JP3478109B2 - High frequency accelerating cavity device - Google Patents
High frequency accelerating cavity deviceInfo
- Publication number
- JP3478109B2 JP3478109B2 JP00684698A JP684698A JP3478109B2 JP 3478109 B2 JP3478109 B2 JP 3478109B2 JP 00684698 A JP00684698 A JP 00684698A JP 684698 A JP684698 A JP 684698A JP 3478109 B2 JP3478109 B2 JP 3478109B2
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- Japan
- Prior art keywords
- magnetic member
- acceleration
- high frequency
- electrodes
- accelerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００１】[0001]
【発明の属する技術分野】この発明は、イオンシンクロ
トロン加速器に使用される高周波加速空胴装置に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency acceleration cavity device used in an ion synchrotron accelerator.
【０００２】[0002]
【従来の技術】図７は例えば特開平８―２５０３００号
公報に記載された従来の高周波加速空胴装置の断面図で
ある。図７において、１は円筒形状に構成された内部導
体、２はこの内部導体１の外周に同軸的に配置された円
筒形状に構成された外部導体、３は加速ギャップ、４は
リング状に構成された磁性部材、５は内部導体２に高周
波を送る高周波フィーダ、６は高周波を発生させる高周
波電源、７は加速空洞内を走行するイオンビーム、８は
高周波電圧を印加する高周波電極である。2. Description of the Related Art FIG. 7 is a sectional view of a conventional high-frequency acceleration cavity device disclosed in, for example, Japanese Patent Laid-Open No. 8-250300. In FIG. 7, 1 is a cylindrical inner conductor, 2 is a cylindrical outer conductor coaxially arranged on the outer periphery of the inner conductor 1, 3 is an acceleration gap, and 4 is a ring. The magnetic member 5 is a high-frequency feeder for sending a high frequency to the inner conductor 2, 6 is a high-frequency power source for generating a high frequency, 7 is an ion beam traveling in the accelerating cavity, and 8 is a high-frequency electrode for applying a high-frequency voltage.
【０００３】次に、従来の高周波加速空胴装置の動作に
ついて説明する。高周波加速空胴装置の高周波電源６に
より発生させた高周波は、高周波フィーダ５を通して加
速電極８に供給され、加速ギャップ３に高周波電界が発
生する。加速空洞内を周回するイオンビーム７は加速ギ
ャップ３を通過する際、加速ギャップ３に発生している
高周波電界により加速される。イオンビーム７を加速す
るためには、高周波電源６により発生させる高周波の周
波数を加速器を周回するイオンビーム７の周回周波数の
整数倍にとる必要がある。Next, the operation of the conventional high-frequency acceleration cavity device will be described. The high frequency generated by the high frequency power supply 6 of the high frequency acceleration cavity device is supplied to the acceleration electrode 8 through the high frequency feeder 5, and a high frequency electric field is generated in the acceleration gap 3. When passing through the acceleration gap 3, the ion beam 7 circulating in the acceleration cavity is accelerated by the high-frequency electric field generated in the acceleration gap 3. In order to accelerate the ion beam 7, it is necessary to set the frequency of the high frequency generated by the high frequency power source 6 to an integral multiple of the orbiting frequency of the ion beam 7 orbiting the accelerator.
【０００４】加速電界を発生させる加速電圧Ｖは、高周
波電源６の電力Ｐと空胴のインピーダンスＺを用いて、
Ｖ＝√（２ＺＰ） ・・・（１）
で表される。加速電圧はシンクロトロンの動作条件から
決定されるため、空胴のインピーダンスＺを高くすれ
ば、低出力の高周波電源６で必要な加速電圧を得られる
ことがわかる。An accelerating voltage V for generating an accelerating electric field is represented by V = √ (2ZP) (1) using the power P of the high frequency power source 6 and the impedance Z of the cavity. Since the accelerating voltage is determined from the operating conditions of the synchrotron, it can be seen that if the impedance Z of the cavity is increased, the accelerating voltage required by the high-frequency power source 6 with low output can be obtained.
【０００５】一方、空胴のインピーダンスＺは空胴の内
部導体１と外部導体２に囲まれた領域に導入された磁性
部材４のインダクタンスＬと角周波数ωと複素透磁率μ
を用いて次式で表される。
Ｚ＝ｊωμＬ＝ｊω（μr―ｊμi）Ｌ＝Ｒ'＋ｊＬ' ・・・（２）
この式から、空胴のインピーダンスＺを大きくするため
には、複素透磁率μの大きな磁性部材４を用いるか、磁
性部材４のサイズを大きくし、インダクタンスＬを大き
くすればよいことがわかる。そのため、内部導体１と外
部導体２に囲まれた領域に高透磁率をもつ磁性部材４を
導入してインダクタンスＬを高くすることでインピーダ
ンスＺを高くしている。On the other hand, the impedance Z of the cavity is the inductance L of the magnetic member 4 introduced in the region surrounded by the inner conductor 1 and the outer conductor 2 of the cavity, the angular frequency ω and the complex permeability μ.
Is expressed by the following equation. From Z = jωμL = jω (μ r -jμ i) L = R '+ jL' ··· (2) This equation, in order to increase the impedance Z of the cavity is a large magnetic member 4 of the complex permeability mu It can be seen that the magnetic member 4 may be used or the size of the magnetic member 4 may be increased and the inductance L may be increased. Therefore, the impedance Z is increased by introducing the magnetic member 4 having high magnetic permeability into the region surrounded by the inner conductor 1 and the outer conductor 2 to increase the inductance L.
