JP3356195B2 - Heater structure, thermocompression bonding method and thermocompression bonding apparatus - Google Patents
Heater structure, thermocompression bonding method and thermocompression bonding apparatusInfo
- Publication number
- JP3356195B2 JP3356195B2 JP05507395A JP5507395A JP3356195B2 JP 3356195 B2 JP3356195 B2 JP 3356195B2 JP 05507395 A JP05507395 A JP 05507395A JP 5507395 A JP5507395 A JP 5507395A JP 3356195 B2 JP3356195 B2 JP 3356195B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heating
- crimping surface
- crimping
- joining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Liquid Crystal (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は，圧着物である配線基
板上にチップとリ−ド部とが同一線上に配列されている
配線パタ−ンに，被圧着物を熱圧着するヒ−タツ−ルの
構造と熱圧着方法および熱圧着装置とに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater for thermocompression-bonding an object to be crimped to a wiring pattern in which chips and leads are arranged on the same line on a wiring board which is a crimped object. And a thermocompression bonding method and a thermocompression bonding apparatus.
【０００２】[0002]
【従来の技術】従来，図１０，図１１に示すように，フ
ェノ−ル樹脂，ガラスエポキシ樹脂等からなる硬質の絶
縁基板や，ポリイミド樹脂，ポリエステル樹脂等の柔軟
な絶縁基板上や液晶基板等の配線基板１の周囲には，ピ
ッチがミクロン単位であるＴＡＢ等のリ−ド部２ｂから
なる配線パタ−ン２が形成されている。この配線パタ−
ン２は，絶縁基板上に導電層を形成し，その形成は導電
層の所要部分以外をエッチング等で除去することにより
なされている。2. Description of the Related Art Conventionally, as shown in FIGS. 10 and 11, a rigid insulating substrate made of phenol resin, glass epoxy resin, or the like, a flexible insulating substrate made of polyimide resin, polyester resin, or the like, a liquid crystal substrate, or the like. A wiring pattern 2 composed of a lead portion 2b of TAB or the like having a pitch of a micron is formed around the wiring substrate 1. This wiring pattern
The conductive layer 2 is formed by forming a conductive layer on an insulating substrate and removing portions other than required portions of the conductive layer by etching or the like.
【０００３】そして，この配線パタ−ン２上には，半田
や異方性導電膜３等が形成されて配線基板１が構成され
ている。そして，この配線基板１上には，配線パタ−ン
２と同様にＬＳＩリ−ドやＩＣリ−ドが多数並列に形成
されているリ−ド線（被圧着物）４が接続されるが，こ
の接合方法としては，図１２，図１３に示すように，Ｍ
ｏやチタン等の高熱高抵抗部材で形成されているヒ−タ
ツ−ル６，２０にパルス状の大電流を流すことにより，
そこに発生したジュ−ル熱を利用して接合するパルスヒ
−ト接合方法がある。[0005] On the wiring pattern 2, a solder, an anisotropic conductive film 3 and the like are formed to constitute a wiring board 1. A lead wire (object to be crimped) 4 in which a large number of LSI leads and IC leads are formed in parallel with the wiring pattern 2 is connected to the wiring board 1. As a joining method, as shown in FIGS.
By passing a pulse-like large current through the heaters 6, 20 formed of high heat and high resistance members such as o and titanium,
There is a pulse heat bonding method in which bonding is performed using the generated Joule heat.
【０００４】このパルスヒ−ト接合方法は，配線基板１
の配線パタ−ン（圧着物）２と被圧着物４との接合手段
として，熱可塑性の異方性導電膜３が使用されているた
めに，接合領域をヒ−タツ−ル６で加熱した後，この異
方性導電膜３が固まるまで待機する必要がある。そのた
め，パルスヒ−ト接続方式では，ヒ−タツ−ル６常時加
熱しているのではなく，熱圧着時だけパルス状の加熱電
流を給電し，熱圧着終了後には，ヒ−タツ−ル６は冷却
されるから，この方法は最適である。[0004] This pulse heat bonding method uses the wiring board 1.
Since the thermoplastic anisotropic conductive film 3 is used as a means for joining the wiring pattern (compression-bonded material) 2 and the object 4 to be crimped, the joint area is heated by the heater 6. Thereafter, it is necessary to wait until the anisotropic conductive film 3 hardens. Therefore, in the pulse heat connection method, the heating of the heater 6 is not always performed, but a pulse-like heating current is supplied only at the time of the thermocompression bonding. This method is optimal because it is cooled.
【０００５】そして，パルスヒ−ト接合方法を用いた熱
圧着装置としては，図１０に示す装置があり，配線パタ
−ン２にリ−ド線４等を接続する場合には，可撓性を有
する一対の給電帯７にボルト８により固定されている一
対の導電板９，この導電板９にボルト１０により固定さ
れている一対の導電ブロック１１，互いに対向する導電
ブロック１１の間隙１２に挿入支持されている断面略Ｕ
字型のヒ−タツ−ル６（図１２），導電ブロック１１に
ボルト１３により固定され，スピンドル１４が固定され
ている絶縁ブロック１５とにより構成されている。As a thermocompression bonding apparatus using the pulse heat bonding method, there is an apparatus shown in FIG. 10, and when a lead wire 4 or the like is connected to the wiring pattern 2, flexibility is required. A pair of conductive plates 9 fixed to the pair of power supply bands 7 by bolts 8, a pair of conductive blocks 11 fixed to the conductive plates 9 by bolts 10, and inserted and supported in a gap 12 between the conductive blocks 11 facing each other. Section U
It is composed of a letter-shaped heater 6 (FIG. 12), an insulating block 15 fixed to the conductive block 11 by bolts 13 and a spindle 14 fixed thereto.
【０００６】ヒ−タツ−ル６は，パルス状の加熱電流を
供給する電源からの加熱電流により加熱するとともに，
熱圧着装置５のスピンドル１４を上下方向に移動させる
ことにより，接合領域は加圧，加熱され，半田あるいは
熱可塑性の異方性導電膜３等により熱圧着されている。The heater 6 is heated by a heating current from a power supply for supplying a pulsed heating current,
By moving the spindle 14 of the thermocompression bonding device 5 in the vertical direction, the bonding area is pressurized and heated, and thermocompression bonding is performed by solder or a thermoplastic anisotropic conductive film 3 or the like.
【０００７】そして，配線基板１の配線パタ−ン２と外
部基板４ａのリ−ド線（被圧着物）４等との接合領域に
圧接して熱圧着するためのヒ−タツ−ル６は，図１０，
図１２に示すように，導電ブロック１１に挟持され，固
定するために，ねじ孔１８が透設されている支持部６ｂ
と，導電ブロック１１から突出してこの支持部６ｂから
テ−パ−状に形成されているテ−パ−状部分６ｄと，こ
のテ−パ−状部分６ｄに連接されている矩形状の先端部
分を構成する加熱部６ｃとが一体的に形成されている。
なお，テ−パ状部分６ｄは，加熱部６ｃと支持部６ｂと
を連結するためのもので，加熱部６ｃと支持部６ｂとは
直接連結されてもよい。A heater 6 for press-contacting and thermocompression-bonding the joint area between the wiring pattern 2 of the wiring board 1 and the lead wire (object to be crimped) 4 of the external board 4a is provided. , FIG. 10,
As shown in FIG. 12, the support portion 6b is provided with a screw hole 18 for being sandwiched and fixed by the conductive block 11.
A tapered portion 6d projecting from the conductive block 11 and formed in a tapered shape from the support portion 6b; and a rectangular tip portion connected to the tapered portion 6d. Is integrally formed with the heating section 6c.
The tapered portion 6d is for connecting the heating section 6c and the support section 6b, and the heating section 6c and the support section 6b may be directly connected.
【０００８】そして，このヒ−タツ−ル６の加熱部６ｃ
は，接合領域の長さ方向，即ち，配線基板１に形成され
ている配線パタ−ン２に沿う方向の長さ方向に長く，且
つ，接合領域の巾方向，即ち，配線パタ−ン２に熱圧着
されるリ−ド線４のリ−ド線の長さに対応する巾を有す
る平坦に形成された圧着面を有している。そして，この
加熱部の巾方向両端から長溝１９を介在させて加熱部６
ｃに一体的に形成された一対の支持部６ｂとにより形成
されている。The heating section 6c of the heater 6
Is longer in the length direction of the bonding region, that is, in the direction along the wiring pattern 2 formed on the wiring board 1, and in the width direction of the bonding region, that is, in the wiring pattern 2. It has a flat crimping surface having a width corresponding to the length of the lead wire 4 to be thermocompression-bonded. The heating section 6 is inserted from both ends in the width direction of the heating section with a long groove 19 interposed therebetween.
c and a pair of support portions 6b formed integrally with the support member 6c.
【０００９】このような構造であるから，ヒ−タツ−ル
６の加熱部６ｃの長さ方向が一群のリ−ド線４の巾に対
応し，加熱部６ｃの巾方向がリ−ド部を構成するリ−ド
線４の長さ方向に対応し，この加熱部６ｃの下端外面が
一群のリ−ド線４を圧着するための圧着面６ａとなって
いる。With such a structure, the longitudinal direction of the heating portion 6c of the heater 6 corresponds to the width of the group of lead wires 4, and the width direction of the heating portion 6c corresponds to the lead portion. The outer surface of the lower end of the heating section 6c corresponds to the length direction of the lead wire 4 constituting the lead wire 4 as a crimping surface 6a for crimping a group of the lead wires 4.
【００１０】又，図１３に示すヒ−タツ−ル２０は，高
熱高抵抗部材により形成されており，接合領域の長さ方
向に沿って長く，且つ，接合領域の巾方向に対応する巾
を有する加熱部２０ａと，この加熱部２０ａの両端に一
体的に形成された両端部２０ｂ，２０ｃとにより略コ字
状に形成されており，加熱部２０ａの下面は平坦に形成
されて圧着面２０ｄとなっている。そして，ヒ−タツ−
ル２０の加熱部２０ａ両端からの冷えを補正するため
に，圧着面２０ｄに対向する面２０ｅは，両端部が細
く，中心部分が太く盛り上がった山形に形成されてい
る。A heater 20 shown in FIG. 13 is formed of a high heat and high resistance member, is long along the length of the joining region, and has a width corresponding to the width of the joining region. The heating section 20a and the both ends 20b and 20c integrally formed at both ends of the heating section 20a are formed in a substantially U-shape. The lower surface of the heating section 20a is formed flat and the crimping surface 20d is formed. It has become. And the hots
In order to compensate for cooling from both ends of the heating part 20a of the screw 20, a surface 20e facing the crimping surface 20d is formed in a chevron shape in which both end portions are thin and the center portion is thick and protruding.
【００１１】従って，上記ヒ−タツ−ル６と同様に，こ
のヒ−タツ−ル２０の長さ方向が一群のリ−ド部のリ−
ド線４の巾に対応し，加熱部２０ａの巾方向がリ−ド部
を構成するリ−ド線４の長さ方向に対応している。Therefore, similarly to the above-mentioned heater 6, the length direction of the heater 20 is a group of leads of the lead portion.
The width direction of the heating portion 20a corresponds to the length direction of the lead wire 4 constituting the lead portion.
【００１２】ヒ−タツ−ル２０の両端部２０ｂ，２０ｃ
に開設されているねじ穴２１に一対の導電ブロック（図
示せず）が接続され，この導電ブロックを介して電源
（図示せず）から加熱電流が給電されて，加熱部２０ａ
が加熱され，圧着面２０ｄが加熱される。Both ends 20b, 20c of the heater 20
A pair of conductive blocks (not shown) are connected to the screw holes 21 formed in the heating section 20a, and a heating current is supplied from a power source (not shown) through the conductive blocks, so that the heating section 20a
Is heated, and the crimping surface 20d is heated.
【００１３】一方，最近は，配線基板１の配線パタ−ン
（圧着物）２と外部基板４ａのリ−ド線（被圧着物）４
とを接合する手段として，熱硬化性の異方性導電膜が使
用されはじめている。この熱硬化性の異方性導電膜を使
用する場合には，ヒ−タツ−ルに電源から常時加熱電流
を給電して，このヒ−タツ−ルを常時一定の加熱温度に
保持して接合する常時加熱接合方法が採用されている。On the other hand, recently, a wiring pattern (compression-bonded object) 2 of the wiring board 1 and a lead wire (compression-bonded object) 4 of the external substrate 4a have been used.
A thermosetting anisotropic conductive film has begun to be used as a means for bonding the two. When using the thermosetting anisotropic conductive film, a heating current is always supplied to the heater from a power source, and the heating is constantly maintained at a constant heating temperature to join the heater. A constant heating joining method is adopted.
【００１４】この常時加熱接合方法に使用されるヒ−タ
ツ−ルとしては，略コ字状のヒ−タツ−ル（図示せず）
の加熱部に，多数のカ−トリッジヒ−タ（図示せず）を
埋設して，加熱部，即ち，圧着面を長く形成したカ−ト
リッジヒ−タ式のヒ−タツ−ルがある。As a heat tool used in the constant heat bonding method, a substantially U-shaped heat tool (not shown) is used.
There is a heating unit, that is, a cartridge heater type heater in which a large number of cartridge heaters (not shown) are buried in the heating unit, and the crimping surface is formed long.
【００１５】[0015]
【発明が解決しようとする問題点】このように，接合領
域に圧接されるヒ−タツ−ルには，各種の形式のものが
あるが，この内，パルスヒ−ト接合方法において使用さ
れるヒ−タツ−ル６，２０は，加熱電流がオン・オフさ
れるが，加熱電流がオフとなると，ヒ−タツ−ル６，２
０の加熱部６ｃ，２０ａの両端から順次中心方向へと冷
えていくため，これを再度加熱した場合には，加熱部６
ｃ，２０ａの両端近傍は，所定の温度まで加熱されず，
圧着面６ａ，２０ｄの温度にばらつきが発生する。そし
て，均一に加熱されている箇所は，中心部から両端近傍
を除く範囲となり，圧着面６ａ，２０ｄの有効長Ｌが実
際の圧着面６ａ，２０ｄより短くなるという問題があ
る。As described above, there are various types of heat tools which are pressed against the bonding area. Among them, there are various types of heat tools which are used in the pulse heat bonding method. -When the heating current is turned off, the heaters 6 and 20 are turned on and off.
In order to cool sequentially from both ends of the heating sections 6c and 20a toward the center, the heating sections 6c and 20a are heated again.
The vicinity of both ends of c and 20a is not heated to a predetermined temperature,
The temperature of the crimping surfaces 6a and 20d varies. The uniformly heated portion is in a range excluding the vicinity of both ends from the center portion, and there is a problem that the effective length L of the crimping surfaces 6a and 20d is shorter than the actual crimping surfaces 6a and 20d.
【００１６】実際問題として，上記ヒ−タツ−ル６，２
０の形状の場合には，圧着面６ａ，２０ｄの使用範囲
は，１００ｍｍ程度が限界であった。最近のように，Ｌ
ＥＤ等の大きさが２４０〜３６０ｍｍ程度の場合には，
ヒ−タツ−ル６，２０の圧着面６ａ，２０ｄの長さ方向
の長さもそれだけ必要であるが，あまり長い加熱部６
ｃ，２０ａを持つヒ−タツ−ルを形成しても，パルスヒ
−ト接合方法の場合には，すぐこの加熱部６ｃ，２０ａ
の両端から急速に冷えてしまい，再度加熱しても全体と
して充分に加熱されず，加熱温度のばらつきが大きくな
り，あまり有効長Ｌの長いものは使用出来ないという問
題がある。As a practical matter, the above-mentioned heaters 6, 2
In the case of the shape of 0, the use range of the crimping surfaces 6a and 20d is limited to about 100 mm. As recently, L
When the size of ED etc. is about 240-360mm,
The length in the longitudinal direction of the crimping surfaces 6a and 20d of the heat towels 6 and 20 is also necessary, but an excessively long heating portion 6 is required.
Even if a heater having c and 20a is formed, in the case of the pulse heat bonding method, the heating portions 6c and 20a
However, there is a problem that even if it is heated again, it is not sufficiently heated as a whole, the heating temperature varies widely, and a material having a long effective length L cannot be used.
【００１７】さらに，図１３に示すヒ−タツ−ル２０
は，価格的には安価であるが，加熱部２０ａの長さ方向
両端からの温度低下を補正するために，この両端が細く
形成されているので，強度上からも有効長Ｌの長いもの
は使用できなかった。その上，加熱電流は，加熱部２０
ａの長さ方向に流れるため，圧着面２０ｄに電圧が発生
し，圧着物２（図１０）および被圧着物４（図１０）が
破壊される恐れがある。さらに，圧着面２０ｄの有効長
Ｌが長くなると，それだけ発生電圧も大となるととも
に，上記のように加熱温度のばらつきも大きくなり，そ
のため，有効長Ｌをあまり長くとれない。その上，熱圧
着回数が増すにつれて圧着面２０ｄに歪みが発生し，そ
のため寿命が短いという問題がある。Further, a heater 20 shown in FIG.
Is inexpensive, but it is formed thin at both ends in order to compensate for a temperature drop from both ends in the longitudinal direction of the heating section 20a. Could not be used. In addition, the heating current is controlled by the heating unit 20.
Since the current flows in the length direction a, a voltage is generated on the crimping surface 20d, and the crimping object 2 (FIG. 10) and the crimping object 4 (FIG. 10) may be broken. Further, when the effective length L of the crimping surface 20d is increased, the generated voltage is increased accordingly, and the variation in the heating temperature is increased as described above. Therefore, the effective length L cannot be made too long. In addition, as the number of times of thermocompression bonding increases, distortion occurs on the compression surface 20d, which causes a problem that the life is short.
【００１８】一方，図１２に示すヒ−タツ−ル６は，ヒ
−タツ−ル２０とは違い，その加熱部６ｃに流れる加熱
電流は，加熱部６ｃの巾方向に流れるため，この巾は短
く，発生する電圧はほとんど無視することが出来る。
又，圧着面６ａの加熱温度は，均一であり，有効長Ｌも
上記ヒ−タツ−ル２０より長くなるが，この加熱部６ｃ
をあまり長く形成すると，上記ヒ−タツ−ル２０と同様
に，圧着面６ａに歪みが発生するため，寿命が短い。そ
の上，価格的にも高価である等の問題がある。On the other hand, the heater 6 shown in FIG. 12 differs from the heater 20 in that the heating current flowing through the heating portion 6c flows in the width direction of the heating portion 6c. It is short and the generated voltage can be almost ignored.
The heating temperature of the crimping surface 6a is uniform, and the effective length L is longer than that of the heater 20.
If the length is too long, the crimping surface 6a is distorted as in the case of the heater 20, so that the life is short. In addition, there is a problem that the price is expensive.
【００１９】又，常時加熱方法に使用されるカ−トリッ
ジヒ−タ方式のヒ−タツ−ルは，カ−トリッジヒ−タが
多数加熱部に埋設されて，ヒ−タツ−ルが常時加熱され
ているものである関係上，長い有効長Ｌのものを作成す
ることが出来る。しかしながら，この形式のものは，ヒ
−タツ−ルが接合領域に接触した瞬間に圧着面の熱が接
合領域に奪われて加熱温度が下がり，所定の接合温度が
得られないという問題がある。その上，この形式のヒ−
タツ−ルは，一般に温度精度が悪い等の問題もある。そ
こで，上記欠点を除去するために，熱硬化性の異方性導
電膜を使用し，常時加熱方法を採用している場合でも，
この常時加熱温度を接合温度より低い温度に保持し，接
合時に所定の接合温度に加熱したいとの要望が提案され
ている。In the case of a cartridge heater type heater used for a constant heating method, a large number of cartridge heaters are buried in a heating section, and the heater is constantly heated. Because of this, it is possible to create a long effective length L. However, this type has a problem in that the heat of the press-bonded surface is deprived to the bonding area at the moment when the heater comes into contact with the bonding area, and the heating temperature is lowered, so that a predetermined bonding temperature cannot be obtained. In addition, this type of
The tackle also has problems such as poor temperature accuracy. Therefore, in order to eliminate the above-mentioned drawbacks, even if a thermosetting anisotropic conductive film is used and a constant heating method is adopted,
It has been proposed that the heating temperature is always kept lower than the joining temperature, and that the heating is performed to a predetermined joining temperature during the joining.
