JP3284797B2 - Sample water sampling device - Google Patents
Sample water sampling deviceInfo
- Publication number
- JP3284797B2 JP3284797B2 JP30419594A JP30419594A JP3284797B2 JP 3284797 B2 JP3284797 B2 JP 3284797B2 JP 30419594 A JP30419594 A JP 30419594A JP 30419594 A JP30419594 A JP 30419594A JP 3284797 B2 JP3284797 B2 JP 3284797B2
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- JP
- Japan
- Prior art keywords
- water
- air
- chamber
- sampling
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Sampling And Sample Adjustment (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】この発明は、電子工業用超純水な
ど不純物濃度が非常に低い水（試料水）に含まれている
不純物濃度を分析測定するために採取容器に採水する採
取装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sampling apparatus for collecting water in a sampling vessel for analyzing and measuring the impurity concentration contained in water (sample water) having a very low impurity concentration, such as ultrapure water for the electronics industry. About.
【０００２】[0002]
【従来の技術】従来は蛇口から出る試料水を直接に採取
容器に採取するか、蛇口にチューブをつなぎ、このチュ
ーブから採取容器に試料水を採水している。2. Description of the Related Art Conventionally, sample water coming out of a faucet is directly collected in a sampling vessel, or a tube is connected to the faucet, and sample water is collected from the tube into the sampling vessel.
【０００３】[0003]
【発明が解決しようとする課題】このように蛇口から直
接、又はチューブから採取容器に試料水を採水すると、
蛇口、或いはチューブから出る試料水は空気に接触して
空気中の採取容器に入るため、空気中の塩化物イオン
や、ナトリウムイオンなどの不純物が僅かながら試料水
に混入する。試料水に本来含まれている不純物の濃度は
数ｐｐｂから数ｐｐｔのオーダで極めて低いため、採取
のために空気中から混入した不純物の濃度は本来含まれ
ている不純物の濃度と同等、又はそれ以上になってしま
い、試料水が本来含んでいる不純物の正確な濃度を測定
することができない。As described above, when the sample water is collected directly from the faucet or from the tube to the collection container,
Since the sample water coming out of the faucet or the tube comes into contact with the air and enters the collection container in the air, impurities such as chloride ions and sodium ions in the air slightly mix into the sample water. Since the concentration of impurities originally contained in the sample water is extremely low on the order of several ppb to several ppt, the concentration of impurities mixed from the air for sampling is equal to or lower than the concentration of impurities originally contained. As a result, the accurate concentration of the impurities originally contained in the sample water cannot be measured.
【０００４】空気中からの不純物の混入を防止するため
に、窒素ガスや、アルゴンガスなどの不純物を含まない
不活性ガスを充満した密閉容器中に採取容器を収納し、
この採取容器に試料水を採水することも行われている
が、これには採取場所に窒素ガスや、アルゴンガスなど
の不活性ガスの供給設備を設ける必要があり、設備にコ
ストが嵩む。[0004] In order to prevent impurities from entering the air, the sampling container is housed in a closed container filled with an inert gas containing no impurities such as nitrogen gas or argon gas.
Although sampling water is also collected in this sampling container, it is necessary to provide a facility for supplying an inert gas such as nitrogen gas or argon gas at the sampling place, which increases the cost of the equipment.
