JP3327332B2 - Piezoelectric driver for inkjet recording head - Google Patents
Piezoelectric driver for inkjet recording headInfo
- Publication number
- JP3327332B2 JP3327332B2 JP2001181431A JP2001181431A JP3327332B2 JP 3327332 B2 JP3327332 B2 JP 3327332B2 JP 2001181431 A JP2001181431 A JP 2001181431A JP 2001181431 A JP2001181431 A JP 2001181431A JP 3327332 B2 JP3327332 B2 JP 3327332B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- end side
- circuit board
- fixed
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明はインクジェット記録ヘッ
ド用の圧電駆動体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric driver for an ink jet recording head.
【０００２】[0002]
【従来の技術】縦振動モードを利用したインクジェット
記録ヘッドは、一般に特開平４−１０５２号公報に見ら
れるように、複数のノズルを穿設したノズルプレートの
背面に狭い間隙をおいて振動板を配設し、さらに、振動
板の背面に各ノズルに対応するよう分割した縦振動モー
ドの圧電振動子を当接するように構成し、インク流路か
らのインクをノズルプレートと振動板とで形成した圧力
室に導いた上、このインクを記録信号に応動した圧電振
動子により加圧して、インクノズルよりインク滴として
飛翔させるようにしたものである。2. Description of the Related Art In general, an ink jet recording head utilizing a longitudinal vibration mode has a diaphragm provided with a narrow gap behind a nozzle plate having a plurality of nozzles, as shown in Japanese Patent Laid-Open No. 4-1052. Arranged, and further configured so that a piezoelectric vibrator in a longitudinal vibration mode divided corresponding to each nozzle is brought into contact with the back surface of the diaphragm, and ink from the ink flow path was formed by the nozzle plate and the diaphragm. After the ink is guided to a pressure chamber, the ink is pressurized by a piezoelectric vibrator responding to a recording signal, and is caused to fly as an ink droplet from an ink nozzle.
【０００３】したがって、この種のインクジェット記録
ヘッドに用いられる圧電駆動体は、各振動子が振動板上
に均一に当接するよう、かつ、成形、組付けを容易に行
い得るよう、予め板状の圧電体の基端部に支持体を固定
した上で、その自由端側を個々の振動子に切割りするよ
うにして構成される。[0003] Therefore, the piezoelectric driving body used in this type of ink jet recording head has a plate-like shape so that each vibrator can evenly contact the vibrating plate and can be easily formed and assembled. The support is fixed to the base end of the piezoelectric body, and the free end side is cut into individual vibrators.
【０００４】ところで、この圧電体を切割るには一般に
ダイシングソーやワイヤーソーが用いられ、これを圧電
体の面に直角にもしくは平行に当てて切込むようにして
いるが、面に対して直角方向に切込むようにした場合に
は、個々の振動子を支持体の手前の部分でしか分割する
ことができないため、隣接する振動子が互いに干渉し合
う、いわゆるクロストーク現象が発生し易くなり、ま
た、面に対して平行に切込むようにした場合には、個々
の振動子を他と分割して相互の干渉をなくすことができ
る反面、共通電極も同時に切り割られてしまう結果、切
断工程後にさらに共通電極を設けなければならないとい
った工程増を招くといった問題を有している。[0004] By the way, a dicing saw or a wire saw is generally used to cut the piezoelectric body. The dicing saw or the wire saw is cut at right angles to or parallel to the surface of the piezoelectric body. In the case of notching, since the individual vibrators can be divided only at the portion in front of the support, adjacent vibrators interfere with each other, so-called crosstalk phenomenon easily occurs, and However, in the case of cutting in parallel to the plane, the individual vibrator can be divided from the others to eliminate mutual interference, but on the other hand, the common electrode is also cut at the same time. Further, there is a problem in that the number of steps must be increased such that a common electrode must be provided.
【０００５】[0005]
【発明が解決しようとする課題】本発明はこのような問
題に鑑みてなされたもので、その目的とするところは、
さしたる工数を要することなく、クロストークの発生を
可能な限り抑えることができ、しかも、これらの電極に
回路基板上の対応するリード線を容易にかつ正しく接続
させることのできる新たなインクジェット記録ヘッド用
の圧電駆動体を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of such a problem.