【００２０】[0020]
【問題点を解決するための手段】この発明は，電源から
加熱電流が給電され，圧着物と被圧着物との接合領域の
長さ方向に沿って長く，且つ，この接合領域の巾方向に
対応する巾を有する平坦に形成された圧着面を有する加
熱部と，この加熱部の巾方向両端から長溝を介在させて
加熱部に一体的に形成された一対の支持部とを有するヒ
−タツ−ルの構造において，加熱部の圧着面に対向する
面の中心点から，加熱部の長手方向両端へと順次その容
積が大きく形成された温度制御用開口部を，加熱部の中
心点から両端へと対をなすように複数箇所圧着面方向へ
向けて形成して，ヒ−タツ−ルの圧着面全体の接合温度
を一定に保持するようにしたものである。SUMMARY OF THE INVENTION According to the present invention, a heating current is supplied from a power source, and the heating current is elongated along the length direction of the joining area between the crimping object and the article to be crimped, and in the width direction of the joining area. Heater having a heating portion having a flat crimping surface having a corresponding width, and a pair of support portions formed integrally with the heating portion through long grooves from both ends in the width direction of the heating portion. In the structure of the heating unit, a temperature control opening whose capacity is gradually increased from the center point of the surface facing the crimping surface of the heating part to both ends in the longitudinal direction of the heating part is formed at both ends from the center point of the heating part. In this case, a plurality of crimping surfaces are formed in the direction of the crimping surface so as to keep the bonding temperature of the entire crimping surface of the heater constant.
【００２１】又，この発明は，温度制御用開口部とし
て，圧着面に対向する面から圧着面方向へ向けて円筒状
の孔を凹設したり，又，温度制御用開口部として，圧着
面に対向する面から圧着面方向へ向けて圧着面に対向す
る面の巾方向に切られた切り溝を形成するようにしたも
のである。According to another aspect of the present invention, a cylindrical hole is formed as a temperature control opening from the surface facing the crimping surface toward the crimping surface, or the temperature control opening is formed as a temperature control opening. A groove is formed in the width direction of the surface facing the crimping surface from the surface facing the crimping surface toward the crimping surface.
【００２２】又，この発明は，電源から加熱電流が給電
され，圧着物と被圧着物との接合領域の長さ方向に沿っ
て長く，且つ，この接合領域の巾方向に対応する巾を有
する平坦に形成された圧着面を有する加熱部と，この加
熱部の長さ方向両端に一体的に形成された両端部とによ
り略コ字状に形成されたヒ−タツ−ルの構造において，
加熱部の圧着面に対向する面の中心点から，加熱部の長
手方向両端へと順次その容積が大きく形成された温度制
御用開口部を，加熱部の中心点から両端へと対をなすよ
うに複数箇所圧着面方向へ向けて形成するようにしたも
のでる。Further, according to the present invention, a heating current is supplied from a power source, and the heating current is long along a length direction of a joining area between the crimping object and the article to be crimped, and has a width corresponding to a width direction of the joining area. In the structure of a heater formed substantially in a U-shape by a heating section having a flat crimping surface and both ends integrally formed at both ends in the longitudinal direction of the heating section,
A temperature control opening, whose volume is gradually increased from the center point of the surface facing the crimping surface of the heating section to both ends in the longitudinal direction of the heating section, is paired from the center point of the heating section to both ends. At a plurality of crimping surface directions.
【００２３】又，この発明は，温度制御用開口部とし
て，圧着面に対向する面から圧着面方向へ向けて円筒状
の孔を凹設したり，又，温度制御用開口部として，圧着
面に対向する面から圧着面方向へ向けて圧着面に対向す
る面の巾方向に切られた切り溝を形成するようにしたも
のでる。Further, according to the present invention, as a temperature control opening, a cylindrical hole is recessed from the surface facing the crimping surface toward the crimping surface, or the temperature control opening is formed as a temperature control opening. A groove is formed in the width direction of the surface facing the crimping surface from the surface facing the crimping surface toward the crimping surface.
【００２４】さらに，この発明は，略コ字状に形成され
たヒ−タツ−ルの加熱部を，平坦な板状に形成するとと
もに，このヒ−タツ−ルの開口部分を，超硬部材でこの
開口部分の形状に形成された補強部で補強したものであ
る。Further, according to the present invention, the heating portion of the heater formed in a substantially U-shape is formed in a flat plate shape, and the opening of the heater is formed by a super hard member. This is reinforced with a reinforcing portion formed in the shape of the opening.
【００２５】さらに，又，この発明は，ヒ−タツ−ルの
圧着面を，弾性を有する絶縁シ−トで覆うとともに，こ
の絶縁シ−トを圧着面に対向する部分だけ順次巻き取り
可能な手段を設けるようにしたものである。Further, according to the present invention, the crimping surface of the heat shield is covered with an insulating sheet having elasticity, and the insulating sheet can be sequentially wound only in a portion facing the crimping surface. Means are provided.
【００２６】さらに，この発明は，電源から加熱電流を
ヒ−タツ−ルに供給し，このヒ−タツ−ルを保持する接
合ヘッド部の上下動により，ヒ−タツ−ルにより接合領
域を熱圧着する熱圧着方法において，ヒ−タツ−ルの圧
着面を弾性を有する絶縁シ−トで覆うとともに，ヒ−タ
ツ−ルに所定加熱電流を給電して予め所定温度に常時加
熱し，接合ヘッド部が下降してヒ−タツ−ルにより，圧
着物と被圧着物との接合領域に所定の圧力が加えられる
と同時に，このヒ−タツ−ルにパルス状の加熱電流を給
電して，このヒ−タツ−ルを接合温度に加熱して接合領
域を熱圧着し，この接合領域を熱圧着した後，ヒ−タツ
−ルを所定温度に冷却し，接合領域の熱圧着工程を所定
回数終了した後，絶縁シ−トを圧着面に対向した部分だ
け移動させて新たな絶縁シ−ト部分で圧着面を覆うよう
にしたものである。Further, according to the present invention, a heating current is supplied to a heater from a power supply, and the joining area is heated by the heater by the vertical movement of a joining head for holding the heater. In the thermocompression bonding method, the heat-pressed surface of the heater is covered with an insulating sheet having elasticity, and a predetermined heating current is supplied to the heat-heater to constantly heat the heater in advance to a predetermined temperature. The part is lowered and a predetermined pressure is applied to the joint area between the crimped object and the object to be crimped by the heater, and at the same time, a pulse-like heating current is supplied to the heater and the heating is performed. The heater is heated to the joining temperature and the joining area is thermocompressed. After the joining area is thermocompressed, the heater is cooled to a predetermined temperature and the thermocompression bonding step of the joining area is completed a predetermined number of times. After that, move the insulation sheet only to the part facing the crimping surface and Insulating sheet - it is obtained as in the root section covers the crimping surface.
【００２７】さらに，この発明は，電源から加熱電流を
ヒ−タツ−ルに供給し，このヒ−タツ−ルを保持する接
合ヘッド部の上下動により，ヒ−タツ−ルにより接合領
域を熱圧着する熱圧着装置において，ヒ−タツ−ルの圧
着面を覆う弾性を有する絶縁シ−トと，この絶縁シ−ト
を圧着面の両側近傍に配置されており，絶縁シ−トの送
りと巻き取りを行う一対のロ−ラと，ヒ−タツ−ルに所
定加熱電流を給電して予め所定温度に常時加熱するため
の電源と熱圧着時に，ヒ−タツ−ルにパルス状の加熱電
流を給電して，ヒ−タツ−ルを接合温度に加熱するため
のパルス状加熱電流の電源と，圧着面に対向する部分だ
け絶縁シ−トを巻き取るために，ロ−ラを所定数回転駆
動する駆動手段と，ヒ−タツ−ルによる接合領域の熱圧
着回数を計算して所定数に達した後に，駆動手段を駆動
するカウンタ手段とを設けた熱圧着装置である。Further, according to the present invention, a heating current is supplied to the heater from a power source, and the joining area is heated by the heater by the up and down movement of the joining head for holding the heater. In a thermocompression bonding apparatus for crimping, an insulating sheet having elasticity to cover a crimping surface of a heat sheet, and this insulating sheet is arranged near both sides of the crimping surface. A pair of rollers for winding, a power supply for supplying a predetermined heating current to the heater and always heating to a predetermined temperature in advance, and a pulse-like heating current for the heater during thermocompression bonding. Power supply for heating the heater to the junction temperature and a predetermined number of rotations of the roller to wind up the insulation sheet only at the portion facing the crimping surface. Calculate the number of thermocompression bonding of the joining area by the driving means and the heater. After reaching the constant, a thermocompression bonding apparatus provided with a counter means for driving the driving means.
【００２８】[0028]
【作用】ヒ−タツ−ル３０，３１，４０，４１の圧着面
３０ａ，３１ａ，４０ｄ，４１ｄに対向する面３０ｅ，
３１ｅ，４０ｅ，４１ｅには，温度制御用開口部３４，
３５，４４，４５が，それぞれ加熱部３０ｃ，３１ｃ，
４０ａ，４１ａの長さ方向両端に近づくほど大きく形成
されているので，長さ方向両端に近づくほど加熱電流の
通路が制限され，中心部分より抵抗値が大となり，発生
するジュ−ル熱が大きくなる。このように，加熱部３０
ｃ，３１ｃ，４０ａ，４１ａの両端近傍の温度を高くし
て，両端近傍が中心部分より温度が低下しないように構
成して，全体として平均した温度分布が得られるThe surface 30e facing the crimping surfaces 30a, 31a, 40d, 41d of the heaters 30, 31, 40, 41,
31e, 40e, and 41e have openings 34 for temperature control,
35, 44, 45 are heating units 30c, 31c, respectively.
Since it is formed so as to be closer to both ends in the longitudinal direction of 40a, 41a, the passage of the heating current is restricted as it is closer to both ends in the longitudinal direction, the resistance value is larger than the central portion, and the generated Joule heat is larger. Become. Thus, the heating unit 30
By increasing the temperature near both ends of c, 31c, 40a, and 41a so that the temperature near both ends does not drop below the center, an average temperature distribution can be obtained as a whole.
【００２９】ヒ−タツ−ル５０の加熱部５０ａに電圧が
発生することはない。又，接合領域の接合手段として，
異方性導電膜を使用した場合には，ヒ−タツ−ル５０の
圧着面５０ｃに対して，接合に際して，厳しい平坦度が
要求されるが，この圧着面５０ｃは弾性のある絶縁シ−
ト５２で覆われているので，異方性導電膜の凹凸を緩和
することも出来る。No voltage is generated in the heating section 50a of the heater 50. Also, as a joining means of the joining area,
When an anisotropic conductive film is used, strict flatness is required for bonding to the crimped surface 50c of the heater 50, but this crimped surface 50c is made of an elastic insulating sheet.
Since it is covered with the gate 52, the unevenness of the anisotropic conductive film can be reduced.
【００３０】熱圧着装置６０では，ヒ−タツ−ル５０の
圧着面５０ｃは，弾性を有する絶縁シ−ト５２で覆われ
ているので，電圧が発生することはない。ヒ−タツ−ル
５０は予め所定温度Ｔ2 に常時加熱されており，接合ヘ
ッド部が下降してヒ−タツ−ル５０により，圧着物２と
被圧着物４との接合領域に所定の圧力が加えられると同
時に，このヒ−タツ−ル５０にパルス状の加熱電流が給
電されて，このヒ−タツ−ル５０を接合温度Ｔ3 に加熱
して接合領域は熱圧着される。In the thermocompression bonding device 60, no voltage is generated because the compression surface 50c of the heat shield 50 is covered with the insulating sheet 52 having elasticity. Heat - Tatsu - le 50 advance are always heated to a predetermined temperature T 2, the bonding head is lowered heat - Tatsu - by Le 50, a predetermined pressure to the bonding region of the crimp was 2 and the pressure bonding object 4 At the same time is applied, the heat - Tatsu - Le 50 pulsed heating current is fed, the heat - Tatsu - junction region by heating the Le 50 to the bonding temperature T 3 is thermocompression.
【００３１】この接合領域を熱圧着した後，ヒ−タツ−
ル５０は所定温度Ｔ2 に冷却され，次の熱圧着工程をお
こなう。このようにして，所定回数終了した後，絶縁シ
−ト５２を圧着面５０ｃに対向した部分，即ち，巾部分
だけ移動させて新たな絶縁シ−ト５２部分で圧着面５０
ｃを覆う。After the bonding area is thermocompression-bonded,
Le 50 is cooled to a predetermined temperature T 2, performing the following thermal compression process. After the predetermined number of times, the insulating sheet 52 is moved only by the portion facing the crimping surface 50c, that is, by the width portion, and the crimping surface 50 is moved by the new insulating sheet 52.
Cover c.
【００３２】[0032]
【発明の実施例】この発明の各実施例を，図１〜図９に
基づいて詳細に説明する。図１〜図２は，この発明の実
施例を示すもので，ヒ−タツ−ル３０，３１の一部切欠
斜視図である。図３〜図４は，この発明の実施例を示す
もので，ヒ−タツ−ル４０，４１の斜視図である。図５
はこの発明のさらに他の実施例を示すもので，ヒ−タツ
−ルの斜視図，図６はこの発明のさらに他の実施例を示
す一部切欠部を含む要部斜視図，図７はこの発明による
熱圧着装置の実施例を示す要部斜視図である。図８はこ
の発明の実施例を示すもので，ヒ−タツ−ルの加熱温度
と時間との関係を示すグラフ，図９は動作状態を示すフ
ロ−である。なお，従来例と同一のものは同一名称，同
一符号を付し，その説明を省略する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to FIGS. 1 and 2 show an embodiment of the present invention, and are partially cutaway perspective views of heaters 30 and 31. FIG. 3 and 4 show an embodiment of the present invention, and are perspective views of heaters 40 and 41. FIG. FIG.
FIG. 7 shows a still further embodiment of the present invention. FIG. 6 is a perspective view of a heater, FIG. 6 is a perspective view showing a still another embodiment of the present invention, and FIG. It is a principal part perspective view which shows the Example of the thermocompression bonding apparatus by this invention. FIG. 8 shows an embodiment of the present invention, and is a graph showing the relationship between the heating temperature of the heater and time, and FIG. 9 is a flow chart showing the operation state. The same components as those of the conventional example are denoted by the same names and the same reference numerals, and description thereof is omitted.
【００３３】図１〜図２において，ヒ−タツ−ル３０，
３１は，外形形状は従来例として図１２に記載されてい
るものと同一形状で，それぞれ支持部３０ｂ，３１ｂ，
加熱部３０ｃ，３１ｃ，テ−パ−状部分３０ｄ，３１ｄ
により構成されているが，加熱部３０ｃ，３１ｃの圧着
面３０ａ，３１ａに対向する面３０ｅ，３１ｅには，そ
れぞれこの面３０ｅ，３１ｅの中心点３２，３３から，
加熱部３０ｃ，３１ｃの長さ方向両端へと順次その容積
が大きく形成された温度制御用開口部３４，３５が，加
熱部３０ｃ，３１ｃの中心点３２，３３から両端へと対
をなすように複数箇所圧着面３０ａ，３１ａ方向へ向け
て形成されている。In FIG. 1 and FIG.
31 has the same outer shape as that shown in FIG. 12 as a conventional example, and has support portions 30b, 31b, respectively.
Heating portions 30c, 31c, tapered portions 30d, 31d
The surfaces 30e, 31e of the heating units 30c, 31c facing the crimping surfaces 30a, 31a are respectively provided from the center points 32, 33 of the surfaces 30e, 31e.
The temperature control openings 34, 35 whose volumes are sequentially increased toward both ends in the longitudinal direction of the heating units 30c, 31c form a pair from the center points 32, 33 of the heating units 30c, 31c to both ends. A plurality of crimping surfaces 30a and 31a are formed in the direction of the crimping surfaces.
【００３４】図１に示す実施例の場合には，温度制御用
開口部３４としては，圧着面３０ａに対向する面３０ｅ
から圧着面３０ａ方向へ向けて円筒状の孔３４ａが凹設
されている。In the embodiment shown in FIG. 1, the temperature control opening 34 has a surface 30e facing the crimping surface 30a.
, A cylindrical hole 34a is formed in the direction toward the crimping surface 30a.
【００３５】一方，図２に示す実施例の場合には，温度
制御用開口部３５としては，圧着面３１ａに対向する面
３１ｅから圧着面３１ａ方向に向けてワイヤカッタ−等
で巾方向に切られた切り溝３５ａが形成されている。On the other hand, in the embodiment shown in FIG. 2, the temperature control opening 35 is cut in the width direction from a surface 31e facing the crimping surface 31a toward the crimping surface 31a by a wire cutter or the like. The cut groove 35a is formed.
【００３６】図３〜図４において，ヒ−タツ−ル４０，
４１は，いずれも高熱高抵抗部材で形成されており，接
合領域の長さ方向に沿って長く，且つ，接合領域の巾方
向に対応する巾を有する加熱部２０ａと，この加熱部４
０ａ，４１ａの両端に一体的に形成されている両端部４
０ｂ，４０ｃ，４１ｂ，４１ｃとにより略コ時状に形成
されている。加熱部４０ａ，４１ａの下面は，平坦に形
成されて圧着面４０ｄ，４１ｄとなっている。そして，
この圧着面４０ｄ，４１ｄに対向する面４０ｅ，４１ｅ
と圧着面４０ｄ，４１ｄとは平行に形成されているとと
もに，それぞれこの面４０ｅ，４１ｅの中心点４２，４
３から，加熱部４０ａ，４１ａの長手方向両端へと順次
その容積が大きく形成された温度制御用開口部４４，４
５が，加熱部４０ａ，４１ａの中心点４２，４３から両
端へと対をなすように複数箇所圧着面４０ｄ，４１ｄ方
向へ向けて形成されている。3 and 4, the heater 40,
Numeral 41 denotes a heating section 20a, which is formed of a high heat and high resistance member, is long along the length direction of the joining area, and has a width corresponding to the width direction of the joining area.
0a, 41a, both ends 4 integrally formed at both ends
0b, 40c, 41b and 41c are formed in a substantially U-shape. The lower surfaces of the heating units 40a and 41a are formed flat to form crimping surfaces 40d and 41d. And
Surfaces 40e, 41e opposed to the crimping surfaces 40d, 41d
And the crimping surfaces 40d and 41d are formed in parallel with each other, and the center points 42 and 4 of the surfaces 40e and 41e, respectively.
3, temperature control openings 44, 4 whose volumes are sequentially increased to both ends in the longitudinal direction of the heating units 40 a, 41 a.
5 are formed in the directions of the crimping surfaces 40d and 41d at a plurality of places so as to form a pair from the center points 42 and 43 of the heating sections 40a and 41a to both ends.
【００３７】図３に示す実施例の場合には，温度制御用
開口部４４としては，圧着面４０ｄに対向する面４０ｅ
から圧着面４０ｄ方向へ向けて円筒状の孔４４ａが凹設
されている。In the case of the embodiment shown in FIG. 3, the temperature control opening 44 is a surface 40e opposed to the crimping surface 40d.
A cylindrical hole 44a is recessed toward the crimping surface 40d from the side.
【００３８】一方，図４に示す実施例の場合には，温度
制御用開口部４５としては，圧着面４１ｄに対向する面
４１ｅから圧着面４１ｄ方向に向けて，図２に示すヒ−
タツ−ル３１の場合と同様に，ワイヤカッタ−等で面４
１ｅの巾方向に切られた切り溝４５ａが形成されてい
る。On the other hand, in the case of the embodiment shown in FIG. 4, the opening 45 for temperature control is formed from the surface 41e facing the crimping surface 41d toward the crimping surface 41d in the direction shown in FIG.
As in the case of the tool 31, use a wire cutter or the like to
A cut groove 45a cut in the width direction of 1e is formed.
【００３９】このように，図１〜図４に示すいづれの形
状のヒ−タツ−ル３０，３１，４０，４１も，温度制御
用開口部３４，３５，４４，４５が，それぞれ加熱部３
０ｃ，３１ｃ，４０ａ，４１ａの長さ方向両端に近づく
ほど大きく形成されているので，長さ方向両端に近づく
ほど加熱電流の通路が制限され，中心部分より抵抗値が
大となり，発生するジュ−ル熱が大きくなる。このよう
に，加熱部３０ｃ，３１ｃ，４０ａ，４１ａの両端近傍
の温度を高くして，両端近傍が中心部分より温度が低下
しないように構成して，全体として平均した温度分布が
得られるように構成されている。従って，圧着面３０
ａ，３１ａ，４０ｄ，４１ｄ全体の接合温度を一定に保
持することが出来，有効長Ｌがそれだけ長いものが得ら
れる。As described above, the heaters 30, 31, 40, and 41 having any of the shapes shown in FIGS. 1 to 4 also have the temperature control openings 34, 35, 44, and 45, respectively.
Since it is formed larger as it approaches the lengthwise ends of 0c, 31c, 40a, and 41a, the path of the heating current is restricted as it approaches the lengthwise ends, and the resistance value becomes larger than that of the central portion, and the generated judging occurs. Heat increases. In this way, the temperature near the both ends of the heating sections 30c, 31c, 40a, and 41a is increased so that the temperature near the both ends does not decrease from the center, so that an average temperature distribution can be obtained as a whole. It is configured. Therefore, the crimping surface 30
a, 31a, 40d, and 41d can be maintained at a constant bonding temperature, and the effective length L can be longer.
