JP3178184B2 - Dielectric barrier discharge lamp - Google Patents
Dielectric barrier discharge lampInfo
- Publication number
- JP3178184B2 JP3178184B2 JP24609793A JP24609793A JP3178184B2 JP 3178184 B2 JP3178184 B2 JP 3178184B2 JP 24609793 A JP24609793 A JP 24609793A JP 24609793 A JP24609793 A JP 24609793A JP 3178184 B2 JP3178184 B2 JP 3178184B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric barrier
- barrier discharge
- lamp
- discharge
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、光化学反応用
の紫外線光源として使用される放電ランプの一種で、誘
電体バリヤ放電によってエキシマ分子を形成し、該エキ
シマ分子から放射される光を利用するいわゆる誘電体バ
リヤ放電ランプの改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a kind of discharge lamp used as, for example, an ultraviolet light source for a photochemical reaction, in which excimer molecules are formed by dielectric barrier discharge and light emitted from the excimer molecules is used. To improve the so-called dielectric barrier discharge lamp.
【０００２】[0002]
【従来の技術】本発明に関連した技術としては、例え
ば、日本国公開特許公報平２ー７３５３号があり、そこ
には、放電容器にエキシマ分子を形成する放電用ガスを
充填し、誘電体バリヤ放電（別名オゾナイザ放電あるい
は無声放電。電気学会発行改定新版「放電ハンドブッ
ク」平成１年６月再版７刷発行第２６３ページ参照）に
よってエキシマ分子を形成せしめ、該エキシマ分子から
放射される光を取り出す放射器、すなわち誘電体バリヤ
放電ランプについて記載されており、該放電容器は円筒
状であり、該放電容器の少なくとも一部は該誘電体バリ
ヤ放電の誘電体を兼ねており、該誘電体の少なくとも一
部は該エキシマ分子から放射される光に対して光透過性
であり、該光透過性誘電体の少なくとも一部に導電性網
状電極が設けられた誘電体バリヤ放電ランプ構造が記載
されている。上記のような誘電体バリヤ放電ランプは、
従来の低圧水銀放電ランプや高圧アーク放電ランプには
無い種々の特長を有しているため有用である。しかし、
上記のような誘電体バリヤ放電ランプは、従来のランプ
とは全く異なった構造のランプであるのにもかかわら
ず、ランプの保持方法について十分な検討がなされてい
ないという問題があった。2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 2-7353, in which a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric material is filled. Excimer molecules are formed by barrier discharge (also known as ozonizer discharge or silent discharge; see the revised Electric Discharge Handbook, published by the Institute of Electrical Engineers of Japan, reprinted on June 7, 2001, page 263), and light emitted from the excimer molecules is extracted. A radiator, i.e., a dielectric barrier discharge lamp, is described wherein the discharge vessel is cylindrical, at least a portion of the discharge vessel also serves as a dielectric for the dielectric barrier discharge, and at least a portion of the dielectric A portion is light transmissive to light emitted from the excimer molecule, and at least a part of the light transmissive dielectric is provided with a conductive mesh electrode. Body barrier discharge lamp structure is described. The dielectric barrier discharge lamp as described above,
It is useful because it has various features not found in conventional low-pressure mercury discharge lamps and high-pressure arc discharge lamps. But,
Although the dielectric barrier discharge lamp as described above has a structure completely different from that of the conventional lamp, there has been a problem that a method for holding the lamp has not been sufficiently studied.
【０００３】[0003]
【発明が解決しようとする課題】本発明の課題は、光の
取り出し効率が十分で、かつ、ランプの保持が容易であ
る誘電体バリヤ放電ランプを提供することである。SUMMARY OF THE INVENTION An object of the present invention is to provide a dielectric barrier discharge lamp which has a sufficient light extraction efficiency and is easy to hold the lamp.
【０００４】[0004]
【課題を解決するための手段】上記本発明の目的は、少
なくとも外形が概略円筒状である放電容器に誘電体バリ
ヤ放電によってエキシマ分子を形成する放電用ガスが充
填され、該放電容器の外壁の少なくとも一部は、該エキ
シマ分子から放射される光に対して光透過性であり、か
つ、該誘電体バリヤ放電の誘電体を兼ねており、該光透
過性誘電体の少なくとも一部に導電性網状電極が設けら
れた誘電体バリヤ放電ランプにおいて、該放電容器の少
なくとも一端に該導電性網状電極の外径以下の外径を有
する口金を設けた構成にすることによって達成される。
また、該口金がランプを冷却するための通気孔を有する
ように構成することによって、本発明の目的はよりいっ
そう達成される。SUMMARY OF THE INVENTION It is an object of the present invention to fill at least a discharge vessel having a substantially cylindrical outer shape with a discharge gas for forming excimer molecules by a dielectric barrier discharge. At least a portion is light-transmissive to light emitted from the excimer molecule, and also serves as a dielectric of the dielectric barrier discharge, and at least a portion of the light-transmitting dielectric is electrically conductive. In a dielectric barrier discharge lamp provided with a reticulated electrode, it is attained by providing at least one end of the discharge vessel with a base having an outer diameter equal to or less than the outer diameter of the conductive reticulated electrode.
In addition, the object of the present invention is further achieved by configuring the base to have a vent for cooling the lamp.
【０００５】[0005]
【作用】本発明者等は、少なくとも外形が概略円筒状で
ある放電容器に誘電体バリヤ放電によってエキシマ分子
を形成する放電用ガスが充填され、該放電容器の外壁の
少なくとも一部は、該エキシマ分子から放射される光に
対して光透過性であり、かつ、該誘電体バリヤ放電の誘
電体を兼ねており、該光透過性誘電体の少なくとも一部
に導電性網状電極が設けられた誘電体バリヤ放電ランプ
において、光の取り出し効率について詳細な検討を行っ
たところ、光の取り出し効率は、該誘電体バリヤ放電ラ
ンプの保持方法、特に、該誘電体バリヤ放電ランプの端
部に設けた口金の構造に大きく作用されることを発見し
た。すなわち、口金の外径が該導電性網状電極の外径を
越えると、光取り出し効率が低下することを発見した。
さらに、この原因が、円筒状の誘電体バリヤ放電ランプ
独特の配光分布に起因することも発見した。図２は、配
光分布の説明図であって、直管状の蛍光ランプやハロゲ
ンランプの配光分布が、ランプの管軸に直角な方向の、
すなわちθがπ／２の方向の光出力を直径とした円状曲
線２１になるのに対して、誘電体バリヤ放電ランプの配
光分布は、θが０およびπ付近において円状の分布より
も光出力が大きくなった分布２２をしている。すなわ
ち、誘電体バリヤ放電ランプにおいては、その管軸に近
接した方向に放射される光の割合が蛍光ランプなどに比
較して大きく、従って、口金の外径が該導電性網状電極
の外径を越えると、光取り出し効率が低下する。すなわ
ち、口金の構造によって光出力、言い換えると光り取り
出し効率が低下するのは、円筒状誘電体バリヤ放電ラン
プに、特有の現象である。According to the present inventors, a discharge vessel having at least a substantially cylindrical outer shape is filled with a discharge gas for forming excimer molecules by dielectric barrier discharge, and at least a part of an outer wall of the discharge vessel is formed of the excimer gas. A dielectric material that is light-transmissive to light emitted from molecules and serves also as a dielectric of the dielectric barrier discharge, and a conductive mesh electrode is provided on at least a part of the light-transmissive dielectric. The body barrier discharge lamp was examined in detail for light extraction efficiency. The light extraction efficiency was determined by the method of holding the dielectric barrier discharge lamp, and in particular, the base provided at the end of the dielectric barrier discharge lamp. Was found to be greatly influenced by the structure. That is, it has been found that when the outer diameter of the base exceeds the outer diameter of the conductive mesh electrode, the light extraction efficiency decreases.
Further, they have found that this is due to the light distribution unique to the cylindrical dielectric barrier discharge lamp. FIG. 2 is an explanatory diagram of a light distribution, in which the light distribution of a straight tube fluorescent lamp or a halogen lamp is in a direction perpendicular to the tube axis of the lamp.
That is, while the light output in the direction where θ is π / 2 is a circular curve 21 having a diameter, the light distribution of the dielectric barrier discharge lamp is smaller than the circular distribution when θ is around 0 and π. The distribution 22 has an increased light output. That is, in a dielectric barrier discharge lamp, the ratio of light emitted in a direction close to the tube axis is larger than that of a fluorescent lamp or the like. Therefore, the outer diameter of the base is smaller than the outer diameter of the conductive mesh electrode. If it exceeds, the light extraction efficiency decreases. That is, the fact that the light output, that is, the light extraction efficiency is reduced by the structure of the base is a phenomenon peculiar to the cylindrical dielectric barrier discharge lamp.
【０００６】少なくとも外形が概略円筒状である放電容
器に誘電体バリヤ放電によってエキシマ分子を形成する
放電用ガスが充填され、該放電容器の外壁の少なくとも
一部は、該エキシマ分子から放射される光に対して光透
過性であり、かつ、該誘電体バリヤ放電の誘電体を兼ね
ており、該光透過性誘電体の少なくとも一部に導電性網
状電極が設けられた誘電体バリヤ放電ランプにおいて、
該放電容器の少なくとも一端に該導電性網状電極の外径
以下の外径を有する口金を設けると、まず第一に光の取
り出し効率を低下させること無く、第二に太く、かつ、
複雑な構造をした同軸円筒の端部を直接支持する場合に
比較し、ランプの位置を容易に、精密に設定出来るよう
になる。なお、本発明における口金とは、誘電体バリヤ
放電ランプの放電容器とは独立したランプ保持を目的と
した構造物で、接着剤等による接着、あるいは圧入など
によって放電容器に固着されているものをいう。さら
に、この発明における該導電性網状電極の外径とは、放
電容器に装着した状態で測定された網状電極の外径であ
る。たとえば、直径ｄｍｍの素線を交差させた円筒状網
を直径Ｄｍｍの放電容器に装着した場合の該導電性網状
電極の外径は、素線の「重なり」の関係でｄの４倍とＤ
の和になる。A discharge vessel having at least a substantially cylindrical outer shape is filled with a discharge gas for forming excimer molecules by a dielectric barrier discharge, and at least a part of the outer wall of the discharge vessel emits light radiated from the excimer molecules. In a dielectric barrier discharge lamp, which is light-transmissive to and also serves as a dielectric of the dielectric barrier discharge, and a conductive mesh electrode is provided on at least a part of the light-transmissive dielectric,
Providing a base having an outer diameter equal to or less than the outer diameter of the conductive mesh electrode at at least one end of the discharge vessel, without first reducing the light extraction efficiency, second, thick, and
Compared to a case where the end of a coaxial cylinder having a complicated structure is directly supported, the position of the lamp can be easily and precisely set. The base in the present invention is a structure for the purpose of holding the lamp independent of the discharge vessel of the dielectric barrier discharge lamp, and is a structure fixed to the discharge vessel by bonding with an adhesive or the like or press fitting. Say. Further, the outer diameter of the conductive reticulated electrode in the present invention is the outer diameter of the reticulated electrode measured in a state of being mounted on the discharge vessel. For example, the outer diameter of the conductive mesh electrode when a cylindrical mesh in which a wire having a diameter of dmm intersects a discharge vessel having a diameter of Dmm is four times d and D due to the "overlap" of the wire.
The sum of
【０００７】該口金をランプを冷却するための通気孔を
有する構造にすると、ランプの冷却が容易になり、高出
力の誘電体バリヤ放電ランプが容易に得られる。該口金
をシリコンゴムあるいはフッ素樹脂で構成すると、該材
料は弾力性があるので、該口金を放電容器の端部に取り
付け易い、電極に接続したリード線が取り出しやすいと
いう利点が生じる。If the base has a structure having a vent for cooling the lamp, the lamp can be easily cooled, and a high-output dielectric barrier discharge lamp can be easily obtained. When the base is made of silicone rubber or fluororesin, the material has elasticity, and therefore, there is an advantage that the base is easily attached to the end of the discharge vessel and the lead wire connected to the electrode is easily taken out.
【０００８】[0008]
【実施例】本発明の一実施例である同軸円筒形誘電体バ
リヤ放電ランプの概略図を図１に示す。放電容器１は全
長約１５０ｍｍの石英ガラス製で、外径１４ｍｍの内側
管２、肉厚１ｍｍ内径約２５ｍｍの外側管３を同軸に配
置して中空円筒状にしたものである。外側管３は誘電体
バリヤ放電の誘電体バリヤと光取り出し窓を兼用してお
り、外面には光を透過する金属製網状電極４が設けられ
ている。内側管２の外表面には光反射板を兼ねたアルミ
ニウム電極５が設けられている。２０は、アルミニウム
電極５を機械的、化学的に保護する目的で設けた付加型
のシリコンゴムからなる保護膜である。また、放電容器
１の一端にバリウムゲッタ６が設けられている。網状電
極４は、軸方向に伸縮性のあるシームレスに編んだ円筒
状網で、該円筒状金属網のなかに放電容器１を挿入し、
ランプの軸方向に引っ張ることによって外側管３の外側
に密接された網状電極５が形成される。従って、該円筒
状網電極の外径は、約２７．４ｍｍになる。該放電容器
の両端に、シリコンゴムからなり、外径が２４ｍｍで、
通気孔１２，１３を有する口金１０、１１を、シリコン
ゴム系の接着材を使用いて装着した。接着材は図示して
いない。1 is a schematic view of a coaxial cylindrical dielectric barrier discharge lamp according to an embodiment of the present invention. The discharge vessel 1 is made of quartz glass having a total length of about 150 mm, and has a hollow cylindrical shape in which an inner tube 2 having an outer diameter of 14 mm and an outer tube 3 having a thickness of 1 mm and an inner diameter of about 25 mm are coaxially arranged. The outer tube 3 also serves as a dielectric barrier for the dielectric barrier discharge and a light extraction window, and a metal mesh electrode 4 that transmits light is provided on the outer surface. An aluminum electrode 5 also serving as a light reflecting plate is provided on the outer surface of the inner tube 2. Reference numeral 20 denotes a protective film made of an additional type silicon rubber provided for the purpose of mechanically and chemically protecting the aluminum electrode 5. A barium getter 6 is provided at one end of the discharge vessel 1. The mesh electrode 4 is a seamlessly knitted cylindrical net having elasticity in the axial direction, and the discharge vessel 1 is inserted into the cylindrical metal net.
Pulling in the axial direction of the lamp forms a reticulated electrode 5 close to the outside of the outer tube 3. Therefore, the outer diameter of the cylindrical mesh electrode is about 27.4 mm. Both ends of the discharge vessel are made of silicone rubber, have an outer diameter of 24 mm,
The ferrules 10 and 11 having the ventilation holes 12 and 13 were mounted using a silicone rubber-based adhesive. The adhesive is not shown.
【０００９】放電容器の放電空間７に放電用ガスとして
キセノンガスを３００Ｔｏｒｒ封入した。周波数２０キ
ロヘルツの電源８でランプ長１ｃｍあたり２ワットの電
力で放電させたところ、１７２ｎｍとその付近の紫外線
が高効率で放射された。該口金が該導電性網状電極の外
径未満の外径を有するので、光の取り出し効率を低下さ
せること無く、さらに、太く、かつ、複雑な構造をした
同軸円筒の端部を直接支持する場合に比較し、ランプの
位置を容易に、精密に設定することが出来た。また、該
口金に設けた通気孔に窒素ガスを流してランプを冷却す
ることにより、前記の３倍の電気入力で点灯しても、効
率が低下しない高出力の誘電体バリヤ放電ランプ得られ
た。さらに、口金の材質がシリコンゴムなので、弾力性
があるので放電容器への装着が容易に行え、かつ１７２
ｎｍとその付近の紫外線に対しても十分な耐性があるの
で十分な寿命を有するなどの利点が生じた。Xenon gas as a discharge gas was sealed at 300 Torr in the discharge space 7 of the discharge vessel. When discharge was performed at a power of 2 watts per 1 cm of lamp length using a power supply 8 having a frequency of 20 kHz, ultraviolet light at 172 nm and its vicinity was emitted with high efficiency. Since the base has an outer diameter less than the outer diameter of the conductive mesh electrode, without directly lowering the light extraction efficiency, and further directly supporting the end of a coaxial cylinder having a thick and complicated structure. The position of the lamp could be easily and precisely set as compared with the above. Also, by flowing nitrogen gas through the vent holes provided in the base to cool the lamp, a high-output dielectric barrier discharge lamp was obtained in which the efficiency did not decrease even when the lamp was turned on with three times the electric input. . Further, since the base is made of silicone rubber, it has elasticity, so that it can be easily mounted on the discharge vessel.
There is an advantage such as having a sufficient lifetime since the film has a sufficient resistance to ultraviolet light in the vicinity of nm and its vicinity.
【００１０】シリコンゴムの代わりに、フッ素樹脂の口
金を使用しても上記実施例と同様の効果が得られた。ま
た、セラミックスあるいは金属の口金を使用しても、光
の取り出し効率を低下させることが無く、ランプの位置
を容易に、精密に設定することが出来などの効果が得ら
れることは、自明である。The same effect as in the above embodiment was obtained by using a fluorine resin base instead of the silicone rubber. Also, it is obvious that the use of a ceramic or metal base does not reduce the light extraction efficiency and can easily and precisely set the position of the lamp. .
【００１１】[0011]
【発明の効果】上記したように、本発明によれば、光の
取り出し効率が十分で、かつ、ランプの保持が容易であ
る誘電体バリヤ放電ランプをを提供できる。As described above, according to the present invention, it is possible to provide a dielectric barrier discharge lamp having sufficient light extraction efficiency and easy holding of the lamp.
【図１】本発明の誘電体バリヤ放電ランプの実施例の説
明図である。FIG. 1 is an explanatory view of an embodiment of a dielectric barrier discharge lamp of the present invention.
【図２】配光分布の説明図である。FIG. 2 is an explanatory diagram of a light distribution.
１ 放電容器 ２ 内側管 ３ 外側管 ４ 円筒状網電極 ５ アルミニウム電極 ６ ゲッタ ８ 電源 １０，１１ 口金 １２，１３ 通気孔 DESCRIPTION OF SYMBOLS 1 Discharge container 2 Inner tube 3 Outer tube 4 Cylindrical mesh electrode 5 Aluminum electrode 6 Getter 8 Power supply 10,11 Base 12,13 Vent hole
───────────────────────────────────────────────────── フロントページの続き 審査官 江成 克己 (56)参考文献 特開 平２−7353（ＪＰ，Ａ) 実開 平４−137640（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 61/04 G21K 5/00 ──────────────────────────────────────────────────続 き Continuing from the front page Examiner Katsumi Enari (56) References JP-A-2-7353 (JP, A) JP-A-4-137640 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) H01J 61/04 G21K 5/00
Claims (3)
体バリヤ放電によってエキシマ分子を形成する放電用ガ
スが充填され、該放電容器の外壁の少なくとも一部は、
該エキシマ分子から放射される光に対して光透過性であ
り、かつ、該誘電体バリヤ放電の誘電体を兼ねており、
該光透過性誘電体の少なくとも一部に導電性網状電極が
設けられた誘電体バリヤ放電ランプにおいて、該放電容
器の少なくとも一端に該導電性網状電極の外径以下の外
径を有する口金を設けたことを特徴とした誘電体バリヤ
放電ランプ。1. A discharge vessel having a substantially cylindrical outer shape is filled with a discharge gas for forming excimer molecules by a dielectric barrier discharge, and at least a part of an outer wall of the discharge vessel comprises:
Light transmissive to light emitted from the excimer molecule, and also serves as a dielectric of the dielectric barrier discharge;
In a dielectric barrier discharge lamp in which a conductive mesh electrode is provided on at least a part of the light-transmitting dielectric, a cap having an outer diameter equal to or less than the outer diameter of the conductive mesh electrode is provided on at least one end of the discharge vessel. A dielectric barrier discharge lamp.
を有することを特徴とした請求項１に記載の誘電体バリ
ヤ放電ランプ。2. The dielectric barrier discharge lamp according to claim 1, wherein the base has a vent for cooling the lamp.
脂であることを特徴とした請求項１に記載の誘電体バリ
ヤ放電ランプ。3. The dielectric barrier discharge lamp according to claim 1, wherein said base is made of silicone rubber or fluorine resin.
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24609793A JP3178184B2 (en) | 1993-09-08 | 1993-09-08 | Dielectric barrier discharge lamp |
| TW086106221A TW348262B (en) | 1993-09-08 | 1994-09-01 | Dielectric barrier discharge lamp |
| TW083108047A TW324106B (en) | 1993-09-08 | 1994-09-01 | Dielectric barrier layer discharge lamp |
| EP94114054A EP0642153B1 (en) | 1993-09-08 | 1994-09-07 | Dielectric barrier discharge lamp |
| DE69419163T DE69419163T2 (en) | 1993-09-08 | 1994-09-07 | Discharge lamp with the electrical barrier |
| DE69402491T DE69402491T2 (en) | 1993-09-08 | 1994-09-07 | Dielectric limited discharge lamp |
| EP96103794A EP0721204B1 (en) | 1993-09-08 | 1994-09-07 | Dielectric barrier discharge lamp |
| KR1019940022656A KR100238642B1 (en) | 1993-09-08 | 1994-09-08 | Dielectric barrier discharge lamp |
| US08/303,033 US5581152A (en) | 1993-09-08 | 1994-09-08 | Dielectric barrier discharge lamp |
| KR1019990026316A KR100268706B1 (en) | 1993-09-08 | 1999-07-01 | Dielectric barrier discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24609793A JP3178184B2 (en) | 1993-09-08 | 1993-09-08 | Dielectric barrier discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0778592A JPH0778592A (en) | 1995-03-20 |
| JP3178184B2 true JP3178184B2 (en) | 2001-06-18 |
Family
ID=17143450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24609793A Expired - Fee Related JP3178184B2 (en) | 1993-09-08 | 1993-09-08 | Dielectric barrier discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3178184B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3487771B2 (en) * | 1998-09-29 | 2004-01-19 | 株式会社オーク製作所 | Gas-cooled dielectric barrier discharge lamp |
| JP3491566B2 (en) * | 1999-07-05 | 2004-01-26 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
| JP3606154B2 (en) * | 2000-03-30 | 2005-01-05 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
| JP7115036B2 (en) * | 2018-05-25 | 2022-08-09 | ウシオ電機株式会社 | excimer lamp |
-
1993
- 1993-09-08 JP JP24609793A patent/JP3178184B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0778592A (en) | 1995-03-20 |
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