JP3316556B2 - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- JP3316556B2 JP3316556B2 JP34443895A JP34443895A JP3316556B2 JP 3316556 B2 JP3316556 B2 JP 3316556B2 JP 34443895 A JP34443895 A JP 34443895A JP 34443895 A JP34443895 A JP 34443895A JP 3316556 B2 JP3316556 B2 JP 3316556B2
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- Japan
- Prior art keywords
- main surface
- substrate
- piezoelectric
- electrode
- resonance element
- Prior art date
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は圧電共振子に関
し、特に長さ振動を利用し、たとえば発振子、フィルタ
などに用いられる圧電共振子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonator, and more particularly, to a piezoelectric resonator utilizing a longitudinal vibration and used for, for example, an oscillator or a filter.
【０００２】[0002]
【従来の技術】従来の圧電共振子の一例が実開昭５９−
９６２７号に開示されている。図７はこのような従来の
圧電共振子の一例を示す図解図である。図７に示す圧電
共振子１は共振素子２を含む。共振素子２は、厚み方向
に分極された短冊状の圧電体基板３を含む。圧電体基板
３の一方主面側には、その幅方向の中央に、溝４が形成
される。この溝４は、圧電体基板３の幅寸法に起因する
スプリアスを抑圧するためのものである。この圧電体基
板３の一方主面には、溝４の両側に、２つの主面電極５
ａおよび５ｂがそれぞれ形成される。また、圧電体基板
３の他方主面には、別の主面電極５ｃが形成される。こ
の共振素子２の２つの主面電極５ａおよび５ｂは、絶縁
体基板６の一方主面上の引き出し電極７ａに導電ペース
ト８で接着され、引き出し電極７ａに電気的に接続され
る。また、共振素子２の別の主面電極５ｃは、絶縁体基
板６の一方主面上の別の引き出し電極７ｂに、金属ワイ
ヤ９をはんだ付けすることによって電気的に接続され
る。なお、共振素子２は、金属製のキャップ（図示せ
ず）で覆われる。2. Description of the Related Art An example of a conventional piezoelectric resonator is disclosed in
No. 9627. FIG. 7 is an illustrative view showing one example of such a conventional piezoelectric resonator. The piezoelectric resonator 1 shown in FIG. The resonance element 2 includes a strip-shaped piezoelectric substrate 3 polarized in the thickness direction. On one main surface side of the piezoelectric substrate 3, a groove 4 is formed at the center in the width direction. The groove 4 is for suppressing spurious due to the width of the piezoelectric substrate 3. On one main surface of the piezoelectric substrate 3, two main surface electrodes 5 are provided on both sides of the groove 4.
a and 5b are formed respectively. Another main surface electrode 5c is formed on the other main surface of the piezoelectric substrate 3. The two main surface electrodes 5a and 5b of the resonance element 2 are adhered to a lead electrode 7a on one main surface of the insulating substrate 6 with a conductive paste 8, and are electrically connected to the lead electrode 7a. Further, another main surface electrode 5c of the resonance element 2 is electrically connected to another extraction electrode 7b on one main surface of the insulator substrate 6 by soldering a metal wire 9. The resonance element 2 is covered with a metal cap (not shown).
【０００３】[0003]
【発明が解決しようとする課題】ところが、図７に示す
圧電共振子１では、共振素子２の主面電極５ｃと絶縁体
基板６上の引き出し電極７ｂとの電気的な接続に金属ワ
イヤ９の配線という技術を必要とし、またその配線のた
めの装置に多額な投資とその装置を設置および使用する
ために大きなスペースとを必要とする。However, in the piezoelectric resonator 1 shown in FIG. 7, the metal wire 9 is used to electrically connect the main surface electrode 5c of the resonance element 2 and the extraction electrode 7b on the insulating substrate 6. It requires the technique of wiring and requires a large investment in equipment for the wiring and a large space for installing and using the equipment.
