JP3141209B2 - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JP3141209B2 JP3141209B2 JP03197389A JP19738991A JP3141209B2 JP 3141209 B2 JP3141209 B2 JP 3141209B2 JP 03197389 A JP03197389 A JP 03197389A JP 19738991 A JP19738991 A JP 19738991A JP 3141209 B2 JP3141209 B2 JP 3141209B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- ultrasonic motor
- torsional
- longitudinal
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は,OA機器や玩具等に用
いられる小型モータに関し,特にローター直径が小さい
割に,トルクの大きい超音波モータに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a small motor used for OA equipment and toys, and more particularly to an ultrasonic motor having a large torque for a small rotor diameter.
【0002】[0002]
【従来の技術】一般に,超音波モータは電磁モータと比
較して,低回転で高いトルクが得られること,停止保持
力を有すること,電磁ノイズが小さいことなどの利点を
有しており,カメラのオートフォーカス用や自動車用パ
ワーモータ等に使用されている。2. Description of the Related Art Generally, an ultrasonic motor has advantages such as a high torque at a low rotation speed, a stop holding force, and a small electromagnetic noise as compared with an electromagnetic motor. Used for auto focus and power motors for automobiles.
【0003】図5は従来の超音波モータの一構成例を示
す斜視図である。図5において,圧電捩り複合振動子1
01と圧電縦振動子102を含む縦一捩り複合振動子1
03の一方の端面に回転自在に支持されたローター10
4を加圧接触させて構成されている。FIG. 5 is a perspective view showing a configuration example of a conventional ultrasonic motor. In FIG. 5, the piezoelectric torsional composite vibrator 1
01 and a single longitudinal torsional composite vibrator 1 including a piezoelectric longitudinal vibrator 102
The rotor 10 rotatably supported on one end face of the rotor 03
4 is brought into pressure contact.
【0004】図6は図5の超音波モータに用いられてい
る圧電捩り複合振動子101の一構成例を示す斜視図で
ある。図6において,弦の方向に分極された複数個の扇
形の圧電セラミック板105が円板あるいはリング状
に,各々の分極の向きが閉じるように接合されている。FIG. 6 is a perspective view showing an example of the configuration of a piezoelectric torsional composite vibrator 101 used in the ultrasonic motor of FIG. In FIG. 6, a plurality of sector-shaped piezoelectric ceramic plates 105 polarized in the direction of a chord are joined in a disk or ring shape so that the directions of polarization are closed.
【0005】図7は縦一捩り型超音波モータの動作原理
の説明図である。図7において,縦一捩り複合振動子1
03の捩り振動変位ξと長さ方向の伸縮変位ξ′の状態
とローター104の回転状態を示している。各変位の向
きは図7中に示すように点対称で,両端に移動するにつ
れて次第に大きくなるような振動モードを有する。FIG. 7 is an explanatory view of the operation principle of the vertical one-torsion type ultrasonic motor. In FIG. 7, a vertical one-torsion composite vibrator 1
3 shows a state of a torsional vibration displacement ξ and a longitudinal displacement ξ ′ of the longitudinal direction and a rotation state of the rotor 104. The direction of each displacement is point symmetric as shown in FIG. 7, and has a vibration mode that becomes gradually larger as moving to both ends.
【0006】[0006]
【発明が解決しようとする課題】図6からわかるように
従来の圧電捩り複合振動子101は,扇形の圧電セラミ
ック板105を複数個接着しているため,組立工程が複
雑になる上に接着による特性のばらつきが大きいという
欠点がある。また一般に,図5で示すような円柱状の振
動子においては,捩り振動の共振周波数と縦振動の共振
周波数とが一致しないため,捩り振動の共振周波数で駆
動しても,縦振動は非共振の状態で駆動されることが生
じる。従って,縦振動の振動振幅が小さくなり超音波モ
ータのトルクを大きくすることが困難であるという欠点
がある。As can be seen from FIG. 6, the conventional piezoelectric torsional composite vibrator 101 has a plurality of fan-shaped piezoelectric ceramic plates 105 bonded to each other. There is a disadvantage that the characteristics vary greatly. In general, in a columnar vibrator as shown in FIG. 5, since the resonance frequency of torsional vibration and the resonance frequency of longitudinal vibration do not match, the longitudinal vibration is non-resonant even when driven at the resonance frequency of torsional vibration. Is driven in the state described above. Therefore, there is a disadvantage that the vibration amplitude of the longitudinal vibration becomes small and it is difficult to increase the torque of the ultrasonic motor.