【０００５】[0005]
【課題を解決するための手段】この発明は、上述した問
題点を解消し、空気中の不純物を混入させることなく試
料水を採取容器、採水容器に採水できるようにしたので
あって、採取容器が室内に出入可能であると共に、外部
から室内の採取容器に試料水を供給でき、且つ採取容器
から溢れる試料水を貯える貯水部を備えた採水室と、採
水室へ送気する送気装置と、採水室への送気路中に設け
られ、下面が前記採水室の貯水部に連通した気液接触装
置と、採水室の貯水部にある水を上記気液供給装置に供
給して循環させるポンプを含む循環装置と、採水室に送
気された空気を送気装置に循環させる空気循環路とを備
えていることを特徴とする。尚、採水室への送気路中に
は気液接触装置のほかにエアフィルタを設けることが好
ましい。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and is capable of collecting a sample water into a sampling container and a water sampling container without mixing impurities in the air. The sampling container can be moved in and out of the room, and the sample water can be supplied from the outside to the collection container in the room, and the water is supplied to the water sampling room provided with a water storage portion for storing the sample water overflowing from the sampling container, and air is supplied to the water sampling chamber. An air supply device, a gas-liquid contact device provided in an air supply path to the water sampling chamber, and a lower surface communicating with a water storage portion of the water collection chamber; It is characterized by comprising a circulating device including a pump for supplying and circulating the device, and an air circulating path for circulating the air supplied to the water sampling chamber to the air supplying device. In addition, it is preferable to provide an air filter in the air supply path to the water sampling chamber in addition to the gas-liquid contact device.
【０００６】[0006]
【実施例】図示の実施例において、１０は採水室、２０
は送気装置、３０は気液接触装置、４０は水の循環装
置、５０は空気の循環路を示す。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the illustrated embodiment, reference numeral 10 denotes a water sampling chamber,
Denotes an air supply device, 30 denotes a gas-liquid contact device, 40 denotes a water circulation device, and 50 denotes an air circulation path.
【０００７】採水室１０は前面に両開きの観音扉１１，
１１を有し、この扉を開けて室内に採取容器１を出入す
ることができる。採水室はパンチングプレートによる多
孔の床板１２を有し、底板の上に採取容器を載置し、床
板１２の下は貯水部１３になっている。採水室の上壁
は、超純水の流路に設けた蛇口に一端を接続したチュー
ブ２を挿入する開口１４を有し、この開口１４に挿通し
たチューブの他端を底板１２上に載置した採取容器１の
底の近傍まで挿入することができる。開口１４の内径は
チューブ２の外径とほゞ等しく、その間から採水室内に
外気は殆ど進入しない。[0007] The water sampling chamber 10 has a double-sided double-sided door 11,
11, the door can be opened to allow the collection container 1 to enter and exit the room. The water sampling chamber has a perforated floor plate 12 formed by a punching plate. A sampling container is placed on the bottom plate, and a water storage section 13 is provided below the floor plate 12. The upper wall of the water sampling chamber has an opening 14 for inserting the tube 2 having one end connected to a faucet provided in the flow path of ultrapure water, and the other end of the tube inserted through the opening 14 is placed on the bottom plate 12. It can be inserted to the vicinity of the bottom of the placed collection container 1. The inside diameter of the opening 14 is almost equal to the outside diameter of the tube 2, and almost no outside air enters the water sampling chamber from between.
【０００８】図示の実施例では、採水室１０の開放した
背面にはデミスター１５の収容室、その背後に気液接触
装置３０の収容室、エアフィルタ６０の収容室、送気装
置２０としての送風ファン２１を内蔵した送風室２２が
連接してある。デミスター１５は採水室１０に送入する
空気の水滴除去用であって周知のものである。気液接触
装置３０は、ラシヒリング、レッシングリング、ベルル
サドルなどを充填した充填塔式でも、スプレー塔式、濡
れ壁式等の公知の任意なものでよい。又、エアフィルタ
６０はガラス繊維、合成繊維などのマットを積層状、濾
紙状、メンブレン状にしたものを室に充填してある。In the embodiment shown in the drawing, a housing chamber for the demister 15 is provided on the open back of the water sampling chamber 10, a housing chamber for the gas-liquid contact device 30, a housing chamber for the air filter 60, and an air supply device 20. An air blowing chamber 22 having a built-in air blowing fan 21 is connected. The demister 15 is for removing water droplets of the air sent into the water sampling chamber 10 and is well known. The gas-liquid contact device 30 may be a known type such as a packed tower type filled with a Raschig ring, a dressing ring, a Berl saddle, or the like, a spray tower type, a wet wall type, or the like. The air filter 60 is formed by laminating a mat of glass fiber, synthetic fiber, or the like into a laminate, filter paper, or membrane, and fills the chamber.
