JP3126101B2 - Contact type measuring instrument - Google Patents
Contact type measuring instrumentInfo
- Publication number
- JP3126101B2 JP3126101B2 JP07199642A JP19964295A JP3126101B2 JP 3126101 B2 JP3126101 B2 JP 3126101B2 JP 07199642 A JP07199642 A JP 07199642A JP 19964295 A JP19964295 A JP 19964295A JP 3126101 B2 JP3126101 B2 JP 3126101B2
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- slider
- length measuring
- axis
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、本体と、この本体
に摺動自在に設けられかつ被測定物に当接される測定子
を有するスライダと、このスライダの移動量を検出する
測長手段とを備えた当接型測定器に関する。詳しくは、
測長手段の測長軸線から外れた位置に測定子が位置す
る、いわゆる、反アッベ構造の当接型測定器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slider having a main body, a slider slidably provided on the main body, and having a tracing stylus in contact with an object to be measured, and length measuring means for detecting the amount of movement of the slider. The present invention relates to a contact-type measuring device comprising: For more information,
The present invention relates to a so-called anti-abbe structure contact type measuring device in which a measuring element is located at a position deviated from a length measuring axis of a length measuring means.
【０００２】[0002]
【背景技術】本体に対して、測定子を有するスライダを
摺動自在に設けた当接型測定器のなかには、スライダの
移動量を検出する測長手段の測長軸線から外れた位置に
測定子を位置させた測定器、たとえば、ノギスが知られ
ている。ノギスは、本尺にスライダを摺動自在に設ける
とともに、本尺およびスライダのそれぞれに測定子であ
る外側測定ジョーおよび内側測定ジョーを直角（本尺の
長手方向に対して直角）に設けた構造であるから、つま
り、測定子である各ジョーが測長手段を構成する本尺上
にないため、使い勝手がよいという利点がある。2. Description of the Related Art Some contact measuring instruments provided with a slider having a measuring element slidably with respect to a main body include a measuring element at a position deviated from a length measuring axis of a length measuring means for detecting an amount of movement of the slider. Is known, for example, a caliper. The caliper has a structure in which a slider is slidably provided on a main scale and an outer measuring jaw and an inner measuring jaw, which are measuring elements, are provided at right angles (at right angles to the longitudinal direction of the main scale) on each of the main scale and the slider. That is, since each jaw as a measuring element is not on the main scale constituting the length measuring means, there is an advantage that the usability is good.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上述し
たノギスのように、測定子が測長手段の測長軸線から外
れた位置にある、いわゆる、反アッベ構造の当接型測定
器では、スライダを摺動自在に案内する本体（ノギスで
は本尺）の摺動基準端面の真直度によってスライダが本
体（本尺）に対して傾き、または、測定子が被測定物に
当接したときの測定力によりスライダが本体（本尺）に
対して傾き、それぞれ測定誤差が発生するという問題が
あった。However, as in the case of the above-mentioned caliper, the contact measuring device having a so-called anti-Abbe structure in which the measuring element is located at a position deviated from the length measuring axis of the length measuring means has a slider. The measuring force when the slider is tilted with respect to the main body (the main scale) or the measuring element comes into contact with the object to be measured, depending on the straightness of the sliding reference end surface of the main body (the main scale for calipers) that is slidably guided. As a result, there is a problem that the slider is inclined with respect to the main body (main scale), and a measurement error occurs.
【０００４】このような問題を解消するために、マイク
ロメータのように、測定子を測長手段の測長軸線上に配
置すると、使い勝手が低下する。また、反アッベ構造の
まま、精度の向上を図ろうとすると、本体（ノギスでは
本尺）の摺動基準端面の真直度を出すために加工精度を
厳しく管理しなくてはならず、かつ、本体とスライダと
の間のガタを低減するため剛性を高めなければならな
い。If the measuring element is arranged on the length measuring axis of the length measuring means like a micrometer in order to solve such a problem, the usability is reduced. In addition, if the accuracy is to be improved with the anti-Abbe structure, machining accuracy must be strictly controlled in order to obtain the straightness of the sliding reference end face of the main body (calipers). The rigidity must be increased to reduce backlash between the slider and the slider.
【０００５】本発明の目的は、このような従来の問題を
解消し、反アッベ構造の測定器であっても、加工精度や
剛性を大幅に高くしなくても、精度の向上が図れる当接
型測定器を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve such a conventional problem and to improve the accuracy of a measuring instrument having an anti-Abbe structure without significantly increasing machining accuracy and rigidity. An object of the present invention is to provide a type measuring instrument.
【０００６】[0006]
【課題を解決するための手段】本発明に係る当接型測定
器は、本体と、この本体に摺動自在に設けられかつ被測
定物に当接される測定子を有するスライダと、このスラ
イダの移動量を検出する測長手段とを備え、前記測長手
段の測長軸線から外れた位置に前記測定子が位置する当
接型測定器において、前記本体に対する前記スライダの
傾き量を検出する姿勢検出手段と、この姿勢検出手段で
検出されたスライダの傾き量に基づく前記測定子の測定
点における誤差を前記測長手段で検出されたスライダの
移動量から補正する誤差補正手段とを備えることを特徴
とする。SUMMARY OF THE INVENTION A contact type measuring instrument according to the present invention comprises: a main body; a slider slidably provided on the main body and having a measuring element which comes into contact with an object to be measured; Measuring means for detecting the amount of movement of the slider, and detecting the amount of inclination of the slider with respect to the main body in a contact type measuring device in which the measuring element is located at a position deviated from the length measuring axis of the length measuring means. Attitude detection means, and error correction means for correcting an error at a measurement point of the tracing stylus based on the amount of inclination of the slider detected by the attitude detection means from a movement amount of the slider detected by the length measurement means. It is characterized by.
