JP3479223B2 - Linear movable part support mechanism - Google Patents
Linear movable part support mechanismInfo
- Publication number
- JP3479223B2 JP3479223B2 JP21754298A JP21754298A JP3479223B2 JP 3479223 B2 JP3479223 B2 JP 3479223B2 JP 21754298 A JP21754298 A JP 21754298A JP 21754298 A JP21754298 A JP 21754298A JP 3479223 B2 JP3479223 B2 JP 3479223B2
- Authority
- JP
- Japan
- Prior art keywords
- linear movable
- leaf springs
- movable part
- linear
- spiral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、支持部を中心とす
る渦巻状のスリットが形成された第１及び第２の板ばね
を平行に配置し、リニア可動部の運動方向に離間した第
１，第２の軸部をそれぞれ第１，第２の板ばねの支持部
にて支え、第１及び第２の板ばねの板厚方向へのリニア
可動部の直線往復運動を案内するリニア可動部支持機構
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has first and second leaf springs, each of which has a spiral slit centered on a support portion and are arranged in parallel, and is separated from each other in the moving direction of the linear movable portion. , A linear movable portion that supports the second shaft portion by the support portions of the first and second leaf springs and guides the linear reciprocating motion of the linear movable portion in the thickness direction of the first and second leaf springs. Regarding the support mechanism.
【０００２】[0002]
【従来の技術】例えば、可動コイル型のリニアモータで
は、円筒状のコイルが搭載されたリニア可動部を支持す
るのに、渦巻状のスリットが形成された一対の板ばねが
用いられている。この構成において、板ばねには、渦巻
状のスリットの中央に支持部が設けられており、リニア
可動部の運動方向に離間した軸部が、平行に配置された
一対の板ばねの支持部にて支えられている。一方、リニ
アモータの固定部側の永久磁石やヨーク等は、上記コイ
ルと同軸的に配置され、その磁気ギャップ内にコイルが
位置するように、磁気回路を構成している。2. Description of the Related Art For example, in a movable coil type linear motor, a pair of leaf springs having spiral slits are used to support a linear movable portion on which a cylindrical coil is mounted. In this configuration, the leaf spring is provided with the support portion at the center of the spiral slit, and the shaft portions separated in the movement direction of the linear movable portion are provided on the support portions of the pair of leaf springs arranged in parallel. Supported. On the other hand, the permanent magnet, the yoke, and the like on the fixed portion side of the linear motor are arranged coaxially with the coil, and the magnetic circuit is configured so that the coil is positioned within the magnetic gap.
【０００３】渦巻状のスリットを形成した板ばねを用い
ると、板ばねの弾性限度内でのリニア可動部の移動量を
大きくとることができ、その結果、リニア可動部の所定
ストローク内での移動によって板ばねに生じる最大応力
を小さくできる。このため、板ばねが破損したり疲労破
壊する事態を回避し、リニア可動部支持機構の長期にわ
たる安定動作を確保できる。When a leaf spring having a spiral slit is used, a large amount of movement of the linear movable portion can be achieved within the elastic limit of the leaf spring, and as a result, the linear movable portion can move within a predetermined stroke. This can reduce the maximum stress generated in the leaf spring. Therefore, it is possible to avoid a situation where the leaf spring is damaged or fatigue fractured, and it is possible to secure a stable operation of the linear movable part support mechanism for a long period of time.
【０００４】[0004]
【発明が解決しようとする課題】一対の上記板ばねを、
渦巻状のスリットの渦巻方向が同一となるように配置し
て用いる場合、板ばねのスリット形状が渦巻状であるた
めに、板ばねの支持部は、板厚方向の変位につれて、そ
の平面内で回転しようとする。このため、リニア可動部
は、軸方向の変位に応じて回転することになる。DISCLOSURE OF INVENTION Problems to be Solved by the Invention
When used by arranging so that the spiral direction of the spiral slit is the same, since the slit shape of the leaf spring is spiral, the support portion of the leaf spring is displaced in the plane as the plate thickness direction is displaced. Try to rotate. Therefore, the linear movable portion rotates according to the displacement in the axial direction.
【０００５】しかし、リニア可動部の直線往復運動の際
に、リニア可動部が回転しては、リニア可動部の共振に
より正確な直線往復運動を確保できないことになる。よ
って、リニア可動部の回転を抑える方策が必要になる。
このリニア可動部の回転を部品点数を増やすことなく抑
える方法としては、渦巻状のスリットの渦巻方向が互い
に逆になるように一対の板ばねを配置することが考えら
れる。However, if the linear movable portion rotates during the linear reciprocal movement of the linear movable portion, the resonance of the linear movable portion prevents the accurate linear reciprocating movement. Therefore, it is necessary to take measures to suppress the rotation of the linear movable part.
As a method of suppressing the rotation of the linear movable portion without increasing the number of parts, it is conceivable to arrange a pair of leaf springs so that the spiral directions of the spiral slits are opposite to each other.
【０００６】このように構成すると、リニア可動部は、
双方の板ばねからそれぞれ逆方向のトルクを受けること
になるため回転せず共振も発生しないが、新たな問題が
生じる。即ち、板ばねの各支持部は、リニア可動部側か
ら回転を規制するトルクを受け、板ばねのスリット形成
部分（ばね部）が、このトルクをも吸収するように過度
に変形しなければならなくなる。その結果、スリット形
成部分に塑性変形が生じたり、結合面で滑りが生じ、板
ばねが破損したり疲労破壊する事態を招き、リニア可動
部支持機構の安定動作を確保できなくなる。According to this structure, the linear movable portion is
Since both leaf springs receive torques in opposite directions, they do not rotate and no resonance occurs, but new problems arise. That is, each support portion of the leaf spring receives a torque that restricts rotation from the linear movable portion side, and the slit forming portion (spring portion) of the leaf spring must be excessively deformed so as to also absorb this torque. Disappear. As a result, plastic deformation occurs in the slit forming portion, slippage occurs at the joint surface, and the leaf spring is damaged or fatigue-damaged, so that stable operation of the linear movable part support mechanism cannot be ensured.
【０００７】本発明は、上記問題点を解消するためにな
されたもので、その目的は、板ばねが破損したり疲労破
壊する事態を回避できると共に、リニア可動部の正確な
直線往復運動を確保できるリニア可動部支持機構を実現
することにある。The present invention has been made in order to solve the above problems, and an object thereof is to avoid a situation in which a leaf spring is damaged or fatigue-damaged and to ensure an accurate linear reciprocating motion of a linear movable portion. It is to realize a linear movable part support mechanism that can be performed.
【０００８】[0008]
【課題を解決するための手段】上記課題を解決する請求
項１の発明は、支持部を中心とする渦巻状のスリットが
形成された第１及び第２の板ばねを平行に配置し、リニ
ア可動部の運動方向に離間した第１，第２の軸部をそれ
ぞれ前記第１，第２の板ばねの前記支持部にて支え、前
記第１及び第２の板ばねの板厚方向へのリニア可動部の
直線往復運動を案内するリニア可動部支持機構であっ
て、前記第１及び第２の板ばねにおける前記渦巻状のス
リットの渦巻方向が互いに逆になるように前記第１及び
第２の板ばねを配置すると共に、リニア可動部の第１，
第２の軸部と第１，第２の板ばねの支持部との連結部に
ねじりばねを設けたことを特徴とするものである。According to a first aspect of the present invention for solving the above-mentioned problems, first and second leaf springs having a spiral slit centered on a support portion are arranged in parallel and linear The first and second shaft portions, which are separated from each other in the moving direction of the movable portion, are supported by the supporting portions of the first and second leaf springs, respectively, and the first and second leaf springs are moved in the thickness direction. A linear movable part support mechanism for guiding a linear reciprocating motion of a linear movable part, wherein the first and second spiral springs of the first and second leaf springs have opposite spiral directions. The leaf springs of
A torsion spring is provided at a connecting portion between the second shaft portion and the supporting portions of the first and second leaf springs.
【０００９】この発明では、第１及び第２の板ばねにお
ける渦巻状のスリットの渦巻方向が互いに逆になるよう
に第１及び第２の板ばねを配置する構成をとっているた
め、リニア可動部は回転せず、正確な直線往復運動を確
保できる。更に、リニア可動部の第１，第２の軸部と第
１，第２の板ばねの支持部との連結部にねじりばねを設
けているため、リニア可動部の変位に応じて第１及び第
２の板ばねの各支持部が回転しようとした時、ねじりば
ねが、各支持部の回転を許容すると同時にその回転を吸
収する。According to the present invention, the first and second leaf springs are arranged so that the spiral directions of the spiral slits in the first and second leaf springs are opposite to each other. The part does not rotate, ensuring accurate linear reciprocating motion. Further, since the torsion spring is provided at the connecting portion between the first and second shaft portions of the linear movable portion and the support portions of the first and second leaf springs, the first and second shaft portions are connected according to the displacement of the linear movable portion. When each support of the second leaf spring is about to rotate, the torsion spring allows the support to rotate and at the same time absorbs that rotation.
【００１０】よって、板ばねの渦巻状のスリット形成部
分（ばね部）に過度の負荷がかかることがなくなる。こ
の結果、渦巻状のスリット形成部分に塑性変形が生じた
り、結合面で滑りが生じ、板ばねが破損したり疲労破壊
する事態を回避でき、リニア可動部支持機構の安定動作
を確保できる。即ち、板ばねが破損したり疲労破壊する
事態を回避できると共に、リニア可動部の正確な直線往
復運動を確保できる。Therefore, excessive load is not applied to the spiral slit forming portion (spring portion) of the leaf spring. As a result, it is possible to avoid a situation in which plastic deformation occurs in the spiral slit forming portion, slippage occurs at the coupling surface, and the leaf spring is damaged or fatigue fractures occur, and a stable operation of the linear movable part support mechanism can be secured. That is, it is possible to avoid a situation in which the leaf spring is damaged or fatigue-fractured, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion.
【００１１】請求項２の発明は、請求項１の発明におい
て、ねじりばねが、リニア可動部の移動方向から見ると
十字状に交差した弾性板でなり、両弾性板の一端は第１
及び第２の板ばね側に連結され、他端はリニア可動部側
に連結されていることを特徴とするものである。According to a second aspect of the present invention, in the first aspect of the present invention, the torsion spring is an elastic plate that intersects in a cross shape when viewed from the moving direction of the linear movable portion, and one end of each elastic plate is the first.
And the second leaf spring side, and the other end is connected to the linear movable portion side.
【００１２】この発明によれば、請求項１の発明の効果
に加えて、ねじりばねとして、ねじり剛性は低く、曲げ
剛性が高いものを実現できる。請求項３の発明は、第１
及び第２の板ばねにおける渦巻状のスリットの渦巻方向
が互いに逆になるように第１及び第２の板ばねを配置す
ると共に、第１及び第２の板ばねにねじりばね部を設け
たもので、その他の構成は請求項１の発明と共通する。According to this invention, in addition to the effect of the invention of claim 1, it is possible to realize a torsion spring having low torsional rigidity and high bending rigidity. The invention of claim 3 is the first
And the first and second leaf springs are arranged so that the spiral directions of the spiral slits in the second leaf spring are opposite to each other, and the first and second leaf springs are provided with a torsion spring portion. Other configurations are common to the invention of claim 1.
【００１３】この発明では、第１及び第２の板ばねの支
持部が回転できず、リニア可動部の変位に応じて、第１
及び第２の板ばねの渦巻状のスリット形成部分及びねじ
りばね部に曲げ力（トルク）がかかることになるが、ね
じりばね部の曲げ剛性（ねじりばね部全体としては見た
場合は、回転方向のねじり剛性）が低いため、ねじりば
ね部が弾性変形し、実質的には渦巻状のスリット形成部
分にはトルクがかからない。この結果、渦巻状のスリッ
ト形成部分に塑性変形が生じたり、結合面で滑りが生
じ、板ばねが破損したり疲労破壊する事態を回避でき、
リニア可動部支持機構の安定動作を確保できる。即ち、
板ばねが破損したり疲労破壊する事態を回避できると共
に、リニア可動部の正確な直線往復運動を確保できる。According to the present invention, the support portions of the first and second leaf springs cannot rotate, and the first movable portion of the first flat spring can be rotated according to the displacement of the linear movable portion.
Bending force (torque) is applied to the spiral slit forming portion and the torsion spring portion of the second leaf spring, but the bending rigidity of the torsion spring portion (when viewed as the torsion spring portion as a whole, the rotation direction Has a low torsional rigidity), the torsion spring portion is elastically deformed, and substantially no torque is applied to the spiral slit forming portion. As a result, it is possible to avoid a situation in which plastic deformation occurs in the spiral slit forming portion, slippage occurs at the joint surface, and the leaf spring is damaged or fatigue is broken.
The stable operation of the linear movable part support mechanism can be secured. That is,
It is possible to avoid a situation where the leaf spring is damaged or fatigue is destroyed, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion.
