JP3268045B2 - Method for controlling magnetic characteristics of magnetic recording medium and magnetic recording medium - Google Patents
Method for controlling magnetic characteristics of magnetic recording medium and magnetic recording mediumInfo
- Publication number
- JP3268045B2 JP3268045B2 JP00033493A JP33493A JP3268045B2 JP 3268045 B2 JP3268045 B2 JP 3268045B2 JP 00033493 A JP00033493 A JP 00033493A JP 33493 A JP33493 A JP 33493A JP 3268045 B2 JP3268045 B2 JP 3268045B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- recording medium
- substrate
- magnetic recording
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気記録媒体に関し、
特に、その磁気特性制御方法及び磁気記録媒体自体に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium,
In particular, the present invention relates to a method for controlling the magnetic characteristics and the magnetic recording medium itself.
【０００２】[0002]
【従来の技術】従来、コバルト等の強磁性体をフィルム
基材に斜め方向から蒸着することによりその方向に結晶
を成長させ、その蒸着の入射面に平行でフィルム基材に
沿う方向の磁気異方性を高めて磁気ヒステリシス特性の
保磁力、角形比を向上させ、磁気特性を向上させること
が知られている。2. Description of the Related Art Conventionally, a ferromagnetic material such as cobalt is vapor-deposited on a film substrate in an oblique direction to grow crystals in that direction, and a magnetic field parallel to the plane of incidence of the vapor deposition and along the film substrate. It is known that the anisotropy is enhanced to improve the coercive force and the squareness ratio of the magnetic hysteresis characteristics, thereby improving the magnetic characteristics.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、従来の
斜方蒸着の場合、磁気記録媒体の磁気特性は、蒸着入射
角の選択によってしか制御できなかった。したがって、
例えば１つの磁気記録媒体上の異なる位置で異なる磁気
特性を得ることはできなかった。また、従来の斜方蒸着
による場合は、磁気特性すなわち磁気異方性を高めよう
とすると、蒸着入射角を大きくする必要があり、その結
果、蒸着効率が低下するという欠点を有していた。However, in the case of the conventional oblique deposition, the magnetic characteristics of the magnetic recording medium can be controlled only by selecting the incidence angle of the deposition. Therefore,
For example, different magnetic characteristics could not be obtained at different positions on one magnetic recording medium. Further, in the case of conventional oblique deposition, in order to increase the magnetic properties, that is, the magnetic anisotropy, it is necessary to increase the deposition incident angle, and as a result, there is a disadvantage that the deposition efficiency is reduced.
【０００４】本発明はこのような状況に鑑みてなされた
ものであり、その目的は、蒸着基材の表面に方向性のあ
る微小凹凸パターンを設け、この凹凸パターンの方向に
対する斜方蒸着入射面の方向を適当に選択することによ
り、所望の磁気特性を得るようにした磁気記録媒体の磁
気特性制御方法と磁気記録媒体自体を提供することであ
る。The present invention has been made in view of such a situation, and an object of the present invention is to provide a directional fine concavo-convex pattern on the surface of a vapor-deposited base material, and to provide an oblique vapor deposition entrance surface in the direction of the concavo-convex pattern. It is an object of the present invention to provide a method for controlling the magnetic characteristics of a magnetic recording medium and a magnetic recording medium itself which can obtain desired magnetic characteristics by appropriately selecting the direction of the magnetic recording medium.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成する本発
明の磁気記録媒体の磁気特性制御方法は、基板表面に強
磁性体である金属又はその化合物を斜方蒸着して磁気記
録媒体を形成する際、基板としてその表面に方向性のあ
る微小凹凸パターンを有するものを用い、斜方蒸着入射
面に対する微小凹凸パターンの方向を選択することによ
って磁気特性を制御することを特徴とする方法である。According to the present invention, there is provided a method for controlling magnetic properties of a magnetic recording medium, comprising forming a magnetic recording medium by obliquely depositing a ferromagnetic metal or a compound thereof on a substrate surface. A method of controlling the magnetic characteristics by using a substrate having a directional fine concavo-convex pattern on the surface thereof and selecting the direction of the fine concavo-convex pattern with respect to the oblique deposition entrance surface. .