【０００７】このような構成では、測定にあたって、ス
ライダを本体に沿って移動させ、測定子を被測定物に当
接させる。このとき、本体の摺動基準端面の真直度や測
定力によってスライダが本体に対して傾くと、その傾き
量が姿勢検出手段で検出される。すると、姿勢検出手段
で検出されたスライダの傾き量に基づく前記測定子の測
定点における誤差が測長手段で検出されたスライダの移
動量から補正されるため、反アッベ構造の当接型測定器
であっても、加工精度や剛性を大幅に高くしなくても、
精度の向上を図ることができる。In such a configuration, upon measurement, the slider is moved along the main body, and the probe is brought into contact with the object to be measured. At this time, when the slider is tilted with respect to the main body due to the straightness or the measuring force of the sliding reference end surface of the main body, the amount of the tilt is detected by the posture detecting means. Then, an error at the measuring point of the tracing stylus based on the amount of inclination of the slider detected by the attitude detecting means is corrected from the amount of movement of the slider detected by the length measuring means. However, even without significantly increasing the processing accuracy and rigidity,
Accuracy can be improved.
【０００８】また、上記構造の当接型測定器において、
前記姿勢検出手段は、前記スライダに前記測長手段の測
長軸線方向または測長軸線に対して直交方向に所定距離
隔てて設けられかつその位置で前記測長軸線直交方向ま
たは測長軸線方向のスライダの変位をそれぞれ検出する
一対の変位検出手段と、この一対の変位検出手段からの
変位量および一対の変位検出手段間の距離から前記スラ
イダの傾き量を算出する傾き量算出手段とを含み構成さ
れていることを特徴とする。このような構成では、姿勢
検出手段が、一対の変位検出手段と、この一対の変位検
出手段からの測定データおよび一対の変位検出手段間の
距離からスライダの傾き量を算出する角度算出手段とを
含み構成されているから、安価に構成できる。この場
合、変位測定手段として静電容量式測長センサを用いれ
ば、低消費電流化できる。[0008] In the contact type measuring device having the above structure,
The attitude detecting means is provided on the slider at a predetermined distance in the direction of the length-measuring axis of the length-measuring means or in a direction perpendicular to the length-measuring axis, and at that position, the direction of the length-measuring axis orthogonal or the length-measuring axis is provided. Including a pair of displacement detecting means for detecting the displacement of the slider, and a tilt amount calculating means for calculating the amount of tilt of the slider from the amount of displacement from the pair of displacement detecting means and the distance between the pair of displacement detecting means It is characterized by having been done. In such a configuration, the attitude detecting means includes a pair of displacement detecting means and an angle calculating means for calculating the amount of inclination of the slider from the measurement data from the pair of displacement detecting means and the distance between the pair of displacement detecting means. Since it is included, it can be constructed at low cost. In this case, current consumption can be reduced by using a capacitance type length measuring sensor as the displacement measuring means.
【０００９】また、上記構造の当接型測定器において、
前記測長手段の測長軸線から前記測定子の測定点までの
距離ａと、前記一対の変位検出手段間の距離ｂとの比率
が、１：ｎまたはｎ：１（ただし、ｎは整数）に設定さ
れていることを特徴とする。このような構成では、一対
の変位検出手段の変位量の差分を１／ｎまたはｎ倍する
だけで補正量を求めることができる。In the contact type measuring device having the above structure,
The ratio of the distance a from the length measuring axis of the length measuring means to the measuring point of the tracing stylus and the distance b between the pair of displacement detecting means is 1: n or n: 1 (where n is an integer). Is set to. In such a configuration, the correction amount can be obtained only by multiplying the difference between the displacement amounts of the pair of displacement detection units by 1 / n or n.
【００１０】また、上記構造の当接型測定器において、
前記一対の変位検出手段間の距離が、前記測長手段の測
長軸線から前記測定子の測定点までの距離と等しく設定
されていることを特徴とする。このような構成では、一
対の変位検出手段の変位量の差分をそのまま補正量とし
て補正演算することができるから、補正演算をより簡単
化できる。In the contact type measuring device having the above structure,
A distance between the pair of displacement detecting means is set equal to a distance from a length measuring axis of the length measuring means to a measuring point of the tracing stylus. In such a configuration, since the difference between the displacement amounts of the pair of displacement detection means can be directly used as the correction amount for the correction operation, the correction operation can be further simplified.