【０００９】送風ファン２１を運転すると、送風室２２
の空気はエアフィルタ６０、気液接触装置３０、デミス
ター１５を吹抜けて採水室１０に入り、多孔の底板１２
から底板と貯水部１３の水面との間の空間である空気の
循環路５０を経て送風室２２に循環する。つまり貯水部
１３は採水室１０の下から送風室２２の背後にまで延在
して水面上に空気の循環路５０を形成し、この循環路５
０を通過した空気は送風室の背後と装置の後壁５１との
間の空間５２を上昇し、送風室の後壁の吸込口２３から
送風室に流入する。そして、デミスターの収容室、及び
気液接触装置の収容室の下面も多孔の底板を有し、室内
の水を貯水部１３に排水するようにしてある。When the blower fan 21 is operated, the blower
Air flows through the air filter 60, the gas-liquid contact device 30, and the demister 15 and enters the water sampling chamber 10, where the porous bottom plate 12
From the bottom plate and the water surface of the water storage unit 13 through the air circulation path 50 which is a space between the bottom plate and the water surface of the water storage unit 13. That is, the water storage section 13 extends from below the water sampling chamber 10 to behind the blower chamber 22 to form an air circulation path 50 on the water surface.
The air passing through 0 rises in the space 52 between the back of the blower chamber and the rear wall 51 of the device, and flows into the blower chamber from the suction port 23 in the rear wall of the blower chamber. Further, the lower surfaces of the housing chamber of the demister and the housing chamber of the gas-liquid contact device also have a porous bottom plate, and water in the room is drained to the water storage unit 13.
【００１０】空気の循環路５０を確保するため、貯水部
１３には溢水管１６を設け、溢水管のレベル以上に水位
が上昇しないようにしてある。貯水部の水は循環ポンプ
４１と、循環管４２とからなる水の循環装置４０により
気液装置３０の上部の散水管３１に供給される。In order to secure the air circulation path 50, an overflow pipe 16 is provided in the water storage section 13 so that the water level does not rise above the level of the overflow pipe. The water in the water storage section is supplied to the water sprinkling pipe 31 above the gas-liquid device 30 by a water circulating device 40 including a circulating pump 41 and a circulating pipe 42.
【００１１】試料水を採取するには、採水室１０の扉１
１，１１を開き、多孔の底板１２上に採取容器１を載
せ、開口１４を通じ採水室の内部に突入したチューブ２
を採取容器に挿入し、その先端を容器内底部に位置させ
たのち扉を閉じ、チューブ２から採取容器内に試料水を
供給する。試料水の供給は、試料水が採取容器の口部か
ら溢れ出ても続け、これにより採取容器を試料水で洗浄
する。容器から溢れ出た試料水は採水室の多孔の底板１
２から貯水部１３に流れ落ちて貯まる。貯水部には予め
試料水の一部を入れておいてもよい。In order to collect the sample water, the door 1 of the water sampling chamber 10 is used.
1 and 11, the collection container 1 is placed on the porous bottom plate 12, and the tube 2 that has entered the water collection chamber through the opening 14 is opened.
Is inserted into the collection container, the tip is positioned at the bottom of the container, the door is closed, and the sample water is supplied from the tube 2 into the collection container. The supply of the sample water is continued even if the sample water overflows from the mouth of the collection container, thereby washing the collection container with the sample water. The sample water overflowing from the container is the porous bottom plate 1 of the water sampling chamber.
It flows down from 2 into the water storage part 13 and accumulates. A part of the sample water may be previously stored in the water reservoir.