A new ink jet print head that can minimize the occurrence of crosstalk as much as possible without requiring a lot of man-hours, and can easily and correctly connect the corresponding leads on the circuit board to these electrodes. Is to provide a piezoelectric driving body.
【０００６】[0006]
【課題を解決するための手段】すなわち、本発明はかか
る課題を達成するためのインクジェット記録ヘッド用の
圧電駆動体として、圧電材層と内部電極層とを交互に積
層した複数の振動子と、これらの振動子の一端を自由端
とすべく他端を固定する保持部材と、振動子の列設方向
の両端に一端が保持部材に固定されて形成された延長部
とを有し、振動子の表面に自由端側端面から固定端側に
延設された外部信号電極を、延長部の表面に固定端側端
面から自由端側に延設された外部共通電極を有し、固定
端側に回路基板を添設して、この回路基板の巾方向中央
部に形成した多数のリード線を振動子上の外部信号電極
に、回路基板の巾方向両側部に形成したリード線を延長
部上の外部共通電極にそれぞれ接続させたようにしたも
のである。That is, the present invention provides a piezoelectric driving body for an ink jet recording head for achieving the above object, in which a plurality of piezoelectric material layers and internal electrode layers are alternately laminated . and the transducer, the free end of one of these transducers
Holding member to fix the other end and the row direction of the vibrator
Extensions formed with one end fixed to the holding member at both ends of
Has the door, the fixed end side from the free end side end surface on the front surface of the transducer
The extended or external signal electrodes, the fixed end side edge on the surface of the extension
An external common electrode extending from the surface to the free end side, a circuit board is attached to the fixed end side, and a number of lead wires formed at the center in the width direction of the circuit board are connected to the external Lead wires formed on both sides in the width direction of the circuit board are connected to the signal electrodes and the external common electrodes on the extended portions, respectively.
【０００７】[0007]
【実施例】そこで以下に図示した実施例について説明す
る。図１、図２は本発明の一実施例をなす圧電駆動体を
示したものである。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 and 2 show a piezoelectric driver according to an embodiment of the present invention.
【０００８】図において符号１は、圧電駆動体としての
圧電振動子組立体で、この組立体１は、自由端側を櫛歯
状に分割形成した圧電プレート２と、この圧電プレート
２をインクジェット記録ヘッドに取付けるべく、その後
端に固定した支持プレート１５とによって構成されてい
る。In the drawing, reference numeral 1 denotes a piezoelectric vibrator assembly as a piezoelectric driving body. This assembly 1 is composed of a piezoelectric plate 2 having a free end divided in a comb shape, and an ink jet recording apparatus. It is constituted by a support plate 15 fixed to the rear end to be attached to the head.
【０００９】これをさらに詳細に説明すると、圧電プレ
ート２は、チタン酸ジルコン酸鉛やチタン酸バリウムの
ようなペースト状の圧電材料層３に内部導電層４として
銀パラジウムを塗着もしくは蒸着し、これらを数層積層
することによって、自由端側を活性部５、固定部側、つ
まり基端側を非活性部６となし、さらに、基端側の非活
性部６に、例えば圧電材料と同一材料よりなるペースト
状の快削性セラミックス材によって形成した支持プレー
ト１５を積層した上、これら全体を焼結により一体的に
成形したものである。More specifically, the piezoelectric plate 2 is formed by applying or depositing silver palladium as an internal conductive layer 4 on a paste-like piezoelectric material layer 3 such as lead zirconate titanate or barium titanate. By laminating several layers, the free end side becomes the active portion 5 and the fixed portion side, that is, the base end side becomes the inactive portion 6, and the non-active portion 6 on the base end side is made of the same material as, for example, a piezoelectric material. A support plate 15 formed of a paste-like free-cutting ceramic material made of a material is laminated, and the whole is integrally formed by sintering.
【００１０】この圧電プレート２には、また図１、図２
に示したように、活性部５の下面から先端面を経てその
上面の非活性部６領域までの部分に、内部導電層４と導
通する外部信号電極８が被覆され、また、若干の非導電
面９を介在させてその非活性部６には、後端面からその
上面にかけての部分に外部共通電極１１が蒸着等により
被覆形成される。This piezoelectric plate 2 is also provided with FIGS.