【０００６】また、本発明の磁気記録媒体は、基板の表
面に方向性のある微小凹凸パターンであってその微小凹
凸パターンの方向が位置的な分布を有する基板の表面
に、強磁性体である金属又はその化合物を斜方蒸着して
形成したものである。Further, the magnetic recording medium of the present invention is a ferromagnetic material on a surface of a substrate which is a micro uneven pattern having directionality on the surface of the substrate and the direction of the fine uneven pattern has a positional distribution. It is formed by obliquely depositing a metal or a compound thereof.
【０００７】[0007]
【０００８】[0008]
【作用】本発明においては、基板としてその表面に方向
性のある微小凹凸パターンを有するものを用い、斜方蒸
着入射面に対する微小凹凸パターンの方向を選択するこ
とによって磁気特性を制御するので、簡単な方法で磁気
特性を任意に選択することができる。また、斜方蒸着効
率を上げることができ、生産性を高めることができる。According to the present invention, the magnetic characteristics can be controlled by selecting the direction of the fine uneven pattern with respect to the obliquely vapor-deposited incident surface by using a substrate having a directional fine uneven pattern on the surface of the substrate. The magnetic properties can be arbitrarily selected in a simple manner. Further, the oblique evaporation efficiency can be increased, and the productivity can be increased.
【０００９】さらに、微小凹凸パターンの方向に位置的
な分布を持たせることにより、その分布を磁気的に読み
取ることができる磁気記録媒体を得ることができる。Further, by providing a positional distribution in the direction of the fine concavo-convex pattern, it is possible to obtain a magnetic recording medium capable of magnetically reading the distribution.
【００１０】[0010]
【実施例】以下、本発明の磁気記録媒体の磁気特性制御
方法及び磁気記録媒体の実施例と原理について説明す
る。本発明の原理を説明する前に、本発明の１実施例に
ついて説明する。強磁性体であるコバルトを斜方蒸着し
た。斜方蒸着は、図１に示すように、蒸着源１としてコ
バルトを用い、基板２表面に入射角θ＝７０°で行っ
た。入射角θは、基板２面の法線と蒸着方向のなす角度
である。なお、入射面は、法線と蒸着方向を含む面と定
義する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A description will now be given of embodiments and principles of a method for controlling magnetic characteristics of a magnetic recording medium according to the present invention and a magnetic recording medium. Before explaining the principle of the present invention, one embodiment of the present invention will be described. Cobalt, which is a ferromagnetic material, was obliquely deposited. As shown in FIG. 1, the oblique deposition was performed using cobalt as the deposition source 1 and incident on the surface of the substrate 2 at an incident angle θ = 70 °. Is the angle between the normal to the surface of the substrate 2 and the deposition direction. Note that the incident surface is defined as a surface including a normal line and a vapor deposition direction.
【００１１】基板２としては、ウレタンアクリレート５
０部、ポリエステルアクリレート４０部、ポリオールア
クリレート１０部からなる溶液を紫外線硬化させて作成
したものを用いた。そして、基板２として、表面が平坦
でなく、方向性のある微小凹凸パターンを設けたものを
用いた。その微小凹凸パターンは、表面にピッチ０．８
μｍ、深さ約０．１５μｍの直線レリーフ回折格子パタ
ーンである。As the substrate 2, urethane acrylate 5
A solution composed of 0 part, 40 parts of polyester acrylate, and 10 parts of polyol acrylate was prepared by ultraviolet curing. As the substrate 2, a substrate with a non-flat surface and a fine uneven pattern having directivity was used. The micro uneven pattern has a pitch of 0.8 on the surface.
It is a linear relief diffraction grating pattern of μm and a depth of about 0.15 μm.
【００１２】蒸着源１のるつぼとしては、Ａｌ2 Ｏ3 か
らなるものを用い、蒸着装置は、バッチ式電子ビーム
（ＥＢ）蒸着装置を用い、ＥＢ蒸着条件として、加速電
圧４ｋＶ、ビーム電流１００〜１２０ｍＡ、真空圧力
７．０×１０-5〜９．０×１０-5ｔｏｒｒ、成膜速度４
Å／ｓで、膜厚約１０００Åの蒸着を行った。As the crucible of the vapor deposition source 1, a crucible made of Al 2 O 3 is used. As the vapor deposition apparatus, a batch-type electron beam (EB) vapor deposition apparatus is used. 120 mA, vacuum pressure 7.0 × 10 −5 to 9.0 × 10 −5 torr, deposition rate 4
At 蒸 着 / s, vapor deposition was performed with a film thickness of about 1000Å.
【００１３】なお、蒸着の際の基板２表面の直線回折格
子の方向（凸条、凹溝の方向）と入射面の間の角度αを
回折格子方向αとした。The angle α between the direction of the linear diffraction grating (the direction of the ridges and grooves) on the surface of the substrate 2 at the time of vapor deposition and the incident surface was defined as the diffraction grating direction α.
【００１４】このような条件でコバルトを斜方蒸着して
得られた磁気記録媒体に磁場を、図２（ａ）及び（ｂ）
に模式的に示すように、基板２面（ｘ−ｙ平面に平行）
に沿って、入射面に平行（ｘ方向）、及び、入射面に垂
直（ｙ方向）に印加して、回折格子方向αとの関係で、
その保磁力Ｈｃ、飽和磁束Ｂｓ、残留磁束Ｂｒ、角形比
Ｒｓを測定したところ、次の表−１及び表−２のような
結果が得られた（図２中、基板２面の法線はｚ方向に選
ばれている。）。なお、測定機として振動試料型磁力計
（ＶＳＭ）を用い、外部磁界は１０ｋＯｅであった。A magnetic field is applied to the magnetic recording medium obtained by obliquely depositing cobalt under these conditions, as shown in FIGS. 2 (a) and 2 (b).
As schematically shown in FIG. 2, the substrate 2 surface (parallel to the xy plane)
Along the plane of incidence (x-direction) and perpendicular to the plane of incidence (y-direction), with respect to the diffraction grating direction α,
When the coercive force Hc, the saturation magnetic flux Bs, the residual magnetic flux Br, and the squareness ratio Rs were measured, the results shown in the following Tables 1 and 2 were obtained (in FIG. 2, the normal to the substrate 2 surface is selected in the z-direction.) A vibrating sample magnetometer (VSM) was used as a measuring instrument, and the external magnetic field was 10 kOe.
【００１５】 [0015]
【００１６】 [0016]
【００１７】以上の結果を図示すると、表−１が対応す
る入射面に平行に磁場を印加した時の磁気特性は図３の
ようになり、表−２が対応する入射面に垂直に磁場を印
加した時の磁気特性は図４のようになる。The above results are shown in Table 1. The magnetic characteristics when a magnetic field is applied in parallel to the corresponding incident surface in Table-1 are as shown in FIG. 3, and the magnetic field is perpendicular to the corresponding incident surface in Table-2. The magnetic characteristics when applied are as shown in FIG.
【００１８】次に、本発明の第２の実施例について説明
する。前述の実施例と同様の条件で鉄を斜方蒸着した。
その表−１、表−２と同様な結果をそれぞれ次の表−
３、表−４に示す。Next, a second embodiment of the present invention will be described. Iron was obliquely vapor-deposited under the same conditions as in the above embodiment.
The results similar to those in Tables 1 and 2 are shown in the following Tables, respectively.
3, shown in Table-4.
【００１９】 [0019]
【００２０】 [0020]
【００２１】以上の結果を図示すると、表−３が対応す
る入射面に平行に磁場を印加した時の磁気特性は図５の
ようになり、表−４が対応する入射面に垂直に磁場を印
加した時の磁気特性は図６のようになる。The above results are shown in Table 3. Table 3 shows the magnetic properties when a magnetic field is applied in parallel to the corresponding incident surface, as shown in FIG. 5, and Table 4 shows the magnetic field perpendicular to the corresponding incident surface. The magnetic properties when applied are as shown in FIG.