【０００４】さらに、図７に示す圧電共振子１では、共
振素子２の主面電極５ｃが金属ワイヤ９で絶縁体基板６
上の引き出し電極７ｂに電気的に接続されるので、共振
素子２を接着するための面積以外に金属ワイヤ９をはん
だ付けする引き出し電極７ｂのための面積が絶縁体基板
６に必要であり、完成寸法が必要以上に大きくなる。Further, in the piezoelectric resonator 1 shown in FIG. 7, the main surface electrode 5c of the resonance element 2 is
Since it is electrically connected to the upper extraction electrode 7b, an area for the extraction electrode 7b to which the metal wire 9 is soldered is required for the insulator substrate 6 in addition to the area for bonding the resonance element 2, thus completing the process. The dimensions become larger than necessary.
【０００５】それゆえに、この発明の主たる目的は、金
属ワイヤが不要であり、しかも、絶縁体基板の面積を小
さくすることができる、圧電共振子を提供することであ
る。[0005] Therefore, a main object of the present invention is to provide a piezoelectric resonator which does not require metal wires and can reduce the area of an insulating substrate.
【０００６】[0006]
【課題を解決するための手段】この発明は、共振素子を
有する圧電共振子であって、前記共振素子は、一方主面
側に溝が形成され、厚み方向に分極された圧電体基板、
前記圧電体基板の一方主面の前記溝の両側に形成される
２つの主面電極、前記圧電体基板の他方主面に形成され
る別の主面電極、および前記圧電体基板のノード部分に
形成され、前記２つの主面電極を電気的に接続する導電
部材である導電ペーストが前記溝を跨ぐように形成さ
れ、一方主面に前記圧電体基板の側面が対向する絶縁体
基板、前記絶縁体基板の一方主面に形成され、前記２つ
の主面電極のうちの一方の主面電極が導電部材で固着さ
れる引き出し電極、および前記絶縁体基板の一方主面に
形成され、前記別の主面電極が導電部材で固着される別
の引き出し電極を含む、圧電共振子である。According to the present invention, there is provided a piezoelectric resonator having a resonance element, wherein the resonance element has a groove formed on one main surface side and is polarized in a thickness direction.
Two main surface electrodes formed on both sides of the groove on one main surface of the piezoelectric substrate, another main surface electrode formed on the other main surface of the piezoelectric substrate, and a node portion of the piezoelectric substrate. A conductive paste, which is formed and is a conductive member for electrically connecting the two main surface electrodes , is formed so as to straddle the groove.
An insulator whose one main surface faces the side surface of the piezoelectric substrate.
A substrate, formed on one main surface of the insulator substrate;
One of the main surface electrodes is fixed with a conductive member.
Extraction electrode, and one main surface of the insulator substrate
And the another main surface electrode is fixed by a conductive member.
Of the piezoelectric resonator.
【０００７】[0007]
【０００８】また、この発明にかかる圧電共振子におい
て、共振素子がキャップで覆われることが後述の理由に
よって好ましい。In the piezoelectric resonator according to the present invention, it is preferable that the resonance element be covered with a cap for the reasons described below.
【０００９】[0009]
【作用】共振素子の圧電体基板の一方主面上の溝の両側
の２つの主面電極および圧電体基板の他方主面上の別の
主面電極を、絶縁体基板の一方主面上の引き出し電極お
よび別の引き出し電極にそれぞれ電気的に接続するため
には、２つの主面電極が導電部材で電気的に接続されて
いるので、２つの主面電極のうちの一方の主面電極およ
び別の主面電極を引き出し電極および別の引き出し電極
にたとえば導電ペーストでそれぞれ接着すればよい。そ
のため、共振素子の主面電極と絶縁体基板上の引き出し
電極とを電気的に接続するために、金属ワイヤが不要に
なる。The two main surface electrodes on both sides of the groove on one main surface of the piezoelectric substrate of the resonance element and another main surface electrode on the other main surface of the piezoelectric substrate are connected to one main surface of the insulator substrate. In order to electrically connect to the extraction electrode and another extraction electrode, respectively, the two main surface electrodes are electrically connected by a conductive member. Another main surface electrode may be bonded to the extraction electrode and another extraction electrode using, for example, a conductive paste. Therefore, a metal wire is not required for electrically connecting the main surface electrode of the resonance element and the extraction electrode on the insulator substrate.
【００１０】また、共振素子の主面電極を絶縁体基板上
の引き出し電極に電気的に接続するために、絶縁体基板
上の引き出し電極に金属ワイヤをはんだ付けする必要が
なくなるので、絶縁体基板の面積を小さくすることがで
きる。Also, since the main surface electrode of the resonance element is electrically connected to the lead electrode on the insulator substrate, it is not necessary to solder a metal wire to the lead electrode on the insulator substrate. Can be reduced in area.
【００１１】[0011]
【発明の効果】この発明によれば、金属ワイヤが不要で
あり、しかも、絶縁体基板の面積を小さくすることがで
きる、圧電共振子が得られる。そのため、この発明にか
かる圧電共振子では、金属ワイヤの材料を削減できると
ともに、金属ワイヤの配線装置が不要になる。According to the present invention, it is possible to obtain a piezoelectric resonator which does not require metal wires and can reduce the area of the insulating substrate. Therefore, in the piezoelectric resonator according to the present invention, the material of the metal wire can be reduced, and a wiring device for the metal wire becomes unnecessary.
【００１２】また、この発明にかかる圧電共振子におい
て、共振素子がキャップで覆われれば、共振素子が外部
から保護される。In the piezoelectric resonator according to the present invention, if the resonance element is covered with the cap, the resonance element is protected from the outside.
【００１３】この発明の上述の目的、その他の目的、特
徴および利点は、図面を参照して行う以下の発明の実施
の形態の詳細な説明から一層明らかとなろう。The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments of the present invention with reference to the accompanying drawings.
【００１４】[0014]
【発明の実施の形態】図１はこの発明の実施の形態の一
例を示す斜視図であり、図２はその分解斜視図である。
図１および図２に示す圧電共振子１０は共振素子１２を
含む。FIG. 1 is a perspective view showing an example of an embodiment of the present invention, and FIG. 2 is an exploded perspective view thereof.
The piezoelectric resonator 10 shown in FIGS. 1 and 2 includes a resonance element 12.
【００１５】共振素子１２は、厚み方向に分極された短
冊状の圧電体基板１４を含む。圧電体基板１４の一方主
面側には、その幅方向の中央に、溝１６が形成される。
この溝１６は、圧電体基板１４の幅寸法に起因するスプ
リアスを抑圧するためのものである。The resonance element 12 includes a strip-shaped piezoelectric substrate 14 polarized in the thickness direction. On one main surface side of the piezoelectric substrate 14, a groove 16 is formed at the center in the width direction.
The groove 16 is for suppressing spurious due to the width of the piezoelectric substrate 14.
【００１６】圧電体基板１４の一方主面には、溝１６の
両側に、２つの主面電極１８ａおよび１８ｂがそれぞれ
形成される。さらに、圧電体基板１４の他方主面には、
別の主面電極１８ｃが形成される。On one main surface of the piezoelectric substrate 14, two main surface electrodes 18a and 18b are formed on both sides of the groove 16, respectively. Further, on the other main surface of the piezoelectric substrate 14,
Another main surface electrode 18c is formed.
【００１７】また、圧電体基板１４のノード部分すなわ
ち圧電体基板１４の長手方向の中央部分の一方主面に
は、導電部材としての導電ペースト２０が溝１６を跨ぐ
ようにして主面電極１８ａから主面電極１８ｂにわたっ
て形成され、その導電ペースト２０で２つの主面電極１
８ａおよび１８ｂが電気的に接続される。On one main surface of the node portion of the piezoelectric substrate 14, that is, on one main surface of the central portion in the longitudinal direction of the piezoelectric substrate 14, a conductive paste 20 as a conductive member extends from the main surface electrode 18 a so as to extend over the groove 16. The two main surface electrodes 1 are formed over the main surface electrode 18b, and the conductive paste 20 forms the two main surface electrodes 1
8a and 18b are electrically connected.
【００１８】この共振素子１２の主面電極１８ａおよび
１８ｃは、絶縁体基板２２の一方主面上の引き出し電極
２４ａおよび２４ｂに導電ペースト２６ａおよび２６ｂ
でそれぞれ接着され、引き出し電極２４ａおよび２４ｂ
にそれぞれ電気的に接続される。この場合、共振素子１
２の圧電体基板１４の側面は、絶縁体基板２２の一方主
面に対向する。The main surface electrodes 18a and 18c of the resonance element 12 are connected to the lead electrodes 24a and 24b on one main surface of the insulating substrate 22 by the conductive pastes 26a and 26b.