【００１１】また、上記構造の当接型測定器において、
前記測長手段の測長軸線から前記測定子の測定点までの
距離ａと前記一対の変位検出手段間の距離ｂとの比率
と、前記測長手段の分解能と前記変位検出手段の分解能
との比率とが同じに設定されていることを特徴とする。
このような構成でも、一対の変位検出手段の変位量の差
分をそのまま補正量として測長手段の変位量から補正演
算することができるから、補正演算をより簡単化でき
る。In the contact type measuring device having the above structure,
The ratio between the distance a from the length measuring axis of the length measuring means to the measuring point of the tracing stylus and the distance b between the pair of displacement detecting means, and the resolution of the length measuring means and the resolution of the displacement detecting means. The ratio is set to be the same.
Even with such a configuration, since the difference between the displacement amounts of the pair of displacement detection units can be used as it is as the correction amount and the correction operation is performed from the displacement amount of the length measuring unit, the correction operation can be further simplified.
【００１２】また、上記構造の当接型測定器において、
前記測長手段の測長軸線から前記測定子の測定点までの
距離ａと前記一対の変位検出手段間の距離ｂとの比率
が、１：ｍ（ただし、ｍ＞１）に設定されていることを
特徴とする。このような構成では、一対の変位検出手段
の分解能を小さく（高く）せずに高精度な補正ができ
る。Further, in the contact type measuring device having the above structure,
The ratio of the distance a from the length measuring axis of the length measuring means to the measuring point of the tracing stylus and the distance b between the pair of displacement detecting means is set to 1: m (where m> 1). It is characterized by the following. In such a configuration, high-precision correction can be performed without reducing (highing) the resolution of the pair of displacement detection units.
【００１３】[0013]
【発明の実施の形態】以下、本発明をノギスに適用した
一実施形態を図を参照しながら詳細に説明する。図１は
本実施形態のノギスの概略構成を示している。同ノギス
１０１は、本体としての本尺１と、この本尺１に摺動自
在に設けられたスライダ２とを備えている。これら本尺
１およびスライダ２の一端側には、被測定物の測定部位
に当接される測定子としての外側測定ジョー３，４がそ
れぞれ直角（本尺１の長手方向に対して直角）に設けら
れている。つまり、各外側測定ジョー３，４が後述する
測長手段（Ｘ軸測長センサ１１）の測長軸線ＳＬ上から
外れた位置に設けられている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a caliper will be described below in detail with reference to the drawings. FIG. 1 shows a schematic configuration of a caliper of the present embodiment. The caliper 101 includes a main scale 1 as a main body and a slider 2 slidably provided on the main scale 1. On one end side of the main scale 1 and the slider 2, outer measuring jaws 3, 4 as measuring elements contacting the measurement site of the object to be measured are each at right angles (at right angles to the longitudinal direction of the main scale 1). Is provided. That is, the outer measuring jaws 3 and 4 are provided at positions off the length measuring axis SL of the length measuring means (X-axis length measuring sensor 11) described later.
【００１４】前記スライダ２には、そのスライダ２のＸ
軸方向の移動量を検出する測長手段としてのＸ軸測長セ
ンサ１１が設けられているとともに、このＸ軸測長セン
サ１１の測長軸線ＳＬ方向（Ｘ軸方向）に所定距離隔て
た位置にその測長軸線直交方向（Ｙ軸方向）のスライダ
２の変位を検出する変位検出手段としての一対のＹ軸測
長センサ１２y,１３y がそれぞれ設けられている。な
お、これらの測長センサ１１，１２y,１３y としては、
たとえば、本尺１に各軸（Ｘ，Ｙ軸）方向に沿って一定
ピッチ間隔で設けられた複数の電極（スケール）と静電
容量結合する複数の電極を有し、スライダ２の移動に伴
って変化する静電容量からスライダ２の移動量を検出す
る静電容量式測長センサ、あるいは、他の公知のセンサ
を利用できる。ここで、図２に示すように、Ｘ軸測長セ
ンサ１１の測長軸線ＳＬから前記外側測定ジョー４の測
定点Ｐ（被測定物が当接されると予想される点）までの
距離をａ、一対のＹ軸測長センサ１２y,１３y 間の距離
をｂにそれぞれ設定してある。The slider 2 has X
An X-axis length sensor 11 is provided as a length measuring means for detecting the amount of movement in the axial direction, and the X-axis length measuring sensor 11 is positioned at a predetermined distance in a length measuring axis SL direction (X-axis direction). Are provided with a pair of Y-axis length measuring sensors 12y and 13y as displacement detecting means for detecting the displacement of the slider 2 in the direction orthogonal to the length measuring axis (Y-axis direction). In addition, as these length measuring sensors 11, 12y, 13y,
For example, the main scale 1 has a plurality of electrodes (scales) provided at a constant pitch along each axis (X, Y axis) direction and has a plurality of electrodes that are capacitively coupled. A capacitance-type length measurement sensor that detects the amount of movement of the slider 2 from the capacitance that changes in the above-described manner, or another known sensor can be used. Here, as shown in FIG. 2, the distance from the measurement axis SL of the X-axis measurement sensor 11 to the measurement point P of the outer measurement jaw 4 (the point at which the object to be measured is expected to come into contact) is defined as a, the distance between the pair of Y-axis length measuring sensors 12y, 13y is set to b.
【００１５】前記Ｘ軸測長センサ１１からの出力は、計
数回路２１においてスライダ２の移動量に対応する数の
パルス数として計数されたのち、誤差補正手段としての
誤差補正回路２２に与えられる。前記各Ｙ軸測長センサ
１２y,１３y からの出力は、それぞれ計数回路２３，２
４において、その各位置におけるスライダ２のＹ軸方向
の変位量に対応する数のパルス数として計数されたの
ち、傾き量算出手段としての傾き量算出回路２５に与え
られる。傾き量算出回路２５では、両Ｙ軸測長センサ１
２y,１３y からの変位量および両Ｙ軸測長センサ１２y,
１３y 間の距離ｂからスライダ２の傾き角度θを算出
し、それを誤差補正回路２２に与える。ここに、Ｙ軸測
長センサ１２y,１３y 、計数回路２３，２４および傾き
量算出回路２５から、スライダ２の傾き角度θ（傾き
量）を検出する姿勢検出手段２６が構成されている。The output from the X-axis length measuring sensor 11 is counted by a counting circuit 21 as the number of pulses corresponding to the amount of movement of the slider 2, and then supplied to an error correction circuit 22 as error correction means. Outputs from the Y-axis length measuring sensors 12y and 13y are output from counting circuits 23 and 2 respectively.
In step 4, the number of pulses corresponding to the amount of displacement of the slider 2 in the Y-axis direction at each position is counted, and then supplied to a tilt amount calculating circuit 25 as tilt amount calculating means. In the inclination amount calculating circuit 25, both the Y-axis length measuring sensors 1
2y, 13y, and both Y-axis length measuring sensors 12y,
The inclination angle θ of the slider 2 is calculated from the distance b between the distances 13y and 13b, and is given to the error correction circuit 22. Here, a posture detecting means 26 for detecting the inclination angle θ (inclination amount) of the slider 2 is constituted by the Y-axis length measuring sensors 12y, 13y, the counting circuits 23, 24 and the inclination amount calculating circuit 25.
【００１６】前記誤差補正回路２２は、前記傾き量算出
回路２５で算出されたスライダ２の傾き角度θと、Ｘ軸
測長センサ１１の測長軸線ＳＬから前記ジョー４の測定
点Ｐまでの距離ａとからジョー４の測定点Ｐにおける誤
差δを求め、この誤差δを前記Ｘ軸測長センサ１１で検
出されたスライダ２の移動量ｘから補正し、その結果を
表示器２７に表示させる。つまり、誤差δを δ＝ａ・ｔａｎθ ………………………………（１） から求め、この誤差δをＸ軸測長センサ１１で検出され
たスライダ２の移動量ｘから補正する。The error correction circuit 22 calculates the tilt angle θ of the slider 2 calculated by the tilt amount calculation circuit 25 and the distance from the measurement axis SL of the X-axis measurement sensor 11 to the measurement point P of the jaw 4. Then, an error δ at the measurement point P of the jaw 4 is determined from the value a, and the error δ is corrected from the movement amount x of the slider 2 detected by the X-axis length measuring sensor 11, and the result is displayed on the display 27. That is, the error δ is obtained from δ = a · tan θ (1), and the error δ is corrected from the moving amount x of the slider 2 detected by the X-axis length measuring sensor 11. I do.
【００１７】従って、本実施形態によれば、スライダ２
の傾き角度θを検出する姿勢検出手段２６と、この姿勢
検出手段２６で検出されたスライダ２の傾き角度θに基
づくジョー４の測定点Ｐでの誤差δをＸ軸測長センサ１
１で検出されたスライダ２の移動量ｘから補正する誤差
補正回路２２とを備えているから、スライダ２を本尺１
に沿って移動させ、ジョー４が被測定物に当接したと
き、本尺１の摺動基準端面の真直度や測定力によってス
ライダ２が本尺１に対して傾いても、その傾き角度θが
姿勢検出手段２６で検出されたのち、その傾き角度に基
づくジョー４の測定点Ｐでの誤差δがＸ軸測長センサ１
１で検出されたスライダ２の移動量ｘから補正されるた
め、反アッベ構造の測定器であっても、加工精度や剛性
を大幅に高くしなくても、精度の向上が図れる。Therefore, according to the present embodiment, the slider 2
And an error δ at a measurement point P of the jaw 4 based on the inclination angle θ of the slider 2 detected by the attitude detection means 26.
1 is provided with an error correction circuit 22 that corrects the amount of movement x of the slider 2 detected at 1.
When the jaws 4 abut against the object to be measured when the slider 2 is tilted with respect to the main scale 1 due to the straightness of the sliding reference end face of the main scale 1 and the measuring force, the tilt angle θ Is detected by the posture detecting means 26, the error δ at the measuring point P of the jaw 4 based on the inclination angle is detected by the X-axis length measuring sensor 1.
Since the correction is made based on the movement amount x of the slider 2 detected in step 1, the accuracy can be improved even if the measuring device has an anti-Abbe structure without significantly increasing the processing accuracy and rigidity.
【００１８】また、姿勢検出手段２６を、スライダ２に
Ｘ軸測長センサ１１の測長軸線ＳＬ方向に所定距離隔て
て設けられた一対のＹ軸測長センサ１２y,１３y と、こ
の一対のＹ軸測長センサ１２y,１３y からの変位量およ
び一対のＹ軸測長センサ１２y,１３y 間の距離ｂからス
ライダ２の傾き角度θを算出する傾き量算出回路２５と
を含み構成したから、安価に構成できる。この場合、Ｙ
軸測長センサ１２y,１３y として静電容量式測長センサ
を用いれば、低消費電流化できる。The attitude detecting means 26 includes a pair of Y-axis length sensors 12y and 13y provided on the slider 2 at a predetermined distance in the direction of the length-measuring axis SL of the X-axis length measuring sensor 11, and a pair of Y-axis length sensors. The tilt amount calculating circuit 25 for calculating the tilt angle θ of the slider 2 from the displacement amount from the axis length measuring sensors 12y and 13y and the distance b between the pair of Y axis length measuring sensors 12y and 13y. Can be configured. In this case, Y
If the capacitance type length measuring sensors are used as the axial length measuring sensors 12y and 13y, the current consumption can be reduced.
【００１９】ここで、図３に示すように、各Ｙ軸測長セ
ンサ１２y,１３y からの変位量をｙ 1,ｙ2 とすると、 ｔａｎθ＝（ｙ1 ＋ｙ2 ）／ｂ…………………（２） であるから、上記（１）式は、 δ＝ａ・（ｙ1 ＋ｙ2 ）／ｂ …………………（３） と表せる。また、両Ｙ軸測長センサ１２y,１３y 間の距
離ｂを、Ｘ軸測長センサ１１の測長軸線ＳＬから外側測
定ジョー４の測定点Ｐまでの距離ａと等しくなるように
設定すると、つまり、ａ＝ｂとすると、 δ＝ｙ1 ＋ｙ2 ………………………………（４） となるから、前記傾き量算出回路２５では、両Ｙ軸測長
センサ１２y,１３y からの変位量の差分（ｙ1 ＋ｙ2 ）
を求めるだけでよく、さらに、誤差補正回路２２ではＸ
軸測長センサ１１で検出されたスライダ２の移動量ｘか
ら差分（ｙ1 ＋ｙ 2 ）を補正（加算）するだけで済む利
点がある。Here, as shown in FIG.
The displacement amount from the sensors 12y and 13y 1,yTwoThen, tanθ = (y1+ YTwo) / B... (2) Therefore, the above equation (1) is given by δ = a · (y1+ YTwo) / B can be expressed as (3). In addition, the distance between the two Y-axis length measuring sensors 12y and 13y.
The distance b is measured outside from the measurement axis SL of the X-axis measurement sensor 11.
So that it is equal to the distance a to the measuring point P of the fixed jaw 4.
When set, that is, when a = b, δ = y1+ YTwo (4) In the inclination amount calculating circuit 25, both Y-axis length measurements are performed.
The difference between the displacement amounts from the sensors 12y and 13y (y1+ YTwo)
, And the error correction circuit 22 calculates X
The amount of movement x of the slider 2 detected by the axis length sensor 11
From the difference (y1+ Y Two) Only needs to be corrected (added)
There is a point.
【００２０】また、距離ａと距離ｂとの比率を、１：ｎ
またはｎ：１（ただし、ｎは整数）に設定しても、前記
差分（ｙ1 ＋ｙ2 ）を１／ｎ倍またはｎ倍すればよいか
ら、演算を簡単化できる。また、距離ａと距離ｂとの比
率と、Ｘ軸測長センサ１１の分解能とＹ軸測長センサ１
２y,１３y の分解能との比率とを同じに設定しても、誤
差演算を簡単化できる。たとえば、ａ：ｂ＝１：１．５
のとき、Ｙ軸測長センサ１２y,１３y の分解能（計数回
路２３，２４の１カウント当たり）１．５μｍとなるよ
うに決めると、計数回路２３，２４の１カウントが計数
回路２１の１カウントに相当するから、計数回路２３，
２４のカウント数の差分をそのままＸ軸測長センサ１１
で検出されたスライダ２の移動量ｘから補正すればよ
い。従って、誤差演算を簡単化できる。この場合、距離
ａと距離ｂとの比率を、１：ｍ（ただし、ｍ＞１）とす
れば、Ｙ軸測長センサ１２y,１３y の分解能を小さく
（高く）せずに高精度な補正ができる。The ratio of the distance a to the distance b is 1: n
Or even if it is set to n: 1 (where n is an integer), the difference (y 1 + y 2 ) may be multiplied by 1 / n or n times, so that the calculation can be simplified. The ratio of the distance a to the distance b, the resolution of the X-axis length measuring sensor 11, and the Y-axis length measuring sensor 1
The error calculation can be simplified even if the ratio with the resolution of 2y, 13y is set to be the same. For example, a: b = 1: 1.5
At this time, if the resolution of the Y-axis length measuring sensors 12y and 13y is determined to be 1.5 μm (per count of the counting circuits 23 and 24), one count of the counting circuits 23 and 24 becomes one count of the counting circuit 21. The counting circuit 23,
X-axis length measurement sensor 11
The correction may be made based on the movement amount x of the slider 2 detected in step (1). Therefore, error calculation can be simplified. In this case, if the ratio between the distance a and the distance b is 1: m (where m> 1), high-precision correction can be performed without reducing (or increasing) the resolution of the Y-axis length measuring sensors 12y and 13y. it can.