【００１４】請求項４の発明は、請求項３の発明のねじ
りばね部を、第１及び第２の板ばねにおける渦巻状のス
リットよりも内側又は外側の少なくとも何れか一方の領
域に、支持部を中心に形成したものである。この発明で
は、渦巻状のスリットの形成作業時に、ねじりばね部を
同時に形成することができるため、ねじりばねの形成が
極めて容易になる。According to a fourth aspect of the present invention, the torsion spring portion of the third aspect of the invention is provided with a support portion in at least one region inside or outside the spiral slit of the first and second leaf springs. It is formed around. According to the present invention, since the torsion spring portion can be formed at the same time when the spiral slit is formed, the torsion spring can be formed very easily.
【００１５】請求項５の発明は、第１及び第２の板ばね
における渦巻状のスリットの渦巻方向が互いに逆になる
ように第１及び第２の板ばねを配置すると共に、リニア
可動部の第１及び第２の軸部内にねじりばねを設けたも
ので、その他の構成は請求項１の発明と共通する。According to a fifth aspect of the present invention, the first and second leaf springs are arranged such that the spiral directions of the spiral slits in the first and second leaf springs are opposite to each other, and the linear movable portion is provided. A torsion spring is provided in the first and second shaft portions, and other configurations are common to the invention of claim 1.
【００１６】この発明では、第１及び第２の板ばねの支
持部が回転できず、リニア可動部の変位に応じて、第１
及び第２の板ばねの渦巻状のスリット形成部分及び第１
及び第２の軸部内のねじりばねにトルクがかかることに
なるが、ねじりばねのねじり剛性が低いため、ねじりば
ねが弾性変形し、実質的には渦巻状のスリット形成部分
にはトルクがかからない。この結果、渦巻状のスリット
形成部分に塑性変形が生じたり、結合面で滑りが生じ、
板ばねが破損したり疲労破壊する事態を回避でき、リニ
ア可動部支持機構の安定動作を確保できる。即ち、板ば
ねが破損したり疲労破壊する事態を回避できると共に、
リニア可動部の正確な直線往復運動を確保できる。According to the present invention, the support portions of the first and second leaf springs cannot rotate, and the first movable portion of the first flat spring can be rotated according to the displacement of the linear movable portion.
And a spiral slit forming portion of the second leaf spring and the first
Also, torque is applied to the torsion spring in the second shaft portion, but since the torsion spring has a low torsional rigidity, the torsion spring is elastically deformed, and substantially no torque is applied to the spiral slit forming portion. As a result, plastic deformation occurs in the spiral slit forming portion, slippage occurs at the coupling surface,
It is possible to avoid a situation where the leaf spring is damaged or fatigue is destroyed, and a stable operation of the linear moving part support mechanism can be secured. That is, it is possible to avoid a situation where the leaf spring is damaged or fatigue-fractured,
Accurate linear reciprocating motion of the linear moving part can be secured.
【００１７】[0017]
【実施の形態】（第１の形態例）図１〜図３は請求項１
及び請求項２の両発明に共通する形態例を示す説明図
で、図１は第１の形態例（リニアモータの一部として図
示）を示す断面図、図２は図１中の板ばねの説明図、図
３は図１中のねじりばねの斜視図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 to FIG.
And FIG. 2 is an explanatory view showing a form example common to both inventions of claim 2, FIG. 1 is a sectional view showing a first form example (illustrated as a part of a linear motor), and FIG. 2 is a view of a leaf spring in FIG. Explanatory drawing, FIG. 3 is a perspective view of the torsion spring in FIG.
【００１８】第１の板ばね１は、図２に示すように、支
持部２を中心とする渦巻状のスリット３が形成されたも
のである。本形態例では、図１に示すように、複数枚の
板ばね１を、板ばね１の外縁部に当接する大径の環状ス
ペーサ（図示せず）及び板ばね１の内縁部に当接する小
径の環状スペーサ（図示せず）を介して同軸的に重ね、
軸方向の両側から、上記環状スペーサと同様な形状の外
リング４及び内リング５でもって重ねた板ばね１を挟み
込んで、溶接等により一体化したものを用いている。As shown in FIG. 2, the first leaf spring 1 is formed with a spiral slit 3 centered on the support portion 2. In the present embodiment, as shown in FIG. 1, a plurality of leaf springs 1 are provided with a large-diameter annular spacer (not shown) that abuts the outer edge of the leaf spring 1 and a small diameter that abuts the inner edge of the leaf spring 1. Coaxially stacked via the annular spacer (not shown) of
A leaf spring 1 is sandwiched from both sides in the axial direction by an outer ring 4 and an inner ring 5 having the same shape as the annular spacer, and is integrated by welding or the like.
【００１９】第２の板ばね７も、第１の板ばね１と同一
の構造を有している。第１及び第２の板ばね１，７は、
フレーム１０の円形の収納穴に挿入され同軸的に固定さ
れることにより、平行に配置されるが、この時、第１及
び第２の板ばね１，７は、その渦巻状のスリットの渦巻
方向が互いに逆になるように、位置決めされる。The second leaf spring 7 also has the same structure as the first leaf spring 1. The first and second leaf springs 1 and 7 are
The first and second leaf springs 1 and 7 are arranged in parallel by being inserted into the circular accommodation hole of the frame 10 and fixed coaxially, but at this time, the first and second leaf springs 1 and 7 are arranged in the spiral direction of the spiral slit. Are positioned so that they are opposite to each other.
【００２０】板ばね１のフレーム１０への取り付けは、
例えば、フレーム１０の内壁に内側に突出するフランジ
を設け、ここに雌ねじを切っておき、板ばね１をフレー
ム１０内に挿入して外リング４をフランジに当接した状
態で、外リング４の図２に示す貫通穴１１にボルト（図
示せず）を差し込み、上記雌ねじにねじ込むことにより
行う。第２の板ばね７の取り付けについても同様であ
る。The leaf spring 1 is attached to the frame 10 by
For example, a flange projecting inward is provided on the inner wall of the frame 10, a female screw is cut here, the leaf spring 1 is inserted into the frame 10, and the outer ring 4 is in contact with the flange. This is done by inserting a bolt (not shown) into the through hole 11 shown in FIG. 2 and screwing the bolt into the female screw. The same applies to the attachment of the second leaf spring 7.
【００２１】リニア可動部１３は、移動方向即ち軸方向
に離間した第１及び第２の軸部１６，１７を有してお
り、この軸部１６，１７が、それぞれ第１及び第２の板
ばね１，７の各支持部にて支えられている。具体的に
は、第１及び第２の軸部１６，１７は、それぞれ第１，
第２の板ばね１，７の支持部に、後述のねじりばね１
４，１５を介して連結されている。The linear movable portion 13 has first and second shaft portions 16 and 17 which are separated from each other in the moving direction, that is, the axial direction, and the shaft portions 16 and 17 are respectively the first and second plates. The springs 1 and 7 are supported by the respective support portions. Specifically, the first and second shaft portions 16 and 17 are respectively
The torsion springs 1 to be described later are attached to the supporting portions of the second leaf springs 1 and 7.
