JP3310559B2 - Fluid heating device - Google Patents
Fluid heating deviceInfo
- Publication number
- JP3310559B2 JP3310559B2 JP29759596A JP29759596A JP3310559B2 JP 3310559 B2 JP3310559 B2 JP 3310559B2 JP 29759596 A JP29759596 A JP 29759596A JP 29759596 A JP29759596 A JP 29759596A JP 3310559 B2 JP3310559 B2 JP 3310559B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- heating device
- tubular body
- fluid heating
- halogen lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造設備等
における純水等の洗浄液、エッチング液、フォトレジス
トの剥離液等の流体を加熱するのに好適な流体加熱装置
の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a fluid heating apparatus suitable for heating a fluid such as a cleaning solution such as pure water, an etching solution, a photoresist stripping solution or the like in a semiconductor manufacturing facility or the like.
【０００２】[0002]
【従来の技術】従来、この種の流体加熱装置として、図
９〜図１０に示す流体加熱装置が知られている。図９〜
図１０において、Ａは石英ガラス製の筒体であり、この
筒体Ａは円筒形筒部１と、その両端面板部２，３と、一
方の端面板部２の下側部位に開口した流体流入口４と、
他方の端面板部３の上側部位に開口した流体流出口５と
で形成し、筒体Ａの内部に両端面板部２，３を貫通する
２本の石英ガラス製の管体６，６が設けられ、各管体６
内にハロゲンランプ７をそれぞれ挿入配置して構成した
ものである。2. Description of the Related Art Hitherto, a fluid heating device shown in FIGS. 9 and 10 has been known as this type of fluid heating device. FIG. 9-
In FIG. 10, A is a quartz glass cylinder, and this cylinder A is a fluid that is opened at the lower part of the cylindrical cylinder 1, the end plates 2, 3, and one end plate 2. Inflow port 4,
Two tubes 6 and 6 made of quartz glass are formed inside the cylindrical body A and are formed by a fluid outlet 5 opened at an upper portion of the other end plate 3 and penetrating the end plates 2 and 3. And each tube 6
And halogen lamps 7 are inserted and arranged therein.
【０００３】[0003]
【発明が解決しようとする課題】上記構成の流体加熱装
置によれば、筒体Ａの流入口４から流入して流出口５に
向けて流れる液体流路にハロゲンランプ７を配設してい
るので、ハロゲンランプの輻射光により液体を連続的に
加熱処理することができる。また、光源であるハロゲン
ランプの交換も可能である。According to the fluid heating apparatus having the above-described structure, the halogen lamp 7 is disposed in the liquid flow path flowing from the inlet 4 of the cylindrical body A and flowing toward the outlet 5. Therefore, the liquid can be continuously heated by the radiation of the halogen lamp. It is also possible to replace a halogen lamp as a light source.
【０００４】しかし、上記構成の流体加熱装置には、下
記の問題点がある。 １）上記流体加熱装置を半導体製造設備に組み込む場
合、筒体の流体流入口と流出口は、例えば、設備の処理
槽にチューブ、継手等でそれぞれ接続する必要がある
が、流体流入口と流出口が筒体の対向する両端側に分か
れて配置されているので、流体加熱装置を設置する場
合、筒体の対向位置にある流入口と流出口とでチューブ
接続作業をする必要があることから、作業性が悪い。 ２）また、前記接続作業を行なうために加熱装置の両端
部に作業スペースを要し、省スペースという点から問題
がある。 ３）また、石英ガラス製管体内のハロゲンランプも、筒
体の対向する両端側で電極リードの接続作業を行なわな
ければならないので、それなりの作業スペースを必要と
する。 ４）流体の流入口と流出口が筒体の対角線上の両端部位
にあることから、流出口の反対部分（イ）に液溜り（液
体滞留部分）が発生する傾向があり、この滞留部分では
薬液の温度が上昇し、対流が発生し、リン酸等の石英ガ
ラスに対して腐食性の流体の場合には、石英ガラスの筒
体および管体の部分的な腐食が起こる。 ５）ハロゲンランプを挿入配置するための管体は両端が
開いており、いずれの方向からも挿入可能であるが、そ
の反面、ハロゲンランプの挿入位置を正確に定めにく
く、また挿入後に位置ズレを生じやすい。[0004] However, the fluid heating device having the above configuration has the following problems. 1) When the above-described fluid heating device is incorporated in a semiconductor manufacturing facility, the fluid inlet and outlet of the cylinder need to be connected to a processing tank of the facility by a tube, a joint, or the like, respectively. Since the outlet is arranged separately on both ends of the cylinder facing each other, when installing a fluid heating device, it is necessary to perform tube connection work at the inflow port and the outflow port at the opposed position of the cylinder. Poor workability. 2) In addition, a work space is required at both ends of the heating device for performing the connection work, and there is a problem in that space is saved. 3) The halogen lamp in the quartz glass tube also requires a certain work space since the connection work of the electrode leads must be performed at both ends of the tube body facing each other. 4) Since the inflow port and the outflow port of the fluid are located at both ends on the diagonal line of the cylindrical body, a liquid pool (liquid retention section) tends to be generated at the opposite portion (a) of the outflow port. When the temperature of the chemical solution rises, convection occurs, and in the case of a fluid corrosive to quartz glass such as phosphoric acid, partial corrosion of the quartz glass cylinder and tube occurs. 5) The tube for inserting and arranging the halogen lamp is open at both ends and can be inserted from any direction. On the other hand, it is difficult to accurately determine the insertion position of the halogen lamp. Easy to occur.
【０００５】本発明は、上述した従来の流体加熱装置の
もつ欠点を解消するためになされたものであって、流体
流入口および流出口へのチューブ、継手等の接続作業が
容易にでき、しかも接続作業の省スペース化を可能と
し、かつ筒体の流体流路に滞留部分の発生がなく、流体
の円滑が流れを確保できる流体加熱装置を提供すること
を主たる目的としている。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks of the conventional fluid heating apparatus, and can easily connect tubes and joints to fluid inlets and outlets. A main object of the present invention is to provide a fluid heating device which enables a space saving in connection work, has no generation of a stagnation portion in a fluid flow path of a cylindrical body, and can ensure a smooth flow of fluid.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明による流体加熱装置は、石英ガラス製の筒体
と、前記筒体の長手方向にあって筒室を２つの分室に区
画すると共に筒体の一方の端部側に両分室を連通する開
口部を残すように設けられた仕切板部材と、前記両分室
を形成する筒体にあって前記仕切板部材の開口部と反対
側に設けられた流体流入口および流体流出口と、前記流
体流入口・流出口と同じ側に開口するように各分室内に
それぞれ挿入配置された石英ガラス製の管体と、前記各
管体内に設けられ、前記流体流入口・流出口側のみに電
極リードを有するハロゲンランプとから成ることを要旨
としている。In order to achieve the above object, a fluid heating apparatus according to the present invention comprises a quartz glass cylinder and a cylinder chamber divided into two compartments in the longitudinal direction of the cylinder. A partition plate member provided so as to leave an opening communicating the two compartments on one end side of the cylindrical body, and a side of the tubular body forming the two compartments opposite to the opening of the partition member. A fluid inlet and a fluid outlet provided in the quartz glass tubes inserted and arranged in the respective compartments so as to open on the same side as the fluid inlet and the outlet, and inside each of the tubes. And a halogen lamp having an electrode lead only on the fluid inlet / outlet side.
【０００７】[0007]
【発明の実施の形態】図１および図２に、本発明の好ま
しい実施の形態を示す。同図の流体加熱装置は、石英ガ
ラス製の筒体Ａ1と、その筒体の長手方向にあって筒室
を２つの分室ａ1，ａ2に区画すると共に筒体の一方の端
面側に両分室ａ1，ａ2を連結する開口部１３を残すよう
に設けた仕切板部材１４と、両分室ａ1，ａ2を形成する
筒体にあって仕切板部材の開口部と反対側に設けられた
流体流入口１５および流体流出口１６と、その流体流入
口・流体流出口側に開口するように各分室内に挿入配置
した石英ガラス製の管体１７，１８と、各管体内に設け
られ、前記流体流入口・流出口側のみに電極リードを有
するハロゲンランプ１９，２０とで構成している。1 and 2 show a preferred embodiment of the present invention. The fluid heating device shown in FIG. 1 divides a cylindrical chamber into two sub-chambers a 1 and a 2 in the longitudinal direction of a cylindrical body made of quartz glass and a longitudinal direction of the cylindrical body. the partition plate member 14 provided so as to leave an opening 13 connecting the two compartments a 1, a 2, on the opposite side of the opening of both compartments a 1, a 2 cylinder body there are partition plate member forming a The fluid inlet 15 and the fluid outlet 16 provided, the quartz glass tubes 17 and 18 inserted into the respective compartments so as to open to the fluid inlet and the fluid outlet side, and And halogen lamps 19 and 20 having electrode leads only on the fluid inlet / outlet side.
【０００８】[0008]
【実施例】図１〜図２に、本発明の一実施例を示す。同
図において、Ａ1は石英ガラス製の筒体、１０は筒体を
形成している円筒形筒部、１１，１２は筒部の長手方向
の両端を閉成している端面板部である。筒体Ａ1内に
は、一方の端面板部１１から他方の端面板部１２に向け
て張り出して筒室を上下２つの分室ａ1，ａ2に区画する
と共に一方の端面板部１２との間に両分室ａ1，ａ2を連
通する開口部１３を残すようにした仕切板部材１４が設
けられている。1 and 2 show an embodiment of the present invention. In the figure, A 1 is made of quartz glass tube body, 10 cylindrical tubular portion forming the cylindrical body, 11 and 12 is the end face plate portion which closes the longitudinal end of the tubular portion . Inside the cylindrical body A 1 , one end face plate portion 11 projects toward the other end face plate portion 12 to divide the cylinder chamber into two upper and lower compartments a 1 and a 2 . A partition plate member 14 is provided between the two compartments a 1 and a 2 so as to leave an opening 13 communicating therewith.
【０００９】前記分室ａ1，ａ2を形成している筒体Ａ1
には、仕切板部材１４の開口部１３のない端面板部１１
側で流体流入口１５、流体流出口１６がそれぞれ設けら
れている。前記各分室ａ1，ａ2には、流体の流入口・流
出口のある側の端面板部１１を貫通して他方の端面板部
１２に貫通するように挿入した石英ガラス製の管体１
７，１８がそれぞれ配設され、各管体内にハロゲンラン
プ１９，２０が挿入されている。１９ａ，２０ａはハロ
ゲンランプの前記流体流入口・流出口側のみに設けた電
極リードである。管体１７，１８が端面板部１１，１２
を貫通する部分は流体が漏れないように、溶着等による
シール手段が施されている。A cylindrical body A 1 forming the compartments a 1 and a 2.
The end plate 11 without the opening 13 of the partition plate member 14
A fluid inlet 15 and a fluid outlet 16 are provided on the side. In each of the compartments a 1 and a 2 , a quartz glass tube 1 inserted so as to penetrate through the end plate portion 11 on the side where the fluid inlet / outlet is provided and penetrate the other end plate portion 12.
7 and 18 are provided, respectively, and halogen lamps 19 and 20 are inserted into each tube. Reference numerals 19a and 20a denote electrode leads provided only on the fluid inlet / outlet side of the halogen lamp. Tubes 17 and 18 are end plate portions 11 and 12
Sealing means such as welding is applied to a portion penetrating through to prevent fluid leakage.
【００１０】図３は、前記筒体Ａ1内の仕切板部材１４
を、流入口１５と流出口１６とを結ぶ線に対してほぼ４
５度の角度で交わるように配設し、それにより各分室に
設けられた管体１７，１８の管口部と前記流入口１５お
よび流出口１６との間隔を広めた構成例を示している。[0010] Figure 3, the partition plate member of the cylindrical body A 1 14
With respect to the line connecting the inlet 15 and the outlet 16
5 shows an example of a configuration in which the space is provided so as to intersect at an angle of 5 degrees, thereby increasing the distance between the inlets of the pipes 17 and 18 provided in each of the compartments and the inlet 15 and the outlet 16. .
【００１１】図４は、前記筒体Ａ1（図３に示したも
の）を外装箱体２１に組み込んだ状態を示している。そ
の場合には、筒体Ａ1の外周側に断熱材、過昇温センサ
ー、漏液センサー等を取り付け、外装箱体内に固定す
る。また外装箱体の板面には、流体流入口１５、流出口
１６、管体１７，１８の管口部をそれぞれ外部に露出さ
せるための貫通穴を設けるが、これに対向する側の板面
には、貫通穴の加工は不要である。FIG. 4 shows a state in which the cylindrical body A 1 (shown in FIG. 3) is incorporated in an outer casing 21. In that case, the heat insulating material on the outer peripheral side of the cylindrical body A 1, excessive temperature sensor, fitted with a leakage sensor or the like is fixed to the outer box body. Further, a through hole for exposing the fluid inlet 15, the outlet 16, and the mouths of the pipes 17 and 18 to the outside is provided on the plate surface of the outer casing. Does not require processing of through holes.
【００１２】図５は、前記外装箱体２１を半導体製造設
備に組み込んだ状態を示したもので、２２はポンプ、２
３はフィルター、２４は処理槽、２５，２６は接続用チ
ューブ（またはパイプ）である。FIG. 5 shows a state in which the outer box 21 is incorporated in a semiconductor manufacturing facility.
3 is a filter, 24 is a processing tank, and 25 and 26 are connection tubes (or pipes).
【００１３】上記構成の流体加熱装置にあっては、筒体
Ａ1に形成された下側の分室ａ1の流体流入口１５から送
り込まれた流体は、まず分室ａ1の長手方向に流れる間
にハロゲンランプ１９の輻射熱により加熱され、さらに
開口部１３から上側の分室ａ2に入り、Ｕターンして長
手方向に流れる間にハロゲンランプ２０の輻射熱により
再び加熱され、流出口１６より筒体の外に送り出され
る。[0013] During In the fluid heating device configured as described above, the fluid fed from the fluid inlet 15 of the lower compartment a 1 formed in a tubular body A 1 is the first flow in the longitudinal direction of the compartment a 1 to be heated by radiation heat of the halogen lamp 19, further enters the opening 13 in the upper compartment a 2, is again heated by radiation heat of the halogen lamp 20 while flowing longitudinally U-turn, the cylindrical body from the outlet port 16 Sent out.
【００１４】上記流体加熱装置の使用によれば、下記す
る効果が得られる。 １）流体の流入口および流出口が筒体の一端側に集めら
れているので、チューブの接続作業を装置の片側で行な
えばよく、作業性が良い。 ２）ハロゲンランプの電極リードの接続作業も、流体の
流入口・流出口へのチューブ接続側で行なうことができ
る。 ３）図３に示すように、仕切板部材１４を傾けて管体１
７，１８と流体流入口１５および流出口１６との間隔を
広めた構成によれば、チューブ接続作業、ハロゲンラン
プの組み付け作業をより一層やりやすくすることができ
る。 ４）筒体の一端側でのチューブ接続作業および電極リー
ド接続作業のためのスペースは不要となるので、省スペ
ース化が図れる。また、図５に示すように、流体加熱装
置を例えば半導体製造設備に組み込む場合、流体の流入
口・流出口と反対側でのチューブ接続作業、ハロゲンラ
ンプ接続作業を行なうためのスペースを確保する必要が
なく、作業スペースは片側だけでよいから、その点で前
記流体加熱装置は設備への組み込みに有用である。 ５）例えば、流体加熱装置を、図４に示すように、外装
箱体に組み込む場合、筒体の流体の流入口・流出口の反
対側には、流体流入口・流出口、ハロゲンランプの電極
リード等がないので、平板状の外装材で閉密することが
できる。 ６）加えて前記流体加熱装置では、筒体の筒室を仕切板
部材で２つの分室に区画して流体の流路面積を小さく
し、流体の流速を速くする構成としているので、液溜り
が従来品に比較し少なくなり、筒体や管体を形成してい
る石英ガラスの侵食の発生が抑制される。According to the use of the fluid heating device, the following effects can be obtained. 1) Since the inflow port and the outflow port of the fluid are collected at one end of the cylindrical body, the connection work of the tubes may be performed on one side of the apparatus, and the workability is good. 2) The work of connecting the electrode lead of the halogen lamp can also be performed on the tube connection side to the fluid inlet / outlet. 3) As shown in FIG.
According to the configuration in which the spaces between the fluid inlets 7 and 18 and the fluid inlet 15 and the outlet 16 are widened, the tube connecting operation and the halogen lamp assembling operation can be further facilitated. 4) Space for tube connection work and electrode lead connection work on one end side of the cylinder is not required, so that space can be saved. Further, as shown in FIG. 5, when the fluid heating device is incorporated in, for example, a semiconductor manufacturing facility, it is necessary to secure a space for performing tube connection work and halogen lamp connection work on the side opposite to the fluid inlet / outlet. In that respect, the fluid heating device is useful for incorporation into equipment, since only one working space is required. 5) For example, as shown in FIG. 4, when the fluid heating device is incorporated in an outer casing, the fluid inlet / outlet and the electrode of the halogen lamp are provided on the opposite side of the fluid inlet / outlet of the cylindrical body. Since there are no leads or the like, the package can be closed with a flat outer package. 6) In addition, the fluid heating device has a configuration in which the cylindrical chamber of the cylindrical body is divided into two compartments by the partition plate member to reduce the flow area of the fluid and increase the flow velocity of the fluid. As compared with the conventional product, the occurrence of erosion of the quartz glass forming the cylindrical body or the tubular body is suppressed.
【００１５】図６〜図８に、本発明の他の実施例を示
す。これらの実施例は、図１〜図２に示した流体加熱装
置において、石英ガラス製管体１７，１８のハロゲンラ
ンプの挿入方向の先端管口を閉塞し、その閉塞部をハロ
ゲンランプ挿入時のストッパーおよび位置決めとして機
能するように構成したものである。6 to 8 show another embodiment of the present invention. In these embodiments, in the fluid heating apparatus shown in FIGS. 1 and 2, the front end ports of the quartz glass tubes 17 and 18 in the insertion direction of the halogen lamp are closed, and the closed portions are used when the halogen lamp is inserted. It is configured to function as a stopper and positioning.
【００１６】図６の実施例には、管体１７，１８を筒体
Ａ1の端面板部１１，１２に貫通支持させた構成におい
て、前記管体１７，１８に、ハロゲンランプの挿入方向
の先端管口を端壁部１７ａ，１８ａで閉じた管体を用い
た例を示している。上記のように、管体１７，１８のハ
ロゲンランプの挿入方向の先端管口を閉塞させた構成に
よれば、その閉塞部がハロゲンランプ挿入時のストッパ
ーおよび位置決めとして機能するので、ハロゲンランプ
を管体中の定められた位置に正確に挿入させることがで
き、しかも挿入後の位置ズレ防止効果も得られる。[0016] Example 6 has a configuration in which passed through support tube 17 to the end face plate portion 11 of the cylindrical body A 1, the tube 17, the insertion direction of the halogen lamp An example is shown in which a tubular body whose distal end is closed by end walls 17a and 18a is used. As described above, according to the configuration in which the distal end ports of the tubes 17 and 18 in the halogen lamp insertion direction are closed, the closed portions function as stoppers and positioning when the halogen lamp is inserted. It can be accurately inserted into a predetermined position in the body, and also has an effect of preventing displacement after insertion.
【００１７】図７の実施例には、管口を閉じた前記管体
１７，１８を筒体Ａ1の端面板部１２に貫通させること
なく、筒体内に引き込んだものを示している。この構成
によれば、図６と同様な効果が得られるばかりでなく、
流体による管体先端部の冷却効果が得られるので、ハロ
ゲンランプの耐久性向上にも役立つ。また、管体先端を
筒体内に引き込んで構成したものは、筒体を組み込む場
合の設置スペースの縮小化にも有利であり、管体先端を
誤って破損させるようなおそれもなくなる。[0017] Example 7 is without penetrating the tube body 17, 18 closes the pipe opening to the end face plate portion 12 of the cylindrical body A 1, shows what retracted into the cylinder body. According to this configuration, not only the same effect as in FIG. 6 can be obtained, but also
Since the effect of cooling the distal end portion of the tube by the fluid is obtained, it is also useful for improving the durability of the halogen lamp. Further, the configuration in which the distal end of the tubular body is drawn into the tubular body is advantageous in reducing the installation space when the tubular body is incorporated, and there is no possibility that the distal end of the tubular body may be erroneously damaged.
【００１８】図８の実施例には、前記管体１７，１８の
管口を筒体Ａ1の端面板部１２に、溶接より接合して閉
塞した例を示している。この構成によれば、ハロゲンラ
ンブ挿入時のストッパーおよび位置決め効果ならびに筒
体を組み込む場合の設置スペースの縮小効果が得られる
ばかりでなく、筒体に管体の貫通口を設けるための手数
を省くことができる。[0018] Example 8 is an end face plate portion 12 of the cylindrical body A 1 of the tube opening of the tubular body 17, an example of closing by bonding than welding. According to this configuration, not only the stopper and positioning effect at the time of inserting the halogen lamp, but also the effect of reducing the installation space when the cylindrical body is incorporated can be obtained, and the trouble of providing the through-hole of the tubular body in the cylindrical body can be omitted. Can be.
【００１９】[0019]
【発明の効果】以上に述べたように、本発明によれば、
チューブ、継手等の接続作業が容易にでき、しかもその
接続作業の省スペース化を可能とし、かつ流体流路に滞
留部分の発生がなく、流体の円滑な流れを確保できる流
体加熱装置が得られる。As described above, according to the present invention,
It is possible to obtain a fluid heating device that can easily connect tubes, joints, and the like, save space for the connection work, and generate no stagnation portion in the fluid flow path and can ensure a smooth flow of the fluid. .
【図１】本発明の一実施例を示す流体加熱装置の断面図
である。FIG. 1 is a sectional view of a fluid heating device according to an embodiment of the present invention.
【図２】流体加熱装置の正面図である。FIG. 2 is a front view of the fluid heating device.
【図３】本発明の他の実施例を示す流体加熱装置の正面
図である。FIG. 3 is a front view of a fluid heating device showing another embodiment of the present invention.
【図４】流体加熱装置を外装箱体に組み込んだ状態の斜
視図である。FIG. 4 is a perspective view showing a state in which the fluid heating device is incorporated in an outer box.
【図５】流体加熱装置の半導体製造設備に組み込んだ状
態の平面図である。FIG. 5 is a plan view showing a state in which the fluid heating device is incorporated in a semiconductor manufacturing facility.
【図６】本発明の他の実施例を示す流体加熱装置の断面
図である。FIG. 6 is a sectional view of a fluid heating device showing another embodiment of the present invention.
【図７】本発明の他の実施例を示す流体加熱装置の断面
図である。FIG. 7 is a cross-sectional view of a fluid heating device showing another embodiment of the present invention.
【図８】本発明の他の実施例を示す流体加熱装置の断面
図である。FIG. 8 is a sectional view of a fluid heating device showing another embodiment of the present invention.
【図９】従来の流体加熱装置の断面図である。FIG. 9 is a sectional view of a conventional fluid heating device.
【図１０】前記流体加熱装置の正面図である。FIG. 10 is a front view of the fluid heating device.
Ａ 従来の流体加熱装置を構成している筒体 １ 筒体の円筒形筒部 ２，３ 筒体の両端面板部 ４ 流体流入口 ５ 流体流出口 ６ 管体 ７ ハロゲンランプ Ａ1 本発明の流体加熱装置を構成している筒体 １０ 筒体の円筒形筒部 １１，１２ 筒体の両端面板部 ａ1，ａ2 分室 １３ 開口部 １４ 仕切板部材 １５ 流体流入口 １６ 流体流出口 １７，１８ 管体 １７ａ，１８ａ 管体の端壁部 １９，２０ ハロゲンランプ １９ａ，２０ａ 電極リード ２１ 外装箱体 ２２ ポンプ ２３ フィルター ２４ 処理槽 ２５，２６ 接続用チューブA cylindrical body constituting a conventional fluid heating device 1 cylindrical cylindrical section of cylindrical body 2 and 3 end plate sections of cylindrical body 4 fluid inlet 5 fluid outlet 6 tube 7 halogen lamp A 1 fluid of the present invention both end faces plate portion a 1 of the cylindrical tube portion 11 and 12 the cylindrical body of the tubular body 10 the cylindrical body constituting the heating apparatus, a 2 compartment 13 opening 14 the partition plate member 15 fluid inlet 16 fluid outlet 17, 18 Tube 17a, 18a End wall of tube 19, 20 Halogen lamp 19a, 20a Electrode lead 21 Outer box 22 Pump 23 Filter 24 Treatment tank 25, 26 Connection tube
Claims (4)
方向にあって筒室を２つの分室に区画すると共に筒体の
一方の端部側に両分室を連通する開口部を残すように設
けられた仕切板部材と、前記両分室を形成する筒体にあ
って前記仕切板部材の開口部と反対側に設けられた流体
流入口および流体流出口と、前記流体流入口・流出口と
同じ側に開口するように各分室内にそれぞれ挿入配置さ
れた石英ガラス製の管体と、前記各管体内に設けられ、
前記流体流入口・流出口側のみに電極リードを有するハ
ロゲンランプとから成ることを特徴とする流体加熱装
置。1. A cylindrical body made of quartz glass, and a cylindrical chamber is divided into two sub-chambers in a longitudinal direction of the cylindrical body, and an opening communicating with both sub-chambers is left at one end of the cylindrical body. Partition member provided as described above, a fluid inlet and a fluid outlet provided in the cylindrical body forming the two compartments on the side opposite to the opening of the partition plate member, and the fluid inlet / flow port A quartz glass tube inserted and arranged in each compartment so as to open on the same side as the outlet, and provided in each of the tubes,
And a halogen lamp having an electrode lead only on the fluid inlet / outlet side.
の先端管口を閉塞した管体が用いられ、その管体が閉塞
端部側で前記筒体の長手方向に対向する一方の端面板部
に貫通支持されている請求項１に記載の流体加熱装置。2. A tubular body having a closed distal end port in the direction of insertion of a halogen lamp is used as the tubular body, and the tubular body has one end face plate facing the longitudinal direction of the tubular body at a closed end side. The fluid heating device according to claim 1, wherein the fluid heating device is supported through the portion.
の先端管口を閉塞した管体が用いられ、その管体の閉塞
部側が前記筒体の長手方向に対向する一方の端面板部か
ら引き込まれている請求項１に記載の流体加熱装置。3. A tubular body having a closed distal end port in the direction of insertion of a halogen lamp is used as the tubular body, and a closed portion side of the tubular body extends from one end face plate facing the longitudinal direction of the tubular body. The fluid heating device of claim 1, wherein the fluid heating device is retracted.
口が前記筒体の長手方向に対向する端面板部によって閉
塞されている請求項１に記載の流体加熱装置。4. The fluid heating apparatus according to claim 1, wherein a tube opening of the tube in a halogen lamp insertion direction is closed by an end plate facing the longitudinal direction of the tube.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29759596A JP3310559B2 (en) | 1996-09-09 | 1996-10-18 | Fluid heating device |
| KR1019970046002A KR100445713B1 (en) | 1996-09-09 | 1997-09-05 | Fluid heating device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8-260322 | 1996-09-09 | ||
| JP26032296 | 1996-09-09 | ||
| JP29759596A JP3310559B2 (en) | 1996-09-09 | 1996-10-18 | Fluid heating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10132380A JPH10132380A (en) | 1998-05-22 |
| JP3310559B2 true JP3310559B2 (en) | 2002-08-05 |
Family
ID=26544557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29759596A Expired - Fee Related JP3310559B2 (en) | 1996-09-09 | 1996-10-18 | Fluid heating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3310559B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010110171A1 (en) * | 2009-03-24 | 2010-09-30 | 株式会社Kelk | Fluid heating device |
| JP2015178718A (en) * | 2014-03-19 | 2015-10-08 | アイシン精機株式会社 | Fluid heating device for sanitary washing apparatus |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6029851B2 (en) * | 2012-05-10 | 2016-11-24 | サンデンホールディングス株式会社 | Heating device |
| JP2016011794A (en) * | 2014-06-30 | 2016-01-21 | 住友電気工業株式会社 | Fluid heater |
-
1996
- 1996-10-18 JP JP29759596A patent/JP3310559B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010110171A1 (en) * | 2009-03-24 | 2010-09-30 | 株式会社Kelk | Fluid heating device |
| JP2010223517A (en) * | 2009-03-24 | 2010-10-07 | Kelk Ltd | Fluid heating device |
| US9062894B2 (en) | 2009-03-24 | 2015-06-23 | Kelk Ltd. | Fluid heating device |
| JP2015178718A (en) * | 2014-03-19 | 2015-10-08 | アイシン精機株式会社 | Fluid heating device for sanitary washing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10132380A (en) | 1998-05-22 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |