JP3106324B2 - Thermal conductivity type absolute humidity sensor - Google Patents
Thermal conductivity type absolute humidity sensorInfo
- Publication number
- JP3106324B2 JP3106324B2 JP04025096A JP2509692A JP3106324B2 JP 3106324 B2 JP3106324 B2 JP 3106324B2 JP 04025096 A JP04025096 A JP 04025096A JP 2509692 A JP2509692 A JP 2509692A JP 3106324 B2 JP3106324 B2 JP 3106324B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- atmosphere
- resistance elements
- resistance
- thermosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、感熱抵抗素子を用い
て、空調器、除湿器、調理器、栽培ハウス等の雰囲気の
水蒸気量を検出する熱伝導式絶対湿度センサに関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat conduction type absolute humidity sensor for detecting the amount of water vapor in an atmosphere such as an air conditioner, a dehumidifier, a cooker, and a cultivation house using a heat-sensitive resistance element.
【０００２】[0002]
【従来の技術】近年、空調器、除湿器、調理器、栽培ハ
ウス等での絶対あるいは相対湿度の検出制御の要求が高
まっている。この要求に応えるため種々の方式の湿度セ
ンサが提案されている。2. Description of the Related Art In recent years, there has been an increasing demand for detection control of absolute or relative humidity in air conditioners, dehumidifiers, cookers, cultivation houses and the like. To meet this demand, various types of humidity sensors have been proposed.
【０００３】図４は、従来の熱伝導式絶対湿度センサの
構造を示す断面図である。図４において、従来の熱伝導
式絶対湿度センサは、感熱抵抗素子１´および２´と、
感熱抵抗素子１´および２´の端子９をそれぞれ支持す
るステム８と、湿度を測定しようとする大気（測定雰囲
気）に連通する通気孔７１が設けられ、感熱抵抗素子１
´を支持するステム８を覆うキャップ７ａと、感熱抵抗
素子２´を支持するステム８を覆うキャップ７ｂとを有
する。キャップ７ｂは、極低温（−４０℃）にてステム
８にかぶせられることにより、感熱抵抗素子２´を乾燥
空気（基準雰囲気）中に封入するものである。このよう
に、キャップ７ａとステム８、および、キャップ７ｂと
ステム８で、それぞれ、測定雰囲気および基準雰囲気を
規定する筐体部が形成されている。FIG. 4 is a sectional view showing a structure of a conventional heat conduction type absolute humidity sensor. In FIG. 4, a conventional heat conduction type absolute humidity sensor includes heat-sensitive resistance elements 1 ′ and 2 ′,
A stem 8 for supporting the terminals 9 of the thermal resistance elements 1 ′ and 2 ′, respectively, and a ventilation hole 71 communicating with the atmosphere (measurement atmosphere) whose humidity is to be measured are provided.
And a cap 7b covering the stem 8 supporting the thermal resistance element 2 '. The cap 7 b covers the stem 8 at extremely low temperature (−40 ° C.), thereby enclosing the thermosensitive resistance element 2 ′ in dry air (reference atmosphere). As described above, the cap 7a and the stem 8 and the cap 7b and the stem 8 form the casing that defines the measurement atmosphere and the reference atmosphere, respectively.
【０００４】図５は、この熱伝導式絶対湿度センサを含
む電気回路図である。図５において、感熱抵抗素子１´
（Ｒht）と感熱抵抗素子２´（Ｒt ）、固定抵抗Ｒ1 、
Ｒ2、Ｒ3 および保護抵抗Ｒs （ただし、白金抵抗のよ
うに正特性の温度特性を持つ感熱抵抗素子の場合は保護
抵抗Ｒs は必要無い。）により、ホイートストンブリッ
ジが構成される。ただしＲhtとＲt 、および、Ｒ1 とＲ
2 の温度−抵抗特性は等しくなければならない。感熱抵
抗素子２´は、乾燥雰囲気中に封入されており、感熱抵
抗素子１は、大気中にさらされている。いま、感熱抵抗
素子１´および２´に、印加電圧Ｖinが印加されると、
感熱抵抗素子１´および２´は自己発熱をし、周囲温度
よりも高くなる。感熱抵抗素子１´および２´の温度
は、感熱抵抗素子１´および２´に加わる電力と感熱抵
抗素子１´および２´の熱放散により決定されるが、大
気中に水蒸気が含まれていると、水蒸気が含まれていな
い場合に対して、水蒸気の熱伝導が作用して熱放散が大
きくなるため、感熱抵抗素子１´の温度は、感熱抵抗素
子２´よりも低くなる。このため、固定抵抗Ｒ3 の両端
に電位差が、即ち、出力電圧Ｖout が湿度信号として検
出される。このように、感熱抵抗素子１´および２´の
上昇温度差による抵抗値差に基づいて大気中の絶対湿度
を検出することができる。FIG. 5 is an electric circuit diagram including the heat conduction type absolute humidity sensor. In FIG. 5, the heat-sensitive resistance element 1 '
(R ht ), the thermal resistance element 2 ′ (R t ), the fixed resistance R 1 ,
A Wheatstone bridge is constituted by R 2 , R 3 and the protection resistor R s (however, the protection resistor R s is not necessary in the case of a thermal resistance element having a positive temperature characteristic such as a platinum resistor). Where R ht and R t , and R 1 and R
The temperature-resistance characteristics of 2 must be equal. The thermal resistance element 2 'is sealed in a dry atmosphere, and the thermal resistance element 1 is exposed to the atmosphere. Now, the thermal resistance elements 1 'and 2', the applied voltage V in is applied,
The heat-sensitive resistance elements 1 'and 2' generate heat by themselves and become higher than the ambient temperature. The temperature of the thermal resistance elements 1 'and 2' is determined by the power applied to the thermal resistance elements 1 'and 2' and the heat dissipation of the thermal resistance elements 1 'and 2', but the atmosphere contains water vapor. In contrast to the case where no water vapor is contained, the heat conduction of the water vapor acts to increase the heat dissipation, so that the temperature of the thermal resistance element 1 'is lower than that of the thermal resistance element 2'. Therefore, potential difference across the fixed resistor R 3, i.e., the output voltage V out is detected as humidity signal. As described above, the absolute humidity in the atmosphere can be detected based on the resistance value difference due to the temperature rise of the thermosensitive resistance elements 1 'and 2'.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、感熱抵
抗素子１´および２´の筐体部は、異なる部品で構成さ
れており、筐体部どおしは点接触となっている。このた
め、測定雰囲気と基準雰囲気との熱特性が不均一とな
り、感熱抵抗素子１´および２は、その湿度差以外の要
因で上昇温度差が生じ、正確な湿度検知が行えないとい
う問題点がある。However, the housings of the thermal resistance elements 1 'and 2' are formed of different components, and the housings are in point contact. For this reason, the thermal characteristics of the measurement atmosphere and the reference atmosphere become non-uniform, and the heat-sensitive resistance elements 1 ′ and 2 have a temperature rise due to factors other than the humidity difference, so that accurate humidity detection cannot be performed. is there.
【０００６】また、感熱抵抗素子１´および２´の特性
が揃うように、センサを維持、選別することは容易では
なく、感熱抵抗素子１´および２´の特性のずれは、温
度ドリフトや試料間の特性バラツキの原因となるという
問題点がある。Also, it is not easy to maintain and sort the sensors so that the characteristics of the thermal resistance elements 1 'and 2' are uniform. There is a problem that the characteristics may vary.
【０００７】本発明の課題は、測定雰囲気と基準雰囲気
との熱特性の均衡を保つことで、正確な湿度検知が行え
る熱伝導式絶対湿度センサを提供することである。It is an object of the present invention to provide a heat conduction type absolute humidity sensor capable of accurately detecting humidity by maintaining a balance between thermal characteristics of a measurement atmosphere and a reference atmosphere.
【０００８】[0008]
【課題を解決するための手段】本発明によれば、湿度を
測定しようとする測定雰囲気に晒された第１の感熱抵抗
素子と、所定の湿度を有する基準雰囲気に晒された第２
の感熱抵抗素子とを備え、該第１および第２の感熱抵抗
素子は実質的に同一の抵抗特性を有するものであって、
前記第１および第２の感熱抵抗素子それぞれに等しい電
流量の電流を流し、該第１および第２の感熱抵抗素子を
自己発熱させ、該第１および第２の感熱抵抗素子の上昇
温度差による該第１および第２の感熱抵抗素子の抵抗値
差に基づいて前記測定雰囲気の湿度を検出する熱伝導式
絶対湿度センサにおいて、前記第１および前記第２の感
熱抵抗素子ならびに該第１および該第２の感熱抵抗素子
のそれぞれの両端に電気的に接続した電気配線パターン
が同一面上に形成されたセラミックから成る基板と、該
基板に焼結接合され、前記測定雰囲気および前記基準雰
囲気が湿度同一のときに同一熱特性となるように該測定
雰囲気および該基準雰囲気を規定する、セラミックから
成る容器とを有することを特徴とする熱伝導式絶対湿度
センサが得られる。According to the present invention, a first thermal resistance element exposed to a measurement atmosphere whose humidity is to be measured and a second thermal resistance element exposed to a reference atmosphere having a predetermined humidity are provided.