【0007】そこで,本発明の技術的課題は,ローター
の直径を小さくすることができるとともに,小型でトル
クの大きい超音波モータを提供することにある。Accordingly, it is an object of the present invention to provide an ultrasonic motor which can reduce the diameter of a rotor and which is small and has a large torque.
【0008】[0008]
【課題を解決するための手段】本発明によれば,円周方
向に捩り振動を行う圧電セラミック中空円柱からなる捩
り振動子と,前記捩り振動子の一端部と対向する一端部
を有し長さ方向に伸縮振動を行う圧電セラミック中空円
柱からなる縦振動子と,前記捩り振動子と前記縦振動子
とに介在して夫々の振動子の一端部に圧接されるロータ
とを備えたことを特徴とする超音波モータが得られる。According to the present invention, there is provided a torsional vibrator made of a piezoelectric ceramic hollow cylinder which performs torsional vibration in a circumferential direction, and has a long end having one end opposed to one end of the torsional vibrator. A vertical vibrator made of a piezoelectric ceramic hollow cylinder that expands and contracts in the vertical direction, and a rotor interposed between the torsional vibrator and the vertical vibrator and pressed against one end of each vibrator. The characteristic ultrasonic motor is obtained.
【0009】本発明によれば,前記超音波モータにおい
て,前記縦振動子の一端部に対向する他端部は固定さ
れ,前記捩り振動子は,捩り振動の節部で支持されてい
ることを特徴とする超音波モータが得られる。According to the present invention, in the ultrasonic motor, the other end opposite to the one end of the longitudinal vibrator is fixed, and the torsional vibrator is supported by a node of torsional vibration. The characteristic ultrasonic motor is obtained.
【0010】本発明によれば,前記超音波モータにおい
て,前記縦振動子及び前記捩り振動子及びこれら間に配
されたロータとを一直線に貫通する軸を設け,前記捩り
振動子を捩り振動の節部で支持リングで支持し,前記縦
振動子の前記一端部に対向する他端部を固定部材に固定
して,前記固定枠内に収容したことを特徴とする超音波
モータが得られる。[0010] According to the present invention, in the ultrasonic motor, a shaft that penetrates the longitudinal vibrator, the torsional vibrator and the rotor disposed therebetween in a straight line is provided, and the torsional vibrator is provided with a torsional vibration. An ultrasonic motor is obtained, wherein the ultrasonic vibrator is supported by a support ring at a node, and the other end of the longitudinal vibrator facing the one end is fixed to a fixing member and housed in the fixing frame.
【0011】本発明によれば,前記超音波モータにおい
て,前記捩り縦振動子は前記圧電セラミック中空円柱の
外周面に,長さ方向に対して45°をなす方向に平行に
延在する交差指電極が形成されていることを特徴とする
超音波モータが得られる。According to the present invention, in the ultrasonic motor, the torsional longitudinal vibrator is provided on the outer peripheral surface of the piezoelectric ceramic hollow cylinder by a cross finger extending in a direction parallel to the longitudinal direction at 45 ° to the longitudinal direction. An ultrasonic motor characterized by having electrodes formed thereon is obtained.
【0012】本発明によれば,前記超音波モータにおい
て,前記縦振動子は前記圧電セラミック中空円柱の外周
面に長さ方向または,円周方向に平行に延在する交差指
電極が形成されていることを特徴とする超音波モータが
得られる。According to the present invention, in the ultrasonic motor, the vertical vibrator is formed with interdigital electrodes extending in the length direction or in the circumferential direction on the outer peripheral surface of the piezoelectric ceramic hollow cylinder. Thus, an ultrasonic motor is obtained.
【0013】[0013]
【作用】本発明の超音波モータにおいては,捩り振動子
の変位と同期して一方の縦振動子の長さが伸びると,こ
れらに介在するローターは二つの振動子に挟まれて捩り
変位の方向に回転する。この時,もう一方の縦振動子は
縮んでおり,捩り変位の方向が反転すると捩り振動子の
変位と同期して縦振動子の長さが伸びローターは先の回
転方向と同じ捩り変位の方向に回転する。In the ultrasonic motor according to the present invention, when the length of one of the longitudinal vibrators increases in synchronism with the displacement of the torsional vibrator, the rotor interposed therebetween is sandwiched between the two vibrators to reduce the torsional displacement. Rotate in the direction. At this time, the other longitudinal vibrator is contracted, and when the direction of the torsional displacement is reversed, the length of the longitudinal vibrator is extended in synchronization with the displacement of the torsional vibrator, and the rotor has the same torsional displacement direction as the previous rotational direction. To rotate.
【0014】[0014]
【実施例】以下,本発明の超音波モータについて図面を
用いて詳しく説明する。図1は本発明の超音波モータの
一構成例を示す斜視図である。図1において,超音波モ
ータはいわゆる縦振動子捩り振動子圧接型と呼ばれる超
音波モータで,縦振動子8の一方の端面を固定ベース1
1・11′に夫々固定したものを二つ(もう一つは
8′)それぞれ他方の端部を対向させ,これらの端面の
間に捩り振動の接点を支持リング10で固定された圧電
捩り振動子6を二つのロータ12,12′を介在させて
挟むように構成されている。ローター12,12′はこ
の捩り振動子6の両端面と前記圧電縦振動子8・8′の
端面との間にそれぞれ回転自在に支持されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an ultrasonic motor according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing one configuration example of the ultrasonic motor of the present invention. In FIG. 1, the ultrasonic motor is a so-called vertical vibrator torsion vibrator press-contact type ultrasonic motor.
A piezoelectric torsional vibrator in which two parts fixed respectively to 1.11 '(the other is 8') are opposed to each other at the other end, and a contact of torsional vibration is fixed between these end faces by a support ring 10. The rotor 6 is configured to sandwich the rotor 6 with two rotors 12, 12 'interposed therebetween. The rotors 12, 12 'are rotatably supported between both end faces of the torsional vibrator 6 and end faces of the piezoelectric longitudinal vibrators 8, 8'.
【0015】ローター12・12′と一体に回転するシ
ャフト13を前記圧電セラミック中空円柱縦振動子及び
捩り振動子内部を貫通させ全体が固定枠16に納められ
て,この固定枠16の少なくとも一方の端部側から皿バ
ネ14を介してナット15で押し付けている。A shaft 13 which rotates integrally with the rotors 12 and 12 'penetrates the inside of the piezoelectric ceramic hollow cylindrical vertical vibrator and the torsional vibrator, and the whole is accommodated in a fixed frame 16, and at least one of the fixed frames 16 is provided. It is pressed by a nut 15 from the end via a disc spring 14.
