JP3372024B2 - Piezoelectric element holding structure - Google Patents
Piezoelectric element holding structureInfo
- Publication number
- JP3372024B2 JP3372024B2 JP08008698A JP8008698A JP3372024B2 JP 3372024 B2 JP3372024 B2 JP 3372024B2 JP 08008698 A JP08008698 A JP 08008698A JP 8008698 A JP8008698 A JP 8008698A JP 3372024 B2 JP3372024 B2 JP 3372024B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- holding structure
- support
- piezoelectric elements
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【発明の詳細な説明】
【０００１】
【発明の属する技術分野】本発明は、加速度センサなど
に適用する圧電素子の保持構造に関する。
【０００２】
【従来の技術】従来、この種の圧電素子保持構造として
は、図５に示すように、剪断形圧電素子１００を支持体
１０１と質量体１０２で挟むように配置し、夫々の貫通
孔１００ａ，１０１ａ，１０２ａにボルト１０３を挿通
し、このボルト１０３の端部にナットで締結して、剪断
形圧電素子１００を支持体１０１と質量体１０２で保持
したものが知られている（例えば、実公昭６１−１６５
２８号公報参照）。
【０００３】
【発明が解決しようとする課題】しかし、このような圧
電素子保持構造を適用した剪断形加速度ピックアップを
用いて、長期間連続して、例えば地震等の微弱な加速度
を観測する場合、外気温の変動に起因して加速度ピック
アップが発するノイズの発生頻度が無視できないという
問題があった。
【０００４】即ち、図５に示すように、ボルト１０３で
質量体１０２、圧電素子１００及び支持体１０１を締結
した場合には、支持体１０１又は質量体１０２が変形
し、この変形の結果、圧電素子１００の貫通孔１００ａ
の開口縁部周辺に応力が集中的に作用する。圧電素子１
００の貫通孔１００ａの開口縁部周辺に応力が集中的に
作用すると、この部分は局部的に破壊され、微細なクラ
ックが生じる。このようなクラックが生じた場合に、外
気温が変化すると、クラックの状態が変化し、この変化
に伴いノイズが発生することになる。
【０００５】また、ボルト１０３で質量体１０２、圧電
素子１００及び支持体１０１を締結すると、圧電素子１
００の一方の側面は質量体１０２と全面で密接し、圧電
素子１００の他方の側面は支持体１０１と全面で密接す
ることになる。このような状態において、外気温が変化
すると、質量体１０２の線膨張係数は圧電素子１００の
線膨張係数より１０倍程度大きいので、圧電素子１００
には、質量体１０２により伸長させる力が作用する。伸
長させる力が質量体１０２と圧電素子１００と間の摩擦
力より大きいときには、圧電素子１００は自身の破壊限
度を超えて伸び、一部にクラックが生じる。同様に、支
持体１０１との関係でも圧電素子１００にクラックが生
じる。圧電素子１００の一部に、一旦、クラックが生じ
ると、クラックの状態は温度によって変化するので、温
度が変われば、ノイズが発生することになる。
【０００６】本発明は、従来の技術が有するこのような
問題点に鑑みてなされたものであり、その目的とすると
ころは、ボルトの締め付けによる圧電素子への応力集中
や外気温の変動などにより、圧電素子に発生するクラッ
クを起因とするノイズの発生頻度を低減できる圧電素子
保持構造を提供しようとするものである。
【０００７】
【課題を解決するための手段】上記課題を解決すべく請
求項１に係る発明は、圧電素子を第１保持部材と第２保
持部材で挟み、これらの貫通孔にボルトを挿通して固定
する圧電素子保持構造において、前記圧電素子が対向す
る前記第１保持部材と第２保持部材の貫通孔の開口縁部
に、変形逃げ部を設けたものである。
【０００８】
【０００９】
【発明の実施の形態】以下に本発明の実施の形態を添付
図面に基づいて説明する。ここで、図１は第１の実施の
形態に係る圧電素子保持構造を適用した剪断形加速度セ
ンサの断面図、図２は剪断形圧電素子の斜視図、図３は
第２の実施の形態に係る圧電素子保持構造を適用した剪
断形加速度センサの断面図、図４は第１の実施の形態に
係る圧電素子保持構造を適用した圧縮形加速度センサの
断面図である。
【００１０】第１の実施の形態に係る圧電素子保持構造
を適用した剪断形加速度センサは、図１に示すように、
支持体１、絶縁チューブ２、一対の圧電素子３，３、一
対の質量体４，４、ボルト５、ナット６及び出力端子７
からなる。
【００１１】圧電素子３，３は、それぞれ支持体１の側
面に配置され、圧電素子３，３の外側側面には、質量体
４，４が配置されている。ボルト５は、支持体１、圧電
素子３，３、質量体４，４を貫通している。このボルト
５の端部にナット６螺着して締め付けることにより、圧
電素子３，３と質量体４，４が支持体１に固定される。
【００１２】支持体１は、金属部材でなり、断面Ｔ字状
の形状を備える。直立部分には、絶縁チューブ２及びボ
ルト５を挿通するための貫通孔１ａが形成されている。