【００２２】以上の実施例から、基板２表面に方向性の
ある微小凹凸パターンを設けて、強磁性体である金属又
はその化合物を斜方蒸着する際、蒸着入射面に対する微
小凹凸パターンの方向が平行から垂直に変化するにつれ
て、磁場の方向が蒸着基板面に沿いかつ蒸着入射面に平
行である場合、例えば保磁力Ｈｃはα＝３０°以上では
急減し、その後はほぼ一定となり、角形比Ｒｓは徐々に
小さくなって、磁気記録特性が落ちる。また、磁場の方
向が蒸着基板面に沿いかつ蒸着入射面に垂直な場合、今
度は、保磁力Ｈｃは徐々に小さくなるが、代わって、角
形比Ｒｓは徐々に大きくなることが分る。According to the above embodiment, when providing a directional fine uneven pattern on the surface of the substrate 2 and obliquely depositing a metal or a compound thereof as a ferromagnetic material, the direction of the fine uneven pattern with respect to the deposition entrance surface is changed. When the direction of the magnetic field is parallel to the deposition substrate surface and parallel to the deposition entrance surface as the direction changes from parallel to vertical, for example, the coercive force Hc sharply decreases at α = 30 ° or more, and thereafter becomes substantially constant, and the squareness ratio Rs Gradually decreases, and the magnetic recording characteristics deteriorate. When the direction of the magnetic field is along the surface of the deposition substrate and perpendicular to the deposition entrance surface, the coercive force Hc gradually decreases, but the squareness ratio Rs gradually increases instead.
【００２３】このように、斜方蒸着入射面に対する微小
凹凸パターンの方向によって磁気特性が変化するのは、
簡単に次のように説明できる。As described above, the magnetic characteristics change depending on the direction of the minute concave / convex pattern with respect to the oblique deposition entrance surface.
It can be easily explained as follows.
【００２４】よく知られているように、斜方蒸着におい
ては、入射角が大きくなるにつれて磁気異方性が増大す
るため、蒸着基板面に沿いかつ蒸着入射面に平行な方向
では、保磁力、角形比が共に増大する傾向を示し、逆
に、蒸着基板面に沿いかつ蒸着入射面に垂直な方向では
これらが低下する傾向を示す。As is well known, in the oblique deposition, the magnetic anisotropy increases as the incident angle increases, so that the coercive force, Both the squareness ratios tend to increase, and conversely, they tend to decrease in the direction along the deposition substrate surface and perpendicular to the deposition incidence surface.
【００２５】ところで、例えば図２に示すように、蒸着
基板２表面に方向性のある微小凹凸パターンが設けられ
ている場合、そのパターンの方向αが小さくパターンの
凸条及び凹溝が入射面にほぼ平行であると、堆積膜厚の
多い凸条及び凹溝の頂上と谷底の部分では、入射角がほ
ぼθであるのに対し、凸条及び凹溝の斜面部分では、入
射角がθより大きくなるため、全体の磁気特性は、パタ
ーン無しのものと比べ、同等もしくは入射角が大きい場
合と同様な特性を示す。これとは反対に、微小凹凸パタ
ーンの方向αがほぼ９０°になると、パターンの凸条及
び凹溝が入射面にほぼ垂直になり、凸条及び凹溝の斜面
部分に対する実際の入射角は実効的により小さくなり、
したがって、全体の磁気特性は、入射角がより小さい場
合と同様な特性を示すことになる。When, for example, as shown in FIG. 2, a directional fine uneven pattern is provided on the surface of the deposition substrate 2, the direction α of the pattern is small, and the ridges and grooves of the pattern are formed on the incident surface. When they are substantially parallel, the incident angle is almost θ at the tops and valleys of the ridges and grooves with a large deposited film thickness, whereas the angle of incidence is greater than θ at the slopes of the ridges and grooves. As a result, the overall magnetic characteristics show the same or the same characteristics as those in the case where the incident angle is large as compared with those without a pattern. Conversely, when the direction α of the micro uneven pattern is approximately 90 °, the ridges and grooves of the pattern become substantially perpendicular to the incident surface, and the actual angle of incidence of the ridges and grooves with respect to the inclined surface is effective. The target becomes smaller,
Therefore, the overall magnetic characteristics show the same characteristics as when the incident angle is smaller.