【００１２】こうして採取容器への試料水の供給を続け
て貯水部内に試料水が貯り、循環ポンプ４１の運転が可
能になったら循環ポンプ、送風ファン２１を運転する。
この運転は貯水部に設けた水位計で自動的に開始するこ
とができる。循環ポンプの運転により貯水部の試料水は
循環管４２で気液接触装置３０の上部の散水管３１に供
給され、気液接触装置の内部を下向流して貯水部に排水
され、循環する。送風ファン２１の運転により送風室２
２内の空気は前述したようにエアフィルタ６０、気液接
触装置３０、デミスター１５を吹抜けて採水室１０に入
り、循環路５０、送風室の背後の空間５２を経て送風室
に循環する。採水室に入る空気は、エアフィルタ６０を
通過する際に含んでいる０．５μｍ以上の微細な粒子を
エアフィルタに捕捉除去され、気液接触装置３１を通過
する際に装置を下向流する水と接触し、含んでいる不純
物は水に溶解するか、水側に移行して除去されるため、
清浄である。In this way, the supply of the sample water to the collection container is continued, the sample water is stored in the water storage section, and when the operation of the circulation pump 41 becomes possible, the circulation pump and the blower fan 21 are operated.
This operation can be automatically started by a water level gauge provided in the water storage unit. By the operation of the circulation pump, the sample water in the water storage section is supplied to the water sprinkling pipe 31 above the gas-liquid contact device 30 by the circulation pipe 42, flows downward inside the gas-liquid contact device, and is drained to the water storage section and circulated. The operation of the blower fan 21 causes the blower chamber 2
As described above, the air in 2 passes through the air filter 60, the gas-liquid contact device 30, and the demister 15, enters the water sampling chamber 10, and circulates through the circulation path 50 and the space 52 behind the blowing chamber to the blowing chamber. When the air entering the water sampling chamber passes through the air filter 60, fine particles of 0.5 μm or more contained therein are caught and removed by the air filter, and flow downward through the device when passing through the gas-liquid contact device 31. The water contains impurities that dissolve in the water or migrate to the water side for removal.
It is clean.
【００１３】清浄な空気が供給される採水室内で採取容
器に試料水を供給し、２０〜６０分程度、容器から貯水
部にオーバーフローさせたら試料水の供給、及び循環ポ
ンプ４１、送風ファン２１の運転を停止する。この停止
はタイマーによって自動的に制御することができる。The sample water is supplied to the collection container in a water collection chamber to which clean air is supplied. After the sample water overflows from the container to the water storage section for about 20 to 60 minutes, the supply of the sample water, the circulation pump 41 and the blower fan 21 are performed. Stop operation of. This stop can be controlled automatically by a timer.
【００１４】次いで採水室の扉を開き、試料水が満水に
なった採取容器にキャップをして採水室から外に取出
し、採取を終了する。そして、試料水が入った採取容器
を分析装置がある場所に移動し、分析に供する。Next, the door of the water sampling chamber is opened, and the sampling vessel filled with sample water is capped and taken out of the water sampling chamber to complete the sampling. Then, the collection container containing the sample water is moved to a place where the analyzer is located, and is used for analysis.
【００１５】採取容器内の試料水は、エアフィルタと気
液接触装置とで清浄化された空気が採水室に吹込んでい
る間に採取容器に採取されているため不純物の混入は少
ない。従って、試料水が本来含んでいる極く低濃度の不
純物濃度を正確に分析、測定することができる。The sample water in the collection container is collected in the collection container while the air purified by the air filter and the gas-liquid contact device is blown into the water collection chamber, so that the amount of impurities is small. Therefore, the extremely low impurity concentration originally contained in the sample water can be accurately analyzed and measured.