Wherein the first and second thermosensitive resistance elements have substantially the same resistance characteristics,
A current having the same amount of current is applied to each of the first and second thermo-sensitive resistance elements to cause the first and second thermo-sensitive resistance elements to self-heat, and the temperature is increased by a temperature difference between the first and second thermo-sensitive resistance elements. In a heat conduction type absolute humidity sensor for detecting humidity of the measurement atmosphere based on a difference in resistance between the first and second thermosensitive resistance elements, the first and second thermosensitive resistance elements, and the first and second thermosensitive resistance elements A substrate made of ceramic on which an electric wiring pattern electrically connected to both ends of each of the second heat-sensitive resistance elements is formed on the same surface, and sintered and bonded to the substrate; A heat conduction type absolute humidity sensor having a ceramic container that defines the measurement atmosphere and the reference atmosphere so as to have the same thermal characteristics at the same time is obtained.
【０００９】さらに、本発明によれば、湿度を測定しよ
うとする測定雰囲気に晒された第１の感熱抵抗素子と、
所定の湿度を有する基準雰囲気に晒された第２の感熱抵
抗素子と、２つの固定抵抗素子とを備え、該第１および
第２の感熱抵抗素子と該２つの固定抵抗素子とはそれぞ
れ実質的に同一の抵抗特性を有するものであって、前記
第１および第２の感熱抵抗素子は互いに直列接続された
ブリッジ回路を有し、前記互いに直列接続された第１お
よび第２の感熱抵抗素子の両端に電圧を印加して、該第
１および第２の感熱抵抗素子を自己発熱させ、該第１お
よび第２の感熱抵抗素子の上昇温度差による該第１およ
び第２の感熱抵抗素子の抵抗値差に基づいて前記測定雰
囲気の湿度を検出する熱伝導式絶対湿度センサにおい
て、前記第１および前記第２の感熱抵抗素子ならびに該
第１および該第２の感熱抵抗素子のそれぞれの両端に電
気的に接続した電気配線パターンが同一面上に形成され
たセラミックから成る基板と、該基板に焼結接合され、
前記測定雰囲気および前記基準雰囲気が湿度同一のとき
に同一熱特性とするように該測定雰囲気および該基準雰
囲気を規定する、セラミックから成る容器とを有し、前
記基板および該容器のうち一方には、前記２つの固定抵
抗素子が形成されていることを特徴とする熱伝導式絶対
湿度センサが得られる。Further, according to the present invention, a first thermosensitive resistance element exposed to a measurement atmosphere whose humidity is to be measured,
A second heat-sensitive resistance element exposed to a reference atmosphere having a predetermined humidity; and two fixed resistance elements, wherein the first and second heat-sensitive resistance elements and the two fixed resistance elements are substantially Wherein the first and second thermosensitive resistance elements have a bridge circuit connected in series with each other, and the first and second thermosensitive resistance elements are connected in series with each other. A voltage is applied to both ends to cause the first and second thermosensitive elements to self-heat, and the resistance of the first and second thermosensitive elements due to a temperature difference between the first and second thermosensitive elements. In a heat conduction type absolute humidity sensor for detecting humidity of the measurement atmosphere based on a value difference, an electric current is applied to both ends of each of the first and second thermosensitive resistance elements and the first and second thermosensitive resistance elements. Connected electricity A substrate line pattern consists of a ceramic which is formed on the same surface, it is sinter-bonded to the substrate,
A container made of ceramic, which defines the measurement atmosphere and the reference atmosphere so that the measurement atmosphere and the reference atmosphere have the same thermal characteristics when the humidity is the same, has one of the substrate and the container. A heat conduction type absolute humidity sensor characterized in that the two fixed resistance elements are formed.