【0016】図2は図1の超音波モータに用いられる捩
り振動子6を示す斜視図である。図2において,圧電セ
ラミック中空円柱7の外周面に円柱の長さ方向に対して
45°の方向に延在する斜め電極6a,6b…が一つお
きに形成され,それぞれ相反する端部の導電性の接続部
26a,26bに接続され二端子とされ,斜め交差指電
極を形成している。これらの電極は,圧電セラミック中
空円柱に電極を印刷するという一般的な方法で形成され
る。この斜め電極6a,6bを用いて分極処理を施すと
分極方向は斜め電極6a,6bの長さ方向に対して直角
な方向となる。分極を施した状態で前記斜め交差指電極
に交流電圧を印加すると,電圧の極性が分極時の電圧の
極性と同じ場合は分極の方向に伸び歪が発生し,電圧の
極性が分極時の極性と逆の場合は分極の方向に縮み歪が
発生する。分極方向に伸びあるいは縮み歪が発生した場
合,分極方向と直角な方向にはこれらと反対に縮みある
いは伸び歪が発生する。したがって,前記圧電セラミッ
ク中空円柱7に両端面が互いに逆方向に回転して捩じれ
るような捩り変位が発生する。FIG. 2 is a perspective view showing the torsional vibrator 6 used in the ultrasonic motor of FIG. In FIG. 2, oblique electrodes 6a, 6b,... Extending in the direction of 45 ° with respect to the length direction of the cylindrical column are formed on the outer peripheral surface of the hollow cylindrical column 7, and the conductive portions at opposite ends are formed. Are connected to the connecting portions 26a and 26b of the male and female terminals to form two terminals, forming an oblique interdigital electrode. These electrodes are formed by a general method of printing electrodes on a hollow piezoelectric ceramic cylinder. When a polarization process is performed using these oblique electrodes 6a and 6b, the polarization direction becomes a direction perpendicular to the length direction of the oblique electrodes 6a and 6b. When an AC voltage is applied to the diagonal interdigital electrodes in a state where the polarization is applied, if the polarity of the voltage is the same as the polarity of the voltage at the time of polarization, stretching strain occurs in the direction of the polarization, and the polarity of the voltage is the polarity at the time of the polarization. In the opposite case, shrinkage strain occurs in the direction of polarization. When elongation or contraction occurs in the polarization direction, contraction or elongation occurs in the direction perpendicular to the polarization direction. Therefore, torsional displacement occurs in the piezoelectric ceramic hollow cylinder 7 such that both end faces are rotated in opposite directions and twisted.
【0017】図3は本発明の超音波モータに用いられる
一つの縦振動子8の構造例を示す斜視図であり,もう一
つの縦振動子8′も同様な構造を有する。図3の圧電セ
ラミック中空円柱9の外周面に円周方向に沿って互いに
平行に周電極8a,8b…が形成され導電性の共通部2
8a,及び図示しないもう一つの共通部に接続されて二
端子とされ,交差指電極17を形成している。この交差
電極17を用いて分極処理を施すと分極方向は前記交差
指電極17の長さ方向と垂直な方向となる。この状態で
前記交差指電極17に交流電圧を印加すると,電圧の極
性が分極時の電圧の極性と同じ場合は分極の方向に伸び
歪が発生し,電圧の極性が分極時の極性と逆の場合は分
極の方向に縮み歪が発生する。したがって,圧電セラミ
ック中空円柱9は長さ方向に伸縮する。FIG. 3 is a perspective view showing an example of the structure of one longitudinal vibrator 8 used in the ultrasonic motor of the present invention, and another longitudinal vibrator 8 'has the same structure. The peripheral electrodes 8a, 8b,... Are formed on the outer peripheral surface of the piezoelectric ceramic hollow cylinder 9 of FIG.
8a and another common portion (not shown) to form two terminals to form interdigital electrodes 17. When a polarization process is performed using the cross electrode 17, the polarization direction is perpendicular to the length direction of the cross finger electrode 17. When an AC voltage is applied to the interdigital electrode 17 in this state, when the polarity of the voltage is the same as the polarity of the voltage at the time of polarization, an elongation strain occurs in the direction of the polarization, and the polarity of the voltage is opposite to the polarity at the time of the polarization. In this case, shrinkage strain occurs in the direction of polarization. Therefore, the piezoelectric ceramic hollow cylinder 9 expands and contracts in the length direction.
【0018】図1に戻って,捩り振動子6の変位と同期
して縦振動子8の長さが伸びると,ローター12は二つ
の振動子6,8の夫々の端面間に挟まれて捩り変位の方
向に回転する。この時,もう一方の縦振動子8′は縮ん
でおり捩り変位の方向が反転すると捩り振動子6の変位
と同期して縦振動子8′の長さが伸びローター12′は
先の回転方向と同じ捩り変位の方向に回転する。この場
合の回転数及びトルクは駆動周波数が一定の場合,捩り
振動及び縦振動の夫々の振幅の大きさによって決まる。Returning to FIG. 1, when the length of the vertical vibrator 8 is increased in synchronization with the displacement of the torsional vibrator 6, the rotor 12 is sandwiched between the respective end faces of the two vibrators 6, 8 and twisted. Rotate in the direction of displacement. At this time, the other longitudinal vibrator 8 'is contracted, and when the direction of the torsional displacement is reversed, the length of the longitudinal vibrator 8' is extended in synchronization with the displacement of the torsional vibrator 6, and the rotor 12 'is rotated in the previous rotational direction. It rotates in the same direction of torsional displacement as. In this case, when the driving frequency is constant, the rotation speed and the torque are determined by the amplitudes of the torsional vibration and the longitudinal vibration.
【0019】図1に示した本発明の超音波モータにおい
ては,捩り振動子6と縦振動子8(8′)は独立してい
るため,それぞれの共振周波数はそれぞれの振動子の寸
法を独立に調整することで共振周波数を一致させること
が出来る。従って捩り振動子6と縦振動子8(8′)は
各々の共振周波数で駆動することが可能となり,捩り振
動の振動振幅と縦振動の振動振幅を大きくすることが可
能となる。また,捩り振動に対して共振周波数が高い縦
振動を1/4λで駆動することにより捩り振動子より短
い寸法で捩り振動の共振周波数に一致する共振周波数の
縦振動子が出来る。また,ローター12,12′の回転
方向の転換は,捩り振動駆動電圧と縦振動駆動電圧の位
相の何れかを180°変化させることにより可能であ
る。In the ultrasonic motor of the present invention shown in FIG. 1, since the torsional vibrator 6 and the longitudinal vibrator 8 (8 ') are independent, the respective resonance frequencies make the size of each vibrator independent. The resonance frequency can be matched by adjusting to. Therefore, the torsional vibrator 6 and the longitudinal vibrator 8 (8 ') can be driven at their respective resonance frequencies, and the vibration amplitude of the torsional vibration and the vibration amplitude of the longitudinal vibration can be increased. Further, by driving a longitudinal vibration having a high resonance frequency with respect to torsional vibration at 1 / λ, a longitudinal vibrator having a resonance frequency that is shorter than the torsional vibrator and has a resonance frequency that matches the resonance frequency of the torsional vibration is obtained. The rotation direction of the rotors 12 and 12 'can be changed by changing either the phase of the torsional vibration drive voltage or the phase of the longitudinal vibration drive voltage by 180 °.
【0020】以上の本発明の実施例では,縦振動子8
(8′)の構造として圧電セラミック中空円柱9の外周
面に円周方向と平行な方向に交差指電極8a,8b,8
c…,を形成した場合について説明したが,図4(a)
に示すように圧電セラミック中空円柱40の外周面に円
柱の長さ方向と平行な方向に交差指電極18を施して構
成した縦振動子としても良く,更に,図4(b)に示す
ように圧電セラミック中空円柱40´の外周面及び内周
面のほぼ全面に電極を形成して構成した圧電縦振動子と
しても同様の効果が得られる。In the above embodiment of the present invention, the longitudinal oscillator 8
As the structure (8 '), the interdigital electrodes 8a, 8b, 8 are formed on the outer peripheral surface of the hollow piezoelectric ceramic column 9 in a direction parallel to the circumferential direction.
.. have been described, FIG.
As shown in FIG. 4 (b), a vertical vibrator may be formed by applying interdigital electrodes 18 on the outer peripheral surface of the hollow piezoelectric ceramic column 40 in a direction parallel to the length direction of the column. Further, as shown in FIG. The same effect can be obtained even when a piezoelectric longitudinal vibrator is formed by forming electrodes on substantially the entire outer peripheral surface and inner peripheral surface of the piezoelectric ceramic hollow cylinder 40 '.
【0021】[0021]
【発明の効果】以上説明したように,本発明の超音波モ
ータにおいては,駆動力を発生するための圧電振動子の
形状が単純で,通常一般的に適用されているプレス成形
技術により容易に製造することが可能な圧電セラミック
中空円柱を用いて,この外周面にこれも一般的な技術で
ある電極印刷を施すことにより圧電捩り振動子及び圧電
縦振動子が得られるため,製造が容易で接着工程や複雑
な加工工程による特性のばらつきの少ない超音波モータ
を提供することができる。As described above, in the ultrasonic motor according to the present invention, the shape of the piezoelectric vibrator for generating the driving force is simple, and it is easy to use the generally used press molding technique. A piezoelectric torsional vibrator and a piezoelectric longitudinal vibrator can be obtained by applying electrode printing, which is also a common technique, to this outer peripheral surface using a piezoelectric ceramic hollow cylinder that can be manufactured. It is possible to provide an ultrasonic motor with less variation in characteristics due to a bonding step and a complicated processing step.
【0022】更に,本発明の超音波モータにおいては,
圧電捩り振動子及び圧電縦振動子の共振周波数をそれぞ
れ単独に調整して一致させることが可能であるため,そ
れぞれの振動振幅を大きくすることが出来る。従ってト
ルクの大きな超音波モータを提供することができる。Further, in the ultrasonic motor of the present invention,
Since the resonance frequencies of the piezoelectric torsional vibrator and the piezoelectric longitudinal vibrator can be independently adjusted and matched, the vibration amplitude of each can be increased. Therefore, an ultrasonic motor having a large torque can be provided.
【図1】本発明の縦振動子捩り振動子圧接型超音波モー
タの一構成例を示す斜視図である。FIG. 1 is a perspective view showing one configuration example of a vertical vibrator torsional vibrator press contact type ultrasonic motor of the present invention.
【図2】図1の超音波モータに用いられる捩り振動子6
を示す斜視図である。FIG. 2 is a torsional vibrator 6 used in the ultrasonic motor of FIG.
FIG.
【図3】図1の超音波モータに用いられる縦振動子8
(8′)を示す斜視図である。FIG. 3 is a longitudinal oscillator 8 used in the ultrasonic motor of FIG. 1;
It is a perspective view which shows (8 ').
【図4】(a)および(b)は本発明の超音波モータに
用いられる別のタイプの縦振動子の構造例を示す斜視図
である。FIGS. 4A and 4B are perspective views showing a structural example of another type of vertical vibrator used in the ultrasonic motor of the present invention.
【図5】従来の超音波モータの構造を示す斜視図であ
る。FIG. 5 is a perspective view showing a structure of a conventional ultrasonic motor.
【図6】図5の超音波モータに用いられている圧電捩り
複合振動子の構造を示す斜視図である。FIG. 6 is a perspective view showing a structure of a piezoelectric torsional composite vibrator used in the ultrasonic motor of FIG.
【図7】図5の縦一捩り型超音波モータの動作原理の説
明図である。FIG. 7 is an explanatory view of the operation principle of the vertical one-twist type ultrasonic motor of FIG. 5;
6 捩り振動子 7 圧電セラミック中空円柱 8 縦振動子 8´ 縦振動子 8a 周電極 8b 周電極 8c 周電極 8d 周電極 8e 周電極 8f 周電極 8g 周電極 8h 周電極 10 支持リング 11 固定ベース 11´ 固定ベース 12 ロータ 12´ ロータ, 13 シャフト 14 皿バネ 15 ナット 17 交差指電極 18 交差指電極 40 圧電セラミック 40´ 圧電セラミック 41a 交差指電極 41b 交差指電極 41c 交差指電極 41d 交差指電極 101 圧電捩り複合振動子 102 圧電縦振動子 102´ 圧電縦振動子 103 縦一捩り複合振動子 104 ローター 105 扇形の圧電セラミック板 6 Torsional vibrator 7 Piezoelectric ceramic hollow cylinder 8 Vertical vibrator 8 'Vertical vibrator 8a Peripheral electrode 8b Peripheral electrode 8c Peripheral electrode 8d Peripheral electrode 8e Peripheral electrode 8f Peripheral electrode 8g Peripheral electrode 8h Peripheral electrode 10 Support ring 11 Fixed base 11' Fixed base 12 Rotor 12 'Rotor, 13 Shaft 14 Belleville spring 15 Nut 17 Cross finger electrode 18 Cross finger electrode 40 Piezoelectric ceramic 40' Piezoelectric ceramic 41a Cross finger electrode 41b Cross finger electrode 41c Cross finger electrode 41d Cross finger electrode 101 Piezoelectric torsion composite Vibrator 102 Piezoelectric longitudinal vibrator 102 'Piezoelectric longitudinal vibrator 103 Vertical one-twist composite vibrator 104 Rotor 105 Fan-shaped piezoelectric ceramic plate
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H02P 2/16 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H02P 2/16
Claims (5)
ク中空円柱からなる捩り振動子と,前記捩り振動子の一
端部と対向する一端部を有し長さ方向に伸縮振動を行う
圧電セラミック中空円柱からなる縦振動子と,前記捩り
振動子と前記縦振動子とに介在して夫々の振動子の一端
部に圧接されるロータとを備えたことを特徴とする超音
波モータ。1. A torsional vibrator made of a hollow piezoelectric ceramic column that performs torsional vibration in a circumferential direction, and a piezoelectric ceramic hollow member having one end facing one end of the torsional vibrator and performing stretching vibration in the longitudinal direction. An ultrasonic motor comprising: a vertical vibrator formed of a cylinder; and a rotor interposed between the torsional vibrator and the vertical vibrator and pressed against one end of each vibrator.
縦振動子の一端部に対向する他端部は固定され,前記捩
り振動子は,捩り振動の節部で支持されていることを特
徴とする超音波モータ。2. The ultrasonic motor according to claim 1, wherein the other end of the longitudinal vibrator facing one end is fixed, and the torsional vibrator is supported by a node of torsional vibration. Ultrasonic motor.
縦振動子及び前記捩り振動子及びこれら間に配されたロ
ータとを一直線に貫通する軸を設け,前記捩り振動子を
捩り振動の節部で支持リングで支持し,前記縦振動子の
前記一端部に対向する他端部を固定部材に固定して,前
記固定枠内に収容したことを特徴とする超音波モータ。3. The ultrasonic motor according to claim 1, further comprising: a shaft penetrating the longitudinal vibrator, the torsional vibrator, and a rotor disposed therebetween in a straight line, and the torsional vibrator is a node of torsional vibration. An ultrasonic motor, wherein the ultrasonic vibrator is supported by a support ring at a portion, and the other end of the longitudinal vibrator facing the one end is fixed to a fixing member and housed in the fixing frame.
捩り縦振動子は前記圧電セラミック中空円柱の外周面
に,長さ方向に対して45°をなす方向に平行に延在す
る交差指電極が形成されていることを特徴とする超音波
モータ。4. The ultrasonic motor according to claim 1, wherein said torsional longitudinal vibrator extends on an outer peripheral surface of said piezoelectric ceramic hollow cylinder in a direction parallel to a longitudinal direction at an angle of 45 °. An ultrasonic motor characterized in that the ultrasonic motor is formed.
縦振動子は前記圧電セラミック中空円柱の外周面に長さ
方向または,円周方向に平行に延在する交差指電極が形
成されていることを特徴とする超音波モータ。5. The ultrasonic motor according to claim 1, wherein said vertical vibrator has interdigitated electrodes formed on an outer peripheral surface of said piezoelectric ceramic hollow cylinder to extend in a length direction or in a circumferential direction in parallel. An ultrasonic motor characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03197389A JP3141209B2 (en) | 1991-07-12 | 1991-07-12 | Ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03197389A JP3141209B2 (en) | 1991-07-12 | 1991-07-12 | Ultrasonic motor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0522962A JPH0522962A (en) | 1993-01-29 |
JP3141209B2 true JP3141209B2 (en) | 2001-03-05 |
Family
ID=16373698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03197389A Expired - Fee Related JP3141209B2 (en) | 1991-07-12 | 1991-07-12 | Ultrasonic motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3141209B2 (en) |
-
1991
- 1991-07-12 JP JP03197389A patent/JP3141209B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0522962A (en) | 1993-01-29 |
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