JP3209977B2 - 半導体モジュ−ル - Google Patents

半導体モジュ−ル

Info

Publication number
JP3209977B2
JP3209977B2 JP09641499A JP9641499A JP3209977B2 JP 3209977 B2 JP3209977 B2 JP 3209977B2 JP 09641499 A JP09641499 A JP 09641499A JP 9641499 A JP9641499 A JP 9641499A JP 3209977 B2 JP3209977 B2 JP 3209977B2
Authority
JP
Japan
Prior art keywords
pad
lead
printed wiring
wiring board
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP09641499A
Other languages
English (en)
Other versions
JP2000294892A (ja
Inventor
章 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP09641499A priority Critical patent/JP3209977B2/ja
Priority to US09/522,924 priority patent/US6498308B2/en
Priority to TW089104572A priority patent/TW507502B/zh
Priority to KR1020000012954A priority patent/KR100789306B1/ko
Publication of JP2000294892A publication Critical patent/JP2000294892A/ja
Application granted granted Critical
Publication of JP3209977B2 publication Critical patent/JP3209977B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3421Leaded components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09372Pads and lands
    • H05K2201/09427Special relation between the location or dimension of a pad or land and the location or dimension of a terminal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09736Varying thickness of a single conductor; Conductors in the same plane having different thicknesses
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10689Leaded Integrated Circuit [IC] package, e.g. dual-in-line [DIL]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Description

【発明の詳細な説明】
【0001】
【発明の属する技術分野】本発明は、半導体モジュ−ル
の構造、特に半導体装置が搭載されるプリント配線基板
に設けられる接合部のパターン形状に関するものであ
る。
【0002】
【従来の技術】図3は、従来の表面実装型半導体装置部
品が搭載されたモジュール製品の一つであるメモリモジ
ュールの外形図である。
【0003】半導体素子を内蔵した表面実装型半導体パ
ッケージ(例えば、T-SOP(Thin―Small Outline Packag
e))101は、メモリモジュールに実装される。また、電
気的回路を形成するために、複数の表面実装型半導体パ
ッケージ101は、プリント配線基板(例えば、ガラスエ
ポキシ樹脂基板、 セラミック基板等)102上に形成され
る。プリント配線基板102は、絶縁性物質上に導電性パ
ターンを設けた構造を有する。また、モジュール製品を
外部装置(例えば、パーソナルコンピュータ等)に電気
的に接続するために、複数の外部端子103が、プリント
配線基板102上に設けられている。
【0004】図4は、図3中のメモリモジュ−ルのa―a
線切り欠き断面を示した図である。表面実装型半導体パ
ッケージ101は、集積回路が形成された半導体素子20
1と、半導体素子201の電気的信号を外部に伝達するため
のリード202と、半導体素子201の電気的信号をリード20
2に伝達するための金属細線(例えば、金線、アルミ線
等)203と、半導体素子201及び金属細線203を外力から
防ぐための封止樹脂(例えば、エポキシ樹脂、シリコー
ン樹脂等)204と、導電性パターンが形成されたプリン
ト配線基板(例えば、ガラスエポキシ基板、セラミック
基板等)205と、プリント配線基板205上に設けられた半
導体素子201の電気的信号を外部に伝達するためのパッ
ド206と、リード202とパッド206を電気的に接続する導
電性物質(例えば、半田、導電性樹脂、Agペースト
等)207とから構成される。上記のように構成された表
面実装型半導体パッケージ101が、プリント配線基板205
の表面及び裏面に実装されている。
【0005】図5は、図3中のb部の拡大平面図である。
プリント配線基板301上に設けられたパッド302は、
リード304の幅より若干大きい形状であった。
【0006】図6は、図3中のメモリモジュ−ルのc−c
線切り欠き断面を示した図である。
【0007】表面実装型半導体パッケージ101のリ−ド4
03と、プリント配線基板401に設けられたパッド402と
は、導電性物質404を介して電気的に接続されている。
【0008】ここで、パッド402は、リード403より幅を
大きく設定されている。
【0009】
【発明が解決しようとする課題】しかしながら、上述し
た従来の半導体モジュ−ルでは、パッドとリードとを電
気的に接続するための導電性物質において、半導体パッ
ケージとプリント配線基板との間の熱膨張係数(一般的
に半導体ハ゜ッケーシ゛は、5〜7ppm、プリント配線基板
は16ppmである。)の違いにより、導電性物質内に
応力が加わることクラックが発生する。これにより、パ
ッドとリードとの間が電気的に導通不可能という問題が
生じていた。
【0010】本発明は、上記問題を解決し、クラックの
発生によるリ−ドとパッド間の非導通を防止する半導体
モジュ−ルを提供することを目的とする。
【0011】
【課題を解決するための手段】上記目的を達成するため
に、本発明の半導体モジュ−ルは、集積回路が形成され
たチップと、前記集積回路と電気的に接続された第1の
外部接続端子と、第2の外部接続端子を有するプリント
配線基板と、前記第1及び第2の外部接続端子同士を電気
的に接続する導電性物質とを有し、前記導電性物質が前
記第2の外部接続端子の側壁を覆うように形成されてい
ることを特徴とする。
【0012】
【発明の実施の形態】図1は、本発明の第1の実施の形
態の半導体モジュ−ルを示す断面図である。半導体モジ
ュ−ルは、導電性パターンが設けられたプリント配線基
板601、例えば、ガラスエポキシ樹脂基板、セラミック
基板等と、集積回路が形成されたチップ及び、この集積
回路と電気的に接続された第1の外部接続端子としての
リ−ド602とからなる半導体パッケージと、 プリント配
線基板601に形成された第2の外部接続端子としてのパッ
ド603と、リード602とパッド603を電気的に接続するた
めの導電性物質604、例えば、半田、導電性樹脂、Ag
ペースト等とから構成される。
【0013】ここで、本発明の第1の実施の形態の特徴
は、パッド603が、リード602の幅と実質的に同一、若し
くはそれ以下の幅を有するように形成し、これによっ
て、導電性物質604が、パッド603の側面まで覆うように
形成されることである。
【0014】以上のように第1の実施の形態によれば、
パッド603に対する導電性物質604の接合面積を増加する
ことになり、半導体パッケージとプリント配線基板601
の熱膨張係数の違いによる導電性物質604に発生するク
ラックを抑えることが可能となる。
【0015】図2は、本発明の第2の実施の形態の半導体
モジュ−ルを示す断面図である。半導体モジュ−ルは、
導電性パターンが設けられたプリント配線基板901、例
えば、ガラスエポキシ樹脂基板、セラミック基板等と、
集積回路が形成されたチップ及び、この集積回路と電気
的に接続された第1の外部接続端子としてのリ−ド902と
からなる半導体パッケージと、 プリント配線基板901に
形成された第2の外部接続端子としてのパッド903と、リ
ード902とパッド903を電気的に接続するための導電性物
質904、例えば、半田、導電性樹脂、Agペースト等と
から構成される。
【0016】ここで、本発明の第2の実施の形態の特徴
は、パッド903が、リード902の幅と実質的に同一、若し
くはそれ以下の幅を有するように形成し、かつ凸形状を
有する。これによって、導電性物質904が、パッド903の
側面まで覆い、かつパッド903の凸形状部の側面まで覆
うようになる。また、凸形状部は、エッチングまたは、
ミーリング等にて形成する。
【0017】以上のように第2の実施の形態によれば、
第1の実施の形態パッド903に対する導電性物質904の接
合面積を増加することになり、半導体パッケージとプリ
ント配線基板901の熱膨張係数の違いによる導電性物質9
04に発生するクラックを抑えることが可能となる。
【0018】上述しました各実施の形態では、表面実装
型半導体パッケージを適用した半導体装置を例に説明し
たが表面実装型半導体パッケージに限らずBGA(Ba
llGrid Ally)/CSP(Chip Saze
Package)等のパッケージを実装する半導体装
置にも用いることもできる。
【0019】
【発明の効果】本発明の半導体モジュ−ルによれば、パ
ッドが、リードの幅と実質的に同一、若しくはそれ以下
の幅を有するように形成し、これによって、導電性物質
が、パッドの側面まで覆うように形成される。従って、
パッドに対する導電性物質の接合面積を増加することに
なり、半導体パッケージとプリント配線基板の熱膨張係
数の違いによる導電性物質に発生するクラックを抑える
ことが可能となる。
【図面の簡単な説明】
【図1】本発明の第1の実施の形態の半導体モジュ−ル
を示す断面図である。
【図2】本発明の第2の実施の形態の半導体モジュ−ル
を示す断面図である。
【図3】従来のメモリモジュールの外形図である。
【図4】図4は、図3中のメモリモジュ−ルのa―a線切
り欠き断面を示した図である。
【図5】図5は、図3中のb部の拡大平面図である。
【図6】図6は、図3中のメモリモジュ−ルのc−c線切
り欠き断面を示した図である。
【符号の説明】
601:プリント配線基板 602:リ−ド 603:パッド 604:導電性物質
フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H05K 1/18 H01L 25/04 H01L 25/18 H05K 3/34 501

Claims (2)

    (57)【特許請求の範囲】
  1. 【請求項1】 集積回路が形成されたチップと、前記集
    積回路と電気的に接続される第1の部分とパッドと対向
    する第2の部分とを有するリードと、前記チップ及び前
    記リードの第1の部分とを封止する封止樹脂とからなる
    樹脂封止型半導体パッケージと、 前記リードの第2の部分における幅と実質的に等しい幅
    を有する前記パッドが形成された主表面を有し、前記樹
    脂封止型半導体パッケージが搭載される プリント配線基
    板と、前記リードの第2の部分と前記パッドとを 電気的に接続
    する導電性物質であって、前記リードの第2の部分の側
    面及び前記パッドの側面を前記プリント配線基板の主表
    面に至って覆う導電性物質とを有することを特徴とする
    半導体モジュール。
  2. 【請求項2】前記パッドは、凸形状であることを特徴と
    する請求項1記載の半導体モジュール。
JP09641499A 1999-04-02 1999-04-02 半導体モジュ−ル Expired - Fee Related JP3209977B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP09641499A JP3209977B2 (ja) 1999-04-02 1999-04-02 半導体モジュ−ル
US09/522,924 US6498308B2 (en) 1999-04-02 2000-03-10 Semiconductor module
TW089104572A TW507502B (en) 1999-04-02 2000-03-14 Semiconductor module
KR1020000012954A KR100789306B1 (ko) 1999-04-02 2000-03-15 반도체 모듈

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09641499A JP3209977B2 (ja) 1999-04-02 1999-04-02 半導体モジュ−ル

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KR20110058061A (ko) * 2009-11-25 2011-06-01 삼성전기주식회사 다이 실장기판 및 그 제조방법
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US6498308B2 (en) 2002-12-24
KR100789306B1 (ko) 2007-12-28
US20020097566A1 (en) 2002-07-25
JP2000294892A (ja) 2000-10-20
TW507502B (en) 2002-10-21
KR20000071442A (ko) 2000-11-25

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