As shown in FIG. 3, the external signal electrode 8 that is electrically connected to the internal conductive layer 4 is coated on a portion from the lower surface of the active portion 5 to the region of the inactive portion 6 of the upper surface via the front end surface. An external common electrode 11 is formed on the inactive portion 6 with the surface 9 interposed between the rear end surface and the upper surface by vapor deposition or the like.
【００１１】このように構成された圧電振動子組立体１
は、圧電プレートの剛性が支持プレート１５によって高
められるばかりでなく、支持プレート１５をもって圧電
振動子保持ブロックへの組付けが容易になり、さらに
は、各圧電振動子１２の先端を振動板に均一に当接させ
ることにより、圧力室内のインクを効率よく加圧するこ
とができる。[0011] The piezoelectric vibrator assembly 1 configured as described above.
In addition to the above, not only the rigidity of the piezoelectric plate is increased by the support plate 15, but also the mounting of the support plate 15 to the piezoelectric vibrator holding block is facilitated. , The ink in the pressure chamber can be efficiently pressurized.
【００１２】ついで、この圧電振動子組立体１には、支
持プレート１５との接合端縁Ａから少なくとも圧電プレ
ート２の外部信号電極８の後端部とを結ぶ斜めの線、こ
の実施例では、支持プレート１５との接合端縁Ａから圧
電プレート２の後端面上半部Ｂを結ぶ斜めの切割り線Ｌ
−Ｌを境として、圧電プレート２の活性部５の全ての部
分と、基端側の非活性部６のうち支持プレート１５上の
上半部分を、ワイヤーソーやダイシングソーによりノズ
ルの配設ピッチに相当する間隙をもって櫛歯状に分割し
て多数の圧電振動子１２を形成する。The piezoelectric vibrator assembly 1 has an oblique line connecting the joining edge A with the support plate 15 to at least the rear end of the external signal electrode 8 of the piezoelectric plate 2. An oblique cutting line L connecting the joining edge A with the support plate 15 and the upper half B of the rear end face of the piezoelectric plate 2
With respect to −L, all the portions of the active portion 5 of the piezoelectric plate 2 and the upper half portion of the non-active portion 6 on the base end side on the support plate 15 are connected by a wire saw or a dicing saw. And a large number of piezoelectric vibrators 12 are formed by being divided into comb-like shapes with a gap corresponding to.
【００１３】この櫛歯状の分割は、必ずしも上記した切
割り線Ｌ−Ｌを境として正確に行う必要はなく、支持プ
レート１５の一部に入り込むような深さで切込むように
してもよいが、この場合においても、圧電プレート２の
基端側は支持プレート１５により１つに結合した状態で
残される。It is not always necessary to perform the comb-like division precisely at the above-mentioned cutting line LL, but it may be cut at a depth such that it enters a part of the support plate 15. Also in this case, the base end side of the piezoelectric plate 2 is left in a state of being connected to one by the support plate 15.
【００１４】また、この実施例においては、圧電プレー
ト２の両側に若干の巾をもって切割りしない部分を形成
し、組付けの際に、この部分を圧電振動子保持ブロック
の両側に設けた溝内に挿入して圧電振動子組立体１を位
置決めするダミー振動子１３を形成するようにしてい
る。Further, in this embodiment, portions which are not split with a slight width are formed on both sides of the piezoelectric plate 2 and, when assembling, these portions are formed in grooves provided on both sides of the piezoelectric vibrator holding block. And a dummy vibrator 13 for positioning the piezoelectric vibrator assembly 1 by inserting the piezoelectric vibrator assembly 1 into the dummy vibrator 13.
【００１５】図４は、この歯切りに使用される装置の一
例を示したもので、テーブル２１上に、ダイシングソー
に対して相対的に前後動する治具２２を位置させて、こ
の治具２２の上面に、上記した切割り線Ｌ−Ｌの傾き角
θに相当するワーク取付け面２３を設け、この取付け面
２３に、圧電プレート２の自由端側が上向きに突出する
よう支持プレート１５を固定し、その上で、治具２２と
ダイシングソー２０とを相対的に前後動させながら歯切
りを行うようにしたものであるが、ワイヤーソーを用い
た装置の場合には、治具をワイヤーソーに対して上下動
させるように構成すればよい。FIG. 4 shows an example of an apparatus used for this gear cutting. A jig 22 which moves forward and backward with respect to a dicing saw is positioned on a table 21. A work mounting surface 23 corresponding to the inclination angle θ of the cutting line LL is provided on the upper surface of the workpiece 22, and the support plate 15 is fixed to the mounting surface 23 such that the free end side of the piezoelectric plate 2 projects upward. Then, the gear cutting is performed while the jig 22 and the dicing saw 20 are relatively moved back and forth. In the case of a device using a wire saw, the jig is connected to the wire saw. May be configured to move up and down with respect to.