【００２６】したがって、例えば、回折格子方向αを入
射面方向にとる場合、入射面に平行に磁場をかけるとす
ると、従来の方法で斜方蒸着する場合より、高保磁力の
媒体を得ることができる。また、回折格子方向αを入射
面に垂直にとる場合、入射面に垂直に磁場をかけるとす
ると、この方向での角形比が大きくなる。Therefore, for example, when the diffraction grating direction α is set in the direction of the incident surface, if a magnetic field is applied in parallel to the incident surface, a medium having a higher coercive force can be obtained than in the case of oblique deposition by the conventional method. . When the diffraction grating direction α is perpendicular to the incident surface, if a magnetic field is applied perpendicular to the incident surface, the squareness ratio in this direction increases.
【００２７】ところで、基板２上に方向性を有する微小
凹凸パターンを一様に設けるのではなく、例えば図７に
示すように、予め基板２の位置に応じて格子の方向αを
部分的に変化させて基板２表面を形成し、その表面全体
に一様に斜方蒸着して磁気記録媒体を構成すると、図７
の場合は、記録、読み取り磁場方向を入射面に平行に選
び、外部印加磁界１３００Ｏｅで一定の周波数の情報を
記録し、その記録情報を読み取ると、図７に出力電圧を
示すように、格子方向αによって変調された情報を読み
出すことができる。さらに、基板２表面の格子方向の変
化に対応して保磁力が変化するため、例えば入射面に平
行に外部印加磁界５００Ｏｅで一定周波数の情報を記録
し、同方向でその記録情報を読み取ると、図７のよう
に、高保磁力の部分には記録されていないことが分か
る。したがって、外部印加磁界の設定により基板２のこ
のような微小凹凸パターンの方向分布に対応した出力電
圧パターンを磁気的に認識することができる。記録され
た情報を消去して新たに別の情報を記録しようとして
も、蒸着方向と記録磁場方向の関係及び設定された外部
印加磁界の大きさが分からなければ、元の記録と同様な
記録をすることは困難である。そのため、微小凹凸パタ
ーン分布により例えばコード情報を表現する場合、この
ような磁気記録媒体は偽造防止に用いることができる。By the way, instead of uniformly providing a fine uneven pattern having directionality on the substrate 2, the direction α of the lattice is partially changed in advance according to the position of the substrate 2 as shown in FIG. By forming a magnetic recording medium by obliquely vapor-depositing the entire surface of the substrate 2 in FIG.
In the case of, the recording and reading magnetic field directions are selected in parallel to the incident surface, information of a constant frequency is recorded with an externally applied magnetic field of 1300 Oe, and when the recorded information is read, the grid direction is changed as shown in FIG. The information modulated by α can be read. Further, since the coercive force changes in accordance with the change in the lattice direction of the surface of the substrate 2, for example, information of a constant frequency is recorded in parallel with the incident surface with an externally applied magnetic field of 500 Oe, and the recorded information is read in the same direction. As shown in FIG. 7, it is found that no information is recorded in the high coercive force portion. Therefore, by setting the externally applied magnetic field, it is possible to magnetically recognize an output voltage pattern corresponding to the directional distribution of such a fine concavo-convex pattern on the substrate 2. Even if the recorded information is erased and new information is recorded, if the relationship between the deposition direction and the recording magnetic field direction and the magnitude of the set externally applied magnetic field are unknown, the same recording as the original recording is performed. It is difficult to do. Therefore, when, for example, code information is represented by a minute uneven pattern distribution, such a magnetic recording medium can be used for forgery prevention.