更に、貫通孔１ａの両開口縁部には、外気温の変動によ
って支持体１が膨張し支持体１の開口縁部が圧電素子３
の貫通孔３ａの開口縁部を圧迫しないようにするため、
所定の内径と所定の深さの変形逃げ部１ｂ，１ｂが形成
されている。
【００１３】絶縁チューブ２は、ボルト５と質量体４，
４との絶縁を保つためのもので、テフロン等の高分子部
材からなる。圧電素子３は、図２に示すように、四角板
状の形状を有した剪断形圧電素子である。圧電素子３の
中央には、貫通孔３ａが形成され、厚み方向の両面に
は、電極３ｂ，３ｃを備える。ここで、矢印ａは分極方
向を示す。
【００１４】質量体４，４は、図１に示すように、金属
部材でなり、略円柱形状を有し、中央にボルト５を挿通
するための貫通孔４ａが形成されている。また、質量体
４，４が圧電素子３，３と当接する貫通孔４ａの開口縁
部には、外気温の変動によって質量体４，４が膨張し質
量体４，４の開口縁部が圧電素子３の貫通孔３ａの開口
縁部を圧迫しないようにするため、所定の内径と所定の
深さの変形逃げ部４ｂ，４ｂが形成されている。
【００１５】以上のように構成した第１の実施の形態に
係る圧電素子保持構造の作用について説明する。第１の
実施の形態に係る圧電素子保持構造は、支持体１に変形
逃げ部１ｂ，１ｂを設けると共に、質量体４，４にも変
形逃げ部４ｂ，４ｂを設けているので、ボルト５を締め
付けることにより支持体１及び質量体４，４の開口縁部
周辺が変形しても、圧電素子３，３の貫通孔３ａの開口
縁部近傍を局部的に圧迫することはない。
【００１６】従って、支持体１及び質量体４，４の変形
によって圧電素子３，３の貫通孔３ａの開口縁部周辺に
応力が集中的に作用するこのがないので、圧電素子３，
３の開口縁部周辺におけるクラックの発生を未然に防止
できる。従って、加速度センサのノイズ発生頻度を抑制
できる。
【００１７】第２の実施の形態に係る圧電素子保持構造
を適用した加速度センサは、図３に示すように、支持体
１１、絶縁チューブ２、４枚のスペーサ１２、一対の圧
電素子３，３、一対の質量体１４，１４、ボルト５、ナ
ット６及び出力端子７からなる。
【００１８】圧電素子３，３の外側側面には、質量体１
４，１４が配置されている。ボルト５は、支持体１１、
圧電素子３，３、質量体１４，１４を貫通している。こ
のボルト５の端部にナット６を螺着して締め付けること
により、圧電素子３，３と質量体１４，１４が支持体１
１に固定される。
【００１９】支持体１１は、金属部材でなり、断面Ｔ字
状の形状を備える。直立部分には、絶縁チューブ２及び
ボルト５を挿通するための貫通孔１１ａを備える。スペ
ーサ１２は、圧電素子３，３よりも小さい外形で、中央
に貫通孔を形成した円盤状の金属薄板、例えば燐青銅薄
板である。
【００２０】スペーサ１２は、支持体１１と圧電素子
３，３の間、圧電素子３，３と質量体１４，１４の間に
配置してある。質量体１４，１４は、金属部材でなり、
略円柱形状を有し、中央にボルト５を挿通するための貫
通孔１４ｂを有している。
【００２１】以上のように構成した第２の実施の形態に
係る圧電素子保持構造の作用について説明する。第２の
実施の形態に係る圧電素子保持構造を適用した加速度セ
ンサの場合には、圧電素子３，３の各両側面にスペーサ
１２を配置しているので、圧電素子３，３の両側面とも
スペーサ１２と密接することになる。
【００２２】圧電素子３，３がスペーサ１２と密接する
ことにより、スペーサ１２を設けないで直接支持体１１
及び質量体１４，１４と接触させて保持する場合と比較
して、圧電素子３，３の接触面積が小さくなり、外気温
が変化した場合においても、圧電素子３，３を伸長させ
る力の絶対値が減少する。従って、圧電素子３，３のク
ラック発生を未然に防止でき、加速度センサのノイズ発
生頻度を抑制できる。
【００２３】なお、上述の実施の形態においては、剪断
形圧電素子３，３を使用した剪断形加速度センサに適用
した場合について説明したが、本発明に係る圧電素子保
持構造はこれに限らず、その他の圧電素子に適用でき
る。
【００２４】例えば、図４に示すように、圧縮形圧電素
子を用いた圧縮形加速度センサの構成としてもよい。こ
こで、２１は支持体で、その中央にねじ穴２１ａを有し
ている。ねじ穴２１ａの開口縁部には変形逃げ部２１ｂ
を形成している。
【００２５】一対の圧縮形圧電素子２２，２２は、互い
に分極方向が相反する方向を向くように配置している。
また、これら２枚の圧縮形圧電素子２２，２２の間に
は、共通電極板２３を設けている。
【００２６】質量体２４は、支持体２１と共に、２枚の
圧縮形圧電素子２２，２２を挟むように配置している。
ボルト２５は、質量体２４に形成した貫通孔２４ａ、一
対の圧縮形圧電素子２２，２２及び共通電極板２３を貫
通して、支持体２１のねじ穴２１ａに螺合している。な
お、２６は絶縁チューブである。図４に示す圧電素子保
持構造も、図１に示す剪断形加速度センサと同様の作用
効果を奏する。
【００２７】また、上述の実施の形態において、第１の
実施の形態に係る圧電素子保持構造の変形逃げ部１ｂ，
４ｂの形状として、ザグリ形状としたが、ボルト５の締
め付け力、質量体４，４の寸法、形状に応じてその他の
形状であってもよい。例えば、円錐状にえぐってもよい
し、また、２段になるようにアナ繰りしてもよい。
【００２８】更に、上述の第１及び第２の実施の形態に
おいては、圧電素子保持構造を、加速度センサに適用し