They are connected via 4, 15.
【００２２】ねじりばね１４は、図３に示すように筒状
の外観をしている。図３において、第１の支持筒２０の
図３における右側には、円筒状の外筒部２１が形成さ
れ、図３の左側には、全体の３／４が切り欠かれた内筒
部２２が形成されている。又、第２の支持筒２３の図３
における左側には、円筒状の外筒部２４が形成され、図
３における右側には、全体の３／４が切り欠かれた内筒
部２５が形成されている。そして、第１の支持筒２０の
内筒部２２が第２の支持筒２３の外筒部２４内に回転可
能に嵌合し、第２の支持筒２３の内筒部２５が第１の支
持筒２０の外筒部２１内に回転可能に嵌合している。The torsion spring 14 has a tubular appearance as shown in FIG. In FIG. 3, a cylindrical outer cylinder portion 21 is formed on the right side of the first support cylinder 20 in FIG. 3, and an inner cylinder portion 22 in which 3/4 of the whole is cut out is formed on the left side of FIG. Are formed. In addition, the second support cylinder 23 shown in FIG.
3, a cylindrical outer cylinder portion 24 is formed on the left side, and an inner cylinder portion 25 is formed by cutting out 3/4 of the whole on the right side in FIG. Then, the inner cylinder portion 22 of the first support cylinder 20 is rotatably fitted in the outer cylinder portion 24 of the second support cylinder 23, and the inner cylinder portion 25 of the second support cylinder 23 is first supported. It is rotatably fitted in the outer cylinder portion 21 of the cylinder 20.
【００２３】第１の支持筒２０の内筒部２２と第２の支
持筒２３の外筒部２４との間には、軸方向から見ると十
字状に交差した弾性板２７，２８が固定されている。同
様に、第２の支持筒２３の内筒部２５と第１の支持筒２
０の外筒部２１との間にも、軸方向から見ると十字状に
交差した弾性板２９，３０が固定されている。ここで、
弾性板２７，２９は矩形をし、弾性板２８，３０はコ字
形をしている。Elastic plates 27, 28 are fixed between the inner cylinder portion 22 of the first support cylinder 20 and the outer cylinder portion 24 of the second support cylinder 23 so as to cross in a cross shape when viewed in the axial direction. ing. Similarly, the inner cylinder portion 25 of the second support cylinder 23 and the first support cylinder 2
The elastic plates 29 and 30 that intersect in a cross shape when viewed in the axial direction are also fixed between the outer cylindrical portion 21 and the outer cylindrical portion 21. here,
The elastic plates 27 and 29 are rectangular and the elastic plates 28 and 30 are U-shaped.
【００２４】第１の支持筒２０の外筒部２１は、図１に
おけるリニア可動部１３の第１の軸部１６の穴に嵌入後
固定され、第２の支持筒２３の外筒部２４は、第１の板
ばね１の支持部２（内リング５）の穴に嵌入後固定され
ている。従って、弾性板２７〜３０の一端は、リニア可
動部１３の第１の軸部１６側に連結され、他端は第１の
板ばね１の支持部２側に連結されたことになる。ねじり
ばね１５も、ねじりばね１４と同一の構造を有してお
り、第２の板ばね７の支持部とリニア可動部１３の第２
の軸部１７との連結部に同様な方法で設けられている。The outer cylinder portion 21 of the first support cylinder 20 is fixed after being fitted into the hole of the first shaft portion 16 of the linear movable portion 13 in FIG. 1, and the outer cylinder portion 24 of the second support cylinder 23 is fixed. , And is fixed after being fitted into the hole of the supporting portion 2 (inner ring 5) of the first leaf spring 1. Therefore, one end of the elastic plates 27 to 30 is connected to the first shaft portion 16 side of the linear movable portion 13, and the other end is connected to the support portion 2 side of the first leaf spring 1. The torsion spring 15 also has the same structure as the torsion spring 14, and supports the second leaf spring 7 and the second linear movable portion 13.
The shaft 17 is connected to the shaft 17 by a similar method.
【００２５】コイル３５はリニアモータの可動部を構成
するもので、このコイル３５が巻回された円筒状のボビ
ン３６は、リニア可動部１３に取り付けられている。一
方、リニアモータの固定部側の円筒状永久磁石３７や有
底円筒状ヨーク３８は、フレーム１０の収納穴内に、上
記コイル３５及びボビン３６と同軸的に配置されてい
る。永久磁石３７の外周面とヨーク３８の内周面との間
の磁気ギャップ内に、コイル３５は位置している。The coil 35 constitutes a movable portion of the linear motor, and the cylindrical bobbin 36 around which the coil 35 is wound is attached to the linear movable portion 13. On the other hand, the cylindrical permanent magnet 37 and the bottomed cylindrical yoke 38 on the fixed portion side of the linear motor are arranged coaxially with the coil 35 and the bobbin 36 in the accommodation hole of the frame 10. The coil 35 is located in the magnetic gap between the outer peripheral surface of the permanent magnet 37 and the inner peripheral surface of the yoke 38.
【００２６】この形態例では、第１及び第２の板ばね
１，７における渦巻状のスリットの渦巻方向が互いに逆
になるように、同一の第１及び第２の板ばね１，７を配
置している。このため、コイル３５に電流を流し、リニ
ア可動部１３を軸方向に変位させても、リニア可動部１
３は回転はせず、共振も生じない。よって、正確な直線
往復運動を行う。In this embodiment, the same first and second leaf springs 1 and 7 are arranged so that the spiral directions of the spiral slits in the first and second leaf springs 1 and 7 are opposite to each other. is doing. Therefore, even if a current is passed through the coil 35 to displace the linear movable portion 13 in the axial direction, the linear movable portion 1
3 does not rotate and no resonance occurs. Therefore, an accurate linear reciprocating motion is performed.
【００２７】更に、リニア可動部１３の第１及び第２の
軸部１６，１７と第１及び第２の板ばね１，７の支持部
との連結部にねじりばね１４，１５を設けているため、
リニア可動部１３の軸方向の変位に応じて第１及び第２
の板ばね１，７の各支持部が回転しようとした時、ねじ
りばね１４，１５が、各支持部の回転を許容すると同時
にその回転を吸収する。Further, torsion springs 14 and 15 are provided at the connecting portions between the first and second shaft portions 16 and 17 of the linear movable portion 13 and the supporting portions of the first and second leaf springs 1 and 7. For,
Depending on the axial displacement of the linear movable part 13, the first and second
When each of the support portions of the leaf springs 1 and 7 of FIG. 1 is about to rotate, the torsion springs 14 and 15 allow the rotation of each of the support portions and at the same time absorb the rotation.