【０００６】[0006]
【発明が解決しようとする課題】以上に説明した加速空
胴装置で用いられたインピーダンスＺを表す式は、空胴
のインピーダンスＺが低いか、加速周波数が低い領域で
は良い近似を与えるが、空胴のインピーダンスＺを大き
くすると、高周波側で空胴のギャップ間容量Ｃが無視で
きなくなる。容量を含めた空胴のインピーダンスＺ0
は、インピーダンスＺと空洞のギャップ間容量Ｃの並列
接続として、次式で表される。
１／Ｚ0＝１／Ｚ＋ｊωＣ ・・・（３）The above-described expression for the impedance Z used in the acceleration cavity device gives a good approximation in the region where the impedance Z of the cavity is low or the acceleration frequency is low. When the impedance Z of the barrel is increased, the gap capacitance C of the cavity cannot be ignored on the high frequency side. Impedance Z 0 of the cavity including capacitance
Is represented by the following equation as a parallel connection of the impedance Z and the capacitance C between the gaps of the cavity. 1 / Z 0 = 1 / Z + jωC (3)
【０００７】このため、空胴のインピーダンスを大きく
するため、空胴のサイズを大きくしても、高周波側のイ
ンピーダンスがギャップ間容量で決まってしまうため、
インピーダンスを大きくできないという問題点があっ
た。また、浮遊容量低減のためギャップ間を広げると、
絶縁内部がチャージアップし、ビーム軌道を曲げ、ビー
ムロスにつながるという問題点があった。Therefore, in order to increase the impedance of the cavity, even if the size of the cavity is increased, the impedance on the high frequency side is determined by the capacitance between the gaps.
There was a problem that the impedance could not be increased. If the gap is widened to reduce the stray capacitance,
There was a problem that the inside of the insulation was charged up and the beam trajectory was bent, leading to beam loss.
【０００８】また、以上に説明した加速空胴装置では、
加速電極８に高電圧を要求することにより発熱量が増大
し、冷却が難しいという問題点があった。In the acceleration cavity device described above,
There is a problem in that the amount of heat generated is increased by requiring a high voltage for the acceleration electrode 8 and cooling is difficult.
【０００９】本発明は上述した問題点を解消するために
なされたもので、第１の目的は、浮遊容量を低減し、空
胴のインピーダンスを上げることで、低パワーの高周波
加速電源を備えてもイオンビームを十分に加速するのに
必要な加速電圧を印加できる非同調型の高周波加速空胴
装置を提供することにある。The present invention has been made to solve the above-mentioned problems, and a first object of the present invention is to provide a low-power high-frequency accelerating power supply by reducing stray capacitance and increasing the impedance of a cavity. Another object of the present invention is to provide a non-tuning type high frequency accelerating cavity device capable of applying an accelerating voltage necessary to sufficiently accelerate the ion beam.
【００１０】また、第２の目的は、簡単な冷却系で十分
な冷却効果が得られる非同調型の高周波加速空胴装置を
提供することにある。A second object is to provide a non-tuning type high frequency acceleration cavity device which can obtain a sufficient cooling effect with a simple cooling system.
【００１１】[0011]
【課題を解決するための手段】この発明に係る高周波加
速空胴装置は、荷電粒子が走行する加速空洞の内部導体
の対向する開口部にそれぞれ設けられた一対の加速電極
と、上記一対の加速電極の電極間ギャップをそれぞれ真
空封止する絶縁部材と、上記加速空洞の内部導体と外部
導体との間に該内部導体を囲繞するようにして設けられ
た磁性部材と、上記磁性部材を駆動して上記一対の加速
電極間に荷電粒子を加速する電界を発生させるための高
周波電源とを備えた高周波加速空胴装置において、上記
一対の加速電極の電極間ギャップに１または複数の中間
電極をそれぞれ設けたことを特徴とするものである。A high frequency accelerating cavity device according to the present invention includes a pair of accelerating electrodes respectively provided in opposing openings of an inner conductor of an accelerating cavity in which charged particles travel, and a pair of accelerating electrodes. An insulating member for vacuum-sealing the inter-electrode gaps of the electrodes, a magnetic member provided between the inner conductor and the outer conductor of the acceleration cavity so as to surround the inner conductor, and a magnetic member for driving the magnetic member. In a high frequency acceleration cavity device including a high frequency power supply for generating an electric field for accelerating charged particles between the pair of acceleration electrodes, one or a plurality of intermediate electrodes are provided in the interelectrode gap of the pair of acceleration electrodes. It is characterized by being provided.
【００１２】また、上記中間電極に、電位を与えて上記
加速電極の電極ギャップ間の電界強度が均一になるよう
にする電位供給手段を設けたことを特徴とするものであ
る。Further, the present invention is characterized in that the intermediate electrode is provided with a potential supply means for applying a potential so that the electric field strength between the electrode gaps of the accelerating electrode becomes uniform.
【００１３】また、上記電位供給手段は、上記中間電極
と上記外部導体とを接続し、かつ上記磁性部材を区分け
して囲むように配置された電流経路であることを特徴と
するものである。The potential supply means is a current path that connects the intermediate electrode and the outer conductor and is arranged so as to surround the magnetic member in a divided manner.
【００１４】また、上記高周波電源に接続され、かつ上
記磁性部材を囲むように配置されて上記高周波電源によ
り上記磁性部材を直接駆動するための高周波フィーダを
備えたことを特徴とするものである。Further, the present invention is characterized by comprising a high-frequency feeder which is connected to the high-frequency power source and is arranged so as to surround the magnetic member so as to directly drive the magnetic member by the high-frequency power source.