And lead electrodes 24a and 24b
Are electrically connected to each other. In this case, the resonance element 1
The side surface of the second piezoelectric substrate 14 faces one main surface of the insulating substrate 22.
【００１９】また、共振素子１２は金属製のキャップ２
８で覆われ、キャップ２８の端部は絶縁体基板２２の一
方主面に接着される。The resonance element 12 is formed of a metal cap 2.
8 and the end of the cap 28 is adhered to one main surface of the insulator substrate 22.
【００２０】次に、この圧電共振子１０の製造方法の一
例について説明する。Next, an example of a method for manufacturing the piezoelectric resonator 10 will be described.
【００２１】まず、図３に示すように、圧電体からなる
親基板１３が準備される。この親基板１３は、複数の圧
電体基板１４となるものであって、圧電体基板１４の幅
の複数倍以上の幅と、圧電体基板１４の長さの複数倍以
上の長さとを有する。First, as shown in FIG. 3, a parent substrate 13 made of a piezoelectric material is prepared. The parent substrate 13 is to be a plurality of piezoelectric substrates 14, and has a width that is at least a multiple of the width of the piezoelectric substrate 14 and a length that is at least a multiple of the length of the piezoelectric substrate 14.
【００２２】親基板１３の一方主面には、主面電極１８
ａおよび１８ｂとなる電極１７ａが形成され、親基板１
３の他方主面には、主面電極１８ｃとなる電極１７ｂが
形成される。On one main surface of the mother substrate 13, a main surface electrode 18 is provided.
a and 18b are formed, and the parent substrate 1 is formed.
On the other main surface of No. 3, an electrode 17b to be a main surface electrode 18c is formed.
【００２３】そして、親基板１３は、それらの電極１７
ａおよび１７ｂ間に直流の高電圧を印加することによっ
て、厚み方向に分極される。The parent substrate 13 has the electrodes 17
By applying a high DC voltage between a and 17b, polarization is caused in the thickness direction.
【００２４】それから、図３の１点鎖線で示すように、
親基板１３の一方主面側および電極１７ａに多数の溝１
６が形成されるとともに、親基板１３、電極１７ａおよ
び１７ｂが各共振素子１２に用いられる各チップ１１に
切断される。このチップ１１は、図４に示すように、厚
み方向に分極された短冊状の圧電体基板１４を含み、圧
電体基板１４の一方主面側の幅方向の中央に溝１６が形
成され、圧電体基板１４の一方主面の溝１６の両側に主
面電極１８ａおよび１８ｂがそれぞれ形成され、圧電体
基板１４の他方主面に主面電極１８ｃが形成されてい
る。Then, as shown by the dashed line in FIG.
A large number of grooves 1 are formed on one main surface side of the parent substrate 13 and the electrode 17a.
6 is formed, and the parent substrate 13 and the electrodes 17 a and 17 b are cut into chips 11 used for the respective resonance elements 12. As shown in FIG. 4, the chip 11 includes a strip-shaped piezoelectric substrate 14 polarized in the thickness direction, and a groove 16 is formed at the center in the width direction on one main surface side of the piezoelectric substrate 14. Principal surface electrodes 18 a and 18 b are formed on both sides of the groove 16 on one main surface of the body substrate 14, and a main surface electrode 18 c is formed on the other main surface of the piezoelectric substrate 14.
【００２５】そして、このチップ１１には導電ペースト
２０が溝１６を跨ぐようにして主面電極１８ａから主面
電極１８ｂにわたって形成され、共振素子１２が形成さ
れる。Then, a conductive paste 20 is formed on the chip 11 from the main surface electrode 18a to the main surface electrode 18b so as to straddle the groove 16, and the resonance element 12 is formed.
【００２６】それから、図５および図６に示すように、
共振素子１２が絶縁体基板２２の一方主面に接着され
る。この場合、共振素子１２の主面電極１８ａおよび１
８ｃが絶縁体基板２２の一方主面上の引き出し電極２４
ａおよび２４ｂに導電ペースト２６ａおよび２６ｂでそ
れぞれ接着される。Then, as shown in FIGS. 5 and 6,
The resonance element 12 is bonded to one main surface of the insulator substrate 22. In this case, main surface electrodes 18a and 1
8 c is a lead electrode 24 on one main surface of the insulator substrate 22.
a and 24b are bonded with conductive pastes 26a and 26b, respectively.
