JP3194588B2 - Hydrostatic gas bearing - Google Patents
Hydrostatic gas bearingInfo
- Publication number
- JP3194588B2 JP3194588B2 JP00945991A JP945991A JP3194588B2 JP 3194588 B2 JP3194588 B2 JP 3194588B2 JP 00945991 A JP00945991 A JP 00945991A JP 945991 A JP945991 A JP 945991A JP 3194588 B2 JP3194588 B2 JP 3194588B2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- pressure
- rotating shaft
- movable
- pressure chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、回転軸をスラスト方向
に静圧支持する静圧気体軸受に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrostatic gas bearing for supporting a rotary shaft in a thrust direction by static pressure.
【０００２】[0002]
【従来の技術】一般に静圧気体軸受は軸受剛性が低い問
題があるが、軸受剛性を向上させたスラスト静圧気体軸
受として図３に示すものが公知である。このスラスト静
圧気体軸受は、回転軸１のフランジ部２を挟むように微
小な軸受隙間３，４を存して対向するスラスト軸受面を
もつ可動ブッシュ５を回転軸１の軸方向に移動可能に設
け、この可動ブッシュ５の軸方向両端をケーシング６と
の間に微小な隙間７，８を存して対向させた構成となっ
ている。2. Description of the Related Art Generally, a static pressure gas bearing has a problem of low bearing stiffness, but a thrust static pressure gas bearing having improved bearing stiffness is known as shown in FIG. In this thrust hydrostatic gas bearing, a movable bush 5 having opposing thrust bearing surfaces can be moved in the axial direction of the rotating shaft 1 so as to sandwich the flange portion 2 of the rotating shaft 1 with minute bearing gaps 3 and 4 therebetween. , And both ends of the movable bush 5 in the axial direction are opposed to the casing 6 with small gaps 7 and 8 therebetween.
【０００３】上記した構成の静圧気体軸受においては、
回転軸１が変位した場合に可動ブッシュ５との一方の軸
受隙間３もしくは４が減少するため、可動ブッシュ５と
ケーシング６との隙間７もしくは８の圧力が上昇して可
動ブッシュ５を回転軸１の変位方向と反対方向に変位さ
せる抗力を発生させることにより、軸受剛性を高めんと
するものである。[0003] In the above-described hydrostatic gas bearing,
When the rotating shaft 1 is displaced, one of the bearing gaps 3 and 4 with the movable bush 5 is reduced, so that the pressure in the gap 7 or 8 between the movable bush 5 and the casing 6 increases, and the movable bush 5 is moved to the rotating shaft 1. By generating a drag force displacing in the direction opposite to the displacement direction, the bearing rigidity is enhanced.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記し
た構成の静圧気体軸受においては、可動ブッシュ５が回
転軸１のフランジ部２を挟む両面対向式のスラスト軸受
であるため、回転テーブル等に用いる場合にはその剛性
が材料の弾性変形により著しく低下する問題がある。However, in the hydrostatic gas bearing having the above-described structure, the movable bush 5 is a double-sided opposed thrust bearing that sandwiches the flange portion 2 of the rotating shaft 1 and is therefore used for a rotary table or the like. In this case, there is a problem that the rigidity is significantly reduced due to elastic deformation of the material.
【０００５】しかも両面対向式であるため、回転軸１の
フランジ部２と可動ブッシュ５および可動ブッシュ５と
ケーシング６との隙間が通常で２０〜４０μと狭いこと
とあいまって静圧気体軸受の加工および組付けが難しい
という問題があった。In addition, since the gap between the flange portion 2 of the rotary shaft 1 and the movable bush 5 and the gap between the movable bush 5 and the casing 6 are usually as narrow as 20 to 40 μm because of the both-side facing type, machining of the hydrostatic gas bearing is performed. There was a problem that assembly was difficult.
【０００６】[0006]
【課題を解決するための手段】 本発明は、上記した従
来の問題点に鑑みてなされたもので、回転軸をスラスト
方向に静圧支持する静圧気体軸受において、軸受本体と
前記回転軸に設けたフランジ部との間に可動ブッシュを
回転軸の軸線方向に移動可能に設け、この可動ブッシュ
と前記軸受本体との間に圧力室を形成し、前記可動ブッ
シュと前記回転軸のフランジ部との間にスラスト静圧気
体軸受の軸受隙間を形成し、前記回転軸に負荷が作用し
て前記軸受隙間が狭められるときに前記圧力室内の圧力
を上昇させるために前記圧力室を第1絞りを介して気体
供給源に接続し、前記軸受隙間に所定の静圧力を生じさ
せるように前記軸受隙間を第2絞りを介して前記圧力室
に連通し、前記可動ブッシュを通常は回転軸の軸線方向
の所定位置に保持するとともに、前記圧力室内の圧力が
上昇して前記可動ブッシュが前記負荷に逆らう方向に変
位するとき、弾性変形して前記可動ブッシュの変位を許
容するばね部材を設けたものである。また、本発明は、
好適には請求項２に記載されるように、軸受隙間が減少
する方向の回転軸の変位量が、前記圧力室内の圧力上昇
が負荷作用方向に逆行して前記可動ブッシュを移動する
変位量と前記圧力室内の圧力上昇に伴う軸受隙間の増加
量との和と等しくなるように前記ばね部材のばね力を選
定したものである。 The present invention SUMMARY OF] has been made in view of the conventional problems described above, in the hydrostatic gas bearing for hydrostatic supporting the rotary shaft in the thrust direction, the rotary shaft and the shaft bearing main body A movable bush is provided between the movable bush and the bearing body so as to be movable in the axial direction of the rotating shaft, and a pressure chamber is formed between the movable bush and the bearing body. A bearing gap of the thrust static pressure gas bearing is formed between the bearing and a load acting on the rotating shaft.
The pressure in the pressure chamber when the bearing gap is narrowed
The pressure chamber is connected to a gas supply source through a first throttle to raise the pressure, and a predetermined static pressure is generated in the bearing gap.
The bearing gap communicates with the pressure chamber via a second throttle so as to allow the movable bush to be held at a predetermined position in the axial direction of the rotating shaft, and the pressure in the pressure chamber is reduced.
Rises and the movable bush changes in the direction against the load.
When it moves, it elastically deforms to allow the displacement of the movable bush.
A spring member is provided. Also, the present invention
Preferably, the bearing clearance is reduced as described in claim 2
The displacement of the rotating shaft in the direction of
Moves the movable bush in a direction opposite to the load acting direction.
Increase in bearing clearance due to displacement and pressure increase in the pressure chamber
The spring force of the spring member is selected to be equal to the sum of
It is specified.
【０００７】[0007]
【作用】 上記の構成によると、回転軸に力が加わって
軸方向に変位すると、回転軸のフランジ部と可動ブッシ
ュの軸受隙間が減少し、これによって第１絞りと第2絞
りとの間に設けられた圧力室の圧力が上昇する。この圧
力上昇により可動ブッシュがばね部材に抗して逆方向に
変位すると同時に、軸受隙間に供給される気体圧力が上
昇して軸受隙間を増大するように作用する。その結果、
軸受隙間を減少する方向に作用したときの回転軸の軸方
向変位は、逆方向への可動ブッシュの変位及び軸受隙間
の増大により減少される。 好適には、ばね部材のばね力
を請求項２に記載の発明のように選定することにより、
回転軸の変位に対して、逆に回転軸は、可動ブッシュの
逆方向における変位分と軸受隙間の増加分との総和だけ
変位されることになり、回転軸は変位前の通常位置へ復
帰され、無限剛性が達成される。According to the above configuration, when a force is applied to the rotating shaft and the shaft is displaced in the axial direction, the bearing gap between the flange portion of the rotating shaft and the movable bush decreases, whereby the gap between the first throttle and the second throttle is reduced. The pressure of the provided pressure chamber increases. Due to this pressure increase, the movable bush is displaced in the opposite direction against the spring member, and at the same time, the gas pressure supplied to the bearing gap increases to act to increase the bearing gap. as a result,
The direction of the rotating shaft when acting in a direction to reduce the bearing clearance
The direction displacement is the displacement of the movable bush in the opposite direction and the bearing clearance.
Is reduced by the increase of Preferably, the spring force of the spring member
Is selected as in the invention of claim 2,
Contrary to the displacement of the rotating shaft, the rotating shaft
The shaft is displaced by the sum of the displacement in the opposite direction and the increase in bearing clearance, and the rotating shaft returns to the normal position before the displacement
And infinite stiffness is achieved.
【０００８】[0008]
【実施例】以下本発明の実施例を図面に基づいて説明す
る。図１において、１０は静圧気体軸受の軸受本体を示
し、この軸受本体１０には回転軸１１が鉛直軸線のまわ
りに回転可能に貫通されている。軸受本体１０には回転
軸１１の外周と微小隙間を存して遊嵌するラジアル静圧
気体軸受１２が形成され、このラジアル静圧気体軸受１
２には絞り１３を介して気体供給源に接続された気体通
路１４が連通されている。Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, reference numeral 10 denotes a bearing body of a static pressure gas bearing, and a rotating shaft 11 is rotatably penetrated through the bearing body 10 around a vertical axis. The bearing body 10 is formed with a radial static pressure gas bearing 12 which is loosely fitted to the outer periphery of the rotating shaft 11 with a small gap.
A gas passage 14 connected to a gas supply source via a throttle 13 is connected to 2.
【０００９】前記軸受本体１０上には可動ブッシュ１５
が上下方向に移動可能に設けられ、この可動ブッシュ１
５の下面と軸受本体１０の上面との間には複数の弾性シ
ールリング１６が円周上等角度間隔に配置され、この弾
性シールリング１６によって可動ブッシュ１５と軸受本
体１０との間に複数の圧力室１７を形成している。これ
ら圧力室１７は毛細管からなる第１絞り１８を介して前
記気体通路１４に連通されている。A movable bush 15 is provided on the bearing body 10.
Is provided so as to be movable in the vertical direction.
A plurality of elastic seal rings 16 are arranged circumferentially at equal angular intervals between the lower surface of the bearing 5 and the upper surface of the bearing body 10, and a plurality of elastic seal rings 16 are provided between the movable bush 15 and the bearing body 10 by the elastic seal rings 16. A pressure chamber 17 is formed. These pressure chambers 17 are connected to the gas passage 14 via a first throttle 18 made of a capillary.
【００１０】前記可動ブッシュ１５は周縁部を軸受本体
１０に取付けられた環状のばね部材１９により通常所定
の高さ位置に保持されており、しかしてばね部材１９を
弾性変形して上方向に変位可能となっている。なお、前
記弾性シールリング１６は前記可動ブッシュ１５の上下
動の変位を吸収し、可動ブッシュ１５の上下動にかかわ
らず前記圧力室１７を画定できるようになっている。[0010] The movable bushing 15 is held in a normal predetermined height position by an annular spring member 1 9 attached to the bearing body 10 and the peripheral portion, Thus the spring member 19 upward elastically deformed It can be displaced. The elastic seal ring 16 absorbs the displacement of the movable bush 15 in the vertical direction, and can define the pressure chamber 17 regardless of the vertical movement of the movable bush 15.
【００１１】前記回転軸１１の上端にはフランジ部２１
が形成され、このフランジ部２１の下面は可動ブッシュ
１５の上面と僅かな軸受隙間を存して対向されてスラス
ト静圧気体軸受２２を形成している。かかるスラスト静
圧気体軸受２２の軸受隙間は可動ブッシュ１５に形成さ
れた第２絞り２３を介して前記圧力室１７に連通されて
いる。かかる第２絞り２３は一例として環状のスロット
絞りにて構成され、このスロット絞りを構成するために
可動ブッシュ１５は互いに径の異なる外周面と内周面を
もつ２部材１５Ａ，１５Ｂにて構成され、この２部材１
５Ａ，１５Ｂの外周面と内周面との間で微小幅の環状ス
ロット絞りを形成している。なお、実施例においては、
ラジアル静圧気体軸受１２の絞り１３も同様にスロット
絞りにて構成されている。At the upper end of the rotating shaft 11, a flange portion 21 is provided.
The lower surface of the flange portion 21 is opposed to the upper surface of the movable bush 15 with a small bearing gap to form a thrust hydrostatic gas bearing 22. The bearing gap of the thrust static pressure gas bearing 22 communicates with the pressure chamber 17 via a second throttle 23 formed in the movable bush 15. The second throttle 23 is formed of, for example, an annular slot throttle. To form the slot throttle, the movable bush 15 is formed of two members 15A and 15B having an outer peripheral surface and an inner peripheral surface having different diameters. , These two members 1
An annular slot diaphragm having a minute width is formed between the outer peripheral surface and the inner peripheral surface of 5A and 15B. In the examples,
The throttle 13 of the radial static pressure gas bearing 12 is also constituted by a slot throttle.
【００１２】上記した構成において、気体供給源より気
体通路１４に加圧気体が供給されると、この加圧気体
は、絞り１３を介してラジアル静圧気体軸受１２に供給
されて回転軸１１をラジアル方向に静圧支持するととも
に、第１絞り１８、圧力室１７および第２絞り２３を介
してスラスト静圧気体軸受２２に供給されて回転軸１１
をスラスト方向に静圧支持する。In the above-described configuration, when pressurized gas is supplied from the gas supply source to the gas passage 14, the pressurized gas is supplied to the radial static pressure gas bearing 12 via the throttle 13 to move the rotating shaft 11. In addition to supporting the static pressure in the radial direction, the rotary shaft 11 is supplied to the thrust static pressure gas bearing 22 via the first throttle 18, the pressure chamber 17 and the second throttle 23.
Is supported in the thrust direction by static pressure.
【００１３】ここで、回転軸１１に下方向の荷重Ｗが加
わり、回転軸１１が下方向にΔｈだけ変位すると、回転
軸１１のフランジ部２１と可動ブッシュ１５との軸受隙
間はΔｈだけ減少する。この軸受隙間の減少により軸受
隙間より流出する気体の流出抵抗が高まるため、第１絞
り１８と第２絞り２３との間に設けられた圧力室１７の
圧力が上昇する。この圧力上昇により可動ブッシュ１５
はばね部材１９に抗して上方に変位し、この上方変位は
圧力室１７の圧力上昇とばね部材１９の反力とが釣り合
う量Δｈ１となる。同時に前記圧力室１７の圧力上昇に
よりスラスト静圧気体軸受２２に供給される気体圧力が
上昇するため、その圧力上昇に見合った量Δｈ２だけ回
転軸１１のフランジ部２１は可動ブッシュ１５に対して
軸受隙間を大きくするように上方に変位される。Here, when a downward load W is applied to the rotating shaft 11 and the rotating shaft 11 is displaced downward by Δh, the bearing gap between the flange portion 21 of the rotating shaft 11 and the movable bush 15 decreases by Δh. . Since the resistance of the gas flowing out of the bearing gap increases due to the decrease in the bearing gap, the pressure in the pressure chamber 17 provided between the first throttle 18 and the second throttle 23 increases. Due to this pressure increase, the movable bush 15
Is displaced upward against the spring member 19, and this upward displacement is an amount Δh1 at which the pressure rise in the pressure chamber 17 and the reaction force of the spring member 19 are balanced. At the same time, the gas pressure supplied to the thrust static pressure gas bearing 22 rises due to the pressure rise in the pressure chamber 17, so that the flange portion 21 of the rotary shaft 11 bears against the movable bush 15 by an amount Δh2 corresponding to the pressure rise. It is displaced upward so as to increase the gap.
【００１４】このような結果、回転軸１１の下方向変位
Δｈに対して、逆に回転軸１１は、可動ブッシュ１５の
上昇分Δｈ１と、可動ブッシュ１５に対するフランジ部
２１の上昇分Δｈ２との総和だけ上方向に変位されるこ
とになる。ここでばね部材１９のばね剛性を適切に選定
することにより、下記式が満足され、回転軸１１の変位
は軸受本体１０に対して０とすることができ、無限剛性
が達成される。As a result, with respect to the downward displacement Δh of the rotating shaft 11, the rotating shaft 11, on the contrary, increases the rising Δh 1 of the movable bush 15 and the rising Δh 2 of the flange 21 with respect to the movable bush 15. It will be displaced upward by the sum. Here, by appropriately selecting the spring stiffness of the spring member 19, the following expression is satisfied, the displacement of the rotary shaft 11 can be made zero with respect to the bearing body 10, and infinite stiffness is achieved.
【００１５】Δｈ＝Δｈ１＋Δｈ２ 図２は横軸をスラスト静圧気体軸受２２の固定の基準面
からの軸受隙間ｈ、すなわち初期設定位置における可動
ブッシュ１５上面からフランジ部２１下面までの距離
ｈ、縦軸を荷重Ｗとして、第２絞り（スロット絞り）２
３のスロット隙間およびスロット長さがそれぞれ異なる
２種類の軸受負荷特性、を示すもので、、上の
Ａ点は初期設定点を示す。この図から軸受隙間の実際上
の使用範囲においては、荷重Ｗの変化にかかわらずスラ
スト静圧気体軸受２２の上記軸受隙間ｈは殆ど変化しな
いことが認められる。Δh = Δh1 + Δh2 In FIG. 2, the horizontal axis represents the bearing gap h from the fixed reference plane of the thrust hydrostatic gas bearing 22, that is, the distance h from the upper surface of the movable bush 15 to the lower surface of the flange portion 21 at the initial setting position, and the vertical axis. With the load W as the second throttle (slot throttle) 2
3 shows two types of bearing load characteristics in which the slot gap and the slot length are different from each other, and point A above indicates an initial set point. From this figure, it is recognized that the bearing gap h of the thrust hydrostatic gas bearing 22 hardly changes regardless of the change in the load W in the actual use range of the bearing gap.
【００１６】[0016]
【発明の効果】以上述べたように本発明によれば、スラ
スト静圧気体軸受の無限剛性を達成できるとともに、片
面にのみスラスト軸受面を有するものに適用できるの
で、軸受隙間が小さなものでもスラスト静圧気体軸受の
加工および組付けを容易に行い得る効果がある。As described above, according to the present invention, the infinite rigidity of the thrust hydrostatic gas bearing can be achieved, and the present invention can be applied to a thrust hydrostatic gas bearing having only one thrust bearing surface. There is an effect that machining and assembly of the static pressure gas bearing can be easily performed.
【図１】本発明の実施例を示す気体静圧軸受の断面図で
ある。FIG. 1 is a sectional view of a gas static pressure bearing showing an embodiment of the present invention.
【図２】軸受負荷特性を示す図である。FIG. 2 is a diagram showing a bearing load characteristic.
【図３】従来の静圧気体軸受の断面図である。FIG. 3 is a sectional view of a conventional hydrostatic gas bearing.
１０ 軸受本体 １１ 回転軸 １５ 可動ブッシュ １７ 圧力室 １８ 第１絞り １９ ばね部材 ２２ スラスト静圧気体軸受 ２３ 第２絞り DESCRIPTION OF SYMBOLS 10 Bearing main body 11 Rotating shaft 15 Movable bush 17 Pressure chamber 18 1st throttle 19 Spring member 22 Thrust static pressure gas bearing 23 2nd throttle
───────────────────────────────────────────────────── フロントページの続き 審査官 藤村 聖子 (56)参考文献 実開 昭53−7545（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) F16C 32/00 - 32/06 ────────────────────────────────────────────────── ─── Continuing from the front page Examiner Seiko Fujimura (56) References Japanese Utility Model Showa 53-7545 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) F16C 32/00-32 / 06
Claims (2)
圧気体軸受において、軸受本体と前記回転軸に設けたフ
ランジ部との間に可動ブッシュを回転軸の軸線方向に移
動可能に設け、この可動ブッシュと前記軸受本体との間
に圧力室を形成し、前記可動ブッシュと前記回転軸のフ
ランジ部との間にスラスト静圧気体軸受の軸受隙間を形
成し、前記回転軸に負荷が作用して前記軸受隙間が狭め
られるときに前記圧力室内の圧力を上昇させるために前
記圧力室を第1絞りを介して気体供給源に接続し、前記
軸受隙間に所定の静圧力を生じさせるように前記軸受隙
間を第2絞りを介して前記圧力室に連通し、前記可動ブ
ッシュを通常は回転軸の軸線方向の所定位置に保持する
とともに、前記圧力室内の圧力が上昇して前記可動ブッ
シュが前記負荷に逆らう方向に変位するとき、弾性変形
して前記可動ブッシュの変位を許容するばね部材を設け
たことを特徴とする静圧気体軸受。In a hydrostatic gas bearing for supporting a rotating shaft in a thrust direction by static pressure, a movable bush is moved in an axial direction of the rotating shaft between a bearing body and a flange provided on the rotating shaft.
Rotatably in provided to form a pressure chamber between the movable bushing the bearing body to form a bearing gap of the thrust hydrostatic gas bearing between the flange portion of the rotary shaft and the movable bushing, said rotating Load acts on the shaft to narrow the bearing gap
Through said first aperture in front <br/> Symbol pressure chamber to raise the pressure in the pressure chamber is connected to a gas source as it is, the
The bearing gap communicates with the pressure chamber via a second throttle so as to generate a predetermined static pressure in the bearing gap, and the movable bush is normally held at a predetermined position in the axial direction of the rotating shaft , and the pressure is reduced. When the pressure in the room rises and the movable
When the bush is displaced in the direction against the load, elastic deformation
And a spring member that allows displacement of the movable bush .
用するときの前記回転軸の変位量に対し、前記圧力室内When the pressure chamber is used,
の圧力上昇が負荷作用方向に逆行して前記可動ブッシュOf the movable bush
を移動する変位量と前記圧力室内の圧力上昇に伴う前記The displacement amount to move and the pressure increase in the pressure chamber
軸受隙間の増加量との和が等しくなるように、前記ばねThe spring is set so that the sum with the increase amount of the bearing clearance becomes equal.
部材のばね力が選定されることを特徴とする請求項１記2. The spring force of the member is selected.
載の静圧気体軸受。On-board static pressure gas bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00945991A JP3194588B2 (en) | 1991-01-30 | 1991-01-30 | Hydrostatic gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00945991A JP3194588B2 (en) | 1991-01-30 | 1991-01-30 | Hydrostatic gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04244623A JPH04244623A (en) | 1992-09-01 |
| JP3194588B2 true JP3194588B2 (en) | 2001-07-30 |
Family
ID=11720872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00945991A Expired - Fee Related JP3194588B2 (en) | 1991-01-30 | 1991-01-30 | Hydrostatic gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3194588B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4908372B2 (en) * | 2007-10-11 | 2012-04-04 | 株式会社ダイヤ精機製作所 | Hydrostatic fluid bearing |
| JP5122905B2 (en) * | 2007-10-11 | 2013-01-16 | 株式会社ダイヤ精機製作所 | Static pressure gas bearing |
-
1991
- 1991-01-30 JP JP00945991A patent/JP3194588B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04244623A (en) | 1992-09-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |