JP3322322B2 - Fluid heating device - Google Patents
Fluid heating deviceInfo
- Publication number
- JP3322322B2 JP3322322B2 JP24479393A JP24479393A JP3322322B2 JP 3322322 B2 JP3322322 B2 JP 3322322B2 JP 24479393 A JP24479393 A JP 24479393A JP 24479393 A JP24479393 A JP 24479393A JP 3322322 B2 JP3322322 B2 JP 3322322B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- heating
- fluid
- heater
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
- Coating Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体製造用洗浄液温
調装置、薬液温調装置、メッキ液温調装置さらに食品製
造用液温調整装置等に適用されて、主として純水や薬液
の加熱に用いられる流体加熱装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to a cleaning liquid temperature control device for semiconductor production, a chemical liquid temperature control device, a plating liquid temperature control device, and a liquid temperature control device for food production. The present invention relates to a fluid heating device used in the present invention.
【０００２】[0002]
【従来の技術】上記流体加熱装置は図１、図２に示すよ
うになっている。図中１は流体加熱装置の箱体であり、
この箱体１内に、この箱体１の横方向一方側に、複数の
加熱容器２ａ，２ａを上下方向に直列に接続してなる加
熱部２があり、他方側に、この加熱部２の加熱容器２
ａ，２ａに流体を供給循環させるための流体供給調整部
３が配列してある。そしてこの両者間に遮熱板４が介装
してある。またこれと箱体との間にも別の遮熱板４ａが
介装してある。2. Description of the Related Art The above-mentioned fluid heating device is shown in FIGS. In the figure, 1 is a box of the fluid heating device,
Inside the box 1, there is a heating unit 2 formed by connecting a plurality of heating vessels 2a, 2a in series in the vertical direction on one side in the horizontal direction of the box 1, and on the other side, Heating vessel 2
A fluid supply adjusting unit 3 for supplying and circulating a fluid to a and 2a is arranged. A heat shield plate 4 is interposed between the two. Another heat shield plate 4a is interposed between this and the box.
【０００３】上記加熱部２の加熱容器２ａは図３から図
４に示すようになっており、両端を側板５，５で閉じた
円筒状に形成された外管６と、この外管６の両側板５，
５を貫通して外管６内に、これと軸方向平行に複数本配
設した内管７と、外管６の下側下面に連設した流入管８
と、外管６の外側上面に連設した流出管９とからなって
いる。この加熱容器２ａの全ての構成部材は透明の石英
ガラスにて構成され、かつ溶接にてそれぞれが接合され
ている。内管７の本数は外管６の径によって適宜選択さ
れ、かつ各内管７を覆う流体厚が略同一になるように配
置されている。The heating vessel 2a of the heating section 2 is as shown in FIG. 3 to FIG. 4, and has a cylindrical outer tube 6 having both ends closed by side plates 5 and 5; Both side plates 5,
5, an inner pipe 7 provided in the outer pipe 6 in a plurality of axially parallel manners, and an inflow pipe 8 connected to a lower lower surface of the outer pipe 6.
And an outflow pipe 9 connected to the outer upper surface of the outer pipe 6. All the components of the heating vessel 2a are made of transparent quartz glass and are joined by welding. The number of the inner pipes 7 is appropriately selected depending on the diameter of the outer pipes 6, and the inner pipes 7 are arranged so that the fluid thickness covering each of the inner pipes 7 is substantially the same.
【０００４】上記加熱容器２ａの各内管７にはハロゲン
ランプを用いたランプヒータ１０が挿入支持される。こ
のランプヒータ１０の支持構造は図５に示すようになっ
ていて、ヒータ１０の両端のシール部１１が内管７より
完全に露出されるようになっており、そのシール部１１
の近傍の管壁がばね状支持具１２にて内管７の軸心部に
支持されている。ばね状支持具１２は例えば板ばねが用
いられ、折り曲げ中間部にヒータ１０の管壁を挟持する
ヒータ支持部１２ａが設けられ、折り曲げ基端部と両先
端部が内管７の内面に当接する形状になっており、一方
の先端部に内管７に設けた切欠７ａに係合する突起１２
ｂが設けられている。A lamp heater 10 using a halogen lamp is inserted and supported in each inner tube 7 of the heating vessel 2a. The supporting structure of the lamp heater 10 is as shown in FIG. 5, and the seal portions 11 at both ends of the heater 10 are completely exposed from the inner tube 7.
Is supported on the axial center of the inner tube 7 by a spring-like support 12. For example, a leaf spring is used as the spring-like support member 12, and a heater support portion 12 a that sandwiches the tube wall of the heater 10 is provided in the middle portion of the bend. A protrusion 12 which engages with a notch 7a provided in the inner tube 7 at one end thereof.
b is provided.