【００２８】本発明に用いられる強磁性体である金属又
はその化合物としては、Ｆｅ、Ｃｏ、Ｎｉ、Ｆｅ−Ｃ
ｏ、Ｆｅ−Ｃｒ、Ｆｅ−Ｖ、Ｆｅ−Ｎｉ、Ｆｅ−Ｐｔ、
Ｆｅ−Ｐｄ、Ｆｅ−Ｃｕ、Ｆｅ−Ｚｎ、Ｃｏ−Ｎｉ、Ｃ
ｏ−Ｃｒ、Ｃｏ−Ｖ、Ｃｏ−Ｃｕ、Ｃｏ−Ｍｎ、Ｃｏ−
Ｐ、Ｎｉ−Ｃｒ、Ｎｉ−Ｃｕ、Ｎｉ−Ｚｎ、Ｎｉ−Ｖ、
Ｎｉ−Ｍｎ、Ｆｅ−Ｃｏ−Ｎｉ、Ｆｅ−Ｍｎ−Ｃｏ、Ｆ
ｅ−Ｎｉ−Ｃｒ、Ｆｅ−Ｎｉ−Ｍｎ、Ｆｅ−Ｃｏ−Ｃ
ｒ、Ｃｏ−Ｍｎ−Ｎｉ、Ｃｏ−Ｎｉ−Ｐ、γ−Ｆｅ2 Ｏ
3 、Ｆｅ3 Ｏ4 、ＣｒＯ2 、あるいはこれらの混合物か
らなる群から選択することができる。Examples of the ferromagnetic metal or its compound used in the present invention include Fe, Co, Ni, and Fe—C.
o, Fe-Cr, Fe-V, Fe-Ni, Fe-Pt,
Fe-Pd, Fe-Cu, Fe-Zn, Co-Ni, C
o-Cr, Co-V, Co-Cu, Co-Mn, Co-
P, Ni-Cr, Ni-Cu, Ni-Zn, Ni-V,
Ni-Mn, Fe-Co-Ni, Fe-Mn-Co, F
e-Ni-Cr, Fe-Ni-Mn, Fe-Co-C
r, Co-Mn-Ni, Co-Ni-P, γ-Fe 2 O
3 , Fe 3 O 4 , CrO 2 , or a mixture thereof.
【００２９】また、蒸着基板２の表面の隣り合う凸条の
間隔であるピッチ幅は、強磁性体である金属の微粒子の
大きさが３００〜５００Åであることから、１０００Å
以上であれば、蒸着時の微粒子の結晶の成長に微小凹凸
パターンが影響を及ぼすことができるため望ましい。さ
らに、３０００Å以上のピッチ幅であれば、微小凹凸パ
ターンの斜面部分による斜方蒸着の入射角の増大の度合
を制御することができるため、より好ましい。The pitch width, which is the distance between adjacent ridges on the surface of the vapor deposition substrate 2, is 1000 ° because the size of the fine metal particles, which is a ferromagnetic material, is 300 to 500 °.
Above-mentioned is preferable because the fine uneven pattern can affect the growth of the fine particle crystal during the vapor deposition. Further, a pitch width of 3000 ° or more is more preferable because the degree of increase in the incident angle of oblique vapor deposition due to the slope portion of the fine uneven pattern can be controlled.
【００３０】このような方向性のある微小凹凸パターン
を有する基板に強磁性体である金属又はその化合物を斜
方蒸着して形成した磁気記録媒体の特徴をまとめておく
と、次のようになる。The characteristics of a magnetic recording medium formed by obliquely depositing a metal or a compound thereof as a ferromagnetic material on a substrate having such a directional fine uneven pattern are summarized as follows. .
【００３１】斜方蒸着入射面及び記録、読み取り磁場
方向に対する微小凹凸パターンの方向を選択することに
より、任意の磁気特性を得ることができる。 実効的により高入射角の蒸着ができるので、蒸着効率
を上げることができる。 微小凹凸パターン方向の位置的な分布を磁気的に読み
取ることができ、また、外部印加磁界の設定により偽造
が困難な記録も可能となる。An arbitrary magnetic property can be obtained by selecting the direction of the micro uneven pattern with respect to the oblique deposition incident surface and the recording and reading magnetic field directions. Since vapor deposition with a higher incident angle can be performed effectively, vapor deposition efficiency can be increased. The positional distribution in the direction of the fine concavo-convex pattern can be read magnetically, and recording that is difficult to forge can be performed by setting an externally applied magnetic field.