【００４０】しかしながら，上記，図１〜図４に示す構
造のヒ−タツ−ル３０，３１，４０，４１は，その構造
上，あまり長い有効長Ｌのものを作成しても，圧着面３
０ａ，３１ａ，４０ｄ，４１ｄの使用関数が増すにつれ
て歪み等の問題が発生し，あまり長い有効長Ｌのものは
使用できない。However, the heaters 30, 31, 40, and 41 having the structure shown in FIGS. 1 to 4 have a very long effective length L due to their structure.
As the use functions of 0a, 31a, 40d, and 41d increase, problems such as distortion occur, and the one having an effective length L that is too long cannot be used.
【００４１】そこで，図５に示すように，ヒ−タツ−ル
５０は，有効長Ｌの長いものとして，例えば，２４０〜
３６０ｍｍあるいはそれ以上の大型のＬＣＤ等を配線基
板１に接合する場合のものとして発明されたもので，ヒ
−タツ−ル５０は，加熱部５０ａとその両端に延設され
ている両端部５０ｂ，５０ｂとにより構成されている。
このヒ−タツ−ル５０は，単なる矩形状の棒材を略コ字
状に屈折して形成されており，電源からの加熱電流は，
一方の両端部５０ｂから加熱部５０ａを介して他方の両
端部５０ｂへと給電される。Therefore, as shown in FIG. 5, the heater 50 has a long effective length L, for example, 240 to 240 mm.
The heater 50 is invented for joining a large LCD or the like having a size of 360 mm or more to the wiring board 1. The heater 50 includes a heating section 50a and both end sections 50b extending from both ends thereof. 50b.
The heater 50 is formed by refracting a simple rectangular bar into a substantially U-shape.
Power is supplied from one end 50b to the other end 50b via the heating unit 50a.
【００４２】そして，このヒ−タツ−ル５０の開口部分
には，超硬部材でこの開口部分の形状に形成した補強部
５１で補強されて，ヒ−タツ−ル５０の機械的な強度が
保持されている。従って，このヒ−タツ−ル５０は，補
強部５１により機械的に補強されているので，充分長い
有効長Ｌのものを形成することが出来る。なお，補強部
５１の材質としては，セラミック，タングステン，ニク
ロム，チタン，スーパ−インバ−，モリブデン，タング
ステンカ−バイト等の超硬部材が適している。The opening of the heater 50 is reinforced with a reinforcing portion 51 formed of a super hard member in the shape of the opening, so that the mechanical strength of the heater 50 is reduced. Is held. Accordingly, since the heater 50 is mechanically reinforced by the reinforcing portion 51, it is possible to form the heater 50 having a sufficiently long effective length L. As the material of the reinforcing portion 51, a super hard member such as ceramic, tungsten, nichrome, titanium, super invar, molybdenum, and tungsten carbide is suitable.
【００４３】上記のように構成されているので，ヒ−タ
ツ−ル５０の場合には，加熱部５０ａの長さを充分長く
形成することが出来，接合領域が長いＬＣＤ等も接合す
ることが出来るとともに，作成費用，材料ともに安価で
ある。With the above configuration, in the case of the heater 50, the length of the heating section 50a can be made sufficiently long, and an LCD or the like having a long bonding area can be bonded. It is possible, and the production cost and materials are both low.
【００４４】しかしながら，このヒ−タツ−ル５０は，
加熱電流が直接加熱部５０ａに流れるため，図１３に示
す従来のヒ−タツ−ル２０と同様に，有効長Ｌがあまり
長い場合には，圧着面５０ｃに電圧が発生する恐れがあ
る。そこで，図６に示すように，ヒ−タツ−ル５０の圧
着面５０ｃには，弾性を有する絶縁シ−ト５２で覆われ
た状態で，接合領域を熱圧着するように構成されてい
る。なお，ヒ−タツ−ル５０の圧着面５０ｃの両側近傍
には，この絶縁シ−ト５２の送りと巻き取りを行う一対
のロ−ラ５３が配置されている。However, this heater 50 is
Since the heating current flows directly to the heating section 50a, if the effective length L is too long as in the conventional heater 20 shown in FIG. 13, a voltage may be generated on the crimping surface 50c. Thus, as shown in FIG. 6, the bonding area is thermocompression-bonded to the crimping surface 50c of the heat shield 50 while being covered with an elastic insulating sheet 52. A pair of rollers 53 for feeding and winding the insulating sheet 52 are disposed near both sides of the crimping surface 50c of the heater 50.
【００４５】絶縁シ−ト５２の送りと巻き取りは，所定
回数熱圧着工程が行われた後に，手動であるいはステッ
ピングモ−タ（図示せず）等によりロ−ラ５３が駆動さ
れて，圧着面５０ｃに対向する部分だけ，即ち，この実
施例の場合には，圧着面５０ｃの巾は２ｍｍ程度である
から，２ｍｍずつ順次巻き取られるように構成されてい
る。The insulating sheet 52 is fed and wound up after a predetermined number of thermocompression bonding steps, and then the roller 53 is driven manually or by a stepping motor (not shown) or the like. Only the portion facing 50c, that is, in the case of this embodiment, the width of the crimping surface 50c is about 2 mm, so that the crimping surface 50c is sequentially wound up by 2 mm.
【００４６】なお，この実施例の場合には，絶縁シ−ト
５２としては，テ−プ厚が５０μ〜８０μ程度のシリコ
ンゴムが使用されているが，これに限定されることな
く，絶縁性で弾性のあるシ−トであればいかなるもので
あってもよい。又，絶縁シ−ト５２は，この実施例の場
合には，圧着面５０ｃの長さ方向の長さに対応する巾を
有するものが使用されており，ヒ−タツ−ル５０の圧着
面５０ｃの長さ方向に直交する方向に，即ち，巾方向に
沿って巻き取られるように構成されているが，これに限
定されることなく，圧着面５０ｃの巾に相当する細い絶
縁シ−トで圧着面５０ｃを覆うとともに，この細い絶縁
シ−トを圧着面５０ｃの長さ方向に沿って巻き取るよう
に構成しても上記実施例と同様な作用効果がある。In this embodiment, the insulating sheet 52 is made of silicon rubber having a tape thickness of about 50 to 80 .mu., But is not limited to this. Any sheet may be used as long as it is elastic. In this embodiment, the insulation sheet 52 has a width corresponding to the length of the crimping surface 50c in the longitudinal direction. The crimping surface 50c of the heater 50 is used. Although it is configured to be wound in a direction perpendicular to the longitudinal direction, that is, along the width direction, the present invention is not limited to this, and is a thin insulating sheet corresponding to the width of the crimping surface 50c. The same operation and effect as in the above embodiment can be obtained by covering the crimping surface 50c and winding the thin insulating sheet along the length direction of the crimping surface 50c.
【００４７】このように構成されているので，ヒ−タツ
−ル５０の加熱部５０ａに電圧が発生することはない。
その上，接合領域の接合手段として，異方性導電膜を使
用した場合には，圧着面５０ｃに対して，接合に際し
て，厳しい平坦度が要求されるが，この圧着面５０ｃは
弾性のある絶縁シ−ト５２で覆われているので，異方性
導電膜の凹凸を緩和することも出来る。With such a configuration, no voltage is generated in the heating section 50a of the heater 50.
In addition, when an anisotropic conductive film is used as a joining means of the joining region, a strict flatness is required for joining to the crimping surface 50c, but this crimping surface 50c is an elastic insulating material. Since the sheet 52 is covered with the sheet 52, unevenness of the anisotropic conductive film can be reduced.
【００４８】図７は，この発明の実施例で，熱圧着装置
６０の斜視図，図８は，加熱電流を給電する時間と加熱
温度との関係を示すグラフである。なお，従来例および
この発明の実施例としてすでに述べたものと同一のもの
は，同一名称，同一番号を付すとともに，その説明を省
略する。FIG. 7 is a perspective view of a thermocompression bonding device 60 according to an embodiment of the present invention, and FIG. 8 is a graph showing a relationship between a time for supplying a heating current and a heating temperature. The same components as those already described as the conventional example and the embodiment of the present invention are given the same names and the same numbers, and the description thereof is omitted.
【００４９】熱圧着装置６０は，接合ヘッド部６１，加
熱電源部６２，Ｙ軸移動テ−ブル６３，加圧制御部６
４，装置制御部６５および専用架台６６と，安全仕様と
してシグナルタワ−６７と非常停止スイッチ６８とによ
り構成されており，この装置では，ヒ−タツ−ルとして
は，図６に示す構造のものが用いられている。The thermocompression bonding device 60 includes a bonding head 61, a heating power supply 62, a Y-axis moving table 63, and a pressure controller 6.
4, a device control section 65 and a dedicated stand 66, a signal tower 67 and an emergency stop switch 68 as safety specifications. In this apparatus, the heater shown in FIG. Used.
【００５０】接合ヘッド部６１は，加圧制御部６４でそ
の上昇下降が制御されているエアシリンダ６９により，
ヒ−タツ−ル５０を把持して上下動するように構成され
ている。絶縁シ−ト５２は，ヒ−タツ−ル５０の圧着面
５０ｃに接触してこれを覆い，その両端は，圧着面５０
ｃの両側近傍に配置されている一対ロ−ラ５３に巻回さ
れている。この実施例の場合には，一対のロ−ラ５３
は，ベルト７０を介して互いに連結されており，つまみ
７１を手動で回転して巻き取るように構成されている。
なお，このロ−ラ５３は，ステッピングモ−タ等に連結
して自動的に一定の巾ずつ，順次巻き取り動作をするよ
うに構成しても良い。The joining head section 61 is moved by an air cylinder 69 whose up and down is controlled by a pressurizing control section 64.
It is configured to grip the heater 50 and move up and down. The insulating sheet 52 contacts and covers the crimping surface 50c of the heater 50, and both ends thereof are connected to the crimping surface 50c.
c is wound around a pair of rollers 53 arranged near both sides. In the case of this embodiment, a pair of rollers 53
Are connected to each other via a belt 70, and are configured so that the knob 71 is manually rotated and wound.
The roller 53 may be connected to a stepping motor or the like so as to automatically perform a winding operation by a predetermined width automatically.
【００５１】この発明による熱圧着装置６０は，上記従
来例の問題点において述べたように，常時加熱方法を採
用するとともに，この常時加熱温度接合温度より低い温
度に保持し，熱圧着時に所定の接合温度に加熱したいと
の要望に基づいて発明されたものである。The thermocompression bonding apparatus 60 according to the present invention employs a constant heating method as described in the above-mentioned problem of the prior art, and maintains the temperature at a temperature lower than the constant heating temperature bonding temperature so that a predetermined temperature can be obtained during thermocompression. It was invented based on the desire to heat to the joining temperature.
【００５２】従って，この熱圧着装置６０では，パルス
ヒ−ト方法と常時加熱方法とが併用されている。そこ
で，加熱電源部６２は，図８に示すように，ヒ−タツ−
ル５０に所定加熱電流を給電して予め所定温度Ｔ2 に常
時加熱するための電源（図示せず）とパルス状の加熱電
流を給電して，熱圧着時に，ヒ−タツ−ル５０を接合温
度に加熱するためのパルス状の加熱電流の電源（図示せ
ず）とを備えており，この実施例の場合には，加熱温度
は，常温Ｔ1 から４９０°迄１°間隔で調整することが
出来るように構成されている。Therefore, in the thermocompression bonding apparatus 60, both the pulse heat method and the constant heating method are used. Therefore, as shown in FIG.
Le 50 power source for always heated to a predetermined temperature T 2 in advance by supplying a predetermined heating current (not shown) and to feed the pulsed heating current, at the time of thermocompression bonding, heat - Tatsu - joining the Le 50 It pulsed heating current for heating to a temperature source comprises a (not shown) and, in the case of this embodiment, the heating temperature is adjusted by 1 ° intervals from room temperature T 1 up to 490 ° It is configured to be able to.
【００５３】図８は，加熱電流を給電する時間と温度と
の関係を示すもので，ヒ−タツ−ル５０は，作業開始時
間ｔ1 において，加熱電流を給電するための電源から一
定の加熱電流が給電されて，常温Ｔ1 から予め所定温度
Ｔ2 に保持されている。[0053] Figure 8 shows the relationship between time and temperature for feeding the heating current, heat - Tatsu - le 50, in a working start time t 1, a constant from a power source for powering the heating current heating current is fed, it is previously maintained at a predetermined temperature T 2 from room temperature T 1.
【００５４】熱圧着開始時間ｔ2 において，パルス状の
加熱電流の電源からパルス状の加熱電流が給電される
と，ヒ−タツ−ル５０の圧着面５０ｃは，接合温度Ｔ3
まで加熱される。接合が終了すると，このパルス状の加
熱電流はオフとなるから，圧着面５０ｃの温度は，所定
温度Ｔ2 まで下降する。この実施例の場合には，接合温
度Ｔ3 と所定温度Ｔ2 との差は，１００°程度に設定さ
れており，ヒ−タツ−ル５０の圧着面５０ｃの加熱温度
を接合温度Ｔ3 から所定温度Ｔ2 へ冷却する方法とし
て，エアにより強制空冷方法が採用されている。When the pulse-shaped heating current is supplied from the power source of the pulse-shaped heating current at the thermocompression bonding start time t 2 , the pressure-bonded surface 50 c of the heater 50 is heated to the bonding temperature T 3.
Heated until. When bonding is completed, because the pulsed heating current is turned off, the temperature of the crimping surface 50c is lowered to a predetermined temperature T 2. For this embodiment, the difference between the junction temperature T 3 and the predetermined temperature T 2 is set to about 100 °, heat - Tatsu - the heating temperature of the bonding surface 50c of the Le 50 from the junction temperature T 3 the method of cooling to a predetermined temperature T 2, the forced air cooling method is adopted by the air.
【００５５】Ｙ軸移動テ−ブル６３は，上面に熱圧着す
るためのワ−ク（即ち，圧着物と被圧着物とが位置決め
された状態のワ−ク）（図示せず）が載置されるもの
で，このワ−クを接合ヘッド部６１の下方向の所定位置
に位置決めするために移動させるが，駆動手段として
は，この実施例の場合には，パルスモ−タ（図示せず）
によるボ−ルネジ式が採用されており，平行度調整機構
も備えており，移動範囲は４２０ｍｍ，位置決め精度は
±０．５ｍｍである。そして，Ｙ軸移動テ−ブル６３上
にワ−クを固定する方法としては，このワ−クをガイド
ピン（図示せず）に付き当てるとともに，真空吸着によ
り固定している。On the Y-axis moving table 63, a work (not shown) for thermocompression bonding on the upper surface (ie, a work in which the crimping object and the object to be crimped are positioned) is placed. The work is moved to position the work at a predetermined position below the joining head 61. In this embodiment, the drive means is a pulse motor (not shown).
And a parallelism adjusting mechanism is provided. The moving range is 420 mm and the positioning accuracy is ± 0.5 mm. As a method of fixing the work on the Y-axis moving table 63, the work is attached to a guide pin (not shown) and fixed by vacuum suction.
【００５６】加圧制御部６４では，エアシリンダ６９の
加圧力や，ヒ−タツ−ル５０を所定温度Ｔ2 まで冷却す
るための冷却用のエアの圧力等が制御されている。[0056] In the pressurization control unit 64, pressure and the air cylinder 69, heat - Tatsu - pressure, etc. of the air for cooling for cooling is controlled Le 50 to a predetermined temperature T 2.
【００５７】装置制御部６５では，各種の動作がプログ
ラムに従ってシ−ケンス制御されている。専用架台６６
には，キャスタ−７２と固定用のレベラ−７３とが取り
付けられており，移動，固定できるように構成されてい
る。In the device controller 65, various operations are sequence-controlled according to a program. Dedicated stand 66
Is provided with a caster 72 and a fixing leveler 73, which are configured to be movable and fixed.
【００５８】シグナルタワ−６７は，１工程終了時に緑
色のランプが点灯し，非常停止時には，赤のランプが点
灯するように構成されている。非常停止スイッチ６８
は，装置制御部６５のケ−ス上面に配設されている。The signal tower 67 is configured such that a green lamp is lit at the end of one process and a red lamp is lit at the time of an emergency stop. Emergency stop switch 68
Is disposed on the upper surface of the case of the device control unit 65.
【００５９】装置制御部６５の上面と専用架台６６の角
部にそれぞれスタ−トスイッチ７４，７５が配設されて
おり，両手スタ−ト式となっている。なお，スタ−トス
イッチ７４，７５をオンすると，シグナルタワ−６７の
緑色のランプが消灯するように構成されている。又，ヒ
−タツ−ル５０による接合領域の熱圧着回数を計算して
所定数に達した後に，ロ−ラ５３を手動あるいは自動で
回転駆動させるためのカウンタ手段として，通常のカウ
ンタ（図示せず）が配置されている。Start switches 74 and 75 are provided on the upper surface of the device control section 65 and on the corners of the dedicated pedestal 66, respectively, and are of a two-handed start type. When the start switches 74 and 75 are turned on, the green lamp of the signal tower 67 is turned off. A counter (not shown) is used as counter means for manually or automatically rotating the roller 53 after the number of thermocompression bonding of the bonding area by the heater 50 reaches a predetermined number. Zu) are arranged.
【００６０】次に，図９に示す動作フロ−により，この
熱圧着装置６０の作用動作について説明する。まず，Ｙ
軸移動テ−ブル６３上の治具テ−ブル（図示せず）にワ
−クとして，配線基板１と被圧着物４としてＬＣＤパネ
ルとをセットした後（ステップ８１），パネル吸着スイ
ッチ（図示せず）をオンしてＬＣＤパネルを吸着させる
（ステップ８２）。Next, the operation of the thermocompression bonding apparatus 60 will be described with reference to the operation flow shown in FIG. First, Y
After setting the wiring board 1 and the LCD panel as the object to be crimped 4 on the jig table (not shown) on the axis moving table 63 (step 81), the panel suction switch (FIG. (Not shown) is turned on to suck the LCD panel (step 82).
【００６１】次いで，両手で，スタ−トスイッチ７４，
７５をオンすると（ステップ８３），Ｙ軸移動テ−ブル
６３は前進して，接合ヘッド部６１が下降する位置に移
動し（ステップ８４），位置決めされ，停止する。次い
で，接合ヘッド部６１が下降を開始する（ステップ８
５）。なお，この際，ヒ−タツ−ル５０は，予め所定温
度Ｔ2 に加熱されている。Next, with both hands, the start switch 74,
When the switch 75 is turned on (step 83), the Y-axis moving table 63 moves forward, moves to a position where the joining head 61 descends (step 84), is positioned, and stops. Next, the joining head unit 61 starts descending (step 8).
5). At this time, heat - Tatsu - le 50 is preheated to a predetermined temperature T 2.
【００６２】接合ヘッド部６１に支持されているヒ−タ
ツ−ル５０がワ−クに所定の加圧力を加えると同時にパ
ルス状の加熱電流の電源からパルス状の加熱電流が給電
され，ヒ−タツ−ル５０は，接合温度Ｔ3 まで加熱さ
れ，ワ−クの接合領域は接合される（ステップ８６）。
接合が終了すると，ヒ−タツ−ル５０に向けてエアが吹
き出し，ヒ−タツ−ル５０は急速に所定温度Ｔ2 迄冷却
される（ステップ８７）。次いで，接合ヘッド部６１が
上昇し（ステップ８８），１サイクルの熱圧着工程が終
了する。The heater 50 supported by the joining head 61 applies a predetermined pressing force to the work, and at the same time, a pulse-like heating current is supplied from a pulse-like heating current power supply. Tatsu - Le 50 is heated to a bonding temperature T 3, Wa - joining region of click is bonded (step 86).
When bonding is completed, heat - Tatsu - balloon air toward the Le 50, heat - Tatsu - Le 50 is rapidly cooled to a predetermined temperature T 2 (step 87). Next, the joining head 61 is raised (step 88), and the one-cycle thermocompression bonding step is completed.
【００６３】１サイクル終了後，Ｙ軸移動テ−ブル６３
は，再び前進してワ−クの次の接合領域が接合ヘッド部
６１の下降位置へと位置決めされ，停止する（ステップ
８９）。次いで，ステップ８５〜ステップ８８の動作が
繰り返された後（ステップ９０），Ｙ軸移動テ−ブル６
３は後退し（ステップ９１），パネルの吸着が解除され
（ステップ９２），ワ−クがＹ軸移動テ−ブル６３から
取り出される（ステップ９３）。なお，１サイクルで熱
圧着工程が終了する場合には，ステップ８８からステッ
プ９１へと移動する。After one cycle, the Y-axis movement table 63
Moves forward again, the next joining area of the work is positioned at the lowering position of the joining head 61, and stops (step 89). Next, after the operations of steps 85 to 88 are repeated (step 90), the Y-axis movement table 6
3 moves back (step 91), the suction of the panel is released (step 92), and the work is taken out of the Y-axis moving table 63 (step 93). If the thermocompression bonding step is completed in one cycle, the process moves from step 88 to step 91.
【００６４】なお，絶縁シ−ト５２は，例えば，１００
回程度使用したら，手動あるいは，ステッピングモ−タ
でロ−ラ５３を回転させて，圧着面５０ｃに対向してい
る部分だけ巻き取り，次の新しい絶縁シ−ト５２部分で
圧着面５０ｃが覆われるように，所定の使用回数が初期
設定されている。The insulation sheet 52 is, for example, 100
After using about twice, the roller 53 is rotated manually or by a stepping motor to wind up only the portion facing the crimping surface 50c, and the crimping surface 50c is covered with the next new insulation sheet 52. Thus, the predetermined number of times of use is initially set.
【００６５】[0065]
【発明の効果】この発明は，電源から加熱電流が給電さ
れ，圧着物と被圧着物との接合領域の長さ方向に沿って
長く，且つ，この接合領域の巾方向に対応する巾を有す
る平坦に形成された圧着面を有する加熱部と，この加熱
部の巾方向両端から長溝を介在させて加熱部に一体的に
形成された一対の支持部とを有するヒ−タツ−ルの構造
において，加熱部の圧着面に対向する面の中心点から，
加熱部の長手方向両端へと順次その容積が大きく形成さ
れた温度制御用開口部を，加熱部の中心点から両端へと
対をなすように複数箇所圧着面方向へ向けて形成したの
で，ヒ−タツ−ルの圧着面全体の接合温度を一定に保持
することが出来，有効長Ｌがそれだけ長いものが得られ
る。According to the present invention, a heating current is supplied from a power source, and has a width that is long along the length direction of the joining region between the crimping object and the object to be crimped, and has a width corresponding to the width direction of the joining region. In the structure of a heater having a heating portion having a flat crimping surface and a pair of supporting portions formed integrally with the heating portion through long grooves from both ends in the width direction of the heating portion. , From the center point of the surface facing the crimping surface of the heating section,
The temperature control opening, whose volume is gradually increased toward both ends in the longitudinal direction of the heating section, is formed in a plurality of places toward the crimping surface so as to form a pair from the center point of the heating section to both ends. -It is possible to keep the joining temperature of the entire crimping surface of the tool constant and to obtain a longer effective length L.
【００６６】この発明は，略コ字状に形成されたヒ−タ
ツ−ルの加熱部を，平坦な板状に形成するとともに，こ
のヒ−タツ−ルの開口部分を，超硬部材でこの開口部分
の形状に形成された補強部で補強したので，機械的な強
度が大であるから，加熱部の長さを充分長く形成するこ
とが出来，有効長の長いものが得られとともに，作成費
用，材料ともに安価である。According to the present invention, the heating portion of the heater, which is formed in a substantially U-shape, is formed in a flat plate shape, and the opening of the heater is formed by a super-hard member. Because of the high mechanical strength due to the reinforcement with the reinforcing part formed in the shape of the opening, the length of the heating part can be made sufficiently long, and a long effective length can be obtained and made. Both cost and material are low.
【００６７】この発明は，ヒ−タツ−ルの圧着面を，弾
性を有する絶縁シ−トで覆うとともに，この絶縁シ−ト
を圧着面に対向する部分だけ順次巻き取り可能な手段を
設けるようにしたので，ヒ−タツ−ルの圧着面に電圧が
発生することはない。その上，絶縁シ−トは，弾性のあ
る部材が使用されているので，接合領域の接合手段とし
て，異方性導電膜を使用した場合には，接合に際して，
厳しい平坦度が要求されるが，圧着面は絶縁シ−トで覆
われているので，異方性導電膜の凹凸を緩和することが
出来る。According to the present invention, the crimping surface of the heater is covered with an insulating sheet having elasticity, and means for sequentially winding the insulating sheet only at a portion facing the crimping surface is provided. Therefore, no voltage is generated on the crimping surface of the heater. In addition, since the insulating sheet is made of an elastic member, if an anisotropic conductive film is used as the joining means of the joining area, the joining sheet may not be used.
Strict flatness is required, but since the crimped surface is covered with an insulating sheet, the irregularities of the anisotropic conductive film can be reduced.
【００６８】この発明は，電源から加熱電流をヒ−タツ
−ルに供給し，このヒ−タツ−ルを保持する接合ヘッド
部の上下動により，ヒ−タツ−ルにより接合領域を熱圧
着する熱圧着方法において，ヒ−タツ−ルの圧着面を弾
性を有する絶縁シ−トで覆うとともに，ヒ−タツ−ルに
所定加熱電流を給電して予め所定温度に常時加熱し，接
合ヘッド部が下降してヒ−タツ−ルにより，圧着物と被
圧着物との接合領域に所定の圧力が加えられると同時
に，このヒ−タツ−ルにパルス状の加熱電流を給電し
て，このヒ−タツ−ルを接合温度に加熱して接合領域を
熱圧着し，この接合領域を熱圧着した後，ヒ−タツ−ル
を所定温度に冷却し，接合領域の熱圧着工程を所定回数
終了した後，絶縁シ−トを圧着面に対向した部分だけ移
動させて新たな絶縁シ−ト部分で圧着面を覆うようにし
たので，接合時に所定温度から接合温度まで加熱しても
圧着面の加熱温度は安定し，温度精度が良い。又，加熱
温度は所定温度と接合温度との差の温度だけ加熱急冷さ
れるだけであるから，圧着面全体の温度むらもなく，短
時間で安定的に上昇下降し，１サイクルの作業時間を短
縮することが出来る。その上，絶縁シ−トで圧着面が覆
われているので，圧着面に電圧が発生することもない。According to the present invention, a heating current is supplied to a heater from a power source, and the joining area is thermocompression-bonded by the heater by the vertical movement of a joining head for holding the heater. In the thermocompression bonding method, the crimping surface of the heater is covered with an elastic insulating sheet, and a predetermined heating current is supplied to the heater to constantly heat it to a predetermined temperature. At the same time, a predetermined pressure is applied to the joint area between the crimping object and the object to be crimped by the heater, and at the same time, a pulse-like heating current is supplied to the heater to supply the heating. After the towel is heated to the joining temperature and the joining area is thermocompressed, the joining area is thermocompressed, the heater is cooled to a predetermined temperature, and the thermocompression step of the joining area is completed a predetermined number of times. Then, the insulation sheet is moved only by the part facing the crimping surface to create a new insulation sheet. Since as with root section covers the crimping surfaces, the heating temperature of the bonding surfaces even when heated from the predetermined temperature to the bonding temperature during bonding is stable, temperature accuracy is good. In addition, since the heating temperature is only heated and quenched by the difference between the predetermined temperature and the bonding temperature, the temperature of the entire pressure-bonded surface can be stably raised and lowered in a short time without unevenness of the temperature of the entire crimping surface, and the work time of one cycle can be reduced. Can be shortened. In addition, since the crimp surface is covered with the insulating sheet, no voltage is generated on the crimp surface.
【図１】この発明の実施例を示すもので，ヒータツール
３０の斜視図である。FIG. 1 shows an embodiment of the present invention and is a perspective view of a heater tool 30. FIG.
【図２】この発明の実施例を示すもので，ヒータツール
３１の一部切欠を含む斜視図である。FIG. 2, showing an embodiment of the present invention, is a perspective view of a heater tool 31 including a partial cutout.
【図３】この発明の他の実施例を示すもので，ヒータツ
ール４０の斜視図である。FIG. 3 is a perspective view of a heater tool 40 according to another embodiment of the present invention.
【図４】この発明のさらに他の実施例を示すもので，ヒ
ータツール４１の斜視図である。FIG. 4 is a perspective view of a heater tool 41, showing still another embodiment of the present invention.
【図５】この発明のさらに他の実施例を示すもので，ヒ
ータツール５０の斜視図である。FIG. 5 is a perspective view of a heater tool 50 according to still another embodiment of the present invention.
【図６】この発明のさらに他の実施例を示す一部切欠部
を含む要部斜視図である。FIG. 6 is a perspective view of a main part including a partially cut-out part showing still another embodiment of the present invention.
【図７】この発明による熱圧着装置の実施例を示す要部
斜視図である。FIG. 7 is a perspective view of an essential part showing an embodiment of the thermocompression bonding apparatus according to the present invention.
【図８】この発明の実施例を示すもので，加熱温度と時
間との関係を示すグラフである。FIG. 8 is a graph showing an example of the present invention and showing a relationship between heating temperature and time.
【図９】この発明の実施例を示すもので，熱圧着装置の
動作状態を示す動作フローである。FIG. 9 shows an embodiment of the present invention, and is an operation flow showing an operation state of the thermocompression bonding apparatus.
【図１０】従来の熱圧着装置の要部正面図である。FIG. 10 is a front view of a main part of a conventional thermocompression bonding apparatus.
【図１１】従来の絶縁基板１の平面図である。FIG. 11 is a plan view of a conventional insulating substrate 1.
【図１２】従来のヒータツール６の斜視図である。FIG. 12 is a perspective view of a conventional heater tool 6.
【図１３】従来のヒータツール２０の斜視図である。FIG. 13 is a perspective view of a conventional heater tool 20.
２・・・・圧着物 ４・・・・被圧着物 １９・・・長溝 ３０，３１，４０，４１，５０・・・・・・ヒータツー
ル ３０ａ，３１ａ，４０ｄ，４１ｄ，５０ｃ・圧着面 ３０ｃ，３１ｃ，４０ａ，４１ａ，５０ａ・加熱部 ３０ｅ，３１ｅ，４０ｅ，４１ｅ・・・・・圧着面に対
向する面 ３２・・・面３０ｅの中心点 ３３・・・面３１ｅの中心点 ３４，３５，４４，４５・・・・温度制御用開口部 ３４ａ，４４ａ・・・・・・・・穴 ３５ａ，４５ａ・・・・・・・・切り溝 ５２・・・絶縁シート ５３・・・ローラ ６０・・・熱圧着装置 ６１・・・接合ヘッド部 ６２・・・加熱電源部2 ························································· Heater tools 30a, 31a, 40d, 41d, 50c · · · , 31c, 40a, 41a, 50a, heating portions 30e, 31e, 40e, 41e,..., A surface facing the crimping surface 32, a central point of the surface 30e 33, a central point of the surface 31e, 34, 35 , 44, 45... Temperature control openings 34a, 44a... Holes 35a, 45a... Cut grooves 52 ... Insulating sheets 53 ... Rollers 60 ... thermocompression bonding device 61 ... joining head 62 ... heating power supply
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｈ０５Ｋ 3/32 Ｈ０５Ｋ 3/32 Ｂ 3/36 3/36 Ｂ (58)調査した分野(Int.Cl.7，ＤＢ名) B23K 3/03 G02F 1/1345 H01L 21/60 H05K 3/32 H05K 3/36 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 identification code FI H05K 3/32 H05K 3/32 B 3/36 3/36 B (58) Investigated field (Int.Cl. 7 , DB name) B23K 3/03 G02F 1/1345 H01L 21/60 H05K 3/32 H05K 3/36
Claims (10)
被圧着物との接合領域の長さ方向に沿って長く，且つ，
この接合領域の巾方向に対応する巾を有する平坦に形成
された圧着面を有する加熱部と，この加熱部の巾方向両
端から長溝を介在させて前記加熱部に一体的に形成され
た一対の支持部とを有するヒ−タツ−ルの構造におい
て，前記加熱部の前記圧着面に対向する面の中心点か
ら，前記加熱部の長手方向両端へと順次その容積が大き
く形成された温度制御用開口部を，前記加熱部の中心点
から両端へと対をなすように複数箇所前記圧着面方向へ
向けて形成したことを特徴とするヒ−タツ−ルの構造。1. A heating current is supplied from a power source, and is long along a length direction of a joining region between a crimped object and a material to be crimped, and
A heating portion having a flat crimping surface having a width corresponding to the width direction of the joining region, and a pair of heating portions formed integrally with the heating portion through long grooves from both ends in the width direction of the heating portion; In the structure of a heater having a supporting portion, a temperature control portion having a volume gradually increased from a center point of a surface of the heating portion facing the crimping surface to both ends in a longitudinal direction of the heating portion. 2. A structure for a heat-shielding machine according to claim 1, wherein the openings are formed at a plurality of locations in the direction of the crimping surface so as to form a pair from the center point of the heating section to both ends.
面に対向する面から前記圧着面方向へ向けて円筒状の孔
を凹設したことを特徴とする請求項１に記載のヒ−タツ
−ルの構造。2. The heater according to claim 1, wherein a cylindrical hole is formed as the temperature control opening from the surface facing the crimping surface toward the crimping surface. -The structure of the rule.
面に対向する面から前記圧着面方向へ向けて前記圧着面
に対向する面の巾方向に切られた切り溝を形成したこと
を特徴とする請求項１に記載のヒ−タツ−ルの構造。3. A cutting groove formed in the width direction of the surface facing the crimping surface from the surface facing the crimping surface to the direction of the crimping surface as the temperature control opening. 2. The structure of a heater according to claim 1, wherein:
被圧着物との接合領域の長さ方向に沿って長く，且つ，
この接合領域の巾方向に長さに相当する巾を有する平坦
に形成された圧着面を有する加熱部と，この加熱部の長
さ方向両端に一体的に形成された両端部とにより略コ字
状に形成されたヒ−タツ−ルの構造において，前記加熱
部の前記圧着面に対向する面の中心点から，前記加熱部
の長手方向両端へと順次その容積が大きく形成された温
度制御用開口部を，前記加熱部の中心点から両端へと対
をなすように複数箇所前記圧着面方向へ向けて形成した
ことを特徴とするヒ−タツ−ルの構造。4. A heating current is supplied from a power source, and is long along a length direction of a joining region between the crimping object and the object to be crimped, and
A heating section having a flat crimping surface having a width corresponding to the length in the width direction of the joining area, and both ends integrally formed at both ends in the length direction of the heating section are substantially U-shaped. In the structure of a heater formed in a shape, the volume of the heating portion is gradually increased from the center point of the surface of the heating portion facing the crimping surface to both ends in the longitudinal direction of the heating portion. 2. A structure for a heat-shielding machine according to claim 1, wherein the openings are formed at a plurality of locations in the direction of the crimping surface so as to form a pair from the center point of the heating section to both ends.
面に対向する面から前記圧着面方向へ向けて円筒状の孔
を凹設したことを特徴とする請求項４に記載のヒ−タツ
−ルの構造。5. The hot-water heater according to claim 4, wherein a cylindrical hole is formed as the temperature control opening from a surface facing the crimping surface toward the crimping surface. -The structure of the rule.
面に対向する面から前記圧着面方向へ向けて前記圧着面
に対向する面の巾方向に切られた切り溝を形成したこと
を特徴とする請求項４に記載のヒ−タツ−ルの構造。6. The temperature control opening, wherein a cut groove is formed in a width direction of a surface facing the crimping surface from a surface facing the crimping surface toward the direction of the crimping surface. 5. The structure of a heater according to claim 4, wherein
熱部を，平坦な板状に形成するとともに，このヒ−タツ
−ルの開口部分を，超硬部材でこの開口部分の形状に形
成された補強部で補強したことを特徴とする請求項４〜
請求項６にそれぞれ記載のヒ−タツ−ルの構造。7. A heating portion of a substantially U-shaped heater is formed in a flat plate-like shape, and an opening of the heater is formed by a cemented carbide member. The reinforcing portion formed in the shape of (1) is reinforced.
7. The structure of the heater according to claim 6.
絶縁シ−トで覆うとともに，この絶縁シ−トを前記圧着
面に対向する部分だけ順次巻き取り可能な手段を設けた
ことを特徴とする請求項１〜請求項７にそれぞれ記載の
ヒ−タツ−ルの構造。8. A means for covering a crimping surface of a heat shield with an insulating sheet having elasticity, and providing means for sequentially winding the insulating sheet only at a portion opposed to the crimping surface. 8. The structure of a heater according to claim 1, wherein:
供給し，このヒ−タツ−ルを保持する接合ヘッド部の上
下動により，前記ヒ−タツ−ルにより接合領域を熱圧着
する熱圧着方法において，前記ヒ−タツ−ルの圧着面を
弾性を有する絶縁シ−トで覆うとともに，前記ヒ−タツ
−ルに所定加熱電流を給電して予め所定温度に常時加熱
し，前記接合ヘッド部が下降して前記ヒ−タツ−ルによ
り，圧着物と被圧着物との前記接合領域に所定の圧力が
加えられると同時に，このヒ−タツ−ルにパルス状の加
熱電流を給電して，このヒ−タツ−ルを接合温度に加熱
して前記接合領域を熱圧着し，この接合領域を熱圧着し
た後，前記ヒ−タツ−ルを前記所定温度に冷却し，前記
接合領域の熱圧着工程を所定回数終了した後，前記絶縁
シ−トを前記圧着面に対向した部分だけ移動させて新た
な絶縁シ−ト部分で圧着面を覆うことを特徴とする熱圧
着方法。9. A heating current is supplied from a power source to the heater, and the joining area is thermocompression-bonded by the heater by a vertical movement of a joining head for holding the heater. In the thermocompression bonding method, the crimping surface of the heater is covered with an elastic insulating sheet, and a predetermined heating current is supplied to the heater to constantly heat the heater to a predetermined temperature. At the same time, a predetermined pressure is applied to the joint area between the crimped object and the object to be crimped by the heater, and a pulse-like heating current is supplied to the heater. Then, the heater is heated to a joining temperature to thermocompression-bond the bonding region, and the bonding region is thermocompression-bonded. Then, the heater is cooled to the predetermined temperature, and After the thermocompression bonding step has been completed a predetermined number of times, the insulating sheet is placed on the crimping surface. A thermocompression bonding method characterized in that only the portion facing the device is moved to cover the compression surface with a new insulating sheet portion.
に供給し，このヒ−タツ−ルを保持する接合ヘッド部の
上下動により，前記ヒ−タツ−ルにより接合領域を熱圧
着する熱圧着装置において，前記ヒ−タツ−ルの圧着面
を覆う弾性を有する絶縁シ−トと，この絶縁シ−トを前
記圧着面の両側近傍に配置されて，前記絶縁シ−トの送
りと巻き取りを行う一対のロ−ラと，前記ヒ−タツ−ル
に所定加熱電流を給電して予め所定温度に常時加熱する
ための電源と，熱圧着時に，前記ヒ−タツ−ルにパルス
状の加熱電流を給電して，前記ヒ−タツ−ルを接合温度
に加熱するためのパルス状の加熱電流の電源と，前記圧
着面に対向する部分だけ前記絶縁シ−トを巻き取るため
に，前記ロ−ラを所定数回転駆動する駆動手段と，前記
ヒ−タツ−ルにより，前記接合領域の熱圧着回数を計算
して所定数に達した後に，前記駆動手段を駆動するカウ
ンタ手段とを備えたことを特徴とする熱圧着装置。10. A heating current is supplied from a power supply to the heater, and the joining area is thermocompression-bonded by the heater by a vertical movement of a joining head for holding the heater. In a thermocompression bonding apparatus, an insulating sheet having elasticity for covering a crimping surface of the heat sheet, and this insulating sheet is disposed near both sides of the crimping surface, for feeding the insulating sheet. A pair of rollers for winding, a power supply for supplying a predetermined heating current to the heater and constantly heating the heater to a predetermined temperature in advance, and a pulse-like pulse for the heater during thermocompression bonding. And a power source for a pulse-like heating current for heating the heater to the joining temperature, and winding the insulating sheet only at a portion facing the crimping surface. Drive means for driving the roller a predetermined number of rotations, and the heater And a counter means for driving the driving means after calculating the number of times of thermocompression bonding of the joining area and reaching a predetermined number.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05507395A JP3356195B2 (en) | 1995-02-20 | 1995-02-20 | Heater structure, thermocompression bonding method and thermocompression bonding apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05507395A JP3356195B2 (en) | 1995-02-20 | 1995-02-20 | Heater structure, thermocompression bonding method and thermocompression bonding apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08227918A JPH08227918A (en) | 1996-09-03 |
| JP3356195B2 true JP3356195B2 (en) | 2002-12-09 |
Family
ID=12988528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05507395A Expired - Fee Related JP3356195B2 (en) | 1995-02-20 | 1995-02-20 | Heater structure, thermocompression bonding method and thermocompression bonding apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3356195B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4835251B2 (en) * | 2006-04-27 | 2011-12-14 | カシオ計算機株式会社 | Pressing piece of pressure device |
| JP2013165248A (en) * | 2012-02-13 | 2013-08-22 | Nippon Avionics Co Ltd | Solar cell module manufacturing method and manufacturing device |
-
1995
- 1995-02-20 JP JP05507395A patent/JP3356195B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08227918A (en) | 1996-09-03 |
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