【００１６】図示の実施例では送風室２２、エアフィル
タ６０、気液接触装置３０、デミスター１５、採水室１
０の順に配置したが、その順序を変え、気液接触装置、
送風室、エアフィルタ、デミスター、採水室の順に配置
し、空気循環路５０で空気を気液接触装置に循環させる
ようにしてもよい。更に、エアフィルタは省略してもよ
い。In the illustrated embodiment, the blower chamber 22, the air filter 60, the gas-liquid contact device 30, the demister 15, the water sampling chamber 1
0, but the order was changed to a gas-liquid contactor,
An air blower, an air filter, a demister, and a water sampling chamber may be arranged in this order, and air may be circulated through the air circulation path 50 to the gas-liquid contact device. Further, the air filter may be omitted.
【００１７】採取容器に採水した試料水を陽イオン用イ
オンクロマトグラフ、及び陰イオン用イオンクロマトグ
ラフに供給して分析した結果は次の通りである。 空気中で蛇口から採取容器に採水した場合の、塩化物
のイオン濃度は１４０ｐｐｔ、ナトリウムのイオン濃度
は６３ｐｐｔ、 空気中で蛇口から清浄なチューブで試料水を採取した
場合の塩化物のイオン濃度は５３ｐｐｔ、ナトリウムの
イオン濃度は３８ｐｐｔであった。これに対し、図示の
実施例により採水した場合の、塩化物のイオン濃度は３
０ｐｐｔ、ナトリウムのイオン濃度は２２ｐｐｔであ
り、，の採取方法にくらべて各イオンとも低い値を
示し、採取中の空気からの汚染が大幅に抑制されている
ことを明らかに示した。The results obtained by supplying the sample water collected in the collection container to a positive ion chromatograph and an anion negative chromatograph and analyzing the results are as follows. Chloride ion concentration of 140 ppt and sodium ion concentration of 63 ppt when water is sampled from a faucet into a sampling container in the air. Chloride ion concentration when water is sampled from a faucet in a clean tube in the air. Was 53 ppt and the ion concentration of sodium was 38 ppt. On the other hand, when water was collected according to the illustrated embodiment, the chloride ion concentration was 3%.
The ion concentration of 0 ppt and sodium ion was 22 ppt, and each ion showed a lower value than the sampling method of, indicating that contamination from air during sampling was significantly suppressed.
【００１８】[0018]
【発明の効果】本発明によって超純水などの試料水を、
空気からの汚染を防いで採取容器に採水できる。従っ
て、試料水が本来含んでいる極く低濃度の不純物濃度を
正確に求めることができ、電子工業、医薬等に安心して
使用できる基準が得られる。According to the present invention, sample water such as ultrapure water is
Water can be collected in the collection container while preventing contamination from the air. Therefore, the extremely low impurity concentration originally contained in the sample water can be accurately obtained, and a standard that can be used with confidence in the electronics industry, pharmaceuticals, and the like can be obtained.
【図１】本発明の採取装置の一実施例の断面図である。FIG. 1 is a cross-sectional view of one embodiment of a sampling device of the present invention.
【図２】図１の装置の斜視図である。FIG. 2 is a perspective view of the apparatus of FIG.