【００２１】以上、本発明について好適な実施形態を挙
げて説明したが、本発明は、この実施形態に限られるも
のでなく、本発明の要旨を逸脱しない範囲での変更が可
能である。たとえば、Ｙ軸測長センサ１２y,１３y の配
置位置は、上記実施形態で述べた配置位置に限らず、Ｘ
軸測長センサ１１の測長軸線ＳＬ上でもよく、あるい
は、Ｘ軸測長センサ１１の測長軸線ＳＬを跨ぐようにＹ
軸測長センサ１２y とＹ軸測長センサ１３y とを配置し
てもよい。Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to these embodiments, and can be modified without departing from the spirit of the present invention. For example, the arrangement positions of the Y-axis length measuring sensors 12y and 13y are not limited to the arrangement positions described in the above-described embodiment.
It may be on the measurement axis SL of the axis measurement sensor 11, or Y may extend over the measurement axis SL of the X-axis measurement sensor 11.
The axis length sensor 12y and the Y axis length sensor 13y may be arranged.
【００２２】また、前記Ｙ軸測長センサ１２y,１３y に
代えて、図４に示すように、Ｘ軸測長センサ１１の測長
軸線ＳＬに対して直交方向（Ｙ軸方向）に所定距離隔て
てかつ測長軸線ＳＬを跨ぐ位置に、前記測長軸線ＳＬ方
向（Ｘ軸方向）のスライダ２の変位をそれぞれ検出する
Ｘ軸測長センサ１２x,１３x を配置し、この測長センサ
１２x,１３x からの変位量および一対のＸ軸測長センサ
１２x,１３x 間の距離ｂからスライダ２の傾き角度θ
（傾き量）を算出するようにしてもよい。この場合、Ｘ
軸測長センサ１１の移動量を基準に各Ｘ軸測長センサ１
２x,１３x の差を求め、それらの差の合計値と一対のＸ
軸測長センサ１２x,１３x 間の距離ｂとからスライダ２
の傾き角度θを算出する。この場合でも、距離ａと距離
ｂとの比率を、１：ｎまたはｎ：１（ただし、ｎは整
数）、あるいは、１：１に設定することが好ましい。な
お、上記各実施形態において、ＳＬセンサの数は３以上
であってもよい。In place of the Y-axis length measuring sensors 12y and 13y, as shown in FIG. 4, the X-axis length measuring sensor 11 is separated by a predetermined distance in a direction perpendicular to the length measuring axis SL (Y-axis direction). And X-axis length measuring sensors 12x and 13x for detecting the displacement of the slider 2 in the direction of the length measuring axis SL (X-axis direction), respectively, at positions straddling the length measuring axis SL. The inclination angle θ of the slider 2 is determined from the displacement amount from the distance X and the distance b between the pair of X-axis length measuring sensors 12x and 13x.
(Slope amount) may be calculated. In this case, X
Each X-axis length measuring sensor 1 based on the movement amount of the axis length measuring sensor 11
2x, 13x, the sum of those differences and a pair of X
From the distance b between the axis length measuring sensors 12x and 13x and the slider 2
Is calculated. Also in this case, it is preferable to set the ratio between the distance a and the distance b to 1: n or n: 1 (where n is an integer) or 1: 1. In each of the above embodiments, the number of SL sensors may be three or more.
【００２３】また、各測長センサ１１，１２y,１３y,１
２x,１３x としては、上記実施形態で例示した静電容量
式測長センサに限らず、光電式や電磁式の測長センサを
用いることができる。また、上記実施形態では、測長セ
ンサ１２y,１３y,１２x,１３x 、計数回路２３，２４お
よび傾き量算出回路２５によって姿勢検出手段２６を構
成したが、これに限らず、ロータリエンコーダなどの他
の姿勢検出手段を用いることができる。Each of the length measuring sensors 11, 12y, 13y, 1
The 2x and 13x are not limited to the capacitance type length measuring sensors exemplified in the above embodiment, but may be photoelectric type or electromagnetic type length measuring sensors. Further, in the above embodiment, the posture detecting means 26 is constituted by the length measuring sensors 12y, 13y, 12x, 13x, the counting circuits 23, 24, and the inclination amount calculating circuit 25. However, the present invention is not limited to this. Attitude detecting means can be used.
【００２４】また、上記実施形態では、ノギス１０１を
例に挙げて説明したが、本発明は、これに限らず、本体
に対してスライダが摺動自在に設けられた当接型測定器
一般に適用できる。たとえば、支柱（本体）に対して、
測定子を有するスライダが昇降するハイトゲージなどに
も適用できる。In the above-described embodiment, the caliper 101 has been described as an example. However, the present invention is not limited to this, and is generally applied to a contact type measuring device in which a slider is slidably provided on a main body. it can. For example, for the pillar (body)
The present invention is also applicable to a height gauge or the like in which a slider having a tracing stylus moves up and down.
【００２５】[0025]
【発明の効果】本発明の当接型測定器によれば、反アッ
ベ構造の測定器であっても、加工精度や剛性を大幅に高
くしなくても、精度の向上が図れる。According to the contact type measuring device of the present invention, even if the measuring device has an anti-Abbe structure, the accuracy can be improved without significantly increasing the processing accuracy and rigidity.
【図１】本発明をノギスに適用した一実施形態の概略構
成を示す図である。FIG. 1 is a diagram showing a schematic configuration of an embodiment in which the present invention is applied to a caliper.
【図２】同上実施形態におけるスライダを示す正面図で
ある。FIG. 2 is a front view showing the slider in the embodiment.
【図３】同上実施形態においてスライダが傾いた状態を
示す図である。FIG. 3 is a diagram showing a state where a slider is tilted in the embodiment.
【図４】姿勢検出手段を構成する変位検出手段の他の実
施形態を示す図である。FIG. 4 is a diagram showing another embodiment of the displacement detecting means constituting the attitude detecting means.
１ 本尺（本体） ２ スライダ ４ 外側測定ジョー（測定子） １１ Ｘ軸測長センサ（測長手段） １２y,１３y Ｙ軸測長センサ（変位検出手段） １２x,１３x Ｘ軸測長センサ（変位検出手段） ２２ 誤差補正回路（誤差補正手段） ２５ 傾き量算出回路（傾き量算出手段） ２６ 姿勢検出手段 DESCRIPTION OF SYMBOLS 1 Main scale (main body) 2 Slider 4 Outer measuring jaw (measuring element) 11 X-axis measuring sensor (measuring means) 12y, 13y Y-axis measuring sensor (displacement detecting means) 12x, 13x X-axis measuring sensor (displacement) Detection means) 22 error correction circuit (error correction means) 25 tilt amount calculation circuit (tilt amount calculation means) 26 attitude detection means
フロントページの続き (72)発明者 高橋 哲人 神奈川県川崎市高津区坂戸１−20−１ 株式会社ミツトヨ内 (56)参考文献 実開 平１−162607（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 21/02 - 21/32 G01B 3/00 - 5/30 Continued on the front page (72) Inventor Tetsuto Takahashi 1-2-1 Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa Pref. Mitutoyo Co., Ltd. (56) References Hikaru 1-162607 (JP, A) (58) Field surveyed ( Int.Cl. 7 , DB name) G01B 21/02-21/32 G01B 3/00-5/30
Claims (7)
かつ被測定物に当接される測定子を有するスライダと、
このスライダの移動量を検出する測長手段とを備え、前
記測長手段の測長軸線から外れた位置に前記測定子が位
置する当接型測定器において、 前記本体に対する前記スライダの傾き量を検出する姿勢
検出手段と、 この姿勢検出手段で検出されたスライダの傾き量に基づ
く前記測定子の測定点における誤差を前記測長手段で検
出されたスライダの移動量から補正する誤差補正手段と
を備えることを特徴とする当接型測定器。A slider having a main body, a measuring element provided slidably on the main body and abutting against an object to be measured;
A length measuring means for detecting an amount of movement of the slider, wherein the measuring element is located at a position deviated from a length measuring axis of the length measuring means. and attitude <br/> detection means for detecting, correcting the error in the measurement point of the measuring element based on the inclination of the slider detected by the posture detecting means from movement of the slider detected by the measuring means An abutment type measuring device comprising: an error correcting unit.
て、前記姿勢検出手段は、前記スライダに前記測長手段
の測長軸線方向に所定距離隔てて設けられかつその位置
で前記測長軸線直交方向のスライダの変位をそれぞれ検
出する一対の変位検出手段と、この一対の変位検出手段
からの変位量および一対の変位検出手段間の距離から前
記スライダの傾き量を算出する傾き量算出手段とを含み
構成されていることを特徴とする当接型測定器。2. The abutment measuring device according to claim 1, wherein said attitude detecting means is provided on said slider at a predetermined distance in a length measuring axis direction of said length measuring means, and said length measuring means is provided at said position. A pair of displacement detecting means for detecting the displacement of the slider in a direction perpendicular to the axis, and a tilt amount calculating means for calculating a tilt amount of the slider from a displacement amount from the pair of displacement detecting means and a distance between the pair of displacement detecting means. And a contact-type measuring device.
て、前記姿勢検出手段は、前記スライダに前記測長手段
の測長軸線に対して直交方向に所定距離隔てて設けられ
かつその位置で前記測長軸線方向のスライダの変位をそ
れぞれ検出する一対の変位検出手段と、この一対の変位
検出手段からの変位量および一対の変位検出手段間の距
離から前記スライダの傾き量を算出する傾き量算出手段
とを含み構成されていることを特徴とする当接型測定
器。3. The contact type measuring device according to claim 1, wherein said attitude detecting means is provided on said slider at a predetermined distance in a direction orthogonal to a length measuring axis of said length measuring means and its position. A pair of displacement detecting means for respectively detecting the displacement of the slider in the direction of the length measuring axis, and an inclination for calculating the amount of inclination of the slider from the amount of displacement from the pair of displacement detecting means and the distance between the pair of displacement detecting means. An abutment-type measuring device comprising an amount calculating means.
測定器において、前記測長手段の測長軸線から前記測定
子の測定点までの距離ａと前記一対の変位検出手段間の
距離ｂとの比率が、１：ｎまたはｎ：１（ただし、ｎは
整数）に設定されていることを特徴とする当接型測定
器。4. The contact type measuring device according to claim 2, wherein a distance a from a length measuring axis of the length measuring means to a measuring point of the tracing stylus and a distance between the pair of displacement detecting means. A contact-type measuring device, wherein the ratio to the distance b is set to 1: n or n: 1 (where n is an integer).
測定器において、前記一対の変位検出手段間の距離ｂ
が、前記測長手段の測長軸線から前記測定子の測定点ま
での距離ａと等しく設定されていることを特徴とする当
接型測定器。5. A contact type measuring device according to claim 2, wherein a distance b between said pair of displacement detecting means.
Is set to be equal to the distance a from the length measuring axis of the length measuring means to the measuring point of the tracing stylus.
測定器において、前記測長手段の測長軸線から前記測定
子の測定点までの距離ａと前記一対の変位検出手段間の
距離ｂとの比率と、前記測長手段の分解能と前記変位検
出手段の分解能との比率とが同じに設定されていること
を特徴とする当接型測定器。6. A contact measuring device according to claim 2, wherein a distance a from a length measuring axis of said length measuring means to a measuring point of said measuring element and said pair of displacement detecting means. A contact type measuring device, wherein a ratio to a distance b and a ratio between a resolution of the length measuring means and a resolution of the displacement detecting means are set to be the same.
て、前記測長手段の測長軸線から前記測定子の測定点ま
での距離ａと前記一対の変位検出手段間の距離ｂとの比
率が、１：ｍ（ただし、ｍ＞１）に設定されていること
を特徴とする当接型測定器。7. The contact type measuring device according to claim 6, wherein a distance a from a length measuring axis of the length measuring means to a measuring point of the tracing stylus is a distance b between the pair of displacement detecting means. A contact type measuring device wherein the ratio is set to 1: m (where m> 1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07199642A JP3126101B2 (en) | 1995-08-04 | 1995-08-04 | Contact type measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07199642A JP3126101B2 (en) | 1995-08-04 | 1995-08-04 | Contact type measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0949722A JPH0949722A (en) | 1997-02-18 |
| JP3126101B2 true JP3126101B2 (en) | 2001-01-22 |
Family
ID=16411251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07199642A Expired - Fee Related JP3126101B2 (en) | 1995-08-04 | 1995-08-04 | Contact type measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3126101B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10321899B3 (en) * | 2003-05-06 | 2004-11-11 | Helios Messtechnik Gmbh & Co. Kg | Vernier calipers have an alignment arrangement for the sliding carriage of the moving jaw that prevents its pivoting when the jaw is held against an object to be measured |
| JP4783698B2 (en) * | 2006-09-05 | 2011-09-28 | 株式会社ミツトヨ | Electromagnetic induction encoder |
| CN108917515B (en) * | 2018-07-05 | 2020-08-07 | 晋西工业集团有限责任公司 | Splicing calibration method for indication error of wide-range universal caliper |
-
1995
- 1995-08-04 JP JP07199642A patent/JP3126101B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0949722A (en) | 1997-02-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4323212B2 (en) | Calibration method for surface texture measuring instrument, calibration program for surface texture measuring instrument, recording medium recording this calibration program, and surface texture measuring instrument | |
| JPH0310042B2 (en) | ||
| US8072228B2 (en) | Angle measuring device | |
| US7483807B2 (en) | Form measuring device, form measuring method, form analysis device, form analysis program, and recording medium storing the program | |
| JP4970204B2 (en) | Straightness measuring device, thickness variation measuring device, and orthogonality measuring device | |
| JPH07324948A (en) | Position measuring device | |
| US6543149B1 (en) | Coordinate measuring system | |
| JP3126101B2 (en) | Contact type measuring instrument | |
| JPH0949720A (en) | Butting-type measuring device | |
| JP4783698B2 (en) | Electromagnetic induction encoder | |
| JP4980818B2 (en) | Variation detection method of zero error of multi-point probe | |
| JP2008524576A (en) | Sequential multi-probe method for straightness measurement of straight rulers | |
| JP2746511B2 (en) | Method for measuring orientation flat width of single crystal ingot | |
| JP4980817B2 (en) | Multipoint probe zero error related value recording device | |
| JPH01221605A (en) | Thickness measuring instrument | |
| US11940304B2 (en) | Position-measuring device having four scanning units and two measuring graduations | |
| JP2678386B2 (en) | Position detection device | |
| JP2003232625A (en) | Method of measuring straightness | |
| SU1749697A1 (en) | Cylindrical part element linearity tester | |
| JP2749622B2 (en) | Position detection device | |
| JPH045507A (en) | Shape measuring instrument | |
| JPS6283601A (en) | Measurement of variation of ground surface | |
| KR20240025590A (en) | Methods and devices for measuring measurement objects | |
| GB2159941A (en) | Coordinate measuring machine | |
| JPH049714A (en) | Linear scale with temperature compensation mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20001017 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091102 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121102 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121102 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141102 Year of fee payment: 14 |
|
| LAPS | Cancellation because of no payment of annual fees |