た場合について説明した。しかし、本発明に係る圧電素
子保持構造はこれに限らず、圧電素子を２つの保持部材
で挟み、これらにボルトを貫通して固定する構造であれ
ば、その他の圧電素子を備える装置、例えば、インパル
スハンマーに使用する力センサにも適用できる。
【００２９】
【発明の効果】以上説明したように請求項１に係る圧電
素子保持構造によれば、第１保持部材及び第２保持部材
に変形逃げ部を設けたことにより、ボルト締め付けに伴
う第１保持部材及び第２保持部材の変形による圧電素子
への応力集中が回避され、圧電素子の開口縁部周辺にお
けるクラックの発生を防止できるので、加速度センサな
どに適用した場合のノイズの発生頻度を抑制できる。
【００３０】Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for holding a piezoelectric element applied to an acceleration sensor or the like. 2. Description of the Related Art Conventionally, as a piezoelectric element holding structure of this type, as shown in FIG. 5, a shearing type piezoelectric element 100 is arranged so as to be sandwiched between a support body 101 and a mass body 102, and each of the piezoelectric elements is penetrated. It is known that a bolt 103 is inserted through the holes 100a, 101a, and 102a, fastened to an end of the bolt 103 with a nut, and the shear-type piezoelectric element 100 is held by the support body 101 and the mass body 102 (for example, 61-165
No. 28). [0003] However, when observing a weak acceleration such as an earthquake continuously for a long period of time using a shearing type acceleration pickup to which such a piezoelectric element holding structure is applied, There has been a problem that the frequency of occurrence of noise generated by the acceleration pickup due to fluctuations in outside temperature cannot be ignored. That is, as shown in FIG. 5, when the mass body 102, the piezoelectric element 100, and the support body 101 are fastened with the bolt 103, the support body 101 or the mass body 102 is deformed. Through hole 100a of element 100
Stress acts intensively around the edge of the opening. Piezoelectric element 1
When stress concentrates on the periphery of the opening edge of the through-hole 100a, this portion is locally broken and a fine crack occurs. If the outside air temperature changes when such a crack occurs, the state of the crack changes, and noise is generated in accordance with the change. When the mass body 102, the piezoelectric element 100, and the support 101 are fastened with bolts 103, the piezoelectric element 1
One side surface of the piezoelectric element 100 is in close contact with the mass body 102 over the entire surface, and the other side surface of the piezoelectric element 100 is in close contact with the support body 101 over the entire surface. In such a state, when the outside air temperature changes, the linear expansion coefficient of the mass body 102 is about ten times larger than the linear expansion coefficient of the piezoelectric element 100.
Is exerted by the mass body 102. When the stretching force is larger than the frictional force between the mass body 102 and the piezoelectric element 100, the piezoelectric element 100 extends beyond its own breaking limit, and cracks occur partially. Similarly, cracks occur in the piezoelectric element 100 also in relation to the support 101. Once a crack occurs in a part of the piezoelectric element 100, the state of the crack changes depending on the temperature, so that if the temperature changes, noise will occur. SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to prevent stress concentration on a piezoelectric element due to tightening of bolts and fluctuations in the outside temperature. It is another object of the present invention to provide a piezoelectric element holding structure that can reduce the frequency of occurrence of noise caused by cracks generated in a piezoelectric element. [0007] In order to solve the above-mentioned problems, the invention according to claim 1 is to sandwich a piezoelectric element between a first holding member and a second holding member, and insert a bolt into these through holes. In the piezoelectric element holding structure, the deformation relief portion is provided at an opening edge of a through hole of the first holding member and the second holding member facing the piezoelectric element. [0010] Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 shows the first embodiment.
FIG. 2 is a cross-sectional view of a shearing type acceleration sensor to which the piezoelectric element holding structure according to the embodiment is applied, FIG. 2 is a perspective view of the shearing type piezoelectric element, and FIG.
FIG. 4 is a cross-sectional view of a shear-type acceleration sensor to which the piezoelectric element holding structure according to the second embodiment is applied, and FIG. 4 is a cross-sectional view of a compression-type acceleration sensor to which the piezoelectric element holding structure according to the first embodiment is applied. . A shearing type acceleration sensor to which the piezoelectric element holding structure according to the first embodiment is applied, as shown in FIG.
