cylindrical heater disposed in an airtight container of a semiconductor single crystal pulling apparatus and having a plurality of vertical slits closed at least at its upper end in a state of being connected to a lifting mechanism. The jig is a central shaft member having an upper part connected to the elevating mechanism and being in a suspended state, and a jig that extends radially from a lower part of the central shaft member and is longer than a radius of the heater. A plurality of support arm portions that are set are provided, and these support arm portions have locking claw portions that are inserted into the vertical slits from the inside of the heater and are locked at the upper ends of the vertical slits. A heater hanging jig, which is provided and can be folded only upward.
て、 前記支持腕部は、その長さが調整可能とされていること
を特徴としたヒータ吊り治具。2. The heater suspension jig according to claim 1, wherein the support arm portion has an adjustable length.
において、 前記係止用爪部は、前記縦スリットに差し込まれた状態
で前記ヒータの内側面または外側面に近接する位置に上
方に突出する位置決め突出部を備えていることを特徴と
したヒータ吊り治具。3. The heater suspension jig according to claim 1 or 2, wherein the locking claw portion is upwardly positioned at a position close to an inner surface or an outer surface of the heater in a state of being inserted into the vertical slit. A heater suspension jig having a positioning protrusion that protrudes.
タ吊り治具であって、 前記支持腕部は、前記中心軸部材に基端が接続された基
端側腕部と該基端側腕部の先端に接続された先端側腕部
とから構成されるとともに、該先端側腕部が基端側腕部
の先端を支点にして先端側腕部に対して上方にのみ折り
畳み可能とされていることを特徴としたヒータ吊り治
具。4. The heater suspension jig according to claim 1, wherein the support arm portion has a base end side arm portion whose base end is connected to the central shaft member, and the base end portion. It is composed of a tip side arm portion connected to the tip end of the side arm portion, and the tip end side arm portion can be folded only upward with respect to the tip end side arm portion with the tip end of the base end side arm portion as a fulcrum. A heater hanging jig characterized by being used.
て、 前記先端側腕部は、その上部に突出し折り畳み状態で前
記基端側腕部の上部に当接して折り畳み範囲を規制する
折り畳みストッパを備えていることを特徴としたヒータ
吊り治具。5. The heater suspension jig according to claim 4, wherein the distal end side arm portion has a folding stopper that protrudes upward and abuts against an upper portion of the proximal end side arm portion in a folded state to regulate a folding range. A heater hanging jig characterized by being provided.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06885296A JP3505904B2 (en) | 1996-03-25 | 1996-03-25 | Heater hanging jig |
| TW086102854A TW367303B (en) | 1996-03-25 | 1997-03-08 | Hoist apparatus for annular member |
| DE19710954A DE19710954B4 (en) | 1996-03-25 | 1997-03-17 | Hoist for ring elements |
| US08/822,489 US5797638A (en) | 1996-03-25 | 1997-03-24 | Hoist apparatus for annular member |
| CN97104937A CN1097028C (en) | 1996-03-25 | 1997-03-25 | Hoist apparatus for annular member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06885296A JP3505904B2 (en) | 1996-03-25 | 1996-03-25 | Heater hanging jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09255466A JPH09255466A (en) | 1997-09-30 |
| JP3505904B2 true JP3505904B2 (en) | 2004-03-15 |
Family
ID=13385623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06885296A Expired - Fee Related JP3505904B2 (en) | 1996-03-25 | 1996-03-25 | Heater hanging jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3505904B2 (en) |
-
1996
- 1996-03-25 JP JP06885296A patent/JP3505904B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09255466A (en) | 1997-09-30 |
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