JP3368630B2 - Two-liquid type ultrasonic cleaning equipment - Google Patents
Two-liquid type ultrasonic cleaning equipmentInfo
- Publication number
- JP3368630B2 JP3368630B2 JP24374093A JP24374093A JP3368630B2 JP 3368630 B2 JP3368630 B2 JP 3368630B2 JP 24374093 A JP24374093 A JP 24374093A JP 24374093 A JP24374093 A JP 24374093A JP 3368630 B2 JP3368630 B2 JP 3368630B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- tank
- work
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、例えば、電気部品、
電子部品、プレス部品等のワークを洗浄処理するために
用いられる二液層式の超音波洗浄装置に関する。BACKGROUND OF THE INVENTION The present invention relates to, for example, electric parts,
The present invention relates to a two-liquid layer type ultrasonic cleaning device used for cleaning a work such as an electronic component or a press component.
【０００２】[0002]
【従来の技術】従来、上述例のようなワークを洗浄する
方法としては、例えば、超音波洗浄槽に貯液された不活
性溶剤（商品名フロリナート）を主成分とする洗浄液中
にワーク全体を浸漬して、超音波振動子による洗浄液の
キャビテーションによりワーク表面に付着した油分や切
粉等の異物を洗浄除去する方法がある。2. Description of the Related Art Conventionally, as a method for cleaning a work as in the above example, for example, the entire work is immersed in a cleaning liquid containing an inert solvent (trade name: Fluorinert) stored in an ultrasonic cleaning tank as a main component. There is a method of immersing and cleaning and removing foreign matters such as oil and chips adhering to the surface of the work by cavitation of the cleaning liquid by the ultrasonic vibrator.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上述のように
不活性溶剤（商品名フロリナート）を主成分とする洗浄
液でワークを超音波洗浄する場合、炭化水素系溶剤を主
成分とする洗浄液に比べてワークに付着した油分を剥離
除去する洗浄能力が低く、高度な洗浄処理が行えないと
いう問題点を有している。However, when ultrasonically cleaning a work with a cleaning liquid containing an inert solvent (trade name: Fluorinert) as a main component as described above, compared with a cleaning liquid containing a hydrocarbon solvent as a main component. Therefore, there is a problem that the cleaning ability to remove and remove the oil adhering to the work is low, and the advanced cleaning process cannot be performed.
【０００４】また、炭化水素系溶剤（商品名ナフテゾー
ル）を主成分とする洗浄液でワークを超音波洗浄するこ
とで、上記問題点を解決できるが、洗浄作業終了後、超
音波が停止している場合等の脱気させる要素が無くなっ
た場合、洗浄液中に空気が溶解し、超音波振動の伝搬性
が悪くなるため、炭化水素系溶剤による洗浄効果が期待
できない。且つ、不活性溶剤よりも炭化水素系溶剤の方
が表面張力が大きく、浸透性が悪いため、ワークの隙間
や盲孔等に付着した異物を洗浄除去することが困難であ
り、さらに、引火要因となる大気との接触を防止するた
めの遮断手段を講じなければならず、取扱いに注意が必
要である。The above problem can be solved by ultrasonically cleaning the work with a cleaning liquid containing a hydrocarbon solvent (trade name: Naphthesol) as a main component, but the ultrasonic wave is stopped after the cleaning work is completed. When the degassing element disappears in some cases, air dissolves in the cleaning liquid and the propagation of ultrasonic vibrations deteriorates, so the cleaning effect of the hydrocarbon solvent cannot be expected. In addition, since hydrocarbon solvents have a higher surface tension and poorer permeability than inert solvents, it is difficult to wash and remove foreign matter adhering to work gaps, blind holes, etc. It is necessary to take measures to prevent contact with the ambient atmosphere and handle with care.
【０００５】且つ、炭化水素系溶剤と不活性溶剤とを併
用する場合、炭化水素系溶剤を貯液するための洗浄槽
と、不活性溶剤を貯液するための洗浄槽とを独立して設
けるので、装置全体の構造が複雑となり、大型化すると
いう問題点も有している。When a hydrocarbon solvent and an inert solvent are used in combination, a cleaning tank for storing the hydrocarbon solvent and a cleaning tank for storing the inert solvent are separately provided. Therefore, there is a problem in that the structure of the entire device becomes complicated and the size becomes large.
【０００６】この発明は上記問題に鑑み、一つの洗浄槽
に貯液された上下層の洗浄液でワークを超音波洗浄する
ことにより、ワークの隙間や盲孔等に付着した異物を確
実に洗浄除去することができ、高度な技術を必要とする
洗浄処理が行える二液層式の超音波洗浄装置の提供を目
的とする。In view of the above problems, the present invention reliably cleans and removes foreign matter adhering to the gaps and blind holes of the work by ultrasonically cleaning the work with the cleaning liquid of the upper and lower layers stored in one cleaning tank. It is an object of the present invention to provide a two-liquid layer type ultrasonic cleaning device capable of performing a cleaning process requiring advanced technology.
【０００７】[0007]
【課題を解決するための手段】この発明の請求項１記載
の発明は、洗浄槽内に貯液された洗浄液中にワークを浸
漬して、該ワークを超音波洗浄する洗浄装置であって、
上記洗浄槽の上部貯液領域に炭化水素系溶剤を主成分と
する比重の軽い上層洗浄液を貯液し、該洗浄槽の下部貯
液領域に上記上層洗浄液よりも表面張力が小さく該上層
洗浄液と入れ代わりに浸透及び置換される不活性溶剤を
主成分とする比重の重い下層洗浄液を貯液し、上記洗浄
槽の上部貯液領域及び下部貯液領域と対応する一側壁面
と、該洗浄槽の上部貯液領域と対応する他側壁面とを、
該洗浄槽に貯液された上層洗浄液及び下層洗浄液を清浄
濾過して循環供給する液循環路で接続した二液層式の超
音波洗浄装置であることを特徴とする。The invention according to claim 1 of the present invention is a cleaning apparatus for ultrasonically cleaning a work by immersing the work in a cleaning liquid stored in a cleaning tank.
An upper-layer cleaning liquid containing a hydrocarbon solvent as a main component and having a low specific gravity is stored in the upper storage region of the cleaning tank , and is stored in the lower storage region of the cleaning tank.