Support 1, insulating tube 2, pair of piezoelectric elements 3, 3, pair of masses 4, 4, bolt 5, nut 6, and output terminal 7
Consists of The piezoelectric elements 3 and 3 are respectively disposed on the side surfaces of the support 1, and the mass bodies 4 and 4 are disposed on the outer side surfaces of the piezoelectric elements 3 and 3. The bolt 5 penetrates through the support 1, the piezoelectric elements 3, 3, and the masses 4, 4. The nuts 6 are screwed onto the ends of the bolts 5 and tightened, whereby the piezoelectric elements 3 and 3 and the mass bodies 4 and 4 are fixed to the support 1. The support 1 is made of a metal member and has a T-shaped cross section. In the upright portion, a through hole 1a for inserting the insulating tube 2 and the bolt 5 is formed.
Further, the support 1 expands due to the fluctuation of the outside air temperature at both opening edges of the through hole 1a, and the opening edge of the support 1
In order not to squeeze the opening edge of the through hole 3a,
Deformation relief portions 1b, 1b having a predetermined inner diameter and a predetermined depth are formed. The insulating tube 2 comprises a bolt 5 and a mass body 4,
4 for maintaining insulation from the substrate 4 and made of a polymer material such as Teflon. As shown in FIG. 2, the piezoelectric element 3 is a shear-type piezoelectric element having a square plate shape. A through hole 3a is formed in the center of the piezoelectric element 3, and electrodes 3b and 3c are provided on both sides in the thickness direction. Here, the arrow a indicates the polarization direction. As shown in FIG. 1, the mass members 4 and 4 are made of a metal member, have a substantially cylindrical shape, and have a through hole 4a for inserting a bolt 5 at the center. Also, at the opening edge of the through hole 4a where the masses 4 and 4 abut on the piezoelectric elements 3 and 3, the masses 4 and 4 expand due to the fluctuation of the outside air temperature, and the opening edges of the masses 4 and 4 In order to prevent the opening edge of the through hole 3a of the element 3 from being pressed, deformation relief portions 4b, 4b having a predetermined inner diameter and a predetermined depth are formed. The operation of the piezoelectric element holding structure according to the first embodiment configured as described above will be described. First
In the piezoelectric element holding structure according to the embodiment , the deformation relief portions 1b, 1b are provided on the support 1, and the deformation relief portions 4b, 4b are also provided on the mass bodies 4, 4, so that the bolt 5 is tightened. Even when the periphery of the opening of the support 1 and the masses 4 and 4 is deformed, the vicinity of the opening of the through hole 3a of the piezoelectric elements 3 and 3 is not locally compressed. Therefore, stress is not concentrated on the periphery of the opening of the through hole 3a of the piezoelectric elements 3 and 3 due to deformation of the support 1 and the masses 4 and 4.
The generation of cracks around the edge of the opening 3 can be prevented. Therefore, the frequency of occurrence of noise of the acceleration sensor can be suppressed. As shown in FIG. 3, the acceleration sensor to which the piezoelectric element holding structure according to the second embodiment is applied has a support 11, an insulating tube 2, four spacers 12, a pair of piezoelectric elements 3, 3, and , A pair of mass bodies 14, 14, a bolt 5, a nut 6, and an output terminal 7. On the outer side surfaces of the piezoelectric elements 3, 3, a mass body 1 is provided.
4, 14 are arranged. The bolt 5 is attached to the support 11,
The piezoelectric elements 3, 3 penetrate the mass bodies 14, 14. The nuts 6 are screwed onto the ends of the bolts 5 and tightened, so that the piezoelectric elements 3 and 3 and the mass bodies 14 and 14
Fixed to 1. The support 11 is made of a metal member and has a T-shaped cross section. The upright portion is provided with a through hole 11a for inserting the insulating tube 2 and the bolt 5. The spacer 12 is a disk-shaped thin metal plate having a smaller outer diameter than the piezoelectric elements 3 and 3 and a through hole formed in the center, for example, a thin phosphor bronze plate. The spacers 12 are arranged between the support 11 and the piezoelectric elements 3 and between the piezoelectric elements 3 and the masses 14. The mass bodies 14, 14 are made of a metal member,
It has a substantially columnar shape, and has a through hole 14b for inserting the bolt 5 in the center. The operation of the piezoelectric element holding structure according to the second embodiment configured as described above will be described. Second
In the case of the acceleration sensor to which the piezoelectric element holding structure according to the embodiment is applied, the spacers 12 are arranged on both side surfaces of the piezoelectric elements 3 and 3, so that both side surfaces of the piezoelectric elements 3 and 3 I will be close. Since the piezoelectric elements 3 and 3 are in close contact with the spacer 12, the support 11 is directly provided without the spacer 12.
And the contact area of the piezoelectric elements 3, 3 is smaller than that in the case where the piezoelectric elements 3, 3 are held in contact with the mass bodies 14, 14, and even when the outside air temperature changes, the absolute force of extending the piezoelectric elements 3, 3 is increased. The value decreases. Therefore, the occurrence of cracks in the piezoelectric elements 3 can be prevented beforehand, and the frequency of occurrence of noise in the acceleration sensor can be suppressed. In the above embodiment, the case where the present invention is applied to the shear type acceleration sensor using the shear type piezoelectric elements 3 and 3 has been described. However, the piezoelectric element holding structure according to the present invention is not limited to this. It can be applied to other piezoelectric elements. For example, as shown in FIG. 4, a compression type acceleration sensor using a compression type piezoelectric element may be used. Here, reference numeral 21 denotes a support having a screw hole 21a at the center thereof. A deformation relief portion 21b is provided at the opening edge of the screw hole 21a.
Is formed. The pair of compression-type piezoelectric elements 22, 22 are arranged so that the polarization directions thereof are opposite to each other.
Further, a common electrode plate 23 is provided between the two compression type piezoelectric elements 22 and 22. The mass body 24 and the support body 21 are arranged so as to sandwich the two compression-type piezoelectric elements 22 and 22 therebetween.
The bolt 25 passes through a through hole 24 a formed in the mass body 24, the pair of compression piezoelectric elements 22, 22 and the common electrode plate 23 and is screwed into the screw hole 21 a of the support 21. 26 is an insulating tube. The piezoelectric element holding structure shown in FIG. 4 also has the same function and effect as the shearing type acceleration sensor shown in FIG. In the above-described embodiment, the first
The deformation relief portion 1b of the piezoelectric element holding structure according to the embodiment ,
Although the shape of the counterbore 4b is a counterbore shape, other shapes may be used according to the tightening force of the bolt 5 and the dimensions and shapes of the mass bodies 4 and 4. For example, it may be hollowed out in a conical shape, or may be rounded in two steps. Further, in the first and second embodiments described above, the case where the piezoelectric element holding structure is applied to an acceleration sensor has been described. However, the piezoelectric element holding structure according to the present invention is not limited to this. If the structure holds the piezoelectric element between two holding members and penetrates and fixes them, a device provided with another piezoelectric element, for example, It can also be applied to a force sensor used for an impulse hammer. As described above, according to the piezoelectric element holding structure according to the first aspect, the first holding member and the second holding member are provided with the deformation relief portions, so that the first holding member and the second holding member have the first and second holding members. Since stress concentration on the piezoelectric element due to deformation of the first holding member and the second holding member can be avoided, and the occurrence of cracks around the opening edge of the piezoelectric element can be prevented, the frequency of occurrence of noise when applied to an acceleration sensor or the like can be reduced. Can be suppressed. [0030]
【図面の簡単な説明】
【図１】第１の実施の形態に係る圧電素子保持構造を適
用した剪断形加速度センサの断面図
【図２】剪断形圧電素子の斜視図
【図３】第２の実施の形態に係る圧電素子保持構造を適
用した剪断形加速度センサの断面図
【図４】第１の実施の形態に係る圧電素子保持構造を適
用した圧縮形加速度センサの断面図
【図５】従来の圧電素子保持構造の要部断面図
【符号の説明】
１，１１，２１…支持体（第１保持部材）、１ａ，３
ａ，４ａ，１１ａ，１４ａ，２４ａ…貫通孔、１ｂ，４
ｂ，２１ｂ…変形逃げ部、２，２６…絶縁チューブ、３
…剪断形圧電素子、３ｂ，３ｃ…電極、４，１４，２４
…質量体（第２保持部材）、５，２５…ボルト、６…ナ
ット、７…出力端子、１２…スペーサ、２２…圧縮形圧
電素子、２３…電極板。Perspective view of BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of a shear-type acceleration sensor according to the piezoelectric element holding structure according to the first embodiment [FIG. 2] Shear shaped piezoelectric element 3] second FIG. 4 is a cross-sectional view of a shear type acceleration sensor to which the piezoelectric element holding structure according to the first embodiment is applied. FIG. 4 is a cross-sectional view of a compression type acceleration sensor to which the piezoelectric element holding structure according to the first embodiment is applied. Cross-sectional view of main parts of conventional piezoelectric element holding structure [Description of References] 1,11,21 ... Support (first holding member), 1a, 3
a, 4a, 11a, 14a, 24a ... through-hole, 1b, 4
b, 21b: deformation escape portion, 2, 26: insulating tube, 3
... Shear type piezoelectric element, 3b, 3c ... Electrodes, 4, 14, 24
... Mass (second holding member), 5, 25 bolt, 6 nut, 7 output terminal, 12 spacer, 22 compression piezoelectric element, 23 electrode plate.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01P 15/09 G01D 5/12 G01L 1/16 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01P 15/09 G01D 5/12 G01L 1/16
Claims (1)
で挟み、これらの貫通孔にボルトを挿通して固定する圧
電素子保持構造において、前記圧電素子が対向する前記
第１保持部材と第２保持部材の貫通孔の開口縁部に、変
形逃げ部を設けたことを特徴する圧電素子保持構造。(1) A piezoelectric element holding structure in which a piezoelectric element is sandwiched between a first holding member and a second holding member, and bolts are inserted through these through holes and fixed. A deformation relief portion is provided at an opening edge of a through hole of the first holding member and the second holding member facing each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08008698A JP3372024B2 (en) | 1998-03-27 | 1998-03-27 | Piezoelectric element holding structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08008698A JP3372024B2 (en) | 1998-03-27 | 1998-03-27 | Piezoelectric element holding structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11281664A JPH11281664A (en) | 1999-10-15 |
| JP3372024B2 true JP3372024B2 (en) | 2003-01-27 |
Family
ID=13708403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08008698A Expired - Fee Related JP3372024B2 (en) | 1998-03-27 | 1998-03-27 | Piezoelectric element holding structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3372024B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039557A (en) * | 2010-08-02 | 2011-05-04 | 大连理工大学 | On-machine calibration method for grinding dynamometer and horizontal force loader |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100912400B1 (en) | 2007-12-13 | 2009-08-14 | 한국표준과학연구원 | Multi-Purpose Accelerometer |
| JP5866907B2 (en) * | 2011-09-16 | 2016-02-24 | セイコーエプソン株式会社 | Force sensor, force detection device, robot hand, robot, and method of manufacturing force sensor |
| CN107101753B (en) * | 2017-06-29 | 2023-08-11 | 四川西交路安科技有限公司 | Quartz sensor for horizontal force detection and horizontal force detection device |
| CN107621332B (en) * | 2017-07-28 | 2019-07-12 | 大连理工大学 | A kind of scaling method of more fulcrum piezoelectric force instrument |
-
1998
- 1998-03-27 JP JP08008698A patent/JP3372024B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039557A (en) * | 2010-08-02 | 2011-05-04 | 大连理工大学 | On-machine calibration method for grinding dynamometer and horizontal force loader |
| CN102039557B (en) * | 2010-08-02 | 2012-11-07 | 大连理工大学 | On-machine calibration method for grinding dynamometer and horizontal force loader |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11281664A (en) | 1999-10-15 |
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