【００２７】そして、共振素子１２は金属製のキャップ
２８で覆われ、キャップ２８の端部が絶縁体基板２２の
一方主面に接着され、圧電共振子１０が作られる。Then, the resonance element 12 is covered with a metal cap 28, and the end of the cap 28 is adhered to one main surface of the insulating substrate 22, thereby forming the piezoelectric resonator 10.
【００２８】この圧電共振子１０では、共振素子１２の
２つの主面電極１８ａおよび１８ｂと別の主面電極１８
ｃとを、絶縁体基板２２の一方主面上の引き出し電極２
４ａと別の引き出し電極２４ｂとにそれぞれ電気的に接
続するためには、２つの主面電極１８ａおよび１８ｂが
導電ペースト２０で電気的に接続されているので、２つ
の主面電極１８ａおよび１８ｂのうちの一方の主面電極
と別の主面電極１８ｃとを引き出し電極２４ａと別の引
き出し電極２４ｂとにたとえば導電ペースト２６ａおよ
び２６ｂでそれぞれ接着すればよい。そのため、共振素
子１２の主面電極１８ａ〜１８ｃと絶縁体基板２２上の
引き出し電極２４ａおよび２４ｂとを電気的に接続する
ために、金属ワイヤが不要になり、金属ワイヤの材料を
削減できるとともに、金属ワイヤの配線装置が不要にな
る。In the piezoelectric resonator 10, two main surface electrodes 18 a and 18 b of the resonance element 12 and another main surface electrode 18
c with the extraction electrode 2 on one main surface of the insulator substrate 22.
4a and another lead electrode 24b to be electrically connected to each other, since the two main surface electrodes 18a and 18b are electrically connected by the conductive paste 20, the two main surface electrodes 18a and 18b are electrically connected to each other. One main surface electrode and another main surface electrode 18c may be bonded to the extraction electrode 24a and another extraction electrode 24b, for example, using conductive pastes 26a and 26b, respectively. Therefore, a metal wire is not required to electrically connect the main surface electrodes 18a to 18c of the resonance element 12 and the extraction electrodes 24a and 24b on the insulator substrate 22, and the material of the metal wire can be reduced. A wiring device for metal wires is not required.
【００２９】また、この圧電共振子１０では、共振素子
１２の主面電極１８ａ〜１８ｃを絶縁体基板２２上の引
き出し電極２４ａおよび２４ｂに電気的に接続するため
には絶縁体基板２２上の引き出し電極２４ａおよび２４
ｂに金属ワイヤをはんだ付けする必要がなくなるので、
絶縁体基板２２の面積を小さくすることができる。In the piezoelectric resonator 10, the main electrodes 18 a to 18 c of the resonance element 12 are electrically connected to the extraction electrodes 24 a and 24 b on the insulator substrate 22. Electrodes 24a and 24
Since there is no need to solder a metal wire to b,
The area of the insulator substrate 22 can be reduced.
【００３０】さらに、この圧電共振子１０では、共振素
子１２がキャップ２８で覆われているので、共振素子１
２が外部から保護される。Further, in the piezoelectric resonator 10, since the resonance element 12 is covered with the cap 28, the resonance element 1
2 is protected from the outside.
【００３１】なお、上述の発明の実施の形態では圧電体
基板１４の幅方向の中央に溝１６が形成されているが、
この発明では圧電体基板の幅方向の中央からずれた部分
に溝が形成されてもよい。Although the groove 16 is formed at the center of the piezoelectric substrate 14 in the width direction in the embodiment of the present invention,
In the present invention, a groove may be formed in a portion of the piezoelectric substrate that is shifted from the center in the width direction.
【００３２】また、上述の発明の実施の形態では主面電
極１８ａおよび１８ｂが導電ペースト２０で電気的に接
続されているが、この発明では主面電極１８ａおよび１
８ｂは金属ワイヤで電気的に接続されてもよい。In the above-described embodiment of the present invention, main surface electrodes 18a and 18b are electrically connected by conductive paste 20, but in the present invention, main surface electrodes 18a and 1b are connected.
8b may be electrically connected by a metal wire.
【図１】この発明の実施の形態の一例を示す斜視図であ
る。FIG. 1 is a perspective view showing an example of an embodiment of the present invention.
【図２】図１に示す圧電共振子の分解斜視図である。FIG. 2 is an exploded perspective view of the piezoelectric resonator shown in FIG.
【図３】図１に示す圧電共振子の圧電素子に用いられる
チップを製造する工程の一例を示す斜視図である。FIG. 3 is a perspective view showing an example of a step of manufacturing a chip used for the piezoelectric element of the piezoelectric resonator shown in FIG.
【図４】圧電素子に用いられるチップを示す斜視図であ
る。FIG. 4 is a perspective view showing a chip used for a piezoelectric element.
【図５】圧電素子を絶縁体基板に接着した状態を示す斜
視図である。FIG. 5 is a perspective view showing a state where a piezoelectric element is bonded to an insulating substrate.
【図６】圧電素子を絶縁体基板に接着した状態を示す図
解図である。FIG. 6 is an illustrative view showing a state where a piezoelectric element is bonded to an insulator substrate;
【図７】従来の圧電共振子の一例を示す図解図である。FIG. 7 is an illustrative view showing one example of a conventional piezoelectric resonator.
１０ 圧電共振子 １２ 共振素子 １４ 圧電体基板 １６ 溝 １８ａ，１８ｂ，１８ｃ 主面電極 ２０ 導電部材 ２２ 絶縁体基板 ２４ａ，２４ｂ 引き出し電極 ２６ａ，２６ｂ 導電ペースト ２８ キャップ DESCRIPTION OF SYMBOLS 10 Piezoelectric resonator 12 Resonant element 14 Piezoelectric substrate 16 Groove 18a, 18b, 18c Main surface electrode 20 Conductive member 22 Insulator substrate 24a, 24b Leader electrode 26a, 26b Conductive paste 28 Cap
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H03H 9/10 H03H 9/13 H03H 9/17 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H03H 9/10 H03H 9/13 H03H 9/17
Claims (2)
体基板、 前記圧電体基板の一方主面の前記溝の両側に形成される
２つの主面電極、 前記圧電体基板の他方主面に形成される別の主面電極、
および前記圧電体基板のノード部分に形成され、前記２
つの主面電極を電気的に接続する導電部材である導電ペ
ーストが前記溝を跨ぐように形成され、 一方主面に前記圧電体基板の側面が対向する絶縁体基
板、 前記絶縁体基板の一方主面に形成され、前記２つの主面
電極のうちの一方の主面電極が導電部材で固着される引
き出し電極、および前記絶縁体基板の一方主面に形成さ
れ、前記別の主面電極が導電部材で固着される別の引き
出し電極を含む、 圧電共振子。1. A piezoelectric resonator having a resonance element, wherein the resonance element has a groove formed on one main surface side, and is polarized in a thickness direction. Two main surface electrodes formed on both sides of the groove, another main surface electrode formed on the other main surface of the piezoelectric substrate,
And formed at a node portion of the piezoelectric substrate,
The conductive member is a conductive member that electrically connects the two main surface electrodes.
An insulator base is formed so as to straddle the groove, and a side surface of the piezoelectric substrate faces one main surface.
Plate, formed on one main surface of the insulator substrate, the two main surfaces
One of the main surface electrodes is fixed by a conductive member.
Extraction electrode, and one of the main surfaces of the insulator substrate.
The other main surface electrode is fixed by a conductive member.
A piezoelectric resonator including an output electrode .
求項１に記載の圧電共振子。2. The piezoelectric resonator according to claim 1, wherein the resonance element is covered with a cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34443895A JP3316556B2 (en) | 1995-12-04 | 1995-12-04 | Piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34443895A JP3316556B2 (en) | 1995-12-04 | 1995-12-04 | Piezoelectric resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09162674A JPH09162674A (en) | 1997-06-20 |
| JP3316556B2 true JP3316556B2 (en) | 2002-08-19 |
Family
ID=18369270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34443895A Expired - Fee Related JP3316556B2 (en) | 1995-12-04 | 1995-12-04 | Piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3316556B2 (en) |
-
1995
- 1995-12-04 JP JP34443895A patent/JP3316556B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09162674A (en) | 1997-06-20 |
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