１ 採取容器 ２ 採取用チューブ １０ 採水室 １１ 扉 １２ 多孔の床板 １３ 貯水部 １４ チューブ用開口 １５ デミスター ２０ 送気装置 ２１ 送風ファン ２２ 送風室 ２３ 吸込口 ３０ 気液接触装置 ３１ 散水管 ４０ 水の循環装置 ４２ 循環管 ５０ 空気の循環路 ５１ 装置の後壁 ５２ 上下方向の空間 ６０ エアフィルタ DESCRIPTION OF SYMBOLS 1 Sampling container 2 Sampling tube 10 Sampling room 11 Door 12 Porous floor plate 13 Water storage part 14 Tube opening 15 Demister 20 Air blower 21 Blower fan 22 Blower room 23 Suction port 30 Gas-liquid contact device 31 Sprinkler tube 40 Water Circulation device 42 Circulation pipe 50 Air circulation path 51 Rear wall of device 52 Vertical space 60 Air filter
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平８−5523（ＪＰ，Ａ) 特開 平１−231984（ＪＰ，Ａ) 特開 平６−130007（ＪＰ，Ａ) 特開 平６−3229（ＪＰ，Ａ) 実開 平５−59287（ＪＰ，Ｕ) 実開 平４−136550（ＪＰ，Ｕ) 実開 平２−2647（ＪＰ，Ｕ) 実開 平２−115168（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 1/00 - 1/44 G01N 33/18 ＪＩＣＳＴファイル（ＪＯＩＳ)──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-8-5523 (JP, A) JP-A-1-231984 (JP, A) JP-A-6-130007 (JP, A) JP-A-6-60007 3229 (JP, A) Japanese Utility Model 5-59287 (JP, U) Japanese Utility Model 4-136550 (JP, U) Japanese Utility Model 2-2647 (JP, U) Japanese Utility Model 2-115168 (JP, U) (58) Field surveyed (Int.Cl. 7 , DB name) G01N 1/00-1/44 G01N 33/18 JICST file (JOIS)
Claims (2)
に、外部から室内の採取容器に試料水を供給でき、且つ
採取容器から溢れる試料水を貯える貯水部を備えた採水
室と、採水室へ送気する送気装置と、採水室への送気路
中に設けられ、下面が前記採水室の貯水部に連通した気
液接触装置と、採水室の貯水部にある水を上記気液供給
装置に供給して循環させるポンプを含む循環装置と、採
水室に送気された空気を送気装置に循環させる空気循環
路とを備えていることを特徴とする試料水の採取装置。1. A water collection chamber having a water storage section that allows a collection container to enter and exit a room, supplies sample water from the outside to a collection container in the room, and has a water storage portion that stores the sample water overflowing from the collection container. An air supply device for supplying air to the chamber, a gas-liquid contact device provided in an air supply path to the water collection chamber, and a lower surface communicating with a water storage section of the water collection chamber; Sample water, comprising: a circulating device including a pump for supplying and circulating water to the gas-liquid supply device, and an air circulating path for circulating the air supplied to the water sampling chamber to the air supply device. Sampling equipment.
いて、採水室への送気路中には気液接触装置のほかにエ
アフィルタを設けたことを特徴とする試料水の採取装
置。2. The sample water sampling apparatus according to claim 1, wherein an air filter is provided in addition to the gas-liquid contact device in an air supply path to the water sampling chamber. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30419594A JP3284797B2 (en) | 1994-11-15 | 1994-11-15 | Sample water sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30419594A JP3284797B2 (en) | 1994-11-15 | 1994-11-15 | Sample water sampling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08145983A JPH08145983A (en) | 1996-06-07 |
| JP3284797B2 true JP3284797B2 (en) | 2002-05-20 |
Family
ID=17930169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30419594A Expired - Fee Related JP3284797B2 (en) | 1994-11-15 | 1994-11-15 | Sample water sampling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3284797B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003004600A (en) * | 2001-06-15 | 2003-01-08 | Santoku Kagaku Kogyo Kk | Liquid sampling apparatus for trace analysis, method of sampling liquid specimen for trace analysis and method of introducing the specimen into analytical equipment |
| JP4507659B2 (en) * | 2004-03-25 | 2010-07-21 | 栗田工業株式会社 | Evaluation method of ultrapure water |
| JP5464009B2 (en) * | 2010-03-30 | 2014-04-09 | 栗田工業株式会社 | Water sampler |
| CN104596798A (en) * | 2015-01-20 | 2015-05-06 | 同济大学 | Rainfall runoff collector |
| JP6467577B2 (en) * | 2015-12-16 | 2019-02-13 | 特定非営利活動法人 日本環境監視協会 | Soil pore water collection device, soil pore water sulfide measurement device, and soil pore water dissolved ion measurement device |
-
1994
- 1994-11-15 JP JP30419594A patent/JP3284797B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08145983A (en) | 1996-06-07 |
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