【００１０】即ち、本発明においては、感熱抵抗素子１
（測定雰囲気用）、感熱抵抗素子２（基準雰囲気用）を
金属あるいはセラミック基板の同一面上で構成（保持）
し、測定雰囲気を規定する感熱抵抗素子１の筐体部と、
基準雰囲気を規定する感熱抵抗素子２を乾燥封入するた
めの筐体部との全てを、セラミック（金属）にて一体焼
結することにより構成することで、測定雰囲気および基
準雰囲気の熱特性を均一にし、感熱抵抗素子１、２の熱
特性を揃える。さらに、固定抵抗Ｒ1 およびＲ2 も同一
面上に同一ペーストを印刷する等、厚膜技術にて形成す
ることによって固定抵抗Ｒ1 、Ｒ2 の微少な温度特性も
揃え、また小型化も図る。これによって、特性の安定
性、温度ドリフト、試料間の特性バラツキを改善し小型
化することを目的とする。また、厚膜技術にて構成でき
るため自動化による組立によって全体を構成する。That is, in the present invention, the heat-sensitive resistance element 1
(For measurement atmosphere), heat-sensitive resistance element 2 (for reference atmosphere) composed (held) on the same surface of a metal or ceramic substrate
And a housing of the thermal resistance element 1 for defining a measurement atmosphere;
All of the housing for drying and enclosing the thermosensitive resistance element 2 that defines the reference atmosphere is integrally sintered with ceramic (metal) so that the thermal characteristics of the measurement atmosphere and the reference atmosphere are uniform. And the thermal characteristics of the thermal resistance elements 1 and 2 are made uniform. Furthermore, the fixed resistors R 1 and R 2 are also formed by thick film technology, such as by printing the same paste on the same surface, so that the minute temperature characteristics of the fixed resistors R 1 and R 2 are also made uniform and the size is reduced. . Accordingly, it is an object to improve the stability of the characteristics, the temperature drift, and the variation in characteristics between samples, and to reduce the size. In addition, since it can be configured by the thick film technology, the whole is configured by assembly by automation.
【００１１】[0011]
【実施例】以下、図面を参照して、本発明の一実施例に
よる熱伝導式絶対湿度センサを説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A heat conduction type absolute humidity sensor according to an embodiment of the present invention will be described below with reference to the drawings.
【００１２】図１および図２は、本実施例による熱伝導
式絶対湿度センサの斜視図および要部の分解斜視図であ
る。図１および図２において、本センサは、ＡｌＮから
成る筐体１０を有する。筐体１０は、基板１１と、基板
１１の上下に配された枠１２および枠１３と、さらにそ
の上下に配された蓋１４および蓋１５とを有する。枠１
２および１３と蓋１４および１５とを総称して容器と呼
ぶ。基板１１、枠１２および枠１３、蓋１４および蓋１
５は、微粒子からなるＡｌＮ粉末を厚膜成形手段（印
刷、ドクターブレード、押しだし成形等）により成形し
たものである。また、基板１１には、実質的に同一の抵
抗特性を有する感熱抵抗素子１および感熱抵抗素子２
と、それぞれの両端に電気的に接続したパターンとが形
成されている。感熱抵抗素子１および感熱抵抗素子２
は、Ｐｔペーストが矩形状に印刷されたものである。ま
た、蓋１４および蓋１５には、通気孔１４１および通気
孔１５１が形成されている。FIG. 1 and FIG. 2 are a perspective view and an exploded perspective view of a main part of a heat conduction type absolute humidity sensor according to this embodiment. 1 and 2, the sensor has a housing 10 made of AlN. The housing 10 has a substrate 11, frames 12 and 13 disposed above and below the substrate 11, and lids 14 and 15 disposed above and below the substrate 11. Frame 1
2 and 13 and lids 14 and 15 are collectively called a container. Substrate 11, frame 12 and frame 13, lid 14 and lid 1
No. 5 is obtained by molding AlN powder composed of fine particles by thick film forming means (printing, doctor blade, extrusion molding, etc.). Further, the substrate 11 has a thermosensitive resistor 1 and a thermosensitive resistor 2 having substantially the same resistance characteristics.
And a pattern electrically connected to both ends thereof. Thermal resistance element 1 and thermal resistance element 2
Is a Pt paste printed in a rectangular shape. Further, a vent 141 and a vent 151 are formed in the lid 14 and the lid 15.
【００１３】本実施例による熱伝導式絶対湿度センサ
を、その製造方法に即して、さらに詳細に説明する。The heat conduction type absolute humidity sensor according to this embodiment will be described in more detail in accordance with a method of manufacturing the sensor.
【００１４】蓋１４、枠１２、基板１１、枠１３およ
び蓋１５を重ね合わせ、熱プレスを施して１６００〜１
７００℃にて焼結する。尚、感熱抵抗素子２は、公知の
手段により乾燥封入させる。The cover 14, the frame 12, the substrate 11, the frame 13 and the cover 15 are superimposed and subjected to hot pressing to form
Sinter at 700 ° C. The heat-sensitive resistance element 2 is dry-sealed by a known means.
【００１５】筐体１０の蓋１４上に、抵抗３および抵
抗４と、それぞれの一端に電気的に接続したパターン
と、それぞれの他端に電気的にそれぞれ接続した２つの
パターンとを形成する。即ち、抵抗３、抵抗４およびパ
ターンを、厚膜印刷により形成して６００〜１０００℃
にて焼結する。尚、抵抗３および抵抗４は、実質的に同
一の抵抗特性を有する。On the lid 14 of the housing 10, a resistor 3 and a resistor 4, a pattern electrically connected to one end thereof, and two patterns electrically connected to the other end thereof are formed. That is, the resistor 3, the resistor 4, and the pattern are formed by thick film printing,
Sintering. The resistors 3 and 4 have substantially the same resistance characteristics.
【００１６】感熱抵抗素子１の一端と感熱抵抗素子２
の一端との間、感熱抵抗素子１の他端と抵抗３の他端と
の間および感熱抵抗素子２の他端と抵抗４の他端との間
を、ワイヤ６のワイヤボンディング（半田付け等、他の
手段でもよい。）により電気的に接合する。One end of the thermal resistance element 1 and the thermal resistance element 2
Wire between the other end of the thermosensitive resistor 1 and the other end of the resistor 3 and between the other end of the thermosensitive resistor 2 and the other end of the resistor 4. , Or other means.).
【００１７】以上のようにして、熱伝導式絶対湿度セン
サが製造された。As described above, a heat conduction type absolute humidity sensor was manufactured.
【００１８】図３は、製造された熱伝導式絶対湿度セン
サのＡ−Ａ断面図である。図３において、本センサは、
感熱抵抗素子１が晒された測定雰囲気（大気）１００
と、感熱抵抗素子２が晒された基準雰囲気（乾燥空気）
２００とをそれぞれ規定している。FIG. 3 is a sectional view of the manufactured heat conduction type absolute humidity sensor taken along line AA. In FIG. 3, the sensor is
Measurement atmosphere (atmosphere) 100 to which the thermal resistance element 1 is exposed
And the standard atmosphere (dry air) to which the thermal resistance element 2 was exposed
200 respectively.
【００１９】得られた熱伝導式絶対湿度センサを、図５
に示す電気回路に組み込んだ。図５において、Ｒhtは感
熱抵抗素子１、Ｒt は感熱抵抗素子２、固定抵抗Ｒ1 は
抵抗３、Ｒ2 は抵抗４である。尚、図中、保護抵抗Ｒs
が含まれているが、本実施例においては感熱抵抗素子１
および２が白金抵抗であるため不要である。The obtained heat conduction type absolute humidity sensor is shown in FIG.
Was incorporated in the electric circuit shown in FIG. In FIG 5, R ht the heat-sensitive resistance elements 1, R t is the thermal resistance element 2, the fixed resistor R 1 is the resistance 3, R 2 is the resistance 4. Note that, in the drawing, the protection resistor R s
However, in the present embodiment, the heat-sensitive resistance element 1
It is not necessary because and 2 are platinum resistors.
【００２０】次に、本発明による熱伝導式絶対湿度セン
サの温度特性を測定した。測定結果を図６に示す。尚、
ブリッジバランスは２０℃においてとった。温度特性
は、任意の試料によって得られ、また、安定性は測定誤
差以内であった。Next, the temperature characteristics of the heat conduction type absolute humidity sensor according to the present invention were measured. FIG. 6 shows the measurement results. still,
Bridge balance was taken at 20 ° C. Temperature characteristics were obtained with any sample, and the stability was within the measurement error.
【００２１】尚、本実施例においては、基板および容器
は、セラミックにより構成されているが、測定雰囲気お
よび該基準雰囲気の熱特性が湿度以外の要因において同
一となればよく、例えば、電気的絶縁処理を施した金属
により構成してもよい。In this embodiment, the substrate and the container are made of ceramic. However, it is only necessary that the thermal characteristics of the measurement atmosphere and the reference atmosphere be the same except for the humidity. It may be composed of a treated metal.
【００２２】また、本実施例においては、ホイーストン
回路を用いたが、第１および第２の感熱抵抗素子は実質
的に同一の抵抗特性を有するものであって、第１および
第２の感熱抵抗素子の上昇温度差による第１および第２
の感熱抵抗素子の抵抗値差に基づいて測定雰囲気の湿度
を検出できる他の電気回路を構成してもよい。In this embodiment, the Wheatstone circuit is used. However, the first and second heat-sensitive resistance elements have substantially the same resistance characteristics, and the first and second heat-sensitive resistance elements are used. First and second due to the temperature difference between the resistance elements
Another electric circuit that can detect the humidity of the measurement atmosphere based on the resistance value difference of the heat-sensitive resistance element may be configured.
【００２３】[0023]
【発明の効果】本発明による熱伝導式絶対湿度センサ
は、第１および第２の感熱抵抗素子が同一面上に形成さ
れたセラミックから成る基板と、この基板に焼結接合さ
れ、測定雰囲気および基準雰囲気が湿度同一のときに同
一熱特性となるように測定雰囲気および基準雰囲気を規
定する、セラミックから成る容器とを有するため、測定
雰囲気と基準雰囲気との熱特性が均一となり、正確な湿
度検知が行える。このため、温度ドリフト、試料間の特
性バラツキ等を防止できる。According to the heat conduction type absolute humidity sensor of the present invention, a substrate made of ceramic having first and second heat-sensitive resistance elements formed on the same surface is sintered and bonded to the substrate to form a measurement atmosphere and Since there is a ceramic container that defines the measurement atmosphere and the reference atmosphere so that the reference atmosphere has the same thermal characteristics when the humidity is the same, the thermal characteristics of the measurement atmosphere and the reference atmosphere are uniform, and accurate humidity detection is performed. Can be performed. Therefore, it is possible to prevent a temperature drift, a variation in characteristics between samples, and the like.
【００２４】また、基板および容器のうち一方には、ブ
リッジ回路に用いられる２つの固定抵抗素子が形成され
ているため、溶接や人手による組立作業が不要であり、
工業的生産性に優れているばかりか、電気回路の殆んど
を含むため、湿度検出システムを簡素とすることができ
る。Further, since two fixed resistance elements used for the bridge circuit are formed on one of the substrate and the container, welding or manual assembling work is unnecessary.
Not only is it excellent in industrial productivity, but also because it includes most of the electrical circuits, the humidity detection system can be simplified.
【図１】本発明の一実施例による熱伝導式絶対湿度セン
サの斜視図である。FIG. 1 is a perspective view of a heat conduction type absolute humidity sensor according to an embodiment of the present invention.
【図２】図１に示す熱伝導式絶対湿度センサの要部の分
解斜視図である。FIG. 2 is an exploded perspective view of a main part of the heat conduction type absolute humidity sensor shown in FIG.
【図３】図１に示す熱伝導式絶対湿度センサの断面図で
ある。FIG. 3 is a sectional view of the heat conduction type absolute humidity sensor shown in FIG.
【図４】従来例による熱伝導式絶対湿度センサの断面図
である。FIG. 4 is a cross-sectional view of a heat conduction type absolute humidity sensor according to a conventional example.
【図５】本発明および従来例による熱伝導式絶対湿度セ
ンサが用いられる電気回路図である。FIG. 5 is an electric circuit diagram in which a heat conduction type absolute humidity sensor according to the present invention and a conventional example is used.
【図６】本発明による熱伝導式絶対湿度センサの温度特
性を示す図である。FIG. 6 is a diagram showing temperature characteristics of a heat conduction type absolute humidity sensor according to the present invention.
１、１´、２、２´ 感熱抵抗素子 ３、４ 固定抵抗素子 ６ ワイヤ ７ａ、７ｂ キャップ ８ ステム ９ 端子 １０ 筐体 １１ 基板 １２、１３ 枠 １４、１５ 蓋 １００ 測定雰囲気 ２００ 基準雰囲気 １４１、１５１ 通気孔 Ｖin 印加電圧 Ｖout 出力電圧 Ｒht、Ｒt 感熱抵抗 Ｒ1 、Ｒ2 、Ｒ3 固定抵抗 Ｒs 保護抵抗Reference numerals 1, 1 ', 2, 2' Thermal resistance element 3, 4 Fixed resistance element 6 Wire 7a, 7b Cap 8 Stem 9 Terminal 10 Housing 11 Substrate 12, 13, Frame 14, 15 Cover 100 Measurement atmosphere 200 Reference atmosphere 141, 151 vent V in applied voltage V out output voltage R ht, R t thermosensitive resistor R 1, R 2, R 3 fixed resistor R s protective resistor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 岩田 伸一 宮城県仙台市太白区郡山六丁目７番１号 株式会社トーキン内 (56)参考文献 特開 平１−193638（ＪＰ，Ａ) 特開 平２−213759（ＪＰ，Ａ) 特開 昭56−49951（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 27/00 - 27/24 G01N 25/00 - 25/72 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shinichi Iwata 6-7-1, Koriyama, Taishiro-ku, Sendai City, Miyagi Prefecture Tokinnai Co., Ltd. (56) References 2-213759 (JP, A) JP-A-56-49951 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01N 27/00-27/24 G01N 25/00-25 / 72
Claims (2)
された第１の感熱抵抗素子と、所定の湿度を有する基準
雰囲気に晒された第２の感熱抵抗素子とを備え、該第１
および第２の感熱抵抗素子は実質的に同一の抵抗特性を
有するものであって、前記第１および第２の感熱抵抗素
子それぞれに等しい電流量の電流を流し、該第１および
第２の感熱抵抗素子を自己発熱させ、該第１および第２
の感熱抵抗素子の上昇温度差による該第１および第２の
感熱抵抗素子の抵抗値差に基づいて前記測定雰囲気の湿
度を検出する熱伝導式絶対湿度センサにおいて、前記第
１および前記第２の感熱抵抗素子ならびに該第１および
該第２の感熱抵抗素子のそれぞれの両端に電気的に接続
した電気配線パターンが同一面上に形成されたセラミッ
クから成る基板と、該基板に焼結接合され、前記測定雰
囲気および前記基準雰囲気が湿度同一のときに同一熱特
性となるように該測定雰囲気および該基準雰囲気を規定
する、セラミックから成る容器とを有することを特徴と
する熱伝導式絶対湿度センサ。A first heat-sensitive resistance element exposed to a measurement atmosphere whose humidity is to be measured; and a second heat-sensitive resistance element exposed to a reference atmosphere having a predetermined humidity.
And the second heat-sensitive resistance elements have substantially the same resistance characteristics, and flow the same amount of current to each of the first and second heat-sensitive resistance elements, and The first and second resistance elements are caused to generate heat by themselves.
Of the thermal conduction absolute humidity sensor for detecting the humidity of the measurement atmosphere based on the resistance value difference between the first and second thermosensitive resistor elements by increasing the temperature difference between the heat sensitive resistance element, the first and the second thermosensitive resistor element and said first and
Electrically connected to both ends of the second thermosensitive resistance element
A substrate made of ceramic on which the formed electrical wiring pattern is formed on the same surface, and sinter-bonded to the substrate, and the measurement atmosphere and the reference atmosphere have the same thermal characteristics when the measurement atmosphere and the reference atmosphere have the same humidity. A heat conductive absolute humidity sensor comprising: a ceramic container that defines the reference atmosphere.
された第１の感熱抵抗素子と、所定の湿度を有する基準
雰囲気に晒された第２の感熱抵抗素子と、２つの固定抵
抗素子とを備え、該第１および第２の感熱抵抗素子と該
２つの固定抵抗素子とはそれぞれ実質的に同一の抵抗特
性を有するものであって、前記第１および第２の感熱抵
抗素子は互いに直列接続されたブリッジ回路を有し、前
記互いに直列接続された第１および第２の感熱抵抗素子
の両端に電圧を印加して、該第１および第２の感熱抵抗
素子を自己発熱させ、該第１および第２の感熱抵抗素子
の上昇温度差による該第１および第２の感熱抵抗素子の
抵抗値差に基づいて前記測定雰囲気の湿度を検出する熱
伝導式絶対湿度センサにおいて、前記第１および前記第
２の感熱抵抗素子ならびに該第１および該第２の感熱抵
抗素子のそれぞれの両端に電気的に接続した電気配線パ
ターンが同一面上に形成されたセラミックから成る基板
と、該基板に焼結接合され、前記測定雰囲気および前記
基準雰囲気が湿度同一のときに同一熱特性とするように
該測定雰囲気および該基準雰囲気を規定する、セラミッ
クから成る容器とを有し、前記基板および該容器のうち
一方には、前記２つの固定抵抗素子が形成されているこ
とを特徴とする熱伝導式絶対湿度センサ。2. A first heat-sensitive resistance element exposed to a measurement atmosphere whose humidity is to be measured, a second heat-sensitive resistance element exposed to a reference atmosphere having a predetermined humidity, and two fixed resistance elements. Wherein the first and second thermal resistance elements and the two fixed resistance elements have substantially the same resistance characteristics, respectively, and the first and second thermal resistance elements are in series with each other. Having a bridge circuit connected thereto, applying a voltage to both ends of the first and second thermosensitive resistance elements connected in series with each other to cause the first and second thermosensitive resistance elements to self-generate heat, A heat conduction type absolute humidity sensor for detecting humidity of the measurement atmosphere based on a difference in resistance between the first and second thermosensitive resistance elements due to a temperature rise between the first and second thermosensitive resistance elements, wherein a second heat-sensitive resistance element In addition, the first and second heat-sensitive resistors
An electric wiring path electrically connected to both ends of each resistance element
A ceramic substrate having turns formed on the same surface; and a sinter-bonded substrate, wherein the measurement atmosphere and the reference atmosphere have the same thermal characteristics when the measurement atmosphere and the reference atmosphere have the same humidity. And a container made of ceramic, wherein the two fixed resistance elements are formed on one of the substrate and the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04025096A JP3106324B2 (en) | 1992-02-12 | 1992-02-12 | Thermal conductivity type absolute humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04025096A JP3106324B2 (en) | 1992-02-12 | 1992-02-12 | Thermal conductivity type absolute humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05223770A JPH05223770A (en) | 1993-08-31 |
| JP3106324B2 true JP3106324B2 (en) | 2000-11-06 |
Family
ID=12156402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04025096A Expired - Fee Related JP3106324B2 (en) | 1992-02-12 | 1992-02-12 | Thermal conductivity type absolute humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3106324B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2184055C (en) * | 1994-12-29 | 2001-12-18 | Mitsuteru Kimura | Humidity sensor |
| KR100396661B1 (en) * | 2000-11-21 | 2003-09-02 | 엘지전자 주식회사 | bolometric humidity sensor and structure for installing it in MWO |
| DE10251130B4 (en) * | 2002-11-02 | 2005-04-21 | Dräger Medical AG & Co. KGaA | Sample gas cuvette for a device for measuring the concentration of a paramagnetic gas |
| EP2645091B1 (en) * | 2012-03-30 | 2018-10-17 | ams international AG | Integrated circuit comprising a gas sensor |
-
1992
- 1992-02-12 JP JP04025096A patent/JP3106324B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05223770A (en) | 1993-08-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4307373A (en) | Solid state sensor element | |
| US4298855A (en) | Conductive polymer film humidity sensor | |
| US4649364A (en) | Bifunctional environment sensor | |
| JP3343801B2 (en) | Humidity sensor | |
| US4770541A (en) | Heat radiation sensing device | |
| JP3106324B2 (en) | Thermal conductivity type absolute humidity sensor | |
| JPH08184575A (en) | Humidity sensor | |
| JPH04244952A (en) | Humidity sensor | |
| JPH0220681Y2 (en) | ||
| JP3413274B2 (en) | Thermal conductivity type absolute humidity sensor | |
| JP3326727B2 (en) | Manufacturing method of thermal conductivity type absolute humidity sensor | |
| JPH053973Y2 (en) | ||
| JPH06242048A (en) | Thermal conduction type absolute humidity sensor | |
| JPH04353753A (en) | Humidity sensor | |
| JPS6158775B2 (en) | ||
| JPS6242368Y2 (en) | ||
| JPH10282029A (en) | Humidity detector | |
| JPH0312701B2 (en) | ||
| JPS6142122Y2 (en) | ||
| JPH07260731A (en) | Heat conduction type abosulte humidity sensor | |
| JP3282048B2 (en) | Heat removal atmosphere detection device and atmosphere sensor for heat removal atmosphere detection device | |
| JPS61112953A (en) | Apparatus for detecting external atmosphere | |
| JPH0447658Y2 (en) | ||
| JPS6144261B2 (en) | ||
| JPH04244951A (en) | Dewing sensor and preparation thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20000809 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090908 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100908 Year of fee payment: 10 |
|
| LAPS | Cancellation because of no payment of annual fees |