【００３２】以上、本発明の磁気記録媒体及びその磁気
特性制御方法について、実施例に基づいて説明してきた
が、本発明はこれら実施例に限定されず、種々の変形が
可能である。例えば、方向性のある微小凹凸パターンと
しては、直線レリーフ回折格子パターンのように周期性
のあるものに限らず、周期性がないものであってもよ
い。また、凸条と凹溝の組み合せからなるものでなくと
も、その原理から、方向性のある突起の集合体であれば
よい。As described above, the magnetic recording medium of the present invention and the method for controlling the magnetic characteristics thereof have been described based on the embodiments. However, the present invention is not limited to these embodiments, and various modifications are possible. For example, the directional fine uneven pattern is not limited to a periodic pattern such as a linear relief diffraction grating pattern, and may be a pattern having no periodicity. Further, even if it does not consist of a combination of a ridge and a groove, it may be an aggregate of directional projections according to the principle.
【００３３】[0033]
【発明の効果】以上の説明から明らかなように、本発明
の磁気記録媒体及びその磁気特性制御方法によると、基
板としてその表面に方向性のある微小凹凸パターンを有
するものを用い、斜方蒸着入射面に対する微小凹凸パタ
ーンの方向を選択することによって磁気特性を制御する
ので、簡単な方法で磁気特性を任意に選択することがで
きる。また、斜方蒸着効率を上げることができ、より生
産性を高めることができる。As is apparent from the above description, according to the magnetic recording medium of the present invention and the method for controlling its magnetic characteristics, a substrate having a directional fine uneven pattern on its surface is used for oblique deposition. Since the magnetic characteristics are controlled by selecting the direction of the minute concavo-convex pattern with respect to the incident surface, the magnetic characteristics can be arbitrarily selected by a simple method. Further, the oblique evaporation efficiency can be increased, and the productivity can be further improved.
【００３４】さらに、微小凹凸パターンの方向に位置的
な分布を持たせることにより、その分布を磁気的に読み
取ることができる磁気記録媒体を得ることができる。Further, by providing a positional distribution in the direction of the minute uneven pattern, it is possible to obtain a magnetic recording medium whose distribution can be read magnetically.
【図１】本発明の１実施例における斜方蒸着を説明する
ための図である。FIG. 1 is a diagram for explaining oblique vapor deposition in one embodiment of the present invention.
【図２】磁気記録媒体の回折格子方向、蒸着入射方向、
磁場方向の関係を模式的に示す図である。FIG. 2 shows a diffraction grating direction of a magnetic recording medium, a deposition incidence direction,
It is a figure which shows the relationship of a magnetic field direction typically.
【図３】１実施例の入射面に平行に磁場を印加した時の
磁気特性を示す図である。FIG. 3 is a diagram illustrating magnetic characteristics when a magnetic field is applied in parallel to an incident surface according to one embodiment.
【図４】１実施例の入射面に垂直に磁場を印加した時の
磁気特性を示す図である。FIG. 4 is a diagram illustrating magnetic properties when a magnetic field is applied perpendicularly to the incident surface according to one embodiment.
【図５】他の実施例の入射面に平行に磁場を印加した時
の磁気特性を示す図である。FIG. 5 is a diagram illustrating magnetic characteristics when a magnetic field is applied in parallel to the incident surface according to another embodiment.
【図６】他の実施例の入射面に垂直に磁場を印加した時
の磁気特性を示す図である。FIG. 6 is a diagram illustrating magnetic characteristics when a magnetic field is applied perpendicularly to an incident surface according to another embodiment.
【図７】位置に応じて格子方向に分布を持たせた磁気記
録媒体と読み取り出力電圧を示す図である。FIG. 7 is a diagram showing a magnetic recording medium having a distribution in a lattice direction according to a position and a read output voltage.