【００２８】よって、第１及び第２の板ばね１，７の渦
巻状のスリット形成部分（ばね部）に過度の負荷がかか
ることがなくなる。この結果、渦巻状のスリット形成部
分に塑性変形が生じたり、結合面で滑りが生じ、第１及
び第２の板ばね１，７が破損したり疲労破壊する事態を
回避でき、リニア可動部支持機構の安定動作を確保でき
る。即ち、第１及び第２の板ばね１，７が破損したり疲
労破壊する事態を回避できると共に、リニア可動部１３
の正確な直線往復運動を確保できる。Therefore, excessive load is not applied to the spiral slit forming portions (spring portions) of the first and second leaf springs 1 and 7. As a result, it is possible to avoid a situation in which the first and second leaf springs 1 and 7 are damaged or fatigue-destructed due to plastic deformation occurring in the spiral slit forming portion or slippage at the joint surface, and the linear movable portion support The stable operation of the mechanism can be secured. That is, it is possible to avoid a situation in which the first and second leaf springs 1 and 7 are broken or fatigue-broken, and the linear movable portion 13
The accurate linear reciprocating motion of can be secured.
【００２９】尚、上記第１及び第２の板ばね１，７とし
て、複数枚積層したものを例示したが、請求項１及び請
求項２の発明としては、一枚であってもよい。又、請求
項１の発明の場合、ねじりばね１４，１５の構成は上記
形態例に限るものではないが、十字状に交差した上記弾
性板２７〜３０を用いれば、ねじり剛性は低く曲げ剛性
が高いねじりばね１４，１５を容易に得ることができ
る。Although a plurality of laminated leaf springs 1 and 7 are exemplified as the first and second leaf springs 1 and 7, the invention of claims 1 and 2 may be a single leaf spring. Further, in the case of the invention of claim 1, the structure of the torsion springs 14 and 15 is not limited to the above-mentioned embodiment, but if the elastic plates 27 to 30 crossed in a cross shape are used, the torsional rigidity is low and the bending rigidity is low. The high torsion springs 14 and 15 can be easily obtained.
【００３０】（第２の形態例）本形態例は請求項３及び
請求項４の両発明に共通する形態例である。この形態例
における第１の形態例との相違点は、ねじりばね１
４，１５を介することなく、リニア可動部１３の第１及
び第２の軸部１６，１７を板ばね１，７の支持部に固定
したこと、第１及び第２の板ばね１，７として、渦巻
状のスリットだけでなく、ねじりばね部を設けたものを
用いること、である。尚、この形態例でも、第１及び第
２の板ばねにおける渦巻状のスリットの渦巻方向が互い
に逆になるように、第１及び第２の板ばねを配置してい
る。(Second Embodiment) This embodiment is an embodiment common to both claims 3 and 4. The difference between this embodiment and the first embodiment is that the torsion spring 1
The first and second shaft portions 16 and 17 of the linear movable portion 13 are fixed to the support portions of the leaf springs 1 and 7 without interposing 4, 15 as the first and second leaf springs 1 and 7. In addition to the spiral slit, the one provided with a torsion spring portion is used. Also in this embodiment, the first and second leaf springs are arranged so that the spiral directions of the spiral slits in the first and second leaf springs are opposite to each other.
【００３１】図４は第２の形態例において第１及び第２
の板ばねとして用いる板ばねを示す説明図である。この
板ばねでは、支持部４１を中心とする渦巻状のスリット
４２が形成され、更に、渦巻状のスリット４２の内側
に、ねじりばね部４３が支持部４１を中心に放射状に形
成されている。FIG. 4 shows the first and second embodiments of the second embodiment.
It is explanatory drawing which shows the leaf spring used as a leaf spring of. In this leaf spring, a spiral slit 42 centered on the support portion 41 is formed, and further, a torsion spring portion 43 is radially formed inside the spiral slit 42 with the support portion 41 as the center.
【００３２】本形態例では、複数枚の板ばねを、板ばね
の外縁部に当接する大径の環状スペーサ（図示せず）及
び板ばねの内縁部に当接する小径の環状スペーサ（図示
せず）及び板ばねの中間部（渦巻状のスリットとばね部
４３の境界部）に当接する環状スペーサ（図示せず）を
介して、同軸的に重ね、軸方向の両側から、上記環状ス
ペーサと同様な形状の外リング４４及び内リング４５及
び中間リング４６でもって重ねた板ばねを挟み込んで、
溶接等により一体化したものを用いている。In this embodiment, a plurality of leaf springs are provided with a large-diameter annular spacer (not shown) that abuts the outer edge of the leaf spring and a small-diameter annular spacer (not shown) that abuts the inner edge of the leaf spring. ) And an intermediate portion of the leaf spring (a boundary portion between the spiral slit and the spring portion 43) through an annular spacer (not shown) that is coaxially overlapped, and from both sides in the axial direction, the same as the above annular spacer. By sandwiching the stacked leaf springs with the outer ring 44, the inner ring 45, and the intermediate ring 46, which have different shapes,
The one integrated by welding is used.
【００３３】この形態例でも、第１及び第２の板ばねに
おける渦巻状のスリット４２の渦巻方向が互いに逆にな
るように、第１及び第２の板ばねを配置しているため、
リニア可動部を軸方向に変位させても、リニア可動部は
回転はせず、正確な直線往復運動を確保できる。Also in this embodiment, the first and second leaf springs are arranged so that the spiral directions of the spiral slits 42 in the first and second leaf springs are opposite to each other.
Even if the linear movable part is displaced in the axial direction, the linear movable part does not rotate, and an accurate linear reciprocating motion can be secured.
【００３４】更に、本形態例では、第１及び第２の板ば
ねの支持部が回転できず、リニア可動部の変位に応じ
て、第１及び第２の板ばねの渦巻状のスリット４２形成
部分及びねじりばね部４３に曲げ力（トルク）がかかる
ことになるが、ねじりばね部４３の曲げ剛性（ねじりば
ね部全体として見た場合は、回転方向のねじり剛性）が
低いため、ねじりばね部４３が弾性変形し、実質的には
渦巻状のスリット４２形成部分にはトルクがかからな
い。この結果、渦巻状のスリット４２形成部分に塑性変
形が生じたり、結合面で滑りが生じ、板ばねが破損した
り疲労破壊する事態を回避でき、リニア可動部支持機構
の安定動作を確保できる。即ち、板ばねが破損したり疲
労破壊する事態を回避できると共に、リニア可動部の正
確な直線往復運動を確保できる。Further, in this embodiment, the support portions of the first and second leaf springs cannot rotate, and the spiral slits 42 of the first and second leaf springs are formed according to the displacement of the linear movable portion. A bending force (torque) is applied to the portion and the torsion spring portion 43. However, since the bending rigidity of the torsion spring portion 43 (the torsion rigidity in the rotation direction when viewed as the entire torsion spring portion) is low, the torsion spring portion 43 is elastically deformed, and substantially no torque is applied to the portion where the spiral slit 42 is formed. As a result, it is possible to avoid a situation in which plastic deformation occurs in a portion where the spiral slit 42 is formed, slippage occurs in the coupling surface, and the leaf spring is damaged or fatigue is destroyed, and a stable operation of the linear movable part support mechanism can be secured. That is, it is possible to avoid a situation in which the leaf spring is damaged or fatigue-fractured, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion.
【００３５】又、本形態例では、渦巻状のスリット４２
の形成作業時に、ねじりばね部４３を同時に形成するこ
とができるため、ねじりばねの形成が極めて容易にな
る。尚、本形態例では、ねじりばね部４３を渦巻状のス
リット４２の内側に形成したが、渦巻状のスリット４２
の外側に形成してもよいし、内側と外側の双方に形成し
てもよい。又、ねじりばね部４３としては、曲げ剛性が
低いばね部を形成できるものであればよく、放射状のパ
ターンに限らない。Further, in this embodiment, the spiral slit 42 is formed.
Since the torsion spring portion 43 can be formed at the same time during the work of forming, the formation of the torsion spring becomes extremely easy. Although the torsion spring portion 43 is formed inside the spiral slit 42 in the present embodiment, the spiral slit 42 is formed.
It may be formed on the outer side, or may be formed on both the inner side and the outer side. The torsion spring portion 43 is not limited to a radial pattern as long as it can form a spring portion having low bending rigidity.
【００３６】（第３の形態例）本形態例は請求項５の発
明の形態例である。この形態例における第１の形態例と
の相違点は、ねじりばね１４，１５を介することな
く、リニア可動部１３の第１及び第２の軸部１６，１７
を板ばね１，７の支持部に固定したこと、リニア可動
部の第１及び第２の軸部１６，１７内にねじりばねを設
けたこと、である。(Third Embodiment) This embodiment is an embodiment of the invention of claim 5. The difference between this embodiment and the first embodiment is that the first and second shaft portions 16 and 17 of the linear movable portion 13 do not include the torsion springs 14 and 15.
Is fixed to the supporting portions of the leaf springs 1 and 7, and the torsion springs are provided in the first and second shaft portions 16 and 17 of the linear movable portion.
【００３７】図５は第３の形態例におけるねじりばねを
示す説明図である。この図では、リニア可動部１３の第
１の軸部１６のみを示した。図５の構成において、軸部
１６は、軸方向から見た時に断面が十字形のねじりばね
４８が形成されるように、周面が切り欠かれている。FIG. 5 is an explanatory view showing a torsion spring in the third embodiment. In this figure, only the first shaft portion 16 of the linear movable portion 13 is shown. In the configuration of FIG. 5, the shaft portion 16 has a peripheral surface cut out so that a torsion spring 48 having a cross-shaped cross section is formed when viewed in the axial direction.
【００３８】本形態例では、リニア可動部１３の軸方向
の変位に応じて第１及び第２の板ばねの各支持部が回転
しようとした時、ねじりばね４８が、各支持部の回転を
許容すると同時にその回転を吸収する。In the present embodiment, when each support portion of the first and second leaf springs tries to rotate in response to the axial displacement of the linear movable portion 13, the torsion spring 48 causes the rotation of each support portion. Allow it and absorb the rotation at the same time.
【００３９】よって、第１及び第２の板ばねの渦巻状の
スリット形成部分に過度の負荷がかかることがなくな
る。この結果、渦巻状のスリット形成部分に塑性変形が
生じたり、結合面で滑りが生じ、第１及び第２の板ばね
が破損したり疲労破壊する事態を回避でき、リニア可動
部支持機構の安定動作を確保できる。即ち、第１及び第
２の板ばねが破損したり疲労破壊する事態を回避できる
と共に、リニア可動部１３の正確な直線往復運動を確保
できる。Therefore, the excessive load is not applied to the spiral slit forming portions of the first and second leaf springs. As a result, it is possible to avoid a situation in which the first and second leaf springs are damaged or fatigue-destructed due to plastic deformation in the spiral slit forming portion, slippage at the coupling surface, and stability of the linear movable portion support mechanism. The operation can be secured. That is, it is possible to avoid a situation in which the first and second leaf springs are damaged or fatigue-fractured, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion 13.
【００４０】尚、リニア可動部１３の第１及び第２の軸
部１６，１７内に設けるねじりばねとしては、本形態例
のように軸部１６，１７にねじりばねを一体に設けない
で、第１の形態例のねじりばねのようなものを軸部に埋
め込むように構成してもよい。As the torsion spring provided in the first and second shaft portions 16 and 17 of the linear movable portion 13, the torsion springs are not integrally provided to the shaft portions 16 and 17 as in the present embodiment, A structure such as the torsion spring of the first embodiment may be embedded in the shaft portion.
【００４１】[0041]
【発明の効果】以上説明したように、請求項１の発明に
よれば、第１及び第２の板ばねにおける渦巻状のスリッ
トの渦巻方向が互いに逆になるように第１及び第２の板
ばねを配置する構成をとっているため、リニア可動部は
回転せず、正確な直線往復運動を確保できる。更に、リ
ニア可動部の第１，第２の軸部と第１，第２の板ばねの
支持部との連結部にねじりばねを設けているため、リニ
ア可動部の変位に応じて第１及び第２の板ばねの各支持
部が回転しようとした時、ねじりばねが、各支持部の回
転を許容すると同時にその回転を吸収する。As described above, according to the invention of claim 1, the first and second plates are so arranged that the spiral directions of the spiral slits in the first and second plate springs are opposite to each other. Since the spring is arranged, the linear movable part does not rotate, and an accurate linear reciprocating motion can be secured. Further, since the torsion spring is provided at the connecting portion between the first and second shaft portions of the linear movable portion and the support portions of the first and second leaf springs, the first and second shaft portions are connected according to the displacement of the linear movable portion. When each support of the second leaf spring is about to rotate, the torsion spring allows the support to rotate and at the same time absorbs that rotation.
【００４２】よって、板ばねの渦巻状のスリット形成部
分（ばね部）に過度の負荷がかかることがなくなる。こ
の結果、渦巻状のスリット形成部分に塑性変形が生じた
り、結合面で滑りが生じ、板ばねが破損したり疲労破壊
する事態を回避でき、リニア可動部支持機構の安定動作
を確保できる。即ち、板ばねが破損したり疲労破壊する
事態を回避できると共に、リニア可動部の正確な直線往
復運動を確保できる。Therefore, excessive load is not applied to the spiral slit forming portion (spring portion) of the leaf spring. As a result, it is possible to avoid a situation in which plastic deformation occurs in the spiral slit forming portion, slippage occurs at the coupling surface, and the leaf spring is damaged or fatigue fractures occur, and a stable operation of the linear movable part support mechanism can be secured. That is, it is possible to avoid a situation in which the leaf spring is damaged or fatigue-fractured, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion.
【００４３】請求項２の発明によれば、請求項１の発明
の効果に加えて、ねじりばねとして、ねじり剛性は低
く、曲げ剛性が高いものを実現できる。According to the invention of claim 2, in addition to the effect of the invention of claim 1, a torsion spring having low torsional rigidity and high bending rigidity can be realized.
【００４４】請求項３の発明によれば、第１及び第２の
板ばねの支持部が回転できず、リニア可動部の変位に応
じて、第１及び第２の板ばねの渦巻状のスリット形成部
分及びねじりばね部に曲げ力（トルク）がかかることに
なるが、ねじりばね部の曲げ剛性（ねじりばね部全体と
しては見た場合は、回転方向のねじり剛性）が低いた
め、ねじりばね部が弾性変形し、実質的には渦巻状のス
リット形成部分にはトルクがかからない。この結果、渦
巻状のスリット形成部分に塑性変形が生じたり、結合面
で滑りが生じ、板ばねが破損したり疲労破壊する事態を
回避でき、リニア可動部支持機構の安定動作を確保でき
る。即ち、板ばねが破損したり疲労破壊する事態を回避
できると共に、リニア可動部の正確な直線往復運動を確
保できる。According to the third aspect of the present invention, the support portions of the first and second leaf springs cannot rotate, and the spiral slits of the first and second leaf springs are generated according to the displacement of the linear movable portion. A bending force (torque) is applied to the forming part and the torsion spring part, but the bending rigidity of the torsion spring part (the torsional rigidity in the rotation direction when viewed as a whole torsion spring part) is low, so the torsion spring part Is elastically deformed, and substantially no torque is applied to the spiral slit forming portion. As a result, it is possible to avoid a situation in which plastic deformation occurs in the spiral slit forming portion, slippage occurs at the coupling surface, and the leaf spring is damaged or fatigue fractures occur, and a stable operation of the linear movable part support mechanism can be secured. That is, it is possible to avoid a situation in which the leaf spring is damaged or fatigue-fractured, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion.
【００４５】請求項４の発明によれば、渦巻状のスリッ
トの形成作業時に、ねじりばね部を同時に形成すること
ができるため、ねじりばねの形成が極めて容易になる。According to the fourth aspect of the present invention, since the torsion spring portion can be simultaneously formed during the work of forming the spiral slit, the torsion spring can be formed very easily.
【００４６】請求項５の発明によれば、第１及び第２の
板ばねの支持部が回転できず、リニア可動部の変位に応
じて、第１及び第２の板ばねの渦巻状のスリット形成部
分及び第１及び第２の軸部内のねじりばねにトルクがか
かることになるが、ねじりばねのねじり剛性が低いた
め、ねじりばねが弾性変形し、実質的には渦巻状のスリ
ット形成部分にはトルクがかからない。この結果、渦巻
状のスリット形成部分に塑性変形が生じたり、結合面で
滑りが生じ、板ばねが破損したり疲労破壊する事態を回
避でき、リニア可動部支持機構の安定動作を確保でき
る。即ち、板ばねが破損したり疲労破壊する事態を回避
できると共に、リニア可動部の正確な直線往復運動を確
保できる。According to the fifth aspect of the present invention, the supporting portions of the first and second leaf springs cannot rotate, and the spiral slits of the first and second leaf springs are formed in accordance with the displacement of the linear movable portion. Torque is applied to the forming portion and the torsion springs in the first and second shaft portions, but since the torsion spring has a low torsional rigidity, the torsion spring elastically deforms, and a spiral slit forming portion is substantially formed. Is not torqued. As a result, it is possible to avoid a situation in which plastic deformation occurs in the spiral slit forming portion, slippage occurs in the coupling surface, and the leaf spring is damaged or fatigue fractures occur, and a stable operation of the linear movable part support mechanism can be secured. That is, it is possible to avoid a situation in which the leaf spring is damaged or fatigue-fractured, and it is possible to ensure an accurate linear reciprocating motion of the linear movable portion.
【図１】第１の形態例（リニアモータの一部として図
示）を示す断面図である。FIG. 1 is a sectional view showing a first example of a form (illustrated as a part of a linear motor).
【図２】図１中の板ばねの説明図である。FIG. 2 is an explanatory diagram of a leaf spring in FIG.
【図３】図１中のねじりばねの斜視図である。3 is a perspective view of the torsion spring in FIG. 1. FIG.
【図４】第２の形態例において用いる板ばねを示す説明
図である。FIG. 4 is an explanatory view showing a leaf spring used in a second embodiment.
【図５】第３の形態例におけるねじりばねを示す説明図
である。FIG. 5 is an explanatory diagram showing a torsion spring according to a third embodiment.
１：第１の板ばね ２，４１：支持部 ３，４２：渦巻状のスリット ４，４４：外リング ５，４５：内リング ７：第２の板ばね １０：フレーム １１：貫通穴 １３：リニア可動部 １６：第１の軸部 １７：第２の軸部 ２０，２３：支持筒 ２１，２４：外筒部 ２２，２５：内筒部 ２７〜３０：弾性板 ４３：ねじりばね部 ４６：中間リング ４８：ねじりばね 1: first leaf spring 2,41: Support part 3, 42: spiral slit 4,44: Outer ring 5,45: Inner ring 7: Second leaf spring 10: Frame 11: Through hole 13: Linear movable part 16: First shaft portion 17: second shaft 20, 23: Support tube 21, 24: Outer cylinder part 22, 25: Inner tube part 27-30: Elastic plate 43: Torsion spring part 46: Intermediate ring 48: Torsion spring
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平９−117721（ＪＰ，Ａ) 特開 平２−79209（ＪＰ，Ａ) 特開 昭61−66120（ＪＰ，Ａ) 実開 平６−21381（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H02K 33/18 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-9-117721 (JP, A) JP-A-2-79209 (JP, A) JP-A-61-66120 (JP, A) Actual Kaihei 6- 21381 (JP, U) (58) Fields surveyed (Int.Cl. 7 , DB name) H02K 33/18
Claims (5)
形成された第１及び第２の板ばねを平行に配置し、リニ
ア可動部の運動方向に離間した第１，第２の軸部をそれ
ぞれ前記第１，第２の板ばねの前記支持部にて支え、前
記第１及び第２の板ばねの板厚方向へのリニア可動部の
直線往復運動を案内するリニア可動部支持機構であっ
て、 前記第１及び第２の板ばねにおける前記渦巻状のスリッ
トの渦巻方向が互いに逆になるように前記第１及び第２
の板ばねを配置すると共に、 リニア可動部の前記第１，第２の軸部と前記第１，第２
の板ばねの前記支持部との連結部にねじりばねを設けた
リニア可動部の支持機構。1. A first and a second shaft portion in which first and second leaf springs having a spiral slit centered on a support portion are arranged in parallel, and are separated from each other in a movement direction of a linear movable portion. And a linear movable part support mechanism for guiding the linear reciprocating motion of the linear movable part in the plate thickness direction of the first and second plate springs. In the first and second leaf springs, the spiral directions of the spiral slits in the first and second leaf springs are opposite to each other.
And the first and second shaft parts of the linear movable part and the first and second shaft parts of the linear movable part.
Supporting mechanism for a linear movable part, in which a torsion spring is provided at a connecting part of the leaf spring of the above with the supporting part.
方向から見ると十字状に交差した弾性板でなり、両弾性
板の一端は前記第１及び第２の板ばね側に連結され、他
端はリニア可動部側に連結されていることを特徴とする
請求項１記載のリニア可動部支持機構。2. The torsion spring is composed of elastic plates that intersect in a cross shape when viewed from the moving direction of the linear movable part, and one ends of both elastic plates are connected to the first and second plate spring sides, and The linear movable part support mechanism according to claim 1, wherein the end is connected to the linear movable part side.
形成された第１及び第２の板ばねを平行に配置し、リニ
ア可動部の運動方向に離間した第１，第２の軸部をそれ
ぞれ前記第１，第２の板ばねの前記支持部にて支え、前
記第１及び第２の板ばねの板厚方向へのリニア可動部の
直線往復運動を案内するリニア可動部支持機構であっ
て、 前記第１及び第２の板ばねにおける前記渦巻状のスリッ
トの渦巻方向が互いに逆になるように前記第１及び第２
の板ばねを配置すると共に、 前記第１及び第２の板ばねにねじりばね部を設けたリニ
ア可動部支持機構。3. A first and a second shaft portion, in which first and second leaf springs having a spiral slit centered on the support portion are formed in parallel, and are separated from each other in the movement direction of the linear movable portion. And a linear movable part support mechanism for guiding the linear reciprocating motion of the linear movable part in the plate thickness direction of the first and second plate springs. In the first and second leaf springs, the spiral directions of the spiral slits in the first and second leaf springs are opposite to each other.
The linear movable part support mechanism in which the leaf springs are arranged, and the first and second leaf springs are provided with a torsion spring portion.
渦巻状のスリットよりも内側又は外側の少なくとも何れ
か一方の領域に、前記支持部を中心とする放射状のねじ
りばね部を設けたことを特徴とする請求項３記載のリニ
ア可動部支持機構。4. A radial torsion spring portion centered on the support portion is provided in at least one of the inside and the outside of the spiral slit in the first and second leaf springs. The linear movable part support mechanism according to claim 3, wherein
形成された第１及び第２の板ばねを平行に配置し、リニ
ア可動部の運動方向に離間した第１，第２の軸部をそれ
ぞれ前記第１，第２の板ばねの前記支持部にて支え、前
記第１及び第２の板ばねの板厚方向へのリニア可動部の
直線往復運動を案内するリニア可動部支持機構であっ
て、 前記第１及び第２の板ばねにおける前記渦巻状のスリッ
トの渦巻方向が互いに逆になるように前記第１及び第２
の板ばねを配置すると共に、 リニア可動部の前記第１及び第２の軸部内にねじりばね
を設けたリニア可動部の支持機構。5. A first and a second shaft portion, in which first and second leaf springs having a spiral slit centered on a support portion are formed in parallel, and are separated from each other in a moving direction of the linear movable portion. And a linear movable part support mechanism for guiding the linear reciprocating motion of the linear movable part in the plate thickness direction of the first and second plate springs. In the first and second leaf springs, the spiral directions of the spiral slits in the first and second leaf springs are opposite to each other.
The linear movable part support mechanism in which the leaf springs are arranged and torsion springs are provided in the first and second shaft parts of the linear movable part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21754298A JP3479223B2 (en) | 1998-07-31 | 1998-07-31 | Linear movable part support mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21754298A JP3479223B2 (en) | 1998-07-31 | 1998-07-31 | Linear movable part support mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000050609A JP2000050609A (en) | 2000-02-18 |
| JP3479223B2 true JP3479223B2 (en) | 2003-12-15 |
Family
ID=16705897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21754298A Expired - Lifetime JP3479223B2 (en) | 1998-07-31 | 1998-07-31 | Linear movable part support mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3479223B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017526322A (en) * | 2014-06-06 | 2017-09-07 | アライン テクノロジー， インコーポレイテッド | Laser positioning system |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004036723A1 (en) * | 2002-10-16 | 2004-04-29 | Matsushita Refrigeration Company | Linear motor and liner compressor using the same |
| KR100945711B1 (en) * | 2007-07-03 | 2010-03-05 | 한국과학기술원 | Electromagnetic actuator |
| JP6980877B2 (en) * | 2017-12-25 | 2021-12-15 | フォスター電機株式会社 | Vibration actuator |
| JP2019115187A (en) * | 2017-12-25 | 2019-07-11 | フォスター電機株式会社 | Vibration actuator |
-
1998
- 1998-07-31 JP JP21754298A patent/JP3479223B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017526322A (en) * | 2014-06-06 | 2017-09-07 | アライン テクノロジー， インコーポレイテッド | Laser positioning system |
| US10288875B2 (en) | 2014-06-06 | 2019-05-14 | Align Technology, Inc. | Lens positioning system |
| US10884238B2 (en) | 2014-06-06 | 2021-01-05 | Align Technology, Inc. | Lens positioning system |
| US11422362B2 (en) | 2014-06-06 | 2022-08-23 | Align Technology, Inc. | Lens positioning system for intraoral scanner |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000050609A (en) | 2000-02-18 |
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