JP3415255B2 - Exhaust method for rotating anode X-ray tube - Google Patents
Exhaust method for rotating anode X-ray tubeInfo
- Publication number
- JP3415255B2 JP3415255B2 JP07772994A JP7772994A JP3415255B2 JP 3415255 B2 JP3415255 B2 JP 3415255B2 JP 07772994 A JP07772994 A JP 07772994A JP 7772994 A JP7772994 A JP 7772994A JP 3415255 B2 JP3415255 B2 JP 3415255B2
- Authority
- JP
- Japan
- Prior art keywords
- ray tube
- bearing
- anode
- exhaust
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、液体潤滑回転陽極型Ｘ
線管の排気方法に係わり、とくに陽極軸受の劣化を極力
抑え、管球自体の長寿命化及び安定化をはかる排気方法
に関する。BACKGROUND OF THE INVENTION The present invention relates to a liquid lubricated rotary anode type X.
The present invention relates to a method of exhausting a wire tube, and more particularly to an exhaust method of suppressing deterioration of an anode bearing as much as possible and extending and stabilizing the life of the tube itself.
【０００２】[0002]
【従来の技術】回転陽極型Ｘ線管は、通常、玉軸受を利
用して回転機構を組み立てている。しかし、低騒音、高
荷重、及びより高速回転化への要求から、近年は、ガリ
ウム（Ｇａ）、又はガリウム−インジウム−錫（Ｇａ−
Ｉｎ−Ｓｎ）合金のような液体金属で潤滑される動圧す
べり軸受が利用されつつある。このような動圧すべり軸
受を用いた回転陽極型Ｘ線管の例は、特開昭６０−１１
７５３１号、特開平２−２２７９４８号、あるいは特開
平５−１４４３９６号の各公報に開示されている。2. Description of the Related Art In a rotary anode type X-ray tube, a rotating mechanism is usually assembled using a ball bearing. However, in recent years, gallium (Ga) or gallium-indium-tin (Ga-) has been used because of the demand for low noise, high load, and higher speed rotation.
Dynamic pressure sliding bearings that are lubricated with a liquid metal such as an In-Sn) alloy are being used. An example of a rotary anode type X-ray tube using such a dynamic pressure slide bearing is disclosed in JP-A-60-11.
No. 7531, JP-A-2-227948, or JP-A-5-144396.
【０００３】液体金属で潤滑される動圧すべり軸受を有
する回転陽極型Ｘ線管の陽極構体は、図２に示すよう
に、円盤状の陽極ターゲット１１が回転円筒１２のシャ
フト１３に固定されている。回転円筒１２は、固定支柱
１４のまわりに嵌められ、開口端部にスラストリング１
５が一体的に固定されている。これら回転体と固定支柱
との接触部分に、ヘリンボン・パターンのらせん溝から
なる動圧すべり軸受１６，１７が構成されているととも
に、およそ２０μｍ程度の微小な軸受間隙が保たれてい
る。また、固定支柱１４の中心部には、潤滑剤収容室１
８が設けられ、固定体端部１９は図示しない真空容器の
外部、すなわち管外に延長され露出される。そして、軸
受のらせん溝、軸受間隙、潤滑剤収容室には、液体金属
潤滑剤が供給されている。As shown in FIG. 2, an anode assembly of a rotary anode type X-ray tube having a dynamic pressure sliding bearing lubricated with a liquid metal has a disk-shaped anode target 11 fixed to a shaft 13 of a rotary cylinder 12. There is. The rotating cylinder 12 is fitted around the fixed column 14, and the thrust ring 1 is attached to the opening end.
5 is integrally fixed. Dynamic contact slide bearings 16 and 17 composed of spiral grooves of a herringbone pattern are formed at the contact portion between the rotating body and the fixed support, and a minute bearing gap of about 20 μm is maintained. Further, the lubricant accommodating chamber 1 is provided at the center of the fixed column 14.
8 is provided, and the end 19 of the fixed body is extended and exposed to the outside of a vacuum container (not shown), that is, outside the tube. Liquid metal lubricant is supplied to the spiral groove of the bearing, the bearing gap, and the lubricant containing chamber.
【０００４】[0004]
【発明が解決しようとする課題】通常、液体金属潤滑剤
として利用される例えばガリウム合金は、活性であるた
め、例えば鉄や鉄合金からなる軸受構成部材を激しく侵
食する。本発明者らが得た実験結果によると、この侵食
速度は温度が高くなれば高くなるほど格段に増加するた
め、Ｘ線管の製造工程、実使用時ともに、軸受部分の温
度を極力下げる必要がある。Since, for example, a gallium alloy which is usually used as a liquid metal lubricant is active, it violently erodes a bearing component made of iron or an iron alloy. According to the experimental results obtained by the present inventors, this erosion rate increases remarkably as the temperature rises. Therefore, it is necessary to lower the temperature of the bearing portion as much as possible during the manufacturing process of the X-ray tube and the actual use. is there.
【０００５】通常、Ｘ線管を製造する排気工程において
は、電子ボンバードによる陽極ターゲットのガス出し排
気や、真空容器のガス出し排気のための容器全体の加熱
が不可欠であり、したがって軸受を高温にさらす工程が
避けられない。このような従来技術のままで液体潤滑型
Ｘ線管で排気を行うと、上記の理由により、活性な潤滑
剤と直接接触している軸受構成部材の侵食が進み、らせ
ん溝の深さや軸受間隙等の寸法が変化し、回転性能に重
大な悪影響を与えることになる。Usually, in the exhaust process of manufacturing an X-ray tube, it is essential to discharge gas from the anode target by electron bombardment and to heat the entire container to discharge gas from the vacuum container and exhaust the gas. The exposing process is inevitable. If exhaust is performed by the liquid lubrication type X-ray tube with such a conventional technique, the bearing constituent members that are in direct contact with the active lubricant are eroded due to the above reason, and the depth of the spiral groove and the bearing gap are increased. And the like will have a serious adverse effect on the rotation performance.
【０００６】本発明は、活性な液体金属で潤滑される回
転陽極型Ｘ線管の排気工程における回転機構を構成して
いる金属の侵食を低減し、長時間安定動作を保証できる
回転陽極型Ｘ線管の排気方法を提供することを目的とす
る。The present invention reduces the erosion of the metal constituting the rotating mechanism in the exhaust process of the rotary anode type X-ray tube lubricated with the active liquid metal and can ensure a stable operation for a long time. An object of the present invention is to provide a method of exhausting a wire tube.
【０００７】[0007]
【課題を解決するための手段】本発明は、Ｘ線管の陽極
側の軸受構成部材である固定体端部を冷却装置により冷
却して軸受温度を低下させながら陽極の電子ボンバード
又は真空容器のガス出しを行う回転陽極型Ｘ線管の排気
方法である。SUMMARY OF THE INVENTION According to the present invention, an end of a fixed body, which is a bearing constituent member on the anode side of an X-ray tube, is cooled by a cooling device to lower the bearing temperature, and an electron bombardment or a vacuum container of the anode is provided. It is a method of exhausting a rotary anode type X-ray tube for discharging gas.
【０００８】[0008]
【作用】本発明者らが行った実験結果によれば、排気工
程での鉄合金製軸受部材とガリウム合金との反応速度
は、例えば、２０度Ｃでのそれの数倍の速度になるとい
う結果を得た。これはつまり、ほんのわずかな温度差で
も、軸受の材質とガリウム合金の反応速度は格段に違う
ということである。したがって、本発明によれば、活性
な液体金属潤滑剤と軸受構成部材との反応を確実に抑え
ることができ、したがって軸受の寸法変化を抑制でき、
高性能で長寿命の回転陽極型Ｘ線管を製造することがで
きる。According to the results of experiments conducted by the present inventors, the reaction speed of the iron alloy bearing member and the gallium alloy in the exhaust step is, for example, several times that at 20 ° C. I got the result. This means that the bearing material and the reaction rate of the gallium alloy are significantly different even with a slight temperature difference. Therefore, according to the present invention, it is possible to reliably suppress the reaction between the active liquid metal lubricant and the bearing constituent member, and thus suppress the dimensional change of the bearing,
It is possible to manufacture a rotating anode type X-ray tube having high performance and long life.
【０００９】[0009]
【実施例】図１は本発明の実施例であり、排気工程での
状態を概略あらわしている。回転陽極型Ｘ線管１０の真
空容器は、一部にＸ線放射窓２１を有する径大な金属容
器部２２、陰極側のガラス容器部２３、及び陽極側のガ
ラス容器部２４を有している。金属容器部２２の陰極側
に、排気管２５が取り付けられ、図示しない真空ポンプ
に接続されて排気される。EXAMPLE FIG. 1 is an example of the present invention and schematically shows a state in an exhaust process. The vacuum container of the rotary anode type X-ray tube 10 has a large-diameter metal container part 22 having an X-ray emission window 21 in part, a cathode side glass container part 23, and an anode side glass container part 24. There is. An exhaust pipe 25 is attached to the cathode side of the metal container 22 and is connected to a vacuum pump (not shown) for exhausting.
【００１０】金属容器部２２及び陽極側のガラス容器部
２４の内側には、図２に示した回転陽極構体が配置さ
れ、その固定支柱端部１９が真空容器外に延長され、露
出されている。Inside the metal container portion 22 and the glass container portion 24 on the anode side, the rotating anode assembly shown in FIG. 2 is arranged, and the fixed support column end portion 19 is extended and exposed outside the vacuum container. .
【００１１】そこで、内側に回転円筒が位置する陽極側
ガラス容器部２４の外周にステータ・コイル２６を配置
するとともに、管外に露出している固定支柱端部１９に
冷却装置２７を伝熱的に固定する。この冷却装置２７
は、銅からなる伝熱リング２８、ベリリア・セラミック
スのような電気的に絶縁体で熱伝導製にすぐれたカップ
状絶縁スペーサ２９、及びステンレス鋼製のカップ状水
冷ジャケット３０が液密に一体接合され、ジャケット３
０に冷却水導入パイプ３１及び排水パイプ３２が接続さ
れている。そして、冷却装置の伝熱リング２８を固定支
柱端部１９の密着固定し、これに陽極電子ボンバード用
の電源３３のブラス極を接続する。電源３３のマイナス
極は、真空容器の金属容器部２２とともに接地電位とす
る。Therefore, the stator coil 26 is arranged on the outer circumference of the anode side glass container portion 24 in which the rotating cylinder is located, and the cooling device 27 is heat-transferred to the fixed column end portion 19 exposed outside the tube. Fixed to. This cooling device 27
The heat transfer ring 28 made of copper, the cup-shaped insulating spacer 29 made of an electrically insulating material such as beryllia ceramics and excellent in heat conduction, and the cup-shaped water cooling jacket 30 made of stainless steel are integrally liquid-tightly joined. And jacket 3
A cooling water introduction pipe 31 and a drainage pipe 32 are connected to 0. Then, the heat transfer ring 28 of the cooling device is tightly fixed to the end portion 19 of the fixed column, and the brass electrode of the power supply 33 for the anode electron bombardment is connected to this. The negative pole of the power supply 33 is set to the ground potential together with the metal container portion 22 of the vacuum container.
【００１２】陽極ターゲットを電子ボンバードによりガ
ス出ししながら排気をする場合は、冷却装置２７に冷却
水を循環させて固定支柱端部１９を強制冷却しながら、
ステータ・コイル２６に通電する。陽極ターゲットは、
液体金属で潤滑される動圧すべり軸受により支持されて
高速回転する。そして、電源３３により陽極にプラス電
位を与え、図示しない陰極を動作させて電子放出させ、
陽極ターゲットに電子ビームを衝突させる。それによ
り、陽極構体は高温に発熱してガス放出させられるが、
軸受部分は強制冷却しているのであまり温度上昇しな
い。When the anode target is evacuated by gassing with an electron bombardment, cooling water is circulated through the cooling device 27 to forcibly cool the fixed support end portion 19,
Energize the stator coil 26. The anode target is
It is supported by a dynamic pressure sliding bearing that is lubricated with liquid metal and rotates at high speed. Then, a positive potential is applied to the anode by the power source 33, and a cathode (not shown) is operated to emit electrons,
An electron beam is made to collide with an anode target. As a result, the anode assembly heats up to a high temperature to release gas,
Since the bearing part is forcibly cooled, the temperature does not rise so much.
【００１３】なお、陰極には接地電位、又は接地に対し
マイナス電位を与えて電子放出させてもよい。なおま
た、絶縁スペーサ２９は、固定支柱端部１９と水冷ジャ
ケット３０との間を電気的に絶縁しており、安全を保っ
ている。Electrons may be emitted by applying a ground potential or a negative potential to the ground to the cathode. In addition, the insulating spacer 29 electrically insulates the fixed column end portion 19 and the water cooling jacket 30 from each other to maintain safety.
【００１４】このようにして排気を行うことにより、軸
受の温度上昇を抑制し、軸家構成部材と活性な潤滑剤と
の反応の促進を抑制することができる。なお、軸受部分
のガス出し排気をする場合は、冷却装置による冷却をし
ないか、又は冷却の度合いを適当に抑えて行えばよい。
また、真空容器の全体を電気炉等で加熱してガス出し排
気をする場合も、必要に応じて固定支柱端部を冷却装置
により冷却をすることができる。なお、強制冷却は、液
体冷却に限らず、強制空冷によってもよい。その場合、
固定支柱端部に放熱フィンを接続し、この放熱フィンと
送風機とを必要十分な電気的絶縁が保たれるように空間
的に離しておけば、絶縁スペーサを使用しなくてもよ
い。By performing the exhaust in this manner, it is possible to suppress the temperature rise of the bearing and suppress the promotion of the reaction between the shaft constituent member and the active lubricant. It should be noted that, when gas is discharged and exhausted from the bearing portion, it may be carried out without cooling by the cooling device or by appropriately suppressing the degree of cooling.
Also, when the entire vacuum container is heated in an electric furnace or the like to evacuate gas and exhaust the gas, the end of the fixed column can be cooled by a cooling device, if necessary. The forced cooling is not limited to liquid cooling, but may be forced air cooling. In that case,
If a radiation fin is connected to the end of the fixed column and the radiation fin and the blower are spatially separated so as to maintain necessary and sufficient electrical insulation, the insulating spacer may not be used.
【００１５】[0015]
【発明の効果】以上説明したように、本発明によれば軸
受構成部材の温度上昇を確実に抑えながらガス出し排気
をすることができ、したがって軸受面と潤滑剤との反応
を抑制でき、高性能で長寿命の動圧すべり軸受を有する
回転陽極型Ｘ線管を製造することができる。As described above, according to the present invention, it is possible to perform gas discharge and exhaust while surely suppressing the temperature rise of the bearing constituent members, and thus to suppress the reaction between the bearing surface and the lubricant. It is possible to manufacture a rotating anode type X-ray tube having a dynamic pressure sliding bearing with high performance and long life.
【図１】本発明の実施例の排気工程での状態を示す概略
図。FIG. 1 is a schematic view showing a state in an exhaust process of an example of the present invention.
【図２】本発明が対象とする回転陽極型Ｘ線管の陽極構
体を示す縦断面図。FIG. 2 is a vertical cross-sectional view showing an anode assembly of a rotary anode type X-ray tube targeted by the present invention.
１１…陽極ターゲット １２…回転円筒 １４…固定支柱 １９…固定支柱端部 １６，１７…軸受 ２５…排気管 ２７…冷却装置 11 ... Anode target 12 ... Rotating cylinder 14 ... Fixed support 19 ... Fixed support end 16, 17 ... Bearing 25 ... Exhaust pipe 27 ... Cooling device
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 昭63−70653（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 9/385 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Bibliography Sho 63-70653 (JP, U) (58) Fields investigated (Int.Cl. 7 , DB name) H01J 9/385
Claims (2)
転陽極型Ｘ線管の排気方法において、上記軸受を構成す
る部材から管外に延長された固定部を強制冷却しながら
陽極の電子ボンバード又は真空容器のガス出し排気を行
う工程を有し、前記強制冷却を行うことにより前記工程
中における前記軸受面と前記液体潤滑剤との反応を抑制
することを特徴とする回転陽極型Ｘ線管の排気方法。1. A method of exhausting a rotary anode type X-ray tube having a bearing lubricated with a liquid lubricant, wherein an electron bombardment of the anode is forcibly cooled while forcibly cooling a fixed part extending from the member constituting the bearing to the outside of the tube. Alternatively, there is a step of venting and evacuating the vacuum container, and the step is performed by performing the forced cooling.
Suppresses the reaction between the bearing surface and the liquid lubricant inside
A method for evacuating a rotary anode type X-ray tube, comprising:
排気を行う工程において、前記固定部を絶縁スペーサをIn the process of evacuating, the fixing part is attached
介して接合された水冷ジャケットにより強制冷却するこForced cooling with a water cooling jacket joined through
とを特徴とする請求項１記載の回転陽極型Ｘ線管の排気The exhaust of the rotary anode type X-ray tube according to claim 1,
方法。Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07772994A JP3415255B2 (en) | 1994-04-18 | 1994-04-18 | Exhaust method for rotating anode X-ray tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07772994A JP3415255B2 (en) | 1994-04-18 | 1994-04-18 | Exhaust method for rotating anode X-ray tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07288084A JPH07288084A (en) | 1995-10-31 |
| JP3415255B2 true JP3415255B2 (en) | 2003-06-09 |
Family
ID=13641997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07772994A Expired - Lifetime JP3415255B2 (en) | 1994-04-18 | 1994-04-18 | Exhaust method for rotating anode X-ray tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3415255B2 (en) |
-
1994
- 1994-04-18 JP JP07772994A patent/JP3415255B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07288084A (en) | 1995-10-31 |
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