１…蒸着源 ２…基板 1. Deposition source 2. Substrate
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G11B 5/62 - 5/858 H01F 41/20 C23C 14/24 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G11B 5/62-5/858 H01F 41/20 C23C 14/24
Claims (2)
化合物を斜方蒸着して磁気記録媒体を形成する際、基板
としてその表面に方向性のある微小凹凸パターンを有す
るものを用い、斜方蒸着入射面に対する微小凹凸パター
ンの方向を選択することによって磁気特性を制御するこ
とを特徴とする磁気記録媒体の磁気特性制御方法。When a magnetic recording medium is formed by obliquely depositing a ferromagnetic metal or a compound thereof on a substrate surface, a substrate having a directional fine concavo-convex pattern on the surface thereof is used. A method for controlling the magnetic characteristics of a magnetic recording medium, wherein the magnetic characteristics are controlled by selecting the direction of a fine uneven pattern with respect to the one side of the vapor deposition incidence surface.
ーンであってその微小凹凸パターンの方向が位置的な分
布を有する基板の表面に、強磁性体である金属又はその
化合物を斜方蒸着して形成した磁気記録媒体。2. The method according to claim 1, wherein the micro-asperity pattern is directional on the surface of the substrate and the direction of the micro-asperity pattern is positional.
A magnetic recording medium formed by obliquely depositing a ferromagnetic metal or a compound thereof on a surface of a substrate having a cloth .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00033493A JP3268045B2 (en) | 1993-01-05 | 1993-01-05 | Method for controlling magnetic characteristics of magnetic recording medium and magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00033493A JP3268045B2 (en) | 1993-01-05 | 1993-01-05 | Method for controlling magnetic characteristics of magnetic recording medium and magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06203378A JPH06203378A (en) | 1994-07-22 |
| JP3268045B2 true JP3268045B2 (en) | 2002-03-25 |
Family
ID=11470998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00033493A Expired - Lifetime JP3268045B2 (en) | 1993-01-05 | 1993-01-05 | Method for controlling magnetic characteristics of magnetic recording medium and magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3268045B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05212256A (en) * | 1992-02-07 | 1993-08-24 | Mitsubishi Rayon Co Ltd | Heat-resistant porous membrane, heat-resistant hydrophilic porous membrane and their production |
| JP6776984B2 (en) * | 2017-03-31 | 2020-10-28 | Tdk株式会社 | Permanent magnet thin film |
-
1993
- 1993-01-05 JP JP00033493A patent/JP3268045B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06203378A (en) | 1994-07-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2601491B2 (en) | Magnetic disk structure and method of manufacturing the same | |
| JP2004164692A (en) | Magnetic recording medium and manufacturing method thereof | |
| US4643942A (en) | Perpendicular magnetic recording medium | |
| EP0304927B1 (en) | Perpendicular magnetic recording medium | |
| JPH0322211A (en) | Magnetic recording medium | |
| EP0099006B1 (en) | Perpendicular magnetic recording floppy disk | |
| JP3268045B2 (en) | Method for controlling magnetic characteristics of magnetic recording medium and magnetic recording medium | |
| GB2175014A (en) | Perpendicular magnetic recording medium | |
| US6911270B2 (en) | Master information carrier for magnetic transfer | |
| CN1149542C (en) | Master information medium and method of master information magnetic recording | |
| JP3165270B2 (en) | Optical magnetic information recording / reading method and optical magnetic recording medium | |
| GB2175013A (en) | Perpendicular magnetic recording medium | |
| JPH056738B2 (en) | ||
| JPH0454367B2 (en) | ||
| KR960010327B1 (en) | Magnetic recording medium | |
| US20020018916A1 (en) | Magnetic thin film and process for producing the same | |
| EP0169928A1 (en) | Magnetic recording medium | |
| US5134041A (en) | Magnetic storage medium containing at least two different populations of magnetic particles each population having a separate mean coercive field strength | |
| JP3520751B2 (en) | Perpendicular magnetic recording medium, method of manufacturing the same, and storage device using the same | |
| EP0227069A2 (en) | Middle layer material for magnetic disc | |
| JPH0532809B2 (en) | ||
| JPH03173928A (en) | Production of magnetic disk | |
| JPS61224105A (en) | Vertical magnetic recording and reproducing system | |
| WO2004010420A1 (en) | Patterned media optimized for data readback | |
| JPH04330638A (en) | Production of magnetic disk |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090111 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100111 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110111 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110111 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120111 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120111 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130111 Year of fee payment: 11 |
|
| EXPY | Cancellation because of completion of term |