【００１５】また、上記加速電極と上記中間電極とがな
す電極間にそれぞれ抵抗を接続したことを特徴とするも
のである。A resistor is connected between the electrodes formed by the acceleration electrode and the intermediate electrode.
【００１６】また、上記絶縁部材の加速空洞内周側に接
する面上に抵抗皮膜を設けたことを特徴とするものであ
る。Further, the invention is characterized in that a resistance film is provided on a surface of the insulating member which is in contact with the inner peripheral side of the acceleration cavity.
【００１７】[0017]
【００１８】さらに、他の発明に係る高周波加速空胴装
置は、荷電粒子が走行する加速空洞の内部導体の対向す
る開口部にそれぞれ設けられた一対の加速電極と、上記
一対の加速電極の電極間ギャップをそれぞれ真空封止す
る絶縁部材と、上記加速空洞の内部導体と外部導体との
間に該内部導体を囲繞するようにして設けられた磁性部
材と、上記磁性部材を駆動して上記一対の加速電極間に
荷電粒子を加速する電界を発生させるための高周波電源
とを備えた高周波加速空胴装置において、上記磁性部材
として導電性の磁性部材を用い、上記内部導体と上記外
部導体により囲まれた領域に液体を含侵させて上記磁性
部材を浸潤させると共に、上記磁性部材の外径と上記外
部導体の内径との間を少なくとも１５０ｍｍ以上離して
設けることを特徴とするものである。Further , a high-frequency acceleration cavity device according to another invention is a pair of acceleration electrodes provided in opposite openings of an inner conductor of an acceleration cavity in which charged particles travel, and electrodes of the pair of acceleration electrodes. An insulating member for vacuum-sealing the inter-gap, a magnetic member provided between the inner conductor and the outer conductor of the acceleration cavity so as to surround the inner conductor, and the magnetic member driven to provide the pair of members. In a high frequency accelerating cavity device including a high frequency power source for generating an electric field for accelerating charged particles between the accelerating electrodes, a conductive magnetic member is used as the magnetic member and is surrounded by the inner conductor and the outer conductor. A liquid is impregnated into the exposed region to infiltrate the magnetic member, and the outer diameter of the magnetic member and the inner diameter of the outer conductor are separated by at least 150 mm or more. It is intended to.
【００１９】[0019]
【００２０】[0020]
【発明の実施の形態】実施の形態１．以下、この発明を
図示する実施の形態に従って説明する。図１は実施の形
態１に係る高周波加速空洞装置の構成を示す断面図であ
る。図１において、図７に示す従来例と同一部分は同一
符号を付してその説明は省略する。新たな符号として、
１１は内部導体１Ａと１Ｂのそれぞれの端部、つまり荷
電粒子が走行する加速空洞の内部導体１の対向する開口
部に設置された加速電極８の電極間に設けられた中間電
極、９は加速電極８と中間電極１１の間、あるいは中間
電極１１とその隣に設けられた中間電極１１の間、つま
り加速電極の電極間ギャップを真空封止する絶縁部材、
１０は磁性部材４の一部を囲むように配置された電流経
路であり、中間電極１１に接続されて、加速電極８の電
極ギャップ間の電界強度が均一になるように中間電極１
１に電位を与える電位供給手段として作用する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1. Hereinafter, the present invention will be described according to the illustrated embodiments. FIG. 1 is a sectional view showing the configuration of the high-frequency acceleration cavity device according to the first embodiment. In FIG. 1, the same parts as those in the conventional example shown in FIG. 7 are designated by the same reference numerals, and the description thereof will be omitted. As a new code,
Reference numeral 11 denotes an end of each of the inner conductors 1A and 1B, that is, an intermediate electrode provided between the electrodes of the acceleration electrode 8 provided at the opposing opening of the inner conductor 1 of the acceleration cavity in which the charged particles travel, and 9 denotes acceleration. An insulating member for vacuum-sealing the gap between the electrode 8 and the intermediate electrode 11, or between the intermediate electrode 11 and the intermediate electrode 11 provided adjacent to the intermediate electrode 11, that is, the gap between the acceleration electrodes.
Reference numeral 10 is a current path arranged so as to surround a part of the magnetic member 4, and is connected to the intermediate electrode 11 so that the electric field strength between the electrode gaps of the acceleration electrode 8 becomes uniform.
It functions as a potential supply means for applying a potential to 1.
【００２１】次に動作について説明する。加速空洞のイ
ンピーダンスを高めるために加速ギャップ３の静電容量
を小さくするためには加速ギャップ３を広げる必要があ
るが、加速ギャップ３を広げただけでは磁性部材４から
磁束が漏れてその磁束が電界を誘発し加速ギャップ内の
電場が不安定になる。本実施の形態では、内部導体１Ａ
と内部導体１Ｂのそれぞれの端部に設けられた加速電極
８の間に中間電極１１を１つもしくは複数設置すること
で、加速ギャップ３の静電容量を小さくでき、インピー
ダンスを高くすることができる。加速ギャップ３の静電
容量を小さくするとともに、磁性部材４の数量を増やせ
ば加速空胴のインピーダンスを高くすることができる。
また、加速ギャップ３に印加する高周波電圧が一定なら
ば、加速空胴のインピーダンスを高くすることで高周波
電源６のパワーは小さくてすむ。そのため、加速空胴内
の冷却は簡単なものを設置することができる。さらに、
比誘電率の低い絶縁部材９を加速ギャップ３に設置する
ことにより、加速ギャップ３のインピーダンスを高く保
持し、ビーム経路中を高真空に維持することができる。Next, the operation will be described. Although it is necessary to widen the acceleration gap 3 in order to reduce the electrostatic capacitance of the acceleration gap 3 in order to increase the impedance of the acceleration cavity, the magnetic flux leaks from the magnetic member 4 and the magnetic flux becomes The electric field is induced and the electric field in the acceleration gap becomes unstable. In the present embodiment, the inner conductor 1A
By disposing one or more intermediate electrodes 11 between the accelerating electrodes 8 provided at the respective end portions of the inner conductor 1B and the inner conductor 1B, the capacitance of the accelerating gap 3 can be reduced and the impedance can be increased. . If the capacitance of the acceleration gap 3 is reduced and the number of the magnetic members 4 is increased, the impedance of the acceleration cavity can be increased.