In the liquid area, the surface tension is smaller than that of the upper layer cleaning liquid
An inert solvent that permeates and replaces the cleaning solution
Store the lower-layer cleaning liquid, which is the main component and has a high specific gravity, and perform the above cleaning
One side wall surface corresponding to the upper liquid storage area and the lower liquid storage area of the tank
And the other side wall surface corresponding to the upper liquid storage area of the cleaning tank,
Cleans the upper-layer cleaning liquid and the lower-layer cleaning liquid stored in the cleaning tank
It is characterized in that it is a two-liquid layer type ultrasonic cleaning device connected by a liquid circulation path which is filtered and circulated and supplied .
【０００８】この発明の請求項２記載の発明は、上記請
求項１記載の構成と併せて、上記洗浄槽の後段に、上記
洗浄槽から引き上げられたワークを、該ワークに付着し
た上層洗浄液を分離するのに適した洗浄液に浸漬して除
去する第２の洗浄槽を設けた二液層式の超音波洗浄装置
であることを特徴とする。According to a second aspect of the present invention, in addition to the structure of the first aspect, the work pulled up from the washing tank is provided with an upper layer cleaning liquid attached to the work after the washing tank. It is characterized in that it is a two-liquid layer type ultrasonic cleaning device provided with a second cleaning tank which is immersed in a cleaning liquid suitable for separation and removed.
【０００９】[0009]
【作用】この発明は、洗浄槽の上部貯液領域に貯液した
炭化水素系溶剤を主成分とする上層洗浄液と、同槽の下
部貯液領域に貯液した不活性溶剤を主成分とする下層洗
浄液とでワークを超音波洗浄することで、不活性溶剤の
空気溶解作用により炭化水素系溶剤の脱気が促進され、
超音波振動の伝搬効率が維持される。且つ、炭化水素系
溶剤よりも不活性溶剤の方が表面張力が小さく、浸透性
に優れているため、上下層の洗浄液中にワークを移動す
ることで、ワークの隙間や盲孔等に侵入した不活性溶剤
と入れ代わりに炭化水素系溶剤が浸透し、ワーク全体を
炭化水素系溶剤により洗浄処理できる。According to the present invention, the upper layer cleaning liquid containing a hydrocarbon-based solvent as a main component is stored in the upper storage region of the cleaning tank, and the inert solvent is stored as a main component in the lower storage region of the same tank. By ultrasonically cleaning the work with the lower layer cleaning liquid, degassing of the hydrocarbon solvent is promoted by the air dissolving action of the inert solvent,
The propagation efficiency of ultrasonic vibration is maintained. Moreover, since the surface tension of the inert solvent is smaller than that of the hydrocarbon-based solvent and the penetrability is excellent, by moving the work into the cleaning liquid of the upper and lower layers, the solvent penetrates into the gaps or blind holes of the work. The hydrocarbon solvent penetrates instead of the inert solvent, and the entire work can be washed with the hydrocarbon solvent.
【００１０】且つ、洗浄槽に貯液された炭化水素系溶剤
の液面全体を不活性溶剤の蒸気により覆うことで、引火
要因となる大気との接触が遮断される。Further, by covering the entire liquid surface of the hydrocarbon-based solvent stored in the cleaning tank with the vapor of the inert solvent, the contact with the atmosphere, which causes the ignition, is blocked.
【００１１】[0011]
【発明の効果】この発明によれば、一つの洗浄槽に貯液
された上下層の洗浄液によりワークを超音波洗浄するの
で、不活性溶剤の空気溶解作用により炭化水素系溶剤の
脱気が促進され、超音波振動の伝搬効率が維持されるた
め、炭化水素系溶剤による洗浄効果を十分に発揮するこ
とができると共に、一つの洗浄槽に炭化水素系溶剤と不
活性溶剤とを貯液するので、装置全体の構造を簡素化し
て、小型化を図ることができる。且つ、洗浄槽に貯液さ
れた上下層の洗浄液を液循環路により循環供給するの
で、上下洗浄液の貯液量を常時一定に保つことができ、
液量変化が少なく、洗浄処理が安定して行えると共に、
上下洗浄液を導入及び排出したり、上下洗浄液を入れ換
えたりする必要がなく、洗浄作業が能率的に行える。 According to the present invention, since the work is ultrasonically cleaned by the upper and lower cleaning liquids stored in one cleaning tank, the degassing of the hydrocarbon solvent is promoted by the air dissolving action of the inert solvent. Since the propagation efficiency of ultrasonic vibration is maintained, the cleaning effect of the hydrocarbon solvent can be sufficiently exerted , and the hydrocarbon solvent and the inert solvent are stored in one cleaning tank. The structure of the entire device can be simplified and the size can be reduced. Moreover, the liquid is stored in the washing tank.
The cleaning liquid in the upper and lower layers is circulated and supplied by the liquid circulation path.
With this, it is possible to keep the volume of the upper and lower cleaning liquids constant at all times,
There is little change in the liquid volume, and the cleaning process can be performed stably,
Introduce and discharge the upper and lower cleaning liquids, and replace the upper and lower cleaning liquids
Cleaning work can be done efficiently without the need to remove.
【００１２】且つ、炭化水素系溶剤よりも不活性溶剤の
方が表面張力が小さく、浸透性に優れているため、不活
性溶剤中から炭化水素系溶剤中にワークを移動したと
き、ワークの隙間や盲孔等に侵入した不活性溶剤と入れ
代わりに炭化水素系溶剤が浸透する。つまり、ワークの
隙間や盲孔等に不活性溶剤を一旦浸透させて、炭化水素
系溶剤と、炭化水素系溶剤よりも表面張力の小さい不活
性溶剤とを置換するので、炭化水素系溶剤の浸透性がよ
くなり、ワーク全体を確実に洗浄処理することができ
る。[0012] and, than hydrocarbon solvents smaller surface tension is more of an inert solvent and excellent permeability when the user moves the workpiece to the hydrocarbon solvent from the inert solvent, the gap of the work The hydrocarbon solvent penetrates instead of the inert solvent that has penetrated into the blind holes. In other words, the inert solvent once permeates the gaps or blind holes of the work to replace the hydrocarbon solvent with an inert solvent having a surface tension smaller than that of the hydrocarbon solvent. The workability is improved, and the entire work can be reliably cleaned.
【００１３】且つ、一般的な洗浄装置の場合、洗浄槽に
貯液された洗浄液の蒸気によりワークを蒸気洗浄するの
で、洗浄槽の上部空間に不活性溶剤の蒸気を放出するこ
とで、洗浄槽に貯液された炭化水素系溶剤の液面全体が
不活性溶剤の蒸気により覆われ、引火要因となる大気と
の接触が完全に遮断されるため、炭化水素系溶剤が引火
するのを確実に防止することができ、取扱いが容易とな
る。In addition, in the case of a general cleaning apparatus, since the work is steam-cleaned by the steam of the cleaning liquid stored in the cleaning tank, the steam of the inert solvent is discharged into the upper space of the cleaning tank, so that the cleaning tank can be cleaned. Since the entire liquid surface of the hydrocarbon solvent stored in is covered with the vapor of the inert solvent and the contact with the atmosphere that causes the ignition is completely cut off, it is possible to ensure that the hydrocarbon solvent ignites. It can be prevented and the handling becomes easy.
【００１４】[0014]
【実施例】この発明の一実施例を以下図面に基づいて詳
述する。図面は一つの洗浄槽内に貯液された上下の洗浄
液でワークを超音波洗浄する二液層式の超音波洗浄装置
を示し、図１に於いて、二液層式の超音波洗浄装置１
は、気密状態に密閉される洗浄室２の内部に、炭化水素
系溶剤（商品名ナフテゾール）を主成分とする上層側の
洗浄液Ｎと、不活性溶剤（商品名ガルデン）を主成分と
する下層側の洗浄液ＧとでワークＷを超音波洗浄する第
１洗浄槽３と、蒸溜再生された洗浄液ＧのみでワークＷ
を浸漬洗浄又は超音波洗浄する第２洗浄槽４とを並列配
置し、第１洗浄槽３と対応する側部壁面に洗浄液Ｇを蒸
溜再生するための溶剤蒸溜槽５を連設し、第２洗浄槽４
と対応する側部壁面に凝縮液化された洗浄液Ｇを水分離
するための水分離槽６を連設している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. The drawing shows a two-liquid layer type ultrasonic cleaning device for ultrasonically cleaning a work with upper and lower cleaning liquids stored in one cleaning tank. In FIG.
Is a cleaning chamber 2 which is hermetically sealed and has an upper cleaning liquid N containing a hydrocarbon solvent (trade name Naphthesol) as a main component and an inert solvent (trade name Galden) as a main layer. The first cleaning tank 3 for ultrasonically cleaning the work W with the cleaning liquid G on the side, and the work W only with the cleaning liquid G that has been distilled and regenerated.
Is arranged in parallel with a second cleaning tank 4 for performing immersion cleaning or ultrasonic cleaning, and a solvent distilling tank 5 for distilling and regenerating the cleaning liquid G is continuously provided on the side wall surface corresponding to the first cleaning tank 3, Cleaning tank 4
A water separation tank 6 for separating the condensed and liquefied cleaning liquid G into water is continuously provided on the side wall surface corresponding to.
【００１５】上述の洗浄室２は、同室上部にワークＷを
出入れするためのワーク出入口２ａを開口し、同室下部
に配設した第１洗浄槽３及び第２洗浄槽４の上部蒸気領
域に冷却ジャケット７を配管し、同室側部に連設した水
分離槽６の上部蒸気領域に冷却コイル８を配管し、例え
ば、冷凍装置（図示省略）により適宜温度に冷却された
冷媒を冷却ジャケット７及び冷却コイル８に循環供給し
て、同室内部の上部蒸気領域に放出された洗浄液Ｇの蒸
気Ｓが凝縮液化する温度に冷却ジャケット７及び冷却コ
イル８を保温する。すなわち、冷却ジャケット７により
凝縮液化した一部の洗浄液Ｇを第１洗浄槽３及び第２洗
浄槽４に滴下供給し、冷却コイル８により凝縮液化した
一部の洗浄液Ｇを水分離槽６に滴下供給する。The above-mentioned cleaning chamber 2 has a work inlet / outlet 2a for loading and unloading the work W at the upper part of the chamber, and is located in the upper vapor region of the first cleaning tank 3 and the second cleaning tank 4 arranged at the lower part of the chamber. The cooling jacket 7 is piped, and the cooling coil 8 is piped in the upper vapor region of the water separation tank 6 which is continuously provided on the side of the same chamber. For example, the cooling jacket 7 is provided with a refrigerant cooled to an appropriate temperature by a refrigerating device (not shown). Also, the cooling jacket 7 and the cooling coil 8 are kept at a temperature at which the vapor S of the cleaning liquid G released into the upper vapor region in the same chamber is condensed and liquefied by being circulated and supplied to the cooling coil 8. That is, a part of the cleaning liquid G condensed and liquefied by the cooling jacket 7 is supplied dropwise to the first cleaning tank 3 and the second cleaning tank 4, and a part of the cleaning liquid G condensed and liquefied by the cooling coil 8 is dropped into the water separation tank 6. Supply.
【００１６】前述の第１洗浄槽３は、例えば、炭化水素
系溶剤（商品名ナフテゾール、日本石油化学株式会社
製）を主成分とする単一溶剤又は複合溶剤からなる洗浄
液Ｎと、不活性溶剤（商品名ガルデン＝パーフルオロポ
リエーテル＝ＰＦＣ、モンテカチーニ株式会社製のＳＶ
シリーズ又は住友スリーエム株式会社製のＰＦシリー
ズ）を主成分とする単一溶剤又は複合溶剤からなる洗浄
液Ｇとを比重差により上下分離して、同槽の上部貯液領
域に比重の軽い洗浄液Ｎを所定量貯液し、下部貯液領域
に比重の重い洗浄液Ｇを所定量貯液している。なお、上
述の実施例では、パーフルオロポリエーテル＝ＰＦＣ溶
剤（商品名ガルデン）を主成分とする洗浄液Ｇでワーク
Ｗを洗浄処理するが、同ＰＦＣ溶剤の代わりに、例え
ば、ハイドロフルオロカーボン＝ＨＦＣ溶剤等の不活性
溶剤を用いてもよい。The above-mentioned first cleaning tank 3 includes, for example, a cleaning liquid N composed of a single solvent or a composite solvent containing a hydrocarbon solvent (trade name: Naphthesol, manufactured by Nippon Petrochemical Co., Ltd.) as a main component, and an inert solvent. (Product name: Galden = Perfluoropolyether = PFC, SV manufactured by Montecatini Co., Ltd.
Series or PF series manufactured by Sumitomo 3M Co., Ltd.) and a cleaning solution G consisting of a single solvent or a composite solvent containing the main component as a main component are vertically separated by a difference in specific gravity, and a cleaning solution N having a low specific gravity is stored in the upper storage area of the same tank. A predetermined amount of liquid is stored, and a predetermined amount of the cleaning liquid G having a large specific gravity is stored in the lower liquid storage region. In the above embodiment, the work W is cleaned with the cleaning liquid G containing perfluoropolyether = PFC solvent (trade name: Galden) as a main component. Instead of the PFC solvent, for example, a hydrofluorocarbon = HFC solvent is used. You may use inert solvents, such as.
【００１７】且つ、同槽内部の底部壁面に洗浄液Ｎ，Ｇ
を超音波振動するための超音波振動子９を配設し、例え
ば、２７KHz 〜２００KHz の振動周波数で超音波振動子
９を振動させて下層側の洗浄液及び上層側の洗浄液に超
音波振動を誘起すると共に、同槽の上部貯液領域及び下
部貯液領域と対応する一側壁面と、同槽の上部貯液領域
と対応する他側壁面とを、循環用バルブ１０，１１と、
循環ポンプ１２と、濾過フィルタ１３とを介して液循環
路１４で連通接続し、同循環ポンプ１２の移送力によ
り、第１洗浄槽３に貯液された上層側の洗浄液Ｎ及び下
層側の洗浄液Ｇを濾過フィルタ１３で清浄濾過して循環
供給する。Further, the cleaning liquids N and G are provided on the bottom wall surface inside the tank.
An ultrasonic vibrator 9 for ultrasonically vibrating the ultrasonic wave is provided, and the ultrasonic vibrator 9 is vibrated at a vibration frequency of, for example, 27 KHz to 200 KHz to induce ultrasonic vibration in the cleaning liquid on the lower layer side and the cleaning liquid on the upper layer side. At the same time, one side wall surface corresponding to the upper liquid storage area and the lower liquid storage area of the tank and the other side wall surface corresponding to the upper liquid storage area of the tank are provided with the circulation valves 10 and 11.
The circulation pump 12 and the filtration filter 13 are connected in communication with each other through a liquid circulation path 14, and the transfer force of the circulation pump 12 causes the upper cleaning liquid N and the lower cleaning liquid N stored in the first cleaning tank 3 to be stored. G is cleanly filtered by the filter 13 and circulated and supplied.
【００１８】且つ、第１洗浄槽３に貯液された洗浄液Ｎ
の液面部分と対応する側部壁面に汚液貯溜槽１５を連設
し、同汚液貯溜槽１５の底部壁面と、下部一側に配設し
た液回収タンク１６の上部壁面とを液回収路１７で連通
接続し、超音波洗浄時に於いて、洗浄液Ｎの液面上に浮
上した油分を汚液貯溜槽１５にオーバーフローしてから
液回収タンク１６に排出する。Further, the cleaning liquid N stored in the first cleaning tank 3
The sewage storage tank 15 is continuously provided on the side wall surface corresponding to the liquid surface portion of the sewage liquid, and the bottom wall surface of the sewage storage tank 15 and the upper wall surface of the liquid recovery tank 16 disposed on the lower one side are used for liquid recovery. In the ultrasonic cleaning, the oil component floating on the liquid surface of the cleaning liquid N overflows into the waste liquid storage tank 15 and is discharged to the liquid recovery tank 16 during the ultrasonic cleaning.
【００１９】前述の第２洗浄槽４は、上述の第１洗浄槽
３に貯液された洗浄液Ｎの液面レベルよりも洗浄液Ｇの
液面レベルが高くなるように所定量貯液し、同槽内部の
底部壁面に洗浄液Ｇを超音波振動するための超音波振動
子１８を配設し、例えば、２７KHz 〜２００KHz の振動
周波数で超音波振動子１８を振動させて洗浄液Ｇに超音
波振動を誘起すると共に、同槽の下部貯液領域と対応す
る底部壁面と、同槽の上部貯液領域と対応する側部壁面
とを、循環用バルブ１９，２０と、循環ポンプ２１と、
濾過フィルタ２２とを介して液循環路２３で連通接続
し、同循環ポンプ２１の移送力により、第１洗浄槽３に
貯液された洗浄液Ｇを濾過フィルタ２２で清浄濾過して
循環供給する。The above-mentioned second cleaning tank 4 stores a predetermined amount of liquid so that the liquid surface level of the cleaning liquid G is higher than the liquid surface level of the cleaning liquid N stored in the above-mentioned first cleaning tank 3, An ultrasonic vibrator 18 for ultrasonically vibrating the cleaning liquid G is disposed on the bottom wall surface inside the tank. For example, the ultrasonic vibrator 18 is vibrated at a vibration frequency of 27 KHz to 200 KHz to apply ultrasonic vibration to the cleaning liquid G. Circulating valves 19, 20 and a circulation pump 21 that induce a bottom wall surface corresponding to the lower liquid storage area of the tank and a side wall surface corresponding to the upper liquid storage area of the tank.
The liquid circulation path 23 is connected to the filtration filter 22 for communication, and the cleaning liquid G stored in the first cleaning tank 3 is cleanly filtered by the filtration filter 22 and circulated by the transfer force of the circulation pump 21.
【００２０】且つ、上位側に配設した第２洗浄槽４と、
下位側に配設した第１洗浄槽３との近接側壁部間に、上
位側の第２洗浄槽４から下位側の第１洗浄槽３に向けて
洗浄液Ｇをオーバーフローするための流下板２４を斜設
して、第２洗浄槽４に貯液された洗浄液Ｇをオーバーフ
ローして第１洗浄槽３に供給する。A second cleaning tank 4 arranged on the upper side,
A flow-down plate 24 for overflowing the cleaning liquid G from the second cleaning tank 4 on the upper side toward the first cleaning tank 3 on the lower side is provided between the side wall portions adjacent to the first cleaning tank 3 arranged on the lower side. The cleaning liquid G stored obliquely in the second cleaning tank 4 overflows and is supplied to the first cleaning tank 3.
【００２１】前述の溶剤蒸溜槽５は、上述した第１洗浄
槽３の上部蒸気領域と対応する側部壁面と、同溶剤蒸溜
槽５の上部蒸気領域と対応する側部壁面とを蒸気供給路
２５で連通接続し、同槽内部の底部壁面に洗浄液Ｇを蒸
発気化するための液加熱管２６を配管し、例えば、加熱
装置（図示省略）により適宜温度に加熱されたオイルや
水溶液等の加熱媒体を液加熱管２６に循環供給して、同
槽内部に貯液された洗浄液Ｇが蒸発気化する温度に液加
熱管２６を加温する。すなわち、液加熱管２６により蒸
発気化された洗浄液Ｇの蒸気Ｓを蒸気供給路２５から第
１洗浄槽３及び第２洗浄槽４の上部蒸気領域に向けて放
出する。The solvent distilling tank 5 has a side wall surface corresponding to the upper steam region of the first cleaning tank 3 and a side wall surface corresponding to the upper steam region of the solvent distilling tank 5 as a steam supply path. A liquid heating pipe 26 for evaporating the cleaning liquid G is connected to the bottom wall surface inside the tank by connecting 25, and for example, heating of oil or aqueous solution heated to an appropriate temperature by a heating device (not shown). The medium is circulated and supplied to the liquid heating pipe 26, and the liquid heating pipe 26 is heated to a temperature at which the cleaning liquid G stored in the tank evaporates and vaporizes. That is, the vapor S of the cleaning liquid G vaporized and vaporized by the liquid heating pipe 26 is discharged from the vapor supply path 25 toward the upper vapor regions of the first cleaning tank 3 and the second cleaning tank 4.
【００２２】且つ、溶剤蒸溜槽５の下部貯液領域と対応
する底部壁面と、上述した液回収タンク１６の底部壁面
とを液回収路２７で連通接続し、液回収タンク１６に回
収された汚液Ｋに洗浄液Ｇが混入している場合、油分や
切粉等が含まれる汚液Ｋと洗浄液Ｇとが比重差により上
下分離され、同槽底部に自重降下した洗浄液Ｇを液回収
路２７から溶剤蒸溜槽５に回収して蒸溜再生する。且
つ、第１洗浄槽３の下部貯液領域と対応する底部壁面
と、溶剤蒸溜槽５に貯液された洗浄液Ｇの液面よりも上
部壁面とを液回収路２８で連通接続し、第１洗浄槽３に
貯液された洗浄液Ｇを液回収路２８から溶剤蒸溜槽５に
回収して蒸溜再生する。Further, the bottom wall surface corresponding to the lower liquid storage area of the solvent distillation tank 5 and the bottom wall surface of the above-mentioned liquid recovery tank 16 are connected to each other by a liquid recovery passage 27, and the dirt collected in the liquid recovery tank 16 is connected. When the cleaning liquid G is mixed in the liquid K, the cleaning liquid G and the cleaning liquid G containing oil and chips are vertically separated due to the difference in specific gravity, and the cleaning liquid G, which has its own weight dropped to the bottom of the tank, is discharged from the liquid recovery path 27. The solvent is recovered in the solvent distillation tank 5 and regenerated by distillation. In addition, the bottom wall surface corresponding to the lower liquid storage region of the first cleaning tank 3 and the upper wall surface above the liquid surface of the cleaning liquid G stored in the solvent distillation tank 5 are connected by a liquid recovery passage 28, and The cleaning liquid G stored in the cleaning tank 3 is recovered from the liquid recovery passage 28 to the solvent distillation tank 5 and distilled for regeneration.
【００２３】前述の水分離槽６は、同槽内部の下部貯液
領域を左右分割する位置に仕切り板６ａを立設して各分
離槽６ｂ，６ｃを分割形成し、分離槽６ｂの液面部分と
対応する側部壁面に排出用バルブ２９を介して液排出路
３０を連通接続すると共に、上位側に配設した水分離槽
６の分離槽６ｃと、下位側に配設した第２洗浄槽４との
近接側壁部間に、上位側の分離槽６ｃから下位側の第２
洗浄槽４に向けて水分離済みの洗浄液Ｇをオーバーフロ
ーするための流下板３１を斜設して、上述の冷却ジャケ
ット７及び冷却コイル８により凝縮液化された洗浄液Ｇ
を水分離槽６の分離槽側に滴下供給して、分離槽６ｂの
液面上に浮上した比重の軽い水分のみを液排出路３０か
ら槽外部に排出し、同槽底部に自重降下した比重の重い
洗浄液Ｇを分離槽６ｃからオーバーフローして第２洗浄
槽４に供給する。In the water separation tank 6 described above, a partition plate 6a is erected at a position where the lower liquid storage area inside the tank is divided into left and right parts to form the respective separation tanks 6b and 6c in a divided manner. The liquid discharge path 30 is connected to the side wall surface corresponding to the portion via the discharge valve 29, and the separation tank 6c of the water separation tank 6 arranged on the upper side and the second cleaning arranged on the lower side. Between the upper side separation tank 6c and the lower side second tank between the side wall portions close to the tank 4.
The washing solution G condensed and liquefied by the cooling jacket 7 and the cooling coil 8 is provided by obliquely installing the falling plate 31 for overflowing the washing solution G separated into water toward the washing tank 4.
Of water having a low specific gravity floating on the liquid surface of the separation tank 6b is discharged from the liquid discharge path 30 to the outside of the tank, and the specific gravity dropped to the bottom of the tank. Of the heavy cleaning liquid G overflows from the separation tank 6c and is supplied to the second cleaning tank 4.
【００２４】図示実施例は上記の如く構成するものとし
て、以下、二液層式の超音波洗浄装置によるワークＷの
洗浄方法を説明する。先ず、図１に示すように、溶剤蒸
溜槽５に貯液された洗浄液Ｇを液加熱管２６により蒸発
気化する温度に加熱して、第１洗浄槽３及び第２洗浄槽
４の上部蒸気領域に洗浄液Ｇの蒸気Ｓを放出する。同時
に、冷却ジャケット７及び冷却コイル８の冷却作用によ
り洗浄液Ｇの蒸気Ｓを凝縮して、第１洗浄槽３及び第２
洗浄槽４の上部蒸気領域に放出された蒸気Ｓの濃縮す
る。つまり、洗浄室２内に放出された洗浄液Ｇの蒸気Ｓ
よりも大気側の比重が軽いため、ワークＷの搬入時に於
いて、洗浄液Ｎの引火要因となる大気が洗浄室２内に侵
入するのを防止できる。且つ、第１洗浄槽３に貯液され
た洗浄液Ｎの液面が高濃度の蒸気Ｓにより覆われるの
で、洗浄液Ｎと大気との接触が完全に遮断され、洗浄液
Ｎが引火するのを確実に防止できる。Assuming that the illustrated embodiment is configured as described above, a method of cleaning the work W by the two-liquid layer type ultrasonic cleaning device will be described below. First, as shown in FIG. 1, the cleaning liquid G stored in the solvent distilling tank 5 is heated by the liquid heating pipe 26 to a temperature at which it is vaporized, and the upper vapor region of the first cleaning tank 3 and the second cleaning tank 4 is heated. Then, the vapor S of the cleaning liquid G is discharged. At the same time, the cooling action of the cooling jacket 7 and the cooling coil 8 causes the vapor S of the cleaning liquid G to condense, and the first cleaning tank 3 and the second cleaning tank 3
The vapor S discharged into the upper vapor region of the cleaning tank 4 is concentrated. That is, the vapor S of the cleaning liquid G released into the cleaning chamber 2
Since the specific gravity on the atmosphere side is lighter than that on the atmosphere side, it is possible to prevent the atmosphere, which causes the ignition of the cleaning liquid N, from entering the cleaning chamber 2 when the work W is carried in. Moreover, since the liquid surface of the cleaning liquid N stored in the first cleaning tank 3 is covered with the high-concentration vapor S, the contact between the cleaning liquid N and the atmosphere is completely cut off, and the cleaning liquid N is surely ignited. It can be prevented.
【００２５】次に、洗浄室２のワーク出入口２ａを一部
開放又は全部開放した後、同室に放出された洗浄液Ｇの
蒸気Ｓ中を通過させて未洗浄のワークＷを室内に搬入
し、第１洗浄槽３に貯液された上層側の洗浄液Ｎ中にワ
ークＷ全体を浸漬する。洗浄室２のワーク出入口２ａを
完全密閉或いは開放状態のまま超音波振動子９を振動さ
せて、第１洗浄槽３に貯液された洗浄液Ｎのキャビテー
ションによりワークＷ表面に付着した油分や切粉等の異
物を洗浄除去する。Next, after partially or completely opening the workpiece inlet / outlet 2a of the cleaning chamber 2, the unwashed workpiece W is carried into the chamber by passing through the vapor S of the cleaning liquid G discharged into the chamber. (1) The entire work W is immersed in the upper layer side cleaning liquid N stored in the cleaning tank 3. The ultrasonic oscillator 9 is vibrated while the work inlet / outlet 2a of the cleaning chamber 2 is completely sealed or opened to cavitation the cleaning liquid N stored in the first cleaning tank 3 so that oil and chips adhered to the surface of the work W Remove foreign substances such as.
【００２６】例えば、隙間の狭いワークＷ、盲孔の多い
ワークＷを洗浄する場合、第１洗浄槽３に貯液された上
層側の洗浄液Ｎ中から下層側の洗浄液Ｇ中にワークＷを
移動して、同槽に貯液された下層側の洗浄液Ｇ中にワー
クＷ全体を一旦浸漬することで、上層側の洗浄液Ｎ（商
品名ナフテゾール）よりも下層側の洗浄液Ｇ（商品名ガ
ルデン）の方が表面張力が小さく、浸透性に優れている
ため、ワークＷの隙間や盲孔等に洗浄液Ｇが即浸透す
る。この後、第１洗浄槽３に貯液された下層側の洗浄液
Ｇ中から上層側の洗浄液Ｎ中にワークＷを移動すること
で、ワークＷの隙間や盲孔等から流出する洗浄液Ｇと入
れ代わりに洗浄液Ｎが浸透する。つまり、ワークＷの隙
間や盲孔等に洗浄液Ｇを一旦浸透させて、洗浄液Ｇと、
洗浄液Ｎとが置換するため、洗浄液Ｎの浸透性がよくな
り、ワークＷの隙間や盲孔等に付着した異物を確実に洗
浄除去することができる。For example, when cleaning a work W having a narrow gap or a work W having many blind holes, the work W is moved from the cleaning liquid N on the upper layer side stored in the first cleaning tank 3 to the cleaning liquid G on the lower layer side. Then, by temporarily immersing the entire work W in the lower layer side cleaning liquid G stored in the same tank, the lower layer side cleaning liquid G (product name Galden) is more than the upper layer side cleaning liquid N (product name Naftesol). Since the surface tension is smaller and the permeability is superior, the cleaning liquid G immediately permeates into the gaps, blind holes and the like of the work W. After that, the work W is moved from the lower-layer side cleaning liquid G stored in the first cleaning tank 3 into the upper-layer side cleaning liquid N to replace the cleaning liquid G flowing out from the gap or blind hole of the work W. The cleaning liquid N permeates into. That is, the cleaning liquid G is once permeated into the gaps or blind holes of the work W, and the cleaning liquid G,
Since the cleaning liquid N is replaced, the permeability of the cleaning liquid N is improved, and the foreign substances attached to the gaps or blind holes of the workpiece W can be reliably cleaned and removed.
【００２７】同時に、循環ポンプ１２を駆動して、第１
洗浄槽３に貯液された洗浄液Ｎ及び洗浄液Ｇを濾過フィ
ルタ１３により清浄濾過して循環供給するため、洗浄液
Ｇ（商品名ガルデン）の空気溶解作用により洗浄液Ｎ
（商品名ナフテゾール）の脱気が促進され、超音波振動
子９により誘起された超音波振動の伝搬効率がよくなる
ため、洗浄液Ｎによる洗浄効果を十分に発揮することが
できる。At the same time, the circulation pump 12 is driven to
Since the cleaning liquid N and the cleaning liquid G stored in the cleaning tank 3 are cleanly filtered by the filtration filter 13 and circulated and supplied, the cleaning liquid N (trade name: Galden) is dissolved by the air to dissolve the cleaning liquid N.
The degassing of (trade name: Naphthesol) is promoted, and the propagation efficiency of the ultrasonic vibration induced by the ultrasonic vibrator 9 is improved, so that the cleaning effect of the cleaning liquid N can be sufficiently exerted.
【００２８】次に、第１洗浄槽３に貯液された洗浄液Ｎ
中からワークＷを一旦引き上げ、第２洗浄槽４に貯液さ
れた洗浄液Ｇ中にワークＷ全体を浸漬して、ワークＷの
隙間や盲孔等に残着した洗浄液Ｎを洗浄除去する。或い
は、超音波振動子１８を振動させて、第２洗浄槽４に貯
液された洗浄液ＧのキャビテーションによりワークＷに
残着した洗浄液Ｎを洗浄除去する。同時に、ワークＷか
ら分離した洗浄液Ｎを洗浄液Ｇの液面上に浮上させ、液
面上に浮上した洗浄液Ｎを第１洗浄槽３にオーバーフロ
ーして返還する。Next, the cleaning liquid N stored in the first cleaning tank 3
The work W is once pulled up from the inside, and the whole work W is immersed in the cleaning liquid G stored in the second cleaning tank 4, and the cleaning liquid N left in the gaps or blind holes of the work W is washed and removed. Alternatively, the ultrasonic oscillator 18 is vibrated to wash and remove the cleaning liquid N remaining on the work W by the cavitation of the cleaning liquid G stored in the second cleaning tank 4. At the same time, the cleaning liquid N separated from the work W is floated on the liquid surface of the cleaning liquid G, and the cleaning liquid N floating on the liquid surface overflows and is returned to the first cleaning tank 3.
【００２９】次に、二次洗浄後に於いて、第２洗浄槽４
に貯液された洗浄液Ｇ中からワークＷを一旦引き上げ、
洗浄室２に放出された洗浄液Ｇの蒸気ＳでワークＷ全体
を適宜温度に加熱して乾燥処理する。洗浄室２のワーク
出入口２ａを一部開放又は全部開放した後、洗浄処理さ
れたワークＷを室外に搬出することで、ワークＷの洗浄
処理が終了する。Next, after the secondary cleaning, the second cleaning tank 4
The work W is once pulled out from the cleaning liquid G stored in
The entire work W is heated to an appropriate temperature by the vapor S of the cleaning liquid G discharged into the cleaning chamber 2 and dried. After partially or completely opening the work entrance / exit 2a of the cleaning chamber 2, the cleaning process of the work W is completed by carrying out the cleaned work W to the outside of the room.
【００３０】以上のように、第１洗浄槽３に貯液された
洗浄液Ｎ，ＧにワークＷを浸漬して超音波洗浄するの
で、不活性溶剤を主成分とする洗浄液Ｇの空気溶解作用
により炭化水素系溶剤を主成分とする洗浄液Ｎの脱気が
促進され、超音波振動の伝搬効率が維持されるため、洗
浄液Ｎによる洗浄効果を十分に発揮することができると
共に、第１洗浄槽３に洗浄液Ｎ，Ｇを貯液するので、装
置全体の構造を簡素化して、小型化を図ることができ
る。且つ、第１洗浄槽３に貯液された上下層の洗浄液
Ｎ，Ｇを液循環路１４により循環供給するので、上下洗
浄液Ｎ，Ｇの貯液量を常時一定に保つことができ、液量
変化が少なく、洗浄処理が安定して行えると共 に、上下
洗浄液Ｎ，Ｇを導入及び排出したり、上下洗浄液Ｎ，Ｇ
を入れ換えたりする必要がなく、洗浄作業が能率的に行
える。 As described above, since the work W is immersed in the cleaning liquids N and G stored in the first cleaning tank 3 for ultrasonic cleaning, the cleaning liquid G containing an inert solvent as a main component is dissolved by the air. Since the degassing of the cleaning liquid N containing a hydrocarbon solvent as a main component is promoted and the ultrasonic vibration propagation efficiency is maintained, the cleaning liquid N can sufficiently exert its cleaning effect.
Since the cleaning liquids N and G are stored in the first cleaning tank 3 together, the structure of the entire apparatus can be simplified and the size can be reduced. In addition, the upper and lower cleaning liquids stored in the first cleaning tank 3
Since N and G are circulated and supplied by the liquid circulation path 14, washing up and down
It is possible to keep the amount of stored liquid N and G constant at all times,
Less change, co the cleaning processing can be performed stably, vertical
Introducing and discharging the cleaning liquids N and G, and the upper and lower cleaning liquids N and G
There is no need to replace the
Get
【００３１】且つ、炭化水素系溶剤を主成分とする洗浄
液Ｎよりも不活性溶剤を主成分とする洗浄液Ｇの方が表
面張力が小さく、浸透性に優れているため、洗浄液Ｇ中
から洗浄液Ｎ中にワークＷを移動したとき、ワークＷの
隙間や盲孔等に侵入した洗浄液Ｇと入れ代わりに洗浄液
Ｎが浸透し、洗浄液Ｎと洗浄液Ｇとを置換させるので、
ワークＷ全体を確実に洗浄処理することができる。Further, since the cleaning liquid G containing an inert solvent as a main component has a smaller surface tension and is superior in penetrability than the cleaning liquid N containing a hydrocarbon solvent as a main component, the cleaning liquid N is removed from the cleaning liquid G. When the work W is moved into the inside, the cleaning liquid N penetrates instead of the cleaning liquid G that has entered the gaps or blind holes of the work W, and replaces the cleaning liquid N with the cleaning liquid G.
The entire work W can be reliably cleaned.
【００３２】且つ、第１洗浄槽３に貯液された洗浄液Ｎ
（商品名ナフテゾール）の液面全体を洗浄液Ｇ（商品名
ガルデン）の蒸気Ｓにより覆うので、引火要因となる大
気との接触が完全に遮断され、洗浄液Ｎが引火するのを
確実に防止することができ、取扱いが容易となる。ま
た、ワークＷを、第２洗浄槽４の洗浄液Ｎに浸漬するの
で、ワークＷに残着する洗浄液Ｎを確実に分離除去する
ことができる。In addition, the cleaning liquid N stored in the first cleaning tank 3
Since the entire liquid surface of (product name Naphthesol) is covered with the vapor S of the cleaning liquid G (product name Galden), the contact with the atmosphere, which is an ignition factor, is completely blocked, and the cleaning liquid N is surely prevented from catching fire. And can be handled easily. Further, since the work W is immersed in the cleaning liquid N in the second cleaning tank 4, the cleaning liquid N remaining on the work W can be reliably separated and removed.
【００３３】この発明の構成と、上述の実施例との対応
において、この発明の洗浄槽は、実施例の第１洗浄槽３
に対応し、以下同様に、上層洗浄液は、洗浄液Ｎに対応
し、下層洗浄液は、洗浄液Ｇに対応するも、この発明
は、上述の実施例の構成のみに限定されるものではな
い。In the correspondence between the configuration of the present invention and the above-described embodiment, the cleaning tank of the present invention is the first cleaning tank 3 of the embodiment.
Similarly, the upper layer cleaning liquid corresponds to the cleaning liquid N, and the lower layer cleaning liquid corresponds to the cleaning liquid G, but the present invention is not limited to the configuration of the above-described embodiment.
【００３４】上述の実施例では、第１洗浄槽３に貯液さ
れた洗浄液Ｇを溶剤蒸溜槽５に回収して蒸溜再生する
が、例えば、当該出願人が既に開発済みの蒸溜塔（特願
平５−１４５５０３号）で洗浄液Ｇを蒸溜再生するもよ
く、実施例の蒸溜方法のみに限定されるものではない。In the above-mentioned embodiment, the cleaning liquid G stored in the first cleaning tank 3 is recovered in the solvent distillation tank 5 and distilled for regeneration. For example, the distillation tower already developed by the applicant (Patent application The cleaning liquid G may be regenerated by distillation using No. 5-145503), and the method is not limited to the distillation method of the embodiment.