【００１６】ところで、図３は、このようにして形成さ
れた圧電振動子組立体１とフレキシブル回路基板との接
続構造を示したものである。FIG. 3 shows a connection structure between the piezoelectric vibrator assembly 1 thus formed and a flexible circuit board.
【００１７】これに使用するフレキシブル回路基板１６
は、圧電プレート２とほぼ同じ巾に形成され、その巾方
向中央部分には、各圧電振動子１２とともに切割られた
外部信号電極８のそれぞれに非活性部６領域で接続する
多数のリード線１７が各圧電振動子と対応するように形
成され、またこの両側には、ダミー振動子１３の基端部
に形成された外部共通電極１１に接続するリード線１８
が、先端を圧電プレート２の上記した非導電面９よりも
後方に位置するようにして添着される。Flexible circuit board 16 used for this
Are formed to have substantially the same width as the piezoelectric plate 2, and a central portion in the width direction has a large number of lead wires 17 connected to each of the external signal electrodes 8 cut along with the piezoelectric vibrators 12 in the inactive portion 6 region. Are formed so as to correspond to the respective piezoelectric vibrators, and lead wires 18 connected to the external common electrode 11 formed at the base end of the dummy vibrator 13 are provided on both sides thereof.
Is attached so that the tip is located behind the non-conductive surface 9 of the piezoelectric plate 2.
【００１８】このように構成された各圧電振動子１２
は、切割られることなく残された圧電プレート２の基端
側下方の非活性部６を介して支持プレート１５上に強固
に固定され、かつ活性部５から支持プレート２上の後半
部上方にかけて大きく切割りした溝部分１０により、相
互干渉を生じることなく独立した振動が確保される。Each of the piezoelectric vibrators 12 thus configured
Is firmly fixed on the support plate 15 via the non-active portion 6 below the base end side of the piezoelectric plate 2 which has been left without being cut off, and greatly increases from the active portion 5 to the upper rear part on the support plate 2. The split grooves 10 ensure independent vibration without mutual interference.
【００１９】なお、以上は圧電プレート２の基端部を支
持プレート１５により支持する形式のものを例にして本
発明を説明したものであるが、圧電振動子１２の固定部
側を直接保持部材に保持させる形式のものでは、圧電振
動子１２の自由端側下面の活性部後端縁近傍と固定部側
上面の後端部近傍とを結ぶ斜めの線を境にして、その活
性部側に多数の切割りを入れ、これらの切割りにより分
割した各圧電振動子を被支持部側で強固に結合保持させ
つつ、これら相互の干渉を可能な限り抑えるように構成
することもできる。In the above description, the present invention has been described by exemplifying a type in which the base end portion of the piezoelectric plate 2 is supported by the support plate 15, but the fixed portion side of the piezoelectric vibrator 12 is directly held by the holding member. In the type of holding the piezoelectric vibrator 12 on the active portion side, a diagonal line connecting the vicinity of the rear end of the active portion on the lower surface of the free end side of the piezoelectric vibrator 12 and the vicinity of the rear end of the upper surface on the fixed portion is bordered. It is also possible to adopt a configuration in which a large number of slits are formed, and while the piezoelectric vibrators divided by these splits are firmly connected and held on the supported portion side, interference with each other is suppressed as much as possible.
【００２０】[0020]
【発明の効果】以上述べたように本発明によれば、圧電
プレートの巾方向中央部には櫛歯状の振動子を、両側部
には固定端側と一体の延長部を形成するとともに、固定
部側に添設した回路基板中央部に形成した多数のリード
線を振動子上の外部信号電極に、両側部に形成したリー
ド線を延長部上の外部共通電極にそれぞれ接続させるよ
うにしたので、振動子と延長部に設けた各電極とこれら
に対応するリード線とをきわめて簡単にかつきわめて正
確に接続させることができる。As described above, according to the present invention, a comb-shaped vibrator is formed at the center in the width direction of the piezoelectric plate, and an extended portion integral with the fixed end is formed at both sides. A large number of leads formed in the center of the circuit board attached to the fixed part are connected to external signal electrodes on the vibrator, and leads formed on both sides are connected to external common electrodes on the extension. Therefore, it is possible to connect the vibrator, the electrodes provided on the extension portion, and the corresponding lead wires very easily and very accurately.
【図１】本発明の一実施例を示す圧電振動子組立体の断
面図である。FIG. 1 is a sectional view of a piezoelectric vibrator assembly showing one embodiment of the present invention.
【図２】同上駆動体の全容を示す斜視図である。FIG. 2 is a perspective view showing the entire structure of the driving body.
【図３】回路基板との接続構造を示した斜視図である。FIG. 3 is a perspective view showing a connection structure with a circuit board.
【図４】圧電振動子の形成法を示した図である。FIG. 4 is a diagram illustrating a method of forming a piezoelectric vibrator.
１ 圧電振動子組立体 ２ 圧電プレート ５ 活性部 ６ 非活性部 ８ 外部信号電極 １１ 外部共通電極 １２ 圧電振動子 １５ 支持プレート １７ フレキシブル回路基板 DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator assembly 2 Piezoelectric plate 5 Active part 6 Inactive part 8 External signal electrode 11 External common electrode 12 Piezoelectric vibrator 15 Support plate 17 Flexible circuit board
Claims (1)
た複数の振動子と、該複数の振動子の一端を自由端とす
べく他端を固定する保持部材と、前記振動子の列設方向
の両端に一端が前記保持部材に固定されて形成された延
長部とを有し、前記振動子の表面に自由端側端面から固
定端側に延設された外部信号電極を、前記延長部の表面
に固定端側端面から自由端側に延設された外部共通電極
を有し、前記固定端側に回路基板を添設して、該回路基
板の巾方向中央部に形成した多数のリード線を前記振動
子上の外部信号電極に、前記回路基板の巾方向両側部に
形成したリード線を前記延長部上の外部共通電極にそれ
ぞれ接続させたことを特徴とするインクジェット記録ヘ
ッド用の圧電駆動体。A piezoelectric material layer and an internal electrode layer are alternately laminated.
A plurality of transducers and one end of each of the plurality of transducers as a free end.
A holding member for fixing the other end, and a direction in which the vibrators are arranged in a row.
One end is fixed to the holding member at both ends of
And a length portion, the external signal electrode that extends on the fixed end side from the free end side end surface on the front surface of the transducer is extended to the free end side from the fixed end side end face on the surface of the extended portion having an external common electrode, and additionally provided with a circuit board to said fixed end, a number of leads formed in the width direction central portion of the circuit board to the external signal electrode on the vibrator, the circuit board Wherein the lead wires formed on both sides in the width direction are respectively connected to external common electrodes on the extension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001181431A JP3327332B2 (en) | 2001-06-15 | 2001-06-15 | Piezoelectric driver for inkjet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001181431A JP3327332B2 (en) | 2001-06-15 | 2001-06-15 | Piezoelectric driver for inkjet recording head |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34853293A Division JP3221472B2 (en) | 1993-10-07 | 1993-12-27 | Piezoelectric driver for inkjet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001353873A JP2001353873A (en) | 2001-12-25 |
| JP3327332B2 true JP3327332B2 (en) | 2002-09-24 |
Family
ID=19021704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001181431A Expired - Lifetime JP3327332B2 (en) | 2001-06-15 | 2001-06-15 | Piezoelectric driver for inkjet recording head |
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| Country | Link |
|---|---|
| JP (1) | JP3327332B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7656022B2 (en) | 2005-07-20 | 2010-02-02 | Brother Kogyo Kabushiki Kaisha | Wiring board and manufacturing method for wiring board |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4984026B2 (en) * | 2006-02-28 | 2012-07-25 | セイコーエプソン株式会社 | Method for manufacturing piezoelectric element unit and fixing jig |
-
2001
- 2001-06-15 JP JP2001181431A patent/JP3327332B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7656022B2 (en) | 2005-07-20 | 2010-02-02 | Brother Kogyo Kabushiki Kaisha | Wiring board and manufacturing method for wiring board |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001353873A (en) | 2001-12-25 |
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