Further, if the high frequency voltage applied to the acceleration gap 3 is constant, the power of the high frequency power supply 6 can be reduced by increasing the impedance of the acceleration cavity. Therefore, it is possible to install a simple cooling inside the acceleration cavity. further,
By installing the insulating member 9 having a low relative dielectric constant in the acceleration gap 3, the impedance of the acceleration gap 3 can be maintained high and the beam path can be maintained in a high vacuum.
【００２２】なお、上記実施の形態では、電流経路１０
を設けることで中間電極１１に電位を与えることによ
り、イオンビーム７により絶縁部材９がチャージアップ
されることで生じる加速ギャップ３の電界を均一にする
ことができる。In the above embodiment, the current path 10 is used.
By providing a potential to the intermediate electrode 11 by providing, the electric field in the acceleration gap 3 generated by the insulating member 9 being charged up by the ion beam 7 can be made uniform.
【００２３】実施の形態２．さらに、図２に示す実施の
形態２のように、高周波フィーダ５を直接磁性部材に囲
むように配置し、磁性部材４を高周波電源６により直接
駆動することにより、中間電極１１に高い電位を与える
ことを可能にして上記実施の形態１と同様の効果が得ら
れる。Embodiment 2. Further, as in the second embodiment shown in FIG. 2, the high-frequency feeder 5 is arranged so as to be directly surrounded by the magnetic member, and the magnetic member 4 is directly driven by the high-frequency power source 6 to give a high potential to the intermediate electrode 11. This makes it possible to obtain the same effects as those of the first embodiment.
【００２４】実施の形態３．上記実施の形態１では、電
流経路１０により外部導体２と中間電極１１とを接続
し、電流経路１１によって磁性部材４を均等に区分けし
て囲むことにより中間電極１１間に電位を与えるように
したが、その他に、図３に示すように、加速電極８と中
間電極１１とがなす電極間にそれぞれ抵抗１２を接続す
ることにより、中間電極１１に電位を与えることもで
き、この場合においても上記実施の形態１と同様の効果
が得られる。Embodiment 3. In the first embodiment, the outer conductor 2 and the intermediate electrode 11 are connected by the current path 10, and the magnetic member 4 is equally divided and surrounded by the current path 11 so that a potential is applied between the intermediate electrodes 11. However, in addition, as shown in FIG. 3, a potential can be applied to the intermediate electrode 11 by connecting a resistor 12 between the electrodes formed by the acceleration electrode 8 and the intermediate electrode 11, respectively. The same effect as that of the first embodiment can be obtained.
【００２５】実施の形態４．また、上記実施の形態１で
は、加速ギャップ３に絶縁部材９を設置する場合につい
て述べたが、図４に示すように、抵抗１２を接続する代
わりに、絶縁部材９上の真空に接する面、つまり加速空
洞内周面に接する面に抵抗皮膜１３を設置することによ
り、イオンビームにより加速ギャップ３に生じるチャー
ジアップを防止することができ、加速ギャップ３の加速
電界の乱れを抑止することができる。また、絶縁部材９
に抵抗皮膜１３を設けたものの代わりに、抵抗をもつセ
ラミックを真空封止に用いることで絶縁部材９のチャー
ジアップによる加速電界の乱れを抑止することもでき
る。Fourth Embodiment Further, in the first embodiment, the case where the insulating member 9 is installed in the acceleration gap 3 has been described. However, as shown in FIG. 4, instead of connecting the resistor 12, a surface of the insulating member 9 that contacts the vacuum, That is, by installing the resistance film 13 on the surface in contact with the inner peripheral surface of the acceleration cavity, it is possible to prevent the charge-up that occurs in the acceleration gap 3 due to the ion beam, and to suppress the disturbance of the acceleration electric field in the acceleration gap 3. . Also, the insulating member 9
It is also possible to suppress the disturbance of the acceleration electric field due to the charge-up of the insulating member 9 by using a ceramic having a resistance for vacuum sealing instead of the one provided with the resistance film 13.
【００２６】なお、上記各実施の形態では、λ／４型加
速空胴の場合について説明したものであるが、λ／２型
加速空胴であってもよく、上記各実施の形態と同様の効
果が得られる。In each of the above embodiments, the case of the λ / 4 type acceleration cavity has been described, but a λ / 2 type acceleration cavity may be used, and the same as in each of the above embodiments. The effect is obtained.
【００２７】実施の形態５.次に、図５は実施の形態５
に係る高周波加速空洞装置の構成を示す断面図である。
図５において、図１に示す実施の形態１と同一部分は同
一符号を付してその説明は省略する。新たな符号とし
て、１４は加速空胴の内部導体１と外部導体２で囲まれ
た領域に設置してある磁性部材４を冷却するための液
体、１５は冷却する領域と冷却しない領域を区分けする
ために設置された仕切板、１６は磁性部材４と内部導体
１間もしくは外部導体２と磁性部材４の間に設置された
仕切板、１７は液体入口、１８は液体出口である。Fifth Embodiment Next, FIG. 5 shows a fifth embodiment.