【０００５】[0005]
【発明が解決しようとする課題】このような従来の流体
加熱装置における流体加熱器では、（１）ヒータ１０の
配置が密である場合は、ランプヒータ相互の加熱により
各ヒータ１０の過熱及びランプヒータ１０の寿命が低下
し、（２）ランプヒータ１０の配置が疎である場合は光
の届く範囲外での加熱効率が低く、（３）特に大出力ヒ
ータ（ハロゲンランプ）を使用して高出力、高効率、コ
ンパクト、長寿命な流体加熱器を実現する場合に、加熱
容器２ａでのヒータ配置に関する最適形状が重要にな
る。In such a fluid heater in the conventional fluid heating apparatus, (1) when the heaters 10 are densely arranged, the overheating of each heater 10 and the lamp When the life of the heater 10 is shortened, (2) when the arrangement of the lamp heater 10 is sparse, the heating efficiency outside the range where light can reach is low, and (3) especially when a high-output heater (halogen lamp) is used. When realizing a fluid heater with high output, high efficiency, compactness, and long life, the optimum shape of the heater arrangement in the heating vessel 2a becomes important.
【０００６】本発明は上記のことにかんがみなされたも
ので、ハロゲンランプ等の大出力のランプヒータを複数
本用いた場合において、高出力、高効率、コンパクト
化、長寿命にすることができる流体加熱装置を提供する
ことを目的とするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above, and has been made in consideration of the above circumstances. In the case where a plurality of high-power lamp heaters such as halogen lamps are used, a fluid capable of achieving high output, high efficiency, compactness, and long life can be obtained. It is an object to provide a heating device.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係る流体加熱装置は、加熱部が、両端を側
板（５，５）にて閉じた円筒状の外管（６）と、前記側
板（５，５）を貫通して外管（６）の内部に設けた、複
数の円筒状の内管（７）と、内管（７）内に挿入して設
けられたハロゲンランプ（１０）とからなり、内管
（７）は、外管（６）の内面から離間する位置で、円周
方向に配置し、内管（７）の外面と、隣接する内管
（７）の外面との距離は、１５〜３０ｍｍに、外管
（６）の内面と、内管７の外面との距離は、７．５〜１
５ｍｍにした構成になっている。In order to achieve the above object, a fluid heating apparatus according to the present invention has a heating section in which both ends are located on both sides.
A cylindrical outer tube (6) closed by plates (5, 5) and said side
The multiple pipes are provided inside the outer pipe (6) through the plates (5, 5).
Number of cylindrical inner pipes (7) and inserted into the inner pipes (7)
Consisting of a halogen lamp (10)
(7) is a position separated from the inner surface of the outer tube (6),
The outer surface of the inner tube (7) and the adjacent inner tube
(7) The distance to the outer surface is 15 to 30 mm,
The distance between the inner surface of (6) and the outer surface of the inner tube 7 is 7.5 to 1
It is configured to be 5 mm .
【０００８】[0008]
【作 用】加熱容器２ａ内の流体は内管７内に挿入され
たハロゲンランプにて加熱される。このとき、ハロゲン
ランプからの発光波長帯は流体によって効率よく吸収さ
れる帯域を持つ。[Operation] The fluid in the heating vessel 2a is heated by a halogen lamp inserted into the inner tube 7. At this time, the emission wavelength band from the halogen lamp has a band that is efficiently absorbed by the fluid.
【０００９】[0009]
【実 施 例】本発明の実施例を図４及び図６（ａ），
（ｂ）、図７に基づいて説明する。出力が３〜４ＫＷの
ハロゲンランプを加熱容器２ａの各内管７内に挿入配置
する場合、その本数と加熱効率３とランプ端子温度Ｔの
関係は図７に示すようになる。この場合加熱容器２ａの
外径は一定にしてハロゲンランプの本数を３，４，６本
で実験を行なった。このハロゲンランプを挿入する内管
７は外管６から離間する位置で、かつ円周方向に配置さ
れている。 [Embodiment] FIG. 4 and FIG.
(B) will be described with reference to FIG. When a halogen lamp having an output of 3 to 4 KW is inserted and arranged in each of the inner tubes 7 of the heating vessel 2a, the relationship between the number thereof, the heating efficiency 3, and the lamp terminal temperature T is as shown in FIG. In this case, the experiment was carried out with three, four, and six halogen lamps while keeping the outer diameter of the heating vessel 2a constant. Inner tube for inserting this halogen lamp
Reference numeral 7 denotes a position spaced apart from the outer tube 6 and is arranged in the circumferential direction.
Have been.
【００１０】図７において、ａ，ａ′はランプ本数が３
本、ｂ，ｂ′は４本、ｃ，ｃ′は６本の場合の加熱効率
ηと端子温度Ｔをそれぞれ示す。またＲｅは加熱容器２
ａを流れる流体の流速を示す。加熱効率ηは、ランプヒ
ータの本数が多い方が、各ランプ間（内管７間）の水の
層の厚さが薄くなることから高くなるが、６本以上では
ランプ端子温度が３５０℃の許容温度を超えるため、ハ
ロゲンランプの寿命が低下してしまうため好ましくな
い。このことからこの実施例では、図７に示すように、
ハロゲンランプの本数を３，４，６本としている。In FIG. 7, a and a 'represent three lamps.
, B and b 'indicate the heating efficiency η and the terminal temperature T in the case of four, and c and c' indicate the case of six. Re is heating container 2
a shows the flow velocity of the fluid flowing through a. The heating efficiency η increases as the number of lamp heaters increases, because the thickness of the water layer between the lamps (between the inner tubes 7) decreases. Since the temperature exceeds the allowable temperature, the life of the halogen lamp is shortened, which is not preferable. From this, in this embodiment, as shown in FIG.
The number of halogen lamps is 3, 4, or 6.
【００１１】この実施例においては、図４及び図６
（ａ），（ｂ）に示すように、隣り合う内管７相互の対
向壁面間の距離Ｌ1 ，Ｌ2 を１５〜３０ｍｍの範囲に
し、また外管６と内管７相互の対向壁面間の距離Ｌ3 を
７．５〜１５ｍｍの範囲にした。その結果、図７にて明
らかなように、９５％以上の高い加熱効率が達成され
た。In this embodiment, FIGS.
As shown in (a) and (b), the distances L 1 and L 2 between the opposing wall surfaces of the adjacent inner tubes 7 are set in the range of 15 to 30 mm, and the distance between the opposing wall surfaces of the outer tube 6 and the inner tube 7 is set. the distance L 3 was in the range of 7.5~15mm. As a result, as apparent from FIG. 7, a high heating efficiency of 95% or more was achieved.
【００１２】上記隣り合う内管７相互及び外管６と内管
７相互の対向壁面間の距離Ｌ1 ，Ｌ2 及びＬ3 を１５〜
３０ｍｍ及び７．５〜１５ｍｍにした理由は、光源の波
長が１．３μｍ以上のランプヒータを使用する場合の水
の層の厚さが７．５〜１０ｍｍ程度では、光源からの熱
放射は全て水に吸収されることがわかったからで、１個
の熱源による水の層の厚さを７．５〜１５ｍｍ程度が適
当であることによる。The distances L 1 , L 2 and L 3 between the adjacent inner pipes 7 and between the opposing wall faces of the outer pipe 6 and the inner pipe 7 are set to 15 to
The reason for using 30 mm and 7.5 to 15 mm is that when the wavelength of the light source is 1.3 μm or more and the thickness of the water layer is about 7.5 to 10 mm, the heat radiation from the light source is all. Since it was found that the water layer was absorbed by water, it is appropriate that the thickness of the water layer by one heat source is about 7.5 to 15 mm.
【００１３】上記実施例において、内径が同一の外管６
において、内管７の本数を３，４，６にすることにより
それぞれの対向壁面間の各距離Ｌ1 ，Ｌ2 及びＬ3 が変
化するがいずれも７．５ｍｍ以上で、また３０ｍｍより
大きくない。なお、内管７の本数は外管６の大きさを変
えることにより、変化される。また図６（ｂ）に示す実
施例では、４本の内管７の内側の対向面管距離Ｌ1 ′
は、この配置上３０ｍｍ程度と大きくなる。In the above embodiment, the outer tube 6 has the same inner diameter.
, The distances L 1 , L 2 and L 3 between the opposing wall surfaces are changed by setting the number of the inner tubes 7 to 3, 4, and 6, but all of them are not less than 7.5 mm and not more than 30 mm. . The number of the inner tubes 7 can be changed by changing the size of the outer tube 6. Further, in the embodiment shown in FIG. 6B, the facing surface tube distance L 1 ′ inside the four inner tubes 7.
Is as large as about 30 mm due to this arrangement.
【００１４】[0014]
【発明の効果】本発明によれば、ハロゲンランプを用い
たランプヒータを複数本用いて流体を加熱するときに、
高出力、高効率、コンパクト化、長寿命を得ることがで
きる。According to the present invention, a halogen lamp is used.