【図１】二液層式の超音波洗浄装置によるワーク洗浄方
法を示す全体構成図。FIG. 1 is an overall configuration diagram showing a method for cleaning a work by a two-liquid layer type ultrasonic cleaning device.
Ｗ…ワーク Ｎ…洗浄液 Ｇ…洗浄液 Ｓ…蒸気 １…超音波洗浄装置 ２…洗浄室 ３…第１洗浄槽 ４…第２洗浄槽 ５…溶剤蒸溜槽 ６…水分離槽 ７…冷却ジャケット ８…冷却コイル ９…超音波振動子 W ... work N ... Cleaning liquid G ... Cleaning liquid S ... steam 1 ... Ultrasonic cleaning device 2 ... Washing room 3 ... First cleaning tank 4 ... Second cleaning tank 5 ... Solvent distillation tank 6 ... Water separation tank 7 ... Cooling jacket 8 ... Cooling coil 9 ... Ultrasonic transducer
Claims (2)
浸漬して、該ワークを超音波洗浄する洗浄装置であっ
て、 上記洗浄槽の上部貯液領域に炭化水素系溶剤を主成分と
する比重の軽い上層洗浄液を貯液し、該洗浄槽の下部貯
液領域に上記上層洗浄液よりも表面張力が小さく該上層
洗浄液と入れ代わりに浸透及び置換される不活性溶剤を
主成分とする比重の重い下層洗浄液を貯液し、 上記洗浄槽の上部貯液領域及び下部貯液領域と対応する
一側壁面と、該洗浄槽の上部貯液領域と対応する他側壁
面とを、該洗浄槽に貯液された上層洗浄液及び下層洗浄
液を清浄濾過して循環供給する液循環路で接続した 二液
層式の超音波洗浄装置。1. A cleaning device for ultrasonically cleaning a work by immersing a work in the cleaning liquid stored in the cleaning tank, wherein a hydrocarbon solvent is mainly contained in the upper storage area of the cleaning tank. Store the upper-layer cleaning liquid with a low specific gravity as a component and store it in the lower part of the cleaning tank.
In the liquid area, the surface tension is smaller than that of the upper layer cleaning liquid
An inert solvent that permeates and replaces the cleaning solution
It stores the lower-layer cleaning liquid, which is the main component and has a high specific gravity, and corresponds to the upper and lower liquid storage regions of the cleaning tank.
One side wall surface and the other side wall corresponding to the upper liquid storage area of the cleaning tank
Surface and the lower layer cleaning liquid stored in the cleaning tank.
A two-liquid layer type ultrasonic cleaning device connected by a liquid circulation path that cleanly filters and circulates the liquid .
上げられたワークを、該ワークに付着した上層洗浄液を
分離するのに適した洗浄液に浸漬して除去する第２の洗
浄槽を設けた請求項１記載の二液層式の超音波洗浄装
置。2. A second cleaning tank is provided at a subsequent stage of the cleaning tank to remove a work pulled up from the cleaning tank by immersing it in a cleaning liquid suitable for separating an upper layer cleaning liquid adhering to the work. The two-layer ultrasonic cleaning apparatus according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24374093A JP3368630B2 (en) | 1993-09-03 | 1993-09-03 | Two-liquid type ultrasonic cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24374093A JP3368630B2 (en) | 1993-09-03 | 1993-09-03 | Two-liquid type ultrasonic cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0768224A JPH0768224A (en) | 1995-03-14 |
| JP3368630B2 true JP3368630B2 (en) | 2003-01-20 |
Family
ID=17108285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24374093A Expired - Lifetime JP3368630B2 (en) | 1993-09-03 | 1993-09-03 | Two-liquid type ultrasonic cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3368630B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4601124B2 (en) * | 2000-01-28 | 2010-12-22 | 旭化成ケミカルズ株式会社 | Cleaning composition having no flash point and cleaning method |
| US7648582B2 (en) * | 2005-12-23 | 2010-01-19 | Lam Research Corporation | Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields |
| JP5268462B2 (en) * | 2008-07-15 | 2013-08-21 | 新オオツカ株式会社 | Processing object cleaning equipment |
| CN109530315A (en) * | 2018-12-25 | 2019-03-29 | 宜昌江峡船用机械有限责任公司 | Closed case automatic production line cleaning device and method |
-
1993
- 1993-09-03 JP JP24374093A patent/JP3368630B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0768224A (en) | 1995-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5417768A (en) | Method of cleaning workpiece with solvent and then with liquid carbon dioxide | |
| JP4272193B2 (en) | Parts washing and drying method and parts washing and drying apparatus | |
| JP6437949B2 (en) | Emulsion cleaning device | |
| JP3368630B2 (en) | Two-liquid type ultrasonic cleaning equipment | |
| JP4672417B2 (en) | Cleaning method | |
| JP5268463B2 (en) | Processing object cleaning equipment | |
| US5345958A (en) | Double fluid layer-type ultrasonic cleaning apparatus | |
| JP2785923B2 (en) | Work cleaning device | |
| WO2002020123A1 (en) | Method and device for filtrating sewage fluid | |
| JP5268462B2 (en) | Processing object cleaning equipment | |
| JP5197228B2 (en) | Processing object cleaning method and processing object cleaning apparatus | |
| JP3379512B2 (en) | Cleaning apparatus, cleaning method, and method of manufacturing liquid crystal device | |
| JP2002210424A (en) | Apparatus for cleaning filter | |
| JP4921229B2 (en) | Cleaning device | |
| JPH11114303A (en) | Separation of water and solvent | |
| JPH08173921A (en) | Volatilization-preventing device of cleaning solvent | |
| JPH02207801A (en) | Method and device for recovering cleaning solvent of cleaning machine | |
| JP3379019B2 (en) | Work cleaning device | |
| JP3335190B2 (en) | Immersion type cleaning equipment | |
| BE1007481A3 (en) | Process and design for the ultrasonic cleaning of items with cleaning fluids | |
| JP4213426B2 (en) | Heat transfer medium regenerator for cold shock equipment | |
| JPH06306665A (en) | Continuous cleaner | |
| JP3323242B2 (en) | Hot and cold bath cleaning equipment | |
| JP2003190891A (en) | Method and apparatus for critical vacuum cleaning/ drying | |
| JP2007203179A (en) | Filtration and distillation apparatus, filter for use therein, dry cleaning apparatus and refining method of organic solvent |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081115 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091115 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101115 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111115 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121115 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121115 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131115 Year of fee payment: 11 |