It is sectional drawing which shows the structure of the high frequency acceleration cavity apparatus which concerns on.
5, the same parts as those of the first embodiment shown in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted. As a new code, 14 is a liquid for cooling the magnetic member 4 installed in a region surrounded by the inner conductor 1 and the outer conductor 2 of the acceleration cavity, and 15 is a region for cooling and a region for not cooling. A partition plate installed for this purpose, 16 a partition plate installed between the magnetic member 4 and the inner conductor 1 or between the outer conductor 2 and the magnetic member 4, 17 a liquid inlet, and 18 a liquid outlet.
【００２８】次に動作について説明する。上述した実施
の形態１では、内部導体１と外部導体２により囲まれた
領域は大気である場合について述べたが、本実施の形態
５では、図５に示すように、内部導体１と外部導体２に
より囲まれた領域に液体１４を含浸させて磁性部材４を
液体１４に浸潤させることにより、冷却効果を上げるよ
うにしている。ここで、用いる液体１４は、磁性部材４
の変質を防止するため耐放射線性不活性液体とする。仕
切板１５は液体１４で冷却する領域を限定するためのも
のであり、磁性部材４を設置している空間にのみ液体を
浸潤させる。このように、磁性部材４だけを液体１４に
浸潤させることで、液体１４の使用量を減らし、低コス
ト化が可能となる。また、磁性部材４と内部導体１間及
び磁性部材４と外部導体２間にそれぞれ交互に仕切板１
６を設置して、図５のように蛇腹状に液体流路を構成
し、流速を上げることによって冷却効果を一層上げるこ
とができる。Next, the operation will be described. In the first embodiment described above, the area surrounded by the inner conductor 1 and the outer conductor 2 is the atmosphere, but in the fifth embodiment, as shown in FIG. 5, the inner conductor 1 and the outer conductor 2 are arranged. The region surrounded by 2 is impregnated with the liquid 14 to infiltrate the magnetic member 4 into the liquid 14 to enhance the cooling effect. The liquid 14 used here is the magnetic member 4
Use a radiation resistant inert liquid to prevent alteration of the liquid. The partition plate 15 is for limiting the area cooled by the liquid 14, and allows the liquid to infiltrate only the space in which the magnetic member 4 is installed. In this way, by infiltrating only the magnetic member 4 into the liquid 14, the amount of the liquid 14 used can be reduced and the cost can be reduced. The partition plates 1 are alternately arranged between the magnetic member 4 and the inner conductor 1 and between the magnetic member 4 and the outer conductor 2.
6, the liquid flow path is formed in a bellows shape as shown in FIG. 5, and the cooling effect can be further enhanced by increasing the flow velocity.
【００２９】なお、上記実施の形態５において仕切板１
５、仕切板１６の設置の有無の組合わせは問わず実施す
ることができる。また、上記実施の形態１による効果は
冷却系を設置しても同様に得られる。The partition plate 1 according to the fifth embodiment described above.
5. The combination of the presence or absence of the partition plate 16 can be implemented regardless of the combination. Further, the effects of the first embodiment can be obtained similarly even if a cooling system is installed.
【００３０】なお、上記実施の形態５では、λ/４型空
胴の場合について説明したものであるが、λ/２型空胴
であってもよく、上記実施の形態と同様の効果が得られ
る。In the fifth embodiment, the case of the λ / 4 type cavity has been described, but a λ / 2 type cavity may be used, and the same effect as that of the above embodiment is obtained. To be
【００３１】実施の形態６．
また、内部導体１と外部導体２の間のインピーダンス
は、空洞ギャップと並列に入るため、このインピーダン
スが大きいほど空洞のインピーダンスへの影響が小さく
なる。このため、少なくとも空洞のインピーダンスの倍
以上となるように設定するのが望ましい。図６に示すよ
うに、磁性部材４の外径と外部導体２の内径の差を１５
０ｍｍ以上離して設置することで、従来の非同期型加速
空洞のインピーダンス（２００〜５００Ω）の倍程度の
インピーダンス以上（８００Ω以上）を実現することが
できる。例えば外径４００ｍｍ，長さ２００ｍｍの磁性
部材４を内径７００ｍｍの外部導体２で囲む場合、磁性
部材４−外部導体２間の容量を同軸円筒モデルで近似し
て計算すると２０ｐＦとなり、これを１０ＭＨｚにおけ
るインピーダンスに変換すると、８００Ωとなる。内部
導体１−外部導体２間の容量は、磁性部材４がアモルフ
ァス金属等の導体の場合、内部導体１−磁性部材４間の
容量、磁性部材４−外部導体２間の容量の直列接続とな
るから、内部導体１−外部導体２間のインピーダンスは
８００Ωより大きくなる。一方、内部導体１−外部導体
２間のインピーダンスを大きくするために、磁性部材４
−外部導体２間のインピーダンスを大きくするのではな
く、内部導体１−磁性部材４間のインピーダンスを大き
くする（距離を離す）方法もある。しかし、この構成で
は磁性部材４の内径が大きくなる。磁性部材４のインダ
クタンスは、磁性部材４の外径をＲ０，内径をＲｉとす
ると、
ｌｎ（Ｒ０／Ｒｉ） ・・・（４）
に比例するので、同じインダクタンスを得るためには、
内径が小さい方が磁性部材４の体積を小さくできる。こ
れにより、小型化、コストダウンを図ることができるた
め、内部導体１と磁性部材４の間の距離を離して容量を
小さくするよりも、磁性部材４と外部導体２の間の容量
を小さくする方が望ましい。Sixth Embodiment Further, since the impedance between the inner conductor 1 and the outer conductor 2 enters in parallel with the cavity gap, the larger the impedance, the smaller the influence on the cavity impedance. Therefore, it is desirable to set the impedance to be at least twice the impedance of the cavity. As shown in FIG. 6, the difference between the outer diameter of the magnetic member 4 and the inner diameter of the outer conductor 2 is 15
By installing them apart from each other by 0 mm or more, it is possible to realize an impedance (800Ω or more) that is about twice the impedance (200 to 500Ω) of the conventional asynchronous acceleration cavity. For example, when a magnetic member 4 having an outer diameter of 400 mm and a length of 200 mm is surrounded by an outer conductor 2 having an inner diameter of 700 mm, the capacitance between the magnetic member 4 and the outer conductor 2 is calculated by approximating with a coaxial cylinder model to be 20 pF, which is 10 MHz. When converted into impedance, it becomes 800Ω. When the magnetic member 4 is a conductor such as amorphous metal, the capacitance between the inner conductor 1 and the outer conductor 2 is a series connection of the capacitance between the inner conductor 1 and the magnetic member 4 and the capacitance between the magnetic member 4 and the outer conductor 2. Therefore, the impedance between the inner conductor 1 and the outer conductor 2 becomes larger than 800Ω. On the other hand, in order to increase the impedance between the inner conductor 1 and the outer conductor 2, the magnetic member 4
There is also a method in which the impedance between the inner conductor 1 and the magnetic member 4 is increased (the distance is increased) instead of increasing the impedance between the outer conductor 2. However, in this structure, the inner diameter of the magnetic member 4 becomes large. The inductance of the magnetic member 4 is proportional to ln (R 0 / R i ) ... (4) where R 0 is the outer diameter and R i is the inner diameter of the magnetic member 4. ,
The smaller the inner diameter, the smaller the volume of the magnetic member 4. As a result, size reduction and cost reduction can be achieved. Therefore, the capacitance between the magnetic member 4 and the outer conductor 2 is made smaller than the distance between the inner conductor 1 and the magnetic member 4 is made smaller to reduce the capacitance. Is preferable.
【００３２】上記実施の形態６は、λ/４型空胴、λ/２
型空胴のどちらの場合であっても同様の効果を得ること
ができる。The above sixth embodiment is a λ / 4 type cavity, λ / 2
The same effect can be obtained in either case of the mold cavity.
【００３３】[0033]
【発明の効果】以上のように、この発明によれば、加速
ギャップに中間電極を設置することで、加速ギャップ間
の絶縁部材表面に生じるチャージを中間電極にある程度
逃がし、チャージアップを小さくしてビーム軌道を安定
にすることができ、チャージアップした壁面による電界
がビーム軌道に与える影響を緩和するため、加速ギャッ
プを大きくとることができ、このため浮遊容量を小さく
でき、空洞インピーダンスを上げることで、低パワーの
高周波加速電源を備えてもイオンビームを十分に加速す
るのに必要な加速電圧を印加できる非同調型の高周波加
速空胴装置を提供することができる。As described above, according to the present invention, by installing the intermediate electrode in the acceleration gap, the charge generated on the surface of the insulating member between the acceleration gaps is released to the intermediate electrode to some extent, and the charge-up is reduced. The beam trajectory can be stabilized, and the effect of the electric field due to the charged wall on the beam trajectory is mitigated, so that the acceleration gap can be made large, which can reduce the stray capacitance and raise the cavity impedance. It is possible to provide a non-tuning type high-frequency acceleration cavity device that can apply an acceleration voltage required to sufficiently accelerate an ion beam even if a low-power high-frequency acceleration power source is provided.
【００３４】また、上記中間電極に、電位を与える電位
供給手段を備えることで、加速電極の電極ギャップ間の
電界強度を均一にすることができる。Further, by providing the intermediate electrode with a potential supply means for applying a potential, the electric field strength between the electrode gaps of the acceleration electrode can be made uniform.
【００３５】また、上記電位供給手段を、上記中間電極
と上記外部導体とを接続し、かつ上記磁性部材を区分け
して囲むように配置された電流経路で構成することで、
中間電極に電位を供給することができる。Further, the potential supply means is constituted by a current path that connects the intermediate electrode and the outer conductor and is arranged so as to surround the magnetic member in a divided manner.
An electric potential can be supplied to the intermediate electrode.
【００３６】また、上記高周波電源に接続され、かつ上
記磁性部材を囲むように配置されて上記高周波電源によ
り上記磁性部材を直接駆動するための高周波フィーダを
備えたことで、中間電極１１に高い電位を与えることを
可能にすることができる。Further, since a high-frequency feeder connected to the high-frequency power source and arranged so as to surround the magnetic member to directly drive the magnetic member by the high-frequency power source is provided, the intermediate electrode 11 has a high potential. Can be given.
【００３７】また、上記加速電極と上記中間電極とがな
す電極間にそれぞれ抵抗を接続したことで、チャージア
ップして不安定になる壁面電位を安定にすることがで
き、ビーム軌道を安定にして中間電極に電位を与えるこ
とができる。By connecting resistors between the electrodes formed by the accelerating electrode and the intermediate electrode, it is possible to stabilize the wall surface potential which becomes unstable due to charge-up and stabilizes the beam trajectory. An electric potential can be applied to the intermediate electrode.