The lamp heater plural used when heating the fluids,
High output, high efficiency, compactness, and long life can be obtained.
【図１】流体加熱装置の一例の概略的な構成を示す破断
側面図である。FIG. 1 is a cutaway side view showing a schematic configuration of an example of a fluid heating device.
【図２】流体加熱装置の一例の概略的な構成を示す破断
側面図である。FIG. 2 is a cutaway side view showing a schematic configuration of an example of a fluid heating device.
【図３】流体加熱装置に用いられる加熱容器の一部破断
正面図である。FIG. 3 is a partially cutaway front view of a heating container used in the fluid heating device.
【図４】図３のＡ矢視図である。FIG. 4 is a view taken in the direction of arrow A in FIG. 3;
【図５】ランプヒータの支持構造部を示す断面図であ
る。FIG. 5 is a cross-sectional view showing a support structure of the lamp heater.
【図６】（ａ），（ｂ）は同一径の外管内に内管を３
本、４本配置した例を示す実施例を示す断面図である。FIGS. 6 (a) and (b) show three inner tubes in an outer tube of the same diameter.
It is sectional drawing which shows the Example which shows the example which arrange | positioned four and four.
【図７】加熱容器の外管の径を同一にてランプヒータを
３，４，５本に変化した場合の流体の流速に対する加熱
効率と端子温度を示す線図である。FIG. 7 is a diagram showing the heating efficiency and the terminal temperature with respect to the flow velocity of the fluid when the diameter of the outer tube of the heating vessel is the same and the number of lamp heaters is changed to 3, 4, or 5;
１…箱体、２…加熱部、２ａ，２ａ…加熱容器、３…流
体供給調整部、４…遮熱板、５…側板、６…外管、７…
内管、７ａ…切欠、８…流入管、９…流出管、１０…ラ
ンプヒータ、１１…シール部、１２…ばね状支持具、１
２ａ…ヒータ支持部、１２ｂ…突起部。DESCRIPTION OF SYMBOLS 1 ... Box body, 2 ... Heating part, 2a, 2a ... Heating container, 3 ... Fluid supply adjustment part, 4 ... Heat shield plate, 5 ... Side plate, 6 ... Outer tube, 7 ...
Inner tube, 7a Notch, 8 Inflow tube, 9 Outflow tube, 10 Lamp heater, 11 Seal part, 12 Spring-like support, 1
2a: heater support, 12b: protrusion.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 平５−3843（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) F24H 1/10 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP 53843 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) F24H 1/10
Claims (1)
じた円筒状の外管（６）と、前記側板（５，５）を貫通
して外管（６）の内部に設けた、複数の円筒状の内管
（７）と、内管（７）内に挿入して設けられたハロゲン
ランプ（１０）とからなり、 内管（７）は、外管（６）の内面から離間する位置で、
円周方向に配置し、内管（７）の外面と、隣接する内管
（７）の外面との距離は、１５〜３０ｍｍに、外管
（６）の内面と、内管７の外面との距離は、７．５〜１
５ｍｍにした ことを特徴とした流体加熱装置。1. A heating unit has both ends closed by side plates (5, 5).
Penetrates the outer cylindrical tube (6) and the side plates (5, 5)
And a plurality of cylindrical inner tubes provided inside the outer tube (6)
(7) and a halogen inserted into the inner tube (7)
A lamp (10), and the inner tube (7) is separated from the inner surface of the outer tube (6) by:
Circumferentially arranged, the outer surface of the inner pipe (7) and the adjacent inner pipe
(7) The distance to the outer surface is 15 to 30 mm,
The distance between the inner surface of (6) and the outer surface of the inner tube 7 is 7.5 to 1
A fluid heating device having a diameter of 5 mm .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24479393A JP3322322B2 (en) | 1993-09-30 | 1993-09-30 | Fluid heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24479393A JP3322322B2 (en) | 1993-09-30 | 1993-09-30 | Fluid heating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0798152A JPH0798152A (en) | 1995-04-11 |
| JP3322322B2 true JP3322322B2 (en) | 2002-09-09 |
Family
ID=17124020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24479393A Expired - Fee Related JP3322322B2 (en) | 1993-09-30 | 1993-09-30 | Fluid heating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3322322B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1614979A4 (en) * | 2003-03-05 | 2011-06-08 | Panasonic Corp | Heating device and sanitary washing device using the same |
-
1993
- 1993-09-30 JP JP24479393A patent/JP3322322B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0798152A (en) | 1995-04-11 |
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