【００３８】また、上記絶縁部材の加速空洞内周側に接
する面上に抵抗皮膜を設けたことで、加速ギャップに生
じるチャージアップを防止でき、加速電界の乱れを抑止
することできる。Further, by providing the resistance film on the surface of the insulating member which is in contact with the inner peripheral side of the acceleration cavity, it is possible to prevent the charge-up occurring in the acceleration gap and suppress the disturbance of the acceleration electric field.
【００３９】[0039]
【００４０】[0040]
【００４１】また、他の発明に係る高周波加速空胴装置
によれば、荷電粒子が走行する加速空洞の内部導体の対
向する開口部にそれぞれ設けられた一対の加速電極と、
上記一対の加速電極の電極間ギャップをそれぞれ真空封
止する絶縁部材と、上記加速空洞の内部導体と外部導体
との間に該内部導体を囲繞するようにして設けられた磁
性部材と、上記磁性部材を駆動して上記一対の加速電極
間に荷電粒子を加速する電界を発生させるための高周波
電源とを備えた高周波加速空胴装置において、上記磁性
部材として導電性の磁性部材を用い、上記内部導体と上
記外部導体により囲まれた領域に液体を含侵させて上記
磁性部材を浸潤させると共に、上記磁性部材の外径と上
記外部導体の内径との間を少なくとも１５０ｍｍ以上離
して設けることで、内部導体と外部導体に囲まれた領域
の中の静電容量を小さくすることができ、加速空洞のイ
ンピーダンスを高めることができる。A high frequency acceleration cavity device according to another invention
According to the pair of inner conductors of the accelerating cavity in which the charged particles travel.
A pair of accelerating electrodes respectively provided in the facing openings,
The gap between the electrodes of the pair of accelerating electrodes is vacuum sealed.
Insulating member to stop, inner conductor and outer conductor of the acceleration cavity
And a magnet provided so as to surround the inner conductor between
And a pair of accelerating electrodes that drive the magnetic member and the magnetic member.
High frequency to generate an electric field that accelerates charged particles in between
In a high-frequency acceleration cavity device equipped with a power source,
Use a conductive magnetic member as the member, and
When the liquid is impregnated in the area surrounded by the outer conductor,
By infiltrating the magnetic member and providing the outer diameter of the magnetic member and the inner diameter of the outer conductor at least 150 mm apart, the capacitance in the region surrounded by the inner conductor and the outer conductor is reduced. The impedance of the accelerating cavity can be increased.
【図１】 この発明の実施の形態１に係る高周波加速空
洞装置の主要な構成を示す断面図である。FIG. 1 is a sectional view showing a main configuration of a high-frequency acceleration cavity device according to a first embodiment of the present invention.
【図２】 この発明の実施の形態２に係る高周波加速空
洞装置の主要な構成を示す断面図である。FIG. 2 is a sectional view showing a main configuration of a high-frequency acceleration cavity device according to a second embodiment of the present invention.
【図３】 この発明の実施の形態３に係る高周波加速空
洞装置の主要な構成を示す断面図である。FIG. 3 is a sectional view showing a main configuration of a high-frequency acceleration cavity device according to Embodiment 3 of the present invention.
【図４】 この発明の実施の形態４に係る高周波加速空
洞装置の主要な構成を示す断面図である。FIG. 4 is a cross-sectional view showing the main configuration of a high-frequency acceleration cavity device according to Embodiment 4 of the present invention.
【図５】 この発明の実施の形態５に係る高周波加速空
洞装置の主要な構成を示す断面図である。FIG. 5 is a sectional view showing a main configuration of a high-frequency acceleration cavity device according to Embodiment 5 of the present invention.
【図６】 この発明の実施の形態６に係る高周波加速空
洞装置の主要な構成を示す断面図である。FIG. 6 is a sectional view showing a main configuration of a high-frequency acceleration cavity device according to Embodiment 6 of the present invention.
【図７】 従来の高周波加速空胴装置を示す断面図であ
る。FIG. 7 is a sectional view showing a conventional high-frequency acceleration cavity device.
１ 内部導体、２ 外部導体、３ 加速ギャップ、４
磁性部材、５ 高周波フィーダ、６ 高周波電源、７
イオンビーム、８ 加速電極、９ 絶縁部材、１０ 電
流経路、１１ 中間電極、１２ 抵抗、１３ 抵抗皮
膜、１４ 液体、１５ 仕切板、１６ 仕切板、１７
液体入口、１８ 液体出口。1 inner conductor, 2 outer conductor, 3 acceleration gap, 4
Magnetic member, 5 high frequency feeder, 6 high frequency power supply, 7
Ion beam, 8 accelerating electrode, 9 insulating member, 10 current path, 11 intermediate electrode, 12 resistance, 13 resistance film, 14 liquid, 15 partition plate, 16 partition plate, 17
Liquid inlet, 18 liquid outlet.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 来島 裕子 東京都千代田区丸の内二丁目２番３号 三菱電機株式会社内 (56)参考文献 特開 平８−250300（ＪＰ，Ａ) 特開 平７−161500（ＪＰ，Ａ) 特開 平８−213198（ＪＰ，Ａ) 特開 平９−161997（ＪＰ，Ａ) 実開 平５−23500（ＪＰ，Ｕ) 実開 平４−72600（ＪＰ，Ｕ) 実公 昭48−22319（ＪＰ，Ｙ１) (58)調査した分野(Int.Cl.7，ＤＢ名) H05H 3/00 - 15/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yuko Kurushima 2-3-3 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Corporation (56) References JP-A-8-250300 (JP, A) JP-A-7 -161500 (JP, A) JP 8-213198 (JP, A) JP 9-161997 (JP, A) Actual flat 5-23500 (JP, U) Actual flat 4-72600 (JP, U) ) Jitsuko Sho 48-22319 (JP, Y1) (58) Fields investigated (Int.Cl. 7 , DB name) H05H 3/00-15/00
Claims (7)
の対向する開口部にそれぞれ設けられた一対の加速電極
と、上記一対の加速電極の電極間ギャップをそれぞれ真
空封止する絶縁部材と、上記加速空洞の内部導体と外部
導体との間に該内部導体を囲繞するようにして設けられ
た磁性部材と、上記磁性部材を駆動して上記一対の加速
電極間に荷電粒子を加速する電界を発生させるための高
周波電源とを備えた高周波加速空胴装置において、上記
一対の加速電極の電極間ギャップに１または複数の中間
電極をそれぞれ設けたことを特徴とする高周波加速空胴
装置。1. A pair of accelerating electrodes respectively provided in opposing openings of an inner conductor of an accelerating cavity in which charged particles travel, and an insulating member for vacuum-sealing the inter-electrode gap of the pair of accelerating electrodes, respectively. A magnetic member is provided between the inner conductor and the outer conductor of the acceleration cavity so as to surround the inner conductor, and an electric field that drives the magnetic member to accelerate charged particles between the pair of acceleration electrodes. A high-frequency acceleration cavity device including a high-frequency power supply for generating the high-frequency acceleration cavity device, wherein one or a plurality of intermediate electrodes are provided in the interelectrode gap of the pair of acceleration electrodes.
電極の電極ギャップ間の電界強度が均一になるようにす
る電位供給手段を設けたことを特徴とする請求項１記載
の高周波加速空胴装置。2. The high-frequency acceleration space according to claim 1, wherein the intermediate electrode is provided with a potential supply means for applying a potential so that the electric field strength between the electrode gaps of the acceleration electrode becomes uniform. Body device.
記外部導体とを接続し、かつ上記磁性部材を区分けして
囲むように配置された電流経路であることを特徴とする
請求項２記載の高周波加速空胴装置。3. The electric potential supply means is a current path that connects the intermediate electrode and the outer conductor and is arranged so as to surround the magnetic member in a divided manner. High frequency acceleration cavity device.
性部材を囲むように配置されて上記高周波電源により上
記磁性部材を直接駆動するための高周波フィーダを備え
たことを特徴とする請求項１ないし３のいずれかに記載
の高周波加速空洞装置。4. A high frequency feeder, which is connected to the high frequency power source and is arranged so as to surround the magnetic member, for directly driving the magnetic member by the high frequency power source. 3. The high frequency acceleration cavity device according to any one of 3 above.
極間にそれぞれ抵抗を接続したことを特徴とする請求項
１ないし４のいずれかに記載の高周波加速空胴装置。5. The high frequency acceleration cavity device according to claim 1, further comprising a resistor connected between electrodes formed by the acceleration electrode and the intermediate electrode.
面上に抵抗皮膜を設けたことを特徴とする請求項１ない
し４のいずれかに記載の高周波加速空胴装置。6. The high frequency acceleration cavity device according to claim 1, wherein a resistance film is provided on a surface of the insulating member which is in contact with the inner peripheral side of the acceleration cavity.
の対向する開口部にそれぞれ設けられた一対の加速電極
と、上記一対の加速電極の電極間ギャップをそれぞれ真
空封止する絶縁部材と、上記加速空洞の内部導体と外部
導体との間に該内部導体を囲繞するようにして設けられ
た磁性部材と、上記磁性部材を駆動し て上記一対の加速
電極間に荷電粒子を加速する電界を発生させるための高
周波電源とを備えた高周波加速空胴装置において、上記
磁性部材として導電性の磁性部材を用い、上記内部導体
と上記外部導体により囲まれた領域に液体を含侵させて
上記磁性部材を浸潤させると共に、上記磁性部材の外径
と上記外部導体の内径との間を少なくとも１５０ｍｍ以
上離して設けることを特徴とする高周波加速空胴装置。 7. An inner conductor of an acceleration cavity in which charged particles travel.
Pair of accelerating electrodes respectively provided in the opposing openings of the
And the gap between the pair of accelerating electrodes
Insulation member for air-sealing, inner conductor and outer of the acceleration cavity
Is provided so as to surround the inner conductor with a conductor.
The magnetic member and the pair of accelerations by driving the magnetic member.
High for generating an electric field that accelerates charged particles between electrodes
In a high frequency accelerating cavity device including a high frequency power source,
Using a conductive magnetic member as the magnetic member,
And impregnate the area surrounded by the outer conductor with liquid.
The outer diameter of the magnetic member while infiltrating the magnetic member
And at least 150 mm between the inner diameter of the outer conductor and
A high-frequency accelerating cavity device characterized by being installed separately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00684698A JP3478109B2 (en) | 1998-01-16 | 1998-01-16 | High frequency accelerating cavity device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00684698A JP3478109B2 (en) | 1998-01-16 | 1998-01-16 | High frequency accelerating cavity device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11204300A JPH11204300A (en) | 1999-07-30 |
| JP3478109B2 true JP3478109B2 (en) | 2003-12-15 |
Family
ID=11649614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00684698A Expired - Fee Related JP3478109B2 (en) | 1998-01-16 | 1998-01-16 | High frequency accelerating cavity device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3478109B2 (en) |
-
1998
- 1998-01-16 JP JP00684698A patent/JP3478109B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11204300A (en) | 1999-07-30 |
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